CN106102296B - Plasma surface processing device - Google Patents
Plasma surface processing device Download PDFInfo
- Publication number
- CN106102296B CN106102296B CN201610639035.9A CN201610639035A CN106102296B CN 106102296 B CN106102296 B CN 106102296B CN 201610639035 A CN201610639035 A CN 201610639035A CN 106102296 B CN106102296 B CN 106102296B
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- Prior art keywords
- inclined plane
- metalwork
- plasma
- processing device
- insulator
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Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32807—Construction (includes replacing parts of the apparatus)
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
Abstract
The present invention relates to a kind of plasma surface processing device, including housing, plasma nozzle, swivel neck, insulator, drive mechanism, ionization mechanism, metalwork and electrode, power output shaft, insulator and the ionization mechanism of the drive mechanism are respectively hollow structure, the metalwork is arranged in the hollow structure of insulator, the metalwork is hollow loop configuration, the electrode is arranged at the middle vacancy of metalwork, the metalwork is provided with more than two steam vents, and the surface of the hole wall of the steam vent is obliquely installed towards plasma nozzle direction.The plasma surface processing device of the present invention have the advantages that to make spraying effect evenly, noise is smaller, effective reduce is lost and reduced cost.
Description
Technical field
The present invention relates to plasma apparatus, more particularly to a kind of plasma surface processing device.
Background technology
Plasma, also known as plasma state.Material under plasma state has the property similar to gaseous material, than
Such as good mobility and diffusivity.But, because the basic constituent particle of plasma is particle and electronics, therefore it also has
There is many to be different from gaseous property, such as good electric conductivity, thermal conductivity.So the application of plasma is widely.With
The continuous progress of technology, the field of plasma rotation pipette tips application is also widely, including printing packaging industry, digital industry
With automobile industry etc., so the use of plasma gun is also more and more.
There is following defect in existing plasma rotation pipette tips：There is the device of fixed static in swivel head endoporus, exist
Easily the problems such as driving failure.Consume is reduced in order to optimize structure, new-type plasma rotary spray gun has been engendered on the market,
Wherein most representative with structure disclosed in Chinese patent application (201510014168.2), the structure directly utilizes the sky of motor
Heart axle drives the plasma pipette tips rotation, and power supply connection electrode produces plasma, and tracheae is blown into interior in-core, by plasma
Sprayed out of the plasma pipette tips of rotation torticollis nozzle.Torticollis nozzle refer to the rotation central axis lines of spray passage and plasma pipette tips into
Certain angle, can expand the ejection area of the plasma of ejection, but be due to its rotating speed it is low cause spraying effect uneven and
Also there is noise big, the problems such as easily generating heat.
The content of the invention
The technical problems to be solved by the invention are：There is provided that a kind of spraying effect is uniform and plasma of effectively reduction noise
Surface processing device.
In order to solve the above-mentioned technical problem, the technical solution adopted by the present invention is：
A kind of plasma surface processing device, including housing, plasma nozzle, swivel neck, insulator, drive mechanism, electricity
Disembark structure, metalwork and electrode, power output shaft, insulator and the ionization mechanism of the drive mechanism are respectively hollow structure,
One end of the swivel neck is arranged on the power output shaft of the drive mechanism, and the plasma nozzle is arranged at the rotation
The other end of neck, one end of the ionization mechanism passes through the middle vacancy of the power output shaft of the drive mechanism and is sheathed on described
In the hollow structure of the power output shaft of drive mechanism, the other end of the ionization mechanism is fixed on the housing, described exhausted
One end of edge body is arranged on one end of the ionization mechanism, and the other end of the insulator is arranged at power by the swivel neck
One end on output shaft is stretched into inside the swivel neck；
The metalwork is arranged in the hollow structure of insulator, and the metalwork is hollow loop configuration, the electricity
Pole is arranged at the middle vacancy of metalwork, and the metalwork is provided with more than two steam vents, the table of the hole wall of the steam vent
Face plasma nozzle direction to be obliquely installed, the surface of the hole wall of the steam vent includes first successively towards plasma nozzle direction
Inclined plane and the second inclined plane, the first inclined plane and the second inclined plane connection, first inclined plane and the second inclined plane
At least one in respectively plane or arc surface, first inclined plane and the second inclined plane is arc surface, the plane
Angle of inclination is 40-85 °, and the radian of the arc surface is 45-70 °.
