A kind of agitating device for proton exchange equipment
Technical field
The present invention relates to proton exchange equipment more particularly to a kind of agitating devices for proton exchange equipment.
Background technique
In recent years, optical communication technology develops rapidly, and lithium niobate fiber waveguide device plays key player wherein.It is logical in light
The lithium niobate fiber waveguide device that can be widely applied in letter system mainly has intensity modulator, phase-modulator, coupler, photoswitch
And array of photoswitch, tunable wavelength filter and Polarization Controller, these devices are required without exception in lithium niobate crystal
Optical waveguide is made on body, changes the physical parameter of light wave on lithium columbate crystal using the photoelectric effect of lithium columbate crystal, realizes device
Part function.There are two types of the approach of production for the optical waveguide of existing lithium niobate modulator: titanium diffusion and proton exchange, in contrast, the latter
Simpler easy, application is wide.
Proton exchange generallys use the benzoic acid of melting as proton source, the technical process of proton exchange are as follows: 1, in niobic acid
Lithium, which polishes, makes one layer of exposure mask on substrate, exposure mask can be metal film or dielectric film;2, trivial with photoetching process etching waveguide
The exposure mask in domain is exposed for the plane of crystal of proton exchange;3, the lithium niobate substrate for carrying out mask pattern is immersed to the benzene first of melting
In acid, Li in lithium columbate crystal is allowed+With the H in benzoic acid+Swap reaction.
The existing proton exchange equipment largely used is as shown in Fig. 1, and lithium niobate substrate 101 is placed in substrate frame 102, base
Horse 102 is connected in horse installation axle 103 by centre bore;Substrate frame 102 is placed in proton exchange source 104 in technical process
In (such as the benzoic acid of melting), proton exchange source 104 is placed in quartz ampoule 105, and there are also heating control apparatus for the periphery of quartz ampoule
(not shown) promotes the proton exchange process consistency of each substrate more preferable to improve the processing quality of proton exchange,
When carrying out proton exchange process, per operator can be arranged to shake horse installation axle 103 up and down after a period of time, substrate frame is driven
102 move up and down, and realize stirring to proton exchange source 104, make ion distribution in proton exchange source 104 more evenly.Proton
After stirring, the effect of proton exchange process is improved in exchange source 104, but the mode cost of artificial shake stirring
Height, large labor intensity and stirring amplitude, mixing time length, stirring interval time are difficult to keep accurate unified problem, exist
Many uncertain factors.
Summary of the invention
The technical problem to be solved by the present invention is to overcome the deficiencies in the prior art, provide that a kind of structure is simple, automation journey
Degree is high, can reduce the agitating device for proton exchange equipment of human factor influence.
In order to solve the above technical problems, the invention adopts the following technical scheme: a kind of stirring for proton exchange equipment
Device, proton exchange equipment include horse installation axle, and the agitating device for proton exchange equipment includes lifting assembly, for pressing from both sides
The clamp assemblies of the horse installation axle and the driving assembly for driving lifting assembly up and down reciprocatingly to move along a straight line are held, it is described
It connect on the upside of clamp assemblies and the lifting assembly, is connect on the downside of the driving component and the lifting assembly.
As a further improvement of the above technical scheme:
The clamp assemblies include clamp arm, compact heap and clamping cylinder, on the upside of described clamp arm one end and the lifting assembly
Connection, the clamp arm other end is hinged with described compact heap one end and articulated shaft is arranged along the vertical direction, the clamping cylinder and the pressure
Tight block is divided into the clamp arm two sides, and the output shaft of clamping cylinder passes through the clamp arm and connect with the compact heap other end.
The compact heap other end is equipped with the notch passed through for the output shaft of clamping cylinder, covers on the output shaft of the clamping cylinder
Equipped with rotating block and output shaft end is installed with limited block, and the width of the notch is d1, and the minimum widith of the rotating block is
D2, the maximum width of rotating block are d3, d2≤d1 < d3.
The compact heap offers rotating block limiting groove in the indentation, there.
