CN106382170A - Internal gradient valve having automatic sealing position adjusting function - Google Patents
Internal gradient valve having automatic sealing position adjusting function Download PDFInfo
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- CN106382170A CN106382170A CN201610950376.8A CN201610950376A CN106382170A CN 106382170 A CN106382170 A CN 106382170A CN 201610950376 A CN201610950376 A CN 201610950376A CN 106382170 A CN106382170 A CN 106382170A
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- 238000007789 sealing Methods 0.000 title claims abstract description 25
- 239000002828 fuel tank Substances 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 5
- 230000008569 process Effects 0.000 claims description 4
- 239000003610 charcoal Substances 0.000 claims 1
- 238000003754 machining Methods 0.000 abstract 1
- 239000012528 membrane Substances 0.000 abstract 1
- 230000000149 penetrating effect Effects 0.000 abstract 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 12
- 230000000694 effects Effects 0.000 description 6
- 239000012530 fluid Substances 0.000 description 6
- 239000000446 fuel Substances 0.000 description 5
- 238000011084 recovery Methods 0.000 description 3
- 238000006563 Carroll rearrangement reaction Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 239000003502 gasoline Substances 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M25/00—Engine-pertinent apparatus for adding non-fuel substances or small quantities of secondary fuel to combustion-air, main fuel or fuel-air mixture
- F02M25/08—Engine-pertinent apparatus for adding non-fuel substances or small quantities of secondary fuel to combustion-air, main fuel or fuel-air mixture adding fuel vapours drawn from engine fuel reservoir
- F02M25/0836—Arrangement of valves controlling the admission of fuel vapour to an engine, e.g. valve being disposed between fuel tank or absorption canister and intake manifold
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M37/00—Apparatus or systems for feeding liquid fuel from storage containers to carburettors or fuel-injection apparatus; Arrangements for purifying liquid fuel specially adapted for, or arranged on, internal-combustion engines
- F02M37/0076—Details of the fuel feeding system related to the fuel tank
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Self-Closing Valves And Venting Or Aerating Valves (AREA)
- Float Valves (AREA)
Abstract
Description
技术领域technical field
本发明属于车载汽油蒸汽的回收装置领域,尤其涉及一种具有自调节密封位置功能的内置坡度阀。The invention belongs to the field of recovery devices for vehicle-mounted gasoline vapor, in particular to a built-in gradient valve with the function of self-adjusting sealing position.
背景技术Background technique
为解决加油过程中燃油蒸汽排放的污染问题,现在国内轿车大部分安装的是活性炭罐式的燃油蒸汽排放控制装置,其不足之处是不能控制加油量的多少,也不能控制加油过程中的汽油蒸汽的排放,从而容易造成活性炭罐“过载”。所以车载油气回收装置中有坡度阀,油量控制阀等。坡度阀为常闭阀,配合油量控制阀使用,当油量控制阀工作时,坡度阀处于关闭状态,维持油箱内的压力;当坡度阀中的浮子上升到密封位置时,坡度阀不再排气。当车辆翻车时,由于浮子的密度比油液大,浮子先关闭出气孔,坡度阀关闭,油液不会通过坡度阀泄漏出油箱。In order to solve the pollution problem of fuel vapor emission during the refueling process, most domestic cars are now equipped with activated carbon tank type fuel vapor emission control devices. The emission of steam can easily cause "overloading" of the activated carbon tank. Therefore, there are slope valves, oil volume control valves, etc. in the vehicle-mounted oil and gas recovery device. The slope valve is a normally closed valve, which is used together with the oil volume control valve. When the oil volume control valve is working, the slope valve is in the closed state to maintain the pressure in the fuel tank; when the float in the slope valve rises to the sealing position, the slope valve is no longer exhaust. When the vehicle rolls over, because the density of the float is greater than that of the oil, the float first closes the air outlet, the slope valve is closed, and the oil will not leak out of the fuel tank through the slope valve.