The beneficial effects of the present invention are：
(1) plasma surface processing device of the invention, by the power output shaft, insulator and ionization of the drive mechanism
Mechanism is set to hollow structure, and connection electrode and the setting on metalwork on metalwork, metalwork are then set in insulator
Inclined steam vent, the surface of the hole wall of steam vent includes the first inclined plane and the second inclined plane, and is tilted by above-mentioned first
Face and the design of the second inclined plane so that can be by rotary rowed via the first inclined plane and the second inclined plane by the gas of insulator
Go out, the gas of discharge is rotated, rotating speed can be increased, and high rotating speed can bring high adhesion effect, in spraying, make spraying
Effect is evenly and noise is smaller, meanwhile, motor increase rotating speed also is set without going through another, loss and heat, drop is effectively reduced
Low cost；
(2) the first inclined plane of design and the second inclined plane are respectively plane or arc surface, and the first inclined plane and second tilt
At least one in face is arc surface, and the angle of inclination of plane is 40-85 °, and the radian of arc surface is 45-70 °, can cause row
Go out the rotary speed aggravation of gas generation.
Brief description of the drawings
Fig. 1 is the structure decomposition figure of the plasma surface processing device of the embodiment of the present invention；
Fig. 2 is the three-dimensional structure diagram of the plasma surface processing device of the embodiment of the present invention；
Fig. 3 is the STRUCTURE DECOMPOSITION of the insulator, metalwork and electrode of the plasma surface processing device of the embodiment of the present invention
Figure；
Fig. 4 is the stereochemical structure of the insulator, metalwork and electrode of the plasma surface processing device of the embodiment of the present invention
Figure；
Fig. 5 is the structure chart of the metalwork of the plasma surface processing device of the embodiment of the present invention.
Label declaration：
1st, housing；11st, fixed plate；2nd, plasma nozzle；3rd, swivel neck；4th, insulator；5th, drive mechanism；6th, machine is ionized
Structure；7th, metalwork；71st, steam vent；711st, the first inclined plane；712nd, the second inclined plane；8th, electrode；9th, heat-conducting plate.
Embodiment
To describe technology contents, the objects and the effects of the present invention in detail, below in conjunction with embodiment and coordinate attached
Figure is explained.
The design of most critical of the present invention is：Metalwork is set up, inclined steam vent, the hole of steam vent are set in metalwork
The first inclined plane and the second inclined plane of said structure are designed in the surface of wall, rotate the gas of discharge.
It refer to Fig. 1, Fig. 2, Fig. 3, Fig. 4 and Fig. 5, a kind of plasma surface processing device, including housing 1, plasma
Nozzle 2, swivel neck 3, insulator 4, drive mechanism 5, ionization mechanism 6, metalwork 7 and electrode 8, the power of the drive mechanism 5
Output shaft, insulator 4 and ionization mechanism 6 are respectively hollow structure, and one end of the swivel neck 3 is arranged at the drive mechanism 5
Power output shaft on, the plasma nozzle 2 is arranged at the other end of the swivel neck 3, and one end of the ionization mechanism 6 is worn
Cross the middle vacancy of the power output shaft of the drive mechanism 5 and be sheathed on the hollow knot of the power output shaft of the drive mechanism 5
In structure, the other end of the ionization mechanism 6 is fixed on the housing 1, and one end of the insulator 4 is arranged at the ionization machine
On one end of structure 6, the rotation is stretched into one end that the other end of the insulator 4 is arranged at by the swivel neck on power output shaft
Turn inside neck 3；
The metalwork 7 is arranged in the hollow structure of insulator 4, and the metalwork 7 is hollow loop configuration, described
Electrode 8 is arranged at the middle vacancy of metalwork 7, and the metalwork 7 is provided with more than two steam vents 71, the steam vent 71
The surface of hole wall is obliquely installed towards the direction of plasma nozzle 2, and the surface of the hole wall of the steam vent 71 is towards the direction of plasma nozzle 2
Include the first inclined plane 711 and the second inclined plane 712 successively, the inclined plane 712 of the first inclined plane 711 and second is connected, institute
It is respectively plane or arc surface to state the first inclined plane 711 and the second inclined plane 712, and first inclined plane 711 and second is tilted
At least one in face 712 is arc surface, and the angle of inclination of the plane is 40-85 °, and the radian of the arc surface is 45-
70°。
