CN106225718B - Contour detecting gauge head, detector and detection method - Google Patents

Abstract

A kind of contour detecting gauge head, detector and detection method, wherein, the contour detecting gauge head includes：Connecting rod, top are used to be fixed to detector body；Probe position, top are arranged on the bottom end of connecting rod, and bottom is for offer probe installation position；First probe is arranged on the first probe installation position of probe position bottom, for carrying out contour detecting in the first pattern；Second probe is arranged on the second probe installation position of probe position bottom, for carrying out contour detecting in a second mode.So that the data of different mode detection are referred to, convenient for the adjustment of detection parameters between different mode, contour detecting precision is improved while can then improving detection efficiency.

Description

Contour detection probe, detector and detection method

technical field

The invention relates to the technical field of instrument detection and sensing, in particular to a contour detection probe, a detection instrument and a detection method.

Background technique

In 1929, German scientist Schmaltz developed the first stylus-type profile recorder, which used the principle of optical lever amplification to measure the surface profile. Following this, the British Taylor Hobson company also invested in the research and development of the surface profiler and made great achievements. With the development of sensing and detection technology, the resolution and accuracy of surface topography measurement have been greatly improved, reaching submicron or even nanometer level. Today, the measurement methods of surface topography are roughly divided into five types: mechanical stylus measurement, optical probe measurement, interference microscopy, scanning electron microscope (SEM) and scanning probe microscope (SPM). The measurement result is stable and reliable when it is in contact with the surface to be measured. Mechanical stylus measurement is widely used in the industrial field.

Mechanical stylus measurement In order to measure the tiny spacing and peaks and valleys on the surface, it is necessary to use a very thin needle tip. The stylus tip is closely attached to the surface to be measured under the action of the mechanism's own gravity, external mechanical force or electromagnetic force. During the scanning process, the stage or the stylus moves in parallel along a certain direction, so that the system samples point by point, so as to obtain the contour curve of the measured surface. The disadvantages of this contact measuring instrument are: (a) slow sampling speed and low efficiency; (b) due to the uncertainty of the hardness of the measured surface, the stylus may scratch the measured surface, so it is not suitable for soft materials (c) Due to the limitation of the tip radius, it is impossible to measure the high-frequency part of the profile concerned by ultra-precision surface measurement, so it is not suitable for the detection of ultra-precision surfaces.

In view of the disadvantages of the mechanical stylus, a non-contact surface profile detector has emerged, which includes replacing the mechanical probe with a laser probe. However, while the non-contact surface profile detector solves the three major disadvantages of the traditional mechanical stylus measuring instrument, it brings a bigger problem, that is, instability and insufficient accuracy. For example, (a) the material reflectivity of the measured workpiece directly affects the measurement results; (b) the measured surface needs to be very clean, and dust or oil will affect the measurement results; (c) when measuring a contour surface with a large inclination angle, It will cause signal distortion or distortion, etc.

Therefore, how to improve the contour detection accuracy while improving the detection efficiency has become a technical problem to be solved urgently.

Contents of the invention

The technical problem to be solved by the present invention is how to improve the contour detection accuracy while improving the detection efficiency.

Therefore, according to the first aspect, the embodiment of the present invention discloses a contour detection probe, including:

Connecting rod, the top of which is used to fix to the body of the detector; the probe position, the top of which is set at the bottom of the connecting rod, and the bottom is used to provide the probe installation position; the first probe, the first probe set at the bottom of the probe position is installed The position is used for contour detection in the first mode; the second probe is set at the second probe installation position at the bottom of the probe position and is used for contour detection in the second mode.

Optionally, the first probe is a laser probe, and the second probe is a contact probe.

Optionally, during contour detection, the detection track of the first probe is located in front of the detection track of the second probe.

Optionally, it also includes: a rotating table, which is arranged on the top of the connecting rod, and is used for detachably fixing the connecting rod to the detector body.

Optionally, the rotary table is also used to drive the movement of the connecting rod.

According to the second aspect, the embodiment of the present invention discloses a profile detector, comprising:

The contour detection probe mentioned above; the column, which is used to place the contour detection probe, and is also used to drive the contour detection probe to move along the Z-axis direction; the plane track, which is used to provide X-axis and/or Y-axis translation to the column track; the detection position, which is set under the plane track and is used to provide a placement position for the contour to be measured.

