CN106129807A - A kind of external cavity feedback spectrum beam combination device and spectrum beam combination method thereof - Google Patents
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Abstract
本发明公开了一种外腔反馈光谱合束装置及其光谱合束方法。外腔反馈光谱合束装置包括至少两个激光阵列、至少两个快轴透镜、至少两对反射镜组、一个转换透镜、一个光栅、一个外腔镜。一个激光阵列对应一个快轴透镜、一对反射镜组。相邻两个激光阵列按距离周期L进行排列，每个激光阵列的光束通过相应的快轴透镜后采用一对反射镜组镜将光束进行180度转向，且相邻两对反射镜组之间的距离为L/2，并使每个激光阵列到转换透镜的光程距离相等。从而本发明能够仅用一个转换透镜和光栅就实现了多个传导冷却封装激光阵列光谱合束，经过转换透镜的光束聚焦到光栅上，采用外腔镜反馈将光束进行光谱合束。
The invention discloses an external cavity feedback spectrum beam combining device and a spectrum beam combining method thereof. The external cavity feedback spectrum beam combining device includes at least two laser arrays, at least two fast axis lenses, at least two pairs of reflective mirror groups, a conversion lens, a grating, and an external cavity mirror. A laser array corresponds to a fast-axis lens and a pair of mirror groups. Two adjacent laser arrays are arranged according to the distance period L. The beam of each laser array passes through the corresponding fast axis lens and then uses a pair of mirrors to steer the beam 180 degrees. The distance is L/2, and the optical path distances from each laser array to the conversion lens are equal. Therefore, the present invention can achieve spectral beam combining of multiple conduction-cooled packaged laser arrays with only one conversion lens and grating, the beams passing through the conversion lens are focused on the grating, and the beams are spectrally combined by external cavity mirror feedback.
Description
技术领域technical field
本发明涉及半导体激光技术领域的一种光谱合束装置及其光谱合束方法，尤其涉及一种实现多个半导体激光阵列的外腔反馈光谱合束装置及其光谱合束方法。The invention relates to a spectral beam combining device and a spectral beam combining method thereof in the technical field of semiconductor lasers, in particular to an external cavity feedback spectral beam combining device and a spectral beam combining method for realizing multiple semiconductor laser arrays.
背景技术Background technique
由于半导体激光器具有高光束质量，散热特性好，寿命长等优点，因此在激光医疗、光纤激光器泵浦、激光监控、激光加工等方面都有着广泛的应用。但是近年来随着半导体激光器技术应用的发展，对于如金属焊接、激光切割等要求较高的领域，半导体激光器的应用尚有一定难度，改善半导体激光器的光束质量，提高输出激光束的亮度，对于大功率半导体激光器的发展和应用具有重要意义。Because semiconductor lasers have the advantages of high beam quality, good heat dissipation, and long life, they are widely used in laser medical treatment, fiber laser pumping, laser monitoring, and laser processing. However, with the development of the application of semiconductor laser technology in recent years, it is still difficult to apply semiconductor lasers in fields with high requirements such as metal welding and laser cutting. Improving the beam quality of semiconductor lasers and increasing the brightness of the output laser beam are important for The development and application of high-power semiconductor lasers are of great significance.