国外关于坡度阀的专利有不少,美国专利US11523012提出了一种坡度阀,阀体外壳上带有一个流体入口和一个流体出口,阀座上包含阀体的一个流体出口,浮子置于阀体内并且可以轴向移动,密封部件靠在阀座的出口处用来达到密封的目的,当阀处于打开状态时,密封部件从阀座上脱离,流体入口和流体出口连通。美国专利US10807145提出了一种坡度阀,这个坡度阀包含一个基础阀和一个对压力响应的附加阀,两个阀安置在有排气口和进气口的阀体内,并且基础阀和附加阀之间有隔板;基础阀和附加阀互相配合阻断坡度阀流体进出口之间的流体运动。但是坡度阀在工作时,高流率的情况下,阀的工作状态难以保证,尤其在车辆翻车时密封效果不佳。另外,有些坡度阀是安装于油箱外部,尽管阀的材料使用的是高分子材料,但是油气分子仍然会通过阀高分子材料的间隙渗透出去,使得油气回收的效果不佳。There are many foreign patents on gradient valves. The US patent US11523012 proposes a gradient valve. The valve body shell has a fluid inlet and a fluid outlet. The valve seat contains a fluid outlet of the valve body, and the float is placed in the valve body. And it can move axially. The sealing part leans against the outlet of the valve seat to achieve the purpose of sealing. When the valve is in the open state, the sealing part is separated from the valve seat, and the fluid inlet and fluid outlet are connected. U.S. Patent US10807145 proposes a slope valve, which includes a basic valve and an additional valve responsive to pressure. There is a partition between them; the basic valve and the additional valve cooperate with each other to block the fluid movement between the inlet and outlet of the slope valve. However, when the slope valve is working, under the condition of high flow rate, it is difficult to guarantee the working state of the valve, especially when the vehicle rolls over, the sealing effect is not good. In addition, some slope valves are installed outside the fuel tank. Although the material of the valve is polymer material, oil and gas molecules will still seep out through the gap of the valve polymer material, making the effect of oil and gas recovery poor.
发明内容Contents of the invention
为了克服上述现有技术中常用的活性碳罐式燃油蒸发控制装置的不足,本发明提供了一种具有自调节密封位置功能的内置坡度阀,能有效控制加油过程中燃油的蒸发排放。In order to overcome the disadvantages of the activated carbon tank type fuel evaporation control device commonly used in the prior art, the present invention provides a built-in slope valve with self-adjusting sealing position function, which can effectively control the evaporation and emission of fuel during refueling.
本发明采用以下技术方案:The present invention adopts following technical scheme:
一种具有自调节密封位置功能的内置坡度阀,包括阀盖、挡盘、阀体、浮子以及底座,A built-in slope valve with self-adjusting sealing position function, including bonnet, baffle, valve body, float and base,
所述阀体顶端中间位置设有出气孔,所述挡盘置于出气孔上方,挡盘一方面用于加油过程中维持油箱内的压力,另一方面,当油箱内压力值急剧变化时,挡盘上升,出气孔打开排出油箱内一部分油气;所述出气孔下端的楔形状结构与浮子顶端的楔形状结构配合,保证密封效果;所述阀体底端的凹槽与底座上端的凸缘装配连接,所述底座底部中间位置设有安装弹簧的簧座,所述弹簧用以支撑浮子,所述簧座的中间位置设有第二通孔、边缘处设有N个第一通孔,N为偶数;所述阀体外部的凸缘与阀盖底端的凹槽装配连接;所述阀体上部的凹槽中设有密封圈,用于密封阀盖与阀体之间的通道,阻断气体流通;所述阀盖中部设有凹槽,用于将内置坡度阀安装于油箱内;所述阀体顶端的凸缘与支持架下端的凹槽装配连接,所述支持架用于内置坡度阀翻转时限制挡盘移动的距离;There is an air outlet hole at the middle of the top of the valve body, and the baffle plate is placed above the air outlet hole. On the one hand, the baffle plate is used to maintain the pressure in the fuel tank during refueling. On the other hand, when the pressure value in the fuel tank changes sharply, The baffle plate rises, and the air outlet hole opens to discharge part of the oil and gas in the tank; the wedge-shaped structure at the lower end of the air outlet hole cooperates with