CN106345720B - A kind of spraying nozzle automatic flushing device and its cleaning method - Google Patents
A kind of spraying nozzle automatic flushing device and its cleaning method Download PDFInfo
- Publication number
- CN106345720B CN106345720B CN201510426760.3A CN201510426760A CN106345720B CN 106345720 B CN106345720 B CN 106345720B CN 201510426760 A CN201510426760 A CN 201510426760A CN 106345720 B CN106345720 B CN 106345720B
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- China
- Prior art keywords
- rinse bath
- cleaning
- fixed part
- lifting device
- groove
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000004140 cleaning Methods 0.000 title claims abstract description 82
- 238000000034 method Methods 0.000 title claims abstract description 19
- 238000005507 spraying Methods 0.000 title claims abstract description 13
- 238000011010 flushing procedure Methods 0.000 title claims abstract description 12
- 239000007788 liquid Substances 0.000 claims abstract description 29
- 230000006698 induction Effects 0.000 claims description 29
- 238000001514 detection method Methods 0.000 claims description 9
- 239000007787 solid Substances 0.000 claims description 4
- 230000000630 rising effect Effects 0.000 claims description 3
- 230000002000 scavenging effect Effects 0.000 claims description 3
- 238000005406 washing Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 abstract description 6
- 239000002245 particle Substances 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000007921 spray Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000000889 atomisation Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000033228 biological regulation Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning In General (AREA)
Abstract
The invention belongs in semiconductor processing system to process components process field, specifically a kind of spraying nozzle automatic flushing device and its cleaning method, lifting device is mounted on lifting device fixed part, one end of rinse bath fixed part is connected with the output end of lifting device, and the other end is equipped with rinse bath；Rinse bath slot bottom lower inner is provided with groove, and the cleaning hole between multiple connection grooves and rinse bath inside is distributed along the circumference with above groove, is provided with the liquid inlet being connected with groove on rinse bath, liquid inlet is connected by pipeline with cleaning solution supply department；Method is that rinse bath is gone up and down with rinse bath fixed part by lifting device driving, and the cleaning solution of cleaning solution supply department is flowed into groove by liquid inlet, and is sprayed by each cleaning hole, cleaned to nozzle, and the liquid after cleaning is flowed out by the through-hole opened up on rinse bath.The present invention realizes the cleaning of nozzle by automatically controlling, and effectively improves the efficiency of cleaning, equipment capacity is significantly increased.
Description
Technical field
The invention belongs to, to process components process field, nozzle is used in specifically a kind of spraying in semiconductor processing system
Automatic flushing device and its cleaning method.
Background technique
Semiconductor processes refer in order on the substrate processed such as semiconductor wafer or LED substrate according to regulation pattern shape
At semiconductor layer, insulating layer and semiconductor layer etc., and to the various processing that substrate carries out.In these processing, jet-coating photoresit
Technique is a kind of more typical processing mode, is primarily directed to the substrate of fluted figure.
Due to the particularity of spraying process, when spraying photoresist, photoresist need by ultrasonic nozzle atomization and by
Nitrogen pressurization sprays, and tiny photoresist particle will be attached to substrate surface；Simultaneously as the photoresist particle of atomization can quilt
Air-flow evokes the outer surface for being attached to nozzle, if the photoresist particle for being attached to outer surface, which does not clean, will form particle contamination
(particle), product yield is influenced.Existing usual way is manually to remove wiping nozzle outer surface, but thus greatly
Reduce the percent of automatization and production capacity of equipment.
Summary of the invention
In order to solve the problems, such as equipment automatization rate and production capacity caused by manual wipping nozzle outer surface, mesh of the invention
Be a kind of spraying nozzle automatic flushing device and its cleaning method are provided.The cleaning device can use jet-coating photoresit
Nozzle is cleaned automatically, improves the production capacity of equipment automatization rate and board.
The purpose of the present invention is achieved through the following technical solutions:
Cleaning device of the invention includes rinse bath, rinse bath fixed part, lifting device, lifting device fixed part and cleaning
Liquid supply department, wherein lifting device is mounted on lifting device fixed part, and one end of the rinse bath fixed part and the lifting fill
The output end set is connected, and the other end is equipped with rinse bath；The rinse bath slot bottom lower inside is provided with groove, and on the groove
Side is distributed along the circumference with the cleaning holes between multiple connections groove and rinse bath inside, is provided on the rinse bath and groove
The liquid inlet being connected, the liquid inlet are connected by pipeline with the cleaning solution supply department；The rinse bath is solid with rinse bath
Determine portion and lifting is driven by lifting device, the cleaning solution of the cleaning solution supply department is flowed into the groove by liquid inlet, and is led to
It crosses each cleaning hole to spray, clean nozzle, the liquid after cleaning is flowed out by the through-hole opened up on the rinse bath.
