CN106112256A - One is based on two beam splitter prisms and scanning galvanometer combinative optical system - Google Patents
One is based on two beam splitter prisms and scanning galvanometer combinative optical system Download PDFInfo
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- CN106112256A CN106112256A CN201610605570.2A CN201610605570A CN106112256A CN 106112256 A CN106112256 A CN 106112256A CN 201610605570 A CN201610605570 A CN 201610605570A CN 106112256 A CN106112256 A CN 106112256A
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- scanning galvanometer
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- 230000003287 optical effect Effects 0.000 title claims abstract description 23
- 230000008859 change Effects 0.000 claims description 20
- 238000009826 distribution Methods 0.000 claims description 3
- 238000012545 processing Methods 0.000 abstract description 20
- 238000013461 design Methods 0.000 abstract description 4
- 238000003754 machining Methods 0.000 abstract description 3
- 238000003466 welding Methods 0.000 description 18
- 238000000034 method Methods 0.000 description 10
- 230000003068 static effect Effects 0.000 description 10
- 230000008569 process Effects 0.000 description 7
- 230000001154 acute effect Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000010146 3D printing Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000010330 laser marking Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000010408 sweeping Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000035800 maturation Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
The invention discloses one based on two beam splitter prisms and scanning galvanometer combinative optical system, including two panels two beam splitter prism, two panels scanning galvanometer and anaberration focus lamp group, two panels two beam splitter prism central axis, two panels galvanometer constitutes basic vibration mirror scanning optical system with anaberration focus lamp group, under or nearly parallel beam incident parallel in axial symmetry, sequentially pass through two panels beam splitter prism beam splitting, two panels scanning galvanometer deflection and anaberration focus lamp group focus on, by changing angle between two panels two beam splitter prism rib, rotate two panels scanning galvanometer rotating shaft, it is capable of on focal plane in certain limit the most single focus, spacing and direction-agile bifocus, single focus scanning figure, the laser galvanometer processing of the several functions such as spacing and direction-agile bifocus scanning patter.Present configuration is novel in design, it is achieved that a kind of optical vibrating mirror system possessing multiple laser processing function, and high degree improves Laser Processing quality and working (machining) efficiency.
Description
Technical field
The present invention relates to field of laser processing, be specially a kind of based on two beam splitter prisms and scanning galvanometer combination optical system
System.
Background technology
Industrial lasers processing industry includes cut, welding, mark, boring, micro Process, cladding, quenching, surface
The each side such as reason, 3D printing, cover the Laser Processing of all kinds of common metal or nonmetallic materials, the most especially with laser welding,
The Laser Processing industry requirement multifarious to laser beam such as mark, 3D printing is more representative.
Laser welding, from initial single focus welding, to double focus welding derivative below, three focus welding etc., purpose
To obtain more preferable welding effect and quality, double focus welding be laser beam after special shaping, focus on out two beam energies
Hot spot identical, of the same size, is respectively symmetrically the technology mode being processed on weld seam both sides, and three focus welding are typically
On the basis of double focus welding, introduce another focus to be welded or welding after weld seam carry out pretreatment or post processing.
Progressively maturation and the every profession and trade different process demand to Laser Processing, laser welding along with Laser Processing industry
In not only have spot welding, have also appeared c-type weldering such as, the multiple welding procedures such as line style is welded, S type weldering, its objective is to improve welding quality
While, also to improve attractive in appearance, the multifarious welding procedure of these classes, it is far from being enough for only operating by lathe, and galvanometer is swept
Retouch system, the high speed characteristics advantage of wedge-shaped mirrors scanning system is embodied most vividly in this respect.
Vibration mirror scanning optical system, being divided into two classes, a class is prefocusing sweeping scheme, another kind of, focuses on such as f mirror after being
Group sweeping scheme, prefocusing scanning advantage be focus on beam quality constant, and eyeglass or mirror packet size less, by special
Lens combination can also realize 3-D scanning laser processing application, and focal length is the longest, and focus lamp does not move then that swept-focus is not
Coplanar；Rear focusing scans such as f mirror prescription case, and number of lenses is many and overall dimensions is relatively big, is advantageous in that in scanning process focusing Jiao
Point, at same plane, is particularly suited for two-dimensional scan processed and applied.The most any vibration mirror scanning mode, is adjusted by algorithm
Scanning galvanometer rotating speed and direction of rotation, it is possible to achieve a range of arbitrary graphic scans, and this is not only in laser welding
All kinds of process conditions can be met, laser marking is also taken the course of its own.Especially, along with emerging 3D printing technique arrives, high
Speed vibration mirror scanning has embodied the advantage in its application and glamour.