Semicircle orifice is offered in the clamp arm and the compact heap, on the semicircle orifice and the compact heap in the clamp arm
Semicircle orifice cooperatively form the positioning region of the horse installation axle, and be installed with rubber pad on the hole wall of the semicircle orifice.
Described clamp arm one end is hinged with the lifting assembly upside and articulated shaft is arranged along the vertical direction, the lifting assembly
On be installed with limit bolt for limiting clamp arm rotation, the limit with limit bolt cooperation is offered in the clamp arm
Position hole.
The lifting assembly includes elevating lever and the linking arm for being fixedly arranged on elevating lever upper end, clamp arm one end and the company
It is hinged to connect arm, the driving component includes motor, eccentric wheel and connecting rod, and the eccentric wheel is installed in the shaft of the motor,
The connecting rod two end is connect with the eccentric wheel and elevating lever respectively.
The eccentric wheel is equipped with multiple connecting rod mounting holes, and each off-axis heart distance of connecting rod mounting hole is different;The elevating lever
Lifting travel be 3mm-100mm.
It further include lifting guide assembly, the lifting guide assembly includes a pair of of guiding axis and a pair of of linear bearing, described
Elevating lever lower end is installed with cross connecting plate, and a pair of linear bearing is divided into the lateral connection board ends, described in a pair
Guiding axis is installed on a mounting rack, and a pair of linear bearing one-to-one correspondence is installed on a pair of guiding axis, the cross
Hinged seat is installed on connecting plate, described connecting rod one end and the hinged seat are hinged.
It further include altitude location component, the altitude location component includes microswitch and altitude location cylinder, the installation
Frame includes the vertical connecting plate of bottom plate, top plate and connecting bottom board and top plate, and the guiding axis is installed between bottom plate and top plate,
The hinged seat and the altitude location cylinder are divided into the cross connecting plate two sides, and the microswitch is installed in the bottom plate
Upper surface, the motor are located at below the bottom plate, and the connecting rod passes through the bottom plate and the hinged seat is hinged, the height
The output shaft of positional cylinder arranges that the microswitch couples with the motor and the contact of microswitch is upwardly disposed downward, when
When the output shaft of the altitude location cylinder triggers the contact of the microswitch, the motor stalls.
Compared with the prior art, the advantages of the present invention are as follows: the stirring dress disclosed by the invention for proton exchange equipment
It sets, is clamped horse installation axle using clamp assemblies, clamp assemblies are installed on lifting assembly and by driving assembly band
Dynamic lifting assembly pumps, to realize the stirring to proton exchange source, structure is simple, and high degree of automation subtracts
The labor intensity for having lacked operator also avoids manually stirring existing uncertain factor, ensure that the uniformity of stirring.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of existing proton exchange equipment.
Fig. 2 is schematic perspective view of the present invention for the agitating device of proton exchange equipment.
Fig. 3 is the enlarged drawing in Fig. 2 at A.
Fig. 4 is the enlarged drawing in Fig. 2 at B.
Fig. 5 is the enlarged drawing of the compact heap in the present invention.
Fig. 6 is the schematic perspective view of the lifting assembly in the present invention.
Fig. 7 is the schematic perspective view of the driving assembly in the present invention.
Fig. 8 is the C-C view in Fig. 7.
Fig. 9 is the structural schematic diagram of the eccentric wheel in the present invention.
Schematic perspective view when Figure 10 is use state of the present invention.
Each label indicates in figure: 101, lithium niobate substrate;102, substrate frame;103, horse installation axle;104, proton exchange
Source;105, quartz ampoule;100, driving assembly;106, motor;107, eccentric wheel;108, connecting rod;109, connecting rod mounting hole;200, it presss from both sides
Hold component;201, clamp arm;202, compact heap;203, clamping cylinder;204, semicircle orifice;205, positioning region;206, rubber pad;207, it lacks
Mouthful;208, rotating block;209, rotating block limiting groove;210, limit hole;211, L shape locating piece;212, limited block;300, it goes up and down
Component;301, limit bolt;302, elevating lever;303, linking arm;304, cross connecting plate;305, hinged seat;400, lifting is led
To component;401, guiding axis;402, linear bearing;500, mounting rack;501, bottom plate;502, top plate;503, vertical connecting plate;
600, altitude location component;601, microswitch;602, altitude location cylinder.