Wherein: the bottom of the rinse bath is tilted down from edge to centre, i.e., the bottom of the described rinse bath is inclined-plane, respectively
The longitudinal center line in the cleaning hole is perpendicular to the inclined-plane；The groove is circular ring shape, and the through-hole is located in the groove
Between, each cleaning hole is along the circumferential direction distributed between the through-hole and groove；
The top of the lifting device fixed part is equipped with the lift adjustment portion of control rinse bath fixed part lifting height range；
The rinse bath fixed part includes that riser and the transverse slat A for being connected to the riser both ends and transverse slat B, the rinse bath are mounted on
On transverse slat A, the transverse slat B is connected with the output end of lifting device and is located at the lower section in the lift adjustment portion；The lifting
Adjustment portion is to adjust bolt, the altitude range risen by the deep-controlled rinse bath fixed part of the precession of the adjusting bolt；
Induction part and lower induction part are separately installed on the lifting device fixed part, the position of the rinse bath passes through
Position of induction part and lower induction part detection rinse bath fixed part determines on this；Liquid inlet and cleaning solution are supplied on the rinse bath
The automatic on-off valve and control rinse bath cleaning liquid inside flow whether control cleaning supplies are respectively equipped on pipeline between portion
The flow control portion of size；
The present invention sprays the cleaning method with nozzle automatic flushing device, comprising the following steps:
To work state: the lifting device is in work state, and the rinse bath fixed part is in low level, the rinse bath
Interior no cleaning solution；
Working condition: the rinse bath fixed part rises to a high position under the driving of lifting device, and the rinse bath is with clear
Washing trough fixed part rises, and nozzle lower half is coated in the rinse bath, and cleaning solution enters in groove through the liquid inlet, then
It is sprayed by each cleaning hole and nozzle is cleaned；Liquid after cleaning is flowed out by the through-hole, the lifting device driving
Rinse bath fixed part drives rinse bath to fall, into work state；
Wherein: induction part and lower induction part, the liquid inlet and cleaning solution are mounted on the lifting device fixed part
Automatic on-off valve and flow control portion are provided on pipeline between supply department, it is described when rinse bath fixed part is in low level
Lower induction part has detection signal, and the automatic on-off valve is in close state；When rinse bath fixed part is in a high position, the upper sense
Portion is answered to have detection signal, the automatic on-off valve is opened, and enters cleaning by the cleaning solution that the flow control portion controls flow
Slot cleans nozzle；After cleaning, the automatic on-off valve is closed, and the rinse bath fixed part is fallen, and lower induction part has
Signal is detected, into work state；The scavenging period is 20~40 seconds.
Advantages of the present invention and good effect are as follows:
1. the present invention can carry out the cleaning of nozzle automatically, the percent of automatization of equipment is improved, promotes board production capacity.
2. the configuration of the present invention is simple controls and uses conveniently.
Detailed description of the invention
Fig. 1 is the schematic perspective view of cleaning device of the present invention；
Fig. 2 is rinse bath top view in cleaning device of the present invention；
Fig. 3 is the overhead sectional view of rinse bath in cleaning device of the present invention；
Fig. 4 is the relative position structural schematic diagram of rinse bath and nozzle when cleaning device of the present invention works；
Wherein: 1 is nozzle, and 2 be rinse bath, and 3 be rinse bath fixed part, and 4 be lifting device, and 5 be lifting device fixed part,
6 be upper induction part, and 7 be lift adjustment portion, and 8 be lower induction part, and 9 be automatic on-off valve, and 10 be flow control portion, and 11 be cleaning solution
Supply department, 12 be cleaning hole, and 13 be groove, and 14 be liquid inlet, and 15 be through-hole.
Specific embodiment
The invention will be further described with reference to the accompanying drawing.