But, along with the development increasingly of laser processing technology, it is thus achieved that the Laser Processing of higher efficiency is trend of the times, such as
Laser welding, laser marking, 3D print, and single focus galvanometer scanning system limits due to choice of electrical machine, in high speed or even ultrahigh speed
On the most limited, and mechanical assembly factor impact, for the motor of scanning galvanometer in high-speed rotation, same easily occur
Superheating phenomenon, precision reduces along with the increase of rotating speed, and for adapting to the vibration mirror scanning application of higher-wattage laser, motor speed
Lifting more limited, this affects scanning galvanometer performance advantage largely.
Summary of the invention
It is an object of the invention to provide a kind of based on two beam splitter prisms and scanning galvanometer combinative optical system, on solving
State the problem proposed in background technology.
For achieving the above object, the present invention provides following technical scheme: one is based on two beam splitter prisms and scanning galvanometer group
Close optical system, including the one or two beam splitter prism, the two or two beam splitter prism, the first scanning galvanometer, the second scanning galvanometer and the picture that disappears
Difference focus lamp group, described one or two beam splitter prism, described two or two beam splitter prism central axis, described first scanning galvanometer,
Second scanning galvanometer and anaberration focus lamp group constitute vibration mirror scanning optical system.
Preferably, described one or two beam splitter prism, described two or two beam splitter prism corner angle are identical, are convexo-plane beam splitting rib
Mirror.
Preferably, described first scanning galvanometer, described second scanning galvanometer beam deflection angle are change angle.
Preferably, described anaberration focus lamp group is coquille combination.
Preferably, described one or two beam splitter prism incident beam uses the parallel or nearly directional light of axial symmetry hot spot distribution.
Compared with prior art, the invention has the beneficial effects as follows: present configuration is novel in design, by using two beam splitting ribs
Mirror combines with scanning galvanometer, based on two beam splitter prism splitting properties and rib angle characteristic, based on vibration mirror scanning characteristic, it is achieved that one
Planting the optical vibrating mirror system possessing multiple laser processing function, especially all kinds of laser in single focus, single focus scanning figure should
Use, it is provided that the bifocus application of synchronous processing simultaneously, high degree improves Laser Processing quality and working (machining) efficiency.
Accompanying drawing explanation
Fig. 1 is the optical system lens structure schematic diagram of the present invention；
Fig. 2 is the two beam splitter prism structural representations of the present invention；
Fig. 3 is embodiments of the invention one optic path schematic diagrams；
Fig. 4 is embodiments of the invention two optic path schematic diagrams.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Describe, it is clear that described embodiment is only a part of embodiment of the present invention rather than whole embodiments wholely.Based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under not making creative work premise
Embodiment, broadly falls into the scope of protection of the invention.
Referring to Fig. 1-3, the present embodiment provides a kind of technical scheme: one combines with scanning galvanometer based on two beam splitter prisms
Optical system, including the one or two beam splitter prism the 1, the 2nd 2 beam splitter prism the 2, first scanning galvanometer the 3, second scanning galvanometer 4 with disappear
Aberration focus lamp group the 5, the 1st beam splitter prism 1, described two or two beam splitter prism 2 central axis, placement direction is that rib is relative
Or rib is in opposite directions；One or two beam splitter prism the 1, the 2nd 2 beam splitter prism 2 corner angle are identical, are convexo-plane beam splitter prism；First scanning
Galvanometer the 3, second scanning galvanometer 4 beam deflection angle is change angle, it is achieved the light beam reflection on two verticals, anaberration focuses on
Mirror group 5 can be coquille group, it is also possible to select aspherical mirror or mirror group, wherein first scanning galvanometer the 3, second scanning galvanometer 4
Most basic 2-D vibration mirror scanning optics is constituted with anaberration focus lamp group 5.
In the present embodiment, also include that incident beam 6, incident beam 6 use the collimated light beam that axial symmetry hot spot is distributed, just enter
Penetrating down, incident beam 6 is divided into the collimated light beam dissipated again after two bundles converge, two bundle collimated light beams through the one or two beam splitter prism 1
A segment distance after convergence, forms, through the two or two beam splitter prism 2, the two-beam that is parallel to each other, now the one or two beam splitter prism 1, the
Beam splitting rib between two or two beam splitter prisms 2 is parallel to each other, the light beam after the one or two beam splitter prism the 1, the 2nd 2 beam splitter prism 2
It is partial to via first scanning galvanometer the 3, second scanning galvanometer 4 again, is finally focused on by anaberration focus lamp group 5, focus on and deposit on focal plane
At a focal beam spot, and there is the solid focusing section of one section of certain length near focal point.
