CN106153627B - High-sensitivity surface slight flaws optical detection apparatus and detection method - Google Patents
High-sensitivity surface slight flaws optical detection apparatus and detection method Download PDFInfo
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Abstract
Present invention discloses a kind of high-sensitivity surface slight flaws optical detection apparatus and detection method, the detection method includes: that collimated incident light is carried out continuous angle sweep by continuous angle sweep mechanism in certain angular range；The collimated light beam being scanned with angle form is focused in a plane and angle scanning is converted into line scanning by focusing, is focused the laser beam into a tested plane and will be focused laser point in the plane into line scan；Light beam after surface-reflected enters reflected light optical collector along angle of reflection, and part light is attached to the reception of the second photodetector on reflected light optical collector, generates a photosignal；First optical collector inner wall is coated with high anti-layer, makes to scatter the first photodetector that light is entered after multiple reflections on the first optical collector, the photosignal of generation corresponds to surface scattering.High-sensitivity surface slight flaws optical detection apparatus proposed by the present invention and method, can be improved detection sensitivity and accuracy.
Description
Technical field
The invention belongs to technical field of optical detection, are related to a kind of optical detection apparatus more particularly to a kind of high sensitivity
Surface slight flaws optical detection apparatus；Meanwhile the invention further relates to a kind of high-sensitivity surface slight flaws optical detection sides
Method.
Background technique
Lack fast and effeciently method in the microdefect context of detection to larger area smooth surface at present.It is existing to be based on
The shortcomings that detection method of machine vision is slow in the presence of detection speed, low to tiny flaw sensitivity equal, is unable to satisfy industrial production
In to the on-line checking demand of tiny flaw.
Using laser scattering method can it is very sensitive and rapidly detect smooth surface slight flaws [bibliography 1:
“Method of Inspecting Magnetic Disc and Apparatus Therefor and Process for
Producing the Magnetic Disc”,US Patent:6,078,385,Jun.20,2000]。
It uses telecentric scan lens that one laser beam is focused on measured surface in the method for normal incidence, can effectively detect by table
Scattering light [the bibliography 2: utility model title: a kind of surface microdefect detection dress based on laser light scattering that face flaw generates
It sets, the patent No.: ZL2012 on 01 16th, 2 0019507.8,2012].
But since the scattering light that scanning optics itself generates also can receive system into scattering, to reduce detection
Signal-to-noise ratio.
In view of this, nowadays there is an urgent need to design a kind of new detection system, to overcome the above-mentioned of existing detection mode
Defect.
Summary of the invention
The technical problems to be solved by the present invention are: a kind of high-sensitivity surface slight flaws optical detection apparatus is provided,
Detection sensitivity and accuracy can be improved.
In addition, it is sensitive that detection can be improved the present invention also provides a kind of high-sensitivity surface slight flaws optical detecting method
Degree and accuracy.
In order to solve the above technical problems, the present invention adopts the following technical scheme:
A kind of high-sensitivity surface slight flaws optical detection apparatus, the detection device include: continuous angle sweep mechanism,
Focusing, integrating sphere optical collector, the first photodetector, reflected light optical collector, the second photodetector；
The continuous angle sweep mechanism is scanning galvanometer or polyhedron rotating mirror；The continuous angle sweep mechanism to
Collimated incident light is subjected to continuous angle sweep in certain angular range；
The focusing is to focus on the collimated light beam being scanned with angle form in one plane and by angle
Degree scan transformation is scanned at line, focuses the laser beam into a tested plane and focusing laser point is carried out line in the plane and sweep
It retouches；
The integrating sphere optical collector is set to above tested plane, between focusing and reflected light optical collector；Product
The bottom of bulb separation optical collector is equipped with notch；This structure can effectively stop the scattering light generated by scanning optics itself, from
And improve the signal-to-noise ratio of system.
The cavity that the reflected beams after surface-reflected will be provided with slit by one receives, cavity inner wall to reflected light have compared with
It is strong to absorb, the second photodetector is equipped on cavity wall, for measuring reflected light relative light intensity；If there is any flaw on surface
Defect, then incident light beam will also be scattered in addition to reflection by surface blemish, and scattering the major part in light will enter above tested plane
Integrating sphere optical collector.