Optionally, the profile detector is a three-coordinate measuring machine.

According to a third aspect, the embodiment of the present invention discloses a contour detection method, including:

The first probe detects the profile to be measured sequentially from the starting point of the preset detection path to obtain the initial measurement curve of the profile to be measured; the second probe adjusts the measurement frequency according to the curvature information extracted from the initial measurement curve to complete the first measurement along the preset detection path Two-probe detection.

Optionally, after the first probe detects to the end point of the preset detection path, the rotary table drives the probe position to move to the next preset detection path, and drives the probe position to adjust the attitude, so that the next preset detection path During detection, the first probe is located in front of the second probe.

Optionally, the measurement frequency of the second probe is proportional to the curvature of the extracted curvature information.

The technical solution of the present invention has the following advantages:

In the contour detection probe, detector and detection method provided by the embodiments of the present invention, since the first probe and the second probe are arranged on the same probe position, when performing contour detection on the contour to be measured, the first probe can be used to The contour detection is performed in the first mode, and the contour detection is performed in the second mode through the second probe, so that the data detected in different modes can be used as a reference, which is convenient for the adjustment of detection parameters between different modes, and then can improve the detection efficiency and improve the contour detection at the same time precision.

As a preferred technical solution, the measurement frequency of the second probe is proportional to the curvature of the extracted curvature information, so that when the second probe is used for contour detection in the second mode, the measurement frequency can be adaptively adjusted, and then further Achieve the overall balance of efficiency and precision.

Description of drawings

In order to more clearly illustrate the specific implementation of the present invention or the technical solutions in the prior art, the following will briefly introduce the accompanying drawings that need to be used in the specific implementation or description of the prior art. Obviously, the accompanying drawings in the following description The drawings show some implementations of the present invention, and those skilled in the art can obtain other drawings based on these drawings without any creative work.

Fig. 1 is a schematic structural diagram of a profile detection probe in an embodiment of the present invention;

Fig. 2 is a schematic structural view of a profile detector in an embodiment of the present invention;

Fig. 3 is a flow chart of a contour detection method in an embodiment of the present invention;

FIG. 4 is a schematic diagram of a contour detection process in an embodiment of the present invention.

Detailed ways

The technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, or in a specific orientation. construction and operation, therefore, should not be construed as limiting the invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and should not be construed as indicating or implying relative importance.

In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected, or integrally connected; it can be mechanically or electrically connected; it can be directly connected, or indirectly connected through an intermediary, or it can be the internal communication of two components, which can be wireless or wired connect. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention in specific situations.

In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as there is no conflict with each other.

Please refer to FIG. 1 , which is a contour detection probe disclosed in this embodiment. The contour detection probe includes: a connecting rod 1, a probe position 2, a first probe 3 and a second probe 4, wherein:

The top end of the connecting rod 1 is used to be fixed to the detector body. Usually, the contour detection probe is arranged on a contour detection instrument (such as a three-coordinate measuring machine), and the contour detection of the object to be detected is realized by driving the movement of the detection probe. Therefore, in this embodiment, the connecting rod 1 is used to realize the fixing of the probe to the detector body.

The top of the probe position 2 is set on the bottom end of the connecting rod 1, and the bottom thereof is used to provide a probe installation position. In a specific embodiment, the top end of the connecting rod 1 is connected to the detector body, and the bottom end of the connecting rod 1 can be provided with a probe position 2 . In a specific embodiment, a probe can be connected to the bottom of the probe position 2, so as to realize corresponding contour detection of the object to be measured.

The first probe 3 is arranged at the first probe installation position at the bottom of the probe position 2, and is used for contour detection in the first mode. In this embodiment, at least two probe installation positions are set at the bottom of the probe position 2, please refer to Figure 1, at least two probe positions can be arranged side by side, for example, in a left-right manner, so as to realize the at least two probe positions one in front and one behind layout. In this embodiment, two probe positions are taken as an example for illustration, and the first probe 3 is arranged at the first probe installation position. In this embodiment, the first probe 3 is a laser measuring head, and the first probe 3 can be For example, a non-contact sensor such as a laser sensor (laser probe, LP) to improve the efficiency of contour detection. In a specific embodiment, the first probe 3 can be connected with a wing plate and screws, which is convenient for disassembly and installation.

