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CN106148907B - High temperature resistance protective coating and its preparation of high-temperature alloy base mechanics performance are not influenced - Google Patents

High temperature resistance protective coating and its preparation of high-temperature alloy base mechanics performance are not influenced Download PDF

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CN106148907B
CN106148907B CN201510207770.8A CN201510207770A CN106148907B CN 106148907 B CN106148907 B CN 106148907B CN 201510207770 A CN201510207770 A CN 201510207770A CN 106148907 B CN106148907 B CN 106148907B
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CN106148907A (en
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朱圣龙
任盼
王福会
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Abstract

本发明提供了一种利用自发热力学反应,在原位自动生成Cr23C6陶瓷扩散障的抗高温防护涂层,其特征在于:所述抗高温防护涂层由Cr23C6相中间层和MCrAlX表面层组成,其中M为Ni和/或Co,X为Hf、Si、Zr、稀土元素以及混合稀土中至少一种,稀土元素为La、Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、Yb、Lu或Y;混合稀土为两种或两种以上稀土元素同时使用;MCrAlX表面层中Cr含量为25%~40%,Al含量为5%~15%,X含量为0.05%~1.5%。该涂层具有良好的抗剥落性能,且可显著降低涂层中的Al向基体扩散情况的发生,防止互扩散导致的基体力学劣化现象。The present invention provides a high temperature resistant protective coating that utilizes autothermal dynamics reaction to automatically generate a Cr 23 C 6 ceramic diffusion barrier in situ . MCrAlX surface layer composition, where M is Ni and/or Co, X is at least one of Hf, Si, Zr, rare earth elements and mixed rare earth elements, and the rare earth elements are La, Ce, Pr, Nd, Pm, Sm, Eu, Gd , Tb, Dy, Ho, Er, Tm, Yb, Lu or Y; mixed rare earths are two or more rare earth elements used at the same time; the content of Cr in the surface layer of MCrAlX is 25% to 40%, and the content of Al is 5% to 15%, X content is 0.05% to 1.5%. The coating has good anti-stripping performance, and can significantly reduce the occurrence of Al in the coating diffusing to the substrate, preventing the mechanical degradation of the substrate caused by interdiffusion.

Description

不影响高温合金基体力学性能的抗高温防护涂层及其制备High temperature resistant protective coating without affecting the mechanical properties of superalloy matrix and its preparation

技术领域technical field

本发明属于金属高温防护领域,特别提供一种不影响高温合金基体力学性能的抗高温防护涂层及其制备方法。The invention belongs to the field of metal high-temperature protection, and particularly provides a high-temperature-resistant protective coating that does not affect the mechanical properties of a high-temperature alloy matrix and a preparation method thereof.

背景技术Background technique

许多零件工作在高温环境中,如燃气轮机涡轮叶片等。在零件表面涂覆抗高温防护涂层,可以提高零件的服役寿命,避免早期损坏。Many parts work in high temperature environment, such as gas turbine blades and so on. Coating high temperature resistant protective coating on the surface of parts can improve the service life of parts and avoid early damage.

常用的高温防护涂层为MCrAlY(其中M=Ni,Co或其组合)和渗铝涂层。在工作温度低于1000℃时,上述涂层可以提供良好的高温防护性能,并不影响基体力学性能。但在更高的工作温度条件下,涂层与基体之间的互扩散太快,涂层中的Al大量向基体扩散,一方面会使涂层有效抗高温合金组元损失,降低涂层寿命,另一方面会使涂层/基体界面形成二次反应区,出现针状拓扑密排相,严重影响基体力学性能,最高可使基体蠕变寿命降低80%。Commonly used high-temperature protective coatings are MCrAlY (where M=Ni, Co or a combination thereof) and aluminized coatings. When the working temperature is lower than 1000°C, the above-mentioned coating can provide good high-temperature protection performance without affecting the mechanical properties of the matrix. However, under higher working temperature conditions, the interdiffusion between the coating and the substrate is too fast, and a large amount of Al in the coating diffuses to the substrate. On the one hand, the coating will effectively resist the loss of high-temperature alloy components and reduce the life of the coating. , on the other hand, it will form a secondary reaction zone at the coating/substrate interface, and acicular topological close-packed phases will appear, which seriously affects the mechanical properties of the substrate, and can reduce the creep life of the substrate by up to 80%.

