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CN106340511A - LED chip and its packaging method - Google Patents

LED chip and its packaging method Download PDF

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Publication number
CN106340511A
CN106340511A CN201610930913.2A CN201610930913A CN106340511A CN 106340511 A CN106340511 A CN 106340511A CN 201610930913 A CN201610930913 A CN 201610930913A CN 106340511 A CN106340511 A CN 106340511A
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Prior art keywords
led chip
light
translucent
emitting surface
layer
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Inventor
吴志浩
杨春艳
王江波
刘榕
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HC Semitek Zhejiang Co Ltd
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HC Semitek Zhejiang Co Ltd
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Priority to CN201610930913.2A priority Critical patent/CN106340511A/en
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • H10H20/851Wavelength conversion means
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of semiconductor or other solid state devices
    • H01L25/03Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/075Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H10H20/00
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/85Packages
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01Manufacture or treatment
    • H10H20/036Manufacture or treatment of packages
    • H10H20/0362Manufacture or treatment of packages of encapsulations

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Led Device Packages (AREA)

Abstract

The invention provides an LED chip and its packaging method wherein the LED chip comprises an LED chip unit with at least one lighting face; and a half transparent packaging structure, the opening at one side of which forms holding space for the LED chip unit. The half transparent packaging structure contains phosphor, and at least a portion of the outgoing light of the at least one lighting face is emitted from the semiconductor packaging structure. The LED chip and the packaging method increase the performance of an LED chip product.

Description

一种LED芯片及其封装方法A kind of LED chip and packaging method thereof

技术领域technical field

本发明属于光电子技术领域,尤其涉及一种LED芯片及其封装方法。The invention belongs to the technical field of optoelectronics, and in particular relates to an LED chip and a packaging method thereof.

背景技术Background technique

发光二极管(Light Emitting Diode,LED)因其高亮度、低热量、长寿命等优点,被称为21世纪最有发展前景的绿色照明光源,被用于各种应用产品包括光源、照明设备、智能终端等。而在智能终端日益轻薄化,可穿戴电子备受瞩目的今天,LED芯片的封装大小和功能的融合变得日趋重要。Light Emitting Diode (LED) is known as the most promising green lighting source in the 21st century because of its high brightness, low heat, and long life. It is used in various applications including light sources, lighting equipment, smart terminal etc. Today, as smart terminals become thinner and lighter, and wearable electronics attract much attention, the integration of package size and functions of LED chips has become increasingly important.

芯片尺寸封装(chip scale package,CSP)技术作为一种新的封装技术,在下一代分立式功率LED应用中吸引行业关注,具有较大提升空间。随着倒装芯片良率的提升及产能规模的扩大,其价格优势将体现更加明显。今天,CSP已经不只停留在研发室内,已经在某些应用中大批量生产,并显示出其优势与价值。目前,大多数倒装LED芯片的CSP技术一般要经过倒装绑定、喷涂荧光粉、模制透镜、切割、测试分选五个制作步骤。As a new packaging technology, chip scale package (CSP) technology has attracted the attention of the industry in the application of next-generation discrete power LEDs, and has a large room for improvement. With the improvement of flip chip yield rate and the expansion of production capacity, its price advantage will be more obvious. Today, CSP has not only stayed in the research and development room, but has been mass-produced in some applications, and has shown its advantages and value. At present, the CSP technology of most flip-chip LED chips generally goes through five manufacturing steps: flip-chip bonding, phosphor spraying, lens molding, cutting, and testing and sorting.

上述现有的CSP技术是直接在LED芯片的发光面涂抹荧光粉,不但工艺复杂,而且荧光粉层容易出现厚度不均匀,形状不规则的情况,将导致LED芯片的出射光斑不均匀,极大的影响LED芯片的产品性能。The above-mentioned existing CSP technology is to directly smear phosphor powder on the light-emitting surface of the LED chip. Not only is the process complicated, but the phosphor layer is prone to uneven thickness and irregular shape, which will lead to uneven emission spots of the LED chip and greatly affect the product performance of LED chips.

发明内容Contents of the invention

有鉴于此,本发明提出一种LED芯片及其封装方法,以提高LED芯片的产品性能。In view of this, the present invention proposes an LED chip and a packaging method thereof, so as to improve the product performance of the LED chip.

第一方面,本发明实施例提供了一种LED芯片,该芯片包括:In a first aspect, an embodiment of the present invention provides an LED chip, which includes:

LED芯片单元,包括至少一个发光面;LED chip unit, including at least one light-emitting surface;

半透明封装结构,一侧开口形成有容纳空间,所述LED芯片单元设置在所述容纳空间内,所述半透明封装结构中含有荧光粉,所述至少一个发光面的至少部分出射光线透过所述半导体封装结构发出。A translucent encapsulation structure, one side of which is opened to form an accommodating space, the LED chip unit is arranged in the accommodating space, the translucent encapsulation structure contains fluorescent powder, and at least part of the emitted light from the at least one light-emitting surface passes through The semiconductor package structure is issued.

可选地,所有发光面的出射光均透过所述半导体封装结构发出。Optionally, all outgoing light from the light-emitting surface is emitted through the semiconductor package structure.

