CN106052598B - A kind of big working distance autocollimation of high frequency sound and method - Google Patents

Abstract

The invention belongs to the field of precision measurement technology and optical engineering, and specifically relates to a high-frequency response and large working distance self-collimation device and method; the device is composed of a light source, a collimating mirror, a reflecting mirror, and a feedback imaging system; Adjust the reflector so that the reflected light beam returns to the center of the image plane of the feedback imaging system, and then use the angle deflection measurement device on the reflector to obtain the angle change of the surface of the measured object; since the present invention adds Reflector, so it can avoid the problem that the reflected light of the measured object deviates from the measurement system and cause the problem that it cannot be measured, and then has the ability to significantly increase the self-collimation working range under the same working distance, or significantly increase the working distance under the same self-collimation working range Technical advantages; in addition, the specific design of collimating mirror, feedback imaging system, reflecting mirror, etc., makes the present invention also have the characteristics of simple structure and low manufacturing cost; meanwhile, it has high measurement speed.

Description

An autocollimation device and method with high frequency response and large working distance

technical field

The invention belongs to the field of precision measurement technology and the field of optical engineering, and in particular relates to a high-frequency response and large working distance self-collimation device and method.

Background technique

In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields.

In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to hundreds of meters; resolution from 0.1 arcsecond to 0.001 arcsecond.

In the field of optical engineering and cutting-edge scientific experiments, the combination of laser autocollimator and two-dimensional circular gratings that are perpendicular to each other can measure the spatial angle; the position reference composed of two laser autocollimators can be used for two Measurement of the angle or parallelism between two optical axes. The angular working range is tens of arc seconds to tens of arc minutes.

In the field of cutting-edge scientific experimental devices and high-end precision equipment manufacturing, laser autocollimators can be used to measure the angular rotation accuracy of cutting-edge scientific experimental devices and high-end precision equipment rotary motion benchmarks, measure the space linear accuracy of linear motion benchmarks and pairwise motion benchmarks parallelism and perpendicularity.

Laser self-collimation technology has the advantages of non-contact, high measurement accuracy, and convenient use, and has been widely used in the above fields.

A traditional autocollimator is shown in Figure 1. The system includes a light source 1, a transmissive collimator 21, and a feedback imaging system 6; the light beam emitted by the light source 1 is collimated into a parallel beam by the transmissive collimator 21. Incident to the reflective surface of the measured object 5 ; the light beam reflected from the reflected surface of the measured object 5 is collected and imaged by the feedback imaging system 6 . Under this structure, only the light beam reflected from the surface of the measured object 5 returns to the original path, and can be collected and imaged by the feedback imaging system 6, thereby realizing effective measurement. The conditional limitation of returning to the original path makes the system have the following two disadvantages:

First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, which will lead to failure to achieve self-collimation Straight and micro angle measurement;

Second, the distance from the mirror surface of the measured object 5 to measure the entrance pupil of the laser autocollimator should not be too far away, otherwise as long as the reflected optical axis deviates from the optical axis of the autocollimator by a small angle, the reflected beam will deviate from the optical system of the laser autocollimator The entrance pupil, which leads to the inability to achieve self-collimation and micro-angle measurement.

The above two problems limit the use of traditional autocollimation instruments to small angles and small working distances.

Contents of the invention

Aiming at the two problems existing in the traditional autocollimator, the present invention discloses an autocollimation device and method with high frequency response and large working distance. Collimated working range, or the technical advantage of significantly increasing the working distance at the same autocollimated working range.

The purpose of the present invention is achieved like this:

A self-collimation device with high frequency response and large working distance, including a light source, a transmissive collimator, a reflector, and a feedback imaging system, the reflector is provided with an angle adjustment measuring device; the light beam emitted by the light source passes through the transmissive After the collimator is collimated into a parallel beam, it is reflected by the mirror and incident on the surface of the measured object; the beam reflected from the surface of the measured object is reflected by the mirror and then imaged by the feedback imaging system;

The feedback imaging system is one of the following two forms:

First, it is installed between the light source and the transmissive collimator, including the first feedback beam splitter and the image sensor set at the focal point of the transmissive collimator; the light beam reflected from the surface of the measured object is reflected by the mirror , successively passed through the transmissive collimator mirror, reflected by the first feedback beam splitter, and imaged by the image sensor; under the condition that the surface of the measured object is perpendicular to the optical axis, the point image formed by the image sensor is at the center of the image plane;