the wedge-shaped structure at the top of the float to ensure the sealing effect; the groove at the bottom of the valve body is assembled with the flange at the upper end of the base connection, the middle position of the bottom of the base is provided with a spring seat for installing a spring, the spring is used to support the float, the middle position of the spring seat is provided with a second through hole, and the edge is provided with N first through holes, N is an even number; the flange on the outside of the valve body is assembled and connected to the groove at the bottom of the valve cover; a sealing ring is provided in the groove on the upper part of the valve body to seal the channel between the valve cover and the valve body, blocking Gas circulation; the middle part of the valve cover is provided with a groove for installing the built-in slope valve in the fuel tank; the flange on the top of the valve body is assembled and connected with the groove at the lower end of the support frame, and the support frame is used for the built-in slope Limit the distance that the stopper moves when the valve is overturned;
所述浮子顶端的楔形状结构的凹槽与卡扣的凸缘装配连接,实现将膜片的一端固定在浮子上,所述膜片完全覆盖浮子顶端的楔形状结构的表面。The groove of the wedge-shaped structure at the top of the float is assembled and connected with the flange of the buckle, so as to fix one end of the diaphragm on the float, and the diaphragm completely covers the surface of the wedge-shaped structure at the top of the float.
上述方案中,所述阀盖与阀盖上的排气孔均安装于油箱内部;排气孔外接活性炭罐,用于吸收油箱中排出的油气。In the above solution, both the valve cover and the vent hole on the valve cover are installed inside the fuel tank; the vent hole is externally connected to an activated carbon tank for absorbing the oil gas discharged from the fuel tank.
上述方案中,所述出气孔下端的楔形状结构与浮子顶端的楔形状结构的斜度相当,斜度在1:10-1:12之间。In the above solution, the slope of the wedge-shaped structure at the lower end of the air outlet is equivalent to the slope of the wedge-shaped structure at the top of the float, and the slope is between 1:10-1:12.
上述方案中,所述浮子顶端的楔形状结构和膜片在水平面的投影面积比排气孔在水平面的投影面积大。In the above solution, the projected area of the wedge-shaped structure at the top of the float and the diaphragm on the horizontal plane is larger than the projected area of the exhaust hole on the horizontal plane.
上述方案中,所述卡扣、膜片、浮子及弹簧置于下阀室中。In the above solution, the buckle, diaphragm, float and spring are placed in the lower valve chamber.
上述方案中,所述挡盘置于上阀室中。In the above solution, the baffle plate is placed in the upper valve chamber.
上述方案中,所述出气孔置于上阀室与下阀室之间。In the above solution, the air outlet is placed between the upper valve chamber and the lower valve chamber.
上述方案中,所述挡盘的直径大于排气孔的最大长度,挡盘的直径与上阀室的内径之比为0.8-0.85。In the above solution, the diameter of the baffle plate is greater than the maximum length of the exhaust hole, and the ratio of the diameter of the baffle plate to the inner diameter of the upper valve chamber is 0.8-0.85.
上述方案中,所述支持架的高度大于上阀室的深度,支持架的直径大于挡盘的直径。In the above solution, the height of the support frame is greater than the depth of the upper valve chamber, and the diameter of the support frame is greater than the diameter of the baffle plate.