为了避免涂层/基体互扩散,不影响基体力学性能,研发人员开发出带扩散障的抗高温涂层技术,即在沉积常规抗高温涂层之前,预先沉积一个薄的阻扩散层。已开发出的扩散障材料有难熔金属(如Re、Mo等)、陶瓷(如TiN、Al2O3等)。难熔金属扩散障抗剥落性能好,但阻扩散性能不足,而陶瓷扩散障则阻扩散性能好,但易于在冷热循环过程中剥落。此外,扩散障的制备过程增加了涂层成本。In order to avoid coating/substrate interdiffusion without affecting the mechanical properties of the substrate, researchers have developed a high-temperature resistant coating technology with a diffusion barrier, that is, before depositing a conventional high-temperature resistant coating, a thin diffusion-resistant layer is pre-deposited. Diffusion barrier materials that have been developed include refractory metals (such as Re, Mo, etc.), ceramics (such as TiN, Al2O3, etc.). The refractory metal diffusion barrier has good anti-stripping performance, but insufficient diffusion resistance, while the ceramic diffusion barrier has good diffusion resistance, but is easy to peel off in the process of cooling and heating cycles. In addition, the fabrication process of the diffusion barrier increases the coating cost.

陶瓷扩散障之所以具有良好的阻扩散性能,其原因是抗氧化组元Al在陶瓷中的扩散速率低,Al在除氧化铝之外的陶瓷中的固溶度低。换句话说,Al在陶瓷扩散障中固溶度极低,或迁移速率极慢,都能起到阻碍涂层中的Al通过陶瓷层扩散到基体的作用。陶瓷扩散障抗剥落性能不好的原因也主要有两个:人工制备的界面结合力不足,陶瓷的热膨胀系数与高温合金和MCrAlY涂层差异较大。当热应力超过界面结合力时,界面就会出现开裂,进而导致涂层剥落。The reason why the ceramic diffusion barrier has good anti-diffusion performance is that the diffusion rate of anti-oxidation component Al in ceramics is low, and the solid solubility of Al in ceramics other than alumina is low. In other words, the extremely low solid solubility of Al in the ceramic diffusion barrier, or the extremely slow migration rate, can play a role in hindering the diffusion of Al in the coating to the substrate through the ceramic layer. There are two main reasons for the poor anti-stripping performance of ceramic diffusion barriers: the artificially prepared interface has insufficient bonding force, and the thermal expansion coefficient of ceramics is quite different from that of superalloys and MCrAlY coatings. When the thermal stress exceeds the interfacial bonding force, cracking occurs at the interface, which in turn causes the coating to peel off.

为了同时满足抗剥落性能和阻扩散性能好两个要求,需要开发出新的阻扩散抗高温防护涂层技术。解决陶瓷扩散障抗剥落性能问题,主要应从提高界面结合力方面着手,因为调控陶瓷热膨胀系数比较困难。In order to meet the two requirements of anti-stripping performance and good diffusion resistance performance, it is necessary to develop a new diffusion-resistant high-temperature protective coating technology. To solve the problem of anti-stripping performance of ceramic diffusion barriers, we should mainly start from improving the interface bonding force, because it is difficult to control the thermal expansion coefficient of ceramics.

发明内容Contents of the invention

本发明提供了一种利用自发热力学反应,在原位自动生成Cr23C6陶瓷扩散障的抗高温防护涂层技术。The invention provides a high-temperature-resistant protective coating technology for automatically generating a Cr 23 C 6 ceramic diffusion barrier in situ by using a self-heating dynamic reaction.

具体发明方案如下:Concrete invention scheme is as follows:

一种不影响高温合金基体力学性能的抗高温防护涂层,其特征在于:A high-temperature resistant protective coating that does not affect the mechanical properties of a high-temperature alloy matrix is characterized in that:

所述抗高温防护涂层由Cr23C6相中间层(原位自发生成的Cr23C6扩散障层)和MCrAlX表面层组成;The high temperature resistant protective coating is composed of Cr 23 C 6 phase intermediate layer (Cr 23 C 6 diffusion barrier layer formed spontaneously in situ) and MCrAlX surface layer;

所述MCrAlX表面层,其中M为Ni和/或Co,X为Hf、Si、Zr、稀土元素以及混合稀土中至少一种,稀土元素为La、Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、Yb、Lu或Y;混合稀土为两种或两种以上上述稀土元素同时使用;The MCrAlX surface layer, wherein M is Ni and/or Co, X is at least one of Hf, Si, Zr, rare earth elements and mixed rare earth elements, and the rare earth elements are La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu or Y; mixed rare earths are two or more of the above rare earth elements used simultaneously;

所述MCrAlX表面层,其中Cr含量为25wt%~40wt%,Al含量为5wt%~15wt%,X含量为0.05wt%~1.5wt%,M余量。In the MCrAlX surface layer, the Cr content is 25wt%-40wt%, the Al content is 5wt%-15wt%, the X content is 0.05wt%-1.5wt%, and the M is the rest.

所述Cr23C6相中间层的厚度为0.1μm~10μm;The thickness of the Cr 23 C 6 phase intermediate layer is 0.1 μm to 10 μm;

所述MCrAlX表面层的厚度为10μm~1000μm;晶粒尺寸小于100nm。The thickness of the MCrAlX surface layer is 10 μm-1000 μm; the grain size is less than 100 nm.

