CN106441173A - Position correcting tool and X-ray position measurement device - Google Patents

Abstract

The objective of the invention is to provide a position correcting tool and an X-ray position measurement device, which can rapidly adjust an emitting center of an X-ray emitter and an optical axis of an X-ray camera at a high precision. A position correcting tool of the X-ray position measurement device is used for shooting an image of X-ray emitted by the X-ray emitter by using the X-ray camera and aligning the emitting center of an X-ray emitter and the optical axis of the X-ray camera of the X-ray position measurement device for measuring a measuring object. The position correction tool includes a first penetrating portion for allowing the X-ray emitted by the X-ray emitter to penetrate; and a second penetrating portion for allowing the X-ray penetrating the first penetrating portion to penetrate and to be projected on the X-ray camera. The position correction tool projects a first projection image of the X-ray penetrating the first penetrating portion and a second projection image of the X-ray penetrating the second penetrating portion to the X-ray camera.

Description

Tool for position correction and X-ray position measuring device

technical field

The present invention relates to a tool for position correction and an X-ray position measuring device.

Background technique

An X-ray position measurement device that measures the position of a printing plate using an X-ray emitter and an X-ray camera is known (Patent Document 1). In such an X-ray position measuring device, when the emission center of the X-ray emitter does not coincide with the optical axis of the X-ray camera, distortion occurs in an image captured by the X-ray camera, and accurate positioning cannot be performed. Therefore, in such an X-ray position measuring device, adjustment is performed so that the emission center of the emitter coincides with the optical axis of the X-ray camera.

Patent Document 1: Japanese Patent Laid-Open No. 2012-88170

In this way, when adjusting the emission center of the emitter to coincide with the optical axis of the X-ray camera, it is hoped that the adjustment will not delay work, and the emission center of the emitter and the light axis of the X-ray camera can be accurately adjusted within a short adjustment time. Axis-aligned adjustments.

Contents of the invention

In view of the above problems, the object of the present invention is to provide a tool for position correction that can quickly and accurately adjust the emission center of an X-ray emitter and the optical axis of an X-ray camera, and an X-ray system that can use such a tool for position correction. Ray position measuring device.

(1) In order to achieve the above object, one aspect of the present invention is a position correction tool, the position correction tool is a position correction tool of an X-ray position measuring device, and the X-ray position measuring device uses an X-ray camera The object to be measured is measured by taking an image based on the X-rays emitted from the X-ray emitter, and the position correction tool makes the X-ray emission center of the X-ray emitter in the X-ray position measuring device and The optical axis of the X-ray camera is aligned, wherein the position correction tool has: a first transmission part that transmits X-rays emitted from the X-ray emitter side; and a second transmission part that transmits The X-rays transmitted through the first transmission part are transmitted and projected onto the X-ray camera, and the position correction tool is based on the first projection based on the X-rays transmitted through the first transmission part. An image and a second projected image based on X-rays transmitted through the second transmission unit are projected to the X-ray camera.

(2) Furthermore, in the position correction tool according to one aspect of the present invention, the first transmission part and the second transmission part may have holes through which X-rays pass.

(3) Furthermore, in the position correction tool according to one aspect of the present invention, the diameter of the hole of the first transmission part may be smaller than the diameter of the hole of the second transmission part.

(4) Furthermore, in the position correction tool according to the aspect of the present invention, the thickness of the member of the first transmission part may be thinner than the thickness of the member of the second transmission part.

(5) Furthermore, in the position correction tool according to one aspect of the present invention, the first transmission part and the second transmission part may be formed of members having different X-ray transmittances.

(6) Furthermore, in the position correction tool according to one aspect of the present invention, the member of the first transmission part may be aluminum, and the member of the second transmission part may be brass.

(7) In order to achieve the above object, an X-ray position measuring device according to an aspect of the present invention includes: an X-ray emitter and an X-ray camera; a workpiece mounting table on which an object to be measured is placed; The X-ray emitter moves relative to the measurement object on the workpiece mounting table along the surface of the workpiece mounting table; the second moving part moves the X-ray camera relative to the measurement object on the workpiece mounting table The object moves along the surface of the workpiece mounting table; the image display unit projects the X-rays emitted from the X-ray emitter and transmitted through the measurement object on the image display as two different X-ray projection images. part; and the above-mentioned tool for position correction, the X-ray position measuring device makes at least one of the first moving part and the second moving part One side is moved so that the X-ray emission center of the X-ray emitter coincides with the optical axis of the X-ray camera.

Invention effect

According to the present invention, two different X-ray projection images can be used to quickly and accurately adjust the X-ray emission center of the X-ray emitter to coincide with the optical axis of the X-ray camera.

Description of drawings

FIG. 1 is a perspective view showing an overall configuration of an X-ray position measuring device capable of position adjustment by a position correction tool according to an embodiment of the present invention.

Fig. 2 is a schematic side view seen from the -Y direction of the X-ray position measuring device.

FIG. 3 is a functional block diagram illustrating a hardware configuration of the X-ray position measuring device.

Fig. 4 is a side sectional view of the position correction tool according to the first embodiment.

(A) and (B) of FIG. 5 are explanatory diagrams of image analysis of the position correction tool of the first embodiment.

(A) and (B) of FIG. 6 are explanatory views of optical axis adjustment using the position correction tool of the first embodiment.

