CN106219516A - A kind of method that solution left standstill method prepares oriented alignment single armed CNT - Google Patents
A kind of method that solution left standstill method prepares oriented alignment single armed CNT Download PDFInfo
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Abstract
本发明公开了一种溶液静置法制备定向排布单壁碳纳米管的方法,通过将表面带有平行电极的衬底倾斜静置在单壁碳纳米管、去离子水、表面活性剂、有机聚合物混合制得的胶状液体中,由于平行电极对碳纳米管的尺寸效应使碳纳米管能够在平行电极间定向排布。本方法相比传统的化学气相沉积法制备垂直排列的定向碳纳米管,操作简单,制备了水平定向排布的碳纳米管,可以应用于在场效应管、场发射器和化学传感器中。
The invention discloses a method for preparing directional single-walled carbon nanotubes by a static solution method. A substrate with parallel electrodes on the surface is obliquely placed on single-walled carbon nanotubes, deionized water, a surfactant, In the colloidal liquid prepared by mixing organic polymers, due to the size effect of the parallel electrodes on the carbon nanotubes, the carbon nanotubes can be aligned between the parallel electrodes. Compared with the traditional chemical vapor deposition method for preparing vertically aligned carbon nanotubes, the method is simple to operate, prepares horizontally aligned carbon nanotubes, and can be applied in field effect tubes, field emitters and chemical sensors.
Description
技术领域technical field
本发明涉及功能薄膜制备方法,属于纳米薄膜材料领域和纳米器件领域,具体涉及一种新型的溶液静置法制备定向排布单壁碳纳米管的方法。The invention relates to a method for preparing a functional thin film, which belongs to the fields of nano-film materials and nano-devices, and in particular relates to a novel method for preparing directional arrangement single-walled carbon nanotubes by a static solution method.
背景技术Background technique
碳纳米管材料作为一种近年来备受各国关注的新的功能材料,它具有良好的载流子迁移率和电流疏运能力、良好的力学性能、良好的光学性能等特点使其在场效应管、场发射器、半导体探针、化学传感器等器件中具备良好的应用前景。As a new functional material that has attracted the attention of various countries in recent years, carbon nanotube material has the characteristics of good carrier mobility and current transport ability, good mechanical properties, good optical properties and so on. , Field emitters, semiconductor probes, chemical sensors and other devices have good application prospects.
多年来,单壁碳纳米管由于其良好的电学性能和超薄的结构被看做能够取代硅基TFT的新型材料。制备单壁碳纳米管TFT的方法分为两种:化学气相沉积法和溶液过滤法。2009年Chuan Wang等利用溶液过滤法法制备了高性能的单壁碳纳米管TFT,电流密度达到了10uA/µm,开关比大于104。(Chuan Wang etc Wafer~Scale Fabrication of SeparatedCarbon Nanotube Thin~Film Transistors for Display Applications,Nano Letters,2009,Vol.9,No.12)。For many years, single-walled carbon nanotubes have been regarded as new materials that can replace silicon-based TFTs due to their good electrical properties and ultra-thin structure. There are two methods for preparing single-walled carbon nanotube TFTs: chemical vapor deposition and solution filtration. In 2009, Chuan Wang et al. prepared a high-performance single-walled carbon nanotube TFT by the solution filtration method. The current density reached 10uA/µm, and the on-off ratio was greater than 10 4 . (Chuan Wang etc Wafer~Scale Fabrication of SeparatedCarbon Nanotube Thin~Film Transistors for Display Applications, Nano Letters, 2009, Vol.9, No.12).