通过外腔反馈实现光谱合束，可以有效提高半导体激光器的亮度，它在不增加半导体激光器非合束方向上光束的光束质量的同时将合束方向的光束质量减少至单个发光单元的光束质量。该方法在美国专利US7065107B2，US6192062B1，US6208679，US874222B2和公告号为CN102986097A、名称为“选择性重新定位与旋转波长光束组合系统与方法”的国内专利均有记载，但这些光谱合束方法对于多个激光阵列同时合束时对激光阵列需要进行等光程处理，即每个激光阵列到转换透镜的距离要相等。这对于垂直叠加的微通道水冷垂直激光阵列叠阵较容易处理，对于应用更为广泛，可靠性更高的传导冷却激光阵列由于其封装的差异，使得等光程结构过于庞大，不利于进行有效的热管理和系统集成。Spectral beam combining through external cavity feedback can effectively improve the brightness of semiconductor lasers. It reduces the beam quality in the beam combining direction to the beam quality of a single light-emitting unit without increasing the beam quality of the beam in the non-combining direction of the semiconductor laser. This method has been documented in U.S. Patents US7065107B2, US6192062B1, US6208679, US874222B2 and the domestic patent whose publication number is CN102986097A and titled "Selective Repositioning and Rotational Wavelength Beam Combination System and Method", but these spectral beam combining methods are for multiple When the laser arrays combine beams at the same time, the laser arrays need to be treated with equal optical paths, that is, the distance between each laser array and the conversion lens must be equal. This is easier to handle for vertically stacked microchannel water-cooled vertical laser array stacks, and for conduction-cooled laser arrays with wider applications and higher reliability, due to the difference in packaging, the equal optical path structure is too large, which is not conducive to effective thermal management and system integration.
发明内容Contents of the invention
为了解决多个传导冷却激光阵列同时进行外腔反馈光谱合束时，空间体积过于庞大，不利于对激光阵列进行有效的热管理和系统集成等问题，本发明提供了可以有效解决上述问题的一种实现多个半导体激光阵列的外腔反馈光谱合束装置及其光谱合束方法，多个半导体激光阵列等光程空间合束结构半导体，实现多个半导体激光阵列同时外腔反馈光谱合束的功能，尤其是传导冷却激光阵列。In order to solve the problem that when multiple conduction-cooled laser arrays perform external cavity feedback spectral beam combining at the same time, the space volume is too large, which is not conducive to effective thermal management and system integration of the laser arrays. The present invention provides a solution that can effectively solve the above problems. An external cavity feedback spectral beam combining device and a spectral beam combining method for realizing multiple semiconductor laser arrays, multiple semiconductor laser arrays and other optical path space beam combining structure semiconductors, realizing multiple semiconductor laser arrays and external cavity feedback spectral beam combining at the same time features, especially conduction-cooled laser arrays.
本发明的解决方案是：一种外腔反馈光谱合束装置，其包括至少两个激光阵列、至少两个快轴透镜、至少两对反射镜组、一个转换透镜、一个光栅、一个外腔镜；一个激光阵列对应一个快轴透镜、一对反射镜组；相邻两个激光阵列按距离周期L进行排列，每个激光阵列的光束通过相应的快轴透镜后采用一对反射镜组镜将光束进行180度转向，且相邻两对反射镜组之间的距离为L/2，并使每个激光阵列到转换透镜的光程距离相等；经过转换透镜的光束聚焦到光栅上，采用外腔镜反馈将光束进行光谱合束。The solution of the present invention is: an external cavity feedback spectrum beam combining device, which includes at least two laser arrays, at least two fast axis lenses, at least two pairs of mirror groups, a conversion lens, a grating, and an external cavity mirror ; A laser array corresponds to a fast-axis lens and a pair of mirror groups; two adjacent laser arrays are arranged according to the distance period L, and the beam of each laser array passes through the corresponding fast-axis lens and then uses a pair of mirror groups to The beam is turned 180 degrees, and the distance between two adjacent pairs of mirror groups is L/2, and the optical path distance from each laser array to the conversion lens is equal; the beam passing through the conversion lens is focused on the grating, and the external The cavity mirror feedback combines the beams spectrally.
作为上述方案的进一步改进，每个激光阵列以阶梯形式排列封装在阶梯热沉上，且阶梯高度a取决于快轴透镜的焦距。As a further improvement of the above solution, each laser array is arranged and packaged on a stepped heat sink in a stepped form, and the step height a depends on the focal length of the fast axis lens.
作为上述方案的进一步改进，每个激光阵列包括波长分别为λ1、λ2、λ3且等间距并排的三个激光。As a further improvement of the above scheme, each laser array includes three lasers with wavelengths of λ1, λ2, and λ3, which are arranged side by side at equal intervals.
