CN106099629B - A kind of method that ultra-wide angular range inhibits the spontaneous amplification radiation of slab laser - Google Patents
A kind of method that ultra-wide angular range inhibits the spontaneous amplification radiation of slab laser Download PDFInfo
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- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
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Abstract
本发明涉及一种超宽角度范围抑制板条激光器自发放大辐射的方法，具体为：在激光增益介质和金属热沉之间使用一个金属/介质宽带吸收膜来抑制自发放大辐射。金属/介质宽带吸收膜包括两部分，靠近激光增益介质部分是一层微米级厚度SiO2倏逝波薄膜，以保证信号激光全反射传输，在SiO2倏逝波薄膜之上镀制一种宽角度减反射高吸收金属/介质薄膜，使其能够在0°~全反射角°的超宽角度范围内，吸收穿透SiO2倏逝波薄膜的杂散激光，来抑制自发放大辐射。本发明可以根据实际的需求设计波长，在激光器领域有广阔的应用前景，可以从原理上解决限制激光器功率增大的因素，具有较高的可制备性，便于推广，为高功率固体激光器中ASE抑制问题提供一个全新的解决方案。
The invention relates to a method for suppressing spontaneously emitted large radiation of a slab laser with an ultra-wide angle range, specifically: a metal/medium broadband absorption film is used between a laser gain medium and a metal heat sink to suppress spontaneously emitted large radiation. The metal/dielectric broadband absorption film consists of two parts. The part close to the laser gain medium is a layer of SiO 2 evanescent wave film with a thickness of micron to ensure the total reflection transmission of the signal laser. A wide Angular anti-reflection and high absorption metal/dielectric thin film enables it to absorb stray laser light penetrating through the SiO 2 evanescent wave thin film within an ultra-wide angle range of 0°~total reflection angle°, so as to suppress spontaneous emission of large radiation. The invention can design the wavelength according to actual needs, has broad application prospects in the field of lasers, can solve the factors that limit the increase of laser power in principle, has high manufacturability, and is easy to popularize. The suppression problem offers a completely new solution.
Description
技术领域technical field
本发明涉及光学薄膜，尤其涉及一种超宽角度范围抑制板条激光增益介质中自发放大辐射（ASE）的技术方法。The invention relates to an optical thin film, in particular to a technical method for suppressing spontaneously enlarged radiation (ASE) in a slab laser gain medium with an ultra-wide angle range.
背景技术Background technique
20世纪以来，大功率激光器在激光聚变、国防军事、工业生产、医疗器械、空间通信和航天技术等方面发挥着相当重要的作用。其中板条激光器由于其优良的转化效率及光束质量特性成为目前固体激光器中研究最热门的激光器。之前的研究表明泵浦均匀性、温度均匀性以及自发辐射放大（ASE）效应是限制激光器输出能量和光束质量优劣的主要因素。其中泵浦均匀性及温度均匀性这两个限制性因素从最初激光器的构型设计上很好地控制，但ASE效应在激光放大中始终存在且角度范围大。这就意味着要研究大功率的板条激光器必须在激光增益介质中大角度范围内抑制ASE效应。ASE效应本质上主要由板条激光器中的杂散光引起，所以理论上将杂散光吸收就能有效的抑制。大部分学者采用将板条激光器增益介质侧面镀制减反膜等方法来抑制ASE，这种方法仅可以抑制板条激光器增益介质中0-33°左右的杂散光，没有很好的抑制效果。以YAG增益介质为例，使用上述的方法，从33°至全反射角53°之间的ASE都没有办法处理。随着板条激光器的功率需求的提高，对ASE的抑制提出了新的挑战，需要对板条激光增益介质0°-全反射角°范围内的杂散光全吸收。因此发明一种超宽角度抑制板条激光增益介质中自发放大辐射（ASE）的技术方法，对于提高板条激光器中的输出能量，研制大功率固体激光器具有重要意义。Since the 20th century, high-power lasers have played a very important role in laser fusion, national defense and military, industrial production, medical equipment, space communication and aerospace technology. Among them, the slab laser has become the most popular laser among solid-state lasers due to its excellent conversion efficiency and beam quality characteristics. Previous studies have shown that pump uniformity, temperature uniformity, and amplification of spontaneous emission (ASE) effects are the main factors that limit the laser output energy