2002年S.J Wind等利用化学气相沉积法制备了单壁碳纳米管TFT,电流密度达到了2100 uA/um 。(S.J Wind etc Vertical scaling of carbon nanotube field~effecttransistors using top gate electrodes, Applied physics Letters,2002,Vol.80,No.20)但是这些方法制备的碳纳米管TFT由于碳纳米管的密度低和非定向特性,其电学性能达不到应用需求。为了解决以上问题,Hyunhyub Ko等提出一种能够让碳纳米管定向排布的方法。及采用溶液过滤法时,将碳纳米管的聚合物溶液在成膜时固定在一定区域范围内,及将自组装膜平行生长在硅片上,在硅片再镀膜,碳纳米管会由于尺寸效应呈定向化排列(由于自组装膜的间距小于碳纳米管的长度)。(Hyunhyub Ko etc Liquid~CrystallineProcessing of Highly Oriented Carbon Nanotube Arrays for Thin~FilmTransistors, Nano Letters,2006,Vol.6,No.7)但是这种方法由于获得定向排列的薄膜后再镀电极,在去除自组装膜时可能有残留物,影响结构性能,且不易确定定向的碳纳米管区域,操作复杂,不容易制得完好的器件。In 2002, S.J Wind et al. prepared single-walled carbon nanotube TFTs by chemical vapor deposition, and the current density reached 2100 uA/um. (S.J Wind etc Vertical scaling of carbon nanotube field~effecttransistors using top gate electrodes, Applied physics Letters, 2002, Vol.80, No.20) However, due to the low density and non-oriented characteristics, its electrical performance cannot meet the application requirements. In order to solve the above problems, Hyunhyub Ko et al. proposed a method to align carbon nanotubes. And when the solution filtration method is used, the polymer solution of carbon nanotubes is fixed in a certain area when forming a film, and the self-assembled film is grown in parallel on the silicon wafer, and then coated on the silicon wafer, the carbon nanotubes will be damaged due to the size The effect is oriented (due to the pitch of the self-assembled film being smaller than the length of the carbon nanotube). (Hyunhyub Ko etc Liquid~CrystallineProcessing of Highly Oriented Carbon Nanotube Arrays for Thin~FilmTransistors, Nano Letters, 2006, Vol.6, No.7) However, since this method obtains an oriented thin film and then coats electrodes, after removing the self-assembled There may be residues in the film, which will affect the structural performance, and it is not easy to determine the oriented carbon nanotube region, the operation is complicated, and it is not easy to make a complete device.
发明内容Contents of the invention
本发明的目的是如何克服制备碳纳米管成本过高、制备复杂、碳纳米管浓度过低并且没有定向性、电学性能较差等缺点,改进现有的碳纳米管制备法,简化制备方法,获得高性能的碳纳米管。The purpose of the present invention is how to overcome the disadvantages of high cost, complicated preparation, low concentration of carbon nanotubes, lack of orientation, and poor electrical properties, etc., to improve the existing carbon nanotube preparation method and simplify the preparation method. Obtain high performance carbon nanotubes.
本发明所提出的技术问题是这样解决的:提供一种新型的溶液静置法制备定向排布单壁碳纳米管的方法,其特征在于,具有以下步骤:The technical problem proposed by the present invention is solved like this: provide a kind of method for the preparation of orientation arrangement single-walled carbon nanotube of novel solution standing method, it is characterized in that, has the following steps:
(1)将单壁碳纳米管、去离子水、表面活性剂混合均匀,得到溶液1;(1) Mix single-walled carbon nanotubes, deionized water, and surfactants evenly to obtain solution 1;
(2)向溶液1中加入有机聚合物,混合均匀,得到黑色胶状液体,即溶液2;(2) Add an organic polymer to Solution 1, mix well to obtain a black colloidal liquid, namely Solution 2;
(3)将带有平行电极的衬底倾斜静置在溶液2中,制备湿膜;(3) Place the substrate with parallel electrodes obliquely in solution 2 to prepare a wet film;
(4)常温下,普通大气环境中使步骤(3)中的薄膜自然结晶,形成平行于衬底定向排列的单壁碳纳米管图形;(4) Naturally crystallize the film in step (3) at normal temperature and in an ordinary atmospheric environment to form single-walled carbon nanotube patterns aligned parallel to the substrate;
(5)光刻去除多余的部分,得到完整的定向碳纳米管图形。(5) Photolithography removes excess parts to obtain a complete pattern of aligned carbon nanotubes.
进一步,所述的单壁碳纳米管与表面活性剂的质量比为1:5~10。Further, the mass ratio of the single-walled carbon nanotubes to the surfactant is 1:5-10.