It was found from foregoing description, the beneficial effects of the present invention are：
(1) plasma surface processing device of the invention, by the power output shaft, insulator and ionization of the drive mechanism
Mechanism is set to hollow structure, and connection electrode and the setting on metalwork on metalwork, metalwork are then set in insulator
Inclined steam vent, the surface of the hole wall of steam vent includes the first inclined plane and the second inclined plane, and is tilted by above-mentioned first
Face and the design of the second inclined plane so that can be by rotary rowed via the first inclined plane and the second inclined plane by the gas of insulator
Go out, the gas of discharge is rotated, rotating speed can be increased, and high rotating speed can bring high adhesion effect, in spraying, make spraying
Effect is evenly and noise is smaller, meanwhile, motor increase rotating speed also is set without going through another, loss and heat, drop is effectively reduced
Low cost；
(2) the first inclined plane of design and the second inclined plane are respectively plane or arc surface, and the first inclined plane and second tilt
At least one in face is arc surface, and the angle of inclination of plane is 40-85 °, and the radian of arc surface is 45-70 °, can cause row
Go out the rotary speed aggravation of gas generation.
Further, first inclined plane 711 is identical with the incline direction difference of the second inclined plane 712, and described first
Inclined plane 711 is identical with the angle of inclination difference of the second inclined plane 712.
It can be seen from foregoing description, it is preferred that said structure design can be used, with the rotation for discharge gas generation
The technique effect of rotary speed aggravation.
Further, the inclined plane 712 of the first inclined plane 711 and second is respectively arc surface, described the of arc surface
S-shaped is formed after one inclined plane 711 and the connection of the second inclined plane 712.
It can be seen from foregoing description, it is preferred that can use said structure design, the inclined plane of S-shaped can further make
The rotary speed aggravation of gas generation must be discharged.
Further, first inclined plane 711 is arc surface, and second inclined plane 712 is plane, the plane
Angle of inclination is 50-80 °, and the radian of the arc surface is 60-70 °.
It can be seen from foregoing description, it is preferred that said structure design can be used, it may have further such that discharge gas
The technique effect of the rotary speed aggravation of generation.
Further, the steam vent 71 is arranged at the marginal position of the metalwork 7 of loop configuration.
It can be seen from foregoing description, it is preferred that the steam vent 71 is arranged at the edge of the metalwork 7 of loop configuration
Position.
Further, in addition to fixed plate 11, the other end of the ionization mechanism 6 is fixed in fixed plate 11, the shell
Body 1 is hollow structure, and the fixed plate 11 is fixed on housing 1.
It can be seen from foregoing description, it is preferred that above-mentioned fixed plate can be designed and realize that the stabilization of ionization mechanism and housing connects
Connect.
Further, in addition to heat-conducting plate 9, the heat-conducting plate 9, which is fitted, is arranged at the surface of drive mechanism 5.
It can be seen from foregoing description, it is preferred that the heat that the above-mentioned heat-conducting plate of design can produce drive mechanism is good
Conduct, heat-conducting plate plays a part of fixed and radiated.
Further, the drive mechanism 5 is magnetomotive drive mechanism.
It can be seen from foregoing description, it is preferred that drive mechanism can select magnetomotive drive mechanism.
Further, in addition to oxide layer, the oxide layer is arranged at the outer surface of drive mechanism 5.
It can be seen from foregoing description, it is preferred that oxide layer can be set in the outer surface of drive mechanism 5, oxide layer is hard material
Material, can lift the hardness of drive mechanism, make its more scratch resistant.
Further, the material of the insulator is ceramics.
It can be seen from foregoing description, it is preferred that the material of the insulator is ceramics.
Fig. 1-5 are refer to, embodiments of the invention one are：
A kind of plasma surface processing device of the present embodiment, including housing 1, plasma nozzle 2, swivel neck 3, insulator
4th, drive mechanism 5, ionization mechanism 6, metalwork 7 and electrode 8, power output shaft, insulator 4 and the ionization of the drive mechanism 5
Mechanism 6 is respectively hollow structure, and one end of the swivel neck 3 is arranged on the power output shaft of the drive mechanism 5, described etc.
