CN106338337A - Apparatus for carrying out on-line monitoring on punching quality during laser punching and monitoring method thereof - Google Patents
Apparatus for carrying out on-line monitoring on punching quality during laser punching and monitoring method thereof Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 41
- 238000012544 monitoring process Methods 0.000 title claims abstract description 18
- 238000004080 punching Methods 0.000 title abstract description 14
- 238000007493 shaping process Methods 0.000 claims abstract description 13
- 238000005553 drilling Methods 0.000 claims description 62
- 230000005236 sound signal Effects 0.000 claims description 26
- 238000012545 processing Methods 0.000 claims description 7
- 238000001914 filtration Methods 0.000 claims description 3
- 230000001755 vocal effect Effects 0.000 claims 7
- 230000035945 sensitivity Effects 0.000 claims 3
- JEIPFZHSYJVQDO-UHFFFAOYSA-N ferric oxide Chemical compound O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 claims 2
- 238000005457 optimization Methods 0.000 claims 1
- 230000000399 orthopedic effect Effects 0.000 claims 1
- 239000011148 porous material Substances 0.000 claims 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 12
- 239000000463 material Substances 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 238000007689 inspection Methods 0.000 description 4
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- 239000007789 gas Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000005422 blasting Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
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- 239000012768 molten material Substances 0.000 description 1
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
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Abstract
Description
技术领域technical field
本发明涉及激光加工技术领域,尤其涉及一种激光打孔中在线监测打孔质量的装置及其监测方法。The invention relates to the technical field of laser processing, in particular to a device for online monitoring of drilling quality in laser drilling and a monitoring method thereof.
背景技术Background technique
激光打孔技术是激光在材料加工领域最早的应用技术之一。激光打孔与其他打孔方法相比具有打孔深径比大、无接触、无工具损耗、加工速度快、表面变形小、可以加工各种材料等显著优越性,能良好地满足现代工业产品加工的要求,广泛应用于航空航天、电子仪表及医疗器械等高精尖端产品的关键零部件中,如激光加工技术应用于加工航空发动机上高达104个冷却孔。Laser drilling technology is one of the earliest application technologies of laser in the field of material processing. Compared with other drilling methods, laser drilling has significant advantages such as large hole depth-to-diameter ratio, no contact, no tool loss, fast processing speed, small surface deformation, and can process various materials. It can well meet the needs of modern industrial products. Processing requirements are widely used in key components of high-precision cutting-edge products such as aerospace, electronic instruments, and medical equipment. For example, laser processing technology is used to process up to 104 cooling holes on aero-engines.
在激光打孔过程中,高能量的脉冲激光聚焦在工件表面,使材料加热、熔化甚至汽化,随后金属蒸气急剧膨胀的反冲压力和高压辅助气体压力共同作用下,熔融材料被挤出孔外,后续的脉冲激光持续上述过程,材料不断地去除直至形成盲孔或者通孔。During the laser drilling process, the high-energy pulsed laser is focused on the surface of the workpiece to heat, melt or even vaporize the material, and then the molten material is extruded out of the hole under the joint action of the recoil pressure of the rapid expansion of the metal vapor and the pressure of the high-pressure auxiliary gas. , the subsequent pulsed laser continues the above process, and the material is continuously removed until a blind hole or a through hole is formed.
对厚度较大的工件进行激光打孔时,改变激光打孔参数如激光功率、激光频率、激光脉宽、光斑大小、离焦量、打孔时间、辅助气体等都将影响激光打孔的质量,不合适的打孔参数,将会导致孔径不规则,甚至产生鼓形的畸形孔等缺陷。然而,对于激光打孔质量的评价,常规的方法通常是将孔剖开进行检测,这显然不适合对工业化产品进行检测,因此,在线监测打孔质量很有必要。When laser drilling a thick workpiece, changing the laser drilling parameters such as laser power, laser frequency, laser pulse width, spot size, defocus, drilling time, auxiliary gas, etc. will affect the quality of laser drilling , Improper punching parameters will lead to irregular hole diameters, and even drum-shaped deformed holes and other defects. However, for the evaluation of the quality of laser drilling, the conventional method is usually to cut the hole for inspection, which is obviously not suitable for inspection of industrial products. Therefore, online monitoring of the drilling quality is necessary.
