CN106116110A - The preparation method of chalcogenide glass - Google Patents
The preparation method of chalcogenide glass Download PDFInfo
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- CN106116110A CN106116110A CN201610592973.8A CN201610592973A CN106116110A CN 106116110 A CN106116110 A CN 106116110A CN 201610592973 A CN201610592973 A CN 201610592973A CN 106116110 A CN106116110 A CN 106116110A
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- 239000005387 chalcogenide glass Substances 0.000 title claims abstract description 51
- 238000002360 preparation method Methods 0.000 title claims abstract description 17
- 239000011521 glass Substances 0.000 claims abstract description 91
- 239000002994 raw material Substances 0.000 claims abstract description 64
- 238000000265 homogenisation Methods 0.000 claims abstract description 42
- 239000000156 glass melt Substances 0.000 claims abstract description 30
- 238000000746 purification Methods 0.000 claims abstract description 27
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 24
- 230000001681 protective effect Effects 0.000 claims abstract description 14
- 238000010438 heat treatment Methods 0.000 claims abstract description 12
- 238000007496 glass forming Methods 0.000 claims abstract description 11
- 238000003756 stirring Methods 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims description 29
- 238000000137 annealing Methods 0.000 claims description 27
- 239000000463 material Substances 0.000 claims description 19
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 16
- 239000007789 gas Substances 0.000 claims description 12
- 230000008569 process Effects 0.000 claims description 9
- 229910052757 nitrogen Inorganic materials 0.000 claims description 8
- 239000000047 product Substances 0.000 claims description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- 239000001301 oxygen Substances 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 239000001307 helium Substances 0.000 claims description 5
- 229910052734 helium Inorganic materials 0.000 claims description 5
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 5
- 229940123973 Oxygen scavenger Drugs 0.000 claims description 3
- 239000012467 final product Substances 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- 239000002245 particle Substances 0.000 claims description 3
- 238000005352 clarification Methods 0.000 abstract description 16
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 238000005303 weighing Methods 0.000 abstract description 6
- 230000003287 optical effect Effects 0.000 abstract description 5
- 238000010924 continuous production Methods 0.000 abstract description 4
- 238000005755 formation reaction Methods 0.000 abstract description 3
- 238000002156 mixing Methods 0.000 abstract description 2
- 238000009740 moulding (composite fabrication) Methods 0.000 description 37
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 20
- 239000010453 quartz Substances 0.000 description 18
- 239000006060 molten glass Substances 0.000 description 10
- 238000002844 melting Methods 0.000 description 9
- 230000008018 melting Effects 0.000 description 9
- 238000003786 synthesis reaction Methods 0.000 description 9
- 239000007788 liquid Substances 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 6
- 239000006066 glass batch Substances 0.000 description 6
- 238000007507 annealing of glass Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000005484 gravity Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 238000002329 infrared spectrum Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 230000004297 night vision Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 238000003723 Smelting Methods 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000003708 ampul Substances 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000004438 eyesight Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000010907 mechanical stirring Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- 238000001931 thermography Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
- C03B5/16—Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B1/00—Preparing the batches
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/32—Non-oxide glass compositions, e.g. binary or ternary halides, sulfides or nitrides of germanium, selenium or tellurium
- C03C3/321—Chalcogenide glasses, e.g. containing S, Se, Te
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C4/00—Compositions for glass with special properties
- C03C4/10—Compositions for glass with special properties for infrared transmitting glass
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Glass Compositions (AREA)
Abstract
本发明是关于一种硫系玻璃的制备方法,包括如下步骤:1)在无水无氧下,称量、混合硫系玻璃的原料,并将该混合原料转移至原料纯化‑玻璃形成单元,纯化;2)升温至800‑900℃,并保温使玻璃原料充分反应形成玻璃熔体,充入保护气体,所述玻璃熔体通过输料管道流向玻璃澄清‑均化单元,搅拌后进入玻璃均化‑成形单元;3)降温到400‑500℃,充分搅拌均匀的玻璃熔体经由底部漏料管流出,得到成形制品;4)退火,得到硫系玻璃。本发明从原料加料、纯化、玻璃形成、澄清、均化一直到成形的连续生产,提高了硫系玻璃产品的光学均匀性、批次稳定性、玻璃产量和生产效率。
The invention relates to a preparation method of chalcogenide glass, comprising the following steps: 1) weighing and mixing raw materials of chalcogenide glass under anhydrous and oxygen-free conditions, and transferring the mixed raw materials to a raw material purification-glass forming unit, Purification; 2) Heating up to 800-900°C and keeping warm to make the glass raw materials fully react to form a glass melt, which is filled with protective gas, and the glass melt flows to the glass clarification-homogenization unit through the feeding pipeline, and enters the glass homogenization unit after stirring. Chemical-forming unit; 3) Cool down to 400-500°C, and the fully stirred and uniform glass melt flows out through the bottom leakage pipe to obtain shaped products; 4) Anneal to obtain chalcogenide glass. The invention improves the optical uniformity, batch stability, glass output and production efficiency of chalcogenide glass products from raw material feeding, purification, glass formation, clarification, homogenization to forming continuous production.
Description
技术领域technical field
本发明涉及红外玻璃制备技术领域,特别是涉及一种硫系玻璃的制备方法。The invention relates to the technical field of infrared glass preparation, in particular to a preparation method of chalcogenide glass.
