CN106054542B - Welding resistance independence aligning platform frame and exposure machine - Google Patents
Welding resistance independence aligning platform frame and exposure machine Download PDFInfo
- Publication number
- CN106054542B CN106054542B CN201610590681.0A CN201610590681A CN106054542B CN 106054542 B CN106054542 B CN 106054542B CN 201610590681 A CN201610590681 A CN 201610590681A CN 106054542 B CN106054542 B CN 106054542B
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- frame
- leave
- office
- pallet
- stage
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7096—Arrangement, mounting, housing, environment, cleaning or maintenance of apparatus
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electrophotography Configuration And Component (AREA)
Abstract
The present invention provides a kind of welding resistance independence aligning platform frame and exposure machine, this frame includes appear on the stage frame and leave from office frame, the appear on the stage rear end of frame and the leave from office frame is hinged and front end can be opened and closed, the leave from office frame two opposite sides are provided with opener, leave from office frame bottom sets fixed support, and the fixed support is linked with leave from office frame, pallet is provided with the middle of leave from office frame, pallet with respect to leave from office frame constitute X to, Y-direction displacement coordinates, and cooperation is sealed by seal between pallet and leave from office frame, be provided for below pallet driving pallet along X to or Y-direction move or angular deflection displacement drive, the bottom of displacement drive is fixedly installed on fixed support, pallet front bottom end is provided for the flexible PIN nails for driving exposure base to carry out position skew adjustment, frame and the leave from office frame of appearing on the stage is provided with Vacuuming structure, the present invention can independently adjust the position of wiring board, it ensure that the wiring board Adjustment precision of each frame, improve the exposure accuracy of exposure machine.
Description
Technical field
The present invention relates to PCB (printed circuit board (PCB)) plate manufacturing technology field, more particularly to a kind of welding resistance independence aligning platform
Frame and exposure machine.
Background technology
The board of general exposure machine in order to expose the demand in positioning, except comprising to drive plate to be exposed along X axles with
Beyond the horizontal drive mechanism of Y direction of principal axis displacements, one group of Z axles driving to drive plate lifting displacement to be exposed further comprises
Mechanism, and conventional mechanism configuration mode is typically that horizontal drive mechanism is arranged in Z axle drive mechanisms, when the driving of Z axles
During mechanism start, horizontal drive mechanism can be also driven to lift displacement in the lump, however, the defect of such mechanism configuration is, by
The weight of horizontal drive mechanism is also carried in Z axles drive mechanism, accordingly, it would be desirable to the motor of larger torsion is set, moreover, Z axis
The running speed of drive mechanism also due to many weight of horizontal drive mechanism and be lowered, easily influence production capacity.
Simultaneously currently in order to improving production efficiency, it uses dual stage mount structure, and the displacement drive of corresponding Z axis driving
Device is only one, and it needs to carry out rising adjustment when any one frame is exited, and the displacement drive dress of single Z-direction
Put, then contraposition may be caused not accurate.Two groups of exposure desk frames share one group of positioning mechanism, increase board installation difficulty, are difficult
Realize that two platform frames align the uniformity of effect.
The content of the invention
In order to overcome the technical deficiency of the above, the present invention provides a kind of welding resistance independence aligning platform frame and exposure machine.
The present invention provides a kind of welding resistance independence aligning platform frame, including appear on the stage frame and leave from office frame, it is described appear on the stage frame and it is described under
The rear end of platform frame is hinged and front end can be opened and closed, and the leave from office frame two opposite sides are provided with opener, the leave from office frame bottom
Fixed support is set, and the fixed support is linked with leave from office frame, and pallet is provided with the middle of the leave from office frame, the pallet is relative
Leave from office frame constitutes X and coordinated to, Y-direction displacement, and is sealed and coordinate by seal between the pallet and leave from office frame, under the pallet
Side be provided for driving pallet along X to or Y-direction move or angular deflection displacement drive, the bottom of the displacement drive
Portion is fixedly installed on fixed support, and the pallet front bottom end is provided for driving exposure base to carry out position skew adjustment
Flexible PIN nails, it is described to appear on the stage frame and leave from office frame is provided with Vacuuming structure.
The circumferentially disposed inflatable pneumatic mattress of pallet, the inflatable pneumatic mattress is connected with Vacuuming structure.
