CN106153028B - Internal and external discrete double-electrode distributed micro gyroscope and preparation method thereof - Google Patents

Abstract

The invention provides a dual-electrode distributed micro-gyroscope with internal and external separation and a preparation method thereof. There are a plurality of the external electrodes, which are evenly distributed on the outside of the micro-resonator to form a uniformly distributed external electrode; there are a plurality of the internal electrodes, and the plurality of internal electrodes are evenly distributed on the inner side of the micro-resonator to form a uniformly distributed internal electrode The present invention combines MEMS bulk silicon processing technology and surface silicon processing technology for fabrication; the present invention can provide different driving, detection modes and different working modes, and can work in systems requiring complex control; the present invention can utilize internal electrodes and The outer electrodes are driven and detected respectively, so as to reduce the parasitic capacitance between the driving electrodes and the detection electrodes and improve the detection accuracy.

Description

Discrete inner and outer two-electrode distributed micro-gyroscope and preparation method thereof

technical field

The invention relates to a micro-gyroscope in the field of micro-electromechanical technology, in particular to a dual-electrode distributed micro-gyroscope with internal and external separation and a preparation method thereof.

Background technique

The gyroscope is an inertial device that can detect the angle or angular velocity of the carrier, and plays a very important role in the fields of attitude control and navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, multi-axis detection, high reliability, and adaptability to various harsh environments. Therefore, the importance of MEMS micro gyroscope is self-evident. In particular, as an important research direction of MEMS micro-gyroscope, micro hemispherical resonant gyroscope has become a research hotspot in this field.

For miniature gyroscopes, the use of full-angle control technology has the advantages of high stability, strong shock resistance, high precision, and small errors. It has a wide range of application prospects in aerospace, inertial navigation, and civil consumer electronics. The number of electrodes of the currently designed gyroscope is small, which limits its application in complex control systems; and the general gyroscope has only one set of electrodes on one surface, and there is a certain parasitic capacitance between the driving, detection and control electrodes. Signal interference, which limits its detection accuracy.

Based on this, there is an urgent need to propose a new gyroscope structure, which can avoid or reduce the above-mentioned influencing factors, and at the same time expand its application range.

After searching, the Chinese invention patent application with the publication number of CN104165623A and the application number of 201410389616.2, the invention provides an inner and outer double-electrode miniature hemispherical resonant gyroscope and a preparation method thereof, including: a single crystal silicon substrate, a central fixed support column, Micro hemispherical resonator, external electrode, external electrode metal bonding plate, glass substrate, metal lead wire, circular bonding wire pad, external electrode metal connecting column, inner electrode and seed layer. The invention can use the inner electrode and the outer electrode to drive and detect respectively, reduce the parasitic capacitance between the driving electrode and the detection electrode, and improve the detection accuracy; metal leads and circular bonding pads are provided for the inner electrode and the outer electrode, which is convenient for Signal application and signal extraction.

However, the above-mentioned patent only provides a structural scheme of a micro-hemispherical gyroscope with an inner divided electrode and an outer divided electrode, and cannot provide different electrode distribution schemes for a variety of miniature gyroscopes.

SUMMARY OF THE INVENTION

In view of the defects in the prior art, the purpose of the present invention is to provide a dual-electrode distributed micro-gyroscope with internal and external separation and a preparation method thereof, which can provide different driving, detection methods and different working modes, and can work when complex control is required. In the system, and can be combined with MEMS bulk silicon processing technology and surface silicon processing technology for fabrication.

According to one aspect of the present invention, there is provided a dual-electrode distributed micro-gyroscope with internal and external separation, comprising: a single crystal silicon substrate, a central fixed support column, a micro-resonator, an external electrode, an internal electrode, and a glass substrate; wherein:

There are a plurality of the external electrodes, and the plurality of external electrodes are evenly distributed on the outside of the micro-resonator to form uniformly distributed external electrodes, and at the same time, the external electrodes are arranged on the surface of the single crystal silicon substrate or the surface of the glass substrate;

There are a plurality of the inner electrodes, and the plurality of inner electrodes are evenly distributed on the inner side of the micro-resonator to form a uniformly distributed inner electrode, and at the same time, the inner electrodes are arranged on the surface of the single crystal silicon substrate or the surface of the glass substrate;

One end of the central fixed support column is connected to the single crystal silicon substrate, and the other end of the central fixed support column is connected to the micro resonator; the single crystal silicon substrate is bonded to the glass substrate;

The micro-resonator is used as the vibrating body of the micro-gyroscope, and the outer electrode and the inner electrode are used for the driving, detection and control of the micro-gyroscope.