(A) and (B) of FIG. 7 are explanatory diagrams of optical axis adjustment using the position correction jig of 1st Embodiment.

FIG. 8 is a flowchart illustrating a process for adjusting the X-ray emission center of the X-ray emitter to coincide with the optical axis of the X-ray camera using the position correction tool according to the first embodiment.

(A) and (B) of FIG. 9 are explanatory diagrams of image analysis of the position correction tool of the second embodiment.

(A) and (B) of FIG. 10 are explanatory diagrams of image analysis of the position correction tool of the third embodiment.

Label description

10: X-ray position measuring device; 10a: X-ray emitter; 10b: X-ray camera; 10c: workpiece mounting table; 21: 2nd X motor; 22: 2Y motor; 31: 3X motor; 32: 3Y Motor; 81: controller; 101, 201, 301: tools for position correction; 112a, 212a, 312a: bottom surface (first transmission part); 112b, 212b, 312b: bottom surface (second transmission part); 113a, 113b, 213a, 213b, 313a, 313b: holes.

detailed description

Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1 is a perspective view showing an example of an X-ray position measuring device that uses an X-ray emitter and an X-ray camera to measure the position of a printing plate, and FIG. 2 is viewed from the -Y direction of the X-ray position measuring device 10. Schematic side view of . In such an X-ray position measuring device 10 , the position correction tool according to the embodiment of the present invention is used when adjusting the emission center of the emitter to coincide with the optical axis of the X-ray camera.

As shown in FIGS. 1 and 2 , the X-ray position measuring device 10 has an X-ray emitter 10a, an X-ray camera 10b, and a rectangular frame-shaped workpiece mounting table 10c. As shown in FIG. 2 , a multilayer printed circuit board 70 is placed on the workpiece mounting table 10c.

The X-ray position measuring device 10 also has: a base 10d, which is square in plan view, and is installed on the floor or a workbench; The central portion is erected upward (+Z direction). Each side of the base 10d is along the left-right direction (±X direction), the front-rear direction (±Y direction), and the up-down direction (±Z direction), and the standing plate 10e extends in the left-right direction. The workpiece mounting table 10c is arranged in parallel to the upper surface of the base 10d.

The X-ray emitter 10a and the X-ray camera 10b are disposed in the opening of the workpiece mounting table 10c so as to face each other vertically with a predetermined distance therebetween. The X-rays emitted from the X-ray emitter 10a and transmitted through the multilayer printed board are captured as X-ray projection images on the light receiving surface of the X-ray camera 10b.

The X-ray camera 10b is supported by a Z-direction moving body 15 having an L-shaped cross section, and the Z-direction moving body 15 is supported so as to be movable in the vertical direction relative to the rectangular first X-direction moving body 13 by a pair of first rails 51. . Moreover, the Z-direction movable body 15 can be guided by the pair of first rails 51 via the Z motor 43 disposed on the first X-direction movable body 13, and can be guided in a direction (up and down) with respect to the first X-direction movable body 13 in a direction perpendicular to the workpiece mounting table surface. direction) to move up. This pair of 1st rail 51 is arrange|positioned at the substantially center part of the side surface of the +Y side of the 1st X direction moving body 13 so that it may extend along a Z direction.

The 1st X direction moving body 13 can move to the X direction with respect to the standing board 10e by the pair of 2nd rail 52. As shown in FIG. The pair of second rails 52 is disposed on the upper and lower peripheral edge portions of the side surface on the +Y side of the standing plate 10e so as to extend in the X direction. And the 1st X direction moving body 13 is guided by the 2nd rail 52 by the 1st X motor 11 arrange|positioned at the erecting installation board 10e, and can move in the X direction along the erecting installation board 10e. Furthermore, the X-ray camera 10 b can move within a small range in the X direction and the Y direction relative to the Z direction moving body 15 by the third X motor 31 and the third Y motor 32 arranged on the Z direction moving body 15 .

The X-ray emitter 10a is placed on the rectangular plate-shaped second X-direction movable body 14, which can move in the X direction with respect to the base 10d by using a pair of third rails 53 extending along the X direction. move up. And the 2nd X direction moving body 14 is guided by the 3rd rail 53 via the 2nd X motor 21 arrange|positioned at 10 d of bases, and can move in the X direction with respect to 10 d of bases. A pair of 3rd rail 53 and 2nd X motor 21 are arrange|positioned in the bottom surface of 10 f of groove parts formed in the center part of base 10d so that it may extend along an X direction. Furthermore, the X-ray emitter 10 a can move within a small range in the Y direction with respect to the second X-direction movable body 14 via the second Y motor 22 arranged on the second X-direction movable body 14 .

In this way, the X-ray emitter 10a and the X-ray camera 10b can independently move along the workpiece mounting table surface with respect to the multilayer printed board on the workpiece mounting table 10c via the first X motor 11 and the second X motor 21 .

The workpiece mounting table 10c is movable in the Y direction with respect to the base 10d by the pair of third rails 54 . The third rail 54 is arranged on the left and right peripheral edge parts of the base 10d so as to extend along the Y direction. Furthermore, the workpiece mounting table 10c is guided by the third rail 54 via the fourth Y motor 42 arranged on the base 10d, and can move in the Y direction relative to the base 10d.

