CN106370931A - Silicon material distributing and segregation device and method - Google Patents
Silicon material distributing and segregation device and method Download PDFInfo
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- CN106370931A CN106370931A CN201610998871.6A CN201610998871A CN106370931A CN 106370931 A CN106370931 A CN 106370931A CN 201610998871 A CN201610998871 A CN 201610998871A CN 106370931 A CN106370931 A CN 106370931A
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- silicon materials
- fractional condensation
- probe
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- 239000002210 silicon-based material Substances 0.000 title claims abstract description 120
- 238000000034 method Methods 0.000 title claims abstract description 21
- 238000005204 segregation Methods 0.000 title abstract description 7
- 239000000523 sample Substances 0.000 claims abstract description 56
- 239000012528 membrane Substances 0.000 claims abstract description 15
- 238000006243 chemical reaction Methods 0.000 claims abstract description 13
- 238000009826 distribution Methods 0.000 claims abstract description 10
- 230000000087 stabilizing effect Effects 0.000 claims abstract description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 6
- 239000010959 steel Substances 0.000 claims abstract description 6
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims abstract description 6
- 230000005494 condensation Effects 0.000 claims description 63
- 238000009833 condensation Methods 0.000 claims description 62
- 238000003780 insertion Methods 0.000 claims description 19
- 230000037431 insertion Effects 0.000 claims description 19
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims description 6
- 229910052744 lithium Inorganic materials 0.000 claims description 6
- 238000004364 calculation method Methods 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims description 5
- 241000208340 Araliaceae Species 0.000 claims description 3
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 claims description 3
- 235000003140 Panax quinquefolius Nutrition 0.000 claims description 3
- 235000008434 ginseng Nutrition 0.000 claims description 3
- 239000004615 ingredient Substances 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 2
- 229910052737 gold Inorganic materials 0.000 claims 2
- 239000010931 gold Substances 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 26
- 229910052710 silicon Inorganic materials 0.000 abstract description 26
- 239000010703 silicon Substances 0.000 abstract description 26
- 239000000463 material Substances 0.000 abstract description 18
- 239000002019 doping agent Substances 0.000 abstract description 13
- 238000001514 detection method Methods 0.000 abstract description 7
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 5
- 238000005315 distribution function Methods 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
- 239000010937 tungsten Substances 0.000 abstract 1
- 238000012360 testing method Methods 0.000 description 10
- 239000012535 impurity Substances 0.000 description 9
- 230000006870 function Effects 0.000 description 7
- 238000005259 measurement Methods 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000005266 casting Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 229910002056 binary alloy Inorganic materials 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 241000196324 Embryophyta Species 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001151 other effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Silicon Compounds (AREA)
Abstract
The invention discloses a silicon material distributing and segregation device and method. A box-shaped outer shell is adopted and comprises a square box shell body, a liquid crystal display screen, an integrated circuit board, a USB plug hole, a probe plug hole, a four point probe, a material distributing press key, a segregation press key, a membrane keyboard and a battery case; the integrated circuit board comprises a single-chip microcomputer, a clock signal module, a watchdog module, a liquid crystal display module, a BOOT state switch circuit, a press key input module, a storage module, a USB programming module, an analog-to-digital conversion module, a voltage stabilizing circuit module, a reference voltage source, a power source module, a constant current source module and a probe circuit module; a tungsten steel needle which is 0.5 mm in diameter and a 1.5 mm copper wire are adopted; via the silicon material distributing and segregation device and method, resistance and resistivity of a silicon material can be calculated, PN type detection can be realized, a material distribution function and a segregation function can be fulfilled, and a novel type silicon ingot can be obtained via material distribution based on the resistivity and a PN type of the silicon material; or a known silicon ingot can be subjection to segregation operation, and resistivity, PN type coefficients, weight and doping agent concentration of the silicon ingot can be obtained.
Description
Technical field
The present invention relates to a kind of silicon materials detection technique field, more particularly, to a kind of silicon materials dispensing fractional condensation device and side
Method.