可选地,所述LED芯片单元包括衬底,以及形成在所述衬底上的发光结构;Optionally, the LED chip unit includes a substrate, and a light emitting structure formed on the substrate;

所述发光面为所述衬底的背面和侧面。The light-emitting surface is the back and side surfaces of the substrate.

可选地,在所述半透明封装结构与所述LED芯片单元的所述发光面之间设置一层透明的有机胶体材料。Optionally, a layer of transparent organic colloidal material is disposed between the translucent encapsulation structure and the light emitting surface of the LED chip unit.

可选地,所述半透明封装结构为一体成型结构。Optionally, the translucent encapsulation structure is an integral molding structure.

可选地,所述半透明封装结构是含有荧光粉的玻璃或含有荧光粉的胶体薄膜。Optionally, the translucent encapsulation structure is glass containing phosphor powder or a colloidal film containing phosphor powder.

可选地,所述半透明封装结构在背离所述容纳空间的底面上有多个周期性凹凸图案。Optionally, the translucent encapsulation structure has a plurality of periodic concave-convex patterns on the bottom surface facing away from the containing space.

可选地,所述周期性凹凸图案为锥形和/或半圆形。Optionally, the periodic concave-convex pattern is conical and/or semicircular.

第二方面,本发明实施例提供了一种LED芯片的封装方法,该方法包括:In a second aspect, an embodiment of the present invention provides a packaging method for an LED chip, the method comprising:

将多个LED芯片单元放置到具有一侧开口形成多个容纳空间的半透明封装结构内,所述半透明封装结构中含有荧光粉,所述至少一个发光面的至少部分出射光线透过所述半导体封装结构发出;Place a plurality of LED chip units in a translucent packaging structure with one side opening to form a plurality of accommodation spaces, the translucent packaging structure contains fluorescent powder, and at least part of the emitted light from the at least one light-emitting surface passes through the Semiconductor package structure issued;

对所述半透明封装结构进行切割,形成单个分立的LED芯片。The translucent package structure is cut to form individual discrete LED chips.

可选地,所述将多个LED芯片单元放置到具有一侧开口形成多个容纳空间的半透明封装结构内之前还包括:Optionally, before placing a plurality of LED chip units into a translucent packaging structure with one side opening forming a plurality of accommodation spaces, the method further includes:

在所述半透明封装结构的容纳空间表面涂一层透明的有机胶体材料;Coating a layer of transparent organic colloid material on the surface of the accommodation space of the translucent packaging structure;

所述对所述半透明封装结构进行切割,形成单个分立的LED芯片之前还包括:Before cutting the translucent packaging structure to form a single discrete LED chip, it also includes:

对所述半透明封装结构进行烘烤以固化所述有机胶体材料。Bake the translucent encapsulation structure to cure the organic colloid material.

本发明实施例提供了一种LED芯片及其封装方法,通过把LED芯片单元设置在半透明封装结构的容纳空间内,半透明封装结构中含有荧光粉,至少一个发光面的至少部分出射光线透过半导体封装结构发出。整个工艺过程简单,成本少并且发光器件发光面多,工艺方法简单,电学性能稳定。An embodiment of the present invention provides an LED chip and a packaging method thereof. By arranging the LED chip unit in the accommodation space of the translucent packaging structure, the translucent packaging structure contains fluorescent powder, and at least part of the emitted light from at least one light-emitting surface is transmitted. issued through the semiconductor package structure. The whole process is simple, the cost is low, the light-emitting device has many light-emitting surfaces, the process method is simple, and the electrical performance is stable.

附图说明Description of drawings

下面将通过参照附图详细描述本发明或现有技术的示例性实施例,使本领域的普通技术人员更清楚本发明的上述及其他特征和优点,附图中:The exemplary embodiments of the present invention or prior art will be described in detail below with reference to the accompanying drawings, so that those of ordinary skill in the art will be more aware of the above-mentioned and other features and advantages of the present invention. In the accompanying drawings:

图1为本发明实施例一提供的一种LED芯片剖面图;Fig. 1 is a cross-sectional view of an LED chip provided by Embodiment 1 of the present invention;

图2为本发明实施例一提供的一种LED芯片单元剖面图;Fig. 2 is a cross-sectional view of an LED chip unit provided by Embodiment 1 of the present invention;

图3为本发明实施例一提供的一种LED芯片剖面图;Fig. 3 is a cross-sectional view of an LED chip provided by Embodiment 1 of the present invention;

图4为本发明实施例一提供的一种LED芯片剖面图;Fig. 4 is a cross-sectional view of an LED chip provided by Embodiment 1 of the present invention;

图5为本发明实施例一提供的一种LED芯片剖面图;Fig. 5 is a cross-sectional view of an LED chip provided by Embodiment 1 of the present invention;

图6为本发明实施例二提供的一种LED芯片制备方法流程图;6 is a flow chart of a method for preparing an LED chip provided by Embodiment 2 of the present invention;

图7a-图7b为本发明实施例二提供的一种LED芯片制备方法各步骤对应的剖面图;7a-7b are cross-sectional views corresponding to each step of an LED chip manufacturing method provided in Embodiment 2 of the present invention;

图8为本发明实施例二提供的一种LED芯片制备方法流程图;FIG. 8 is a flow chart of a method for preparing an LED chip provided by Embodiment 2 of the present invention;

图9a-图9o为本发明实施例二提供的一种LED芯片制备方法各步骤对应的剖面图。9a-9o are cross-sectional views corresponding to each step of an LED chip manufacturing method provided by Embodiment 2 of the present invention.