发明内容Contents of the invention
本发明目的是:提供一种激光打孔中在线监测打孔质量的装置及其监测方法,通过获得打孔过程中的声纹特征,并进行分析比对,从而监测整个激光打孔过程,评价打孔质量。The purpose of the present invention is to provide a device for online monitoring of the drilling quality in laser drilling and a monitoring method thereof. By obtaining the characteristics of the voiceprint in the drilling process and analyzing and comparing them, the entire laser drilling process can be monitored and evaluated. Punch quality.
本发明的一种技术方案是:一种激光打孔中在线监测打孔质量的装置,包括脉冲激光器、光束整形系统、工件、高灵敏度麦克风、示波器、数据线和工控机,所述工控机通过数据线分别与脉冲激光器和示波器相连,所述高灵敏度麦克风通过数据线和示波器相连,所述脉冲激光器正对光束整形系统,脉冲激光器工作时,脉冲激光器发出的激光束经光束整形系统整形后辐照到工件。A technical solution of the present invention is: a device for online monitoring of drilling quality in laser drilling, including a pulse laser, a beam shaping system, a workpiece, a high-sensitivity microphone, an oscilloscope, a data line, and an industrial computer. The industrial computer passes The data lines are respectively connected to the pulse laser and the oscilloscope, the high-sensitivity microphone is connected to the oscilloscope through the data line, and the pulse laser is facing the beam shaping system. When the pulse laser is working, the laser beam emitted by the pulse laser is radiated after being shaped by the beam shaping system. to the workpiece.
本发明的另一种技术方案是:一种激光打孔中在线监测打孔质量的方法,包括以下步骤:Another technical solution of the present invention is: a method for online monitoring of drilling quality in laser drilling, comprising the following steps:
步骤一:获取优化的激光打孔工艺参数,获得打孔效率高、孔断面质量好、满足加工要求的工艺参数,并利用优化的打孔参数对工件进行激光打孔,直至该孔打穿,通过高灵敏度麦克风获取整个打孔过程的音频信号,并将这些音频信号通过数据线传输到示波器,音频信号经示波器滤波后,获得激光打孔过程的声纹特征,将声纹特征存储在工控机中;Step 1: Obtain optimized laser drilling process parameters, obtain process parameters with high drilling efficiency, good hole section quality, and meet processing requirements, and use the optimized drilling parameters to perform laser drilling on the workpiece until the hole is pierced. The audio signal of the whole drilling process is obtained through a high-sensitivity microphone, and these audio signals are transmitted to the oscilloscope through the data line. After the audio signal is filtered by the oscilloscope, the voiceprint characteristics of the laser drilling process are obtained, and the voiceprint characteristics are stored in the industrial computer. middle;
步骤二:重复步骤一,获得10组声纹样本,通过声纹样本对打穿每个孔所需的激光脉冲数进行计数,去掉计数中最高脉冲数和最低脉冲数,取剩下的8组声纹样本所需的激光脉冲数的平均值N。Step 2: Repeat step 1 to obtain 10 groups of voiceprint samples, count the number of laser pulses required to perforate each hole through the voiceprint samples, remove the highest pulse number and the lowest pulse number in the count, and take the remaining 8 groups The average number N of laser pulses required for voiceprint samples.
步骤三:采用步骤一中获取的优化激光打孔参数对工件进行激光打孔,通过高灵敏度麦克风获取整个打孔过程的音频信号,并将这些音频信号通过数据线传输到示波器,音频信号经示波器滤波后,获得整个激光打孔过程的声纹特征,通过声纹样本对打穿该孔所需的激光脉冲数进行计数N1,若ξ1*N≤N1≤ξ2*N,则判定该孔的质量合格,否则,则判定该孔的质量不合格,其中,ξ1和ξ2为质量系数,0.95<ξ1<1,1<ξ2<1.1。厚度不同,工件材质不同,则质量系数也不同。Step 3: Use the optimized laser drilling parameters obtained in step 1 to perform laser drilling on the workpiece, and obtain the audio signal of the entire drilling process through a high-sensitivity microphone, and transmit these audio signals to the oscilloscope through the data line, and the audio signal passes through the oscilloscope After filtering, the voiceprint characteristics of the entire laser drilling process are obtained, and the number of laser pulses required to punch through the hole is counted N1 through the voiceprint sample. If ξ1*N≤N1≤ξ2*N, the quality of the hole is judged Qualified, otherwise, it is judged that the quality of the hole is unqualified, where ξ1 and ξ2 are quality coefficients, 0.95<ξ1<1, 1<ξ2<1.1. The thickness is different, the material of the workpiece is different, and the quality factor is also different.