Background technology
At present, in the prior art, silicon materials include p-type silicon material, n type silicon material and the low heavily doped silicon material of resistivity,
Conduction type and the resistivity of these silicon materials must strictly be controlled, just can by these silicon materials in small, broken bits be re-used as polycrystalline silicon ingot casting or
It is the raw material of crystal-pulling.The dispensing of silicon materials refers to accurate proportioning and goes out to want the silicon materials obtaining, that is, input different silicon materials,
Output dispensing parameter, also can input dispensing parameter, export different silicon materials.The fractional condensation of silicon materials refers to one piece containing impurity
Material, slowly solidifies, then in solid, the impurity concentration of each several part differs, originally the uniform material of Impurity Distribution after fusing again
Material, after fusing and solidification, Impurity Distribution is no longer uniform, and some local impurity are many, and some are then few, just obtain the detached effect of impurity
Really.Because Segregation is binary system or polynary system balances each other effect produced by characteristic, binary system is in solid-liquid biphase equilibrium shape
During state, the composition of the biphase middle constituent element of solid-liquid is unequal, for example: in silicon and germanium containing impurity, the impurity of solid phase during balance
Concentration is different from the impurity concentration of liquid phase.
Test equipment with regard to detection semiconductor silicon material resistivity and conduction type and its instrument, existing related document
Report, the Chinese patent of such as Patent No. cn201311457 discloses a kind of " silicon material electric resistivity detection device ", and this practicality is new
" silicon material electric resistivity detection device " that type discloses includes voltmeter, ammeter, and described voltmeter is connected with aviation socket, boat
Dummy receptacle is also connected with ammeter, and ammeter connects the colelctor electrode of amplifier, and the emitter stage of amplifier is connected with fixed resistance
And light emitting diode, the base stage of amplifier is connected with slide rheostat, and slide rheostat is also associated with power supply, described
Amplifier adopts triode amplifier 9013, and described power supply is 45v constant-current source.
Chinese patent as Patent No. cn101852827a discloses a kind of " silicon material resistivity voice test pen ",
" silicon material resistivity voice test pen " that this invention discloses is by probe (1342 pin four probe puts in order), electronic circuit portion
Part and speech utterance playback unit are grouped into；The present invention is thick (permutator) due to employing measurement/school, so can be according to silicon during test
The concrete thickness size cases of material carry out debugging and set, and have low-voltage using integrated operational amplifier circuit chip max4166
" shut " mode", dry cell power supply, safety coefficient is high, and recording resistivity value can real-time voice report, and tool is simple to manufacture, low cost
Honest and clean the advantages of.
Although described Chinese patent " silicon material electric resistivity detection device " and " silicon material resistivity voice test pen " energy
Enough solve silicon material resistivity test problems, but these technical schemes in the technology measuring silicon materials pn type and heavily doped silicon material and set
There is problems with and shortcoming in standby aspect:
(1) published patent silicon material electric resistivity detection device and silicon material resistivity voice test pen do not possess silicon materials
Dispensing and fractional condensation function, can only test resistance rates it is impossible to test pn type and heavily doped silicon material.
(2) commonly used at present on market measurement silicon materials pn type existing equipment belongs to bench device, is exchanged using 220v and supplies
Electricity, circuit layout is unreasonable, and circuit board is not integrated, and volume is excessive, not portable, and using inconvenience, power consumption is larger, and deposits
In safety problem.
Based on this it is necessary to provide a kind of portable silicon materials dispensing, fractional condensation to have the device and method of test resistance rate concurrently
Solve the above problems.
Content of the invention
The purpose of the present invention is exactly excessive for volume and not portative measurement silicon material resistivity and pn type measuring apparatus
It is integrated into the portable set of hand-held, increase dispensing and fractional condensation function simultaneously, and be supplied to user dispensing and the side of fractional condensation
Method, more efficiently to carry out dispensing using the resistivity and pn type of silicon materials to new silicon ingot, or segregates to known silicon ingot,
Record resistivity and the pn type of silicon materials, allow and operate safer, more low consumption.