进一步,所述的单壁碳纳米管与有机聚合物的质量比为1:10~20。Further, the mass ratio of the single-walled carbon nanotubes to the organic polymer is 1:10-20.
进一步,所述的表面活性剂和有机聚合物能让单壁碳纳米管悬浮在溶液表面。Further, the surfactant and the organic polymer can suspend the single-walled carbon nanotubes on the surface of the solution.
所述的制备环境为为普通室内环境,无惰性气体保护、绝对干燥等要求。The preparation environment is an ordinary indoor environment without inert gas protection, absolute dryness and other requirements.
所述的表面活性剂为十二烷基三甲基溴化铵、十六烷基三甲基溴化铵、十二烷基苯磺酸钠、十六烷基苯磺酸钠中的一种或多种,优选为十二烷基苯磺酸钠;The surfactant is one of dodecyltrimethylammonium bromide, cetyltrimethylammonium bromide, sodium dodecylbenzenesulfonate, sodium cetylbenzenesulfonate or more, preferably sodium dodecylbenzenesulfonate;
所述的有机聚合物为多肽类或蛋白质,例如聚磺苯乙烯、聚乙烯醇、聚乙烯吡咯烷酮等,优选为聚乙烯吡咯烷酮。The organic polymer is polypeptide or protein, such as polystyrene sulfonate, polyvinyl alcohol, polyvinylpyrrolidone, etc., preferably polyvinylpyrrolidone.
进一步,所述的衬底的厚度没有特殊要求,在其上方设置有300~500nm绝缘层,绝缘层上设置有100~300nm的金属层,金属层光刻出平行电极。Further, there is no special requirement on the thickness of the substrate, and an insulating layer of 300-500 nm is arranged above it, and a metal layer of 100-300 nm is arranged on the insulating layer, and parallel electrodes are formed by photolithography on the metal layer.
作为优选,所述的绝缘层为SiO2绝缘层,所述的平行电极的长度为0.1~5mm,电极间的间距为3~30 µm。平行电极图形能够对分布在电极之间的碳纳米管起到定向作用。Preferably, the insulating layer is a SiO 2 insulating layer, the length of the parallel electrodes is 0.1-5 mm, and the distance between the electrodes is 3-30 µm. The parallel electrode pattern can orient the carbon nanotubes distributed between the electrodes.
进一步,所述步骤(3)中倾斜静置是指要将衬底呈3~20°倾斜于装有溶液2的培养皿中,并且使平行电极的长边与水平面呈3~20°角,所述步骤(3)中静置时间为24~72小时。Further, in the step (3), the oblique standing means that the substrate is inclined at 3-20° in the petri dish containing solution 2, and the long side of the parallel electrode is at an angle of 3-20° with the horizontal plane, The standing time in the step (3) is 24-72 hours.
进一步,所述步骤(1)与步骤(2)中的混合均采用超声混合。Further, the mixing in the step (1) and the step (2) both adopt ultrasonic mixing.
作为优选,所述步骤(1)或步骤(2)在采用超声混合的同时可以配合有磁力搅拌,所述步骤(1)的磁力搅拌温度为60~80℃,时间为3~6小时,所述步骤(2)的磁力搅拌温度为温度为60~80℃,时间为10~30min。As a preference, the step (1) or step (2) may be combined with magnetic stirring while ultrasonic mixing is used, the temperature of the magnetic stirring in the step (1) is 60-80°C, and the time is 3-6 hours. The temperature of the magnetic stirring in the step (2) is 60-80° C. and the time is 10-30 minutes.
采用本发明所述的方法制备的碳纳米管,具有以下优点:The carbon nanotubes prepared by the method of the present invention have the following advantages:
A.产品定向性好、电学性能稳定、结构稳定、均匀、平整;A. The product has good orientation, stable electrical performance, stable structure, uniformity and smoothness;
B.先做好叉指电极,再利用叉指电极对碳纳米管的定向,整个工艺操作简单;B. Make the interdigitated electrodes first, and then use the interdigitated electrodes to orient the carbon nanotubes. The whole process is easy to operate;
C.常温反应,且对环境无特殊要求,设备要求低、需要投资少、产品成本低;C. Normal temperature reaction, and no special requirements for the environment, low equipment requirements, less investment, and low product cost;
D.反应物无毒无害,不会污染环境及影响人体健康。D. The reactants are non-toxic and harmless, and will not pollute the environment and affect human health.