本发明的工作原理为:采用脉冲激光进行厚度较大的工件进行打孔,对相同厚度的工件来说,当打孔质量稳定时,所需的激光脉冲数基本相同,若打穿工件所需的激光脉冲数超过某一数值或者少于某一数值,都认为打孔过程出现了问题,若打穿孔所需激光脉冲数过少,则很大可能是由于爆孔使打孔过程提前结束,然而,孔径会非常大,打孔质量不满足要求;若打穿孔所需激光脉冲数过多,则有很大可能是由于打孔过程中熔融金属无法顺利排出,会导致“鼓孔”、“歪孔”等缺陷孔的产生。The working principle of the present invention is as follows: use pulsed laser to punch holes in workpieces with larger thickness. For workpieces with the same thickness, when the punching quality is stable, the number of laser pulses required is basically the same. If the number of laser pulses exceeds a certain value or is less than a certain value, it is considered that there is a problem in the drilling process. If the number of laser pulses required for drilling is too small, it is likely that the drilling process ends early due to the blasting. However, the hole diameter will be very large, and the punching quality does not meet the requirements; if the number of laser pulses required for punching holes is too large, it is likely that the molten metal cannot be discharged smoothly during the punching process, which will cause "drum holes", " The occurrence of defective holes such as crooked holes.
本发明的优点是:本发明通过对打孔过程所需的激光脉冲数进行计数,并与标准样本进行比较,可以实时监控打孔质量;采用本发明来判定打孔质量,成本低,精度高。The advantages of the present invention are: the present invention can monitor the perforation quality in real time by counting the number of laser pulses required in the perforation process and comparing it with the standard sample; using the present invention to determine the perforation quality has low cost and high precision .
附图说明Description of drawings
下面结合附图及实施例对本发明作进一步描述:The present invention will be further described below in conjunction with accompanying drawing and embodiment:
图1为本发明中结构示意图。Fig. 1 is a schematic diagram of the structure of the present invention.
其中:1脉冲激光器;2激光束;3光束整形系统;4工件;5高灵敏度麦克风;6示波器;7数据线;8工控机。Among them: 1 pulse laser; 2 laser beam; 3 beam shaping system; 4 workpiece; 5 high-sensitivity microphone; 6 oscilloscope; 7 data line; 8 industrial computer.
具体实施方式detailed description
一种激光打孔中在线监测打孔质量的装置的实施例:如图1所示,其包括脉冲激光器1、光束整形系统3、工件4、高灵敏度麦克风5、示波器6、数据线7和工控机8,所述工控机8通过数据线7分别与脉冲激光器1和示波器6相连,所述高灵敏度麦克风5通过数据线7和示波器6相连,所述脉冲激光器1正对光束整形系统3,脉冲激光器1工作时,脉冲激光器1发出的激光束2经光束整形系统3整形后辐照到工件4。本发明能快速有效的检测激光打孔质量,可应用于在线检测激光打孔质量。An embodiment of a device for online monitoring of drilling quality in laser drilling: as shown in Figure 1, it includes a pulsed laser 1, a beam shaping system 3, a workpiece 4, a high-sensitivity microphone 5, an oscilloscope 6, a data line 7 and an industrial control machine 8, the industrial computer 8 is respectively connected to the pulse laser 1 and the oscilloscope 6 through the data line 7, the high-sensitivity microphone 5 is connected to the oscilloscope 6 through the data line 7, the pulse laser 1 is facing the beam shaping system 3, and the pulse When the laser 1 is working, the laser beam 2 emitted by the pulsed laser 1 is irradiated to the workpiece 4 after being shaped by the beam shaping system 3 . The invention can quickly and effectively detect the laser drilling quality, and can be applied to online detection of the laser drilling quality.