具体实施方式detailed description

下面结合附图和实施例对本发明作进一步的详细说明。可以理解的是,此处所描述的具体实施例仅仅用于解释本发明,而非对本发明的限定。另外还需要说明的是,为了便于描述,附图中仅示出了与本发明相关的部分而非全部结构。The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for the convenience of description, only some structures related to the present invention are shown in the drawings but not all structures.

图1为本发明实施例一提供的一种LED芯片剖面图。图2为本发明实施例一提供的一种LED芯片单元剖面图。图3为本发明实施例一提供的一种LED芯片剖面图。图4为本发明实施例一提供的一种LED芯片剖面图。图5为本发明实施例一提供的一种LED芯片剖面图。FIG. 1 is a cross-sectional view of an LED chip provided by Embodiment 1 of the present invention. Fig. 2 is a cross-sectional view of an LED chip unit provided by Embodiment 1 of the present invention. FIG. 3 is a cross-sectional view of an LED chip provided by Embodiment 1 of the present invention. FIG. 4 is a cross-sectional view of an LED chip provided by Embodiment 1 of the present invention. FIG. 5 is a cross-sectional view of an LED chip provided by Embodiment 1 of the present invention.

参见图1,本发明提供了一种LED芯片,该芯片包括:LED芯片单元10,包括至少一个发光面。半透明封装结构20,一侧开口形成有容纳空间30,LED芯片单元10设置在容纳空间30内,图中虚线框内区域,半透明封装结构20中含有荧光粉,所述至少一个发光面的至少部分出射光线透过半导体封装结构20发出。Referring to FIG. 1 , the present invention provides an LED chip, which includes: an LED chip unit 10 including at least one light emitting surface. The translucent encapsulation structure 20 has an opening on one side to form an accommodating space 30, and the LED chip unit 10 is arranged in the accommodating space 30. In the area inside the dotted line frame in the figure, the translucent encapsulation structure 20 contains phosphor powder, and the at least one light-emitting surface At least part of the emitted light is emitted through the semiconductor package structure 20 .

本发明实施例提供了一种LED芯片,通过把LED芯片单元设置在半透明封装结构的容纳空间内,半透明封装结构中含有荧光粉,至少一个发光面的至少部分出射光线透过半导体封装结构发出。整个工艺过程简单,成本少并且发光器件发光面多,电学性能稳定。本发明实施例通过用含有荧光粉的半透明封装结构让LED芯片发光,其中发光面为大于等于一个,增加了出射光的机会,提高了发光效率。An embodiment of the present invention provides an LED chip. By arranging the LED chip unit in the accommodation space of the translucent package structure, the translucent package structure contains fluorescent powder, and at least part of the emitted light from at least one light-emitting surface passes through the semiconductor package structure. issue. The whole process is simple, the cost is low, the light-emitting device has many light-emitting surfaces, and the electrical performance is stable. In the embodiment of the present invention, the LED chip is made to emit light by using a translucent packaging structure containing phosphor, wherein the light-emitting surface is greater than or equal to one, which increases the chance of emitting light and improves the luminous efficiency.

可选地,在上述技术方案中,所有发光面的出射光均透过半导体封装结构20发出。Optionally, in the above technical solution, all outgoing light from the light emitting surface is emitted through the semiconductor package structure 20 .

可选地,参见图2,在上述技术方案中,LED芯片单元10包括衬底110,以及形成在衬底110上的发光结构。发光面为所述衬底110的背面1100和LED芯片单元的4个侧面1101,即有5个发光面,大大提高了LED芯片单元10的发光效率。Optionally, referring to FIG. 2 , in the above technical solution, the LED chip unit 10 includes a substrate 110 and a light emitting structure formed on the substrate 110 . The light-emitting surfaces are the back surface 1100 of the substrate 110 and the four side surfaces 1101 of the LED chip unit, that is, there are five light-emitting surfaces, which greatly improves the luminous efficiency of the LED chip unit 10 .