When the micro-gyroscope of the present invention works in the angular rate mode, an AC drive signal is applied, a DC bias signal is applied to the micro-resonator, and the uniformly distributed external electrodes make the micro-resonator work at all locations through electrostatic force. In the required driving mode, the vibration amplitude and frequency of the driving mode remain unchanged; when there is an applied angular velocity perpendicular to the direction of the monocrystalline silicon substrate, the vibration amplitude of the detection mode will change, and the magnitude of the vibration amplitude will change. It is proportional to the magnitude of the applied angular velocity, and at the same time causes the capacitance between the uniformly distributed external electrodes and the micro-resonator to change; by collecting the signal changes on the uniformly distributed external electrodes to calculate and detect the magnitude of the modal vibration amplitude, and then Calculate the magnitude of the applied angular velocity.

Further, the micro gyroscope of the present invention collects the signal changes on the uniformly distributed inner electrodes to calculate the magnitude of the detection modal vibration amplitude, and then calculates the magnitude of the applied angular velocity, thereby reducing the parasitic capacitance between the uniformly distributed outer electrodes. , to improve the detection accuracy.

Further, the micro gyroscope of the present invention applies an AC drive signal on the uniformly distributed inner electrodes, and collects detection signals on the uniformly distributed outer electrodes or the uniformly distributed inner electrodes, providing different driving, detection and control modes.

Further, the present invention judges the working state of the micro-gyroscope through the signal changes on the uniformly distributed inner electrodes, and in the abnormal working state, applying a control signal on some of the uniformly distributed inner electrodes through a control algorithm, so as to obtain a better performance. The working state of the micro-gyroscope is adjusted so that the micro-gyroscope can work normally.

Further, the micro gyroscope of the present invention can work in a force balance mode and an all-angle mode, the force balance mode directly detects the magnitude of the applied angular velocity, and the all-angle mode directly detects the magnitude of the applied rotation angle.

Preferably, the material of the outer electrode and the inner electrode is boron ion or phosphorus ion doped silicon or metal nickel; when the outer electrode or the inner electrode is located on a single crystal silicon substrate, the material is boron ion or phosphorus ion doped Miscellaneous silicon; when the outer electrode or inner electrode is on a glass substrate, the material is metallic nickel.

Preferably, the micro-gyroscope is a bird's nest resonant gyroscope, a ring resonant gyroscope, a hemispherical resonant gyroscope, or a cup-shaped resonant gyroscope.

Preferably, the materials of the single crystal silicon substrate and the glass substrate are high-resistance silicon and silicon dioxide high-resistance materials, respectively, and the high-resistance materials are used to reduce signal interference between the external electrode and the internal electrode.

Preferably, the material of the central fixed support column is high-resistance silicon or silicon dioxide.

Preferably, the material of the micro resonator is doped diamond or doped polysilicon, which is the main vibrating body of the micro gyroscope.

In the present invention, the distribution of the inner electrode and the outer electrode can be used in a complex control system to realize full-angle control.

The present invention can be a variety of micro-gyroscope structures with evenly distributed inner and outer discrete two-electrode distribution, and there are huge differences in the electrode distribution methods, which can be suitable for special circuit driving and detection schemes (as described in the embodiment), micro-resonator It is not only limited to micro hemispherical resonant gyroscopes, but also provides different electrode distribution schemes for a variety of micro gyroscopes.

The inner discrete outer annular double electrode distribution of the present invention is distributed inside and outside, rather than adjacent or up and down, and the outer electrodes are annular and integrated, and the process is simpler compared with the inner and outer dual discrete electrodes.