Furthermore, the position correction tool 101 is installed between the X-ray camera 10b and the X-ray emitter 10a. The position correction tool 101 is used to align the X-ray emission center of the X-ray emitter 10a with the optical axis of the X-ray camera 10b. The position correction tool 101 is molded into a cylindrical shape, and has side surfaces 111 and bottom surfaces 112a and 112b at both ends of the cylinder. The bottom surface 112a is arranged on the X-ray emitter 10a side, and the bottom surface 112b is arranged on the X-ray camera 10b side.

FIG. 3 is a functional block diagram illustrating the hardware configuration of the X-ray position measuring device 10 . As shown in Figure 3, the X-ray position measuring device 10 has: a controller 81 with a CPU (Central Processing Unit, central processing unit), an image display unit 45, an X-ray emitter drive unit 46, a storage unit 47 and an input unit 48. The above-mentioned image display unit 45 , X-ray emitter drive unit 46 , storage unit 47 and input unit 48 are respectively connected to the controller 81 .

In addition, the servo motor group 44 for driving each component of the above-mentioned X-ray position measuring device 10 , that is, the above-mentioned first X motor 11 , second X motor 21 , Z motor 43 , and second Y motor 22 is connected to the controller 81 . , the 3rd X motor 31 , the 3rd Y motor 32 and the 4th Y motor 42 .

The image display unit 45 is connected to the X-ray camera 10b, and projects an X-ray projected image projected onto the light receiving surface of the X-ray camera 10b. Furthermore, the controller 81 performs image processing on the X-ray projection image displayed on the display screen of the image display unit 45 .

The X-ray emitter driving unit 46 is connected to the X-ray emitter 10 a, and emits X-rays from the X-ray emitter 10 a or stops the emission based on input information from the input unit 48 . The storage unit 47 includes nonvolatile memories such as RAM (Random Access Memory), ROM (Read Only Memory), and semiconductor memory. The program executed by the controller 81, various parameters required for the execution of the program, and various parameters for driving the servo motor unit 44 to move the X-ray emitter 10a and the X-ray camera 10b are stored in the storage unit 47. information.

The input unit 48 is configured including a power switch, an operation panel for inputting commands to the X-ray position measuring device 10 , and the like, and accepts input from a user. An instruction from the user is input via the input unit 48 and notified to the controller 81 .

Next, the position correction tool 101 according to the first embodiment will be described. As shown in FIGS. 1 and 2 , an X-ray position measurement device 10 captures an X-ray image from an X-ray emitter 10 a using an X-ray camera 10 b to measure the position of a multilayer printed circuit board. In such an X-ray position measuring device 10 , it is necessary to align the X-ray emission center of the X-ray emitter 10 a with the optical axis of the X-ray camera 10 b in advance. In such an X-ray position measuring device 10 , the position correction jig 101 of this embodiment is used to align the X-ray emission center of the X-ray emitter 10 a with the optical axis of the X-ray camera 10 b.

FIG. 4 is a side cross-sectional view of the position correction tool 101 according to this embodiment. As shown in FIG. 4 , the position correction tool 101 is formed into a cylindrical shape, and has a side surface 111, a bottom surface 112a (first transmission part) and a bottom surface 112b (second transmission part) at both ends of the cylinder. . The bottom portion 112a is molded from a member having higher X-ray transmittance than the members constituting the bottom portion 112b (easily transmits X-rays), for example, aluminum. A circular hole 113a is formed at the center of the bottom surface portion 112a. The bottom portion 112b is molded with a member having a low X-ray transmittance (hard to transmit X-rays), for example, brass. A circular hole 113b is formed at the center of the bottom surface portion 112b. The diameter of the hole 113a of the bottom surface 112a is smaller than the diameter of the hole 113b of the bottom surface 112b. A flange portion 115 is provided on the side portion 111 .

In addition, in this example, the side surface 111 and the bottom surface 112b are molded integrally with, for example, brass, and the bottom surface 112a is molded with, for example, aluminum and fitted into the end surface of the tool 101 for position correction. However, the bottom surface 112a can be processed arbitrarily. and the bottom portion 112b.

In addition, although the bottom part 112a is made of aluminum and the bottom part 112b is made of brass here, any member may be used as long as it is a combination of members with different X-ray transmittances. For example, resin may be used instead of aluminum for the bottom portion 112a. In addition, instead of brass, iron, copper, or stainless steel may be used for the bottom portion 112b.

In addition, in this example, the thickness of the bottom surface part 112a and the bottom surface part 112b is thinner than the thickness of the side surface part 111. This is to improve position detection accuracy.

As described above, in the position correction tool 101 of the present embodiment, one bottom portion 112a is molded from, for example, aluminum, the other bottom portion 112b is molded from, for example, brass, and the one bottom portion 112a and the other bottom surface are molded. Part 112b uses members with different X-ray transmittances. Furthermore, the first projection image based on the X-rays transmitted through the bottom surface 112a (first transmission part) and the second projection image based on the X-rays transmitted through the bottom surface 112b (second transmission part) are projected onto the X-ray camera 10b. Therefore, the projection image of the hole 113a of the bottom surface portion 112a and the projection image of the hole 113b of the bottom surface portion 112b can be distinguished and detected from the image captured by the X-ray camera 10b.