The technical problem to be solved in the present invention be realize the method for dispensing and fractional condensation function, the Highgrade integration of circuit board,
Measurement silicon material resistivity, the measurement of silicon materials pn type, the measurement of silicon materials heavily doped type, for solving above-mentioned technology and plant issue, this
Invention provides a kind of silicon materials dispensing fractional condensation device and method.
The technical scheme that the present invention solves its technical problem is: described silicon materials dispensing segregates device, including square box housing,
LCDs, surface-mounted integrated circuit, usb jack, probe insertion, four probe, dispensing button, fractional condensation button, membrane keyboard,
Battery case it is characterised in that: described square box housing be in cuboid, its upper face centre position arrange LCDs, liquid
Crystal display screen periphery arranges membrane keyboard, and described membrane keyboard includes dispensing button, fractional condensation button；Described square box shell one end side
Face is set up in parallel usb jack, probe insertion；Described probe insertion connects four probe by wire；In described square box housing
Portion's setting surface-mounted integrated circuit, battery case, described battery case is arranged on surface-mounted integrated circuit side, described surface-mounted integrated circuit and liquid crystal
Display screen, usb jack, probe insertion, membrane keyboard, battery case electrical connection；Described battery inside arranges lithium battery.
Silicon materials dispensing of the present invention fractional condensation device it is characterised in that described surface-mounted integrated circuit include single-chip microcomputer, when
Clock signaling module, watchdog module, LCD MODULE, boot status switch circuit, keyboard input module, memory module, usb
Programming module, analog-to-digital conversion module, voltage stabilizing circuit module, reference voltage source, power module, constant current source module, probe circuit mould
Block；Described single-chip microcomputer and clock signal module, watchdog module, LCD MODULE, boot status switch circuit, key-press input
Module, memory module, usb programming module, analog-to-digital conversion module all electrically connect；Described power module and voltage stabilizing circuit module, base
Reference voltage source all electrically connects；Described probe circuit module is sequentially connected constant current source module, analog-to-digital conversion module；Described reference voltage
Source connects analog-to-digital conversion module；Described voltage stabilizing circuit module connects constant current source module；Described keyboard input module electrically connects thin film
Keyboard；Described LCD MODULE electrically connects LCDs；Described usb programming module and power module all electrically connect usb and insert
Hole；Described probe circuit module electrically connects probe insertion；Described power module is electrically connected with battery case.
Silicon materials dispensing of the present invention segregates device it is characterised in that the metal probe of described four probe adopts
The wolfram steel pin of diameter 0.5mm.
Silicon materials dispensing of the present invention fractional condensation device is it is characterised in that the metal probe of described four probe and spy
Head jack connecting cable adopts diameter 1.5mm copper cash.
Silicon materials dispensing fractional condensation device of the present invention is it is characterised in that described battery inside is provided with usb
The lithium battery that jack charges.
Silicon materials dispensing fractional condensation device of the present invention is it is characterised in that the single-chip microcomputer of described surface-mounted integrated circuit is built-in with
The silicon materials dispensing being imported by usb jack and the program of fractional condensation.
A kind of silicon materials distribution of the present invention it is characterised in that described silicon materials distribution, including following
Step:
Step 1: open silicon materials dispensing fractional condensation device, click dispensing button (7) and enter dispensing runnable interface；
Step 2: judge whether probe contacts silicon materials, if contact silicon materials, collection voltages, be otherwise manually entered required ginseng
Number；
Step 3: silicon materials dispensing fractional condensation device utilizes silicon materials burdening calculation program to calculate resistivity；
Step 4: draw list of ingredients and in LCDs video data；
Step 5: judge to record whether key is pressed, if it is, records store data, otherwise return display.
A kind of silicon materials of the present invention segregate method it is characterised in that described silicon materials segregate method, including following
Step:
Step 1: open silicon materials dispensing fractional condensation device, click fractional condensation button (8) and enter fractional condensation runnable interface；
Step 2: judge whether to be manually entered parameter, if it is, input desired parameters, otherwise return dispensing runnable interface；
Step 3: silicon materials dispensing fractional condensation device carries out fractional condensation using silicon materials fractional condensation calculation procedure and calculates；
Step 4: draw fractional condensation table and in LCDs video data；
Step 5: judge to record whether key is pressed, if it is, records store data, otherwise return display.