背景技术Background technique
硫系玻璃是指以元素周期表ⅥA族元素S、Se、Te为主并引入一定量的其他元素所形成的玻璃。目前应用广泛的Ge-Sb-Se系统硫系玻璃具有以下优点:具有类似于单晶锗的红外透过性能,透过波段覆盖三个大气窗口;具有较好的光-热稳定特性,折射率温度系数小且可调;对锗资源消耗低,可采用精密模压技术成形,加工成本低。Chalcogenide glass refers to the glass formed by the elements of group VIA of the periodic table of elements S, Se, and Te as the main elements and a certain amount of other elements introduced. The currently widely used Ge-Sb-Se system chalcogenide glass has the following advantages: it has infrared transmission performance similar to that of single crystal germanium, and the transmission band covers three atmospheric windows; it has good light-thermal stability characteristics, and the refractive index The temperature coefficient is small and adjustable; the consumption of germanium resources is low, and it can be formed by precision molding technology, and the processing cost is low.
在单兵头盔夜视系统、枪械瞄准具、无人驾驶车辆监视系统和红外制导系统等国防技术领域具有广泛应用。随着红外探测器技术的发展和成本控制,硫系玻璃热成像系统在安防、消防、测温、汽车夜视辅助驾驶、个人视觉和智能手机等领域亦具有巨大应用前景。随着硫系玻璃市场需求的不断加大,对其制备技术提出了越来越高的要求,即低成本、大批量和高性能。It is widely used in national defense technology fields such as individual helmet night vision system, gun sight, unmanned vehicle monitoring system and infrared guidance system. With the development of infrared detector technology and cost control, chalcogenide glass thermal imaging systems also have great application prospects in the fields of security, fire protection, temperature measurement, car night vision assisted driving, personal vision and smart phones. As the market demand for chalcogenide glass continues to increase, higher and higher requirements are put forward for its preparation technology, namely low cost, large batch and high performance.
目前,硫系玻璃的制备方法中采用气氛保护熔制技术,在利用安瓿瓶法获得硫系玻璃熟料,在不同时间内顺序完成加料、玻璃形成、澄清、均化和漏料成形等工序,但该方法不能连续生产,生产效率仍然较低,并且浪费原料,提高了成本,得到的玻璃批次稳定性还存在一定的差异。At present, the atmosphere protection melting technology is used in the preparation method of chalcogenide glass, and the chalcogenide glass clinker is obtained by using the ampoule method, and the processes of feeding, glass formation, clarification, homogenization and leakage forming are completed sequentially at different times. However, this method cannot be produced continuously, and the production efficiency is still low, and raw materials are wasted, which increases the cost, and there are still certain differences in the stability of the obtained glass batches.
发明内容Contents of the invention
本发明的主要目的在于,提供一种新型硫系玻璃的制备方法,所要解决的技术问题是使其从原料加料、纯化、玻璃形成、澄清、均化一直到成形的连续生产,不仅改善了硫系玻璃产品的光学均匀性、批次稳定性,而且大幅提高了玻璃产量和生产效率,从而更加适于工程化应用。The main purpose of the present invention is to provide a new preparation method of chalcogenide glass. The technical problem to be solved is to make it continuously produced from raw material feeding, purification, glass formation, clarification, homogenization to forming, not only improving sulfur It not only improves the optical uniformity and batch stability of glass products, but also greatly improves the glass output and production efficiency, making it more suitable for engineering applications.
本发明的目的及解决其技术问题是采用以下技术方案来实现的。依据本发明提出的一种硫系玻璃的制备方法,包括如下步骤:The purpose of the present invention and the solution to its technical problems are achieved by adopting the following technical solutions. A kind of preparation method of chalcogenide glass proposed according to the present invention, comprises the steps:
1)在水含量、氧含量均小于3ppm无水无氧条件下,称量、混合硫系玻璃的原料,并将该混合原料转移至原料纯化-玻璃形成单元,纯化;1) Weighing and mixing raw materials of chalcogenide glass under anhydrous and oxygen-free conditions with water content and oxygen content less than 3ppm, and transferring the mixed raw materials to a raw material purification-glass forming unit for purification;
2)升温至800-900℃,并保温使玻璃原料充分反应形成玻璃熔体,充入保护气体,所述玻璃熔体通过输料管道流向玻璃澄清-均化单元,搅拌后进入玻璃均化-成形单元;2) Raise the temperature to 800-900°C and keep it warm so that the glass raw materials fully react to form a glass melt, which is filled with protective gas. The glass melt flows to the glass clarification-homogenization unit through the feeding pipeline, and enters the glass homogenization-homogenization unit after stirring. forming unit;
3)降温到400-500℃,充分搅拌均匀的玻璃熔体经由底部漏料管流出,得到成形制品;根据最终制品形状和尺寸,对漏料管直径、漏料温度等进行相应调整;3) Cool down to 400-500°C, and the fully stirred and uniform glass melt flows out through the bottom leaking pipe to obtain shaped products; according to the shape and size of the final product, adjust the diameter of the leaking pipe and the temperature of the leaking material;
4)退火,得到硫系玻璃。4) Annealing to obtain chalcogenide glass.
本发明的目的及解决其技术问题还可采用以下技术措施进一步实现。The purpose of the present invention and its technical problems can also be further realized by adopting the following technical measures.