一种激光打孔中在线监测打孔质量的方法的具体实施例一:A specific embodiment of a method for online monitoring of drilling quality in laser drilling:
本实施例中工件4材质为TC4钛合金,厚度为3mm;脉冲激光器1的技术参数如下:脉宽为100ns~500ms可调,最高重复频率为10MHz,最高功率400W,光强分布为高斯型,本是实施例的目标是在TC4钛合金工件4上获得直径为200μm的通孔,对于3mm厚的TC4钛合金来说,质量系数ξ1=0.99,ξ2=1.02。In this embodiment, the workpiece 4 is made of TC4 titanium alloy with a thickness of 3 mm; the technical parameters of the pulse laser 1 are as follows: the pulse width is adjustable from 100 ns to 500 ms, the maximum repetition rate is 10 MHz, the maximum power is 400 W, and the light intensity distribution is Gaussian. The goal of this embodiment is to obtain a through hole with a diameter of 200 μm on the TC4 titanium alloy workpiece 4. For a 3 mm thick TC4 titanium alloy, the quality coefficients ξ1=0.99 and ξ2=1.02.
实施本发明的具体步骤如下:Implement the concrete steps of the present invention as follows:
步骤一:优化的激光打孔参数如下:脉宽为100μs,重复频率为2000Hz,功率400W,氧气辅助,利用这些参数对TC4钛合金工件4进行激光打孔,直至该孔打穿,通过高灵敏度麦克风5获取整个打孔过程的音频信号,并将这些音频信号通过数据线7传输到示波器6,音频信号经示波器6滤波后,获得激光打孔过程的声纹特征,将声纹特征存储在工控机8中。Step 1: The optimized laser drilling parameters are as follows: the pulse width is 100 μs, the repetition frequency is 2000 Hz, the power is 400 W, and oxygen is assisted. Use these parameters to perform laser drilling on the TC4 titanium alloy workpiece 4 until the hole is pierced. The microphone 5 acquires the audio signals of the entire drilling process, and transmits these audio signals to the oscilloscope 6 through the data line 7. After the audio signals are filtered by the oscilloscope 6, the voiceprint characteristics of the laser drilling process are obtained, and the voiceprint characteristics are stored in the industrial control system. Machine 8.
步骤二:重复步骤一,获得10组声纹样本,通过声纹样本对打穿每个孔所需的激光脉冲数进行计数,这10组声纹样本打穿TC4钛合金工件4所需的脉冲数分别为:7085,7114,7093,7155,7095,7091,7056,7107,7102,7097,去掉计数中最高脉冲数7155和最低脉冲数7056,取剩下的8组声纹样本所需的激光脉冲数的平均值为7098,则打孔质量合格的范围为7027~7240。Step 2: Repeat step 1 to obtain 10 groups of voiceprint samples, and count the number of laser pulses required to penetrate each hole through the voiceprint samples. The pulses required for these 10 groups of voiceprint samples to penetrate TC4 titanium alloy workpiece 4 The numbers are: 7085, 7114, 7093, 7155, 7095, 7091, 7056, 7107, 7102, 7097, remove the highest pulse number 7155 and the lowest pulse number 7056 in the count, and take the remaining 8 groups of voiceprint samples. The average value of the number of pulses is 7098, and the qualified range of punching quality is 7027-7240.
步骤三:采用脉宽为100μs,重复频率为2000Hz,功率400W,氧气辅助,对TC4钛合金工件4进行激光打孔,通过高灵敏度麦克风5获取整个打孔过程的音频信号,并将这些音频信号通过数据线7传输到示波器6,音频信号经示波器6滤波后,获得整个激光打孔过程的声纹特征,通过声纹样本对打穿该孔所需的激光脉冲数进行计数,打穿该孔所需的脉冲数为7147,在7027~7240之间,则可以认为该孔质量合格。经剖孔检验,该孔质量满足要求。Step 3: Using a pulse width of 100 μs, a repetition frequency of 2000 Hz, a power of 400 W, and oxygen assistance, laser drilling is performed on the TC4 titanium alloy workpiece 4, and the audio signals of the entire drilling process are obtained through the high-sensitivity microphone 5, and these audio signals are The audio signal is transmitted to the oscilloscope 6 through the data line 7. After the audio signal is filtered by the oscilloscope 6, the voiceprint characteristics of the entire laser drilling process are obtained, and the number of laser pulses required to punch through the hole is counted through the voiceprint sample, and the hole is punched. The required number of pulses is 7147, and if it is between 7027 and 7240, it can be considered that the quality of the hole is qualified. After the cut hole inspection, the quality of the hole meets the requirements.