FIG. 5 is an explanatory diagram of image analysis of the position correction tool 101 according to this embodiment. In FIG. 5 , P101 represents the X-ray focal point from the X-ray emitter 10 a. P102 represents the light receiving surface of the X-ray camera 10b. G100 represents an image captured by the X-ray camera 10b.

In (A) of FIG. 5 , X-rays from the X-ray focal point P101 are irradiated to one bottom surface portion 112a. Among the X-rays reaching the bottom surface portion 112a, the X-rays irradiated to the hole 113a directly pass through and reach the other bottom surface portion 112b. Here, the bottom portion 112a is formed of aluminum with high X-ray transmittance. Therefore, part of the X-rays irradiated to the bottom surface portion 112a passes through the bottom surface portion 112a and reaches the other bottom surface portion 112b.

The bottom portion 112b is molded from brass. Brass nearly cuts off X-rays. Therefore, among the X-rays reaching the bottom portion 112b, the X-rays irradiating the hole 113b pass through directly and reach the light receiving surface of the X-ray camera 10b, and the X-rays reaching the periphery of the hole 113b are intercepted by the bottom portion 112b.

In this way, when the position correction tool 101 is installed between the X-ray emitter 10a and the X-ray camera 10b, in the traveling direction of the X-rays emitted from the X-ray emitter 10a, the first transmission part There are two transmission parts, the bottom surface 112a and the bottom surface 112b as the second transmission part. Furthermore, in the bottom surface portion 112a on the side of the X-ray emitter 10a, all the X-rays are transmitted through the part of the hole 113a, and part of the X-rays are transmitted through the other parts. In addition, in the bottom surface portion 112b on the side of the X-ray camera 10b, all the X-rays are transmitted through the portion of the hole 113b, and the X-rays are blocked by the other portions.

Thereby, the captured image G100 of the X-ray camera 10b is as shown in (B) of FIG. 5 . That is, as shown in (B) of FIG. 5 , in the captured image G100 of the X-ray camera 10 b , the periphery is the darkest, and a circular image Q102 is formed inside it. The darkest portion is a portion where X-rays are cut off by the bottom surface portion 112b made of, for example, brass. Since the hole 113b of the bottom surface 112b is larger than the hole 113a of the bottom surface 112a, the portion of the circular image Q102 is an image of the hole 113b of the bottom surface 112b. Furthermore, a slightly brightened portion is generated inside the circular image Q102, and a circular image Q101 is generated inside it. The slightly brightened portion inside the circular image Q102 is a portion through which X-rays pass through the bottom surface 112a made of, for example, aluminum, and the circular image Q101 is an image of the hole 113a of the bottom surface 112a. In this way, in the captured image G100 of the X-ray camera 10b, the image Q102 of the hole 113b is reflected in the center of the projected image of the darkest part, and the image of the hole 113a is reflected in the center of the projected image of the slightly brighter part. Q101 as the brightest image. Therefore, by detecting the brightness of the image, the positions of the image Q101 of the hole 113a of the bottom surface 112a and the image Q102 of the hole 113b of the bottom surface 112b on the image G100 captured by the X-ray camera 10b can be detected separately. If the position of the image Q101 of the hole 113a of the bottom portion 112a and the position of the image Q102 of the hole 113b of the bottom portion 112b on the image G100 captured by the X-ray camera 10b can be detected, X-ray radiation can be performed as described below. The X-ray emission center of the emitter 10a is adjusted to coincide with the optical axis of the X-ray camera 10b.

6 and 7 are explanatory views of optical axis adjustment using the position correction tool 101 of this embodiment.

FIG. 6 shows a case where the X-ray emission center of the X-ray emitter 10a coincides with the optical axis of the X-ray camera 10b. As shown in FIG. 6(A), if the X-ray emission center of the X-ray emitter 10a, the optical axis of the X-ray camera 10b, and the center of the position correction tool 101 coincide completely, the two circles of the position correction tool 101 The centers of the shaped holes 113a and 113b are located on a line connecting the positions of the X-ray focal point P101 of the X-ray emitter 10a and the position of the image sensor C101 of the X-ray camera 10b. Therefore, as shown in FIG. 6(B), in the captured image G100 of the X-ray camera 10b, the image sensor C101 of the captured image G100 is used so that the center of the image Q101 of the hole 113a coincides with the center of the image Q102 of the hole 113b. way to take X-ray images.

In contrast, FIG. 7 shows a case where the X-ray emission center of the X-ray emitter 10a is shifted from the optical axis of the X-ray camera 10b. As shown in (A) of Figure 7, when the center of the X-ray emission center of X-ray emitter 10a and the optical axis of X-ray camera 10b staggered, as shown in (B) of Figure 7, the image Q101 in hole 113a A deviation occurs between the center of the hole 113b and the center of the image Q102 of the hole 113b.

Thus, the X-ray position measuring device 10 analyzes the image G100 captured by the X-ray camera 10b, detects the position of the image Q101 of the hole 113a and the position of the image Q102 of the hole 113b, and thereby measures the X-ray emission center of the X-ray emitter 10a. The deviation from the optical axis of the X-ray camera 10b is corrected.