Integrating sphere optical collector inner wall is coated with high anti-layer, and scattering light can be made to be entered on integrating sphere optical collector after multiple reflections
The first photodetector, the photosignal of generation corresponds to surface scattering.
A kind of high-sensitivity surface slight flaws optical detection apparatus, the detection device include: continuous angle sweep mechanism,
Focusing, the first optical collector, the first photodetector, reflected light optical collector, the second photodetector；
The continuous angle sweep mechanism in certain angular range to carry out continuous angle sweep for collimated incident light；
The focusing is to focus on the collimated light beam being scanned with angle form in one plane and by angle
Degree scan transformation is scanned at line, focuses the laser beam into a tested plane and focusing laser point is carried out line in the plane and sweep
It retouches；
Light beam after surface-reflected enters reflected light optical collector along angle of reflection, and part light is attached on reflected light optical collector
The second photodetector receive, generate a photosignal；
The first optical collector inner wall is coated with high anti-layer, and scattering light can be made to be entered on the first optical collector after multiple reflections
The first photodetector, the photosignal of generation corresponds to surface scattering.
As a preferred solution of the present invention, first optical collector is the integrating sphere optical collector equipped with opening.
As a preferred solution of the present invention, the integrating sphere optical collector is set to above tested plane, is located at and is focused
Between mechanism and reflected light optical collector；The bottom of integrating sphere optical collector is along incident and reflection light direction at upside-down triangle shape or two sides
It is respectively equipped with notch, notch is symmetrical arranged
As a preferred solution of the present invention, the reflected beams after surface-reflected will be provided with the cavity of slit by one
It receives, cavity inner wall has stronger absorption to reflected light, the second photodetector is equipped on cavity wall, for measuring reflected light phase
To luminous intensity；If there is any flaw on surface, incident light beam will also be scattered in addition to reflection by surface blemish, scatter in light
Most of will enter the integrating sphere optical collector above tested plane.
As a preferred solution of the present invention, the continuous angle sweep mechanism is scanning galvanometer or polyhedron rotary reflection
Mirror.
A kind of detection method of above-mentioned high-sensitivity surface slight flaws optical detection apparatus, the detection method include:
Collimated incident light is carried out continuous angle sweep by continuous angle sweep mechanism in certain angular range；
The collimated light beam being scanned with angle form is focused in a plane and turns angle scanning by focusing
It changes line scanning into, focus the laser beam into a tested plane and laser point will be focused in the plane into line scan；
The cavity that the reflected beams after surface-reflected will be provided with slit by one receives, cavity inner wall to reflected light have compared with
It is strong to absorb, the second photodetector is equipped on cavity wall, for measuring reflected light relative light intensity；If there is any flaw on surface
Defect, then incident light beam will also be scattered in addition to reflection by surface blemish, and scattering the major part in light will enter above tested plane
Integrating sphere optical collector；
Integrating sphere optical collector inner wall is coated with high anti-layer, enters scattering light after multiple reflections on integrating sphere optical collector
The photosignal of first photodetector, generation corresponds to surface scattering.
A kind of detection method of above-mentioned high-sensitivity surface slight flaws optical detection apparatus, the detection method include:
Collimated incident light is carried out continuous angle sweep by continuous angle sweep mechanism in certain angular range；
The collimated light beam being scanned with angle form is focused in a plane and turns angle scanning by focusing
It changes line scanning into, focus the laser beam into a tested plane and laser point will be focused in the plane into line scan；
Light beam after surface-reflected enters reflected light optical collector along angle of reflection, and part light is attached on reflected light optical collector
The second photodetector receive, generate a photosignal；
First optical collector inner wall is coated with high anti-layer, makes to scatter light is entered after multiple reflections on the first optical collector first
The photosignal of photodetector, generation corresponds to surface scattering.
The beneficial effects of the present invention are: high-sensitivity surface slight flaws optical detection apparatus proposed by the present invention and side
Detection sensitivity, accuracy and detection speed can be improved in method.
Detailed description of the invention
Fig. 1 is the part composition schematic diagram of optical detection apparatus of the present invention in embodiment one.
Fig. 2 is the schematic diagram for making focal length light beam be incident on measured surface using optical detection apparatus of the present invention.