高温合金中通常含有微量的C,它能与金属Cr、Mo、W等在晶界形成细小碳化物,从而能够提高合金的蠕变性能。在C含量达到一定阈值(足以形成碳化物)的高温合金表面制备Cr含量达到一定阈值(超出母相固溶度)的纳米晶MCrAlX表面层,利用纳米晶的高扩散率,则能在涂层/界面形成Cr23C6扩散障。如果高温合金的C含量太低,例如低于0.01wt%,可先制备一层高温合金层,使其C含量提高到0.2wt%~0.4wt%,从而保证MCrAlX表面层之下具有足够的C可供形成Cr23C6扩散障之用。Al在Cr23C6中的固溶度极低,因此Cr23C6可阻碍Al的扩散,避免涂层中的Al扩散到基体中。原位形成的Cr23C6与涂层和基体结合力显著高于涂层方法制备的Cr23C6层,因此具有良好的抗剥落性能。Superalloys usually contain a small amount of C, which can form fine carbides at the grain boundaries with metals such as Cr, Mo, and W, thereby improving the creep properties of the alloy. Prepare a nanocrystalline MCrAlX surface layer with a Cr content that reaches a certain threshold (beyond the solid solubility of the parent phase) on the surface of a superalloy with a C content that reaches a certain threshold (enough to form carbides). Using the high diffusivity of nanocrystals, the coating can / interface forms a Cr 23 C 6 diffusion barrier. If the C content of the superalloy is too low, such as less than 0.01wt%, a layer of superalloy layer can be prepared first to increase the C content to 0.2wt% to 0.4wt%, so as to ensure that there is enough C under the MCrAlX surface layer. It can be used to form Cr 23 C 6 diffusion barrier. The solid solubility of Al in Cr 23 C 6 is extremely low, so Cr 23 C 6 can hinder the diffusion of Al and prevent the Al in the coating from diffusing into the matrix. The bonding force of in-situ formed Cr 23 C 6 to the coating and the substrate is significantly higher than that of the Cr 23 C 6 layer prepared by the coating method, so it has good anti-stripping performance.

本发明所述高温防护涂层,其特征在于:在MCrAlX表面层的表面可再增加一个低热导率陶瓷层,其厚度为30μm~1000μm。所述低热导率陶瓷层优选为ZrO2-xY2O3、Nd2Zr2O7、Nd2Zr2O7/ZrO2-xY2O3,其中ZrO2-xY2O3为底层,Nd2Zr2O7为面层,x=6mol%~8mol%。The high-temperature protective coating of the present invention is characterized in that a ceramic layer with low thermal conductivity can be added on the surface of the MCrAlX surface layer, and its thickness is 30 μm to 1000 μm. The low thermal conductivity ceramic layer is preferably ZrO 2 -xY 2 O 3 , Nd 2 Zr 2 O 7 , Nd 2 Zr 2 O 7 /ZrO 2 -xY 2 O 3 , wherein ZrO 2 -xY 2 O 3 is the bottom layer, Nd 2 Zr 2 O 7 is the surface layer, x=6mol%~8mol%.

本发明所述抗高温防护涂层的制备方法,其特征在于:The preparation method of the high temperature resistant protective coating of the present invention is characterized in that:

制备设备为:磁控溅射仪;The preparation equipment is: magnetron sputtering apparatus;

制备工艺过程为:(1)、铸造并加工MCrAlX靶材;(2)、调整高温合金基体靶材的C含量为0.2wt%~0.4wt%,铸造并加工高温合金基体靶材;(3)、采用高温合金基体靶材,溅射沉积5μm~10μm的涂层;(4)、采用MCrAlX靶材,溅射沉积10μm~1000μm的MCrAlX涂层;(5)、对零件进行900℃~1000℃真空退火,时间为1h~2h。The preparation process is: (1), casting and processing the MCrAlX target; (2), adjusting the C content of the superalloy substrate target to 0.2wt% to 0.4wt%, casting and processing the superalloy substrate target; (3) 1. Using high-temperature alloy substrate target material, sputtering deposition of 5 μm ~ 10 μm coating; (4), using MCrAlX target material, sputtering deposition of 10 μm ~ 1000 μm MCrAlX coating; (5), 900 ℃ ~ 1000 ℃ for parts Vacuum annealing, the time is 1h ~ 2h.

对于C含量高于0.2wt%的高温合金零件,可省略工艺过程(2)和(3),即不需要铸造和加工高温合金基体靶材以及沉积高温合金层;For superalloy parts with a C content higher than 0.2wt%, processes (2) and (3) can be omitted, that is, casting and processing of superalloy substrate targets and deposition of superalloy layers are not required;

对于工作温度高于900℃的高温合金零件,可省略工艺过程(5),即不需要真空退火过程;For superalloy parts whose working temperature is higher than 900°C, the process (5) can be omitted, that is, the vacuum annealing process is not required;

制备过程中真空室的温度应控制在150℃~290℃范围内。During the preparation process, the temperature of the vacuum chamber should be controlled within the range of 150°C to 290°C.