优选的,前述的硫系玻璃的制备方法,其中,步骤1)中所述的玻璃原料纯度高于99.999%,材料粒径2-10mm。Preferably, the aforementioned method for preparing chalcogenide glass, wherein the glass raw material in step 1) has a purity higher than 99.999%, and a material particle size of 2-10mm.
优选的,前述的硫系玻璃的制备方法,其中,步骤1)中所述的混合原料中掺入纯度≥99.999%的除氧剂Al,其掺入量为混合原料总重量的0.05-0.1‰。Preferably, the aforementioned method for preparing chalcogenide glass, wherein, the mixed raw material described in step 1) is mixed with an oxygen scavenger Al with a purity ≥ 99.999%, and its doping amount is 0.05-0.1‰ of the total weight of the mixed raw material .
优选的,前述的硫系玻璃的制备方法,其中,步骤1)中所述的原料纯化真空度小于10-2Pa,加热温度为300-400℃,加热时间5-10h。Preferably, the aforementioned method for preparing chalcogenide glass, wherein the raw material purification vacuum degree in step 1) is less than 10 −2 Pa, the heating temperature is 300-400° C., and the heating time is 5-10 hours.
优选的,前述的硫系玻璃的制备方法,其中,步骤2)中所述的玻璃熔体形成过程在原料纯化-玻璃形成单元完成,其过程为完成原料纯化后,使所述单元温度升到800-900℃,保温时间为10-20h,真空度小于10-2Pa。Preferably, in the aforementioned method for preparing chalcogenide glass, wherein, the glass melt formation process described in step 2) is completed in the raw material purification-glass formation unit, the process is that after the raw material purification is completed, the temperature of the unit is raised to 800-900℃, the holding time is 10-20h, and the vacuum degree is less than 10 -2 Pa.
优选的,前述的硫系玻璃的制备方法,其中,步骤2)中所述玻璃熔体形成后,对所述原料纯化-玻璃形成单元充入保护气体,所述的保护气体为氮气或氦气,其中所述保护气体中的氧含量、水含量小于3ppm。Preferably, the aforementioned method for preparing chalcogenide glass, wherein, after the glass melt is formed in step 2), the raw material purification-glass forming unit is filled with protective gas, and the protective gas is nitrogen or helium , wherein the oxygen content and water content in the protective gas are less than 3ppm.
优选的,前述的硫系玻璃的制备方法,其中,步骤2)中所述的玻璃澄清-均化单元、玻璃均化-成形单元内的压力为0.2-0.3MPa,且二者压力一致。Preferably, in the aforementioned method for preparing chalcogenide glass, the pressure in the glass refining-homogenizing unit and the glass homogenizing-forming unit described in step 2) is 0.2-0.3 MPa, and the pressures of the two are consistent.
优选的,前述的硫系玻璃的制备方法,其中,步骤3)中所述的成形制品形状为条状、板状或曲面形状。Preferably, in the aforementioned method for preparing chalcogenide glass, the shape of the shaped product described in step 3) is a strip shape, a plate shape or a curved surface shape.
优选的,前述的硫系玻璃的制备方法,其中,步骤3)中所述的漏料管下端为微正压的气氛保护。Preferably, in the aforementioned method for preparing chalcogenide glass, the lower end of the leakage tube described in step 3) is protected by a slightly positive pressure atmosphere.
优选的,前述的硫系玻璃的制备方法,其中所述的气氛保护为0.12-0.15MPa的氮气或氦气。Preferably, the aforementioned method for preparing chalcogenide glass, wherein the protective atmosphere is 0.12-0.15 MPa of nitrogen or helium.
借由上述技术方案,本发明硫系玻璃的制备方法至少具有下列优点:By virtue of the above technical solution, the preparation method of chalcogenide glass of the present invention has at least the following advantages:
(1)采用连续式生产方式,产能大幅提高,日生产能力在百公斤以上;(1) The continuous production method is adopted, the production capacity is greatly increased, and the daily production capacity is more than 100 kilograms;
(2)在真空密闭的条件下完成原料纯化和玻璃形成,使高挥发性的玻璃原料与其它原料充分反应形成玻璃熔体,减少了原料的异常挥发;在正压气氛保护条件下,完成玻璃液的澄清、均化和成形,进一步控制了玻璃熔体的挥发,在连续生产状态下,两种措施综合保证了玻璃组成和性能的一致性,提高了批次稳定性,不同批次的折射率差异小于1×10-3;(2) Complete raw material purification and glass formation under vacuum-tight conditions, so that highly volatile glass raw materials can fully react with other raw materials to form a glass melt, reducing abnormal volatilization of raw materials; under positive pressure atmosphere protection conditions, complete glass The clarification, homogenization and forming of the liquid further control the volatilization of the glass melt. In the continuous production state, the two measures comprehensively ensure the consistency of the glass composition and performance, improve the batch stability, and the refraction of different batches The rate difference is less than 1×10 -3 ;
(3)在澄清、均化和漏料成形过程中,利用机械搅拌方式获得更加均匀的玻璃熔体,减少了玻璃条纹、结石等缺陷,保证了玻璃产品的光学均匀性,同一块玻璃的折射率差异小于1×10-4;(3) In the process of clarification, homogenization and leakage forming, mechanical stirring is used to obtain a more uniform glass melt, which reduces defects such as glass streaks and stones, and ensures the optical uniformity of the glass product, and the refraction of the same piece of glass The rate difference is less than 1×10 -4 ;
(4)所述各单元连续生产,避免了石英容器的一次性消耗,生产成本大都降低、效率显著提升。(4) The continuous production of each unit avoids the one-time consumption of the quartz container, the production cost is mostly reduced, and the efficiency is significantly improved.