When other eyeglasses are motionless, it is corresponding that first scanning galvanometer the 3, second scanning galvanometer 4 rotates it with given angle value respectively
First rotating shaft the 7, second rotating shaft 8 is static after arriving respective direction position, it is achieved that single point focus in focusing surface certain limit.
When other eyeglasses are motionless, first scanning galvanometer the 3, second scanning galvanometer 4 is respectively with given real-time rotating speed and direction
When rotating the first rotating shaft 7, the second rotating shaft 8 continuously, focus on focal plane and form the scanning track of corresponding demand, it is achieved that scanning galvanometer list
Focus scanning.
When first scanning galvanometer the 3, second scanning galvanometer 4 rotates its corresponding first rotating shaft 7, second with given angle value respectively
Rotating shaft 8 to static behind relevant position, the rib of the one or two beam splitter prism the 1, the 2nd 2 beam splitter prism 2 relative to original state respectively and
Only allow to reversely rotate equivalent low-angle, it is possible to obtain corresponding spacing and line are parallel to the one or two beam splitter prism the 1, the 2nd 2 point
The bifocus of acute bisectrix between beam prism 2 rib, between the one or two beam splitter prism the 1, the 2nd 2 beam splitter prism 2 rib, corner dimension changes
Become, it is possible to achieve single focus to bifocus and the change of bifocus spacing, by by the one or two beam splitter prism 1 after adjustment,
The unified rotating Vortex of two or two beam splitter prism 2 is arbitrarily angled rear static, can change the direction of two focal beam spots, it is achieved that focus on
In the certain limit of face, two point focuses on.
When first scanning galvanometer the 3, second scanning galvanometer 4 rotates first turn continuously with given real-time rotating speed and direction respectively
When axle 7, the second rotating shaft 8, the rib of the one or two beam splitter prism the 1, the 2nd 2 beam splitter prism 2 allows respectively and only relative to original state
Reversely rotate equivalent low-angle, it is possible to obtain corresponding spacing and line are parallel to the one or two beam splitter prism the 1, the 2nd 2 beam splitter prism
The bifocus scanning of acute bisectrix between 2 ribs, between the one or two beam splitter prism the 1, the 2nd 2 beam splitter prism 2 rib, corner dimension changes
Become, it is possible to achieve single focus to bifocal change and the change of bifocus spacing, by the one or two beam splitting after adjusting
The unified rotating Vortex of prism the 1, the 2nd 2 beam splitter prism 2 is arbitrarily angled rear static, can change the direction of two focal beam spots, it is achieved
Scanning galvanometer bifocus scans.
In scanning process, after when between the rib of the one or two beam splitter prism the 1, the 2nd 2 beam splitter prism 2, angle is adjusted and static,
The Laser Processing of bifocus scanning patter, in arbitrary process, bifocal spacing is consistent, and line direction is constant, and do not interfere with and
Change scanning galvanometer self scanning required acquisition paper size size.
Referring to Fig. 4, the present embodiment provides a kind of equivalent with embodiment one splitting properties and is applicable to 3D vibration mirror scanning
Technical scheme: include the three or two beam splitter prism the 9, the 4th 2 beam splitter prism 10, negative focus lens or mirror group 11, positive focus lens or mirror group
12, first scanning galvanometer the 3, second scanning galvanometer the 4, the 3rd 2 beam splitter prism 9 is plano-concave shape, and the four or two beam splitter prism 10 is plano-convex
Shape, the three or two beam splitter prism the 9, the 4th 2 beam splitter prism 10 corner angle sum is 180 °, placement direction be rib relatively or rib in opposite directions, negative
Focus lens or mirror group 11, positive focus lens or mirror group 12 can be spherical surface type, it is also possible to for aspheric surface face type, both combine formation
Focusing combination, by mobile one of which eyeglass or mirror group, it is possible to achieve the change in focused spot three-dimensional, wherein, the three or two
Beam splitter prism the 9, the 4th 2 beam splitter prism 10, negative focus lens or mirror group 11, positive focus lens or mirror group 12 are circular eyeglass, eyeglass
Central coaxial, first scanning galvanometer the 3, second scanning galvanometer 4 beam deflection angle is change angle, it is achieved the light on two verticals
Bundle reflection.