Second, it is arranged between the transmissive collimator and the reflector, including the first feedback beam splitter, the first feedback objective lens and the image sensor arranged at the focal point of the transmissive collimator; the light beam reflected from the surface of the measured object, After being reflected by the mirror, it is reflected by the first feedback beam splitter, transmitted by the first feedback objective lens, and imaged by the image sensor; under the condition that the surface of the measured object is perpendicular to the optical axis, the point image formed by the image sensor is on the image surface Central location;

The angle adjustment measurement device includes an angle adjustment device arranged on the reflector, an angle deflection measurement device, and a universal shaft, the angle adjustment device includes a first driver and a second driver; the angle deflection measurement device includes a first reflector, a second Two reflectors, a first laser interferometer corresponding to the position of the first reflector, and a second laser interferometer corresponding to the position of the second reflector; the first driver, the first reflector, and the gimbal axis are on a straight line, and the second The two drivers, the second reflection mirror, and the cardan shaft are on a straight line, and the connection line between the first driver and the cardan shaft is perpendicular to the connection line between the second driver and the cardan shaft.

A high-frequency-response and large-working-distance self-collimation method implemented on the above-mentioned high-frequency-response and large-working-distance self-collimation device comprises the following steps:

Step a, turn on the light source, image the image sensor, and obtain the position Δx and Δy that the point image deviates from the center of the image plane;

Step b, using the first driver and the second driver to adjust the mirror angle, so that the point image formed by the image sensor returns to the center of the image plane;

Step c, read the displacement change Δx1 obtained by the first laser interferometer, and the displacement change Δx2 obtained by the second laser interferometer, and then convert it into the angle change Δθ and Then get the angular changes Δα and Δβ on the surface of the measured object; where, Δθ=f1(Δx1,Δx2), and f1, f2, f3, and f4 represent four functions.

The above-mentioned high-frequency response and large working distance self-collimation device also includes a wavefront detection system and a wavefront compensation system;

The wavefront detection system includes a wavefront detection beamsplitter, and at least one of an air disturbance wavefront detector and a mirror deformation wavefront detector; the wavefront detection beamsplitter is arranged between the mirror and the measured object , the air disturbance wavefront detector is set on the reflection light path of the wavefront detection spectroscope, and the mirror deformation wavefront detector is set on the secondary reflection light path of the reflection mirror;

The wavefront compensation system includes a compensating light source, a compensating collimating mirror, and a transmissive liquid crystal spatial light modulator; the beam emitted by the compensating light source is collimated into a parallel beam by the compensating collimating mirror, and then modulated by the transmissive liquid crystal spatial light modulated and incident on the wavefront detection beamsplitter.

A high-frequency-response and large-working-distance self-collimation method implemented on the above-mentioned high-frequency-response and large-working-distance self-collimation device requires that the wavefront detection system only include a wavefront detection spectroscope and an air disturbance wavefront detector;

Include the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b. Turn on the light source, place the reference objects selected in step a at the working position A and the near working position B respectively, and obtain two sets of data of GA and GB respectively by the air disturbance wavefront detector;

Step c, G1=GA-GB, obtain the wavefront change caused by air disturbance;

Step d, adjusting the parameters of the transmissive liquid crystal spatial light modulator according to f5 (G1), lighting up the compensation light source, and compensating for air disturbance;

Step e, imaging with the image sensor to obtain the position Δx and Δy of the point image deviating from the center of the image plane;

Step f, using the first driver and the second driver to adjust the angle of the mirror, so that the point image formed by the image sensor returns to the center of the image plane;

Step g, read the displacement change Δx1 obtained by the first laser interferometer, and the displacement change Δx2 obtained by the second laser interferometer, and then convert it into the angle change Δθ and Then get the angular changes Δα and Δβ on the surface of the measured object; where, Δθ=f1(Δx1,Δx2), and f1, f2, f3, and f4 represent four functions.

A high-frequency-response and large-working-distance self-collimation method implemented on the above-mentioned high-frequency-response and large-working-distance self-collimation device requires that the wavefront detection system only include a wavefront detection beamsplitter and a mirror-deformed wavefront detector;

Include the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b. Turn on the light source, place the reference objects selected in step a at the working position A and the near working position B respectively, and obtain two sets of data of GC and GD respectively by the mirror deformable wavefront detector;

Step c, G2=GC-GD, obtain the wavefront change caused by air disturbance and mirror deformation;

Step d. Adjust the parameters of the transmissive liquid crystal spatial light modulator according to f5 (G2), turn on the compensation light source, and compensate for air disturbance and mirror deformation;

Step e, imaging with the image sensor to obtain the position Δx and Δy of the point image deviating from the center of the image plane;

Step f, using the first driver and the second driver to adjust the angle of the mirror, so that the point image formed by the image sensor returns to the center of the image plane;

Step g, read the displacement change Δx1 obtained by the first laser interferometer, and the displacement change Δx2 obtained by the second laser interferometer, and then convert it into the angle change Δθ and Then get the angular changes Δα and Δβ on the surface of the measured object; where, Δθ=f1(Δx1,Δx2), and f1, f2, f3, and f4 represent four functions.