Iron nozzle 2 is arranged at the other end of the swivel neck 3, and one end of the ionization mechanism 6 passes through the power of the drive mechanism 5
The middle vacancy of output shaft is simultaneously sheathed in the hollow structure of the power output shaft of the drive mechanism 5, described to ionize the another of mechanism 6
One end is fixed on the housing 1, and one end of the insulator 4 is arranged on one end of the ionization mechanism 6, the insulator
One end that 4 other end is arranged at by the swivel neck on power output shaft is stretched into inside the swivel neck 3；The metalwork 7
In the hollow structure for being arranged at insulator 4, the metalwork 7 is hollow loop configuration, and the electrode 8 is arranged at metalwork 7
Middle vacancy, the metalwork 7 is provided with more than two steam vents 71, and the surface of the hole wall of the steam vent 71 is towards plasma
The direction of nozzle 2 is obliquely installed, and the surface of the hole wall of the steam vent 71 includes the first inclined plane successively towards the direction of plasma nozzle 2
711 and second inclined plane 712, the inclined plane 712 of the first inclined plane 711 and second is connected, first inclined plane 711 and
Two inclined planes 712 are respectively plane or arc surface, and at least one in the inclined plane 712 of the first inclined plane 711 and second is
Arc surface, the angle of inclination of the plane is 40-85 °, and the radian of the arc surface is 45-70 °.First inclined plane 711
It is identical with the incline direction difference of the second inclined plane 712, the angle of inclination of the inclined plane 712 of the first inclined plane 711 and second
It is identical respectively.First inclined plane 711 is arc surface, and second inclined plane 712 is plane, the angle of inclination of the plane
For 50-80 °, the radian of the arc surface is 60-70 °.The steam vent 71 is arranged at the side of the metalwork 7 of loop configuration
Edge position.Also include fixed plate 11, the other end of the ionization mechanism 6 is fixed in fixed plate 11, and the housing 1 is hollow knot
Structure, the fixed plate 11 is fixed on housing 1.Also include heat-conducting plate 9, the heat-conducting plate 9, which is fitted, is arranged at the table of drive mechanism 5
Face.The drive mechanism 5 is magnetomotive drive mechanism.Also include oxide layer, the oxide layer is arranged at the appearance of drive mechanism 5
Face.The material of the insulator is ceramics.In said structure, the connection of each part can use the side of simplest threaded connection
Formula.For example, the middle vacancy of the metalwork 7 is offered opens up external screw thread on internal thread, the electrode 8, by internal thread and outside
The cooperation of screw thread, the electrode 8 is screwed onto the middle vacancy of metalwork 7.
In summary, the plasma surface processing device that provides of the present invention have make spraying effect evenly, noise it is smaller,
Effectively reduce loss and reduce the advantage of cost.
Embodiments of the invention are the foregoing is only, are not intended to limit the scope of the invention, it is every to utilize this hair
The equivalents that bright specification and accompanying drawing content are made, or the technical field of correlation is directly or indirectly used in, similarly include
In the scope of patent protection of the present invention.
Claims (8)
1. a kind of plasma surface processing device, it is characterised in that including housing, plasma nozzle, swivel neck, insulator, drive
Motivation structure, ionization mechanism, metalwork and electrode, power output shaft, insulator and the ionization mechanism of the drive mechanism are respectively
Hollow structure, one end of the swivel neck is arranged on the power output shaft of the drive mechanism, and the plasma nozzle is set
In the other end of the swivel neck, one end of the ionization mechanism passes through the middle vacancy of the power output shaft of the drive mechanism simultaneously
In the hollow structure for being sheathed on the power output shaft of the drive mechanism, the other end of the ionization mechanism is fixed on the housing
On, one end of the insulator is arranged on one end of the ionization mechanism, and the other end of the insulator is by the swivel neck
The one end being arranged on power output shaft is stretched into inside the swivel neck；
The metalwork is arranged in the hollow structure of insulator, and the metalwork is hollow loop configuration, and the electrode is set
The middle vacancy of metalwork is placed in, the metalwork is provided with more than two steam vents, the surface court of the hole wall of the steam vent
Plasma nozzle direction is obliquely installed, and the surface of the hole wall of the steam vent includes first towards plasma nozzle direction and tilted successively
Face and the second inclined plane, the first inclined plane and the second inclined plane connection, the first inclined plane and the second inclined plane difference
For plane or arc surface,
At least one in first inclined plane and the second inclined plane is arc surface, and the angle of inclination of the plane is 40-
85 °, the radian of the arc surface is 45-70 °；
Or, first inclined plane and the second inclined plane are respectively arc surface, first inclined plane of arc surface and second
S-shaped is formed after inclined plane connection.