The second probe 4 is arranged at the second probe installation position at the bottom of the probe position 2, and is used for contour detection in the second mode. In this embodiment, the second probe 4 is a contact probe to improve detection accuracy. Specifically, in this embodiment, the second probe 4 may be a touch-trigger sensor (touch-trigger probe, TP).

In this embodiment, the detection track of the first probe 3 is located in front of the detection track of the second probe 4 when the contour detection of the object to be tested is performed. That is to say, the first probe 3 can collect and organize the contour data before the second probe 4 , so as to predict the acquisition frequency of the second probe 4 .

In order to realize the rotation of the probe and/or the detachable connection with the detector body, in a specific embodiment, the profile detection probe can also include: a rotating table 5, which is arranged on the top end of the connecting rod 1 for the Remove and fix the connecting rod 1 to the detector body. Specifically, the rotating table 5 is also used to drive the connecting rod 1 to move, and the movement may be, for example, rotation, and of course, translation through other auxiliary tracks. Connected with a rotary table, scanning in different feeding directions can be realized.

This embodiment also discloses a profile detector, please refer to Figure 2, the profile detector includes: the profile detection probe 10 disclosed in the above embodiment, a column 20, a plane track 30 and a detection position, wherein:

The contour detection probe 10 is used for contour detection of the object to be measured.

The column 20 is used to place the contour detection probe 10 and is also used to drive the contour detection probe 10 to move along the Z-axis direction. Specifically, the top end of the connecting rod 1 can be connected to the column 20, of course, in an optional embodiment, the connecting rod 1 can be connected to the column 20 through the rotating table 5, so that the measuring head can rotate around the Z axis .

The planar track 30 is used to provide a track for X-axis and/or Y-axis translation to the column 20 . In a specific embodiment, the column 20 is movably arranged on the plane track 30 , thereby providing track support for the column 20 to translate along the X-axis and/or the Y-axis.

The detection position is arranged under the plane track 30, and is used to provide a placement position for the contour to be measured.

In an optional embodiment, the profile detector is a three-coordinate measuring machine.

This embodiment also discloses a contour detection method, please refer to FIG. 3, the contour detection method includes the following steps:

In step S100, the first probe sequentially detects the contour to be measured from the starting point of the preset detection path to obtain a preliminary measurement curve of the contour to be measured. Usually, the first probe is a non-contact measuring head, so the rough contour curve (preliminary measurement curve) of the contour to be measured can be obtained relatively comprehensively, and the shape, flatness, curvature and other information of the contour can be preliminarily judged through the preliminary measurement curve, This preliminary judgment can be relatively efficient.

In step S200, the second probe adjusts the measurement frequency according to the curvature information extracted from the preliminary measurement curve to complete the detection of the second probe along the preset detection path. In a specific embodiment, the measurement frequency of the second probe is proportional to the curvature of the extracted curvature information. Specifically, after the first probe obtains the initial measurement curve, the curvature information can be extracted from the initial measurement curve information, According to the curvature information, the measurement frequency of the second probe can be adjusted. For example, when the curvature is high, the measurement frequency can be increased, so that it can be detected more densely. When the curvature is low and flat, the measurement frequency can be reduced and increased. Measuring step size, which enables rapid detection.

In a preferred embodiment, when step S100 is executed, after the first probe detects to the end point of the preset detection path, the rotary table drives the probe position to move to the next preset detection path, and drives the probe position to adjust the attitude, so that When detecting the next preset detection path, the first probe is located in front of the second probe.