As shown in Figure 1, cleaning device of the present invention includes rinse bath 2, rinse bath fixed part 3, lifting device 4, lifting device
Fixed part 5, upper induction part 6, lift adjustment portion 7, lower induction part 8, automatic on-off valve 9, flow control portion 10 and cleaning solution supply
Portion 11, wherein lifting device 4 is mounted on lifting device fixed part 5, and the output end of lifting device 4 is connected with rinse bath fixed part
3；The lifting device 4 of the present embodiment can be lifting motor, lifting cylinder or lifting hydraulic cylinder.
Rinse bath fixed part 3 includes transverse slat A301, riser 302 and transverse slat B303, one end and the riser 302 of transverse slat B303
Upper end connection, the other end are connected with the output end of lifting device 4；One end of transverse slat A301 is connect with the lower end of riser 302, another
End is connected with rinse bath 2.Transverse slat A301 is parallel to each other with transverse slat B303, and is respectively perpendicular to riser 302.
Rinse bath fixed part 3 is driven by lifting device 4 and is gone up and down, and is divided in lifting device fixed part 5 towards the side of riser 302
Induction part 6 and lower induction part 8 are not installed；The upper induction part 6 and lower induction part 8 of the present embodiment can be position sensor.Clearly
Washing trough 2 is gone up and down with rinse bath fixed part 3, and the position of rinse bath 2 is detected rinse bath by induction part 6 on this and lower induction part 8 and consolidated
The position for determining portion 3 determines.Lift adjustment portion 7, the liter of the present embodiment are equipped on lifting device fixed part 5 above transverse slat B303
The height model of the deep-controlled rising of rinse bath fixed part 3 of the precession of the adjusting bolt can be passed through to adjust bolt by dropping adjustment portion 7
It encloses.
Rinse bath 2 is located at the lower section of nozzle 1 to be cleaned, and corresponding with about 1 nozzle.As shown in figures 1-4, it cleans
The lower part of slot 2 is solid construction, and top is that 1 lower half of nozzle can be coated on to interior slot.Annulus is provided with below 2 slot degree of rinse bath
The groove 13 of shape, and the liquid inlet 14 being connected with the groove 13 is provided on the side wall of rinse bath 2, liquid inlet 14 passes through pipeline
Be connected with cleaning solution supply department 11 (can be cleaning fluid tank), and be separately installed on the pipeline between automatic on-off valve 9 and
Flow control portion 10.Automatic on-off valve 9 can control whether cleaning solution is supplied, and the flow control portion 10 of the present embodiment can be flow
Valve can control the uninterrupted of 2 cleaning liquid inside of rinse bath.
The bottom of rinse bath 2 is tilted down from edge to centre, i.e., the bottom of rinse bath 2 is inclined-plane, and in slot bottom
Between be provided with through-hole 15.Multiple cleaning holes 12 are along the circumferential direction evenly equipped in the top of groove 13, each cleaning hole 12 is connected to
In 2 slot of groove 13 and rinse bath between space, and the longitudinal center line in each cleaning hole 12 is perpendicular to the inclined-plane of 2 bottom of rinse bath.
Cleaning method of the invention are as follows: the following steps are included:
To work state: lifting device 4 is in work state, and rinse bath fixed part 3 is in low level, and lower induction part 8 has detection
Signal, automatic on-off valve 9 are in close state, without cleaning solution in rinse bath 2.
Working condition: rinse bath fixed part 3 rises to a high position under the driving of lifting device 4, and rinse bath 2 is solid with rinse bath
Determine the rising of portion 3, by adjusting lift adjustment portion 7,1 lower half of nozzle is coated in rinse bath 2, upper induction part 6 has detection to believe
Number, automatic on-off valve 9 is opened, and is entered in rinse bath 2 by the cleaning solution that flow control portion 10 controls flow through liquid inlet 14
It in groove 13, then is sprayed by each cleaning hole 12, nozzle 1 is cleaned, scavenging period is that (the present embodiment can be 30 in 20~40 seconds
Second).After cleaning, automatic on-off valve 9 is closed, and lifting device 4 drives rinse bath fixed part 3 that rinse bath 2 is driven to fall, lower induction part
8 have detection signal, and into work state, the liquid after cleaning is flowed out by through-hole 15.