Fig. 3 is that focus on light beam is integrated the received schematic diagram of ball optical collector in embodiment one after defect scattering.
Fig. 4 is the part composition schematic diagram of optical detection apparatus of the present invention in embodiment two.
Fig. 5 is the composition schematic diagram at another visual angle of optical detection apparatus of the present invention in embodiment two.
Fig. 6 is that focus on light beam is integrated the received schematic diagram of ball optical collector in embodiment two after defect scattering.
Specific embodiment
The preferred embodiment that the invention will now be described in detail with reference to the accompanying drawings.
Embodiment one
In order to improve detection signal-to-noise ratio, the method that this method uses angle incidence, the integrating sphere being open by one is collected
The scattering light generated by surface blemish, while the stray light for effectively scanning optics itself being stopped to generate enters scattering light collection
System.Fig. 1 show one such design, and the two sides of integrating sphere are equipped with symmetrical notch, and (certain notch can not also be right
Claim).
It please refers to Fig.1 to Fig.3, it is described present invention discloses a kind of high-sensitivity surface slight flaws optical detection apparatus
Detection device includes: continuous angle sweep mechanism 11, focusing 12, integrating sphere optical collector 13, the first photodetector 14, reflection
Light optical collector 15, the second photodetector 16.
The continuous angle sweep mechanism 11 is scanning galvanometer or polyhedron rotating mirror, and in the present embodiment, continuous angle is swept
Retouching mechanism 11 is galvanometer；The continuous angle sweep mechanism 11 is continuous to carry out collimated incident light in certain angular range
Angle sweep.
The focusing 12 is to focus in a plane and incite somebody to action the collimated light beam being scanned with angle form
Angle scanning is converted into line scanning, focuses the laser beam into a tested plane 30 and carries out laser point is focused in the plane
Line scanning.In the present embodiment, focusing 12 is condenser lens.
The integrating sphere optical collector 13 is set to tested 30 top of plane, is located at focusing 12 and reflected light optical collector 15
Between；The bottom of integrating sphere optical collector 13 is equipped with notch, as shown in figure 3, notch is set to the lower part of integrating sphere optical collector 13.
The reflected beams after surface-reflected receive the cavity 15 that slit is provided with by one, and cavity inner wall has reflected light
It is relatively strong to absorb, the second photodetector 16 is equipped on cavity wall, for measuring reflected light relative light intensity, which is reflected
The reflection case on surface；If there is any flaw on surface, incident light beam will also be scattered in addition to reflection by surface blemish, dissipate
The major part penetrated in light will enter the integrating sphere optical collector 13 being tested above plane.
13 inner wall of integrating sphere optical collector is coated with high anti-layer, and scattering light can be made to enter integrating sphere optical collector after multiple reflections
The first photodetector 14 on 13, the photosignal of generation correspond to surface scattering.
The working principle of optical detection apparatus of the present invention is as follows:
Collimated light beam is projected a scanning instead through an optical shaping system (not marking in figure) by the laser beam in Fig. 1
Penetrate on mirror, which can be galvanometer, be also possible to a high-speed rotating multi-surface reflection prism or other with certain
Angular speed rotation mirror surface.After the reflection of light beam mirror rotating mirror, inswept one specific angle alpha, reflecting mirror
The focus weight of a condenser lens (can be a telecentric scan lens or a F-Theta lens) in the center and figure in face
It closes, is converged at an angle after the reflected beams line focus lens focus in tested plane and fast with the rotation of rotary scanning
A line in plane that speed is inswept, as shown in Figure 2.
If there is any flaw on surface, incident light beam will also be scattered in addition to reflection by surface blemish, scatter in light
It is most of to enter the integrating sphere (i.e. integrating sphere optical collector 13) above it, as shown in Figure 3.
Integrating sphere inner wall is coated with high anti-layer, can make to scatter the photoelectricity spy that light is entered after multiple reflections on integrating sphere
Device is surveyed, the photosignal of generation corresponds to surface scattering.The reflected beams after surface-reflected will be provided with the cavity of slit by one
It receives, cavity inner wall has stronger absorption to reflected light and fills a photodetector on cavity wall, measures reflected light with respect to light
Intensity.