For the convenience of those skilled in the art to understand, the detection process is described below with specific examples. Please refer to Fig. 4, which is a schematic diagram of different moments in the measurement process of carrying out contour detection to a certain object to be measured in this embodiment. Fig. 4 illustrates (1), (2), (3), (4), (5 ) and (6) different detection processes. The detection paths of the detection process are l1, l2, l3, l4 and l5. For example, when the path l1 is scanned, the contour line of l1 can be obtained, which is a personalized scan. specifically:

After the initial scanning point (the initial point of the preset detection path) and the positive directions of X and Y can be determined in advance, the initial point of the LP detection path l1 can be determined. When the LP captures a sudden change signal, it indicates that the LP has reached the position of the surface. At this time, the coordinate value can be recorded, that is, the boundary point where the LP enters the surface to be measured (that is, the starting point of the path). At this time, the servo motor controlling the Y-axis movement on the bridge support frame is locked, and the measurement system cannot move in the Y-axis direction. At the same time, the servo motor of the turntable is locked, and the sensor cannot rotate around the Z axis.

Then, the measurement system moves along the positive direction of the X-axis. When the TP moves to the boundary point (the starting point of the preset detection path), the TP re-measures it and integrates the result into the system and records it as the starting point. At this time, if there is a large error with the coordinate value recorded by LP, the machine will alarm, the protection system will be turned on, and all motion will stop. The error of the coordinate value can be determined based on experience.

In the process of scanning along the X positive direction, LP has been detecting in the front section, and keeps measuring the path l1 with the preset ΔX unit length to obtain the coordinate information of the surface contour points. The coordinate information at this time is used in two different processing systems. On the one hand, the collected information is digitized, and then fitted into a preliminary measurement curve, and the curvature information is extracted from it; on the other hand, the signal is processed according to the preset curvature criterion. The negative feedback of TP adjusts the measurement frequency of TP to complete adaptive sampling. The criterion here can usually use curvature. When the curvature ki of the TP scanning part is greater than the preset curvature value k0, the scanning frequency increases; when the curvature ki of the TP scanning part is smaller than the preset curvature value k0, the scanning frequency decreases. Since the accuracy of TP is higher, combined with the measurement results of TP, the key points of the initial measurement curve are corrected, and finally the final curve is fitted. As shown in Figure 4(2), it shows the phases of different states during the measurement process.

When the LP captures the sudden change signal, it indicates that the LP has reached the end of the path, and the coordinate value of the sudden change signal is recorded, that is, the boundary point where the LP leaves the surface (the termination point of the preset detection path). Then, the measuring device continues to move along the positive X direction by d+Δd (d is the horizontal distance between the central axis of the TP measuring rod and the laser beam emitted by the LP, and Δd is the preset value of the measuring instrument).

When the TP moves to the boundary point (the end point of the preset detection path), it is re-measured, and the results are integrated into the system and fitted into a curve. At this time, if there is a large error with the coordinate value recorded by LP, the machine will alarm, the protection system will be turned on, and all motions will stop. Please refer to the above-mentioned embodiments for details, and details will not be repeated here.

When TP finishes measuring the end point of the path, the servo motor of the rotary table is unlocked and rotates 90° around the Z axis, so that LP is on the left and TP is on the right. Then, the servo motor of the rotary table is locked to measure the path l2 , thus, when measuring the path l2, also make LP before TP.

The servo motor controlling the movement of the Y-axis on the bridge support frame is unlocked, and the measuring device moves ΔY along the positive direction of the Y-axis. Then, the servo motor that controls the Y-axis movement on the bridge support frame is locked. After the measurement of path l2 is completed, the turntable is rotated 90° again for measurement along path l3.

At this time, LP judges whether it has entered the curved surface according to whether the focus is on the measuring table. If so, continue to move in the X direction until encountering a sudden change point of the signal, which is the boundary point of the contour line of the surface, and the measurement of the path l3 is completed. Repeat the above steps to measure other paths l4, l5, etc.

In the contour detection probe, detector and detection method provided in this embodiment, since the first probe and the second probe are arranged on the same probe position, when the contour detection is performed on the contour to be measured, the first probe can be used to detect the contour of the contour. The contour detection is performed in one mode, and the contour detection is performed in the second mode through the second probe, so that the data detected in different modes can be used for reference, which is convenient for the adjustment of detection parameters between different modes, and then can improve the detection efficiency while improving the contour detection accuracy .

In a preferred embodiment, the measurement frequency of the second probe is proportional to the curvature of the extracted curvature information, so that when the second probe is used for contour detection in the second mode, the measurement frequency can be adaptively adjusted, and then the Further realize the overall balance of efficiency and precision.