作为上述方案的进一步改进，所述激光阵列为传导冷却激光阵列。As a further improvement of the above solution, the laser array is a conduction-cooled laser array.
本发明还提供一种外腔反馈光谱合束方法，所述方法包括以下步骤：The present invention also provides an external cavity feedback spectral beam combining method, the method comprising the following steps:
提供至少两个激光阵列、至少两个快轴透镜、至少两对反射镜组、一个转换透镜、一个光栅、一个外腔镜，其中，一个激光阵列对应一个快轴透镜、一对反射镜组；Provide at least two laser arrays, at least two fast-axis lenses, at least two pairs of mirror groups, a conversion lens, a grating, and an external cavity mirror, wherein one laser array corresponds to a fast-axis lens and a pair of mirror groups;
将至少两个激光阵列按相邻两个激光阵列以距离周期L的规律进行排列；Arranging at least two laser arrays according to the rule of distance period L between two adjacent laser arrays;
将每个激光阵列的光束通过相应的快轴透镜后采用一对反射镜组镜将光束进行180度转向，且相邻两对反射镜组之间的距离为L/2；After the beam of each laser array passes through the corresponding fast axis lens, a pair of mirror groups is used to steer the beam 180 degrees, and the distance between two adjacent pairs of mirror groups is L/2;
使每个激光阵列到转换透镜的光程距离相等；Make the optical path distance from each laser array to the conversion lens equal;
通过转换透镜将经过的光束聚焦到光栅上；Focus the passing beam onto the grating through the conversion lens;
采用外腔镜反馈将光束进行光谱合束。The beams are spectrally combined by external cavity mirror feedback.
作为上述方案的进一步改进，每个激光阵列以阶梯形式排列封装在阶梯热沉上，且阶梯高度a取决于快轴透镜的焦距。As a further improvement of the above solution, each laser array is arranged and packaged on a stepped heat sink in a stepped form, and the step height a depends on the focal length of the fast axis lens.
作为上述方案的进一步改进，每个激光阵列包括波长分别为λ1、λ2、λ3且等间距并排的三个激光。As a further improvement of the above scheme, each laser array includes three lasers with wavelengths of λ1, λ2, and λ3, which are arranged side by side at equal intervals.
作为上述方案的进一步改进，所述激光阵列为传导冷却激光阵列。As a further improvement of the above solution, the laser array is a conduction-cooled laser array.
本发明通过将相邻两个激光阵列按距离周期L进行排列，每个激光阵列的光束通过相应的快轴透镜后采用一对反射镜组镜将光束进行180度转向，且相邻两对反射镜组之间的距离为L/2，并使每个激光阵列到转换透镜的光程距离相等，从而能够仅用一个转换透镜和光栅就实现了多个传导冷却封装激光阵列光谱合束，经过转换透镜的光束聚焦到光栅上，采用外腔镜反馈将光束进行光谱合束。In the present invention, two adjacent laser arrays are arranged according to the distance period L, and the light beam of each laser array passes through the corresponding fast axis lens, and then a pair of reflective mirrors are used to steer the light beam by 180 degrees, and two adjacent pairs of reflection The distance between the mirror groups is L/2, and the optical path distance from each laser array to the conversion lens is equal, so that only one conversion lens and grating can be used to realize the spectral combination of multiple conduction-cooled packaged laser arrays. The beam from the conversion lens is focused on the grating, and the beam is spectrally combined by feedback from the external cavity mirror.
附图说明Description of drawings
图1是本发明提供的外腔反馈光谱合束装置的结构示意图。Fig. 1 is a schematic structural diagram of an external cavity feedback spectral beam combiner provided by the present invention.