本发明的有益效果为:本发明的内置坡度阀全部安装于油箱内,可减少油气分子从坡度阀的材料分子之间的渗透泄漏出油箱外,同时坡度阀安装于油箱内部,可减少油箱的加工步骤,降低油箱的加工成本。浮子顶端的楔形状结构和出气孔下端的楔形状的结构配合,当汽车倾斜或者当浮子轴线与阀体中心轴线偏离太大时,由于浮子顶端和出气孔下端的楔形状结构斜度相当,可以使浮子顶端的楔形结构沿着阀体上的楔形状结构滑动调整到最佳密封位置,配合使用膜片,使得密封效果更好。The beneficial effects of the present invention are: all the built-in slope valves of the present invention are installed in the fuel tank, which can reduce the leakage of oil and gas molecules from the material molecules of the slope valve to the outside of the fuel tank. processing steps to reduce the processing cost of the fuel tank. The wedge-shaped structure at the top of the float cooperates with the wedge-shaped structure at the lower end of the air outlet. When the car is tilted or when the axis of the float deviates too much from the central axis of the valve body, the slope of the wedge-shaped structure at the top of the float and the lower end of the air outlet is equivalent. Make the wedge-shaped structure on the top of the float slide along the wedge-shaped structure on the valve body to adjust to the best sealing position, and use the diaphragm together to make the sealing effect better.
附图说明Description of drawings
图1为一种具有自调节密封位置功能的内置坡度阀的结构示意图;Fig. 1 is a structural schematic diagram of a built-in slope valve with self-adjusting sealing position function;
图2为图1中I的放大图。Figure 2 is an enlarged view of I in Figure 1.
图中:1-阀盖;2-支持架;3-挡盘;4-密封圈;5-阀体;6-卡扣;7-膜片;8-浮子;9-弹簧;10-底座;a-排气孔;b-上阀室;e-下阀室;f-出气孔;h-第一通孔;g-第二通孔;m-凹槽。In the figure: 1-bonnet; 2-support frame; 3-baffle plate; 4-sealing ring; 5-valve body; 6-buckle; 7-diaphragm; 8-float; 9-spring; 10-base; a-exhaust hole; b-upper valve chamber; e-lower valve chamber; f-air outlet; h-first through hole; g-second through hole; m-groove.
具体实施方式detailed description
下面结合附图和具体实施方式对本发明作进一步详细说明。The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.
参见附图1,一种具有自调节密封位置功能的内置坡度阀,包括阀盖1、挡盘3、阀体5、浮子8以及底座10,阀盖1与阀盖1上的排气孔a均安装于油箱内部;排气孔a外接活性炭罐,用于吸收油箱中排出的油气;Referring to accompanying drawing 1, a built-in slope valve with the function of self-adjusting sealing position, including valve cover 1, baffle plate 3, valve body 5, float 8 and base 10, valve cover 1 and vent hole a on valve cover 1 Both are installed inside the fuel tank; the exhaust hole a is externally connected to the activated carbon tank, which is used to absorb the oil and gas discharged from the fuel tank;
阀体5顶端中间位置设有出气孔f,所述挡盘3置于出气孔f上方,挡盘3一方面用于加油过程中维持油箱内的压力,另一方面,当油箱内压力值急剧变化时,挡盘3上升排出油箱内一部分油气;出气孔f下端的楔形状结构与浮子8顶端的楔形状结构(可以在车辆倾斜时,或者在内置坡度阀工作时弹簧9的中心线与浮子8中心线偏离太大的时候确保密封性)配合,浮子8顶端的楔形状结构与出气孔f下端的楔形状结构的斜度相当,斜度在1:10-1:12之间,本发明优选1:10;阀体5底端的凹槽与底座10上端的凸缘装配连接,底座10底部中间位置设有安装弹簧9的簧座,弹簧9用以支撑浮子8,簧座的中间位置设有第二通孔g、边缘处设有四个呈放射状排列的第一通孔h;阀体5外部的凸缘与阀盖1底端的凹槽装配连接;阀体5上部的凹槽中设有密封圈4,用于密封阀盖1与阀体5之间的通道,阻断气体流通;阀盖1中部设有凹槽m,用于将内置坡度阀安装于油箱内;阀体5顶端的凸缘与支持架2下端的凹槽装配连接,支持架2用于内置坡度阀翻转时限制挡盘3移动的距离;There is an air outlet f in the middle of the top of the valve body 5, and the baffle plate 3 is placed above the air outlet f. On the one hand, the baffle plate 3 is used to maintain the pressure in the fuel tank during refueling. When changing, the baffle plate 3 rises to discharge a part of the oil and gas in the fuel tank; the wedge-shaped structure at the lower end of the air outlet f and the wedge-shaped structure at the top of the float 8 (it can be used when the vehicle is tilted, or when the built-in gradient valve is working). 