and beam quality. Among them, the two limiting factors, pump uniformity and temperature uniformity, are well controlled from the initial configuration design of the laser, but the ASE effect always exists in the laser amplification and the angle range is large. This means that to study high-power slab lasers, the ASE effect must be suppressed in a large angle range in the laser gain medium. The ASE effect is essentially caused by the stray light in the slab laser, so theoretically absorbing the stray light can be effectively suppressed. Most scholars suppress ASE by coating the side of the gain medium of the slab laser with an anti-reflection coating. This method can only suppress stray light around 0-33° in the gain medium of the slab laser, but has no good suppression effect. Taking the YAG gain medium as an example, using the above method, there is no way to deal with the ASE between 33° and 53° total reflection angle. With the increase of the power requirement of the slab laser, new challenges are put forward for the suppression of ASE, which requires the total absorption of the stray light in the range of 0°-total reflection angle° of the slab laser gain medium. Therefore, inventing a technical method for suppressing spontaneous emission (ASE) in the slab laser gain medium with an ultra-wide angle is of great significance for improving the output energy of the slab laser and developing high-power solid-state lasers.
为此本发明提出一种超宽角度范围抑制板条激光增益介质中自发放大辐射（ASE）的技术方法:在激光增益介质和金属热沉之间使用一个金属/介质宽带吸收膜来抑制ASE的方法。这个金属/介质宽带吸收膜包括两部分，靠近激光增益介质是一层SiO2倏逝波薄膜保证信号激光全反射传输，在SiO2倏逝波薄膜之上镀制一种宽角度减反射高吸收金属/介质薄膜，使其能够在0°~全反射角°的超宽角度范围内吸收穿透SiO2倏逝波薄膜的杂散激光来抑制自发放大辐射。For this reason, the present invention proposes a technical method for suppressing spontaneously enlarged emission (ASE) in the slab laser gain medium with an ultra-wide angle range: a metal/medium broadband absorption film is used between the laser gain medium and the metal heat sink to suppress the ASE method. This metal/dielectric broadband absorption film consists of two parts. Near the laser gain medium is a layer of SiO 2 evanescent wave film to ensure the total reflection transmission of the signal laser. A wide-angle anti-reflection and high absorption film is coated on the SiO 2 evanescent wave film. The metal/dielectric film enables it to absorb the stray laser light penetrating the SiO 2 evanescent wave film in the ultra-wide angle range of 0°~total reflection angle° to suppress the spontaneous emission of large radiation.
发明内容Contents of the invention
本发明的目的在于提供一种超宽角度范围抑制板条激光增益介质中自发放大辐射（ASE）的技术方法，它能在大角度范围内吸收板条激光器中的杂散光，并针对主激光实现全反射，良好地实现板条激光器中ASE效应的抑制。本发明方法可以根据实际的需求设计波长，在激光器领域有广阔的应用前景，从原理上解决了限制激光器功率的因素，具有较高的可制备性，便于推广。The purpose of the present invention is to provide a technical method for suppressing spontaneously expanded emission (ASE) in the slab laser gain medium with an ultra-wide angle range, which can absorb the stray light in the slab laser within a large angle range, and realize it for the main laser Total reflection, good for ASE effect suppression in slab lasers. The method of the invention can design wavelengths according to actual needs, has broad application prospects in the field of lasers, solves the factors that limit the power of lasers in principle, has high manufacturability, and is easy to popularize.