示例性地,参照图2,在上述技术方案中,LED芯片单元10包括衬底110,在衬底110的发光结构为:N型的III族氮化物半导体层111,位于衬底110的上方。在N型III族氮化物半导体层111的上方为一层多量子阱有源层112。在多量子阱有源层112的上方为P型III族氮化物半导体层113。在P型III族氮化物半导体层113的上方为与P型III族氮化物半导体层113直接相连的第一电极层114。在第一电极层114表面有到达N型的III族氮化物半导体层111的第一凹槽115。在第一电极层114表面及第一凹槽115的表面为绝缘层116。绝缘层116表面有到达所述第一电极层114的第二凹槽117。在绝缘层116表面以及第二凹槽117内为第二电极层118,第二电极层118与第一电极层114电连接。在绝缘层116表面和第一凹槽115内为第三电极层119,第三电极层119与N型的III族氮化物半导体层111电连接,第二电极层118与第三电极层119不连接。其中,绝缘层116是具有低吸光率、高光学反射性的多层介质膜层,例如可以为二氧化硅、氮化硅、氧化铝和氧化镓等,但是不局限于上述材料。其具有高反射率的多周期布拉格结构,比如多周期的二氧化硅/二氧化钛介质薄膜。减少了LED芯片单元发出的光透出,增加了外量子效率。薄膜层第一电极层114为金属氧化物透明导电层和高光学反射性金属层中的一种。金属膜层例如可以采用Ag、Au、Al、Pt以及Rh等。金属氧化物透明导电层的材料可以是包括但不局限于以下材料:氧化铟锡、掺镓的氧化锌、掺铝的氧化锌以及石墨烯等具有高透光率、高导电性的材料。第一电极层114和P型III族氮化物半导体层113之间形成了良好的欧姆接触。Exemplarily, referring to FIG. 2 , in the above technical solution, the LED chip unit 10 includes a substrate 110 , and the light-emitting structure on the substrate 110 is: an N-type III-nitride semiconductor layer 111 located above the substrate 110 . On top of the N-type Group III nitride semiconductor layer 111 is a multi-quantum well active layer 112 . Above the MQW active layer 112 is a P-type Group III nitride semiconductor layer 113 . Above the P-type III-nitride semiconductor layer 113 is a first electrode layer 114 directly connected to the P-type III-nitride semiconductor layer 113 . On the surface of the first electrode layer 114 there is a first groove 115 reaching the N-type Group III nitride semiconductor layer 111 . An insulating layer 116 is formed on the surface of the first electrode layer 114 and the surface of the first groove 115 . The surface of the insulating layer 116 has a second groove 117 reaching the first electrode layer 114 . On the surface of the insulating layer 116 and in the second groove 117 is a second electrode layer 118 , and the second electrode layer 118 is electrically connected to the first electrode layer 114 . On the surface of the insulating layer 116 and in the first groove 115 is a third electrode layer 119, the third electrode layer 119 is electrically connected to the N-type Group III nitride semiconductor layer 111, and the second electrode layer 118 is not connected to the third electrode layer 119. connect. Wherein, the insulating layer 116 is a multilayer dielectric film layer with low light absorption rate and high optical reflectivity, such as silicon dioxide, silicon nitride, aluminum oxide, gallium oxide, etc., but not limited to the above materials. It has a multi-period Bragg structure with high reflectivity, such as a multi-period silicon dioxide/titania dielectric film. The transmission of light emitted by the LED chip unit is reduced, and the external quantum efficiency is increased. Thin film layer The first electrode layer 114 is one of a metal oxide transparent conductive layer and a highly optical reflective metal layer. For example, Ag, Au, Al, Pt, and Rh can be used for the metal film layer. The material of the metal oxide transparent conductive layer may include but not limited to the following materials: indium tin oxide, gallium-doped zinc oxide, aluminum-doped zinc oxide, graphene and other materials with high light transmittance and high conductivity. A good ohmic contact is formed between the first electrode layer 114 and the P-type group III nitride semiconductor layer 113 .

可选地,参见图3,在半透明封装结构20与LED芯片单元的发光面之间设置一层透明的有机胶体材料40。示例性地,透明有机胶体材料可以是环氧树脂等有机材料。Optionally, referring to FIG. 3 , a layer of transparent organic colloidal material 40 is provided between the translucent encapsulation structure 20 and the light-emitting surface of the LED chip unit. Exemplarily, the transparent organic colloid material may be an organic material such as epoxy resin.

可选地,参见图4,所述半透明封装结构20为一体成型结构。其中,一体成型结构是指该半透明结构在制作的过程中不是通过拼接、粘合多部分该物质而完成的。一体成型结构保证足够荧光粉的均匀性,以保障光斑的均匀性。Optionally, referring to FIG. 4 , the translucent encapsulation structure 20 is an integrally formed structure. Wherein, the integrally formed structure means that the translucent structure is not completed by splicing or bonding multiple parts of the substance during the manufacturing process. The one-piece molding structure ensures sufficient uniformity of the phosphor powder to ensure uniformity of the light spot.

可选地,半透明封装结构20是含有荧光粉的玻璃或含有荧光粉的胶体薄膜。因为有荧光粉,所以发光二极管发出来的光通过发光面后,一部分激发荧光粉发出对应颜色的光,荧光粉发出来的光可以和二极管发出的光耦合在一起,得到想要的光斑。Optionally, the translucent encapsulation structure 20 is glass containing phosphor powder or a colloidal film containing phosphor powder. Because of the phosphor, after the light emitted by the LED passes through the light-emitting surface, a part of the phosphor is excited to emit light of the corresponding color, and the light emitted by the phosphor can be coupled with the light emitted by the diode to obtain the desired spot.

可选地,在上述技术方案中,半透明封装结构20在背离所述容纳空间的底面上有多个周期性凹凸图案。需要说明的是图案的形状不限。Optionally, in the above technical solution, the translucent encapsulation structure 20 has a plurality of periodic concave-convex patterns on the bottom surface facing away from the accommodating space. It should be noted that the shape of the pattern is not limited.

可选地,所述周期性凹凸图案为锥形和/或半圆形。Optionally, the periodic concave-convex pattern is conical and/or semicircular.