Silicon materials dispensing fractional condensation method of the present invention is it is characterised in that inserted by surface-mounted integrated circuit and single-chip microcomputer, usb
Hole, usb connecting line, mcu programming software programming are implemented.
Compared with prior art, beneficial effects of the present invention are embodied in: the present invention adopts high accuracy ad, diameter 0.5mm
Wolfram steel pin, 1.5mm copper cash；Possess silicon materials and calculate resistance and resistivity, dispensing, fractional condensation function, can automatically calculate resistance, electricity
Resistance rate, pn type, statistical data simultaneously, the more efficient resistivity using silicon materials and pn type carry out dispensing to new silicon ingot, or
Person segregates to known silicon ingot, obtains resistivity, pn type coefficient and weight, the concentration of dopant of silicon ingot, and in LCDs
Display result, allows and operates safer, more low consumption.
Brief description
Fig. 1 is the structural representation of the present invention.
Fig. 2 is the circuit modular structure schematic diagram of the present invention.
Fig. 3 is the dispensing function program flow chart of the present invention.
Fig. 4 is the fractional condensation function program flow chart of the present invention.
Fig. 5 mixes silicon ingot resistivity scattergram after foundry alloy for the present invention's.
In accompanying drawing 1: 1. square box housing, 2. LCDs, 3. surface-mounted integrated circuit, 4.usb jack, 5. probe insertion, 6.
Four probe, 7. dispensing button, 8. segregate button, 9. membrane keyboard, 10. battery case.
Specific embodiment
In conjunction with Fig. 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5 and embodiment, the present invention is described in further detail, so that the public is preferably
Grasp the implementation of the present invention, specific embodiment of the present invention is:
As shown in figure 1, a kind of silicon materials dispensing of the present invention segregates device, including square box housing 1, LCDs 2,
Surface-mounted integrated circuit 3, usb jack 4, probe insertion 5, four probe 6, dispensing button 7, fractional condensation button 8, membrane keyboard 9, battery
It is characterised in that described square box housing 1 is in cuboid, its upper face centre position arranges LCDs 2, liquid crystal to box 10
Display screen 2 periphery arranges membrane keyboard 9, and described membrane keyboard 9 includes dispensing button 7, fractional condensation button 8；Described square box housing 1 one
End side surface is set up in parallel usb jack 4, probe insertion 5；Described probe insertion 5 connects four probe 6 by wire；Described side
The internal setting surface-mounted integrated circuit 3 of box housing 1, battery case 10, described battery case 10 is arranged on surface-mounted integrated circuit 3 side, described collection
Circuit board 3 is become to electrically connect with LCDs 2, usb jack 4, probe insertion 5, membrane keyboard 9, battery case 10；Described battery case
10 internal setting lithium batteries.
As shown in Figure 1 and Figure 2, silicon materials dispensing of the present invention fractional condensation device is it is characterised in that described integrated circuit
Plate 3 includes single-chip microcomputer, clock signal module, watchdog module, LCD MODULE, boot status switch circuit, key-press input
Module, memory module, usb programming module, analog-to-digital conversion module, voltage stabilizing circuit module, reference voltage source, power module, constant current
Source module, probe circuit module；Described single-chip microcomputer and clock signal module, watchdog module, LCD MODULE, boot state
On-off circuit, keyboard input module, memory module, usb programming module, analog-to-digital conversion module all electrically connect；Described power module
All electrically connect with voltage stabilizing circuit module, reference voltage source；Described probe circuit module is sequentially connected constant current source module, analog digital conversion
Module；Described reference voltage source connects analog-to-digital conversion module；Described voltage stabilizing circuit module connects constant current source module；Described button is defeated
Enter module electrical connection membrane keyboard 9；Described LCD MODULE electrically connects LCDs 2；Described usb programming module and power supply
Module all electrically connects usb jack 4；Described probe circuit module electrically connects probe insertion 5；Described power module and battery case 10 electricity
Connect.