Specific embodiment
The present invention is described in further details below with reference to Figure of description and specific embodiment.
As shown in Fig. 2 to Figure 10, the agitating device for proton exchange equipment of the present embodiment, including lifting assembly 300,
Drive for clamping the clamp assemblies 200 of horse installation axle 103 and for driving lifting assembly 300 up and down reciprocatingly to move along a straight line
Component 100 is moved, connects on the upside of clamp assemblies 200 and lifting assembly 300, is connected on the downside of driving assembly 100 and lifting assembly 300,
The agitating device structure for being used for proton exchange equipment is simple, and high degree of automation reduces the labor intensity of operator,
Uncertain factor existing for artificial stir is avoided, ensure that the uniformity of stirring.
Clamp assemblies 200 include clamp arm 201, compact heap 202 and clamping cylinder 203,201 one end of clamp arm and lifting assembly
300 upside connections, 201 other end of clamp arm is hinged with 202 one end of compact heap and articulated shaft is arranged along the vertical direction, clamping cylinder 203
201 two sides of clamp arm are divided into compact heap 202, and the output shaft of clamping cylinder 203 passes through clamp arm 201 and 202 other end of compact heap
Connection when needing to clamp horse installation axle 103, drives compact heap 202 to be close to clamp arm 201 by the output shaft of clamping cylinder 203,
Structure is simple, reliable, and the active force of clamping cylinder 203 is continuously adjusted and keeps stable.In the present embodiment, clamping cylinder 203 is cylinder,
Hydraulic cylinder can also be used in other embodiments.
202 other end of compact heap is equipped with the notch 207 passed through for the output shaft of clamping cylinder 203, the output shaft of clamping cylinder 203
On be arranged with rotating block 208 and output shaft end is installed with limited block 212, the width of notch 207 is d1, and rotating block 208 is most
Small width is d2, and the maximum width of rotating block 208 is d3, d2≤d1 < d3, when needing to clamp horse installation axle 103, will first be turned
Motion block 208 is rotated around the output shaft of clamping cylinder 203, makes rotating block 208 that can not pass through notch 207, then 203 output shaft of clamping cylinder
The limited block 212 of retraction, end drives rotating block 208 to compress compact heap 202, and then horse installation axle 103 is gripped;
When needing to loosen clamping horse installation axle 103, the output shaft of clamping cylinder 203 sufficiently stretches out, then by rotating block 208 around clamping cylinder
203 output shaft rotation, makes rotating block 208 may pass through notch 207, finally rotates compact heap 202 around articulated shaft.This reality
It applies in example, rotating block 208 is that other shapes than circular can also be used in other embodiments in rectangular blocks.
In the present embodiment, compact heap 202 offers rotating block limiting groove 209 at notch 207, is convenient for rotating block 208
Positioning, rotating block 208 can avoid unnecessary rotation after being placed in rotating block limiting groove 209, clamp assemblies 200 can be more
Horse installation axle 103 is clamped well.
In the present embodiment, semicircle orifice 204, the semicircle orifice 204 in clamp arm 201 are offered in clamp arm 201 and compact heap 202
The positioning region 205 that horse installation axle 103 is cooperatively formed with the semicircle orifice 204 on compact heap 202 passes through a pair of of 204 energy of semicircle orifice
It is enough that preferably horse installation axle 103 is fixedly clamped;Rubber pad 206 is installed on the hole wall of semicircle orifice 204, it on the one hand can be with
The clamping force for buffering clamp arm 201 and compact heap 202 avoids clamp arm 201 and compact heap 202 from damaging horse installation axle 103, another party
Face can increase the stiction between horse installation axle 103, convenient for driving horse installation axle 103 to pump.