一种激光打孔中在线监测打孔质量的方法的具体实施例二:A second specific embodiment of a method for online monitoring of drilling quality in laser drilling:
本实施例中工件4材质为TC4钛合金,厚度为3mm;脉冲激光器1的技术参数如下:脉宽为100ns~500ms可调,最高重复频率为10MHz,最高功率400W,光强分布为高斯型,本是实施例的目标是在TC4钛合金工件4上获得直径为200μm的通孔,对于3mm厚的TC4钛合金来说,质量系数ξ1=0.99,ξ2=1.02。In this embodiment, the workpiece 4 is made of TC4 titanium alloy with a thickness of 3 mm; the technical parameters of the pulse laser 1 are as follows: the pulse width is adjustable from 100 ns to 500 ms, the maximum repetition rate is 10 MHz, the maximum power is 400 W, and the light intensity distribution is Gaussian. The goal of this embodiment is to obtain a through hole with a diameter of 200 μm on the TC4 titanium alloy workpiece 4. For a 3 mm thick TC4 titanium alloy, the quality coefficients ξ1=0.99 and ξ2=1.02.
实施本实施例的具体步骤如下:The specific steps of implementing this embodiment are as follows:
步骤一,优化的激光打孔参数如下:脉宽为100μs,重复频率为2000Hz,功率400W,氧气辅助,利用这些参数对TC4钛合金工件4进行激光打孔,直至该孔打穿,通过高灵敏度麦克风5获取整个打孔过程的音频信号,并将这些音频信号通过数据线7传输到示波器6,音频信号经示波器6滤波后,获得激光打孔过程的声纹特征,将声纹特征存储在工控机8中。Step 1, the optimized laser drilling parameters are as follows: the pulse width is 100 μs, the repetition frequency is 2000 Hz, the power is 400 W, and oxygen is assisted. Use these parameters to perform laser drilling on the TC4 titanium alloy workpiece 4 until the hole is pierced. The microphone 5 acquires the audio signals of the entire drilling process, and transmits these audio signals to the oscilloscope 6 through the data line 7. After the audio signals are filtered by the oscilloscope 6, the voiceprint characteristics of the laser drilling process are obtained, and the voiceprint characteristics are stored in the industrial control system. Machine 8.
步骤二,重复步骤一,获得10组声纹样本,通过声纹样本对打穿每个孔所需的激光脉冲数进行计数,这10组声纹样本打穿TC4钛合金工件4所需的脉冲数分别为:7085,7114,7093,7155,7095,7091,7056,7107,7102,7097,去掉计数中最高脉冲数7155和最低脉冲数7056,取剩下的8组声纹样本所需的激光脉冲数的平均值为7098,则打孔质量合格的范围为7027~7240。Step 2, repeat step 1 to obtain 10 groups of voiceprint samples, count the number of laser pulses required to penetrate each hole through the voiceprint samples, and the pulses required for these 10 groups of voiceprint samples to penetrate TC4 titanium alloy workpiece 4 The numbers are: 7085, 7114, 7093, 7155, 7095, 7091, 7056, 7107, 7102, 7097, remove the highest pulse number 7155 and the lowest pulse number 7056 in the count, and take the remaining 8 groups of voiceprint samples. The average value of the number of pulses is 7098, and the qualified range of punching quality is 7027-7240.
步骤三:采用脉宽为100μs,重复频率为2000Hz,功率400W,氧气辅助,对TC4钛合金工件4进行激光打孔,通过高灵敏度麦克风5获取整个打孔过程的音频信号,并将这些音频信号通过数据线7传输到示波器6,音频信号经示波器6滤波后,获得整个激光打孔过程的声纹特征,通过声纹样本对打穿该孔所需的激光脉冲数进行计数,打穿该孔所需的脉冲数为7347,在7027~7240之外,则认为该孔质量不合格,经剖孔检验,发现该孔出现了“歪孔”缺陷。Step 3: Using a pulse width of 100 μs, a repetition frequency of 2000 Hz, a power of 400 W, and oxygen assistance, laser drilling is performed on the TC4 titanium alloy workpiece 4, and the audio signals of the entire drilling process are obtained through the high-sensitivity microphone 5, and these audio signals are The audio signal is transmitted to the oscilloscope 6 through the data line 7. After the audio signal is filtered by the oscilloscope 6, the voiceprint characteristics of the entire laser drilling process are obtained, and the number of laser pulses required to punch through the hole is counted through the voiceprint sample, and the hole is punched. The required number of pulses is 7347. If the number of pulses is outside 7027~7240, it is considered that the quality of the hole is unqualified. After the hole inspection, it is found that the hole has a "crooked hole" defect.