(5)通过改变模具形状、成形参数等可便捷成型条状、板状以及曲面形式的玻璃毛坯,与精密模压成型技术结合可进一步降低硫系玻璃元件的生产成本。(5) By changing the mold shape, forming parameters, etc., glass blanks in the form of strips, plates, and curved surfaces can be easily formed, and the combination of precision molding technology can further reduce the production cost of chalcogenide glass components.
上述说明仅是本发明技术方案的概述,为了能够更清楚了解本发明的技术手段,并可依照说明书的内容予以实施,以下以本发明的较佳实施例并配合附图详细说明如后。The above description is only an overview of the technical solutions of the present invention. In order to understand the technical means of the present invention more clearly and implement them according to the contents of the description, the preferred embodiments of the present invention and accompanying drawings are described in detail below.
附图说明Description of drawings
图1是本发明连续熔制和漏料成形硫系玻璃的生产工艺流程图。Fig. 1 is a flow chart of the production process of continuous melting and leak forming chalcogenide glass of the present invention.
图2是本发明连续熔制和漏料成型设备装置图。Fig. 2 is a device diagram of the continuous melting and leakage forming equipment of the present invention.
图3是实施例3生产的硫系玻璃的红外光谱测量结果。Fig. 3 is the infrared spectrum measurement result of the chalcogenide glass produced in Example 3.
具体实施方式detailed description
为更进一步阐述本发明为达成预定发明目的所采取的技术手段及功效,以下结合附图及较佳实施例,对依据本发明提出的连续熔制和漏料成形硫系玻璃的制备方法其具体实施方式、结构、特征及其功效,详细说明如后。在下述说明中,不同的“一实施例”或“实施例”指的不一定是同一实施例。此外,一或多个实施例中的特定特征、结构、或特点可以任何方式组合。In order to further explain the technical means and effects of the present invention to achieve the intended purpose of the invention, the following is a detailed description of the preparation method of the continuous melting and leakage forming chalcogenide glass according to the present invention in conjunction with the accompanying drawings and preferred embodiments. Embodiments, structures, features and effects thereof are described in detail below. In the following description, different "one embodiment" or "embodiment" do not necessarily refer to the same embodiment. Furthermore, the particular features, structures, or characteristics of one or more embodiments may be combined in any manner.
如图1所示,本发明的一个实施例提出一种连续熔制和漏料成形硫系玻璃的制备方法,其包括如下步骤:As shown in Fig. 1, one embodiment of the present invention proposes a kind of preparation method of continuous melting and leakage forming chalcogenide glass, which comprises the steps:
1)原料称量:按照设计比例,在无水无氧手套箱内分别称量所需的玻璃原料量,混合形成玻璃配合料。所用玻璃原料纯度高于99.999%,材料粒径2-10mm;称量好的配合料装入石英容器内密封。进一步,在所述玻璃配合料中掺入纯度≥99.999%的除氧剂Al,其掺入量为配合料总重量的0.05-0.1‰;1) Raw material weighing: According to the design ratio, weigh the required amount of glass raw materials in an anhydrous and oxygen-free glove box, and mix them to form a glass batch. The purity of the glass raw material used is higher than 99.999%, and the particle size of the material is 2-10mm; the weighed batch material is put into a quartz container and sealed. Further, an oxygen scavenger Al with a purity ≥ 99.999% is added to the glass batch material, and the doping amount is 0.05-0.1‰ of the total weight of the batch material;
2)原料纯化:将石英容器的上端阀门打开,使所需配合料注入原料纯化及形成单元内,对所述原料纯化及形成单元抽真空并加热,加热温度为330-400℃,真空度为≤1×10-2Pa,纯化时间为5~10h,除去水和氧气;2) Purification of raw materials: Open the valve at the upper end of the quartz container, inject the required batch materials into the raw material purification and formation unit, vacuumize and heat the raw material purification and formation unit, the heating temperature is 330-400°C, and the vacuum degree is ≤1×10 -2 Pa, purification time is 5~10h, remove water and oxygen;
3)玻璃形成:完成原料纯化后,关闭所述原料纯化及合成单元的阀门,保持其内部的真空度,继续升温到玻璃形成温度,该温度范围为800-900℃,保温时间为10-20h,使玻璃配合料充分化合形成玻璃熔体。待玻璃熔体形成后,对所述原料纯化及合成单元充入保护气体,使单元内的压力达到0.2MPa~0.3MPa。保护气体可选用氮气、氦气等,该保护气体中氧含量、水含量均应控制在3ppm以下;3) Glass formation: after the raw material purification is completed, close the valve of the raw material purification and synthesis unit, keep the vacuum inside it, and continue to heat up to the glass formation temperature, the temperature range is 800-900°C, and the holding time is 10-20h , so that the glass batch material is fully combined to form a glass melt. After the glass melt is formed, the raw material purification and synthesis unit is filled with protective gas to make the pressure inside the unit reach 0.2MPa-0.3MPa. The protective gas can be nitrogen, helium, etc., and the oxygen content and water content in the protective gas should be controlled below 3ppm;