According to another aspect of the present invention, there is provided a preparation method of a two-electrode distributed micro-gyroscope that is separated inside and outside, comprising the following steps:

The first step is to perform cleaning, coating, photolithography, development, boron ion implantation, sputtering, and debonding processes on the single crystal silicon substrate and the glass substrate to obtain boron ion or phosphorus ion doped silicon material on the single crystal silicon substrate the inner electrode or outer electrode;

The second step is to apply glue, photolithography, development, silicon isotropic etching, and debonding on the monocrystalline silicon substrate to obtain grooves corresponding to the shape of the micro-resonator on the monocrystalline silicon substrate;

The third step is to deposit silicon dioxide on the single crystal silicon substrate to provide a sacrificial layer for making micro-resonators and the gap between inner electrodes or outer electrodes;

The fourth step, depositing doped diamond or doped polysilicon on the single crystal silicon substrate, and carrying out chemical mechanical polishing to make micro-resonators;

The fifth step is to use the BOE solution to etch the silicon dioxide sacrificial layer on the basis of the fourth step and control the etching time to release the micro-resonator, and use the residual part as the center to fix the support column;

The sixth step is to apply glue, photolithography, development, nickel electroplating, and glue removal on the glass substrate to make the inner electrode or outer electrode of the metal nickel material;

The seventh step is to invert the glass substrate and bond it with the single crystal silicon substrate, so that the center part of the glass substrate is aligned with the center of the center fixed support column of the single crystal silicon substrate, so that the two substrates can be fixed, so as to obtain a separate inner and outer Two-electrode distributed microgyroscope.

Compared with the prior art, the present invention has the following beneficial effects:

(1) The micro-gyroscope is made by combining MEMS bulk silicon processing technology and surface silicon processing technology, and is a novel processing technology;

(2) The micro gyroscope can provide different driving, detection methods and different working modes. The number of electrodes is increased without reducing the electrode area, so that the micro gyroscope can work in complex control conditions. in the system;

(3) The micro gyroscope can be driven and detected by the inner electrode and the outer electrode respectively, so as to reduce the parasitic capacitance between the driving electrode and the detection electrode and improve the detection accuracy; it can be used in a complex control system to realize full-angle control .

Description of drawings

Other features, objects and advantages of the present invention will become more apparent by reading the detailed description of non-limiting embodiments with reference to the following drawings:

Fig. 1 (a)-Fig. 1 (c) is the structure of an inner and outer discrete two-electrode distributed miniature hemispherical resonant gyroscope of the present invention;

Fig. 2 (a)-Fig. 2 (c) is the structure of an inner and outer discrete two-electrode distributed miniature ring resonant gyroscope of the present invention;

Fig. 3 (a)-Fig. 3 (c) is an inner and outer discrete two-electrode distributed miniature cup-shaped resonant gyroscope structure of the present invention;

4(a)-FIG. 4(g) are flowcharts of a method for preparing an inner and outer discrete two-electrode distributed miniature cup-shaped resonant gyroscope according to an embodiment of the present invention;

In the figure: 1 is a miniature resonator, 2 is a uniformly distributed outer electrode, 3 is a uniformly distributed inner electrode, 4 is a monocrystalline silicon substrate, 5 is a glass substrate, and 6 is a central fixed support column.

Detailed ways

The present invention will be described in detail below with reference to specific embodiments. The following examples will help those skilled in the art to further understand the present invention, but do not limit the present invention in any form. It should be noted that, for those skilled in the art, several modifications and improvements can be made without departing from the concept of the present invention. These all belong to the protection scope of the present invention.

Example 1

As shown in FIG. 1(a)-FIG. 1(c), this embodiment provides a two-electrode distributed micro-hemispherical resonant gyroscope structure with internal and external discrete, including:

A hemispherical micro-resonator 1;

Sixteen evenly distributed external electrodes 2;

Sixteen evenly distributed inner electrodes 3;

a single crystal silicon substrate 4;

a glass substrate 5;

A central fixed support column 6; of which:

One end of the central fixed support column 6 is connected to the single crystal silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in FIG. 1(a) );

Sixteen uniformly distributed external electrodes 2 are arranged on the surface of the glass substrate 5 (as shown in FIG. 1(b) ), and are uniformly distributed on the periphery of the micro-resonator 1 (as shown in FIG. 1(c) ) )); sixteen uniformly distributed inner electrodes 3 are arranged on the surface of the glass substrate 5 (as shown in FIG. 1(b) ), and are uniformly distributed in the inner cavity of the micro-resonator 1 (as shown in FIG. 1( c )); the single crystal silicon substrate 4 is bonded to the glass substrate 5 .