具体实施方式detailed description
为了使本发明的目的、技术方案及优点更加清楚明白，以下结合附图及实施例，对本发明进行进一步详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
请参阅图1，本实施方式的外腔反馈光谱合束装置包括：至少两个激光阵列1、2；至少两个快轴透镜3；至少两对反射镜组；一个转换透镜4；一个光栅；一个外腔镜6。一个激光阵列对应一个快轴透镜3、一对反射镜组。Please refer to Fig. 1, the external cavity feedback spectrum beam combining device of this embodiment includes: at least two laser arrays 1, 2; at least two fast axis lenses 3; at least two pairs of mirror groups; a conversion lens 4; a grating; An external endoscope6. A laser array corresponds to a fast-axis lens 3 and a pair of mirror groups.
在本实施例中，以两个激光阵列1、2为例，对应的，快轴透镜3为两个，反射镜组也为两组，每组反射镜组包括两个反射镜，如图1中的两个反射镜1-1、1-2是一组，另两个反射镜2-1、2-2是另外一组。每个激光阵列可包括波长分别为λ1、λ2、λ3且等间距并排的三个激光。所述激光阵列可为传导冷却激光阵列。In this embodiment, taking two laser arrays 1 and 2 as an example, correspondingly, there are two fast-axis lenses 3, and two groups of mirror groups, each group of mirror groups includes two mirrors, as shown in Figure 1 The two reflectors 1-1, 1-2 are one group, and the other two reflectors 2-1, 2-2 are another group. Each laser array may include three lasers with wavelengths of λ1, λ2, and λ3 and arranged side by side at equal intervals. The laser array may be a conduction cooled laser array.
相邻两个激光阵列按距离周期L进行排列，每个激光阵列的光束通过相应的快轴透镜3后采用一对反射镜组镜将光束进行180度转向。每个激光阵列最好以阶梯形式排列封装在阶梯热沉上，且阶梯高度a取决于快轴透镜3的焦距。相邻两对反射镜组之间的距离为L/2，并使每个激光阵列到转换透镜4的光程距离相等。经过转换透镜4的光束聚焦到光栅5上，采用外腔镜6反馈将光束进行光谱合束。Two adjacent laser arrays are arranged according to the distance period L, and the beam of each laser array passes through the corresponding fast axis lens 3 and then uses a pair of reflective mirrors to steer the beam by 180 degrees. Each laser array is preferably arranged and packaged on a stepped heat sink in a stepped form, and the step height a depends on the focal length of the fast axis lens 3 . The distance between two adjacent pairs of reflecting mirror groups is L/2, and the optical path distances from each laser array to the conversion lens 4 are equal. The light beam passing through the conversion lens 4 is focused on the grating 5, and the light beam is spectrally combined by using the external cavity mirror 6 for feedback.
本实施例的外腔反馈光谱合束装置其在具体应用时，相应的外腔反馈光谱合束方法可包括以下步骤：In the specific application of the external cavity feedback spectral beam combining device of this embodiment, the corresponding external cavity feedback spectral beam combining method may include the following steps:
将两个激光阵列1、2按相邻两个激光阵列以距离周期L的规律进行排列；Arranging the two laser arrays 1 and 2 according to the rule of the distance period L between two adjacent laser arrays;
将每个激光阵列的光束通过相应的快轴透镜3后采用一对反射镜组镜将光束进行180度转向，且相邻两对反射镜组之间的距离为L/2；Pass the beam of each laser array through the corresponding fast-axis lens 3 and use a pair of reflectors to steer the beam 180 degrees, and the distance between two adjacent pairs of reflectors is L/2;
使每个激光阵列到转换透镜4的光程距离相等；Make the optical path distances from each laser array to the conversion lens 4 equal;
通过转换透镜4将经过的光束聚焦到光栅5上；The passing light beam is focused on the grating 5 through the conversion lens 4;
采用外腔镜6反馈将光束进行光谱合束。The external cavity mirror 6 is used to feed back the light beams for spectral combining.