In the present embodiment, also include that incident beam 6, incident beam 6 use the collimated light beam that axial symmetry hot spot is distributed, just enter
Penetrating down, incident beam 6 is divided into the collimated light beam of two misconvergences of beams through the three or two beam splitter prism 9, the collimated light beam warp of directional divergence
Cross the four or two beam splitter prism 10 and form the two-beam that is parallel to each other, now the three or two beam splitter prism the 9, the 4th 2 beam splitter prism 10 it
Between beam splitting rib be parallel to each other, the light beam after the three or two beam splitter prism the 9, the 4th 2 beam splitter prism 10 is again via negative focus lens
Or mirror group 11, positive focus lens or mirror group 12 combined focus, finally it is partial to by first scanning galvanometer the 3, second scanning galvanometer 4, focuses on
There is a focal beam spot on focal plane, and near focal point exists the solid focusing section of one section of certain length.
When other eyeglasses are motionless, it is corresponding that first scanning galvanometer the 3, second scanning galvanometer 4 rotates it with given angle value respectively
First rotating shaft the 7, second rotating shaft 8 is static after arriving respective direction position, it is achieved that single point focus in focusing surface certain limit.
When other eyeglasses are motionless, first scanning galvanometer the 3, second scanning galvanometer 4 is respectively with given real-time rotating speed and direction
During continuous rotation the first rotating shaft 7, the second rotating shaft 8, by the most mobile negative focus lens or mirror group 11, or move positive focus lens or mirror
Group 12, it is thus achieved that focused spot coplanar compensation, forms the scanning track of corresponding demand, it is achieved that scanning galvanometer list focus scanning.
When first scanning galvanometer the 3, second scanning galvanometer 4 rotates its corresponding first rotating shaft 7, second with given angle value respectively
Rotating shaft 8 is to static behind relevant position, and the rib of the three or two beam splitter prism the 9, the 4th 2 beam splitter prism 10 is relative to original state respectively
And only allow to reversely rotate equivalent low-angle, it is possible to obtain corresponding spacing and line are parallel to the three or two beam splitter prism the 9, the 4th 2
The bifocus of acute bisectrix between beam splitter prism 10 rib, corner dimension between the three or two beam splitter prism the 9, the 4th 2 beam splitter prism 10 rib
Change, it is possible to achieve single focus to bifocus and the change of bifocus spacing, by by the three or two beam splitting rib after adjustment
The unified rotating Vortex of mirror the 9, the 4th 2 beam splitter prism 10 is arbitrarily angled rear static, can change the direction of two focal beam spots, it is achieved
In focusing surface certain limit, two point focuses on.
When first scanning galvanometer the 3, second scanning galvanometer 4 rotates first turn continuously with given real-time rotating speed and direction respectively
When axle 7, the second rotating shaft 8, the rib of the three or two beam splitter prism the 9, the 4th 2 beam splitter prism 10 is distinguished and the most fair relative to original state
Permitted to reversely rotate equivalent low-angle, it is possible to obtain corresponding spacing and line are parallel to the three or two beam splitter prism the 9, the 4th 2 beam splitting rib
The bifocus scanning of acute bisectrix, corner dimension between the three or two beam splitter prism the 9, the 4th 2 beam splitter prism 10 rib between mirror 10 rib
Change, it is possible to achieve single focus to bifocal change and the change of bifocus spacing, by the three or two point after adjusting
The unified rotating Vortex of beam prism the 9, the 4th 2 beam splitter prism 10 is arbitrarily angled rear static, can change the direction of two focal beam spots,
Simultaneously by the most mobile negative focus lens or mirror group 11, or move positive focus lens or mirror group 12, it is thus achieved that focused spot coplanar compensation,
Realize the scanning of scanning galvanometer bifocus.
During, after when between the rib of the three or two beam splitter prism the 9, the 4th 2 beam splitter prism 10, angle is adjusted and static, double
The Laser Processing of focus scanning figure, in arbitrary process, bifocal spacing is consistent, and line direction is constant, and does not interferes with and change
Become scanning galvanometer self scanning required acquisition paper size size.
During, by mobile negative focus lens or mirror group 11, or move positive focus lens or mirror group 12, be possible not only to realize Jiao
Focus in plane compensates, it is also possible to realizes the focal length on three-dimensional and compensates.