综上所述,本发明能快速有效的检测激光打孔质量,解决了激光打孔中孔质量检测难的难题。To sum up, the present invention can quickly and effectively detect the quality of laser drilling, and solves the problem of difficulty in detecting the quality of holes in laser drilling.
以上仅是本发明的具体应用范例,对本发明的保护范围不构成任何限制。除上述实施例外,本发明还可以有其它实施方式。凡采用等同替换或等效变换形成的技术方案,均落在本发明所要求保护的范围之内。The above are only specific application examples of the present invention, and do not constitute any limitation to the protection scope of the present invention. In addition to the above-mentioned embodiments, the present invention can also have other embodiments. All technical solutions formed by equivalent replacement or equivalent transformation fall within the scope of protection claimed by the present invention.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113218317A (en) * | 2021-04-23 | 2021-08-06 | 长春理工大学 | In-situ detection method in laser in-situ pressure head coining workpiece pore-forming process |
| CN113814586A (en) * | 2021-11-05 | 2021-12-21 | 泰尔重工股份有限公司 | Method for judging puncture state of laser cutting machine based on sound signal |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5939010A (en) * | 1997-09-24 | 1999-08-17 | Mitsubishi Denki Kabushiki Kaisha | Laser machining method |
| US6670574B1 (en) * | 2002-07-31 | 2003-12-30 | Unitek Miyachi Corporation | Laser weld monitor |
| US20050247894A1 (en) * | 2004-05-05 | 2005-11-10 | Watkins Charles M | Systems and methods for forming apertures in microfeature workpieces |
| CN101687280A (en) * | 2007-06-27 | 2010-03-31 | 通快机床两合公司 | Method for detecting the contact point of a laser beam on an edge of an object and laser processing machine |
| CN101819027A (en) * | 2009-02-27 | 2010-09-01 | 王晓东 | Method and device for detecting blind hole depth |
| JP2015006677A (en) * | 2013-06-25 | 2015-01-15 | ビアメカニクス株式会社 | Laser drilling method |
| CN105316473A (en) * | 2015-12-04 | 2016-02-10 | 杨昭 | Online detecting and correcting system for laser impact processing based on workpiece vibrating frequency |
| CN105880842A (en) * | 2015-01-22 | 2016-08-24 | 通用电气公司 | System And Method For Cutting A Passage In An Airfoil |
-
2016
- 2016-11-11 CN CN201610997550.4A patent/CN106338337A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5939010A (en) * | 1997-09-24 | 1999-08-17 | Mitsubishi Denki Kabushiki Kaisha | Laser machining method |
| US6670574B1 (en) * | 2002-07-31 | 2003-12-30 | Unitek Miyachi Corporation | Laser weld monitor |
| US20050247894A1 (en) * | 2004-05-05 | 2005-11-10 | Watkins Charles M | Systems and methods for forming apertures in microfeature workpieces |
| CN101687280A (en) * | 2007-06-27 | 2010-03-31 | 通快机床两合公司 | Method for detecting the contact point of a laser beam on an edge of an object and laser processing machine |
| CN101819027A (en) * | 2009-02-27 | 2010-09-01 | 王晓东 | Method and device for detecting blind hole depth |
| JP2015006677A (en) * | 2013-06-25 | 2015-01-15 | ビアメカニクス株式会社 | Laser drilling method |
| CN105880842A (en) * | 2015-01-22 | 2016-08-24 | 通用电气公司 | System And Method For Cutting A Passage In An Airfoil |
| CN105316473A (en) * | 2015-12-04 | 2016-02-10 | 杨昭 | Online detecting and correcting system for laser impact processing based on workpiece vibrating frequency |
Non-Patent Citations (1)
| Title |
|---|
| 禹东赫: "声控激光打孔技术研究", 《中国博士学位论文全文数据库 工程科技I辑》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113218317A (en) * | 2021-04-23 | 2021-08-06 | 长春理工大学 | In-situ detection method in laser in-situ pressure head coining workpiece pore-forming process |
| CN113814586A (en) * | 2021-11-05 | 2021-12-21 | 泰尔重工股份有限公司 | Method for judging puncture state of laser cutting machine based on sound signal |
| CN113814586B (en) * | 2021-11-05 | 2024-04-09 | 泰尔重工股份有限公司 | Method for judging puncture state of laser cutting machine based on sound signal |
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