In this embodiment, the material of the micro resonator 1 is doped diamond or doped polysilicon, which is the main vibrating body of the micro hemispherical resonant gyroscope.

In this embodiment, the material of the uniformly distributed outer electrode 2 is boron ion doped silicon, or phosphorus ion doped silicon, which is used for driving, detecting and controlling the miniature hemispherical resonant gyroscope.

In this embodiment, the material of the uniformly distributed inner electrode 3 is boron ion or phosphorus ion doped silicon, which is used for the driving, detection and control of the miniature hemispherical resonant gyroscope.

In this embodiment, the materials of the single crystal silicon substrate 4 and the glass substrate 5 are high-resistance materials such as high-resistance silicon and silicon dioxide, respectively. The high-resistance material can reduce the number of sixteen uniformly distributed external electrodes 2 and ten Signal interference between six evenly distributed inner electrodes 3 .

In this embodiment, the material of the central fixed support column 6 is silicon dioxide, and may also be high-resistance silicon.

In this embodiment, the micro hemispherical resonant gyroscope can work in the angular rate mode, applying an AC drive signal, applying a DC bias signal to the micro resonator 1, and the uniformly distributed external electrodes 2 through electrostatic force Make the micro-resonator 1 work in the required driving mode, and the vibration amplitude and frequency of the driving mode remain unchanged; when there is an applied angular velocity perpendicular to the direction of the single crystal silicon substrate 4, the vibration amplitude of the detection mode is detected. The magnitude of the vibration amplitude is proportional to the magnitude of the applied angular velocity, and at the same time causes the capacitance between the uniformly distributed external electrode 2 and the micro-resonator 1 to change; The signal change on the outer electrode 2 can calculate the magnitude of the detected modal vibration amplitude, and then calculate the magnitude of the applied angular velocity.

In this embodiment, the miniature hemispherical resonant gyroscope can also collect the signal changes on the uniformly distributed inner electrodes 3 to calculate the magnitude of the detection modal vibration amplitude, and then calculate the magnitude of the applied angular velocity, thereby reducing the uniformity The parasitic capacitance between the distributed outer electrodes 2 improves the detection accuracy.

In this embodiment, the micro hemispherical resonant gyroscope can apply an AC drive signal on the uniformly distributed inner electrode 3 , and collect and detect on the uniformly distributed outer electrode 2 or the uniformly distributed inner electrode 3 Signals, providing different driving, detection and control methods.

In this embodiment, the miniature hemispherical resonant gyroscope can judge the working state of the miniature hemispherical resonant gyroscope through the signal changes on the uniformly distributed inner electrodes 3, and in the abnormal working state, the control algorithm can be used in part of the resonant gyroscope. Applying a control signal to the uniformly distributed inner electrode 3 can adjust the working state of the miniature hemispherical resonant gyroscope, so that the miniature hemispherical resonant gyroscope can work normally.

In this embodiment, the micro hemispherical resonant gyroscope can also work in the force balance mode and the full angle mode. The force balance mode can directly detect the magnitude of the applied angular velocity, and the full angle mode can directly detect the magnitude of the applied rotation angle.

Example 2

As shown in Fig. 2(a)-Fig. 2(c), this embodiment provides a two-electrode distributed miniature ring resonant gyroscope with inner and outer discrete, including:

A ring-shaped micro-resonator 1;

Sixteen evenly distributed external electrodes 2;

Sixteen evenly distributed inner electrodes 3;

a single crystal silicon substrate 4;

a glass substrate 5;

A central fixed support column 6; of which:

One end of the central fixed support column 6 is connected to the single crystal silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro-resonator 1 (as shown in FIG. 2(a)); 16 The uniformly distributed external electrodes 2 are arranged on the surface of the single crystal silicon substrate 4 and are uniformly distributed on the periphery of the micro-resonator 1 (as shown in FIG. 2(a) ); sixteen uniformly distributed external electrodes 2 The distributed inner electrodes 3 are arranged on the surface of the glass substrate 5 (as shown in FIG. 2(b) ), and are evenly distributed on the inner side of the micro-resonator 1 (as shown in FIG. 2(c) ); The single crystal silicon substrate 4 is bonded to the glass substrate 5 .