8 when the central line deviates too much to ensure the tightness) fit, the wedge-shaped structure at the top of the float 8 is equivalent to the slope of the wedge-shaped structure at the lower end of the air outlet f, and the slope is between 1:10-1:12, the present invention Preferably 1:10; the groove at the bottom of the valve body 5 is assembled and connected with the flange on the upper end of the base 10, the middle position of the bottom of the base 10 is provided with a spring seat for installing the spring 9, the spring 9 is used to support the float 8, and the middle position of the spring seat is provided There is a second through hole g, and four radially arranged first through holes h are arranged at the edge; the flange outside the valve body 5 is assembled and connected with the groove at the bottom end of the valve cover 1; the groove on the upper part of the valve body 5 is provided with There is a sealing ring 4, which is used to seal the passage between the valve cover 1 and the valve body 5, and blocks the gas flow; the middle part of the valve cover 1 is provided with a groove m, which is used to install the built-in slope valve in the fuel tank; the top of the valve body 5 The flange of the flange is assembled and connected with the groove at the lower end of the support frame 2, and the support frame 2 is used to limit the moving distance of the baffle plate 3 when the built-in slope valve is turned over;
浮子8顶端的楔形状结构的凹槽与卡扣6的凸缘装配连接,实现将膜片7的一端固定在浮子8上,膜片7(四周有凸缘,确保密封效果)完全覆盖浮子8顶端的楔形状结构的表面,浮子8顶端的楔形状结构和膜片7在水平面的投影面积比出气孔f在水平面的投影面积大。The wedge-shaped groove at the top of the float 8 is assembled and connected with the flange of the buckle 6 to fix one end of the diaphragm 7 on the float 8, and the diaphragm 7 (with flanges around to ensure the sealing effect) completely covers the float 8 The surface of the wedge-shaped structure at the top, the projected area of the wedge-shaped structure at the top of the float 8 and the diaphragm 7 on the horizontal plane are larger than the projected area of the air outlet f on the horizontal plane.
挡盘3置于上阀室b中,卡扣6、膜片7、浮子8及弹簧9置于下阀室e中,出气孔f置于上阀室b与下阀室e之间;浮子8的外径比下阀室e的内径小;挡盘3的直径大于出气孔f的最大长度,挡盘3的直径与上阀室b的内径之比为0.8-0.85,本发明优选为0.84;支持架2的高度大于上阀室b的深度,保证挡盘3不会脱离上阀室e;支持架2的直径大于挡盘3的直径。The baffle plate 3 is placed in the upper valve chamber b, the buckle 6, the diaphragm 7, the float 8 and the spring 9 are placed in the lower valve chamber e, the air outlet f is placed between the upper valve chamber b and the lower valve chamber e; the float The outer diameter of 8 is smaller than the inner diameter of lower valve chamber e; the diameter of baffle plate 3 is greater than the maximum length of air outlet f, and the ratio of the diameter of baffle plate 3 to the inner diameter of upper valve chamber b is 0.8-0.85, and the present invention is preferably 0.84 ; The height of the support frame 2 is greater than the depth of the upper valve chamber b to ensure that the baffle plate 3 will not break away from the upper valve chamber e; the diameter of the support frame 2 is greater than the diameter of the baffle plate 3 .