工艺过程(5)可被下述工艺过程替代:采用电子束物理气相沉积、等离子喷涂或化学气相沉积方法,沉积低热导率陶瓷层,零件加热温度为900℃~1080℃。The process (5) can be replaced by the following process: use electron beam physical vapor deposition, plasma spraying or chemical vapor deposition to deposit a low thermal conductivity ceramic layer, and the heating temperature of the parts is 900°C to 1080°C.

工艺过程(1)中MCrAlX靶材的化学成分优选为Co 19wt%~23wt%,Cr 25wt%~27wt%,Al 9wt%~11wt%,Y 0.1wt%~0.5wt%,Hf 0.05wt%~0.5wt%,Si 0.1wt%~0.9wt%,Y、Hf、Si含量之和不超过1.5wt%,Ni为余量。The chemical composition of the MCrAlX target in the process (1) is preferably Co 19wt%-23wt%, Cr 25wt%-27wt%, Al 9wt%-11wt%, Y 0.1wt%-0.5wt%, Hf 0.05wt%-0.5 wt%, Si 0.1wt% ~ 0.9wt%, the sum of Y, Hf, Si content is not more than 1.5wt%, Ni is the balance.

本发明采用磁控溅射方法在高温合金基体上沉积MCrAlX表面层,在真空退火或服役过程中,MCrAlX表面层中的Cr与基体中的C之间发生界面反应,形成Cr23C6相中间层,该中间层为扩散障层,可显著降低涂层中的Al向基体扩散情况的发生,进而防止互扩散导致的基体力学劣化现象。所述抗高温防护涂层具有良好的抗剥落性能。The present invention adopts the magnetron sputtering method to deposit the MCrAlX surface layer on the superalloy substrate. During the vacuum annealing or service process, the Cr in the MCrAlX surface layer and the C in the substrate undergo an interfacial reaction to form a Cr 23 C 6 interphase The middle layer is a diffusion barrier layer, which can significantly reduce the occurrence of Al in the coating to diffuse into the substrate, thereby preventing the mechanical degradation of the substrate caused by interdiffusion. The high temperature resistant protective coating has good peeling resistance.

附图说明Description of drawings

图1涂层体系结构示意图。Figure 1 Schematic diagram of the coating architecture.

图2在镍基高温合金K417G表面磁控溅射沉积的NiCrAlYSiHf涂层,1000℃保温5min-水淬测试100周期后的截面形貌图。Figure 2 is the cross-sectional morphology of the NiCrAlYSiHf coating deposited by magnetron sputtering on the surface of the nickel-based superalloy K417G, after 100 cycles of 1000°C heat preservation for 5 min-water quenching test.

图3在镍基高温合金K417G表面磁控溅射沉积的NiCrAlYSiHf涂层,1000℃氧化40h的截面电子探针元素面分布。III区为原位形成的Cr23C6扩散障。Figure 3 is the NiCrAlYSiHf coating deposited by magnetron sputtering on the surface of the nickel-based superalloy K417G, and the element surface distribution of the cross-sectional electron probe oxidized at 1000°C for 40h. Region III is the Cr 23 C 6 diffusion barrier formed in situ.

具体实施方式Detailed ways

实施例1Example 1

真空熔炼铸造靶材Ni-25Cr-10Al-0.5Y-0.5Si-0.5Hf(wt.%),加工成平面靶;用磁控溅射方法在镍基高温合金K417G零件表面沉积NiCrAlYSiHf涂层,涂层厚约30μm,晶粒尺度小于20nm;进行1000℃×2h真空退火。对涂覆了涂层的零件进行水淬测试(1000℃保温足够时间,使零件热透;然后将零件投入去离子水中,水温为15℃~35℃,水量足够使零件投入后温度上升不超过30℃;待零件与水温相同时,取出零件,用干燥热风吹干,为1个周期)。测试100周期,零件表面涂层未出现开裂或剥落。对零件进行解剖分析,发现退火过程涂层/基体界面形成致密且结合牢固的Cr23C6扩散障,在测试过程中没有开裂,如图2所示。Vacuum smelting casting target material Ni-25Cr-10Al-0.5Y-0.5Si-0.5Hf (wt.%), processed into a flat target; using magnetron sputtering method to deposit NiCrAlYSiHf coating on the surface of nickel-based superalloy K417G parts, coating The layer thickness is about 30μm, and the grain size is less than 20nm; vacuum annealing is carried out at 1000℃×2h. Carry out a water quenching test on the coated parts (1000°C for a sufficient time to heat the parts thoroughly; then put the parts into deionized water, the water temperature is 15°C to 35°C, and the water volume is sufficient so that the temperature rise of the parts does not exceed 30°C; when the temperature of the parts is the same as that of the water, take out the parts and dry them with dry hot air for 1 cycle). After 100 cycles of testing, the surface coating of the parts did not crack or peel off. An anatomical analysis of the parts revealed that the coating/substrate interface formed a dense and firmly bonded Cr 23 C 6 diffusion barrier during the annealing process, and there was no cracking during the test, as shown in Figure 2.