4)玻璃澄清:打开所述原料纯化及合成单元与玻璃澄清-均化单元的输料管道,使玻璃熔体流向玻璃澄清均化单元,在澄清均化单元内继续保持玻璃液的高温状态,同时用搅拌器在澄清均化单元的前部对所述玻璃液进行连续搅拌,搅拌好的玻璃液流向后段,并直接进入玻璃均化成形单元;4) Glass clarification: open the feed pipeline of the raw material purification and synthesis unit and the glass clarification-homogenization unit, so that the glass melt flows to the glass clarification homogenization unit, and continue to maintain the high temperature state of the glass liquid in the clarification homogenization unit, At the same time, a stirrer is used to continuously stir the molten glass at the front of the clarifying and homogenizing unit, and the stirred molten glass flows to the rear section and directly enters the glass homogenizing and forming unit;
在800-900℃时原料继续反应,通过搅拌可以排除玻璃熔体的气泡,从而达到玻璃澄清的效果;The raw materials continue to react at 800-900°C, and the bubbles in the glass melt can be eliminated by stirring, so as to achieve the effect of glass clarification;
5)玻璃均化和成形:由玻璃澄清均化单元流入的玻璃液,在玻璃均化成形单元内,逐渐降温到成形温度400-500℃,并经由底部漏料管流出,根据最终制品形状和尺寸,对漏料管直径、漏料温度等进行相应调整;5) Glass homogenization and forming: The molten glass flowing from the glass clarification and homogenization unit gradually cools down to the forming temperature of 400-500°C in the glass homogenization and forming unit, and flows out through the bottom leakage pipe. According to the final product shape and Dimensions, adjust the diameter of leakage pipe, leakage temperature, etc. accordingly;
6)玻璃退火:玻璃熔体成形为规定形状和尺寸后,在链带式传动的隧道式退火炉内进行粗退火,通过梯度降温减少玻璃毛坯炸裂,在隧道式退火炉的末端,经过粗退火后的玻璃毛坯被送入精密退火炉内,进一步完成精密退火。6) Glass annealing: After the glass melt is formed into the specified shape and size, rough annealing is carried out in the tunnel annealing furnace with chain belt transmission, and the glass blank is reduced by gradient cooling. At the end of the tunnel annealing furnace, after rough annealing The final glass blank is sent into the precision annealing furnace for further precision annealing.
连续熔制和漏料成形硫系玻璃的设备装置如图2所示,包括:原料纯化-玻璃形成单元1,玻璃澄清-均化单元2,均化单元3,漏料成型单元4,链带式退火炉5。根据产能需求,所述连续熔炼设备可包含多套原料纯化-玻璃形成单元,在玻璃澄清-均化单元和均化-成形单元均设有石英玻璃搅拌装置,在链带式退火炉前段设有石英玻璃成形模具,且在与硫系玻璃接触面行抛光处理。The equipment for continuous melting and leakage forming of chalcogenide glass is shown in Figure 2, including: raw material purification-glass forming unit 1, glass clarification-homogenization unit 2, homogenization unit 3, leakage forming unit 4, chain belt Type annealing furnace 5. According to production capacity requirements, the continuous smelting equipment may include multiple sets of raw material purification-glass forming units, and quartz glass stirring devices are installed in the glass clarification-homogenization unit and homogenization-forming unit, and the front section of the chain-belt annealing furnace is equipped with Quartz glass forming mold, and polishing treatment on the contact surface with chalcogenide glass.
在玻璃漏料成形过程中,漏料口下端为一个微正压的气氛保护,以防止刚成形的玻璃在高温时与外界的杂质反应,影响玻璃纯度。During the forming process of glass leakage, the lower end of the leakage opening is protected by a slightly positive pressure atmosphere to prevent the newly formed glass from reacting with external impurities at high temperature and affecting the purity of the glass.
实施例1Example 1
本发明的一个实施例提出连续熔制和漏料成形Ge22As20Se58硫系玻璃的制备方法。An embodiment of the present invention proposes a method for preparing Ge 22 As 20 Se 58 chalcogenide glass by continuous melting and leakage forming.
(1)原料称量:在无水无氧环境准备三份总重量为30kg配合料,分别加入三套原料纯化-玻璃形成单元内,所用脱羟石英坩埚外形尺寸为Φ160mm*H400mm*δ5mm;(1) Raw material weighing: Prepare three batches with a total weight of 30kg in an anhydrous and oxygen-free environment, and add them to three sets of raw material purification-glass forming units respectively. The dimensions of the dehydroxylated quartz crucible used are Φ160mm*H400mm*δ5mm;
(2)原料纯化:关闭石英坩埚顶端及底部出料阀门,对石英坩埚抽真空并在其外部进行加热,使坩埚内原料温度达到320℃,真空度小于1×10-2Pa,持续烘烤5小时;(2) Purification of raw materials: close the top and bottom discharge valves of the quartz crucible, vacuumize the quartz crucible and heat it outside, so that the temperature of the raw materials in the crucible reaches 320°C, the vacuum degree is less than 1×10 -2 Pa, and continue to bake 5 hours;
(3)玻璃形成:关闭石英坩埚与外部的阀门,对石英坩埚内的配合料进一步加热,使其达到850℃,并在该温度保温20小时,使玻璃配合料充分化合形成玻璃熔体。待玻璃熔体形成后,对所述原料纯化及合成单元充入高纯氮气,使单元内的压力达到0.23MPa。(3) Glass formation: close the quartz crucible and the external valve, further heat the batch material in the quartz crucible to 850°C, and keep it at this temperature for 20 hours to fully combine the glass batch material to form a glass melt. After the glass melt is formed, the raw material purification and synthesis unit is filled with high-purity nitrogen to make the pressure in the unit reach 0.23MPa.