In two kinds of embodiments, the spin step of each eyeglass is also not limited to the foregoing description, two panels two beam splitter prism rotate with
On the basis of optical axis, i.e. rotate around optical axis, according to the laser instrument of different wave length, corresponding optical treatment need to be carried out, obtain axle pair
Claim the collimated light beam of hot spot distribution or nearly collimated light beam.It addition, all lens shape, size and mirror spacing, placement direction root
Determining according to design, do not limited by structural representation, lens materials and plated film are with laser wavelength as foundation.
Present configuration is novel in design, by using two beam splitter prisms to combine with scanning galvanometer, divides based on two beam splitter prisms
Bundle characteristic and rib angle characteristic, based on vibration mirror scanning characteristic, it is achieved that a kind of optical vibrating mirror possessing multiple laser processing function
System, the especially all kinds of laser in single focus, single focus scanning figure are applied, it is provided that bifocus synchronous processing simultaneously should
With, high degree improves Laser Processing quality and working (machining) efficiency.
Although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, permissible
Understand and these embodiments can be carried out multiple change without departing from the principles and spirit of the present invention, revise, replace
And modification, the scope of the present invention be defined by the appended.
Claims (5)
1. one kind based on two beam splitter prisms and scanning galvanometer combinative optical system, it is characterised in that: include the one or two beam splitter prism,
Two or two beam splitter prism, the first scanning galvanometer, the second scanning galvanometer and anaberration focus lamp group, described one or two beam splitter prism,
Described two or two beam splitter prism central axis, described first scanning galvanometer, the second scanning galvanometer and anaberration focus lamp group structure
Become vibration mirror scanning optical system.
One the most according to claim 1 is based on two beam splitter prisms and scanning galvanometer combinative optical system, it is characterised in that:
Described one or two beam splitter prism, described two or two beam splitter prism corner angle are identical, are convexo-plane beam splitter prism.
One the most according to claim 1 is based on two beam splitter prisms and scanning galvanometer combinative optical system, it is characterised in that:
Described first scanning galvanometer, described second scanning galvanometer beam deflection angle are change angle.
One the most according to claim 1 is based on two beam splitter prisms and scanning galvanometer combinative optical system, it is characterised in that:
Described anaberration focus lamp group is coquille combination.
One the most according to claim 1 is based on two beam splitter prisms and scanning galvanometer combinative optical system, it is characterised in that:
Described one or two beam splitter prism incident beam uses the parallel or nearly directional light of axial symmetry hot spot distribution.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610605570.2A CN106112256A (en) | 2016-07-28 | 2016-07-28 | One is based on two beam splitter prisms and scanning galvanometer combinative optical system |
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| CN201610605570.2A CN106112256A (en) | 2016-07-28 | 2016-07-28 | One is based on two beam splitter prisms and scanning galvanometer combinative optical system |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107091810A (en) * | 2017-03-21 | 2017-08-25 | 合肥工业大学 | A kind of rotary optical chromatographic imaging system and imaging method based on linear array detector |
| CN108663733A (en) * | 2018-06-28 | 2018-10-16 | 鹤山市嘉米基光电科技有限公司 | Amici prism |
| WO2021226732A1 (en) * | 2020-05-12 | 2021-11-18 | 济南森峰科技有限公司 | Laser processing equipment having rotating mirror |
| CN119268594A (en) * | 2024-10-30 | 2025-01-07 | 嘉强(上海)智能科技股份公司 | 3D scanning device and 3D imaging system |
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| CN205817077U (en) * | 2016-07-28 | 2016-12-21 | 上海嘉强自动化技术有限公司 | One is based on two beam splitter prisms and scanning galvanometer combinative optical system |
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| US6207925B1 (en) * | 1996-10-11 | 2001-03-27 | Brian Andrew Kendall | Apparatus for cutting and/or welding flexible packaging |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107091810A (en) * | 2017-03-21 | 2017-08-25 | 合肥工业大学 | A kind of rotary optical chromatographic imaging system and imaging method based on linear array detector |
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| CN108663733A (en) * | 2018-06-28 | 2018-10-16 | 鹤山市嘉米基光电科技有限公司 | Amici prism |
| WO2021226732A1 (en) * | 2020-05-12 | 2021-11-18 | 济南森峰科技有限公司 | Laser processing equipment having rotating mirror |
| CN119268594A (en) * | 2024-10-30 | 2025-01-07 | 嘉强(上海)智能科技股份公司 | 3D scanning device and 3D imaging system |
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Application publication date: 20161116 |
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| RJ01 | Rejection of invention patent application after publication |