Claims (8)
1. a kind of spraying nozzle automatic flushing device, it is characterised in that: including rinse bath (2), rinse bath fixed part (3), rise
Falling unit (4), lifting device fixed part (5) and cleaning solution supply department (11), wherein it is solid to be mounted on lifting device for lifting device (4)
Determine on portion (5), one end of the rinse bath fixed part (3) is connected with the output end of the lifting device (4), and the other end is equipped with clearly
Washing trough (2)；Rinse bath (2) the slot bottom lower inside is provided with groove (13), and is distributed along the circumference with above the groove (13)
Cleaning holes (12) between multiple connections groove (13) and rinse bath (2) inside, are provided on the rinse bath (2) and groove
(13) liquid inlet (14) being connected, the liquid inlet (14) are connected by pipeline with the cleaning solution supply department (11)；It is described
Rinse bath (2) is driven by lifting device (4) with rinse bath fixed part (3) and is gone up and down, the cleaning solution of the cleaning solution supply department (11)
It is flowed into the groove (13) by liquid inlet (14), and is sprayed by each cleaning hole (12), is clear to nozzle (1) progress
It washes, the liquid after cleaning is flowed out by the through-hole (15) opened up on the rinse bath (2)；
The bottom of the rinse bath (2) is tilted down from edge to centre, i.e., the bottom of the described rinse bath (2) is inclined-plane, each institute
The longitudinal center line of cleaning hole (12) is stated perpendicular to the inclined-plane；
The groove (13) is circular ring shape, and the through-hole (15) is located at the centre of the groove (13), each cleaning hole (12) edge
Circumferencial direction is distributed between the through-hole (15) and groove (13).
2. spraying nozzle automatic flushing device according to claim 1, it is characterised in that: the lifting device fixed part
(5) top is equipped with the lift adjustment portion (7) of control rinse bath fixed part (3) lifting height range.
3. spraying nozzle automatic flushing device as described in claim 2, it is characterised in that: the rinse bath fixed part (3)
Including riser (302) and it is connected to the transverse slat A (301) and transverse slat B (303) at riser (302) both ends, the rinse bath
(2) it is mounted on transverse slat A (301), the transverse slat B (303) is connected with the output end of lifting device (4) and is located at the liter
The lower section of adjustment portion (7) drops；The lift adjustment portion (7) is to adjust bolt, passes through the deep-controlled institute of the precession of the adjusting bolt
State the altitude range of rinse bath fixed part (3) rising.
4. spraying nozzle automatic flushing device according to claim 1, it is characterised in that: the lifting device fixed part
(5) induction part (6) and lower induction part (8) are separately installed on, the position of the rinse bath (2) passes through induction part (6) on this
And the position of lower induction part (8) detection rinse bath fixed part (3) determines.
5. spraying nozzle automatic flushing device according to claim 1, it is characterised in that: enter liquid on the rinse bath (2)
The automatic on-off valve (9) whether control cleaning solution is supplied is respectively equipped on pipeline between mouth (14) and cleaning solution supply department (11)
And the flow control portion (10) of control rinse bath (2) cleaning liquid inside uninterrupted.
6. it is a kind of by the cleaning method of nozzle automatic flushing device of spraying described in claim 1 to 5 any claim, it is special
Sign is: the following steps are included:
To work state: the lifting device (4) is in work state, and the rinse bath fixed part (3) is in low level, the cleaning
Without cleaning solution in slot (2)；
Working condition: the rinse bath fixed part (3) rises to a high position, the rinse bath (2) under the driving of lifting device (4)
Rise with rinse bath fixed part (3), nozzle (1) lower half is coated in the rinse bath (2), cleaning solution is through the liquid inlet
(14) enter in groove (13), then sprayed by each cleaning hole (12) and nozzle (1) is cleaned；Liquid after cleaning is by institute
Through-hole (15) outflow is stated, lifting device (4) driving rinse bath fixed part (3) drives rinse bath (2) to fall, into work shape
State.
7. cleaning method according to claim 6, it is characterised in that: be mounted with sense on the lifting device fixed part (5)
Portion (6) and lower induction part (8) are answered, is provided on the pipeline between the liquid inlet (14) and cleaning solution supply department (11) automatic logical
Disconnected valve (9) and flow control portion (10), when rinse bath fixed part (3) is in low level, the lower induction part (8) has detection to believe
Number, the automatic on-off valve (9) is in close state；When rinse bath fixed part (3) are in a high position, the upper induction part (6) has
Signal is detected, the automatic on-off valve (9) is opened, and enters cleaning by the cleaning solution that the flow control portion (10) controls flow
Slot (2) cleans nozzle (1)；After cleaning, the automatic on-off valve (9) is closed, and the rinse bath fixed part (3) falls
Under, lower induction part (8) has detection signal, into work state.