一种具有自调节密封位置功能的内置坡度阀的工作过程:The working process of a built-in slope valve with self-adjusting sealing position function:
本发明的内置坡度阀是常闭阀,即在加油过程中,坡度阀的挡盘3因重力压靠在出气孔f上端,维持油箱一定的气体压力,此时坡度阀的排气孔a和第一通孔h以及第二通孔g之间不连通。加油继续,油箱内的压力持续增大,油气会依次通过底座上第一通孔h、第二通孔g以及浮子8和下阀室e内壁之间的间隙从出气孔f通向上阀室b,当油箱内压力达到一定值时,坡度阀的挡盘3受油箱内压力和油箱外部大气压力之差的作用下上升,出气孔f打开,油气经过出气孔f,再经排气孔a流入活性炭罐中,使油箱内气体压力的变化平缓。受支持架2顶面的限制,挡盘3上移后不会离开支持架2,防止挡盘3偏离出气孔f。当汽车加油量达到预定值时,此时再向油箱内加油,油箱内外气体的压力差继续增大,当气压差值大于0.003MPa时,浮子8上升,关闭出气孔f,坡度阀关闭。当汽车翻车时,因浮子8的密度大于燃油的密度,浮子8在重力的作用下会压在出气孔f上,这样就断开坡度阀的主通道,从而关闭坡度阀,避免翻车时油箱内汽油泄漏。当浮子8轴心发生偏离时,由于浮子8和阀体5上的楔形出气孔斜度相当,可以使浮子8上的楔形结构沿着阀体5上的楔形出气孔结构滑动,配合使用膜片7,使得密封效果更好。The built-in gradient valve of the present invention is a normally closed valve, that is, during the refueling process, the retaining plate 3 of the gradient valve is pressed against the upper end of the air outlet f due to gravity to maintain a certain gas pressure in the fuel tank. There is no communication between the first through hole h and the second through hole g. As the refueling continues, the pressure in the fuel tank continues to increase, and the oil and gas will pass through the first through hole h, the second through hole g on the base and the gap between the float 8 and the inner wall of the lower valve chamber e from the air outlet f to the upper valve chamber b , when the pressure in the fuel tank reaches a certain value, the baffle plate 3 of the slope valve rises under the action of the difference between the internal pressure of the fuel tank and the atmospheric pressure outside the fuel tank, and the air outlet f opens, and the oil and gas flow through the air outlet f, and then flow in through the air outlet a In the activated carbon tank, the change of gas pressure in the fuel tank is smooth. Restricted by the top surface of the support frame 2, the baffle plate 3 will not leave the support frame 2 after it moves up, preventing the baffle plate 3 from deviating from the air outlet f. When the refueling quantity of the automobile reaches a predetermined value, refuel in the fuel tank at this time, the pressure difference of the gas inside and outside the fuel tank continues to increase, and when the air pressure difference is greater than 0.003MPa, the float 8 rises, the air outlet f is closed, and the slope valve is closed. When the car rolls over, because the density of the float 8 is greater than the density of the fuel, the float 8 will be pressed on the air outlet f under the action of gravity, so that the main channel of the slope valve will be disconnected, thereby closing the slope valve, and avoiding the fuel tank when the car rolls over. Gasoline spilled. When the axis center of the float 8 deviates, since the slope of the wedge-shaped air outlet on the float 8 and the valve body 5 is equivalent, the wedge-shaped structure on the float 8 can slide along the wedge-shaped air outlet structure on the valve body 5, and the diaphragm is used together. 7. Make the sealing effect better.
以上对本发明所提供的一种具有自调节密封位置功能的内置坡度阀进行了详细介绍,本发明应用了具体个例对本发明的原理和实施方式进行了阐述,所要说明的是,以上所述仅为本发明的较佳实施例而已,并不用以限制本发明。凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。A built-in slope valve with self-adjusting sealing position function provided by the present invention has been introduced in detail above. The present invention has applied specific examples to illustrate the principle and implementation of the present invention. What is to be explained is that the above is only It is only a preferred embodiment of the present invention, and is not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.
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CN109023304A (en) * | 2017-06-12 | 2018-12-18 | 北京北方华创微电子装备有限公司 | A kind of admission gear |
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