本发明提出的一种超宽角度范围抑制板条激光器自发放大辐射的方法，具体步骤如下：The invention proposes a method for suppressing the spontaneous emission of large radiation from a slab laser with an ultra-wide angle range. The specific steps are as follows:
选择板条激光器；在板条激光器的激光增益介质和金属热沉之间采用物理气相沉积方式设置微米级厚度的以SiO2薄膜为原料的倏逝波薄膜和金属/介质宽带吸收薄膜；靠近板条激光器的激光增益介质一侧镀制一层微米级厚度的倏逝波薄膜，所述倏逝波薄膜用以保证信号激光全反射传输，在倏逝波薄膜之上镀制一层金属/介质宽带吸收薄膜，使其能够在0°~全反射角°的超宽角度范围内，吸收穿透倏逝波薄膜的杂散激光，来抑制自发放大辐射。Select the slab laser; between the laser gain medium of the slab laser and the metal heat sink, the evanescent wave film and the metal/dielectric broadband absorption film with micron - scale thickness are set by physical vapor deposition; close to the plate The side of the laser gain medium of the bar laser is coated with a micron-scale evanescent wave film, which is used to ensure the total reflection and transmission of the signal laser, and a layer of metal/dielectric is plated on the evanescent wave film The broadband absorbing film enables it to absorb the stray laser light penetrating the evanescent wave film in the ultra-wide angle range of 0°~total reflection angle°, so as to suppress the spontaneous emission of large radiation.
本发明中，金属/介质宽带吸收膜的膜系光谱可以用常规的光学监控或晶振监控轻易实现。In the present invention, the film spectrum of the metal/dielectric broadband absorption film can be easily realized by conventional optical monitoring or crystal oscillator monitoring.
本发明中，所述板条激光器是固体激光器，增益介质为固体，增益介质可以是红宝石、钕玻璃、半导体中任一种，所述半导体包括掺钕钒酸钆单晶、掺钕钒酸钇或YAG等中任一种。In the present invention, the slab laser is a solid-state laser, the gain medium is solid, and the gain medium can be any one of ruby, neodymium glass, and semiconductor, and the semiconductor includes neodymium-doped gadolinium vanadate single crystal, neodymium-doped yttrium vanadate Or any of YAG etc.
本发明中，金属/介质宽带吸收薄膜中的金属可以是Cr、Ag或Al等中的任一种或者几种，介质可以是SiO2、Al2O3、MgF2、TiO2或Ta2O5等中的任一种。In the present invention, the metal in the metal/dielectric broadband absorption film can be any one or several of Cr, Ag or Al, etc., and the medium can be SiO 2 , Al 2 O 3 , MgF 2 , TiO 2 or Ta 2 O Any of 5 etc.
本发明中，所述金属/介质宽带吸收薄膜对入射光的角度不敏感，具有宽波长、大角度吸收特性。In the present invention, the metal/dielectric broadband absorption film is not sensitive to the angle of incident light, and has broad wavelength and large angle absorption characteristics.
本发明中，金属/介质宽带吸收薄膜的膜系设计波长可以根据板条激光器设备的特点及需求任意选取。In the present invention, the design wavelength of the film system of the metal/dielectric broadband absorbing film can be arbitrarily selected according to the characteristics and requirements of the slab laser equipment.
本发明的有益效果在于：可以根据板条激光器的特点和需求任意设计薄膜，同时金属/介质宽带吸收膜设计简单，可以用常规的光学监控或晶振监控轻易实现。在激光器领域有广阔的应用前景，可以从原理上解决限制激光器功率增大的因素，具有较高的可制备性，便于推广。The beneficial effect of the invention is that the thin film can be arbitrarily designed according to the characteristics and requirements of the slab laser, and the design of the metal/dielectric broadband absorption film is simple, which can be easily realized by conventional optical monitoring or crystal oscillator monitoring. It has broad application prospects in the field of lasers, can solve the factors that limit the increase of laser power in principle, has high manufacturability, and is easy to popularize.
附图说明Description of drawings
图1：金属/介质宽带吸收膜结构示意图。Figure 1: Schematic diagram of the metal/dielectric broadband absorbing film structure.
