CN106145027B - A kind of MEMS rotary actuators based on electrothermal drive - Google Patents
A kind of MEMS rotary actuators based on electrothermal drive Download PDFInfo
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- CN106145027B CN106145027B CN201510209964.1A CN201510209964A CN106145027B CN 106145027 B CN106145027 B CN 106145027B CN 201510209964 A CN201510209964 A CN 201510209964A CN 106145027 B CN106145027 B CN 106145027B
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- 238000005485 electric heating Methods 0.000 claims abstract description 28
- 238000002955 isolation Methods 0.000 claims description 11
- 238000009413 insulation Methods 0.000 claims description 10
- 238000007254 oxidation reaction Methods 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 238000000926 separation method Methods 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 6
- 230000003321 amplification Effects 0.000 abstract 1
- 238000003199 nucleic acid amplification method Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- -1 plays fixation Chemical compound 0.000 description 1
- 238000007634 remodeling Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
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Abstract
The invention discloses a kind of MEMS rotary actuators based on electrothermal drive, the MEMS rotary actuators based on electrothermal drive include four-layer structure, wherein the second layer is the principal structural layer of the actuator, identical voltage is loaded on the array V-type electric heating driver at both ends, the top power output of V-type electric heating driver and displacement, by the amplification of two-stage flexible lever mechanism, so that middle annulus obtains larger rotational angle.The present invention can be integrated in MEMS (MEMS), can produce the microactrator of high rotation angle degree；And it is simple in structure, design method is novel, and the SOIMUMPs techniques of standard can be used to process, can effectively increase the rotational angle of annulus, promote development and application of the actuator in MEMS fields.
Description
Technical field
The invention belongs to field of micro electromechanical technology, and in particular to a kind of MEMS rotary actuators based on electrothermal drive.
Background technology
MEMS (MEMS) actuator is one important branch of micro-electromechanical technology, is the weight of many MEMS
Want part.The most basic operation principle of microactrator is energy conversion, usually converts electrical energy into mechanical energy, so that real
Now certain mechanically actuated.Common type of drive mainly has four classes：Electrostatic, electromagnetic type, electrothermal, piezoelectric type etc..Generally
These microdrives produce displacement or driving power it is smaller, and be chiefly used in produce linear displacement occasion, compared to other drive
Dynamic device, electric heating driver can produce larger drive displacement, but still be difficult to meet some specific occasions, it is accordingly required in particular to produce
Rotate and need the occasion of high rotation angle degree.If therefore individually the so small change of microdrive is not amplified or is located
Reason, is nonsensical in practical applications.
The content of the invention
In view of the deficiencies of the prior art, the object of the present invention is to provide a kind of actuator that can produce high rotation angle degree.
To achieve the above object, present invention employs following technical solution：
A kind of MEMS rotary actuators based on electrothermal drive, including rotating ring, it further includes what is be close to from top to bottom
At least four-layer structure：Electrode layer, structure sheaf, electric insulation oxidization isolation layer and basalis,
The electrode layer includes four electrodes, and four electrodes are symmetrically distributed in the both ends of actuator；
The structure sheaf includes array V-type electric heating driver and lever, and the lever includes thrust lever and pulling force lever；
The electric insulation oxidization isolation layer includes the anchor point of array V-type electric heating driver and the anchor point of lever；
The structure sheaf further includes the flexible beam being connected with array V-type electric heating driver and thrust lever, thrust lever exists
Flexible beam of the tie-beam, pulling force lever of flexible beam, thrust lever and pulling force lever at anchor point at anchor point, rotating ring,
The flexible connection beam of pulling force regulations and parameters and rotating ring, wherein thrust lever and pulling force regulations and parameters are the main composition of flexible lever mechanism
Part,
The structure sheaf of the actuator is using rotating ring as symmetric points, the array V-type electric heating driver and flexible lever
Mechanism is all the elastic mechanism for having certain rigidity.