附图说明Description of drawings
图1 为本发明方法流程图;Fig. 1 is a flow chart of the method of the present invention;
图2 为实施例1所得产品平行电极间单壁碳纳米管的定向SEM图;Fig. 2 is the directional SEM figure of the single-walled carbon nanotubes between the parallel electrodes of the product obtained in embodiment 1;
图3 为实施例1所得产品平行电极外单壁碳纳米管的非定向SEM图;Fig. 3 is the non-directional SEM figure of the single-walled carbon nanotubes outside the parallel electrodes of the product obtained in embodiment 1;
图4 为本发明方法原理图(截面);Fig. 4 is a schematic diagram (section) of the method of the present invention;
其中,1为衬底、2为SiO2绝缘层、3为平行电极、4为定向排布单壁碳纳米管。Among them, 1 is the substrate, 2 is the SiO 2 insulating layer, 3 is the parallel electrodes, and 4 is the aligned single-walled carbon nanotubes.
具体实施方式detailed description
下面结合实施例与附图对本发明做近一步描述:Below in conjunction with embodiment and accompanying drawing, the present invention is described further:
实施例1:一种溶液静置法制备定向排布单壁碳纳米管的方法,包括以下步骤:Embodiment 1: A kind of method for preparing single-walled carbon nanotubes of oriented arrangement by solution static method, comprises the following steps:
(1)取20mL去离子水装入烧杯中,称取碳纳米管15mg,称取十二烷基苯磺酸钠 100mg加入烧杯中,烧杯中放入磁转子,将烧杯放入磁力搅拌机中,调节温度为70℃,转速为12rad/s,磁力搅拌3小时,同时进行超声混合,使十二烷基苯磺酸钠和碳纳米管均匀分散在去离子水中,得到溶液1;(1) Take 20 mL of deionized water and put it into a beaker, weigh 15 mg of carbon nanotubes, weigh 100 mg of sodium dodecylbenzenesulfonate and add it to the beaker, put a magnetic rotor in the beaker, put the beaker into a magnetic stirrer, Adjust the temperature to 70°C, the rotational speed to 12rad/s, magnetically stir for 3 hours, and perform ultrasonic mixing at the same time, so that sodium dodecylbenzenesulfonate and carbon nanotubes are uniformly dispersed in deionized water to obtain solution 1;
(2)取聚乙烯吡咯烷酮 150mg加入到溶液1中,调节温度为70℃,转速12rad/s,磁力搅拌10分钟,同时进行超声混合,得到黑色胶状液体,即溶液2;(2) Take 150 mg of polyvinylpyrrolidone and add it to solution 1, adjust the temperature to 70°C, rotate at 12 rad/s, stir magnetically for 10 minutes, and perform ultrasonic mixing at the same time to obtain a black colloidal liquid, namely solution 2;
(3)采用溶液静置法制备湿膜,将带有平行电极的衬底以5°角倾斜静置在溶液2中制备湿膜,静置24小时结晶;(3) The wet film was prepared by the solution standing method, and the substrate with parallel electrodes was placed in the solution 2 at an angle of 5° to prepare a wet film, and stood for 24 hours to crystallize;
(4)光刻掉沟道外的多余碳纳米管,得到产品。(4) Photolithographically remove excess carbon nanotubes outside the channel to obtain a product.
采用场发射扫描电镜(SEM)对产品进行测试,得到图2、图3,由图2、图3对比可知,产品定向性能好,结构均匀、平整、稳定。The product was tested by a field emission scanning electron microscope (SEM), and Figure 2 and Figure 3 were obtained. From the comparison of Figure 2 and Figure 3, it can be seen that the product has good orientation performance, and the structure is uniform, flat and stable.