The flaw that scratch, point etc. influence surface smoothness can generate the incident light of focusing strong scattering, therefore
Highly sensitive Defect Detection can be realized by the reception to scattered signal；And it is smooth for surface but to the absorption of incident light not
It is same as a kind of flaw on periphery, scattering is unobvious, and at this time due to absorbing, reflective light intensity will change, by reflected light
Detection, can effectively detect this kind of flaw.Therefore, scattering and reflecting two kinds of detection methods has certain complementarity, makes entirely to examine
Surveying device has bigger applicability.In addition, scattering is believed since scattering of the flaw to incident light can be such that reflective light intensity reduces
Number divided by reflection signal, the sensitivity of detection can be greatly enhanced.
The present invention also discloses a kind of detection method of above-mentioned high-sensitivity surface slight flaws optical detection apparatus, the inspection
Survey method includes:
Collimated incident light is carried out continuous angle sweep by [step S1] continuous angle sweep mechanism in certain angular range；
The collimated light beam being scanned with angle form is focused in a plane and by angle by [step S2] focusing
Degree scan transformation is scanned at line, focuses the laser beam into a tested plane and focusing laser point is carried out line in the plane and sweep
It retouches；
The reflected beams after [step S3] is surface-reflected receive the cavity that slit is provided with by one, and cavity inner wall is to anti-
Penetrating light has stronger absorption, the second photodetector is equipped on cavity wall, for measuring reflected light relative light intensity；If surface
There is any flaw, then incident light beam will also be scattered in addition to reflection by surface blemish, and the major part in scattering light will enter tested
Integrating sphere optical collector above plane；
[step S4] integrating sphere optical collector inner wall is coated with high anti-layer, and scattering light is made to enter integrating sphere collection after multiple reflections
The first photodetector on light device, the photosignal of generation is for surface scattering.
Embodiment two
The difference between this embodiment and the first embodiment lies in the present embodiment, Fig. 4, Fig. 5 are please referred to, Fig. 4 is of the invention another
A kind of difference in design, with embodiment one is to scatter the design of light collection integrating sphere, in the present embodiment, on integrating sphere
Two slits 131,132 (slit 131,132 can be arranged symmetrically) has been opened, has made incident light and reflected light that can enter integrating sphere collection
Light device 13, and leave integrating sphere optical collector 23 completely after by surface reflection.Fig. 5 is view of the present embodiment in incident direction.
Fig. 6 is that light collection integrating sphere schematic diagram is scattered in the present embodiment.The present embodiment can achieve to be examined with embodiment one
Survey the identical effect of device.
Embodiment three
A kind of high-sensitivity surface slight flaws optical detection apparatus, the detection device include: continuous angle sweep mechanism,
Focusing, the first optical collector, the first photodetector, reflected light optical collector, the second photodetector.
The continuous angle sweep mechanism in certain angular range to carry out continuous angle sweep for collimated incident light.Institute
Stating continuous angle sweep mechanism is scanning galvanometer or polyhedron rotating mirror.
The focusing is to focus on the collimated light beam being scanned with angle form in one plane and by angle
Degree scan transformation is scanned at line, focuses the laser beam into a tested plane and focusing laser point is carried out line in the plane and sweep
It retouches.
The first optical collector inner wall is coated with high anti-layer, and scattering light can be made to be entered on the first optical collector after multiple reflections
The first photodetector, the photosignal of generation is for surface scattering.
First optical collector is the integrating sphere optical collector equipped with opening.The integrating sphere optical collector is set to tested plane
Top, between focusing and reflected light optical collector；The two sides of integrating sphere optical collector are respectively equipped with notch, and notch is symmetrically set
It sets.
The cavity that the reflected beams after surface-reflected will be provided with slit by one receives, cavity inner wall to reflected light have compared with
It is strong to absorb, the second photodetector is equipped on cavity wall, for measuring reflected light relative light intensity.