In this embodiment, the material of the micro resonator 1 is doped diamond or doped polysilicon, which is the main vibrating body of the micro ring resonant gyroscope.

In this embodiment, the material of the uniformly distributed outer electrodes 2 is boron ion doped silicon, or phosphorus ion doped silicon, which is used for driving, detecting and controlling the miniature ring resonant gyroscope.

In this embodiment, the material of the uniformly distributed inner electrode 3 is boron ion or phosphorus ion doped silicon, which is used for the driving, detection and control of the miniature ring resonant gyroscope.

In this embodiment, the materials of the single crystal silicon substrate 4 and the glass substrate 5 are high-resistance materials such as high-resistance silicon and silicon dioxide, respectively. The high-resistance material can reduce the number of sixteen uniformly distributed external electrodes 2 and ten Signal interference between six evenly distributed inner electrodes 3 .

In this embodiment, the material of the central fixed support column 6 is silicon dioxide, and may also be high-resistance silicon.

In this embodiment, the micro ring resonant gyroscope can also work in the force balance mode and the full angle mode. The force balance mode can directly detect the magnitude of the applied angular velocity, and the full angle mode can directly detect the magnitude of the applied rotation angle.

Example 3

As shown in FIG. 3(a)-FIG. 3(c), this embodiment provides a two-electrode distributed micro-cup resonant gyroscope with internal and external discrete, including:

A cup-shaped micro-resonator 1;

Sixteen evenly distributed external electrodes 2;

Sixteen evenly distributed inner electrodes 3;

a single crystal silicon substrate 4;

a glass substrate 5;

A central fixed support column 6; of which:

One end of the central fixed support column 6 is connected to the single crystal silicon substrate 4, and the other end of the central fixed support column 6 is connected to the micro resonator 1 (as shown in FIG. 3(a)); 16 The uniformly distributed external electrodes 2 are arranged on the surface of the single crystal silicon substrate 4 and are uniformly distributed on the periphery of the micro-resonator 1 (as shown in FIG. 3(a) ); sixteen uniformly distributed external electrodes 2 The distributed inner electrodes 3 are arranged on the surface of the glass substrate 5 (as shown in FIG. 3(b) ), and are evenly distributed on the inner side of the micro-resonator 1 (as shown in FIG. 3(c) ); The single crystal silicon substrate 4 is bonded to the glass substrate 5 .

In this embodiment, the material of the micro resonator 1 is doped diamond or doped polysilicon, which is the main vibrating body of the micro cup-shaped resonant gyroscope.

In this embodiment, the material of the uniformly distributed outer electrodes 2 is boron ion doped silicon, or phosphorus ion doped silicon, which is used for the driving, detection and control of the miniature cup-shaped resonant gyroscope.

Further, the gyroscope can be provided with a metal lead, one end of the metal lead is connected to the outer electrode and the inner electrode, the other end of the metal lead serves as an external interface, and the metal lead is used for signal application and Signal extraction.

In this embodiment, the material of the uniformly distributed inner electrode 3 is boron ion or phosphorus ion doped silicon, which is used for the driving, detection and control of the miniature cup-shaped resonant gyroscope.

In this embodiment, the materials of the single crystal silicon substrate 4 and the glass substrate 5 are high-resistance materials such as high-resistance silicon and silicon dioxide, respectively. The high-resistance material can reduce the number of sixteen uniformly distributed external electrodes 2 and ten Signal interference between six evenly distributed inner electrodes 3 .

In this embodiment, the material of the central fixed support column 6 is silicon dioxide, and may also be high-resistance silicon.

In this embodiment, the micro-cup resonant gyroscope can also work in the force balance mode and the full angle mode. The force balance mode can directly detect the magnitude of the applied angular velocity, and the full angle mode can directly detect the magnitude of the applied rotation angle.

The invention combines the MEMS bulk silicon processing technology and the surface silicon processing technology for production, and is a novel processing technology; the micro gyroscope in the invention can provide different driving, detection methods and different working modes, and can work when required In a complex control system; the micro gyroscope in the present invention can use the inner electrode and the outer electrode to drive and detect respectively, reduce the parasitic capacitance between the driving electrode and the detection electrode, and improve the detection accuracy; the micro gyroscope in the present invention Metal leads are provided for the inner and outer electrodes for easy signal application and signal extraction.