实施例2:一种溶液静置法制备定向排布单壁碳纳米管的方法,包括以下步骤:Embodiment 2: A kind of method for preparing single-walled carbon nanotubes of oriented arrangement by static method of solution, comprises the following steps:
(1)取20mL去离子水装入烧杯中,称取碳纳米管15mg,称取十二烷基三甲基溴化铵75mg、十六烷基三甲基溴化铵75mg加入烧杯中,超声混合,使十二十二烷基三甲基溴化铵、十六烷基三甲基溴化铵和碳纳米管均匀分散在去离子水中,得到溶液1;(1) Take 20 mL of deionized water and put it into a beaker, weigh 15 mg of carbon nanotubes, weigh 75 mg of dodecyltrimethylammonium bromide, and add 75 mg of hexadecyltrimethylammonium bromide into the beaker, and ultrasonically Mix to make dodecyltrimethylammonium bromide, cetyltrimethylammonium bromide and carbon nanotubes uniformly dispersed in deionized water to obtain solution 1;
(2)取聚磺苯乙烯150mg、聚乙烯醇 150mg加入到溶液1中,超声混合均匀后得到黑色胶状液体,即溶液2;(2) Add 150mg of polystyrene sulfonate and 150mg of polyvinyl alcohol into solution 1, and mix them uniformly with ultrasound to obtain a black colloidal liquid, namely solution 2;
(3)采用溶液静置法制备湿膜,将带有平行电极的衬底以2°角倾斜静置在溶液2中制备湿膜,静置72小时结晶;(3) The wet film was prepared by the solution static method, and the substrate with parallel electrodes was placed in the solution 2 at an angle of 2° to prepare a wet film, and it was crystallized after standing for 72 hours;
(4)光刻掉沟道外的多余碳纳米管,得到产品。(4) Photolithographically remove excess carbon nanotubes outside the channel to obtain a product.
实施例3:一种溶液静置法制备定向排布单壁碳纳米管的方法,包括以下步骤:Embodiment 3: A kind of method for preparing single-walled carbon nanotubes of oriented arrangement by solution static method, comprises the following steps:
(1)取20mL去离子水装入烧杯中,称取碳纳米管15mg,称取十六烷基三甲基溴化铵40mg、十二烷基苯磺酸钠60mg加入烧杯中,烧杯中放入磁转子,将烧杯放入磁力搅拌机中,调节温度为80℃,转速为12rad/s,磁力搅拌5小时,同时进行超声混合,使十二烷基苯磺酸钠和碳纳米管均匀分散在去离子水中,得到溶液1;(1) Take 20 mL of deionized water and put it into a beaker, weigh 15 mg of carbon nanotubes, weigh 40 mg of cetyltrimethylammonium bromide, and add 60 mg of sodium dodecylbenzenesulfonate into the beaker. Insert the magnetic rotor, put the beaker into a magnetic stirrer, adjust the temperature to 80°C, and the rotation speed to 12rad/s, and magnetically stir for 5 hours, while ultrasonically mixing, so that sodium dodecylbenzenesulfonate and carbon nanotubes are evenly dispersed in the In deionized water, solution 1 was obtained;
(2)取聚乙烯醇200mg加入到溶液1中,调节温度为80℃,转速12rad/s,磁力搅拌20分钟,同时进行超声混合,得到黑色胶状液体,即溶液2;(2) Take 200 mg of polyvinyl alcohol and add it to solution 1, adjust the temperature to 80 ° C, rotate at 12 rad/s, stir magnetically for 20 minutes, and perform ultrasonic mixing at the same time to obtain a black colloidal liquid, namely solution 2;
(3)采用溶液静置法制备湿膜,将带有平行电极的衬底以30°角倾斜静置在溶液2中制备湿膜,静置48小时结晶;(3) The wet film was prepared by the solution static method, and the substrate with parallel electrodes was placed in the solution 2 at an angle of 30° to prepare a wet film, and it was crystallized after standing for 48 hours;
(4)光刻掉沟道外的多余碳纳米管,得到产品。(4) Photolithographically remove excess carbon nanotubes outside the channel to obtain a product.