实施例2Example 2

制备方法同实施例1。对涂覆了涂层的零件进行氧化测试(1000℃×40h)。对零件进行解剖分析,发现退火过程涂层/基体界面形成的致密且结合牢固Cr23C6扩散障,在测试过程中没有开裂。涂层中靠近扩散障一侧出现贫Cr区,如图3所示,说明扩散障的形成机制为:涂层中的Cr扩散到涂层/基体界面,与基体中的C形成Cr23C6层。Cr23C6层中的Al含量极低,说明Al难以通过扩散障。The preparation method is the same as in Example 1. Oxidation test (1000°C×40h) was carried out on the coated parts. An anatomical analysis of the parts revealed that the dense and firmly bonded Cr 23 C 6 diffusion barrier formed at the coating/substrate interface during the annealing process did not crack during the test. A Cr-poor region appears in the coating near the diffusion barrier, as shown in Figure 3, indicating that the formation mechanism of the diffusion barrier is: Cr in the coating diffuses to the coating/substrate interface, and forms Cr 23 C 6 with C in the substrate. Floor. The Al content in the Cr 23 C 6 layer is extremely low, indicating that it is difficult for Al to pass through the diffusion barrier.

实施例3Example 3

真空熔炼铸造涂层靶材Ni-30Cr-6Al-0.4Y-0.1Ce-0.1Dy(wt.%),加工成平面靶;真空熔炼铸造合金靶材Ni-10Co-9Cr-7W-5Al-0.1Ti-0.3C(wt.%),加工成平面靶;用磁控溅射方法在镍基高温合金Ni-10Co-9Cr-7W-5Al-0.1Ti-0.01C零件表面沉积Ni-10Co-9Cr-7W-5Al-0.1Ti-0.3C纳米晶层,厚度为5μm,晶粒尺度小于20nm;用磁控溅射方法接着沉积纳米晶NiCrAlYCeDy涂层,涂层厚约30μm,晶粒尺度小于20nm。进行1000℃×300h氧化测试。对零件进行解剖分析,发现退火过程涂层/基体界面形成的致密且结合牢固Cr23C6扩散障,在测试过程中没有开裂。Cr23C6层中的Al含量极低,说明Al难以通过扩散障。Vacuum melting cast coating target material Ni-30Cr-6Al-0.4Y-0.1Ce-0.1Dy (wt.%), processed into a flat target; vacuum melting casting alloy target material Ni-10Co-9Cr-7W-5Al-0.1Ti -0.3C (wt.%), processed into a flat target; use magnetron sputtering method to deposit Ni-10Co-9Cr-7W on the surface of nickel-based superalloy Ni-10Co-9Cr-7W-5Al-0.1Ti-0.01C parts -5Al-0.1Ti-0.3C nanocrystalline layer with a thickness of 5 μm and a grain size of less than 20 nm; then deposit a nanocrystalline NiCrAlYCeDy coating with a thickness of about 30 μm and a grain size of less than 20 nm by magnetron sputtering. Conduct oxidation test at 1000℃×300h. An anatomical analysis of the parts revealed that the dense and firmly bonded Cr 23 C 6 diffusion barrier formed at the coating/substrate interface during the annealing process did not crack during the test. The Al content in the Cr 23 C 6 layer is extremely low, indicating that it is difficult for Al to pass through the diffusion barrier.

实施例4Example 4

在实施例3涂层制备的基础上,采用EB-PVD(电子束物理气相沉积)方法制备ZrO2-7Y2O3涂层,制备温度为980℃,ZrO2-7Y2O3层厚度为150μm。进行零件抗热冲击试验(用等离子焰吹零件涂覆涂层面,用压缩空气吹零件未涂覆涂层的背面,热侧温度最高为1050℃,冷侧温度最高为800℃;等离子焰吹5min,停5min为1个周期)。测试1000周期后,涂层未出现剥落。对零件进行解剖分析,发现退火过程涂层/基体界面形成的致密且结合牢固Cr23C6扩散障,在测试过程中没有开裂。Cr23C6层中的Al含量极低,说明Al难以通过扩散障。On the basis of the coating preparation in Example 3, the ZrO 2 -7Y 2 O 3 coating was prepared by EB-PVD (Electron Beam Physical Vapor Deposition), the preparation temperature was 980°C, and the thickness of the ZrO 2 -7Y 2 O 3 layer was 150 μm. Carry out the thermal shock resistance test of the parts (use the plasma flame to blow the parts to coat the coated surface, and use compressed air to blow the uncoated back of the parts, the maximum temperature of the hot side is 1050 ℃, and the maximum temperature of the cold side is 800 ℃; 5min, stop for 5min as a cycle). After 1000 cycles of testing, the coating did not peel off. An anatomical analysis of the parts revealed that the dense and firmly bonded Cr 23 C 6 diffusion barrier formed at the coating/substrate interface during the annealing process did not crack during the test. The Al content in the Cr 23 C 6 layer is extremely low, indicating that it is difficult for Al to pass through the diffusion barrier.