The present invention also discloses a kind of detection method of above-mentioned high-sensitivity surface slight flaws optical detection apparatus, the inspection
Survey method includes:
Collimated incident light is carried out continuous angle sweep by continuous angle sweep mechanism in certain angular range；
The collimated light beam being scanned with angle form is focused in a plane and turns angle scanning by focusing
It changes line scanning into, focus the laser beam into a tested plane and laser point will be focused in the plane into line scan；
Light beam after surface-reflected enters reflected light optical collector along angle of reflection, and part light is attached on reflected light optical collector
The second photodetector receive, generate a photosignal；
First optical collector inner wall is coated with high anti-layer, makes to scatter light is entered after multiple reflections on the first optical collector first
The photosignal of photodetector, generation corresponds to surface scattering.
In conclusion high-sensitivity surface slight flaws optical detection apparatus proposed by the present invention and method, can be improved inspection
Survey sensitivity and accuracy.
The present invention using scanning galvanometer or polyhedron rotating mirror or other can be effectively by collimated incident light certain
Angular range in carry out the device of continuous angle sweep, swept in conjunction with a telecentric scan lens or F-Theta with focusing function
Retouching mirror or other can focus in a plane by the collimated light beam being scanned with angle form and convert angle scanning
At the device that line scans, focuses the laser beam into a tested plane and laser point will be focused in the plane into line scan.
The integrating sphere of a slit with one fixed width, acquisition laser quilt in tested plane are provided with using a lower end
The scattering light of flaw scattering, detects surface blemish.
It is provided with slit using a both sides, and lower curtate has the integrating sphere acquisition laser of opening to be dissipated in tested plane by flaw
Scattering light after penetrating detects surface blemish.
Using a reflection light collecting system, the reflective light intensity reflected through measured surface is effectively collected.
On the different angle direction relative to tested plane normal, multiple photodetectors are placed on integral spherical surface,
Acquire the scattering light of different scattering angles.
Between photodetector and scattering light, plus lens is placed, makes the focus of plus lens in photodetector
On photosensitive, scattering light is effectively collected.
Description and application of the invention herein are illustrative, is not wishing to limit the scope of the invention to above-described embodiment
In.The deformation and change of embodiments disclosed herein are possible, the realities for those skilled in the art
The replacement and equivalent various parts for applying example are well known.It should be appreciated by the person skilled in the art that not departing from the present invention
Spirit or essential characteristics in the case where, the present invention can in other forms, structure, arrangement, ratio, and with other components,
Material and component are realized.Without departing from the scope and spirit of the present invention, can to embodiments disclosed herein into
The other deformations of row and change.
Claims (9)
1. a kind of high-sensitivity surface slight flaws optical detection apparatus, which is characterized in that the detection device includes: continuous angle
Sweep mechanism, focusing, integrating sphere optical collector, the first photodetector, reflected light optical collector, the second photodetector；
The continuous angle sweep mechanism is scanning galvanometer or polyhedron rotating mirror；The continuous angle sweep mechanism is to will be quasi-
Straight incident light carries out continuous angle sweep in certain angular range；
The focusing by the collimated light beam being scanned with angle form to focus in a plane and sweep angle
It retouches and is converted into line scanning, focus the laser beam into a tested plane and laser point will be focused in the plane into line scan；
The integrating sphere optical collector is set to above tested plane, between focusing and reflected light optical collector；Integrating sphere
Optical collector bottom is equipped with notch；
If there is any flaw on surface, incident light beam will also be scattered in addition to reflection by surface blemish, scatter the big portion in light
Divide the integrating sphere optical collector that will enter above tested plane；
Integrating sphere optical collector inner wall is coated with high anti-layer, can make to scatter light is entered after multiple reflections on integrating sphere optical collector the
The photosignal of one photodetector, generation corresponds to surface scattering；The reflected beams after surface-reflected will be provided with narrow by one
The cavity of seam receives, which is reflected light optical collector, and cavity inner wall has stronger absorption to reflected light, and the is equipped on cavity wall
Two photodetectors, for measuring reflected light relative light intensity.