参见图3和图4,所述周期性凹凸图案为锥形200。参见图5,周期性凹凸图案为半圆形201。周期性凹凸图案还可以同时包括锥形和半圆形。这样的周期性凹凸图案是为了增加发光率。Referring to FIG. 3 and FIG. 4 , the periodic concave-convex pattern is tapered 200 . Referring to FIG. 5 , the periodic concave-convex pattern is a semicircle 201 . The periodic concave-convex pattern can also include both cones and semicircles. Such a periodic concavo-convex pattern is to increase luminous efficiency.

实施例二Embodiment two

图6为本发明实施例二提供的一种LED芯片制备方法流程图。图7a-图7b为本发明实施例二提供的一种LED芯片制备方法各步骤对应的剖面图。图8为本发明实施例二提供的一种LED芯片制备方法流程图。图9a-图9o为本发明实施例二提供的一种LED芯片制备方法各步骤对应的剖面图。FIG. 6 is a flow chart of a method for manufacturing an LED chip provided by Embodiment 2 of the present invention. 7a-7b are cross-sectional views corresponding to each step of an LED chip manufacturing method provided in Embodiment 2 of the present invention. FIG. 8 is a flow chart of a method for manufacturing an LED chip provided by Embodiment 2 of the present invention. 9a-9o are cross-sectional views corresponding to each step of an LED chip manufacturing method provided by Embodiment 2 of the present invention.

在上述实施例一的基础上,本发明实施例二提供了一种LED芯片的封装方法,需要说明的是,上述实施例涉及到的LED芯片是可以通过本实施例中提供的LED芯片封装方法完成的。参见图6,该方法步骤如下:On the basis of the first embodiment above, the second embodiment of the present invention provides an LED chip packaging method. It should be noted that the LED chip involved in the above embodiment can be packaged through the LED chip packaging method provided in this embodiment Completed. Referring to Figure 6, the method steps are as follows:

步骤110、将多个LED芯片单元放置到具有一侧开口形成多个容纳空间的半透明封装结构内,半透明封装结构中含有荧光粉,至少一个发光面的至少部分出射光线透过半导体封装结构发出。Step 110, placing a plurality of LED chip units into a translucent package structure with one side opening forming multiple accommodation spaces, the translucent package structure contains phosphor, and at least part of the emitted light from at least one light-emitting surface passes through the semiconductor package structure issue.

参见图7a,将多个LED芯片单元10放置到具有一侧开口形成多个容纳空间30的半透明封装结构20内,半透明封装结构20中含有荧光粉,至少一个发光面的至少部分出射光线透过所述半导体封装结构发出。即LED芯片单元发出的光通过半透明封装结构20作为发光面。需要说明的是,随着透明程度增高,出射的LED芯片单元的光的比例在提高。对于同一块半透明封装结构20来说,透明程度越高,荧光粉的含量相对减少。荧光粉的加入应该有一个优选的含量范围,一方面,足够比例的光透射出来,增加外量子效率。另一方面,LED芯片单元的光照射到荧光粉上激发出荧光粉发出光,这两种光可以耦合在一起,形成想要的光斑。Referring to Fig. 7a, a plurality of LED chip units 10 are placed in a translucent encapsulation structure 20 having one side opening to form a plurality of accommodating spaces 30, the translucent encapsulation structure 20 contains phosphor, and at least part of at least one light-emitting surface emits light emitted through the semiconductor package structure. That is, the light emitted by the LED chip unit passes through the translucent encapsulation structure 20 as a light emitting surface. It should be noted that as the degree of transparency increases, the proportion of emitted light from the LED chip unit increases. For the same translucent encapsulation structure 20 , the higher the degree of transparency, the relatively less phosphor content. The addition of phosphor should have a preferred content range. On the one hand, a sufficient proportion of light is transmitted to increase the external quantum efficiency. On the other hand, the light from the LED chip unit irradiates the phosphor to excite the phosphor to emit light, and the two kinds of light can be coupled together to form a desired light spot.

步骤120、对半透明封装结构进行切割,形成单个分立的LED芯片。Step 120, cutting the translucent packaging structure to form individual discrete LED chips.

参见图7b,对半透明封装结构20进行纵向切割,形成了单个分立的LED芯片。Referring to Fig. 7b, the translucent packaging structure 20 is cut longitudinally to form a single discrete LED chip.

本发明实施例提供了一种LED芯片封装方法,通过把LED芯片单元设置在半透明封装结构的容纳空间内,半透明封装结构中含有荧光粉,至少一个发光面的至少部分出射光线透过半导体封装结构发出。整个工艺过程简单,成本少并且发光器件发光面多,工艺方法简单,电学性能稳定。An embodiment of the present invention provides a LED chip packaging method. By arranging the LED chip unit in the accommodation space of the translucent packaging structure, the translucent packaging structure contains fluorescent powder, and at least part of the emitted light from at least one light-emitting surface passes through the semiconductor. Encapsulation structure emitted. The whole process is simple, the cost is low, the light-emitting device has many light-emitting surfaces, the process method is simple, and the electrical performance is stable.

示例性地,参见图8上述实施例一中提到的LED芯片单元10的制备方法如下:Exemplarily, referring to FIG. 8, the preparation method of the LED chip unit 10 mentioned in the first embodiment above is as follows:

步骤210、提供衬底。Step 210, providing a substrate.

参见图9a,衬底110例如可以是蓝宝石衬底,碳化硅衬底或者是其它绝缘透明衬底。Referring to Fig. 9a, the substrate 110 may be, for example, a sapphire substrate, a silicon carbide substrate or other insulating and transparent substrates.

