CN106197775A - A kind of pressure transducer - Google Patents
A kind of pressure transducer Download PDFInfo
- Publication number
- CN106197775A CN106197775A CN201610797971.2A CN201610797971A CN106197775A CN 106197775 A CN106197775 A CN 106197775A CN 201610797971 A CN201610797971 A CN 201610797971A CN 106197775 A CN106197775 A CN 106197775A
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- electrode
- substrate
- pressure transducer
- elastic sphere
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- 239000000758 substrate Substances 0.000 claims abstract description 75
- 238000000605 extraction Methods 0.000 claims abstract description 30
- 239000000463 material Substances 0.000 claims abstract description 24
- 238000004806 packaging method and process Methods 0.000 claims abstract description 16
- 238000010030 laminating Methods 0.000 claims abstract description 11
- 229920002725 thermoplastic elastomer Polymers 0.000 claims description 13
- 238000000576 coating method Methods 0.000 claims description 11
- 239000011248 coating agent Substances 0.000 claims description 9
- 229920001971 elastomer Polymers 0.000 claims description 9
- 239000007769 metal material Substances 0.000 claims description 9
- 239000005060 rubber Substances 0.000 claims description 9
- 239000003292 glue Substances 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000004033 plastic Substances 0.000 claims description 5
- 229920003023 plastic Polymers 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 4
- 239000000741 silica gel Substances 0.000 claims description 4
- 229910002027 silica gel Inorganic materials 0.000 claims description 4
- 239000004433 Thermoplastic polyurethane Substances 0.000 claims description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 3
- -1 indium tin metal-oxide Chemical class 0.000 claims description 3
- 238000009413 insulation Methods 0.000 claims description 3
- 229920002635 polyurethane Polymers 0.000 claims description 3
- 239000004814 polyurethane Substances 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 229920001935 styrene-ethylene-butadiene-styrene Polymers 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 229920002803 thermoplastic polyurethane Polymers 0.000 claims description 3
- 229910044991 metal oxide Inorganic materials 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 150000001336 alkenes Chemical class 0.000 claims 1
- 229920006389 polyphenyl polymer Polymers 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 description 9
- 230000000694 effects Effects 0.000 description 7
- 239000004793 Polystyrene Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229920002223 polystyrene Polymers 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000005062 Polybutadiene Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013536 elastomeric material Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000000976 ink Substances 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000002927 oxygen compounds Chemical class 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920002857 polybutadiene Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The present invention provides a kind of pressure transducer, including: the first substrate and the second substrate；First substrate and the second substrate are bonded by encapsulating material；First substrate and the second substrate constitute a packaging area；In packaging area, the first electrode designed with the first substrate laminating and the second electrode designed with the second substrate laminating；Having the first distance value between the first electrode and the second electrode, one end of the first electrode is provided with the first extraction electrode, and one end of the second electrode is provided with the second extraction electrode, the first extraction electrode and the second extraction electrode and is attached with external circuit；Be provided with the elastic sphere of multiple surface conductance in the centre of the first electrode and the second electrode, the diameter of elastic sphere is more than or equal to the first distance value；When having External Force Acting in the first substrate, the first distance value changes, and causes the elastic sphere contact area respectively with the first electrode and the second electrode to change.The pressure sensitive of pressure transducer that the present invention provides is highly sensitive and compact.
Description
Technical field
The present invention relates to sensor technical field, particularly relate to that a kind of compact is frivolous and highly sensitive pressure passes
Sensor.
Background technology
Existing pressure transducer includes two kinds, respectively the light and thin type pressure transducer shown in Fig. 1 and the Gao Ling shown in Fig. 2
Sensitivity pressure transducer.
For light and thin type pressure transducer, its overall usually flake structure, two end electrodes is A and B, in electrode A B
Between be that there is the conductive material of certain resistivity, a length of L.When by the effect of external force F, pressure transducer deforms upon, long
Degree L changes, and the resistance between electrode A B changes the most therewith.Therefore, by between the changing value of acquisition length L and electrode A B
Increased resistance value calculate the specific size of external force F.This kind of light and thin type pressure transducer is for the active force of draw direction
More sensitive, insensitive to the active force being perpendicular to pressure transducer surface, therefore its sensitivity is relatively low.