As shown in Fig. 2 silicon materials dispensing of the present invention fractional condensation device is it is characterised in that described keyboard input module
Electrical connection film key 7；Described LCD MODULE electrically connects LCDs 2；Described usb programming module and power module are equal
Electrical connection usb jack 4；Described probe circuit module electrically connects probe insertion 5.
As shown in figure 1, silicon materials dispensing of the present invention segregates device it is characterised in that described four probe 6
Metal probe adopts the wolfram steel pin of diameter 0.5mm.
As shown in figure 1, silicon materials dispensing of the present invention segregates device it is characterised in that described four probe 6
Metal probe adopts diameter 1.5mm copper cash with probe insertion 5 connecting cable.
As shown in figure 1, silicon materials dispensing of the present invention fractional condensation device is it is characterised in that inside described battery case 10
It is provided with the lithium battery of usb jack 4 charging.
As shown in Figure 1 and Figure 2, silicon materials dispensing of the present invention fractional condensation device is it is characterised in that described integrated circuit
The silicon materials burdening calculation program importing by usb jack 4 and silicon materials are had to segregate calculation procedure in the single-chip microcomputer internal memory of plate 3,
By surface-mounted integrated circuit 3 and single-chip microcomputer, usb jack 4, usb connecting line, mcu programming software programming enforcement.
Embodiment 1
As shown in Figure 1, Figure 3, silicon materials dispensing of the present invention segregates a kind of silicon materials distribution of device, and its feature exists
In described silicon materials distribution, comprise the following steps:
Step 1: open silicon materials dispensing fractional condensation device, click dispensing button 7 and enter dispensing runnable interface；
Step 2: judge whether probe contacts silicon materials, if contact silicon materials, collection voltages, be otherwise manually entered required ginseng
Number；
Step 3: silicon materials dispensing fractional condensation device utilizes silicon materials burdening calculation program to calculate resistivity；
Step 4: draw list of ingredients and in LCDs 2 video data；
Step 5: judge to record whether key is pressed, if it is, records store data, otherwise return display.
Silicon materials dispensing of the present invention segregates the silicon materials burdening calculation that a kind of silicon materials distribution of device uses
The algorithm of program foundation comprises the concrete steps that:
1) determine output: in bottom crystalline, need doping content(atmos) resistivity, undoping in length(ω•
Cm), the silicon ingot weight in length(kg), the top tare weight amount in length(kg), n-type dopant concentration(atmos/cm
²)；
2) determine input quantity: ingot casting one charging weight is a (kg), ingot casting bottom target resistivity p-type is b (ω cm), need addition
The resistivity of dopant is c (ω cm), a length of d(mm of inner side edge of silicon ingot), the inside height of silicon ingot be e(mm), feed oxygen dense
Spend for f (atmos/cm), n-type dopant atom number, the gross weight that feeds intake(kg)；
3) following formula calculating outputs are utilized:
(3.1) need doping content in bottom crystalline, unit (atmos):
(3.2) the silicon ingot weight in length:
(3.3) the top tare weight amount in length:
4) resistivity undoping in length:
(4.1) calculate:
；
(4.2) if, then；
(4.3) if,；
(4.4) if, then
5) n-type dopant concentration:
Embodiment 2
As Figure 1 and Figure 4, silicon materials dispensing of the present invention segregates a kind of silicon materials fractional condensation method of device, and its feature exists
Segregate method in described silicon materials, comprise the following steps:
Step 1: open silicon materials dispensing fractional condensation device, click fractional condensation button 8 and enter fractional condensation runnable interface；
Step 2: judge whether to be manually entered parameter, if it is, input desired parameters, otherwise return dispensing runnable interface；
Step 3: silicon materials dispensing fractional condensation device carries out fractional condensation using silicon materials fractional condensation calculation procedure and calculates；
Step 4: draw fractional condensation table and in LCDs 2 video data；
Step 5: judge to record whether key is pressed, if it is, records store data, otherwise return display.