A high-frequency-response and large-working-distance self-collimation method realized on the above-mentioned high-frequency-response and large-working-distance self-collimation device requires the wavefront detection system to include a wavefront detection spectroscope, an air disturbance wavefront detector and a reflector Deformable wavefront detectors;

Include the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b. Turn on the light source, and place the reference objects selected in step a at the working position A and the near working position B respectively. The air disturbance wavefront detector obtains two sets of data of GA and GB respectively. Get GC and GD two sets of data;

Step c, G1=GA-GB, get the wavefront change caused by air disturbance; G2=GC-GD, get the wavefront change caused by air disturbance and mirror deformation; G=G2-G1, get the wavefront change caused by mirror deformation wavefront variation;

step d.

Adjust the parameters of the transmissive liquid crystal spatial light modulator according to f5 (G1), light up the compensation light source, and compensate for air disturbance;

or

Adjust the parameters of the transmissive liquid crystal spatial light modulator according to f5 (G2), turn on the compensation light source, and compensate for air disturbance and mirror deformation;

or

Adjust the parameters of the transmissive liquid crystal spatial light modulator according to f5(G), turn on the compensation light source, and compensate the deformation of the mirror;

Step e, imaging with the image sensor to obtain the position Δx and Δy of the point image deviating from the center of the image plane;

Step f, using the first driver and the second driver to adjust the angle of the mirror, so that the point image formed by the image sensor returns to the center of the image plane;

Step g, read the displacement change Δx1 obtained by the first laser interferometer, and the displacement change Δx2 obtained by the second laser interferometer, and then convert it into the angle change Δθ and Then get the angular changes Δα and Δβ on the surface of the measured object; where, Δθ=f1(Δx1,Δx2), and f1, f2, f3, and f4 represent four functions.

Beneficial effect:

Compared with the traditional autocollimator, the present invention adds a reflector and an angle adjustment measuring device arranged on the reflector. This structural arrangement can have a larger deflection angle or In the case of a large lateral displacement, adjust the attitude of the mirror by adjusting the angle of the measuring device to ensure that the reflected light returns to the original path and is received by the feedback imaging system, thereby effectively avoiding the problem that the reflected light of the measured object deviates from the measurement system and cannot be measured. Furthermore, the present invention has the technical advantage of significantly increasing the working range of self-collimation under the same working distance, or significantly increasing the working distance under the same working distance of self-collimation.

In addition, the present invention also has the following technical advantages:

First, select the transmissive collimating mirror to make the device of the present invention simple in structure, low in manufacturing cost and easy to use;

Second, the image sensor is selected as the imaging device in the feedback imaging system, and the large area of the image sensor is used to ensure that the reflected light can still enter the incident light of the optical system when the deflection angle between the reflected light of the measured object and the incident light is large. The pupil will not exceed the receiving range, and then cooperate with the reflector to realize the rapid and real-time return compensation of the reflected light, so that the self-collimation working range or working distance of the present invention is greatly extended;

The 3rd, select laser interferometer as angle deflection measurement device, make the present invention can finish angle measurement under high sampling frequency (up to 2000Hz), promptly have very high measuring speed; If the first reflection mirror and the second reflection mirror The use of the corner cube prism can also use the optical characteristics of the corner cube prism to deflect the incident light by 180 degrees and return it, so that the angle measurement range of the present invention is greatly enhanced, that is, the present invention has a high measurement speed and a large angle range technical advantages;

Fourth, the present invention also adopts the following technology: the first driver, the first mirror, and the cardan shaft are on a straight line, the second driver, the second mirror, and the cardan shaft are on a straight line, and the first The connection line between the driver and the cardan shaft is perpendicular to the connection line between the second driver and the cardan shaft; this two-dimensional setting of the two lines perpendicular to each other makes the data in different connection directions not interfere with each other, and no decoupling calculation is required. It can facilitate calibration, simplify the calculation process and improve the measurement speed.

Description of drawings

Fig. 1 is a schematic structural diagram of a traditional self-collimation angle measurement system.

FIG. 2 is a schematic diagram of the first structure of Embodiment 1 of the high-frequency-response and large-working-distance self-collimation device of the present invention.