(4)玻璃澄清:利用电阻加热打开所述原料纯化及合成单元与玻璃澄清-均化单元的输料管道,使玻璃熔体在自身重力作用下流向玻璃澄清-均化单元,在此之前澄清-均化单元内的温度为870℃,压力为0.23MPa,继续保持玻璃液的高温状态,同时用搅拌器在澄清-均化单元的前部对所述玻璃液进行连续搅拌,搅拌好的玻璃液流向后段,并直接进入玻璃均化-成形单元。(4) Glass clarification: Utilize resistance heating to open the feed pipes of the raw material purification and synthesis unit and the glass clarification-homogenization unit, so that the glass melt flows to the glass clarification-homogenization unit under the action of its own gravity, before clarification - The temperature in the homogenization unit is 870°C, the pressure is 0.23MPa, and the high-temperature state of the molten glass is continuously maintained. At the same time, the molten glass is continuously stirred at the front of the clarification-homogenization unit with a stirrer, and the stirred glass The liquid flows to the rear section and directly enters the glass homogenization-forming unit.
(5)玻璃均化和成形:利用电阻加热打开所述玻璃澄清-均化单元与漏料成形单元与的输料管道,玻璃澄清-均化单元后段的的玻璃液利用连通器原理源源不断的流入均化-成形单元内,所述均化-成形单元内的温度设定为430℃±10℃,单元的外形尺寸为Φ130mm*H600mm*δ5mm,并经由底部漏料管流出,漏料管的内径为8mm,成形制品为条状毛坯,尺寸为W40mm×H20mm,长度方向可随意裁切。(5) Glass homogenization and forming: use resistance heating to open the glass clarification-homogenization unit and the leakage forming unit and the material delivery pipeline, and the glass liquid in the rear section of the glass clarification-homogenization unit uses the principle of a connector to continuously flow The flow into the homogenization-forming unit, the temperature in the homogenization-forming unit is set at 430°C±10°C, the external dimensions of the unit are Φ130mm*H600mm*δ5mm, and flow out through the bottom leakage pipe, the leakage pipe The inner diameter of the mold is 8mm, and the formed product is a strip blank, the size is W40mm×H20mm, and the length direction can be cut at will.
(6)玻璃退火:W40mm×H20mm的条状玻璃毛坯,在链带式传动的隧道式退火炉内进行粗退火,链带首段的温度为300℃,末端的温度为200℃,链带总长度为8m,运行速度为1m/h,在链带式退火炉的末端,切割所述条状玻璃毛坯到合适长度,分别送入温度为200℃的精密退火炉内,根据精密退火炉的容积,装满后开启升温程序,1h后精密退火炉升温到290℃,在此温度保温10h后,以5℃/h的降温速率降温到200℃,此后关闭退火炉电源,自然降温到室温,取出毛坯进行后续加工。(6) Glass annealing: the strip glass blank of W40mm×H20mm is roughly annealed in the tunnel annealing furnace driven by the chain belt, the temperature of the first section of the chain belt is 300 ℃, the temperature of the end is 200 ℃, The length is 8m, and the running speed is 1m/h. At the end of the chain-belt annealing furnace, cut the strip-shaped glass blanks to a suitable length, and send them into the precision annealing furnace with a temperature of 200°C. According to the volume of the precision annealing furnace , start the heating program after full, the temperature of the precision annealing furnace will be raised to 290°C after 1h, after holding at this temperature for 10h, cool down to 200°C at a cooling rate of 5°C/h, then turn off the power of the annealing furnace, cool down to room temperature naturally, take out The blank is subjected to subsequent processing.
取其中的一块玻璃40mm×40mm×20mm双面抛光,测试其光学均匀性ΔN为38.9×10-6。One piece of glass 40mm×40mm×20mm was taken and polished on both sides, and its optical uniformity ΔN was tested to be 38.9×10 -6 .
实施例2Example 2
本发明的一个实施例提出连续熔制和漏料成形Ge28Sb12Se60硫系玻璃的制备方法。An embodiment of the present invention proposes a method for preparing Ge 28 Sb 12 Se 60 chalcogenide glass by continuous melting and leakage forming.
(1)原料称量:在无水无氧环境准备三份总重量为30kg配合料,分别加入三套原料纯化-玻璃形成单元内,所用脱羟石英坩埚外形尺寸为Φ160mm*H400mm*δ5mm;(1) Raw material weighing: Prepare three batches with a total weight of 30kg in an anhydrous and oxygen-free environment, and add them to three sets of raw material purification-glass forming units respectively. The dimensions of the dehydroxylated quartz crucible used are Φ160mm*H400mm*δ5mm;
(2)原料纯化:关闭石英坩埚顶端及底部出料阀门,对石英坩埚抽真空并在其外部进行加热,使坩埚内原料温度达到320℃,真空度小于1×10-2Pa,持续烘烤5小时;(2) Purification of raw materials: close the top and bottom discharge valves of the quartz crucible, vacuumize the quartz crucible and heat it outside, so that the temperature of the raw materials in the crucible reaches 320°C, the vacuum degree is less than 1×10 -2 Pa, and continue to bake 5 hours;
(3)玻璃形成:关闭石英坩埚与外部的阀门,对石英坩埚内的配合料进一步加热,使其达到860℃,并在该温度保温20小时,使玻璃配合料充分化合形成玻璃熔体。待玻璃熔体形成后,对所述原料纯化及合成单元充入高纯氮气,使单元内的压力达到0.23MPa。(3) Glass formation: close the quartz crucible and the external valve, further heat the batch material in the quartz crucible to 860°C, and keep it at this temperature for 20 hours to fully combine the glass batch material to form a glass melt. After the glass melt is formed, the raw material purification and synthesis unit is filled with high-purity nitrogen to make the pressure in the unit reach 0.23MPa.