图2：针对1064nm的YAG板条激光器的宽带吸收膜的角谱曲线，设计波长为1064nm。Figure 2: The angular spectrum curve of the broadband absorbing film for the YAG slab laser at 1064nm, the design wavelength is 1064nm.
图3：针对1064nm的YAG板条激光器的Cr/SiO2宽带吸收膜的理论和实测角谱。Figure 3: Theoretical and measured angular spectra of a Cr/ SiO2 broadband absorber film for a YAG slab laser at 1064 nm.
图4：针对1053nm的钕玻璃板条激光器的宽带吸收膜的角谱曲线，设计波长为1053nm。Figure 4: Angular spectrum of a broadband absorbing film for a Nd-glass slab laser at 1053nm, with a design wavelength of 1053nm.
具体实施方式Detailed ways
下面通过具体实施例对本发明作进一步详细说明。The present invention will be described in further detail below through specific examples.
实施例1：Example 1:
针对1064nm的YAG板条激光器需要制备1064nm抑制ASE效应的金属/介质宽带吸收膜，由于其膜系应用在板条激光器上，对1064nm的杂散光吸收要求极其严格。为此，在激光增益介质和金属热沉之间使用一个Cr/ SiO2宽带吸收膜代替传统的只使用SiO2倏逝波薄膜来抑制ASE。这个Cr/ SiO2宽带吸收膜包括两部分，靠近激光增益介质是一层SiO2倏逝波薄膜保证信号激光全反射，在SiO2倏逝波薄膜之上镀制一种宽角度减反射高吸收Cr/ SiO2薄膜，使其能够在0°~55°的超宽角度范围内吸收穿透SiO2倏逝波薄膜的杂散激光来抑制自发放大辐射。通过此种方法，成功在OPTORUN生产的配备反射式间接监控镀膜设备OTFC-1300上面制备出抑制1064nmYAG板条激光器ASE效应的宽带吸收膜。由于该Cr/ SiO2宽带吸收膜应用在板条激光器上，直接测量其角谱吸收效果比较困难，所以我们测量光从空气中入射到石英基板上到样品的角谱，其设计角谱和实测角谱如图3所示。结果表明设计与实验测量角度一致，同时实际的激光系统测试表明板条激光器中ASE得到了良好的抑制效果。For the 1064nm YAG slab laser, it is necessary to prepare a metal/dielectric broadband absorption film that suppresses the ASE effect at 1064nm. Since its film system is applied to the slab laser, the requirements for stray light absorption at 1064nm are extremely strict. To this end, a Cr/SiO 2 broadband absorbing film is used between the laser gain medium and the metal heat sink instead of the traditional SiO 2 evanescent wave thin film to suppress ASE. This Cr/SiO 2 broadband absorbing film consists of two parts. Near the laser gain medium is a layer of SiO 2 evanescent wave film to ensure the total reflection of the signal laser. A wide-angle anti-reflection and high absorption film is coated on the SiO 2 evanescent wave film. The Cr/SiO 2 film enables it to absorb the stray laser light penetrating the SiO 2 evanescent wave film in an ultra-wide angle range of 0°~55° to suppress the spontaneous emission of large radiation. Through this method, a broadband absorbing film that suppresses the ASE effect of the 1064nm YAG slab laser was successfully prepared on the reflective indirect monitoring coating equipment OTFC-1300 produced by OPTORUN. Since the Cr/SiO 2 broadband absorption film is applied to the slab laser, it is difficult to directly measure the absorption effect of its angular spectrum, so we measure the angular spectrum of the light from the air incident on the quartz substrate to the sample, and the designed angular spectrum and the measured angle The spectrum is shown in Figure 3. The results show that the design is consistent with the experimental measurement angle, and the actual laser system test shows that the ASE in the slab laser has a good suppression effect.