本发明通过将相邻两个激光阵列按距离周期L进行排列，每个激光阵列的光束通过相应的快轴透镜3后采用一对反射镜组镜将光束进行180度转向，且相邻两对反射镜组之间的距离为L/2，并使每个激光阵列到转换透镜4的光程距离相等，从而能够仅用一个转换透镜和光栅就实现了多个传导冷却封装激光阵列光谱合束，经过转换透镜4的光束聚焦到光栅5上，采用外腔镜6反馈将光束进行光谱合束。The present invention arranges two adjacent laser arrays according to the distance period L, and the beam of each laser array passes through the corresponding fast-axis lens 3, and then uses a pair of reflective mirrors to steer the beam 180 degrees, and two adjacent pairs The distance between the reflector groups is L/2, and the optical path distance from each laser array to the conversion lens 4 is equal, so that multiple conduction-cooled packaged laser arrays can be spectrally combined with only one conversion lens and grating , the light beam passing through the conversion lens 4 is focused on the grating 5, and the external cavity mirror 6 is used to feed back the light beams for spectral combining.
以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本发明的保护范围之内。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention should be included in the protection of the present invention. within range.
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Cited By (6)
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| CN106532435A (en) * | 2017-01-05 | 2017-03-22 | 苏州长光华芯光电技术有限公司 | Semiconductor laser array beam combining device |
| CN106848839A (en) * | 2017-01-26 | 2017-06-13 | 中国科学院半导体研究所 | Qcl |
| CN112531462A (en) * | 2020-12-04 | 2021-03-19 | 苏州长光华芯光电技术股份有限公司 | Bragg grating external cavity semiconductor laser module beam combining device |
| CN113231733A (en) * | 2021-04-13 | 2021-08-10 | 深圳活力激光技术有限公司 | Laser beam combining device and processing equipment |
| CN117767101A (en) * | 2024-02-20 | 2024-03-26 | 深圳市星汉激光科技股份有限公司 | Small-size laser and laser equipment |
| CN118472796A (en) * | 2024-07-09 | 2024-08-09 | 北京凯普林光电科技股份有限公司 | Semiconductor laser |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106532435A (en) * | 2017-01-05 | 2017-03-22 | 苏州长光华芯光电技术有限公司 | Semiconductor laser array beam combining device |
| CN106848839A (en) * | 2017-01-26 | 2017-06-13 | 中国科学院半导体研究所 | Qcl |
| CN112531462A (en) * | 2020-12-04 | 2021-03-19 | 苏州长光华芯光电技术股份有限公司 | Bragg grating external cavity semiconductor laser module beam combining device |
| CN113231733A (en) * | 2021-04-13 | 2021-08-10 | 深圳活力激光技术有限公司 | Laser beam combining device and processing equipment |
| CN117767101A (en) * | 2024-02-20 | 2024-03-26 | 深圳市星汉激光科技股份有限公司 | Small-size laser and laser equipment |
| CN117767101B (en) * | 2024-02-20 | 2024-05-07 | 深圳市星汉激光科技股份有限公司 | Small-size laser and laser equipment |
| CN118472796A (en) * | 2024-07-09 | 2024-08-09 | 北京凯普林光电科技股份有限公司 | Semiconductor laser |
| CN118472796B (en) * | 2024-07-09 | 2024-10-22 | 北京凯普林光电科技股份有限公司 | Semiconductor laser |
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Inventor after: Xiao Wei Inventor after: Pan Huadong Inventor after: Gao Jing Inventor after: Liao Xinsheng Inventor after: Jin Yanran Inventor after: Zhou Jun Inventor before: Xiao Wei Inventor before: Pan Huadong Inventor before: Liao Xinsheng Inventor before: Jin Yanran Inventor before: Zhou Jun |
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Effective date of registration: 20180510 Address after: 215163 No. 2 Kunlun mountain road, Huqiu District, Suzhou, Jiangsu, 2 Applicant after: Suzhou Everbright Photonics Technology Co., Ltd. Applicant after: SUZHOU INSTITUTE OF BIOMEDICAL ENGINEERING AND TECHNOLOGY, CHINESE ACADEMY OF SCIENCES Address before: 215163 No. 2 Kunlun mountain road, Huqiu District, Suzhou, Jiangsu, 2 Applicant before: Suzhou Everbright Photonics Technology Co., Ltd. |
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Application publication date: 20161116 |