FIG. 8 is a flowchart illustrating a process for adjusting the X-ray emission center of the X-ray emitter 10a to coincide with the optical axis of the X-ray camera 10b using the position correction tool 101 according to this embodiment. In the processing shown in FIG. 8, first, in steps S102 to S104, the center position of the image Q102 of the hole 113b arranged on the bottom surface portion 112b of the X-ray camera 10b side is aligned with the image sensor C101 of the X-ray camera 10b. consistent processing. Next, in steps S105 to S106, processing is performed to align the center position of the image Q101 of the hole 113a disposed on the bottom portion 112a of the X-ray emitter 10a side with the image sensor C101 of the X-ray camera 10b. If the above processing ends, then the center position of the image Q101 of the hole 113a of the bottom portion 112a, the center position of the image Q102 of the hole 113b of the bottom portion 112b, and the image sensor C101 of the X-ray camera 10b become completely consistent, thus as shown in FIG. 6 The X-ray emission center of the shown X-ray emitter 10a and the optical axis of the X-ray camera 10b become coincident.

In FIG. 8, the controller 81 moves the X-ray camera 10b and the X-ray emitter 10a to the vicinity of the tool 101 for position correction (step S101). Then, the X-ray camera 10b receives the X-rays from the X-ray emitter 10a, obtains an X-ray projection image, and projects it on the image display unit 45 (step S102).

After acquiring the X-ray image in step S102, the controller 81 detects the amount of deviation between the center position of the image Q102 of the hole 113b and the image sensor C101 of the X-ray camera 10b based on the X-ray projection image, and determines the center of the image Q102 of the hole 113b. Whether or not the amount of deviation between the position and the image sensor C101 of the X-ray camera 10b is within a predetermined value (step S103).

If the deviation between the center position of the image Q102 of the hole 113b and the image sensor C101 of the X-ray camera 10b is not within the prescribed value (step S103: No), the controller 81 sets the center position of the image Q102 of the hole 113b to the distance between the image sensor C101 of the X-ray camera 10b. The position of the X-ray camera 10b is moved so as to match the image sensor C101 (step S104).

That is, the position of the X-ray camera 10 b can be moved in the X direction and the Y direction by the third X motor 31 and the third Y motor 32 . The controller 81 issues a command to the servo motor unit 44 to move the third X motor 31 and the third Y motor 32 so that the center position of the image Q102 of the hole 113b coincides with the position of the image sensor C101 of the X-ray camera 10b.

After the controller 81 moves the position of the X-ray camera 10b, the process returns to step S102. In step S102 , an X-ray image is acquired using the X-ray camera 10 b and is projected on the image display unit 45 . Then, in step S103, the controller 81 determines whether or not the amount of deviation between the center position of the image Q102 of the hole 113b and the image sensor C101 of the X-ray camera 10b is within a predetermined value.

If it is determined that the deviation between the center position of the image Q102 of the hole 113b and the image sensor C101 of the X-ray camera 10b is within a predetermined value (step S103: Yes), the controller 81 detects the image of the hole 113a on the X-ray emitter 10a side. The amount of deviation between the center position of Q101 and the image sensor C101 of the X-ray camera 10b determines whether the amount of deviation between the center position of the image Q101 of the hole 113a and the image sensor C101 of the X-ray camera 10b is within a predetermined value (step S105).

If in step S105 the deviation between the center position of the image Q101 of the hole 113a and the image sensor C101 of the X-ray camera 10b is not within the prescribed value (step S105: No), the controller 81 sets the center position of the image Q101 of the hole 113a The position of the X-ray emitter 10a is moved in conformity with the image sensor C101 of the X-ray camera 10b (step S106).

That is, the position of the X-ray emitter 10 a can be moved in the X direction and the Y direction by the second X motor 21 and the second Y motor 22 . The controller 81 issues a command to the servo motor unit 44 to move the second X motor 21 and the second Y motor 22 so that the center position of the image Q101 of the hole 113a coincides with the position of the image sensor C101 of the X-ray camera 10b.

After the controller 81 moves the position of the X-ray emitter 10a, it returns the process to step S102. In step S102 , an X-ray image is obtained using the X-ray camera 10 b and projected on the image display unit 45 . Then, in step S103, the controller 81 determines whether or not the amount of deviation between the center position of the image Q102 of the hole 113b and the image sensor C101 of the X-ray camera 10b is within a predetermined value.

In addition, the process of making the center position of the image Q102 of the hole 113b coincide with the image sensor C101 of the X-ray camera 10b again in steps S102 and S103 is because: since the position of the X-ray emitter 10a is moved in step S106, Therefore, the relationship between the center position of the image Q102 of the hole 113b and the image sensor C101 of the X-ray camera 10b may be disturbed.

If the center position of the image Q102 of the hole 113b and the image sensor C101 of the X-ray camera 10b deviate within a predetermined value in step S103 (step S103: Yes), then in step S105, the controller 81 detects the image of the hole 113a. The amount of deviation between the center position of Q101 and the image sensor C101 of the X-ray camera 10b determines whether the amount of deviation between the center position of the image Q101 of the hole 113a and the image sensor C101 of the X-ray camera 10b is within a predetermined value (step S105).

If it is determined in step S105 that the center position of the image Q101 of the hole 113a is within a predetermined value from the image sensor C101 of the X-ray camera 10b (step S105: YES), the position correction process ends.