2. plasma surface processing device according to claim 1, it is characterised in that first inclined plane is circular arc
Face, second inclined plane is plane, and the angle of inclination of the plane is 50-80 °, and the radian of the arc surface is 60-70 °.
3. plasma surface processing device according to claim 1, it is characterised in that the steam vent is arranged at ring junction
The marginal position of the metalwork of structure.
4. plasma surface processing device according to claim 1, it is characterised in that also including fixed plate, the ionization
The other end of mechanism is fixed in fixed plate, and the housing is hollow structure, and the fixed plate is fixed on housing.
5. plasma surface processing device according to claim 1, it is characterised in that also including heat-conducting plate, the heat conduction
Plate, which is fitted, is arranged at the surface of drive mechanism.
6. plasma surface processing device according to claim 1, it is characterised in that the drive mechanism is driven for magnetomotive
Motivation structure.
7. plasma surface processing device according to claim 1, it is characterised in that also including oxide layer, the oxidation
Layer is arranged at the outer surface of drive mechanism.
8. plasma surface processing device according to claim 1, it is characterised in that the material of the insulator is pottery
Porcelain.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610639035.9A CN106102296B (en) | 2016-08-04 | 2016-08-04 | Plasma surface processing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610639035.9A CN106102296B (en) | 2016-08-04 | 2016-08-04 | Plasma surface processing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106102296A CN106102296A (en) | 2016-11-09 |
| CN106102296B true CN106102296B (en) | 2017-09-29 |
Family
ID=57454027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610639035.9A Active CN106102296B (en) | 2016-08-04 | 2016-08-04 | Plasma surface processing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106102296B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5170033A (en) * | 1990-04-24 | 1992-12-08 | Hypertherm, Inc. | Swirl ring and flow control process for a plasma arc torch |
| CN2847791Y (en) * | 2005-12-08 | 2006-12-13 | 周国清 | Screw insulation sleeve of plasma cutting torch |
| CN201119113Y (en) * | 2007-10-26 | 2008-09-17 | 姚志旭 | Rotary spraying plasm surface processing device |
| CN101631416A (en) * | 2009-07-30 | 2010-01-20 | 任兆杏 | Device for processing air plasma jet large area surface |
| CN104640339A (en) * | 2015-01-12 | 2015-05-20 | 广东韦达尔科技有限公司 | Plasma surface treatment device |
| CN205160896U (en) * | 2015-11-17 | 2016-04-13 | 蔡卫 | Rotary -type nozzle is used to plasma gun |
-
2016
- 2016-08-04 CN CN201610639035.9A patent/CN106102296B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5170033A (en) * | 1990-04-24 | 1992-12-08 | Hypertherm, Inc. | Swirl ring and flow control process for a plasma arc torch |
| CN2847791Y (en) * | 2005-12-08 | 2006-12-13 | 周国清 | Screw insulation sleeve of plasma cutting torch |
| CN201119113Y (en) * | 2007-10-26 | 2008-09-17 | 姚志旭 | Rotary spraying plasm surface processing device |
| CN101631416A (en) * | 2009-07-30 | 2010-01-20 | 任兆杏 | Device for processing air plasma jet large area surface |
| CN104640339A (en) * | 2015-01-12 | 2015-05-20 | 广东韦达尔科技有限公司 | Plasma surface treatment device |
| CN205160896U (en) * | 2015-11-17 | 2016-04-13 | 蔡卫 | Rotary -type nozzle is used to plasma gun |
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| Publication number | Publication date |
|---|---|
| CN106102296A (en) | 2016-11-09 |
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