Lifting assembly 300 includes elevating lever 302 and the linking arm 303 for being fixedly arranged on 302 upper end of elevating lever, 201 one end of clamp arm
It is hinged with linking arm 303, and articulated shaft is arranged along the vertical direction, so that clamp arm 201 can be swung with OQ t component 300, is risen
It comes down to a lower group the limit bolt 301 being installed on part 300 for limiting the rotation of clamp arm 201, is offered in clamp arm 201 and limit bolt
The limit hole 210 of 301 cooperations, when horse installation axle 103 to be placed in quartz ampoule 105, clamp arm 201, which is rocked to, can concede quartz
The position of 105 nozzle of pipe, after horse installation axle 103 is placed in quartz ampoule 105, clamp arm 201 is rocked on 105 nozzle of quartz ampoule
Side, limit bolt 301 are inserted into limit hole 210 and position clamp arm 201, are convenient for subsequent stirring operation.In the present embodiment,
L shape locating piece 211 is equipped between clamp arm 201 and linking arm 303,211 one side of L shape locating piece is fixedly connected with clamp arm 201, another
While offering above-mentioned limit hole 210.
In the present embodiment, driving assembly 100 includes motor 106, eccentric wheel 107 and connecting rod 108, and eccentric wheel 107 is installed on
In the shaft of motor 106,108 both ends of connecting rod are connect with eccentric wheel 107 and elevating lever 302 respectively, and when stirring, motor 106 is rotated
Band movable eccentric wheel 107 rotates, and eccentric wheel 107 drives connecting rod 108 to swing, and connecting rod 108 drives the up and down reciprocatingly straight line of lifting assembly 300
Movement.In other embodiments, motor 106 and screw pair can also be used in driving assembly 100, and motor 106 is driving lead screw just
Reversion, feed screw nut drive lifting assembly 300 up and down reciprocatingly to move along a straight line.
Eccentric wheel 107 is equipped with multiple connecting rod mounting holes 109, and each connecting rod mounting hole 109 off-axis heart distance is different, connecting rod
108 connect the adjusting, it can be achieved that 302 lifting travel of elevating lever, namely the tune of stirring amplitude from different connecting rod mounting holes 109
Section;In the present embodiment, the lifting travel of elevating lever 302 is 3mm-100mm;Eccentric wheel 107 is T shape wheel, miner diameter end and motor 106
Shaft rotate synchronously, connecting rod mounting hole 109 is opened in bigger diameter end.
In the present embodiment, the agitating device for proton exchange equipment further includes lifting guide assembly 400, goes up and down guiding group
Part 400 includes that a pair of of guiding axis 401 and a pair of of linear bearing 402,302 lower end of elevating lever are installed with cross connecting plate 304, a pair of
Linear bearing 402 is divided into 304 both ends of cross connecting plate, and a pair of of guiding axis 401 is installed on a mounting rack 500, a pair of of straight line
The one-to-one correspondence of bearing 402 is installed on a pair of of guiding axis 401, and hinged seat 305, connecting rod 108 1 are installed on cross connecting plate 304
End and hinged seat 305 are hinged, and when stirring, elevating lever 302 drives a pair of of about 402 linear bearing fortune by cross connecting plate 304
It is dynamic, under the action of a pair of of guiding axis 401, it can avoid 300 entirety of lifting assembly and shake, so that lifting assembly 300 moves
It is more steady, smooth.