For high sensitivity pressure transducer, it fills the conduction material of certain conductivity between two electrode A B
Material, when by the effect of external force F, distance D between electrode A B changes, and is less than D0 as become D1, D1 from D0 in Fig. 2, leads
The resistance sent a telegraph between the AB of pole changes.Therefore, by between the changing value of distance D between acquisition electrode AB and electrode A B
Increased resistance value, calculates the specific size of external force F.
This kind of high sensitivity pressure transducer substantially realize principle and light and thin type pressure transducer substantially realize principle
Similar, but be because detecting the active force being perpendicular to pressure transducer surface, distance D between electrode A B can not be too small, this
The volume resulting in high sensitivity pressure transducer can not be accomplished the least.
Therefore, existing pressure transducer is when pressure sensitive is highly sensitive, it is difficult to accomplish compact, and light and thin type pressure
Although sensor compact, but more sensitive to the active force of draw direction, to the active force being perpendicular to pressure transducer surface
Insensitive, sensitivity is relatively low.
Summary of the invention
In view of this, the present invention provides a kind of pressure transducer, to solve existing pressure transducer or pressure sensitive spirit
Sensitivity is high but volume is relatively big, or compact but the relatively low technical problem of pressure sensitive sensitivity.Technical scheme is as follows:
The present invention provides a kind of pressure transducer, including:
First substrate and the second substrate；Described first substrate and the second substrate are bonded by encapsulating material；Described
One substrate and the second substrate constitute a packaging area；
In described packaging area, with described first substrate laminating design the first electrode and with described second substrate patch
Close the second electrode of design；Having the first distance value between described first electrode and the second electrode, one end of described first electrode sets
Being equipped with the first extraction electrode, one end of described second electrode is provided with the second extraction electrode, described first extraction electrode and second
Extraction electrode is attached with external circuit；
The elastic sphere of multiple surface conductance, described bullet it is provided with in the centre of described first electrode and described second electrode
Property spheroid diameter more than or equal to described first distance value；
When having External Force Acting in described first substrate, described first electrode and the second interelectrode first distance value occur
Change, causes the described elastic sphere contact area respectively with described first electrode and described second electrode to change.
Preferably, the material of described elastic sphere includes: polystyrene, silica gel, SEBS, Polyurethane Thermoplastic Elastomer rubber
Glue TPU or thermoplastic elastomer (TPE) TPE.
Preferably, the diameter range of described elastic sphere is 1um～1000um, the spheroid compressible of described elastic sphere
It is 1%～95%.
Preferably, the overlay coating of described elastic sphere includes metal material, nonmetallic materials or Organic substance, described table
The thickness of face coating is 2nm～50um.
Preferably, the material of described first substrate and the second substrate includes: glass, plastics, rubber or inner surface insulation
Metal material.
Preferably, described encapsulating material includes: acrylic glue, silica gel or rubber.
Preferably, described first electrode and the second electrode include the coat of metal or nano indium tin metal-oxide ITO coating.
The pressure transducer that the present invention provides includes the first substrate and the second substrate, and this first substrate and the second substrate are passed through
Encapsulating material bonds, and constitutes a packaging area.In described packaging area, the first electrode and the first substrate laminating set
Meter, the second electrode and the second substrate laminating design, have the first distance value between the first electrode and the second electrode.And first electrode
One end is provided with the first extraction electrode, and one end of the second electrode is provided with the second extraction electrode, and the first extraction electrode and second draws
Go out electrode to be attached with external circuit, be additionally provided with multiple surface conductance in the centre of described first electrode and the second electrode
Elastic sphere, the diameter of described elastic sphere is more than or equal to described first distance value.When having outer masterpiece in the present invention the first substrate
Used time, the first electrode and the second interelectrode first distance value can change, thus cause elastic sphere electric with first respectively
The contact area of pole and the second electrode changes, due to elastic sphere respectively with the first electrode and the contact area of the second electrode
Changing so that the first electrode and the second interelectrode resistance value change, the present invention is determined by external circuit detection
Go out the first electrode and the second interelectrode increased resistance value, thus calculate the specific size of external force.Because Elastic of the present invention
Spheroid can all produce corresponding deformation for the active force of all directions, and the pressure sensitive of pressure transducer is highly sensitive.And
The volume of Elastic spheroid of the present invention can be the least, so the packaging area being made up of the first substrate and the second substrate can be non-
The least, the therefore compact of the pressure transducer that the present invention provides.