As the further optimization of such scheme, the array V-type electric heating driver and flexible lever mechanism stiffness ratio
For 1.
Further, the electric insulation oxidization isolation layer is silica separation layer.
Further, four electrodes are Ti/Au electrodes.
Further, the structure sheaf main component is doped silicon.
Further, the basalis is made of silicon.
Further, 500~1200 microns of the flexible connection beam length of the pulling force regulations and parameters and rotating ring, wide 5~30 is micro-
Rice.
Further, it is 20~60 ° to reserve rotation angle between the flexible connection beam and rotating ring.
Further, the rotation angle of the rotating ring is 45~120 °.
Compared with prior art, beneficial effects of the present invention are mainly shown as：Array V-type electric heating at both ends of the present invention drives
Identical voltage, the top power output of V-type electric heating driver and displacement are loaded on dynamic device, by putting for two-stage flexible lever mechanism
Big effect, so that middle annulus obtains larger rotational angle；Big corner proposed by the present invention is based on electrothermal drive
MEMS rotary actuators are simple in structure, and design method is novel, and the SOIMUMPs techniques of standard can be used to process, can effectively be increased
The rotational angle of large circle, promotes development and application of the actuator in MEMS fields.
Brief description of the drawings
Fig. 1 is the isometric structure diagram of one embodiment of the invention.
Fig. 2 is the sectional view of one embodiment of the invention.
Fig. 3 is the electrode layer schematic diagram of one embodiment of the invention.
Fig. 4 is the structure sheaf schematic diagram of one embodiment of the invention.
Fig. 5 is the oxidization isolation layer schematic diagram of one embodiment of the invention.
Fig. 6 is the basalis schematic diagram of one embodiment of the invention.
Fig. 7 is the array V-type electric heating driver schematic diagram of one embodiment of the invention.
Embodiment
The preferred embodiment of the present invention is specifically described below in conjunction with the accompanying drawings, wherein, attached drawing forms the application part, and
It is used to explain the principle of the present invention together with embodiments of the present invention.
As shown in Fig. 1~7, a kind of MEMS rotary actuators based on electrothermal drive, including rotating ring 9, it is further included
At least four-layer structure being close to from top to bottom：Electrode layer a, structure sheaf b, electric insulation oxidization isolation layer c and basalis d,
The electrode layer includes four electrode As 1, A2, A3, A4, and four electrode As 1, A2, A3, A4 are symmetrically distributed in actuator
Both ends；
The structure sheaf includes array V-type electric heating driver and lever, and the lever includes thrust lever 4 and pulling force lever
7；
The anchor point u of the electric insulation oxidization isolation layer anchor point m, n, p, q and lever including array V-type electric heating driver,
v、x、y；
The structure sheaf further includes the flexible beam 2 being connected with array V-type electric heating driver and thrust lever 4, thrust lever 4
Flexible beam 6 of the tie-beam 5, pulling force lever 7 of flexible beam 3, thrust lever 4 and pulling force lever 7 at anchor point u at anchor point v,
Rotating ring 9, pulling force regulations and parameters 7 and the flexible connection beam 8 of rotating ring 9, wherein thrust lever 4 and pulling force regulations and parameters 7 are flexible thick stick
The chief component of linkage,
The structure sheaf of the actuator is symmetric points with rotating ring 9, the array V-type electric heating driver and flexible lever
Mechanism is all the elastic mechanism for having certain rigidity.The array V-type electric heating driver and flexible lever mechanism stiffness ratio are
1。
The electric insulation oxidization isolation layer is silica separation layer, mainly plays electric insulation and anchor point fixation.
Four electrodes are Ti/Au electrodes.
The structure sheaf main component is doped silicon.
The basalis is made of silicon, mainly plays fixation, and anchor point position in structure sheaf is passed through oxide isolation layer
Silicon is fixed up, and a platform is provided for the movement of total layer.
The pulling force regulations and parameters 7 and 800 microns of the length of flexible connection beam 8 of rotating ring 9, it is 5 microns wide.The flexible connection beam
45 ° of rotation angle is reserved between 8 and rotating ring 9.