实施例5Example 5

制备方法同实施例1。对涂覆了涂层的试样进行氧化测试(1000℃×100h),之后进行持久寿命性能测试(测试温度为760℃,测试应力为645MPa)。与低压等离子喷涂NiCrAlY涂层试样进行对比,进行了相同试验参数的氧化测试和持久寿命测试。测试结果为,涂覆本涂层的5个样品持久寿命数据为:189h,193h,221h,225h,240h;涂覆对比涂层的5个样品持久寿命数据为:49h,83h,131h,135h,140h。相比之下,涂覆本涂层的试样的平均寿命(213.6h)与无涂层试样(~220h)基本一致,而比涂覆了对比涂层试样(107.6)高一倍左右。The preparation method is the same as in Example 1. An oxidation test (1000°C×100h) was carried out on the coated sample, followed by a durability performance test (the test temperature was 760°C, and the test stress was 645MPa). Compared with the low-pressure plasma sprayed NiCrAlY coating sample, the oxidation test and endurance life test of the same test parameters were carried out. The test results show that the durable life data of the 5 samples coated with this coating are: 189h, 193h, 221h, 225h, 240h; the durable life data of the 5 samples coated with the comparative coating are: 49h, 83h, 131h, 135h, 140h. In contrast, the average life of the sample coated with this coating (213.6h) is basically the same as that of the uncoated sample (~220h), and it is about twice as long as that of the sample coated with the comparative coating (107.6h) .

实施例6Example 6

真空熔炼铸造靶材Ni-21Co-25Cr-10Al-0.5Y(wt.%),加工成平面靶;用磁控溅射方法在镍基高温合金K417G零件表面沉积NiCoCrAlY涂层,涂层厚约10μm,晶粒尺度小于20nm;进行1000℃×2h真空退火。采用与实施例1相同方法的进行水淬测试100周期,零件表面涂层未出现开裂或剥落。Vacuum melting casting target material Ni-21Co-25Cr-10Al-0.5Y (wt.%), processed into a flat target; NiCoCrAlY coating was deposited on the surface of nickel-based superalloy K417G parts by magnetron sputtering, and the coating thickness was about 10 μm , the grain size is less than 20nm; vacuum annealing is carried out at 1000℃×2h. Using the same method as in Example 1 to carry out the water quenching test for 100 cycles, no cracking or peeling of the part surface coating occurred.

实施例7Example 7

真空熔炼铸造靶材Co-30Cr-7Al-0.1Dy(wt.%),加工成平面靶;用磁控溅射方法在镍基高温合金K417G零件表面沉积CoCrAlDy涂层,涂层厚约10μm,晶粒尺度小于15nm;进行1000℃×2h真空退火。采用与实施例1相同方法的进行水淬测试100周期,零件表面涂层未出现开裂或剥落。Co-30Cr-7Al-0.1Dy (wt.%) casting target material was vacuum smelted and processed into a planar target; a CoCrAlDy coating was deposited on the surface of nickel-based superalloy K417G parts by magnetron sputtering. The coating thickness was about 10 μm, and the crystal The particle size is less than 15nm; vacuum annealing is carried out at 1000℃×2h. Using the same method as in Example 1 to carry out the water quenching test for 100 cycles, no cracking or peeling of the part surface coating occurred.