Fig. 3 is a structural schematic diagram of the angle adjustment measuring device.

FIG. 4 is a schematic diagram of the second structure of Embodiment 1 of the high-frequency-response and large-working-distance self-collimation device of the present invention.

FIG. 5 is a schematic structural diagram of Embodiment 2 of the high-response and large-working-distance self-collimation device of the present invention.

FIG. 6 is a schematic structural view of Embodiment 3 of the high-frequency-response and large-working-distance autocollimation device of the present invention.

FIG. 7 is a schematic structural view of Embodiment 4 of the high-frequency-response and large-working-distance autocollimation device of the present invention.

In the figure: 1 light source, 21 transmissive collimator, 3 reflector, 4 angle adjustment measuring device, 411 first driver, 412 second driver, 425 first reflector, 426 second reflector, 427 first laser interference instrument, 428 second laser interferometer, 43 cardan shaft, 5 object under test, 6 feedback imaging system, 61 first feedback beam splitter, 63 first feedback objective lens, 65 image sensor, 7 wavefront detection system, 71 wavefront Detecting spectroscope, 72 air disturbance wavefront detectors, 73 mirror deformation wavefront detectors, 8 wavefront compensation systems, 81 compensation light sources, 82 compensation collimation mirrors, 83 transmissive liquid crystal spatial light modulators.

specific embodiment

The specific embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings.

Specific embodiment one

This embodiment is an embodiment of an autocollimation device with high frequency response and large working distance.

The structure diagram of the high-frequency-response and large-working-distance autocollimation device of this embodiment is shown in FIG. 2 . The self-collimation device includes a light source 1, a transmissive collimator mirror 21, a reflector 3, and a feedback imaging system 6. The reflector 3 is provided with an angle adjustment measuring device 4; After the straight mirror 21 is collimated into a parallel light beam, it is reflected by the reflector 3 and incident on the surface of the measured object 5; the light beam reflected from the surface of the measured object 5 is then reflected by the reflective mirror 3 and collected by the feedback imaging system 6 imaging;

The feedback imaging system 6 is arranged between the light source 1 and the transmissive collimator 21, including a first feedback beamsplitter 61 and an image sensor 65 arranged at the focal point of the transmissive collimator 21; After being reflected by the reflector 3, the light beam is transmitted through the transmissive collimator 21, reflected by the first feedback beam splitter 61, and imaged by the image sensor 65; under the condition that the surface of the measured object 5 is perpendicular to the optical axis, The point image formed by the image sensor 65 is at the center of the image plane;

Described angle adjustment measurement device 4 comprises the angle adjustment device that is arranged on the reflection mirror 3, angle deflection measurement device, and cardan shaft 43, and angle adjustment device comprises first driver 411 and second driver 412; Angle deflection measurement device comprises the first A mirror 425, a second mirror 426, a first laser interferometer 427 corresponding to the position of the first mirror 425, and a second laser interferometer 428 corresponding to the position of the second mirror 426; the first driver 411, the first reflector The mirror 425 and the cardan shaft 43 are on a straight line, the second driver 412, the second mirror 426, and the cardan shaft 43 are on a straight line, and the line connecting the first driver 411 and the cardan shaft 43 is perpendicular to the second The connection between the driver 412 and the cardan shaft 43; as shown in FIG. 3 .

It should be noted that, in this embodiment, the feedback imaging system 6 can also choose the following structure: it is arranged between the transmissive collimator mirror 21 and the reflector 3, including a first feedback beam splitter 61, a first feedback objective lens 63 and The image sensor 65 arranged at the focal point of the transmissive collimating mirror 21; the light beam reflected from the surface of the measured object 5, after being reflected by the reflector 3, is reflected by the first feedback beam splitter 61, transmitted by the first feedback objective lens 63, The imaging is collected by the image sensor 65; under the condition that the surface of the measured object 5 is perpendicular to the optical axis, the point image formed by the image sensor 65 is at the center of the image plane; as shown in FIG. 4 .

Specific embodiment two

This embodiment is an embodiment of an autocollimation device with high frequency response and large working distance.

The structure schematic diagram of the high-frequency-response and large-working-distance autocollimation device of this embodiment is shown in FIG. 5 . On the basis of the specific embodiment 1, the high-frequency response and large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

The wavefront detection system 7 includes a wavefront detection spectroscope 71 and an air disturbance wavefront detector 72; the wavefront detection spectroscope 71 is arranged between the reflector 3 and the measured object 5, and the air disturbance wavefront detector 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflected optical path of the reflector 3;

The wavefront compensation system 8 includes a compensating light source 81, a compensating collimating mirror 82, and a transmissive liquid crystal spatial light modulator 83; the beam emitted by the compensating light source 81 is collimated into a parallel beam by the compensating collimating mirror 82, and then The transmissive liquid crystal spatial light modulator 83 modulates and incident on the wavefront detection beam splitter 71 .