Example 4

As shown in FIG. 4(a)-FIG. 4(g), the present embodiment provides a preparation method of a two-electrode distributed miniature hemispherical resonant gyroscope that is separated inside and outside, including the following steps:

The first step, as shown in FIG. 4( a ), is to perform cleaning, gluing, photolithography, developing, boron ion implantation, sputtering, and degumming processes on the single crystal silicon substrate 4 to obtain a The external electrode 2 of boron ion-doped silicon material with a thickness of 10 μm-50 μm;

In the second step, as shown in Figure 4(b), glue coating, photolithography, development, silicon isotropic etching, and glue removal are performed on the single crystal silicon substrate to obtain a radius of 300μm-700μm hemispherical groove;

The third step, as shown in Figure 4(c), depositing silicon dioxide with a thickness of 1 μm-5 μm on the monocrystalline silicon substrate to provide a sacrificial layer for making the miniature hemispherical resonator 1 and the electrode gap;

The fourth step, as shown in Fig. 4(d), is to deposit doped diamond or doped polysilicon on the basis of the third step, and perform chemical mechanical polishing to manufacture a micro hemispherical resonator 1 with a thickness of 1 μm-5 μm;

The fifth step, as shown in Figure 4(e), on the basis of the fourth step, the silicon dioxide sacrificial layer is etched with BOE solution and the etching time is controlled to release the micro hemispherical oscillator 1, and the residual part is used as the radius of 15μm-35μm central fixed support column 6;

In the sixth step, as shown in FIG. 4(f), glue, photolithography, development, nickel electroplating, and glue removal are applied on the glass substrate 5 to manufacture the inner electrode 3 of metallic nickel material with a height of 20 μm-70 μm.

In the seventh step, as shown in FIG. 4(g), the glass substrate 5 is inverted and bonded with the single crystal silicon substrate 4, so that the center part of the glass substrate 5 is aligned with the center of the fixed support column in the center of the single crystal silicon substrate 4. The two-electrode distributed micro-gyroscope can be obtained with the two-electrode independent inside and outside.

Specific embodiments of the present invention have been described above. It should be understood that the present invention is not limited to the above-mentioned specific embodiments, and those skilled in the art can make various variations or modifications within the scope of the claims, which do not affect the essential content of the present invention.

Claims (9)

1. An internal and external discrete dual-electrode distributed micro-gyroscope, comprising: the device comprises a monocrystalline silicon substrate, a center fixed supporting column, a miniature harmonic oscillator, an outer electrode, an inner electrode and a glass substrate; wherein:

the number of the outer electrodes is 16, the 16 outer electrodes are uniformly distributed on the outer side of the miniature harmonic oscillator to form uniformly distributed outer electrodes, and the outer electrodes are arranged on the surface of the monocrystalline silicon substrate or the surface of the glass substrate;

the number of the inner electrodes is 16, the 16 inner electrodes are uniformly distributed on the inner side of the miniature harmonic oscillator to form uniformly distributed inner electrodes, and the inner electrodes are arranged on the surface of the monocrystalline silicon substrate or the surface of the glass substrate;

one end of the central fixed supporting column is connected with the monocrystalline silicon substrate, and the other end of the central fixed supporting column is connected with the miniature harmonic oscillator; the monocrystalline silicon substrate is bonded with the glass substrate;

the miniature harmonic oscillator is used as a vibrating body of the micro gyroscope, and the outer electrode and the inner electrode are used for driving, detecting and controlling various micro gyroscope structures;

when the micro gyroscope works in an angular rate mode, an alternating current driving signal is applied, a direct current bias signal is applied to the micro harmonic oscillator, the micro harmonic oscillator works in a required driving mode through the uniformly distributed outer electrodes through electrostatic force, and the vibration amplitude and the frequency of the driving mode are kept unchanged; when an external angular velocity exists in the direction vertical to the monocrystalline silicon substrate, the vibration amplitude of the detection mode changes, the vibration amplitude is in direct proportion to the external angular velocity, and meanwhile, the capacitance between the uniformly distributed outer electrodes and the miniature harmonic oscillators changes; and calculating the magnitude of the vibration amplitude of the detection mode by collecting the signal change on the uniformly distributed outer electrode, and further calculating the magnitude of the external angular velocity.