Those skilled in the art should understand that the embodiments of the present invention may be provided as methods, systems, or computer program products. Accordingly, the present invention can take the form of an entirely hardware embodiment, an entirely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, the present invention may take the form of a computer program product embodied on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) having computer-usable program code embodied therein.

The present invention is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of the invention. It should be understood that each procedure and/or block in the flowchart and/or block diagram, and a combination of procedures and/or blocks in the flowchart and/or block diagram can be realized by computer program instructions. These computer program instructions may be provided to a general purpose computer, special purpose computer, embedded processor, or processor of other programmable data processing equipment to produce a machine such that the instructions executed by the processor of the computer or other programmable data processing equipment produce a An apparatus for realizing the functions specified in one or more procedures of the flowchart and/or one or more blocks of the block diagram.

These computer program instructions may also be stored in a computer-readable memory capable of directing a computer or other programmable data processing apparatus to operate in a specific manner, such that the instructions stored in the computer-readable memory produce an article of manufacture comprising instruction means, the instructions The device realizes the function specified in one or more procedures of the flowchart and/or one or more blocks of the block diagram.

These computer program instructions can also be loaded onto a computer or other programmable data processing device, causing a series of operational steps to be performed on the computer or other programmable device to produce a computer-implemented process, thereby The instructions provide steps for implementing the functions specified in the flow chart or blocks of the flowchart and/or the block or blocks of the block diagrams.

Apparently, the above-mentioned embodiments are only examples for clear description, rather than limiting the implementation. For those of ordinary skill in the art, other changes or changes in different forms can be made on the basis of the above description. It is not necessary and impossible to exhaustively list all the implementation manners here. And the obvious changes or changes derived therefrom are still within the scope of protection of the present invention.

Claims (7)

1. a kind of contour detecting gauge head, which is characterized in that including：

Connecting rod (1), top are used to be fixed to detector body；

It pops one's head in position (2), top is arranged on the bottom end of the connecting rod (1), and bottom is for offer probe installation position；

First probe (3) is arranged on the first probe installation position of described probe position (2) bottom, for being taken turns in the first pattern Exterior feature detection；

Second probe (4) is arranged on the second probe installation position of described probe position (2) bottom, for being taken turns in a second mode Exterior feature detection；

Turntable (5) is arranged on the top of the connecting rod (1), for the connecting rod (1) detachably to be fixed to detector On body；

The turntable (5) is for driving the connecting rod (1) to realize the movement of different directions of feed.

2. contour detecting gauge head as described in claim 1, which is characterized in that described first pops one's head in (3) as laser type gauge head, institute The second probe (4) is stated as contact measuring head.

3. contour detecting gauge head as claimed in claim 2, which is characterized in that in contour detecting, first probe (3) Track is detected to be located in front of the detection track of the described second probe (4).

4. a kind of outline detector, which is characterized in that including：

Contour detecting gauge head (10) as described in claim 1-3 any one；

Column (20) for putting the contour detecting gauge head (10), is additionally operable to that the contour detecting gauge head (10) is driven to prolong Z axis It moves in direction；

Planar tracks (30), for providing the track of X-axis and/or Y-axis translation to the column (20)；

Check bit is arranged below the planar tracks (30), and position is placed for being provided to profile to be measured.

5. outline detector as claimed in claim 4, which is characterized in that the outline detector is three coordinate measuring machine.

6. a kind of profile testing method, which is characterized in that including：

The starting point of first probe from default detective path detects profile to be measured and obtains the preliminary survey curve of profile to be measured successively；

Second probe adjusts measurement frequency to complete along the default spy according to the curvature information extracted from the preliminary survey curve Survey the detection of second probe in path；

After first probe detection to the terminating point of the default detective path, turntable driving probe displacement is moved to next Default detective path, and the probe position is driven to adjust posture, so that when carrying out next default detective path detection, described the One probe is located at the front of the described second probe.

7. profile testing method as claimed in claim 6, which is characterized in that the measurement frequency of second probe is carried with described The curvature of the curvature information of taking-up is directly proportional.