步骤211、在衬底上方形成N型的III族氮化物半导体层。Step 211 , forming an N-type Group III nitride semiconductor layer on the substrate.

步骤212、在N型半导体层的上方形成一层多量子阱有源层。Step 212, forming a multi-quantum well active layer on the N-type semiconductor layer.

步骤213、在多量子阱有源层的上方形成P型的III族氮化物半导体层。Step 213 , forming a P-type Group III nitride semiconductor layer on the multi-quantum well active layer.

参见图9b~图9d,在衬底110的上方依次形成N型III族氮化物半导体层111、多量子阱有源层112以及P型III族氮化物半导体层113。Referring to FIGS. 9 b to 9 d , an N-type III-nitride semiconductor layer 111 , a multi-quantum well active layer 112 and a P-type III-nitride semiconductor layer 113 are sequentially formed above the substrate 110 .

步骤214、在P型的III族氮化物半导体层的上方形成与P型III族氮化物半导体层直接相连的第一电极层。Step 214 , forming a first electrode layer directly connected to the P-type III-nitride semiconductor layer above the P-type III-nitride semiconductor layer.

参照图9e,在P型III族氮化物半导体层113的上方形成与P型III族氮化物半导体层113直接相连的第一电极层114。示例性地,薄膜第一电极层114可以包含有金属氧化物透明导电层和高光学反射性金属层中的一种。Referring to FIG. 9 e , the first electrode layer 114 directly connected to the P-type III-nitride semiconductor layer 113 is formed over the P-type III-nitride semiconductor layer 113 . Exemplarily, the thin-film first electrode layer 114 may include one of a metal oxide transparent conductive layer and a highly optically reflective metal layer.

步骤215、在第一电极层表面进行沟槽刻蚀,以形成到达N型的III族氮化物半导体层的第一凹槽。Step 215 , performing trench etching on the surface of the first electrode layer to form a first groove reaching the N-type III-nitride semiconductor layer.

参见图9f,在第一电极层114表面进行沟槽刻蚀,以形成到达N型的III族氮化物半导体层的第一凹槽115。刻蚀方法例如可以是干法刻蚀也可以是湿法刻蚀。Referring to FIG. 9f , trench etching is performed on the surface of the first electrode layer 114 to form a first groove 115 reaching the N-type Group III nitride semiconductor layer. The etching method may be, for example, dry etching or wet etching.

步骤216、在第一电极层表面及第一凹槽的表面形成绝缘层。Step 216 , forming an insulating layer on the surface of the first electrode layer and the surface of the first groove.

参见图9g,在第一电极层114的表面以及第一凹槽115的表面形成绝缘层116。绝缘层116示例性地,可以为SiO2、SiN等绝缘材料。制备方法例如可以是氧化或者淀积工艺。Referring to FIG. 9 g , an insulating layer 116 is formed on the surface of the first electrode layer 114 and the surface of the first groove 115 . Exemplarily, the insulating layer 116 may be insulating materials such as SiO 2 and SiN. The production method can be, for example, an oxidation or deposition process.

步骤217、刻蚀第一凹槽底部表面的绝缘层,露出N型的III族氮化物半导体层。对绝缘层进行沟槽刻蚀,形成到达第一电极层的第二凹槽。Step 217 , etching the insulating layer on the bottom surface of the first groove to expose the N-type Group III nitride semiconductor layer. Groove etching is performed on the insulating layer to form a second groove reaching the first electrode layer.

参见图9h,刻蚀第一凹槽115表面底部表面的绝缘层116,露出N型III族氮化物半导体层111。同时还要形成绝缘层116表面的第二凹槽117,第二凹槽117的深度延伸到第一电极层114。Referring to FIG. 9 h , the insulating layer 116 on the bottom surface of the first groove 115 is etched to expose the N-type Group III nitride semiconductor layer 111 . At the same time, a second groove 117 is formed on the surface of the insulating layer 116 , and the depth of the second groove 117 extends to the first electrode layer 114 .

步骤218、在绝缘层表面以及第二凹槽内形成第二电极层,第二电极层与第一电极层电连接;在绝缘层表面和第二凹槽内形成第三电极层,第三电极层与N型的III族氮化物半导体层电连接,第二电极层与所述第三电极层不连接。Step 218, forming a second electrode layer on the surface of the insulating layer and in the second groove, the second electrode layer is electrically connected to the first electrode layer; forming a third electrode layer on the surface of the insulating layer and in the second groove, the third electrode layer The layer is electrically connected to the N-type Group III nitride semiconductor layer, and the second electrode layer is not connected to the third electrode layer.

参见图9i,在绝缘层116表面以及第二凹槽117内形成第二电极层118。第三电极119与N型III族氮化物半导体层111直接接触。有另一部分是延伸到绝缘层116的上方。示例性地,第二电极层118和第三电极119可以采用Au、Al、Cu、Ag、Fe、Ti、Cr、Pt、Ni中的一种或者多种制成。工艺方法例如可以是磁控溅射工艺。Referring to FIG. 9 i , the second electrode layer 118 is formed on the surface of the insulating layer 116 and in the second groove 117 . The third electrode 119 directly contacts the N-type Group III nitride semiconductor layer 111 . Another part extends above the insulating layer 116 . Exemplarily, the second electrode layer 118 and the third electrode 119 may be made of one or more of Au, Al, Cu, Ag, Fe, Ti, Cr, Pt, Ni. The process method can be, for example, a magnetron sputtering process.