本发明所述的金属/介质宽带吸收膜的光谱，以图2所示光谱为例，以YAG增益介质为例，针对1064nm的设计波长，其主要特征有2个：在0°-全反射角°（55°）光谱实现了大角度吸收，平均吸收大于90%，且在0-44°角度范围内光谱平均吸收大于95%，实现了针对1064nm的杂散光的高吸收，当入射光超过全反射角时，光谱反射率高达100%。本发明的光谱保证了板条激光器中的主激光全反射，并且实现了金属介质宽带吸收膜的抑制ASE的效果。The spectrum of the metal/dielectric broadband absorbing film described in the present invention, taking the spectrum shown in Figure 2 as an example, taking the YAG gain medium as an example, for the design wavelength of 1064nm, its main features have two: at 0°-total reflection angle °(55°) spectrum achieves large-angle absorption, the average absorption is greater than 90%, and the average spectral absorption is greater than 95% within the angle range of 0-44°, achieving high absorption for stray light at 1064nm, when the incident light exceeds the full At the reflection angle, the spectral reflectance is as high as 100%. The spectrum of the invention ensures the total reflection of the main laser in the slab laser, and realizes the ASE suppression effect of the metal medium broadband absorption film.
实施例2：Example 2:
针对1053nm的钕玻璃板条激光器需要制备1053nm抑制ASE效应的金属/介质宽带吸收膜，由于其膜系应用在板条激光器上，对1053nm的杂散光吸收要求极其严格。为此，在激光增益介质和金属热沉之间使用一个Ni/Al/SiO2宽带吸收膜代替传统的只使用SiO2倏逝波薄膜来抑制ASE。这个Ni/Al/ SiO2宽带吸收膜包括两部分，靠近激光增益介质是一层SiO2倏逝波薄膜保证信号激光全反射，在SiO2倏逝波薄膜之上镀制一种宽角度减反射高吸收Ni/Al/ SiO2薄膜，使其能够在0°~74°的超宽角度范围内吸收穿透SiO2倏逝波薄膜的杂散激光来抑制自发放大辐射，其设计角谱如图4所示。For the 1053nm neodymium glass slab laser, it is necessary to prepare a metal/dielectric broadband absorption film at 1053nm to suppress the ASE effect. Since the film system is applied to the slab laser, the requirements for stray light absorption at 1053nm are extremely strict. To this end, a Ni/Al/SiO 2 broadband absorbing film is used between the laser gain medium and the metal heat sink instead of the conventional SiO 2 evanescent wave thin film to suppress ASE. This Ni/Al/SiO 2 broadband absorbing film consists of two parts. Near the laser gain medium is a layer of SiO 2 evanescent wave film to ensure the total reflection of the signal laser. A wide-angle anti-reflection film is coated on the SiO 2 evanescent wave film. The high-absorption Ni/Al/SiO 2 film enables it to absorb the stray laser that penetrates the SiO 2 evanescent wave film in the ultra-wide angle range of 0°~74° to suppress the spontaneous emission of large radiation. The design angle spectrum is shown in the figure 4.
本发明所述的金属/介质宽带吸收膜的光谱，以图4所示光谱为例，以钕玻璃增益介质为例，针对1053nm的设计波长，其主要特征有2个：在0°-全反射角°（74°）光谱实现了大角度吸收，平均吸收大于90%，实现了针对1053nm的杂散光的高吸收，当入射光超过全反射角时，光谱反射率高达100%。本发明的光谱保证了板条激光器中的主激光全反射，并且实现了金属介质宽带吸收膜的抑制ASE的效果。The spectrum of the metal/dielectric broadband absorbing film described in the present invention, taking the spectrum shown in Figure 4 as an example, taking the neodymium glass gain medium as an example, for the design wavelength of 1053nm, its main features have two: at 0°-total reflection The angle ° (74°) spectrum achieves large-angle absorption, the average absorption is greater than 90%, and achieves high absorption for stray light at 1053nm. When the incident light exceeds the total reflection angle, the spectral reflectance is as high as 100%. The spectrum of the invention ensures the total reflection of the main laser in the slab laser, and realizes the ASE suppression effect of the metal medium broadband absorption film.
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