The opener is provided with a control cylinder and a jointed shaft, and the control cylinder and jointed shaft are set in front and rear
Put, the front end of the control cylinder is hinged on the leave from office frame, the control cylinder, which is provided with, can make above and below corresponding jointed shaft
The stretches push rod of swing, the rear end of the stretches push rod is connected to the middle part of corresponding jointed shaft, the rear end hinge of the jointed shaft
It is connected on the leave from office frame, is arranged with the inside of the jointed shaft outside the chute from front end extension to the back-end, the frame of appearing on the stage
Side is provided with the connector that stretches into and can be moved when the jointed shaft is swung up and down in the chute and along the chute.
The hinged place for appearing on the stage frame and leave from office frame is provided with locating part, and the locating part is arranged on leave from office frame including two groups
Vertically symmetrical setting stopper slot, the stopper slot is elongated, and corresponding setting spacing block set, described on the frame of appearing on the stage
Spacing block set is placed between two stopper slots, and is coordinated with being slid above and below stopper slot composition.
Described appear on the stage sets several detent mechanisms between frame and leave from office frame.
The detent mechanism include the roller positioning module that is arranged on leave from office frame and being arranged on appear on the stage on frame can be right
The locating piece on the roller positioning module should be inserted in.
The flexible PIN nails include cylinder；
Travel(l)ing rest, the travel(l)ing rest is configured can be by cylinder driving relative to the leave from office frame displacement；
PIN needle, is arranged on the travel(l)ing rest and driven can be arranged in wiring board, and drive the wiring board with the work
Dynamic support is relative to the leave from office frame displacement.
Elastic component is provided between the PIN needle and travel(l)ing rest.
The displacement drive is that UVW is fixed with pallet to the mobile dish of bit platform and connected to bit platform, and the UVW
Connect.
A kind of exposure machine using above-mentioned welding resistance independence aligning platform frame, it includes exposure machine body, the exposure machine body
Inside it is provided with two above-mentioned welding resistance independence aligning platform frames.
The beneficial effects of the invention are as follows：By the way that displacement drive is directly integrated in into platform inframe, driven without installing Z axis
Dynamic displacement drive, greatly simplify whole exposure machine structure, while each frame can independently adjust wiring board
Position, ensure that the wiring board Adjustment precision of each frame, improve the exposure accuracy of exposure machine.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention.
Fig. 2 is the structural representation of bottom internal of the present invention.
Fig. 3 is the close-up schematic view of the hinged place of the present invention.
Fig. 4 is the structural representation of the opener of the present invention.
Fig. 5 is the cooperation schematic diagram of the detent mechanism of the present invention.
Fig. 6 is the structural representation of the pallet of the present invention.
Fig. 7 is the structural representation of the flexible PIN nails of the present invention.
Fig. 8 is the plan view of leave from office frame.
Fig. 9 is the enlarged diagram at A in Fig. 8.
Embodiment
Embodiments of the present invention is further illustrated below in conjunction with the accompanying drawings：
As illustrated, the present invention provides a kind of welding resistance independence aligning platform frame, including appear on the stage frame 6 and leave from office frame 1, it is described to appear on the stage
Frame is provided with glass plate, and provided with Vacuuming structure, for adsorbing the film, the rear end phase of appear on the stage frame 6 and the leave from office frame 1
Mutually it is hinged and front end can be opened and closed, the two opposite sides of leave from office frame 1 are provided with opener 8, the bottom of leave from office frame 1 sets fixed branch
Frame 2, and the fixed support 2 is linked with leave from office frame, i.e., fixed support is fixed as one with leave from office frame, can be simultaneously along exposure
Track movement on machine, respectively sets multiple sliding components in the both sides of fixed support 2, slides and coordinate with the slide rail of exposure machine, it is described under
It is provided with pallet 5 in the middle of platform frame 1, the pallet 5 constitutes X with respect to leave from office frame 1 and coordinated to, Y-direction displacement, and the pallet 5 is with leaving office
Sealed and coordinated by seal 9 between frame 1, the lower section of the pallet 5 be provided for driving pallet 5 along X to or Y-direction move or angle
The displacement drive 10 of deflection, the bottom of the displacement drive 10 is fixedly installed on fixed support 2, the pallet 5
Front bottom end is provided for the flexible PIN nails 11 for driving exposure base to carry out position skew adjustment, frame and the leave from office frame of appearing on the stage
Provided with Vacuuming structure, that is, appear on the stage frame and the circumferentially disposed multiple holes of leave from office frame, for vacuumizing.
The center of leave from office frame 1 is groove, the pallet is placed in the groove, and the pallet 5 is set by bottom
Displacement drive 10 is fixedly installed on fixed support 2, and the pallet under the drive of displacement drive can X to, Y
It is greater than the area of the pallet to the groove area of mobile and circumferential deflection, therefore the leave from office frame, and for it internally
Displacement, and in order to ensure the performance that vacuumizes of platform frame, therefore seal 9 is set between the pallet and leave from office frame, the seal can
For soft rubber, the seal is that sealed effect can be achieved, and the displacement of pallet is not interfered with again.