需要说明的是,上述步骤是为了便于说明,以单个分立的LED芯片为例介绍的封装方法。但是其实在生产的过程中,整个晶圆片上有重复的LED芯片单元区域,因此需要将其分割成多个分立的LED芯片单元,分立的LED芯片单元包含有第二电极层118和第三电极层119以及第二电极层118和第三电极层119垂直方向的所有材料。并且整个晶圆片分割成单个LED芯片单元后,要对其进行分选,把光电参数相近的芯片集中在一起。It should be noted that, the above steps are for the convenience of description, and a single discrete LED chip is taken as an example of the packaging method introduced. But in fact, in the production process, there are repeated LED chip unit areas on the entire wafer, so it needs to be divided into multiple discrete LED chip units, and the discrete LED chip units include the second electrode layer 118 and the third electrode. layer 119 and all materials in the vertical direction of the second electrode layer 118 and the third electrode layer 119 . And after the whole wafer is divided into individual LED chip units, they need to be sorted, and the chips with similar photoelectric parameters are gathered together.

步骤219、通过将一定剂量的荧光粉和半透明物质混合得到半透明封装结构。Step 219: Obtain a translucent encapsulation structure by mixing a certain amount of fluorescent powder and a translucent substance.

示例性地,参见图9j,半透明封装结构20的表面有多个正方周期性排列分布的方向凹坑即容纳空间30。其中方形凹坑的长、宽的尺寸比LED芯片单元的长、宽的尺寸略大,凹坑的高的尺寸比LED芯片单元的高度略小。凹坑之间的最小间距是凹坑下表面(背离凹坑一侧)材料厚度的两倍左右。Exemplarily, referring to FIG. 9 j , the surface of the translucent encapsulation structure 20 has a plurality of directional pits arranged periodically in a square, that is, accommodating spaces 30 . The length and width of the square pit are slightly larger than the length and width of the LED chip unit, and the height of the pit is slightly smaller than the height of the LED chip unit. The minimum distance between the dimples is about twice the material thickness of the lower surface of the dimples (the side facing away from the dimples).

步骤220、将分立的发光芯片的衬底的背面放置在所述半透明封装结构的所述容纳空间内。使得衬底的背面和侧面形成一层含有荧光粉的半透明封装结构。沿垂直于分立发光芯片之间的含有荧光粉的半透明封装结构进行切割,形成单个分立的发光器件。Step 220 , placing the backside of the substrate of the discrete light-emitting chip in the accommodation space of the translucent packaging structure. A layer of translucent encapsulation structure containing fluorescent powder is formed on the back and sides of the substrate. Cut along the translucent encapsulation structure containing phosphor powder perpendicular to the discrete light-emitting chips to form individual discrete light-emitting devices.

可选地,将多个LED芯片单元放置到具有一侧开口形成多个容纳空间的半透明封装结构内之前还包括:Optionally, before placing a plurality of LED chip units into the translucent packaging structure with one side opening forming a plurality of accommodation spaces, the method further includes:

参见图9k,在半透明封装结构20的容纳空间表面涂一层透明的有机胶体材料40。Referring to FIG. 9k , a layer of transparent organic colloidal material 40 is coated on the surface of the accommodation space of the translucent packaging structure 20 .

对半透明封装结构进行切割,形成单个分立的LED芯片之前还包括:Before cutting the translucent packaging structure to form a single discrete LED chip, it also includes:

对半透明封装结构进行烘烤以固化有机胶体材料。需要说明的是,烘箱的温度在100℃~200℃范围内,烘烤的时间为20分钟~60分钟。Bake the translucent encapsulation structure to cure the organic colloidal material. It should be noted that the temperature of the oven is in the range of 100° C. to 200° C., and the baking time is 20 minutes to 60 minutes.

示例性地,半透明封装结构20在背离所述容纳空间的底面上有多个周期性凹凸图案。需要说明的是图案的形状不限。Exemplarily, the translucent encapsulation structure 20 has a plurality of periodic concave-convex patterns on the bottom surface facing away from the accommodating space. It should be noted that the shape of the pattern is not limited.

参见图9l所述周期性凹凸图案可以为锥形200。参见图9m,所述周期性凹凸图案可以为半圆形201。周期性凹凸图案还可以同时包括锥形和半圆形。这样的周期性凹凸图案是为了增加发光率。图9n为切割后对应的分立的LED芯片,其周期性凹凸图案可以为锥形。图9o为切割后对应的分立的LED芯片,其周期性凹凸图案可以为半圆形。Referring to FIG. 9l, the periodic concave-convex pattern may be in the shape of a cone 200 . Referring to FIG. 9m , the periodic concave-convex pattern may be a semicircle 201 . The periodic concave-convex pattern can also include both cones and semicircles. Such a periodic concavo-convex pattern is to increase luminous efficiency. FIG. 9n shows the corresponding discrete LED chip after cutting, and its periodic concave-convex pattern can be tapered. Fig. 9o shows the corresponding discrete LED chip after cutting, and its periodic concave-convex pattern can be a semicircle.