8. cleaning method according to claim 6, it is characterised in that: the scavenging period is 20~40 seconds.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510426760.3A CN106345720B (en) | 2015-07-17 | 2015-07-17 | A kind of spraying nozzle automatic flushing device and its cleaning method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510426760.3A CN106345720B (en) | 2015-07-17 | 2015-07-17 | A kind of spraying nozzle automatic flushing device and its cleaning method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106345720A CN106345720A (en) | 2017-01-25 |
| CN106345720B true CN106345720B (en) | 2019-04-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510426760.3A Active CN106345720B (en) | 2015-07-17 | 2015-07-17 | A kind of spraying nozzle automatic flushing device and its cleaning method |
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| Country | Link |
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| CN (1) | CN106345720B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107138842A (en) * | 2017-07-03 | 2017-09-08 | 上海精虹新能源科技有限公司 | A kind of automatic cleaning apparatus for being capable of automated cleaning Resistance Welding nozzle and point welding rod |
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| US5845357A (en) * | 1996-11-18 | 1998-12-08 | Motoman, Inc. | Nozzle cleaning device |
| JP2005270848A (en) * | 2004-03-25 | 2005-10-06 | Tokyo Ohka Kogyo Co Ltd | Device and method for adjusting tip end of slit nozzle |
| CN201552152U (en) * | 2009-09-22 | 2010-08-18 | 文明华 | Cleaning machine |
| CN102125904A (en) * | 2011-04-08 | 2011-07-20 | 杭州精工机械有限公司 | Special gluing head cleaning device for full automatic glue edge sealing production line and cleaning method thereof |
| CN202356349U (en) * | 2011-11-22 | 2012-08-01 | 万向电动汽车有限公司 | Cleaning device for nozzle of coater |
| CN102762310A (en) * | 2010-02-12 | 2012-10-31 | 本田技研工业株式会社 | Cleaning apparatus and cleaning method for coating gun |
| CN102941735A (en) * | 2012-11-28 | 2013-02-27 | 东莞市旭科广告设备有限公司 | Automatic nozzle cleaning machine |
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| CN103506340A (en) * | 2012-06-29 | 2014-01-15 | 北京七星华创电子股份有限公司 | Spraying device |
| WO2015037339A1 (en) * | 2013-09-12 | 2015-03-19 | 株式会社日立ハイテクノロジーズ | Nozzle cleaning method and automated analyzer |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6084376B2 (en) * | 2012-06-19 | 2017-02-22 | 武蔵エンジニアリング株式会社 | Cleaning device and cleaning method for liquid material discharge device |
| FR2994111B1 (en) * | 2012-07-31 | 2014-08-22 | Fillon Technologies | CLEANING DEVICE FOR SPRAY GUN |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5845357A (en) * | 1996-11-18 | 1998-12-08 | Motoman, Inc. | Nozzle cleaning device |
| JP2005270848A (en) * | 2004-03-25 | 2005-10-06 | Tokyo Ohka Kogyo Co Ltd | Device and method for adjusting tip end of slit nozzle |
| EP2416895B1 (en) * | 2009-04-08 | 2013-08-07 | Fillon Technologies | Cleaning device for spray gun |
| CN201552152U (en) * | 2009-09-22 | 2010-08-18 | 文明华 | Cleaning machine |
| CN102762310A (en) * | 2010-02-12 | 2012-10-31 | 本田技研工业株式会社 | Cleaning apparatus and cleaning method for coating gun |
| CN102125904A (en) * | 2011-04-08 | 2011-07-20 | 杭州精工机械有限公司 | Special gluing head cleaning device for full automatic glue edge sealing production line and cleaning method thereof |
| CN202356349U (en) * | 2011-11-22 | 2012-08-01 | 万向电动汽车有限公司 | Cleaning device for nozzle of coater |
| CN103506340A (en) * | 2012-06-29 | 2014-01-15 | 北京七星华创电子股份有限公司 | Spraying device |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN106345720A (en) | 2017-01-25 |
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Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Patentee after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Patentee before: Shenyang Siayuan Electronic Equipment Co., Ltd. |
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