A kind of silicon materials that silicon materials dispensing of the present invention segregates device segregate the silicon materials fractional condensation calculating that method uses
The algorithm of program foundation comprises the concrete steps that:
1) determine output: estimated N-shaped material resistivity(ω cm), estimated p-type material resistivity(ω cm), N-shaped material
Weight(kg), the weight of p-type material(kg), p-type coefficient, N-shaped coefficient, p-type dopant concentration in silicon material
(atmos/cm), n-type dopant concentration in silicon material(atmos/cm), the silicon ingot weight in length(kg)；
2) determine input quantity: silicon ingot average side length a(mm), this stove inventory b (kg), bottom polar form x(n/p), bottom resistance rate c
(ω cm), one section of silicon ingot length d(mm), the polar form y(n/p in length), resistivity e (ω cm) in length；
3) following formula calculating outputs are utilized:
(3.1) N-shaped material resistivity(ω cm):
Need to first ask、、、、, then ask, then ask；
(3.1.1) the bottom resistance rate of known input is c, and bottom polarity is p, then can obtain:
When the material putting into is p for bottom polarity (when x is for p):
When the material putting into is n for bottom polarity (when x is for n):
(3.1.2) ask:
Polar form y=p when in length:
Polar form y=n when in length:
If the y of output is not p is not n yet, export 0；
(3.1.3) ask:
(3.1.4) ask:
(3.1.5) ask:
(3.1.6) ask:
(3.2) the p-type material resistivity being expected:
It is intended to ask, need to first obtain；
(3.2.1) ask:
When bottom polarity is p-type:
When bottom polarity is N-shaped:
(3.2.2) ask:
When bottom polarity is p-type:
When bottom polarity is N-shaped:
(3.3) weight of p-type material:
(3.4) weight of N-shaped material:
(3.5) p-type coefficient:
(3.6) N-shaped coefficient:
(3.7) p-type dopant concentration in silicon material:
(3.8) n-type dopant concentration in silicon material:
(3.9) the silicon ingot weight in length:
Embodiment 3
As shown in figure 5, when carrying out batch operation, feeding intake the different silicon ingot material of input such as to stove:
Silicon ingot one: boron doping concentration n=Atmos/cm, electricalresistivityρ=2 ω cm；
Silicon ingot two: phosphorus doping density n=Atmos/cm, electricalresistivityρ=0.07 ω cm；
During doping, when resistivity is identical and p-type dopant with the concentration ratio of n-type dopant is
0.051370261: 2.70632183；
The resistivity measurement result of different length p-type silicon ingot is as follows:
| Length (mm) | Resistivity (ω cm) |
| 0 | 2.231324057 |
| 20 | 2.198532243 |
| 40 | 2.164066922 |
| 60 | 2.127714208 |
| 80 | 2.089213833 |
| 100 | 2.048244253 |
| 120 | 2.004401107 |
| 140 | 1.957165078 |
| 160 | 1.905852116 |
Compared with prior art, beneficial effects of the present invention are embodied in: the present invention adopts high accuracy ad, the wolfram steel of diameter 0.5mm
Pin, 1.5mm copper cash；The present invention possesses silicon materials and calculates resistance and resistivity, dispensing, fractional condensation function, can automatically calculate resistance,
Resistivity, pn type, statistical data simultaneously, the more efficient resistivity using silicon materials and pn type carry out dispensing to new silicon ingot,
Or known silicon ingot is segregated, obtains resistivity, pn type coefficient and weight, the concentration of dopant of silicon ingot, and in LCDs
Upper display result, allows and operates safer, more low consumption.
The foregoing is only presently preferred embodiments of the present invention, not in order to limit the present invention, all this present invention's
Spirit and principle within, any modification, equivalent substitution and improvement made etc., should be included in this protection scope of the present invention it
Interior.