In step S105, if the center position of the image Q101 of the hole 113a is not within a predetermined value from the image sensor C101 of the X-ray camera 10b (step S105: NO), the processes of steps S102 to S105 are repeated. Then, if it is determined in step S103 that the deviation between the center position of the image Q102 of the hole 113b and the image sensor C101 of the X-ray camera 10b is within a predetermined value, and it is determined in step S105 that the center position of the image Q101 of the hole 113a is within a predetermined value. If the amount of deviation of the image sensor C101 of the X-ray camera 10b is within a predetermined value, the position correction process ends.

Here, the correction value (movement amount) of the X-ray emitter 10a and the X-ray camera 10b can be stored in the storage unit 47, and used as the next time to make the X-ray emission center of the X-ray emitter 10a and the X-ray camera 10b move. Correction value for adjusting the optical axes to align. Thereby, the optical axis alignment of the X-ray emitter 10a and the X-ray camera 10b can be performed rapidly.

<Second embodiment>

Next, a second embodiment will be described. FIG. 9 is an explanatory diagram of image analysis of the position correction tool 201 according to this embodiment. As shown in FIG. 9 , the position correction tool 201 of this embodiment is formed into a cylindrical shape, and has a side surface 211, a bottom surface 212a (first transmission portion) at both ends of the cylinder, and a bottom surface 212b (second transmission portion). through the section). A flange portion 215 is provided on the side portion 211 . The bottom parts 212a and 212b are the same member, and the thickness of the bottom part 212a is formed to be thinner than the thickness of the bottom part 212b. As the material for the bottom parts 212a and 212b, it is conceivable to use a material that transmits X-rays to a certain extent and can be easily processed, for example, aluminum or resin. A circular hole 213a is formed in the bottom portion 212a. A circular hole 213b is formed in the bottom portion 212b. The diameter of the hole 213a of the bottom surface part 212a is smaller than the diameter of the hole 213b of the bottom surface part 212b.

In addition, in FIG. 9 , P201 represents the X-ray focal point from the X-ray emitter 10 a. P202 represents the light receiving surface of the X-ray camera 10b. G200 represents an image captured by the X-ray camera 10b. Q201 shows the image of the hole 213a of the bottom surface 212a, and Q202 shows the image of the hole 213b of the bottom surface 212b.

In this embodiment, by making the thickness of the bottom surface 212a (first transmission part) and the thickness of the bottom surface 212b (second transmission part) different, it is possible to distinguish the bottom surface 212a from the image G200 captured by the X-ray camera 10b. The image Q201 of the hole 213a and the image Q202 of the hole 213b of the bottom portion 212b.

That is, in (A) of FIG. 9 , X-rays from the X-ray focal point P201 are irradiated to one bottom surface portion 112 a. Here, the bottom portion 212a is formed of a thinner material, and a hole 213a is formed at the center thereof. Among the X-rays reaching the bottom surface portion 212a, the X-rays irradiated to the hole 213a directly reach the other bottom surface portion 212b. In addition, since the bottom surface 212a is made of a thin material, part of the X-rays irradiated around the hole 213a of the bottom surface 212a passes through the bottom surface 212a and reaches the other bottom surface 212b.

The bottom portion 212b is formed of a thick material. Therefore, among the X-rays reaching the bottom portion 212b, the X-rays irradiated to the hole 213b directly reach the light-receiving surface of the X-ray camera 10b, and the X-rays irradiated around the hole 213b are almost cut off at the bottom 212b. That is, in this embodiment, since the thickness of the bottom surface part 212a and the bottom surface part 212b are different, even if the material is the same, the X-ray transmittance will differ.

Thereby, the captured image G200 of the X-ray camera 10b is as shown in (B) of FIG. 9 . That is, as shown in (B) of FIG. 9 , the projected image passing through the bottom surface portion 212 a is a projected image of a slightly brighter portion, and the image Q201 of the hole 213 a is reflected as the brightest portion at the center thereof. In addition, the projected image cut off at the bottom surface portion 212b becomes a projected image of a dark portion, and an image Q202 of the hole 213b is reflected at the center thereof.

Thus, in this embodiment, by making the thickness of the bottom surface 212a (first transmission part) and the bottom surface 212b (second transmission part) different, the image Q201 of the hole 213a of the bottom surface 212a and the bottom surface can be detected separately. The position of the image Q202 of the hole 213b of the portion 212b. Other configurations are the same as those of the first embodiment.

<third embodiment>

Next, a third embodiment will be described. FIG. 10 is an explanatory diagram of image analysis of the position correction tool 301 according to this embodiment. As shown in FIG. 10 , the position correction tool 301 of this embodiment is molded into a cylindrical shape, and has side surfaces 311, bottom surfaces 312a (first transparent parts) and bottom surfaces 312b (first transmission parts) at both ends of the cylinder. 2 through the section). A flange portion 315 is provided on the side surface portion 311 . The bottom parts 312a and 312b are the same member, and the material of the same thickness can be used. A hole 313a is formed in the bottom surface portion 312a. The hole 313a has a shape such as a small circle at the center and a cross-shaped groove extending around it. A circular hole 313b is formed in the bottom portion 312b.

In addition, in FIG. 10, P301 has shown the X-ray focal point from the X-ray emitter 10a. P302 represents the light receiving surface of the X-ray camera 10b. G300 represents an image captured by the X-ray camera 10b. Q301 shows the image of the hole 313a of the bottom surface 312a, and Q302 shows the image of the hole 313b of the bottom surface 312b.