(4)玻璃澄清:利用电阻加热打开所述原料纯化及合成单元与玻璃澄清-均化单元的输料管道,使玻璃熔体在自身重力作用下流向玻璃澄清-均化单元,在此之前澄清-均化单元内的温度为860℃,压力为0.23MPa,继续保持玻璃液的高温状态,同时用搅拌器在澄清-均化单元的前部对所述玻璃液进行连续搅拌,搅拌好的玻璃液流向后段,并直接进入玻璃均化-成形单元。(4) Glass clarification: Utilize resistance heating to open the feed pipes of the raw material purification and synthesis unit and the glass clarification-homogenization unit, so that the glass melt flows to the glass clarification-homogenization unit under the action of its own gravity, before clarification -The temperature in the homogenization unit is 860°C, the pressure is 0.23MPa, continue to maintain the high temperature state of the molten glass, and at the same time use a stirrer to continuously stir the molten glass at the front of the clarification-homogenization unit, and the stirred glass The liquid flows to the rear section and directly enters the glass homogenization-forming unit.
(5)玻璃均化和成形:利用电阻加热打开所述玻璃澄清-均化单元与漏料成形单元与的输料管道,玻璃澄清-均化单元后段的的玻璃液利用连通器原理源源不断的流入均化-成形单元内,所述均化-成形单元内的温度设定为450℃±10℃,单元的外形尺寸为Φ130mm*H600mm*δ5mm,并经由底部漏料管流出,漏料管的内径为10mm,成形制品为圆片状毛坯,尺寸为Φ140mm×H30mm。(5) Glass homogenization and forming: use resistance heating to open the glass clarification-homogenization unit and the leakage forming unit and the material delivery pipeline, and the glass liquid in the rear section of the glass clarification-homogenization unit uses the principle of a connector to continuously flow The flow into the homogenization-forming unit, the temperature in the homogenization-forming unit is set at 450°C±10°C, the external dimensions of the unit are Φ130mm*H600mm*δ5mm, and flow out through the bottom leakage pipe, the leakage pipe The inner diameter is 10mm, and the formed product is a disc-shaped blank with a size of Φ140mm×H30mm.
(6)玻璃退火:Φ140mm×H30mm的圆片状玻璃毛坯,在链带式传动的隧道式退火炉内进行粗退火,链带首段的温度为300℃,末端的温度为200℃,链带总长度为8m,运行速度为1m/h,在链带式退火炉的末端,切割所述条状玻璃毛坯到合适长度,分别送入温度为200℃的精密退火炉内,根据精密退火炉的容积,装满后开启升温程序,1h后精密退火炉升温到295℃,在此温度保温10h后,以5℃/h的降温速率降温到200℃,此后关闭退火炉电源,自然降温到室温,取出毛坯进行后续加工。(6) Glass annealing: Φ140mm×H30mm disc-shaped glass blanks are roughly annealed in a chain-belt-driven tunnel-type annealing furnace. The total length is 8m, and the running speed is 1m/h. At the end of the chain belt type annealing furnace, cut the strip glass blanks to a suitable length, and send them into the precision annealing furnace with a temperature of 200°C. According to the precision annealing furnace After the volume is full, start the heating program. After 1 hour, the precision annealing furnace will heat up to 295°C. After holding at this temperature for 10 hours, it will cool down to 200°C at a cooling rate of 5°C/h. After that, turn off the power of the annealing furnace and cool down to room temperature naturally. Take out the blank for subsequent processing.
随机抽取其中一块圆片,双面抛光后测试光学均匀性ΔN为97.7×10-6。One of the wafers was randomly selected, and the optical uniformity ΔN was tested to be 97.7×10 -6 after double-sided polishing.
实施例3Example 3
本发明的一个实施例提出连续熔制和漏料成形As40Se60硫系玻璃的制备方法,如图2所示装置及工艺布置图。An embodiment of the present invention proposes a method for preparing As 40 Se 60 chalcogenide glass by continuous melting and leakage forming, as shown in FIG. 2 , the device and process layout.