The array V-type electric heating driver 1 and two-stage flexible lever enlarger of the present embodiment all have certain rigidity
Elastic mechanism, the present embodiment reasonably utilize Rigidity Matching therebetween, when the ratio of rigidity of the two is equal to 1, the V-type electric heating
Driver and the combined mechanism output energy maximum with leverage, i.e., while certain displacement is exported, can also export certain
Driving force.Proved through simulation calculation：When the resistivity of structure sheaf silicon materials is 0.042 Ω cm, in V-type electric heating driver
Both ends load 15V voltages, and after reaching stable state, the temperature rise of whole device is no more than 600 DEG C, connects the displacement energy at rotating ring 9
Enough reach 139 μm, the corner of rotating ring 9 can reach 79.6 °.
Fig. 7 is the structure diagram of array V-type electric heating driver 1, is the big corner of the present embodiment based on electrothermal drive
The important composition component of MEMS rotary actuators, it is made of single V-type beam array, and the V-type driver after array can increase
Big corresponding power output.Its operation principle is to load electrode on both ends m, n of V-type beam, after applying certain voltage, V-type
Beam is energized heating and expands, and therefore, certain power output and output displacement will be produced in the top B of V-type beam.With reference to Fig. 4, when
After loading certain constant amplitude voltage between A2, A4 between A1, A3, the array V-type electric heating driver 1 at structure sheaf both ends is added
After thermal expansion, certain thrust and displacement can be produced by going out in their endpoint.From fig. 4, it can be seen that the layer is with rotating ring 9
Centered on the right and left structure be it is symmetrical, but array V-type electric heating driver 1 produce thrust direction contrast.Under
Face illustrates MEMS rotary actuator of the lower big corner of the invention based on electrothermal drive is how to work with regard to Fig. 4 left-halfs
's.After certain voltage is loaded between electrode A 1 and A3, array V-type electric heating driver 1 is energized heating, then expands, at it
Top produce thrust, by flexible beam 2 input thrust lever 4, at anchor point u equivalent to the flexible beam 3 of fulcrum under the action of,
1 other end of thrust lever produces the active force of a post-tensioning, which is input to pulling force lever 7 by being flexibly connected beam 5,
At anchor point v equivalent to the flexible beam 6 of fulcrum under the action of, 4 other end of thrust lever produce a post-tensioning active force, the work
Firmly (left side) generation rotation backward of rotating ring 9 is pulled by being flexibly connected beam 8.Similarly, which also produces
One active force pulled back, the active force which produces with left-half form a pair of of couple, therefore in the couple
Under effect, the rotating ring 9 of centre is set to produce a very big corner.
The preferred embodiment for the present invention is explained in detail above in conjunction with attached drawing, but the invention is not restricted to above-mentioned implementation
Mode, within the knowledge of a person skilled in the art, can also be on the premise of present inventive concept not be departed from
Make a variety of changes.
Many other changes and remodeling can be made by not departing from the spirit and scope of the present invention.It should be appreciated that the present invention is not
It is limited to specific embodiment, the scope of the present invention is defined by the following claims.