实施例8Example 8

真空熔炼铸造靶材A和B,其中A靶材的化学成分为Ni-0.3C-10Co-8.9Cr-7W-2Mo-5.3Al-0.8Ti-3.8Ta-1.5Hf-0.015B(wt.%),B靶材的化学成分为Ni-20Co-25Cr-10Al-0.3Y-0.2Hf-0.5Si(wt.%),加工成平面靶。用磁控溅射方法,依次采用上述靶材A和B,在定向凝固镍基高温合金DZ125零件表面依次沉积层A和B,涂层厚度分别为约8μm和约40μm。然后再采用EB-PVD(电子束物理气相沉积)方法依次沉积ZrO2-xY2O3和Nd2Zr2O7层,制备温度为980℃,其中ZrO2-xY2O3层厚度为30μm,x=6mol%,Nd2Zr2O7层厚度为120μm。对零件进行解剖分析,发现层A/层B界面形成了致密且结合牢固Cr23C6扩散障。Cr23C6层中的Al含量极低,说明Al难以通过扩散障。进行零件抗热冲击试验(用等离子焰吹零件涂覆涂层面,用压缩空气吹零件未涂覆涂层的背面,热侧温度最高为1050℃,冷侧温度最高为800℃;等离子焰吹5min,停5min为1个周期)。测试1000周期后,涂层未出现剥落。Vacuum melting and casting targets A and B, wherein the chemical composition of target A is Ni-0.3C-10Co-8.9Cr-7W-2Mo-5.3Al-0.8Ti-3.8Ta-1.5Hf-0.015B (wt.%) , the chemical composition of the B target is Ni-20Co-25Cr-10Al-0.3Y-0.2Hf-0.5Si (wt.%), which is processed into a planar target. Using the magnetron sputtering method, the above-mentioned targets A and B are sequentially used to deposit layers A and B on the surface of the directionally solidified nickel-based superalloy DZ125 part, and the coating thicknesses are about 8 μm and about 40 μm, respectively. Then use the EB-PVD (Electron Beam Physical Vapor Deposition) method to deposit ZrO 2 -xY 2 O 3 and Nd 2 Zr 2 O 7 layers in sequence, the preparation temperature is 980 ° C, and the thickness of the ZrO 2 -xY 2 O 3 layer is 30 μm , x=6mol%, and the thickness of the Nd 2 Zr 2 O 7 layer is 120 μm. An anatomical analysis of the part revealed that the layer A/layer B interface formed a dense and firmly bonded Cr 23 C 6 diffusion barrier. The Al content in the Cr 23 C 6 layer is extremely low, indicating that it is difficult for Al to pass through the diffusion barrier. Carry out the thermal shock resistance test of the parts (use the plasma flame to blow the parts to coat the coated surface, and use compressed air to blow the uncoated back of the parts, the maximum temperature of the hot side is 1050 ℃, and the maximum temperature of the cold side is 800 ℃; 5min, stop for 5min as a cycle). After 1000 cycles of testing, the coating did not peel off.

上述实施例只为说明本发明的技术构思及特点,其目的在于让熟悉此项技术的人士能够了解本发明的内容并据以实施,并不能以此限制本发明的保护范围。凡根据本发明精神实质所作的等效变化或修饰,都应涵盖在本发明的保护范围之内。The above-mentioned embodiments are only to illustrate the technical concept and characteristics of the present invention, and the purpose is to enable those skilled in the art to understand the content of the present invention and implement it accordingly, and not to limit the protection scope of the present invention. All equivalent changes or modifications made according to the spirit of the present invention shall fall within the protection scope of the present invention.

Claims (10)