Accompanying drawing explanation
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
In having technology to describe, the required accompanying drawing used is briefly described, it should be apparent that, the accompanying drawing in describing below is only this
Inventive embodiment, for those of ordinary skill in the art, on the premise of not paying creative work, it is also possible to according to
The accompanying drawing provided obtains other accompanying drawing.
Fig. 1 is the structural representation of light and thin type pressure transducer in prior art；
Fig. 2 is the structural representation of high sensitivity pressure transducer in prior art；
The structural representation of a kind of pressure transducer that Fig. 3 provides for the present invention；
The schematic diagram that the pressure transducer that Fig. 4 provides for the present invention is acted on by external force F；
Fig. 5 is the schematic diagram before Elastic spheroid compression of the present invention；
Fig. 6 is the schematic diagram after Elastic spheroid compression of the present invention.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Describe, it is clear that described embodiment is only a part of embodiment of the present invention rather than whole embodiments wholely.Based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under not making creative work premise
Embodiment, broadly falls into the scope of protection of the invention.
Refer to Fig. 3, it illustrates the structural representation of a kind of pressure transducer that the present invention provides.The present invention provides
Pressure transducer specifically includes: first substrate the 100, second substrate 200, encapsulating material the 300, first electrode the 400, second electrode
500, the first extraction electrode the 600, second extraction electrode 700 and elastic sphere 800.
In the present invention, it is preferred to the first substrate 100 and the second substrate 200 be arranged in parallel, and the size of the first substrate 100
Shape is consistent with the size shape of the second substrate 200.First substrate 100 and the second substrate 200 are passed through encapsulating material by the present invention
300 bond, concrete, are glued by encapsulating material 300 respectively at the two ends of the first substrate 100 and the second substrate 200
Close, between the first substrate 100 and the second substrate 200, thus constitute a packaging area.
In the present invention, the material of the first substrate 100 can be: glass, plastics, rubber or the metal material of inner surface insulation
Material.The material of the second substrate 200 can be: glass, plastics, rubber or the metal material of inner surface insulation.Plastics include PET,
PC or PMMA.
It should be noted that the inner surface of metal material refers to metal material that layer towards packaging area in the present invention
Surface.
First substrate 100 and the second substrate 200 are bonded by encapsulating material 300, and it can use acrylic glue, silicon
The various material such as glue or elastomeric material.
In the packaging area being made up of the first substrate 100 and the second substrate 200, the first electrode 400 and the first substrate 100
Laminating design, the second electrode 500 and the second substrate 200 laminating design, have first between the first electrode 400 and the second electrode 500
Distance value D0.
In the present invention, the first electrode 400 includes the coat of metal, or ITO (Indium tin oxide, nano indium tin metal oxygen
Compound) etc. non-metallic coatings.Second electrode 500 includes the non-metallic coatings such as the coat of metal, or ITO.
One end of first electrode 400 is provided with the first extraction electrode 600, is provided with in one end of the second electrode 500
Two extraction electrodes 700, described first extraction electrode 600 and the second extraction electrode 700 are attached with external circuit 900, when
When resistance value between one electrode 400 and the second electrode 500 changes, flow through between this first electrode 400 and second electrode 500
Current value changes, the first extraction electrode 600 on external circuit 900 and the first electrode 400, and on the second electrode 500
The second extraction electrode 700 connect, it is possible to detect this current value.
The elastic sphere 800 of multiple surface conductance it is provided with in the centre of the first electrode 400 and the second electrode 500, described
The diameter of elastic sphere 800 is more than or equal to described first distance value.
In the present invention, the packaging area being made up of the first substrate 100 and the second substrate 200 is provided with multiple surface lead
The elastic sphere 800 of electricity, each elastic sphere 800 contacts with the first electrode 400 and the second electrode 500 respectively, its contact area
For S0.When having the effect of external force F in the first substrate 100, the first distance value D0 between the first electrode 400 and the second electrode 500 sends out
Changing, as shown in Figure 4, the first distance value is become D1, D1 from D0 and is less than D0, thus causes elastic sphere 800 respectively with first
Contact area S0 of electrode 400 and the second electrode 500 changes, and as shown in Figure 5, Figure 6, it is little that contact area is become S, S0 from S0
Increase with the contact area of the first electrode 400 and the second electrode 500 respectively in S, i.e. elastic sphere 800.