Claims (1)
1. a kind of MEMS rotary actuators based on electrothermal drive, it is characterised in that it includes at least four be close to from top to bottom
Rotating fields：Electrode layer (a), structure sheaf (b), electric insulation oxidization isolation layer (c) and basalis (d),
The electrode layer includes four electrodes (A1, A2, A3, A4), and four electrodes (A1, A2, A3, A4) are symmetrically distributed in actuator
Both ends；
The structure sheaf includes array V-type electric heating driver and lever, and the lever includes thrust lever (4) and pulling force lever
(7)；
Anchor point m, n, p, q of the electric insulation oxidization isolation layer including array V-type electric heating driver and anchor point u, v of lever, x,
y；
The structure sheaf further includes flexible beam (2), the thrust lever being connected with array V-type electric heating driver and thrust lever (4)
(4) tie-beam (5) of the flexible beam at anchor point u (3), thrust lever (4) and pulling force lever (7), pulling force lever (7) are in anchor point
The flexible connection beam (8) of flexible beam (6), rotating ring (9), pulling force lever (7) and rotating ring (9) at v, wherein thrust thick stick
Bar (4) and the chief component that pulling force lever (7) is flexible lever mechanism,
The structure sheaf of the actuator with rotating ring (9) for symmetric points, the array V-type electric heating driver and flexible lever machine
Structure is all the elastic mechanism for having certain rigidity, and the array V-type electric heating driver and flexible lever mechanism stiffness ratio are 1,
The electric insulation oxidization isolation layer is silica separation layer, and four electrodes are Ti/Au electrodes, the structure sheaf main component
For doped silicon, the basalis is made of silicon, and the pulling force lever (7) and the flexible connection beam (8) of rotating ring (9) are long
500~1200 microns, 5~30 microns wide, it is 20 that rotation angle is reserved between the flexible connection beam (8) and rotating ring (9)
~60 °, the rotation angle of the rotating ring (9) is 45~120 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510209964.1A CN106145027B (en) | 2015-04-28 | 2015-04-28 | A kind of MEMS rotary actuators based on electrothermal drive |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510209964.1A CN106145027B (en) | 2015-04-28 | 2015-04-28 | A kind of MEMS rotary actuators based on electrothermal drive |
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| Publication Number | Publication Date |
|---|---|
| CN106145027A CN106145027A (en) | 2016-11-23 |
| CN106145027B true CN106145027B (en) | 2018-05-15 |
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Citations (6)
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|---|---|---|---|---|
| US6360539B1 (en) * | 2000-04-05 | 2002-03-26 | Jds Uniphase Corporation | Microelectromechanical actuators including driven arched beams for mechanical advantage |
| US7567011B1 (en) * | 2007-02-01 | 2009-07-28 | The United States Of America As Represented By The Secretary Of The Navy | MEMS linear thermoelectric motor apparatus |
| CN103288041A (en) * | 2013-05-14 | 2013-09-11 | 西安交通大学 | V-shaped-structure MEMS (micro-electromechanical system) actuator for detonating sequence |
| CN103346699A (en) * | 2013-06-17 | 2013-10-09 | 上海大学 | V+U type composite beam micro actuator based on electric heating driving and preparation method thereof |
| CN104315929A (en) * | 2014-09-17 | 2015-01-28 | 西安交通大学 | MEMS weapon security apparatus |
| CN204643829U (en) * | 2015-04-28 | 2015-09-16 | 苏州希美微纳系统有限公司 | A kind of MEMS actuator |
-
2015
- 2015-04-28 CN CN201510209964.1A patent/CN106145027B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6360539B1 (en) * | 2000-04-05 | 2002-03-26 | Jds Uniphase Corporation | Microelectromechanical actuators including driven arched beams for mechanical advantage |
| US7567011B1 (en) * | 2007-02-01 | 2009-07-28 | The United States Of America As Represented By The Secretary Of The Navy | MEMS linear thermoelectric motor apparatus |
| CN103288041A (en) * | 2013-05-14 | 2013-09-11 | 西安交通大学 | V-shaped-structure MEMS (micro-electromechanical system) actuator for detonating sequence |
| CN103346699A (en) * | 2013-06-17 | 2013-10-09 | 上海大学 | V+U type composite beam micro actuator based on electric heating driving and preparation method thereof |
| CN104315929A (en) * | 2014-09-17 | 2015-01-28 | 西安交通大学 | MEMS weapon security apparatus |
| CN204643829U (en) * | 2015-04-28 | 2015-09-16 | 苏州希美微纳系统有限公司 | A kind of MEMS actuator |
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| Publication number | Publication date |
|---|---|
| CN106145027A (en) | 2016-11-23 |
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