1.一种不影响高温合金基体力学性能的抗高温防护涂层,其特征在于:1. A high temperature resistant protective coating that does not affect the mechanical properties of a superalloy substrate, characterized in that: 所述抗高温防护涂层由Cr23C6相中间层和MCrAlX表面层组成;The high temperature resistant protective coating is composed of Cr 23 C 6 phase intermediate layer and MCrAlX surface layer; 所述MCrAlX表面层,其中M为Ni和/或Co,X为Hf、Si、Zr、稀土元素以及混合稀土中至少一种,稀土元素为La、Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、Yb、Lu或Y;混合稀土为两种或两种以上上述稀土元素同时使用;The MCrAlX surface layer, wherein M is Ni and/or Co, X is at least one of Hf, Si, Zr, rare earth elements and mixed rare earth elements, and the rare earth elements are La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu or Y; mixed rare earths are two or more of the above rare earth elements used simultaneously; 所述MCrAlX表面层,其中Cr含量为25wt%~40wt%,Al含量为5wt%~15wt%,X含量为0.05wt%~1.5wt%。In the MCrAlX surface layer, the content of Cr is 25wt%-40wt%, the content of Al is 5wt%-15wt%, and the content of X is 0.05wt%-1.5wt%. 2.按照权利要求1所述抗高温防护涂层,其特征在于:2. According to the described high temperature resistant protective coating of claim 1, it is characterized in that: 所述Cr23C6相中间层的厚度为0.1μm~10μm;The thickness of the Cr 23 C 6 phase intermediate layer is 0.1 μm to 10 μm; 所述MCrAlX表面层的厚度为10μm~1000μm;The thickness of the MCrAlX surface layer is 10 μm to 1000 μm; 所述MCrAlX表面层的晶粒尺寸小于100nm。The grain size of the MCrAlX surface layer is less than 100nm. 3.按照权利要求1所述抗高温防护涂层,其特征在于:在MCrAlX表面层的表面增加一个低热导率陶瓷层,其厚度为30μm~1000μm。3. The high temperature resistant protective coating according to claim 1, characterized in that: a ceramic layer with low thermal conductivity is added on the surface of the MCrAlX surface layer, the thickness of which is 30 μm-1000 μm. 4.按照权利要求3所述抗高温防护涂层,其特征在于:所述低热导率陶瓷层为ZrO2-xY2O3、Nd2Zr2O7、Nd2Zr2O7/ZrO2-xY2O3,其中ZrO2-xY2O3为底层,Nd2Zr2O7为面层,x=6mol%~8mol%。4. The high temperature resistant protective coating according to claim 3, characterized in that: the low thermal conductivity ceramic layer is ZrO 2 -xY 2 O 3 , Nd 2 Zr 2 O 7 , Nd 2 Zr 2 O 7 /ZrO 2 -xY 2 O 3 , wherein ZrO 2 -xY 2 O 3 is the bottom layer, Nd 2 Zr 2 O 7 is the surface layer, x=6mol%~8mol%. 5.一种权利要求1所述抗高温防护涂层的制备方法,其特征在于:5. a preparation method of the described high temperature resistant protective coating of claim 1, is characterized in that: 制备设备为:磁控溅射仪;The preparation equipment is: magnetron sputtering apparatus; 制备工艺过程为:(1)、铸造并加工MCrAlX靶材;(2)、调整高温合金基体靶材的C含量为0.2wt%~0.4wt%,铸造并加工高温合金基体靶材;(3)、采用高温合金基体靶材,溅射沉积5μm~10μm的涂层;(4)、采用MCrAlX靶材,溅射沉积10μm~1000μm的MCrAlX涂层;(5)、对零件进行900℃~1000℃真空退火,时间为1h~2h。The preparation process is: (1), casting and processing the MCrAlX target material; (2), adjusting the C content of the superalloy matrix target material to 0.2wt% to 0.4wt%, casting and processing the superalloy matrix target material; (3) 1. Using high-temperature alloy substrate target material, sputtering deposition of 5 μm ~ 10 μm coating; (4), using MCrAlX target material, sputtering deposition of 10 μm ~ 1000 μm MCrAlX coating; (5), 900 ℃ ~ 1000 ℃ for parts Vacuum annealing, the time is 1h ~ 2h. 6.按照权利要求5所述抗高温防护涂层的制备方法,其特征在于:对于C含量高于0.2wt%的高温合金零件,省略权利要求5所述的工艺过程(2)和(3)。6. according to the preparation method of the described high temperature resistant protective coating of claim 5, it is characterized in that: for the superalloy parts with C content higher than 0.2wt%, omit the process (2) and (3) described in claim 5 . 7.按照权利要求5所述抗高温防护涂层的制备方法,其特征在于:对于工作温度高于900℃的高温合金零件,省略权利要求5所述的工艺过程(5)。7. The preparation method of the high temperature resistant protective coating according to claim 5, characterized in that: for superalloy parts with working temperature higher than 900°C, the process (5) of claim 5 is omitted. 8.按照权利要求5所述抗高温防护涂层的制备方法,其特征在于:工艺过程(3)和(4)中真空室的温度控制在150℃~290℃范围内。8. The method for preparing the high temperature resistant protective coating according to claim 5, characterized in that: the temperature of the vacuum chamber in the process (3) and (4) is controlled within the range of 150°C to 290°C. 9.按照权利要求5所述抗高温防护涂层的制备方法,其特征在于:工艺过程(5)可被下述工艺过程替代:采用电子束物理气相沉积、等离子喷涂或化学气相沉积方法,沉积低热导率陶瓷层,零件加热温度为900℃~1080℃。9. according to the preparation method of the described high-temperature protective coating of claim 5, it is characterized in that: process (5) can be replaced by following process: adopt electron beam physical vapor deposition, plasma spraying or chemical vapor deposition method, deposition Low thermal conductivity ceramic layer, the heating temperature of parts is 900℃~1080℃. 10.按照权利要求5所述抗高温防护涂层的制备方法,其特征在于:所述MCrAlX靶材的化学成分为Co 19wt%~23wt%,Cr 25wt%~27wt%,Al 9wt%~11wt%,Y 0.1wt%~0.5wt%,Hf 0.05wt%~0.5wt%,Si 0.1wt%~0.9wt%,Y、Hf、Si含量之和不超过1.5wt%,Ni为余量。10. According to the preparation method of the high temperature resistant protective coating according to claim 5, it is characterized in that: the chemical composition of the MCrAlX target is Co 19wt%-23wt%, Cr 25wt%-27wt%, Al 9wt%-11wt% , Y 0.1wt% ~ 0.5wt%, Hf 0.05wt% ~ 0.5wt%, Si 0.1wt% ~ 0.9wt%, the sum of Y, Hf, Si content is not more than 1.5wt%, Ni is the balance.
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