In this embodiment, the hole 313a of the bottom surface 312a has a small circular center with a cross-shaped groove extending around it, and the hole 313b of the bottom surface 312b has a circular shape. Therefore, as shown in (B) of FIG. 10 , the shape of the hole 313 a of the bottom surface portion 312 a obtained from the captured image G300 is different from the shape of the hole 313 b of the bottom surface portion 312 b. Since the hole 313a is, for example, a small circle at the center and a cross-shaped groove extending around it, when the center of the image Q313a of the hole 313 coincides with the center of the image Q302 of the hole 313b, the image of Q301 is in the shape of a cross. The lengths of the extended parts become exactly the same. Thereby, it can be detected that the position of the image Q301 of the hole 313a coincides with the position of the image Q302 of the hole 313b. Other configurations are the same as those of the first embodiment.

In addition, in the above description, although the embodiment of the present invention is used for the adjustment for making the X-ray emission center of the X-ray emitter 10a of the X-ray position measuring device 10 coincide with the optical axis of the X-ray camera 10b However, the position correction tools 101 , 201 , 301 according to the embodiment of the present invention can be used not only for the X-ray position measurement device 10 but also for other devices. The position correction tools 101 , 201 , and 301 according to the embodiments of the present invention can be used, for example, in a hole-drilling device for a printed board.

In addition, in the embodiment of the present invention, the case where the controller 81 is used to automatically perform the adjustment for making the X-ray emission center of the X-ray emitter 10a coincide with the optical axis of the X-ray camera 10b has been described. The X-ray emitter 10a and the X-ray camera 10b may be fixed with fixing members such as screws after the operator manually aligns the X-ray emission center of the X-ray emitter 10a with the optical axis of the X-ray camera 10b.

In addition, although in the embodiment of the present invention described above, the example having the first transmission part having one hole on the side of the X-ray emitter 10a and the second transmission part having one hole on the side of the X-ray camera 10b Description is made, but not limited thereto. The number of holes included in each permeable part may be two or more.

As described above, the position correction tool 101 according to the embodiment of the present invention is a position correction tool of an X-ray position measuring device for capturing images based on the X-ray image emitted from the X-ray emitter 10a by the X-ray camera 10b. The X-ray image is aligned with the X-ray emission center of the X-ray emitter 10 of the X-ray position measuring device 10 for measuring the object to be measured, and the optical axis of the X-ray camera, wherein the position correction tool has: 1 transmission part (bottom surface 112a, 212a, 312a), which transmits X-rays emitted from the X-ray emitter side; and a second transmission part (bottom surface 112b, 212b, 312b), which allows The X-rays transmitted through the transmission part are transmitted and projected to the X-ray camera, and the position correction tool uses the first projected image (like Q101, Q201, Q301) based on the X-rays transmitted through the first transmission part and The second projected images (images Q102, Q202, Q302) based on the X-rays transmitted through the second transmission part are projected to the X-ray camera.

According to this configuration, it is possible to promptly adjust the X-ray emission center of the X-ray emitter 10 a to coincide with the optical axis of the X-ray camera 10 b using two different X-ray projection images.

In addition, in the position correction tool 101 according to the embodiment of the present invention, the first transmission part (bottom surface part 112a, 212a, 312a) and the second transmission part (bottom surface part 112b, 212b, 312b) have a function to transmit X-rays. through holes (holes 113a and 113b, or holes 213a and 213b, or holes 313a and 313b).

According to this configuration, for example, by detecting the center positions of the image Q101 of the hole 113a of the bottom portion 112a and the image Q102 of the hole 113b of the bottom portion 112b on the X-ray projection image, it is possible to accurately center the X-ray emission of the X-ray emitter 10a. Adjustment to coincide with the optical axis of the X-ray camera 10b.

In addition, in the position correction tool 101 of the first embodiment, the diameter of the hole 113a of the first transmission part (bottom surface part 112a) is smaller than the diameter of the hole 113b of the second transmission part (bottom surface part 112b).

According to this configuration, based on the X-ray projection image, the image Q101 of the hole 113a of the bottom surface 112a (first transmission portion) on the side of the X-ray emitter 10a and the bottom surface 112b (second transmission portion) on the side of the X-ray camera 10b The image Q102 of the hole 113b will not overlap completely. Thus, the amount of deviation between the position of the image Q101 of the hole 113a of the bottom surface 112a on the X-ray emitter 10a side and the position of the image Q102 of the hole 113b of the bottom surface 112b on the X-ray camera 10b side can be detected from one imaging screen. , accurately adjust the X-ray emission center of the X-ray emitter 10a to coincide with the optical axis of the X-ray camera 10b.

In addition, in the position correction tool 201 of the second embodiment, the thickness of the first transmission part (bottom surface part 212a) is thinner than the thickness of the second transmission part (bottom surface part 212b).

According to this structure, by making the thickness of the members of the bottom surface 212a (first transmission part) on the side of the X-ray emitter 10a thinner than the thickness of the members of the bottom surface 212b (second transmission part) on the side of the X-ray camera 10b, Part of the X-rays passes through the bottom surface portion 212a on the side of the X-ray emitter 10a. Thus, the image Q201 of the hole 213a of the bottom surface 212a on the X-ray emitter 10a side and the image Q202 of the hole 213b of the bottom surface 212b on the X-ray camera 10b side can be distinguished from the X-ray projected image. Thus, the amount of deviation between the position of the image Q201 of the hole 213a of the bottom surface 212a on the side of the X-ray emitter 10a and the position of the image Q202 of the hole 213b of the bottom surface 212b on the side of the X-ray camera 10b can be detected from one imaging screen. , accurately adjust the X-ray emission center of the X-ray emitter 10a to coincide with the optical axis of the X-ray camera 10b.