2. a kind of high-sensitivity surface slight flaws optical detection apparatus, which is characterized in that the detection device includes: continuous angle
Sweep mechanism, focusing, the first optical collector, the first photodetector, reflected light optical collector, the second photodetector；
First optical collector is set to above tested plane, between focusing and reflected light optical collector；First light harvesting
Device bottom is equipped with notch, and notch is set to the lower part of the first optical collector；Reflected light optical collector is equipped with slit, and cavity inner wall is to reflection
Light has stronger absorption；
The continuous angle sweep mechanism in certain angular range to carry out continuous angle sweep for collimated incident light；
The focusing by the collimated light beam being scanned with angle form to focus in a plane and sweep angle
It retouches and is converted into line scanning, focus the laser beam into a tested plane and laser point will be focused in the plane into line scan；
Light beam after surface-reflected enters reflected light optical collector by above-mentioned slit along angle of reflection, and part light is attached to reflected light
The second photodetector on optical collector receives, and generates a photosignal；
The first optical collector inner wall is coated with high anti-layer, can make to scatter light is entered after multiple reflections on the first optical collector the
The photosignal of one photodetector, generation corresponds to surface scattering.
3. high-sensitivity surface slight flaws optical detection apparatus according to claim 2, it is characterised in that:
First optical collector is the integrating sphere optical collector equipped with opening.
4. high-sensitivity surface slight flaws optical detection apparatus according to claim 3, it is characterised in that:
The integrating sphere optical collector is set to above tested plane, between focusing and reflected light optical collector；Integrating sphere
The bottom of optical collector is equipped with notch.
5. high-sensitivity surface slight flaws optical detection apparatus according to claim 2, it is characterised in that:
The reflected beams after surface-reflected receive the cavity that slit is provided with by one, and cavity inner wall has stronger suction to reflected light
It receives, the second photodetector is equipped on cavity wall, for measuring reflected light relative light intensity.
6. high-sensitivity surface slight flaws optical detection apparatus according to claim 2, it is characterised in that:
The continuous angle sweep mechanism is scanning galvanometer or polyhedron rotating mirror.
7. a kind of detection method using high-sensitivity surface slight flaws optical detection apparatus described in claim 1, feature
It is, the detection method includes:
Collimated incident light is carried out continuous angle sweep by continuous angle sweep mechanism in certain angular range；
The collimated light beam being scanned with angle form is focused in a plane and is converted into angle scanning by focusing
Line scanning focuses the laser beam into a tested plane and will focus laser point in the plane into line scan；
Light beam after surface-reflected enters reflected light optical collector along angle of reflection, and reflected light optical collector inner wall is coated with highly reflecting films,
Make the light beam being incident in reflected light optical collector by multiple reflections, part light is finally attached to the second light on reflected light optical collector
Electric explorer receives, and generates a photosignal, which reflects the reflection case on surface；If there is any flaw on surface,
Then incident light beam will also be scattered in addition to reflection by surface blemish, and scattering the major part in light will enter above tested plane
Integrating sphere optical collector；
Integrating sphere optical collector inner wall is coated with high anti-layer, makes to scatter light is entered after multiple reflections on integrating sphere optical collector first
The photosignal of photodetector, generation corresponds to surface scattering；The reflected beams after surface-reflected will be provided with slit by one
Cavity receive, cavity inner wall has stronger absorption to reflected light, and the second photodetector is equipped on cavity wall, anti-for measuring
Penetrate light relative light intensity；
The flaw for influencing finish can generate the incident light of focusing strong scattering, be realized by the reception to scattered signal
Highly sensitive Defect Detection；And a kind of flaw that is smooth for surface but being different from periphery to the absorption of incident light, scattering is not
Obviously, by the detection to reflected light, this kind of flaw can be detected.
8. detection method according to claim 7, it is characterised in that:
By scattered signal divided by reflection signal, enhance the sensitivity of detection.
9. a kind of detection method using high-sensitivity surface slight flaws optical detection apparatus described in one of claim 2 to 6,
It is characterized in that, the detection method includes:
Collimated incident light is carried out continuous angle sweep by continuous angle sweep mechanism in certain angular range；
The collimated light beam being scanned with angle form is focused in a plane and is converted into angle scanning by focusing
Line scanning focuses the laser beam into a tested plane and will focus laser point in the plane into line scan；
Light beam after surface-reflected enters reflected light optical collector along angle of reflection, and part light is attached on reflected light optical collector
Two photodetectors receive, and generate a photosignal；
First optical collector inner wall is coated with high anti-layer, makes to scatter the first photoelectricity that light is entered after multiple reflections on the first optical collector
The photosignal of detector, generation corresponds to surface scattering.
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