2. The internal and external discrete dual-electrode distributed micro-gyroscope according to claim 1, wherein the micro-gyroscope collects signal changes on the uniformly distributed inner electrodes to calculate the magnitude of the vibration amplitude of the detection mode, and further calculates the magnitude of the applied angular velocity, so that the parasitic capacitance between the uniformly distributed outer electrodes is reduced, and the detection precision is improved.

3. The internal and external discrete dual-electrode distributed micro-gyroscope of claim 1, wherein the micro-gyroscope applies an ac driving signal to the evenly distributed internal electrodes and collects a detection signal from the evenly distributed external electrodes or the evenly distributed internal electrodes to provide different driving, detecting and controlling modes.

4. The internal-external discrete dual-electrode distributed micro-gyroscope according to claim 1, wherein the working state of the micro-gyroscope is judged by the signal variation on the uniformly distributed internal electrodes, and in the abnormal working state, the working state of the micro-gyroscope can be adjusted by applying control signals on part of the uniformly distributed internal electrodes through a control algorithm, so that the micro-gyroscope works normally.

5. The internal and external discrete dual-electrode distributed micro-gyroscope of claim 1, wherein the micro-gyroscope is capable of operating in a force balance mode and a full angle mode, the force balance mode directly detects the magnitude of the applied angular velocity, and the full angle mode directly detects the magnitude of the applied rotation angle.

6. The internal-external discrete dual-electrode distributed micro-gyroscope according to any one of claims 1-5, characterized in that the materials of the external electrode and the internal electrode are boron ion or phosphorus ion doped silicon or metallic nickel; when the outer electrode or the inner electrode is positioned on the monocrystalline silicon substrate, the material is boron ion or phosphorus ion doped silicon; when the external electrode or the internal electrode is positioned on the glass substrate, the material is metallic nickel.

7. The internal and external discrete dual-electrode distributed micro-gyroscope according to any one of claims 1-5, wherein the materials of the single-crystal silicon substrate and the glass substrate are high-resistance materials of high-resistance silicon and silicon dioxide, respectively, and the high-resistance materials are used for reducing signal interference between the external electrodes and the internal electrodes.

8. The internal-external discrete dual-electrode distributed micro-gyroscope according to any one of claims 1-5, wherein the material of the central fixed supporting column is high-resistivity silicon or silicon dioxide;

the material of the miniature harmonic oscillator is doped diamond or doped polycrystalline silicon.

9. A method for preparing an internal and external discrete dual-electrode distributed micro-gyroscope according to any one of claims 1 to 8, characterized in that it comprises the following steps:

firstly, cleaning a monocrystalline silicon substrate and a glass substrate, coating glue, photoetching, developing, injecting boron ions, sputtering and removing the glue to obtain an inner electrode or an outer electrode of a boron ion or phosphorus ion doped silicon material on the monocrystalline silicon substrate;

secondly, gluing, photoetching, developing, silicon isotropic etching and photoresist removing are carried out on the monocrystalline silicon substrate to obtain a groove corresponding to the shape of the miniature harmonic oscillator on the monocrystalline silicon substrate;

thirdly, depositing silicon dioxide on the monocrystalline silicon substrate to provide a sacrificial layer for manufacturing the miniature harmonic oscillator and the inner electrode or the outer electrode gap;

fourthly, depositing doped diamond or doped polycrystalline silicon on the monocrystalline silicon substrate, and carrying out chemical mechanical polishing to manufacture the miniature harmonic oscillator;

fifthly, etching the silicon dioxide sacrificial layer by using BOE solution on the basis of the fourth step and controlling the etching time to release the miniature harmonic oscillator, and fixing the supporting column by taking the residual part as the center;

sixthly, gluing, photoetching, developing, nickel electroplating and photoresist removing are carried out on the glass substrate to manufacture an inner electrode or an outer electrode made of a metal nickel material;

and seventhly, inverting the glass substrate, and bonding the glass substrate and the single crystal silicon substrate to align the center of the glass substrate with the center of a center fixing support column of the single crystal silicon substrate, so as to realize the fixation of the two substrates, and thus obtaining the internal and external discrete double-electrode distributed micro gyroscope.

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