注意,上述仅为本发明的较佳实施例及所运用技术原理。本领域技术人员会理解,本发明不限于这里所述的特定实施例,对本领域技术人员来说能够进行各种明显的变化、重新调整和替代而不会脱离本发明的保护范围。因此,虽然通过以上实施例对本发明进行了较为详细的说明,但是本发明不仅仅限于以上实施例,在不脱离本发明构思的情况下,还可以包括更多其他等效实施例,而本发明的范围由所附的权利要求范围决定。Note that the above are only preferred embodiments of the present invention and applied technical principles. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and that various obvious changes, readjustments and substitutions can be made by those skilled in the art without departing from the protection scope of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and can also include more other equivalent embodiments without departing from the concept of the present invention, and the present invention The scope is determined by the scope of the appended claims.

Claims (10)

1.一种LED芯片,其特征在于,包括:1. A LED chip, characterized in that, comprising: LED芯片单元,包括至少一个发光面;LED chip unit, including at least one light-emitting surface; 半透明封装结构,一侧开口形成有容纳空间,所述LED芯片单元设置在所述容纳空间内,所述半透明封装结构中含有荧光粉,所述至少一个发光面的至少部分出射光线透过所述半导体封装结构发出。A translucent encapsulation structure, one side of which is opened to form an accommodating space, the LED chip unit is arranged in the accommodating space, the translucent encapsulation structure contains fluorescent powder, and at least part of the emitted light from the at least one light-emitting surface passes through The semiconductor package structure is issued. 2.根据权利要求1所述的LED芯片,其特征在于,2. The LED chip according to claim 1, characterized in that, 所有所述发光面的出射光均透过所述半导体封装结构发出。All the outgoing light from the light-emitting surface is emitted through the semiconductor package structure. 3.根据权利要求1所述的LED芯片,其特征在于,3. The LED chip according to claim 1, characterized in that, 所述LED芯片单元包括衬底,以及形成在所述衬底上的发光结构;The LED chip unit includes a substrate, and a light emitting structure formed on the substrate; 所述发光面为所述衬底的背面和侧面。The light-emitting surface is the back and side surfaces of the substrate. 4.根据权利要求1所述的LED芯片,其特征在于,包括:4. The LED chip according to claim 1, comprising: 在所述半透明封装结构与所述LED芯片单元的所述发光面之间设置一层透明的有机胶体材料。A layer of transparent organic colloidal material is arranged between the translucent encapsulation structure and the light-emitting surface of the LED chip unit. 5.根据权利要求1所述的LED芯片,其特征在于,包括:5. The LED chip according to claim 1, comprising: 所述半透明封装结构为一体成型结构。The translucent encapsulation structure is an integral molding structure. 6.根据权利要求1所述的LED芯片,其特征在于,包括:6. The LED chip according to claim 1, comprising: 所述半透明封装结构是含有荧光粉的玻璃或含有荧光粉的胶体薄膜。The translucent encapsulation structure is glass containing fluorescent powder or a colloidal film containing fluorescent powder. 7.根据权利要求1所述的LED芯片,其特征在于,所述半透明封装结构在背离所述容纳空间的底面上有多个周期性凹凸图案。7. The LED chip according to claim 1, wherein the translucent encapsulation structure has a plurality of periodic concave-convex patterns on the bottom surface facing away from the containing space. 8.根据权利要求7所述的LED芯片,其特征在于,包括:8. The LED chip according to claim 7, comprising: 所述周期性凹凸图案为锥形和/或半圆形。The periodic concave-convex pattern is cone-shaped and/or semi-circular. 9.一种LED芯片的封装方法,其特征在于,包括:9. A packaging method for an LED chip, comprising: 将多个LED芯片单元放置到具有一侧开口形成多个容纳空间的半透明封装结构内,所述半透明封装结构中含有荧光粉,所述至少一个发光面的至少部分出射光线透过所述半导体封装结构发出;Place a plurality of LED chip units in a translucent packaging structure with one side opening to form a plurality of accommodation spaces, the translucent packaging structure contains fluorescent powder, and at least part of the emitted light from the at least one light-emitting surface passes through the Semiconductor package structure issued; 对所述半透明封装结构进行切割,形成单个分立的LED芯片。The translucent package structure is cut to form individual discrete LED chips. 10.根据权利要求9所述的LED芯片的封装方法,其特征在于,所述将多个LED芯片单元放置到具有一侧开口形成多个容纳空间的半透明封装结构内之前还包括:10. The LED chip packaging method according to claim 9, characterized in that before placing a plurality of LED chip units into a translucent packaging structure with one side opening forming a plurality of accommodation spaces, it further comprises: 在所述半透明封装结构的容纳空间表面涂一层透明的有机胶体材料;Coating a layer of transparent organic colloid material on the surface of the accommodation space of the translucent packaging structure; 所述对所述半透明封装结构进行切割,形成单个分立的LED芯片之前还包括:Before cutting the translucent packaging structure to form a single discrete LED chip, it also includes: 对所述半透明封装结构进行烘烤以固化所述有机胶体材料。Bake the translucent encapsulation structure to cure the organic colloid material.
CN201610930913.2A 2016-10-31 2016-10-31 LED chip and its packaging method Pending CN106340511A (en)

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Application publication date: 20170118