The circumferentially disposed inflatable pneumatic mattress 4 of pallet 5, the inflatable pneumatic mattress 4 is connected with Vacuuming structure.In frame of appearing on the stage
6 and during leave from office 1 closure or openness of frame, first by the inflation/deflation of inflatable pneumatic mattress, carry out the formation and destruction of vacuum.
The opener 8 is provided with a control jointed shaft 82 of cylinder 81 and one, and the control cylinder 81 and jointed shaft 82 are equal
Set in front and rear, the front end of the control cylinder 81 is hinged on the leave from office frame 1, and the control cylinder 81 is corresponding provided with that can make
The stretches push rod 83 that swings up and down of jointed shaft 82, the rear end of the stretches push rod 83 is connected in corresponding jointed shaft 82
Portion, the rear end of the jointed shaft 82 is hinged on the leave from office frame 1, and the inner side of the jointed shaft 82 is arranged with from front end to the back-end
The chute 85 of extension, the lateral surface of the frame 6 of appearing on the stage, which is provided with, to be stretched into the chute 85 and is swung up and down in the jointed shaft 82
When the connector 84 that can be moved along the chute 85.
The chute 85 plays a part of gear into arc line shaped so that frame of appearing on the stage can be slided when open position is maximum
Groove is spacing, while so that frame of appearing on the stage is more steady when opening again.Need to open it is described appear on the stage frame when, control cylinder to make using described
The stretches push rod is stretched out backwards, and the stretches push rod promotes the jointed shaft to be swung up, and frame of being appeared on the stage simultaneously described in drive
Upwardly open, and the connector also moves and finally hangs over chute bottom position from the front to the back along the chute, now institute
Frame 6 of appearing on the stage is stated to open to maximum, and the frame of appearing on the stage is by two described control cylinder supports.
Need to close it is described appear on the stage frame when, also make control described in stretches push rod retraction facing forward using the control cylinder
In cylinder, then the jointed shaft is pulled to lower swing, and frame of appearing on the stage described in drive simultaneously is closed downwards, and the connector also edge
Untill the chute is moved to when the frame of appearing on the stage is closed completely from the front to the back.
The unlatching of the frame of appearing on the stage and closure are realized by the control cylinder, be instead of and are manually switched frame of appearing on the stage
Mode, realize board automation, improve production efficiency.
The hinged place for appearing on the stage frame and leave from office frame is provided with locating part, and the locating part is arranged on leave from office frame including two groups
Vertically symmetrical setting stopper slot 12, the stopper slot is elongated, corresponding setting needle bearing 13 on the frame of appearing on the stage,
The needle bearing is placed between two stopper slots, and is coordinated with being slid above and below stopper slot composition, while the structure can be prevented
Frame of appearing on the stage drops.
Described appear on the stage sets several detent mechanisms 7 between frame and leave from office frame.
The detent mechanism 7 include the roller positioning module 71 that is arranged on leave from office frame and being arranged on appear on the stage on frame can
Correspondence is inserted in the locating piece 72 on the roller positioning module.Roller positioning module includes the positioning that two locating supports are constituted
Hole, two locating supports are symmetricly set on frame-type seat, and in rolling of the sides adjacent provided with focusing setting of two locating supports
Wheel, smoothly enters in positioning hole, wherein any one locating support can be arranged to activity orientation support for auxiliary positioning block,
It is adjusted by bolt, adjusts the forming position of the positioning hole.
The roller positioning module 71 is made up of two rollers 711, and the locating piece 72 is inserted between two rollers, and
The locating piece 72 and two two linear contact lays of formation of roller 711, the roller 711 are located at locating piece both sides.Pass through two rollers 711
Clamping action, can to it is described appear on the stage frame closure when be accurately positioned, and the locating piece 72 and two rollers form two
Linear contact lay, so that the repetitive positioning accuracy when frame of appearing on the stage is closed is improved, so as to ensure the using effect of exposure machine.
The roller positioning module has four groups, and four groups of roller positioning modules are respectively arranged on all around the four of the following table
Side, correspondingly, the locating piece 72 have four, and four locating pieces 72 are respectively arranged on four side all around of the upper table surface, and
Each locating piece is inserted in one group of roller positioning module.
Simultaneously preferably the roller positioning module of front side can be divided into two, be separately positioned on the left and right sides, it is to avoid preceding
Wiring board and the film are put into by the roller positioning module influence of side, while two locating pieces are set, the rolling set respectively with left and right
Positioning module is taken turns to coordinate.