(1)原料称量:在无水无氧环境准备三份总重量为30kg配合料,分别加入三套原料纯化-玻璃形成单元内,所用脱羟石英坩埚外形尺寸为Φ160mm*H400mm*δ5mm;(1) Raw material weighing: Prepare three batches with a total weight of 30kg in an anhydrous and oxygen-free environment, and add them to three sets of raw material purification-glass forming units respectively. The dimensions of the dehydroxylated quartz crucible used are Φ160mm*H400mm*δ5mm;
(2)原料纯化:关闭石英坩埚顶端及底部出料阀门,对石英坩埚抽真空并在其外部进行加热,使坩埚内原料温度达到320℃,真空度小于1×10-2Pa,持续烘烤5小时;(2) Purification of raw materials: close the top and bottom discharge valves of the quartz crucible, vacuumize the quartz crucible and heat it outside, so that the temperature of the raw materials in the crucible reaches 320°C, the vacuum degree is less than 1×10 -2 Pa, and continue to bake 5 hours;
(3)玻璃形成:关闭石英坩埚与外部的阀门,对石英坩埚内的配合料进一步加热,使其达到800℃,并在该温度保温20小时,使玻璃配合料充分化合形成玻璃熔体。待玻璃熔体形成后,对所述原料纯化及合成单元充入高纯氮气,使单元内的压力达到0.23MPa。(3) Glass formation: close the quartz crucible and the external valve, further heat the batch material in the quartz crucible to 800°C, and keep it at this temperature for 20 hours to fully combine the glass batch material to form a glass melt. After the glass melt is formed, the raw material purification and synthesis unit is filled with high-purity nitrogen to make the pressure in the unit reach 0.23 MPa.
(4)玻璃澄清:利用电阻加热打开所述原料纯化及合成单元与玻璃澄清-均化单元的输料管道,使玻璃熔体在自身重力作用下流向玻璃澄清-均化单元,在此之前澄清-均化单元内的温度为820℃,压力为0.23MPa,继续保持玻璃液的高温状态,同时用搅拌器在澄清-均化单元的前部对所述玻璃液进行连续搅拌,搅拌好的玻璃液流向后段,并直接进入玻璃均化-成形单元。(4) Glass clarification: Utilize resistance heating to open the feed pipes of the raw material purification and synthesis unit and the glass clarification-homogenization unit, so that the glass melt flows to the glass clarification-homogenization unit under the action of its own gravity, before clarification -The temperature in the homogenization unit is 820°C, the pressure is 0.23MPa, continue to maintain the high temperature state of the molten glass, and at the same time use a stirrer to continuously stir the molten glass at the front of the clarification-homogenization unit, and the stirred glass The liquid flows to the rear section and directly enters the glass homogenization-forming unit.
(5)玻璃均化和成形:利用电阻加热打开所述玻璃澄清-均化单元与漏料成形单元与的输料管道,玻璃澄清-均化单元后段的的玻璃液利用连通器原理源源不断的流入均化-成形单元内,所述均化-成形单元内的温度设定为360℃±10℃,单元的外形尺寸为Φ130mm*H600mm*δ5mm,并经由底部漏料管流出,漏料管的内径为8mm,玻璃液流进下端的模具内,模具在漏料管下方停留10秒,然后移入压制工序,具有一定温度的阳模自上方压下,保持8秒钟加载后,阳模提起,准备下一组压制。阴模带着模具的硫系玻璃元件进图链带式退火炉内进行退火。(5) Glass homogenization and forming: use resistance heating to open the glass clarification-homogenization unit and the leakage forming unit and the material delivery pipeline, and the glass liquid in the rear section of the glass clarification-homogenization unit uses the principle of a connector to continuously flow The flow into the homogenization-forming unit, the temperature in the homogenization-forming unit is set at 360°C±10°C, the external dimensions of the unit are Φ130mm*H600mm*δ5mm, and flow out through the bottom leakage pipe, the leakage pipe The inner diameter of the glass is 8mm, and the molten glass flows into the mold at the lower end. The mold stays under the leakage pipe for 10 seconds, and then moves into the pressing process. , ready for the next set of suppression. The female mold carries the chalcogenide glass element of the mold into the chain-belt annealing furnace for annealing.
(6)玻璃退火:阴模连同模具内的硫系玻璃毛坯在链带式传动的隧道式退火炉内进行粗退火,链带首段的温度为200℃,末端的温度为50℃,链带总长度为8m,运行速度为1m/h,在链带式退火炉的末端,曲面形状的玻璃毛坯被取出,放置到50℃的精密退火炉内,装满后开启升温程序,4h后精密退火炉升温到190℃,在此温度保温10h后,以3℃/h的降温速率降温到室温,随后取出毛坯进行后续精密加工。(6) Glass annealing: the female mold and the chalcogenide glass blank in the mold are roughly annealed in the tunnel annealing furnace driven by the chain belt. The total length is 8m, and the running speed is 1m/h. At the end of the chain-belt annealing furnace, the curved glass blank is taken out and placed in a precision annealing furnace at 50°C. After it is full, the heating program is started, and it is precision annealed after 4 hours. The furnace is heated to 190°C, and after being kept at this temperature for 10 hours, the temperature is lowered to room temperature at a cooling rate of 3°C/h, and then the blank is taken out for subsequent precision machining.
生产的硫系玻璃的红外光谱测量结果如图3所示。The infrared spectrum measurement results of the produced chalcogenide glasses are shown in Fig. 3.
以上所述,仅是本发明的较佳实施例而已,并非对本发明作任何形式上的限制,依据本发明的技术实质对以上实施例所作的任何简单修改、等同变化与修饰,均仍属于本发明技术方案的范围内。The above are only preferred embodiments of the present invention, and are not intended to limit the present invention in any form. Any simple modifications, equivalent changes and modifications made to the above embodiments according to the technical essence of the present invention still belong to the present invention. within the scope of the technical solution of the invention.
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