Claims (8)
1. a kind of silicon materials dispensing segregates device, including square box housing (1), LCDs (2), surface-mounted integrated circuit (3), usb
Jack (4), probe insertion (5), four probe (6), dispensing button (7), fractional condensation button (8), membrane keyboard (9), battery case
(10) it is characterised in that: described square box housing (1) be in cuboid, its upper face centre position arrange LCDs
(2), LCDs (2) periphery setting membrane keyboard (9), described square box housing (1) one end side is set up in parallel usb jack
(4), probe insertion (5)；Described probe insertion (5) connects four probe (6) by wire；Described square box housing (1) is internal
Setting surface-mounted integrated circuit (3), battery case (10), described battery case (10) is arranged on surface-mounted integrated circuit (3) side, described integrated electricity
Road plate (3) is electrically connected with LCDs (2), usb jack (4), probe insertion (5), membrane keyboard (9), battery case (10)；Institute
State setting lithium battery inside battery case (10).
2. silicon materials dispensing according to claim 1 fractional condensation device it is characterised in that: described surface-mounted integrated circuit (3) includes
Single-chip microcomputer, clock signal module, watchdog module, LCD MODULE, boot status switch circuit, keyboard input module, deposit
Storage module, usb programming module, analog-to-digital conversion module, voltage stabilizing circuit module, reference voltage source, power module, constant current source module,
Probe circuit module；Described single-chip microcomputer and clock signal module, watchdog module, LCD MODULE, boot status switch electricity
Road, keyboard input module, memory module, usb programming module, analog-to-digital conversion module all electrically connect；Described power module and voltage stabilizing
Circuit module, reference voltage source all electrically connect；Described probe circuit module is sequentially connected constant current source module, analog-to-digital conversion module；
Described reference voltage source connects analog-to-digital conversion module；Described voltage stabilizing circuit module connects constant current source module；Described key-press input mould
Block electrical connection membrane keyboard (9)；Described LCD MODULE electrical connection LCDs (2)；Described usb programming module and power supply
Module all electrically connects usb jack (4)；Described probe circuit module electrical connection probe insertion (5)；Described power module and battery case
(10) electrically connect.
3. silicon materials dispensing according to claim 1 fractional condensation device it is characterised in that: the gold of described four probe (6)
Belong to the wolfram steel pin that probe adopts diameter 0.5mm.
4. silicon materials dispensing according to claim 3 fractional condensation device it is characterised in that: the gold of described four probe (6)
Belong to probe and adopt diameter 1.5mm copper cash with probe insertion (5) connecting cable.
5. silicon materials dispensing according to claim 1 fractional condensation device it is characterised in that: setting inside described battery case (10)
There is the lithium battery charging by usb jack (4).
6. silicon materials dispensing according to claim 2 fractional condensation device it is characterised in that: the list of described surface-mounted integrated circuit (3)
Piece machine is built-in with the silicon materials dispensing importing by usb jack (4) and fractional condensation program.
7. a kind of silicon materials distribution, using the silicon materials dispensing fractional condensation device described in any one of claim 1～6, it is special
Levy and be: described silicon materials distribution, comprise the following steps:
Step 1: open silicon materials dispensing fractional condensation device, click dispensing button (7) and enter dispensing runnable interface；
Step 2: judge whether probe contacts silicon materials, if contact silicon materials, collection voltages, be otherwise manually entered required ginseng
Number；
Step 3: silicon materials dispensing fractional condensation device utilizes silicon materials burdening calculation program to calculate resistivity；
Step 4: draw list of ingredients and in the upper video data of LCDs (2)；
Step 5: judge to record whether key is pressed, if it is, records store data, otherwise return display.
8. a kind of silicon materials segregate method, and using the silicon materials dispensing fractional condensation device described in any one of claim 1～6, it is special
Levy and be: described silicon materials segregate method, comprise the following steps:
Step 1: open silicon materials dispensing fractional condensation device, click fractional condensation button (8) and enter fractional condensation runnable interface；
Step 2: judge whether to be manually entered parameter, if it is, input desired parameters, otherwise return dispensing runnable interface；
Step 3: silicon materials dispensing fractional condensation device carries out fractional condensation using silicon materials fractional condensation calculation procedure and calculates；
Step 4: draw fractional condensation table and in the upper video data of LCDs (2)；
Step 5: judge to record whether key is pressed, if it is, records store data, otherwise return display.
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