Due to be fixed with the following table on roller positioning module, the upper table surface be fixed with can correspond to be inserted in it is described
Locating piece on roller positioning module, so as to realize the repetition precision positioning during upper table surface closure.Can have simultaneously
Effect avoids frame contacting firmly when being closed with leave from office frame of appearing on the stage.
The flexible PIN nails 11 include cylinder 111, and cylinder is used for two holes for drawing PIN needle to fix on tight pcb board, plate
Spacing is constant, and stretching PIN needle can tighten plank；
Travel(l)ing rest 112, the travel(l)ing rest is configured can be by cylinder driving relative to the leave from office frame displacement；
PIN needle 113, is arranged on the travel(l)ing rest and driven can be arranged in wiring board, and drive the wiring board with
The travel(l)ing rest is relative to the leave from office frame displacement.
PIN needle slightly jack-up can need the wiring board 3 that welding resistance is aligned, such as PCB plates, preferably activity can adjust
It is whole, because PCB plate suqares are very big, and an angle of PIN needle only jack-up very little, so PIN needle is not interfered with not only
The precision of PCB plates contraposition, and its activity performance can be improved, to bit rate faster.
Elastic component 114 is provided between the ejector pin mechanism and travel(l)ing rest.The elastic component is spring, and the spring provides the top
Pin mechanism can the past elastic force protruded above of elasticity.
The displacement drive 10 is that UVW is fixed with pallet to the mobile dish of bit platform and connected to bit platform, and the UVW
Connect.
The UVW is fixedly installed on to bit platform on fixed support 2, and the fixed support 2 is provided with and automatically adjusts XY θ
Module 102, X1 axles driving XY θ modules 103, X2 axles driving XY θ modules 104, Y axles driving XY θ modules 105, four simultaneously drive jointly
One workbench 101 of dynamic connection；The workbench is directly fixedly connected with the tray, therefore it can drive pallet to move, the X1
Axle driving XY θ modules, X2 axles driving XY θ modules, Y axles driving XY θ modules are respectively connected with line motor, are driven by line motor
It is dynamic.The displacement of X, Y-direction and the rotation of workbench is realized by controlling line motor or stepper motor.
X1 axles driving XY θ modules, X2 axles driving XY θ modules and Y axles drive XY θ modules, automatically adjust XY θ modules 102
It is vertically arranged.
A kind of exposure machine using above-mentioned welding resistance independence aligning platform frame, it includes exposure machine body, the exposure machine body
Inside it is provided with two above-mentioned welding resistance independence aligning platform frames.It is independent to realize contraposition by setting two welding resistance independence aligning platform frames, keep away
Exempt to employ lift positioning mechanism triviality and its may caused by inaccurate phenomenon.
Embodiment is not construed as limitation of the present invention, any spiritual improvements introduced based on the present invention, all Ying Ben
Within the protection domain of invention.
Claims (9)
1. a kind of welding resistance independence aligning platform frame, including appear on the stage frame and leave from office frame, the rear end phase of appear on the stage frame and the leave from office frame
Mutually it is hinged and front end can be opened and closed, the leave from office frame two opposite sides are provided with opener, it is characterised in that：The leave from office frame bottom is set
Put fixed support, and the fixed support is linked with leave from office frame, be provided with pallet in the middle of the leave from office frame, the pallet relatively under
Platform frame constitutes X and coordinated to, Y-direction displacement, and passes through seal sealing between the pallet and leave from office frame and coordinate, below the pallet
Be provided for driving pallet along X to or Y-direction move or angular deflection displacement drive, the bottom of the displacement drive
It is fixedly installed on fixed support, the pallet front bottom end is provided for driving exposure base to carry out stretching for position skew adjustment
Contracting PIN is followed closely, and appear on the stage frame and the leave from office frame are provided with Vacuuming structure, and the opener is hinged provided with a control cylinder and one
Axle, the control cylinder and jointed shaft are in front and rear setting, and the front end of the control cylinder is hinged on the leave from office frame, described
Control cylinder is provided with that can make the stretches push rod that corresponding jointed shaft is swung up and down, and the rear end of the stretches push rod is connected to accordingly
The middle part of jointed shaft, the rear end of the jointed shaft is hinged on the leave from office frame, is arranged with the inside of the jointed shaft from front end
The chute extended to the back-end, the lateral surface of the frame of appearing on the stage, which is provided with, to be stretched into the chute and when the jointed shaft is swung up and down
The connector that can be moved along the chute.