In the present invention, elastic sphere 800 contact area S0 with the first electrode 400 and the second electrode 500 respectively be with
The change of the first distance value D0 between the first electrode 400 and the second electrode 500 and change.And the change of contact area S0 and the
Resistance between one electrode 400 and the second electrode 500 is inversely proportional to.Resistance value between the first electrode 400 and the second electrode 500
During change, the electric current flowing through the first electrode 400 and the second electrode 500 changes therewith.Therefore the present invention is by the first extraction
Electrode 600 and the second extraction electrode 700 are attached with external circuit 900, and external circuit 900 can detect that and flows through the first electrode
400 and second curent change of electrode 500, so according to curent change determine the first substrate 100 by after the effect of external force F,
Resistance change between first electrode 400 and the second electrode 500, thereby determines that out the concrete of external force F in the first substrate 100
Size.
In the present invention, the material of elastic sphere 800 may include that polystyrene, silica gel, SEBS (with polystyrene are
End segment, is hydrogenated with, with polybutadiene, the linear three embedding copolymers that ethylene-butene copolymer is middle spring block that obtain), TPU
(Thermoplastic polyurethanes Polyurethane Thermoplastic Elastomer rubber) or TPE (Thermoplastic
Elastomer, thermoplastic elastomer (TPE)).
The diameter range of elastic sphere 800 is 1um～1000um (micron), and the spheroid compressible of elastic sphere 800 is
1%～95%.
The overlay coating of elastic sphere 800 includes: the nonmetallic materials such as the metal materials such as gold, silver, copper, nickel, ITO, silicon or
The Organic substances such as organic conductive inks, the thickness of described overlay coating is 2nm (nanometer)～50um.
The pressure transducer that the present invention provides, when the first substrate 100 on pressure transducer is by the effect of external force F, the
This external force F is passed to elastic sphere 800 by one electrode 400, causes elastic sphere 800 to deform, so that the first electrode
400 and second the first distance values between electrode 500 change, such as, changed to D1 by D0, elastic sphere 800 by compressive deformation,
Elastic sphere 800 contact area with the first electrode 400 and the second electrode 500 respectively changes, such as, become S from S0.This
In invention, elastic sphere 800 contact area with the first electrode 400 and the second electrode 500 respectively is with the first electrode 400 and
The change of the first distance value between two electrodes 500 and change, and the change of contact area and the first electrode 400 and the second electrode
Resistance between 500 is inversely proportional to.Therefore the present invention passes through the first extraction electrode 600 and the second extraction electrode 700 and external circuit
900 are attached, external circuit 900 can measure and show that the first substrate 100 is by the first electrode caused after the effect of external force F
400 and second resistance variations between electrode 500.
Therefore the pressure transducer that the present invention provides includes the first substrate 100 and the second substrate 200, this first substrate 100
Bonded by encapsulating material 300 with the second substrate 200, constitute a packaging area.In described packaging area, the first electricity
Pole 400 and the first substrate 100 laminating design, the second electrode 500 and the second substrate 200 laminating design, the first electrode 400 and second
There is between electrode 500 first distance value.And first one end of electrode 400 be provided with the first extraction electrode 600, the second electrode 500
One end be provided with the second extraction electrode 700, the first extraction electrode 600 and the second extraction electrode 700 are carried out with external circuit 900
Connect, be additionally provided with the elastic sphere 800 of multiple surface conductance, institute in the centre of described first electrode 400 and the second electrode 500
State the diameter of elastic sphere 800 more than or equal to described first distance value.When having the effect of external force F in the present invention the first substrate 100,
The first distance value between the first electrode 400 and the second electrode 500 can change, thus causes elastic sphere 800 respectively with
The contact area of one electrode 400 and the second electrode 500 changes, due to elastic sphere 800 respectively with the first electrode 400 and
The contact area of two electrodes 500 changes so that the resistance value between the first electrode 400 and the second electrode 500 changes, this
Invent and determine the increased resistance value between the first electrode 400 and the second electrode 500 by external circuit 900 detection, thus calculate
Go out the specific size of external force F.Because Elastic spheroid 800 of the present invention all can produce for the directed force F of all directions accordingly
Deformation, the pressure sensitive of pressure transducer is highly sensitive.And the diameter range of Elastic spheroid 800 of the present invention be 1um～
1000um, volume can be the least, so the packaging area being made up of the first substrate 100 and the second substrate 200 can be the least,
Therefore the compact of the pressure transducer that the present invention provides.Additionally, because the spheroid of Elastic spheroid 800 of the present invention is compressible
Rate is 1%～95%, the pressure transducer ultra-thin flexible and flexible that the present invention provides.