In addition, in the position correction tool 101 of the first embodiment, the first transmission part (bottom surface part 112a) and the second transmission part (bottom surface part 112b) are composed of members having different X-ray transmittances.

In addition, in the position correction tool 101 of the first embodiment, the first transmission part (bottom surface 112 a ) is made of aluminum, and the second transmission part (bottom surface 112 b ) is made of brass.

According to this configuration, the X-ray transmittance of the members of the bottom surface 112a (first transmission part) on the side of the X-ray emitter 10a and the components of the bottom surface 112b (second transmission part) on the side of the X-ray camera 10b Differently, a part of the X-rays is transmitted through the bottom surface portion 112a on the side of the X-ray emitter 10a. Thus, the image Q101 of the hole 113a of the bottom surface 112a on the X-ray emitter 10a side and the image Q102 of the hole 113b of the bottom surface 112b on the X-ray camera 10b side can be distinguished from the X-ray projected image. Thus, the amount of deviation between the position of the image Q101 of the hole 113a of the bottom surface 112a on the X-ray emitter 10a side and the position of the image Q102 of the hole 113b of the bottom surface 112b on the X-ray camera 10b side can be detected from one imaging screen. , accurately adjust the X-ray emission center of the X-ray emitter 10a to coincide with the optical axis of the X-ray camera 10b.

In addition, the X-ray position measuring device 10 according to the embodiment of the present invention has: an X-ray emitter 10a and an X-ray camera 10b; a workpiece mounting table 10c on which an object to be measured is placed; The 2nd Y motor 22), it moves the X-ray emitter 10a relative to the object to be measured on the workpiece mounting table 10c along the workpiece mounting table surface; the 2nd moving part (3rd X motor 31 and 3rd Y motor 32), its The X-ray camera 10b is moved along the workpiece mounting table surface with respect to the object to be measured on the workpiece mounting table 10c; the image display unit 45 projects the X-rays emitted from the X-ray emitter 10a and transmitted through the object to be measured Two different X-ray projection images (like Q101 and Q102); ) to move at least one of the first moving part (the second X motor 21 and the second Y motor 22 ) and the second moving part (the third X motor 31 and the third Y motor 32 ), thereby causing the X-ray The X-ray emission center of the emitter 10a coincides with the optical axis of the X-ray camera 10b.

According to this structure, the X-ray emission center of the X-ray emitter 10a arrange|positioned in the X-ray position measuring apparatus 10 can be made to coincide with the optical axis of the X-ray camera 10b rapidly and accurately.

As mentioned above, although the embodiment of this invention was described in detail with reference to drawings, the specific structure is not limited to this embodiment, Design change etc. are included in the range which does not deviate from the summary of this invention.

Claims (7)

1. A tool for position correction, which is a tool for position correction of an X-ray position measuring device, which uses an X-ray camera to capture images based on X-rays emitted from an X-ray emitter The image of the measurement object is measured, and the position correction tool aligns the X-ray emission center of the X-ray emitter in the X-ray position measuring device with the optical axis of the X-ray camera, wherein , the tool for position correction has: a first transmission part that transmits X-rays emitted from the X-ray emitter side; and a second transmission unit that transmits the X-rays transmitted through the first transmission unit and projects them onto the X-ray camera, The position correction tool projects a first projected image based on X-rays transmitted through the first transmission part and a second projected image based on X-rays transmitted through the second transmission part onto the The X-ray camera described above. 2. The tool for position correction according to claim 1, wherein: The first transmission part and the second transmission part have holes for transmitting X-rays. 3. The tool for position correction according to claim 2, wherein: The diameter of the hole of the first transmission part is smaller than the diameter of the hole of the second transmission part. 4. The tool for position correction according to any one of claims 1 to 3, wherein: The thickness of the member of the first transmission part is thinner than the thickness of the member of the second transmission part. 5. The tool for position correction according to any one of claims 1 to 4, wherein: The first transmission part and the second transmission part are composed of members having different X-ray transmittances. 6. The tool for position correction according to claim 5, wherein: The member of the first transmission part is aluminum, and the member of the second transmission part is brass. 7. An X-ray position measuring device comprising: X-ray emitters and X-ray cameras; A workpiece mounting table, on which an object to be measured is placed; a first moving unit that moves the X-ray emitter along the surface of the workpiece mounting table relative to the object to be measured on the workpiece mounting table; a second moving unit that moves the X-ray camera along the surface of the workpiece mounting table relative to the object to be measured on the workpiece mounting table; an image display unit on which the X-rays emitted from the X-ray emitter and transmitted through the object to be measured are projected as two different X-ray projection images; and The position correction tool according to any one of claims 1 to 6, The X-ray position measuring device moves at least one of the first moving part and the second moving part according to the amount of positional displacement of the two different X-ray projection images, thereby emitting the X-rays. The X-ray emitting center of the device is consistent with the optical axis of the X-ray camera.