2. welding resistance independence aligning platform frame according to claim 1, it is characterised in that the circumferentially disposed inflatable gas of pallet
Pad, the inflatable pneumatic mattress is connected with Vacuuming structure.
3. welding resistance independence aligning platform frame according to claim 1, it is characterised in that appear on the stage frame and the leave from office frame are hinged
Place is provided with locating part, and the locating part includes the stopper slot of two groups of vertically symmetrical settings being arranged on leave from office frame, described spacing
Groove is elongated, and corresponding setting spacing block set on the frame of appearing on the stage, the spacing block set is placed between two stopper slots, and with
Stopper slot slides cooperation above and below constituting.
4. welding resistance independence aligning platform frame according to claim 1, it is characterised in that described appear on the stage sets between frame and leave from office frame
Put several detent mechanisms.
5. welding resistance independence aligning platform frame according to claim 4, it is characterised in that the detent mechanism includes being arranged on down
Roller positioning module on platform frame and it is arranged on to appear on the stage and corresponds to the positioning being inserted on the roller positioning module on frame
Block.
6. welding resistance independence aligning platform frame according to claim 1, it is characterised in that the flexible PIN nails include cylinder；
Travel(l)ing rest, the travel(l)ing rest is configured can be by cylinder driving relative to the leave from office frame displacement；
PIN needle, is arranged on the travel(l)ing rest and driven can be arranged in wiring board, and drive the wiring board to be propped up with the activity
Frame is relative to the leave from office frame displacement.
7. welding resistance independence aligning platform frame according to claim 6, it is characterised in that between the PIN needle and travel(l)ing rest
Provided with elastic component.
8. welding resistance independence aligning platform frame according to claim 1, it is characterised in that the displacement drive is UVW pairs
Bit platform, and the UVW is fixedly connected with the tray to the mobile dish of bit platform.
9. a kind of exposure machine of welding resistance independence aligning platform frame, it includes exposure machine body, it is characterised in that the exposure machine sheet
In vivo provided with the welding resistance independence aligning platform frame described in two any one claims 1,2,3,4,5,6,7 or 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610590681.0A CN106054542B (en) | 2016-07-26 | 2016-07-26 | Welding resistance independence aligning platform frame and exposure machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610590681.0A CN106054542B (en) | 2016-07-26 | 2016-07-26 | Welding resistance independence aligning platform frame and exposure machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106054542A CN106054542A (en) | 2016-10-26 |
| CN106054542B true CN106054542B (en) | 2017-10-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610590681.0A Active CN106054542B (en) | 2016-07-26 | 2016-07-26 | Welding resistance independence aligning platform frame and exposure machine |
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| Country | Link |
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| CN (1) | CN106054542B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107632500A (en) * | 2017-07-31 | 2018-01-26 | 东莞科视自动化科技有限公司 | A kind of Full-automatic exposure machine |
| CN111306159A (en) * | 2020-03-16 | 2020-06-19 | 深圳市劲拓自动化设备股份有限公司 | UVW counterpoint platform |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6569579B2 (en) * | 2001-03-13 | 2003-05-27 | Chartered Semiconductor Manufacturing, Ltd. | Semiconductor mask alignment system utilizing pellicle with zero layer image placement indicator |
| JP3977364B2 (en) * | 2004-09-03 | 2007-09-19 | キヤノン株式会社 | Exposure apparatus and device manufacturing method |
| CN202794847U (en) * | 2012-07-26 | 2013-03-13 | 四川聚能核技术工程有限公司 | Exposure rack of exposure machine |
| CN203982079U (en) * | 2014-06-23 | 2014-12-03 | 上海飞为自动化系统有限公司 | A kind of contraposition mechanism of semi-automatic and Full-automatic exposure machine |
| CN204576058U (en) * | 2015-04-14 | 2015-08-19 | 昆山大洋电路板有限公司 | A kind of exposure machine Vacuuming structure |
| CN205942252U (en) * | 2016-07-26 | 2017-02-08 | 浙江欧视达科技有限公司 | Hinder and weld independent platform frame and exposure machine of counterpointing |
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2016
- 2016-07-26 CN CN201610590681.0A patent/CN106054542B/en active Active
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| CN106054542A (en) | 2016-10-26 |
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Address after: 325000 Main Building, 700 Wenzhou Avenue, Wenzhou Economic and Technological Development Zone, Wenzhou City, Zhejiang Province Patentee after: Zhejiang Eurovision Television Technology Co., Ltd. Address before: Room G-502, No. 10 District, Wenzhou High-tech Industrial Park, Zhejiang Province, 325000 Patentee before: Zhejiang Ousut Technology Co., Ltd. |