实施例4:一种溶液静置法制备定向排布单壁碳纳米管的方法,包括以下步骤:Embodiment 4: A kind of method for preparing single-walled carbon nanotubes of oriented arrangement by solution static method, comprises the following steps:
(1)取20mL去离子水装入烧杯中,称取碳纳米管15mg,称取十二烷基苯磺酸钠 75mg加入烧杯中,烧杯中放入磁转子,将烧杯放入磁力搅拌机中,调节温度为60℃,转速为12rad/s,磁力搅拌6小时,同时进行超声混合,使十二烷基苯磺酸钠和碳纳米管均匀分散在去离子水中,得到溶液1;(1) Take 20mL of deionized water and put it into a beaker, weigh 15mg of carbon nanotubes, weigh 75mg of sodium dodecylbenzenesulfonate and add it to the beaker, put a magnetic rotor in the beaker, put the beaker into a magnetic stirrer, Adjust the temperature to 60°C, the rotational speed to 12rad/s, magnetically stir for 6 hours, and perform ultrasonic mixing at the same time, so that sodium dodecylbenzenesulfonate and carbon nanotubes are uniformly dispersed in deionized water to obtain solution 1;
(2)取能让单壁碳纳米管悬浮在溶液表面的蛋白质 300mg加入到溶液1中,调节温度为60℃,转速12rad/s,磁力搅拌30分钟,同时进行超声混合,得到黑色胶状液体,即溶液2;(2) Take 300 mg of protein that can suspend single-walled carbon nanotubes on the surface of the solution and add it to solution 1, adjust the temperature to 60 ° C, rotate at 12 rad/s, stir magnetically for 30 minutes, and perform ultrasonic mixing at the same time to obtain a black colloidal liquid , namely solution 2;
(3)采用溶液静置法制备湿膜,将带有平行电极的衬底以5°角倾斜静置在溶液2中制备湿膜,静置72小时结晶;(3) The wet film was prepared by the solution static method, and the substrate with parallel electrodes was placed in the solution 2 at an angle of 5° to prepare a wet film, and it was crystallized after standing for 72 hours;
(4)光刻掉沟道外的多余碳纳米管,得到产品。(4) Photolithographically remove excess carbon nanotubes outside the channel to obtain a product.
实施例5:一种溶液静置法制备定向排布单壁碳纳米管的方法,包括以下步骤:Embodiment 5: a method for preparing single-walled carbon nanotubes in an orientation by a solution static method, comprising the following steps:
(1)取20mL去离子水装入烧杯中,称取碳纳米管15mg,称取十二烷基苯磺酸钠 80mg加入烧杯中,进行超声混合,使十二烷基苯磺酸钠和碳纳米管均匀分散在去离子水中,得到溶液1;(1) Take 20 mL of deionized water and put it into a beaker, weigh 15 mg of carbon nanotubes, weigh 80 mg of sodium dodecylbenzene sulfonate, add it to the beaker, and perform ultrasonic mixing to make sodium dodecylbenzene sulfonate and carbon The nanotubes were uniformly dispersed in deionized water to obtain solution 1;
(2)取能让单壁碳纳米管悬浮在溶液表面的多肽类物质250mg加入到溶液1中,进行超声混合,得到黑色胶状液体,即溶液2;(2) Take 250 mg of polypeptide substances that can suspend single-walled carbon nanotubes on the surface of the solution, add them to solution 1, and perform ultrasonic mixing to obtain a black colloidal liquid, namely solution 2;
(3)采用溶液静置法制备湿膜,将带有平行电极的衬底以12°角倾斜静置在溶液2中制备湿膜,静置36小时结晶;(3) The wet film was prepared by the solution static method, and the substrate with parallel electrodes was placed in the solution 2 at an angle of 12° to prepare a wet film, and it was crystallized after standing for 36 hours;
(4)光刻掉沟道外的多余碳纳米管,得到产品。(4) Photolithographically remove excess carbon nanotubes outside the channel to obtain a product.
如上所述,仅为本发明较佳实施例而已,故任凡未脱离本方案技术内容,依据本发明的技术实质对以上实施例做出任何简单的更改、等同变化与修饰,均仍属于本发明技术方案的范围。As mentioned above, it is only a preferred embodiment of the present invention, so any simple changes, equivalent changes and modifications made to the above embodiments according to the technical essence of the present invention without departing from the technical content of the present solution still belong to the present invention. The scope of the technical solution of the invention.
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