Above a kind of pressure transducer provided by the present invention is described in detail, specific case used herein
Principle and embodiment to the present invention are set forth, and the explanation of above example is only intended to help to understand the side of the present invention
Method and core concept thereof；Simultaneously for one of ordinary skill in the art, according to the thought of the present invention, in detailed description of the invention
And all will change in range of application, in sum, this specification content should not be construed as limitation of the present invention.
Claims (7)
1. a pressure transducer, it is characterised in that including:
First substrate and the second substrate；Described first substrate and the second substrate are bonded by encapsulating material；Described first base
The end and the second substrate constitute a packaging area；
In described packaging area, with described first substrate laminating design the first electrode and with described second substrate laminating set
Second electrode of meter；Having the first distance value between described first electrode and the second electrode, one end of described first electrode is provided with
First extraction electrode, one end of described second electrode is provided with the second extraction electrode, and described first extraction electrode and second is drawn
Electrode is attached with external circuit；
The elastic sphere of multiple surface conductance, described elastic ball it is provided with in the centre of described first electrode and described second electrode
The diameter of body is more than or equal to described first distance value；
When having External Force Acting in described first substrate, described first electrode and the second interelectrode first distance value become
Change, cause the described elastic sphere contact area respectively with described first electrode and described second electrode to change.
Pressure transducer the most according to claim 1, it is characterised in that the material of described elastic sphere includes: polyphenyl second
Alkene, silica gel, SEBS, Polyurethane Thermoplastic Elastomer rubber TPU or thermoplastic elastomer (TPE) TPE.
Pressure transducer the most according to claim 1, it is characterised in that the diameter range of described elastic sphere be 1um～
1000um, the spheroid compressible of described elastic sphere is 1%～95%.
Pressure transducer the most according to claim 1, it is characterised in that the overlay coating of described elastic sphere includes metal
Material, nonmetallic materials or Organic substance, the thickness of described overlay coating is 2nm～50um.
Pressure transducer the most according to claim 1, it is characterised in that described first substrate and the material bag of the second substrate
Include: glass, plastics, rubber or the metal material of inner surface insulation.
Pressure transducer the most according to claim 1, it is characterised in that described encapsulating material includes: acrylic glue, silicon
Glue or rubber.
Pressure transducer the most according to claim 1, it is characterised in that described first electrode and the second electrode include metal
Coating or nano indium tin metal-oxide ITO coating.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610797971.2A CN106197775A (en) | 2016-08-31 | 2016-08-31 | A kind of pressure transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610797971.2A CN106197775A (en) | 2016-08-31 | 2016-08-31 | A kind of pressure transducer |
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| CN106197775A true CN106197775A (en) | 2016-12-07 |
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| CN201610797971.2A Pending CN106197775A (en) | 2016-08-31 | 2016-08-31 | A kind of pressure transducer |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109813472A (en) * | 2019-03-14 | 2019-05-28 | 湖南道达宇科技有限公司 | A kind of embedded load sensor |
| CN110553766A (en) * | 2018-05-30 | 2019-12-10 | 浙江清华柔性电子技术研究院 | Force sensor and method for manufacturing the same |
| CN111157105A (en) * | 2020-01-06 | 2020-05-15 | 京东方科技集团股份有限公司 | Tremor sensor and tremor detection device |
| CN114459337A (en) * | 2022-03-15 | 2022-05-10 | 安徽大学 | High-sensitivity resistance type flexible tensile strain sensor based on spherical valve shape |
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