Agitating device for proton exchange equipment further includes altitude location component 600, and altitude location component 600 includes micro-
Dynamic switch 601 and altitude location cylinder 602, mounting rack 500 include bottom plate 501, top plate 502 and connecting bottom board 501 and top plate 502
Vertical connecting plate 503, guiding axis 401 is installed between bottom plate 501 and top plate 502, and microswitch 601 is installed in bottom plate 501
Upper surface, motor 106 are located at 501 lower section of bottom plate, and connecting rod 108 passes through bottom plate 501 and hinged seat 305 is hinged, altitude location cylinder 602
Output shaft arrange that microswitch 601 couples with motor 106 and the contact of microswitch 601 is upwardly disposed downward, when height is fixed
When the contact of the output shaft triggering microswitch 601 of position cylinder 602, motor 106 stops operating.Debug the minimum of lifting assembly 300
When height, the output shaft of altitude location cylinder 602 stretches out, and motor 106 slowly rotates, when the output shaft of altitude location cylinder 602 triggers
When the contact of microswitch 601, motor 106 stops operating and locks;When starting stirring, the output of altitude location cylinder 602
Axis retraction, motor 106 are rotated with the speed of technique initialization, realize stirring.In the present embodiment, hinged seat 305 and altitude location cylinder
602 are divided into 304 two sides of cross connecting plate, and it is ipsilateral that a pair of of linear bearing 402 and hinged seat 305 are located at cross connecting plate 304, and
Hinged seat 305 is located among a pair of of linear bearing 402.
Application method of the present invention for the agitating device of proton exchange equipment is as follows:
1) be adjusted to the position of lifting assembly 300 and clamp assemblies 200 minimum: the output shaft of altitude location cylinder 602 stretches out,
Rotate motor 106 slowly, altitude location cylinder 602 slowly declines, when the output shaft of altitude location cylinder 602 triggers microswitch
When 601 contact, motor 106 stops operating and locks;
2) horse installation axle 103 is installed: clamp arm 201 being made to be rocked to the position that can concede 105 nozzle of quartz ampoule, horse installation
Axis 103 is placed in the quartz ampoule 105 for filling 104 solution of proton exchange source, and clamp arm 201 is rocked on 105 nozzle of quartz ampoule later
Side, horse installation axle 103 are located at two semicircle orifices 204 and cooperatively form in positioning region 205, and limit bolt 301 is inserted into limit hole 210
It is middle to position clamp arm 201, then rotating block 208 is turned in rotating block limiting groove 209 around the output shaft of clamping cylinder 203, most
The output shaft retraction of clamping cylinder 203 afterwards, the limited block 212 of end drive rotating block 208 to compress compact heap 202, and then by piece
Frame installation axle 103 grips;
3) proton exchange source 104: the output shaft retraction of altitude location cylinder 602, the rotation band movable eccentric wheel of motor 106 are stirred
107 rotations, eccentric wheel 107 drive connecting rod 108 to swing, and connecting rod 108 drives lifting assembly 300 up and down reciprocatingly to move along a straight line, and clamp
Component 200 drives horse installation axle 103 up and down reciprocatingly move along a straight line stirring of the realization to proton exchange source 104, mixing time, width
Degree etc. is determined according to the design of stirring technique;
4) complete stirring: after stirring is completed, motor 106 stops operating, and first sufficiently stretches the output shaft of clamping cylinder 203
Out, rotating block 208 is removed into rotating block limiting groove 209 and is rotated around the output shaft of clamping cylinder 203, so that rotating block 208 can
Across notch 207, compact heap 202 is rotated around the articulated shaft of itself and clamp arm 201, rotates compact heap 202 to fill around articulated shaft
Divide expansion, then extracts limit bolt 301 from limit hole 210, clamp arm 201, which is rocked to, can concede 105 nozzle of quartz ampoule
Position, finally horse installation axle 103 is taken out from quartz ampoule 105.
Although the present invention has been disclosed as a preferred embodiment, however, it is not intended to limit the invention.It is any to be familiar with ability
The technical staff in domain, without deviating from the scope of the technical scheme of the present invention, all using the technology contents pair of the disclosure above
Technical solution of the present invention makes many possible changes and modifications or equivalent example modified to equivalent change.Therefore, all
Without departing from the content of technical solution of the present invention, according to the present invention technical spirit any simple modification made to the above embodiment,
Equivalent variations and modification, all shall fall within the protection scope of the technical scheme of the invention.