Specific embodiment three

This embodiment is an embodiment of an autocollimation device with high frequency response and large working distance.

The structure schematic diagram of the high-frequency-response and large-working-distance autocollimation device of this embodiment is shown in FIG. 6 . On the basis of the specific embodiment 1, the high-frequency response and large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

The wavefront detection system 7 includes a wavefront detection beamsplitter 71 and a mirror deformation wavefront detector 73; the wavefront detection beamsplitter 71 is arranged between the mirror 3 and the measured object 5, and the air disturbance wavefront detection The device 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflected optical path of the reflector 3;

The wavefront compensation system 8 includes a compensating light source 81, a compensating collimating mirror 82, and a transmissive liquid crystal spatial light modulator 83; the beam emitted by the compensating light source 81 is collimated into a parallel beam by the compensating collimating mirror 82, and then The transmissive liquid crystal spatial light modulator 83 modulates and incident on the wavefront detection beam splitter 71 .

Specific embodiment four

This embodiment is an embodiment of an autocollimation device with high frequency response and large working distance.

A schematic diagram of the structure of the high-frequency-response and large-working-distance autocollimation device of this embodiment is shown in FIG. 7 . On the basis of the specific embodiment 1, the high-frequency response and large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

The wavefront detection system 7 includes a wavefront detection beamsplitter 71, an air disturbance wavefront detector 72 and a mirror deformation wavefront detector 73; the wavefront detection beamsplitter 71 is arranged between the mirror 3 and the measured object 5 Between, the air disturbance wavefront detector 72 is arranged on the reflection light path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary reflection light path of the mirror 3;

The wavefront compensation system 8 includes a compensating light source 81, a compensating collimating mirror 82, and a transmissive liquid crystal spatial light modulator 83; the beam emitted by the compensating light source 81 is collimated into a parallel beam by the compensating collimating mirror 82, and then The transmissive liquid crystal spatial light modulator 83 modulates and incident on the wavefront detection beam splitter 71 .

For the above embodiment of the autocollimation device, there are three points to be explained:

First, the first driver 411 and the second driver 412 in the angle adjustment device can choose a stepper motor or a servo motor driver with a faster driving speed, or a piezoelectric ceramic driver with higher driving precision, or A stepper motor or a servo motor driver can be mixed with a piezoelectric ceramic driver; those skilled in the art can make a reasonable choice according to actual needs.

Second, the transmissive collimator 21 can be a binary optical lens. Compared with ordinary optical lenses, the binary optical lens is thinner, which is beneficial to the miniaturization of the system. At the same time, the binary optical lens has better collimation and has It is beneficial to improve the measurement accuracy of the system.

Third, in all the above embodiments of the self-collimation device, the angle deflection measurement device only includes the combination of two pairs of plane mirrors and the laser interferometer. If it is considered that the translation of the reflector 3 during work will affect the measurement accuracy, a third pair of plane reflectors and laser interferometers can be placed at the position of the gimbal axis 43 to offset the three laser interferometers. Same translation to ensure measurement accuracy.

Specific embodiment five

This embodiment is an embodiment of a high-frequency response and large-working-distance self-collimation method implemented on the high-frequency-response and large-working-distance self-collimation device described in Embodiment 1.

The self-collimation method with high frequency response and large working distance in this embodiment includes the following steps:

Step a, turn on the light source 1, image the image sensor 65, and obtain the position Δx and Δy that the point image deviates from the center of the image plane;

Step b, using the first driver 411 and the second driver 412 to adjust the angle of the mirror 3, so that the point image formed by the image sensor 65 returns to the center of the image plane;

Step c, read the displacement change Δx1 obtained by the first laser interferometer 427, and the displacement change Δx2 obtained by the second laser interferometer 428, and then convert it into the angle change Δθ and Then obtain the angular changes Δα and Δβ on the surface of the measured object 5; wherein, Δθ=f1(Δx1, Δx2), and f1, f2, f3, and f4 represent four functions.

The main innovation point of the present invention is to increase the reflector 3 and the angle adjustment measuring device 4 arranged on the reflector 3. This structure can have a larger deflection angle or a relatively large angle between the incident light and the reflected light of the measured object 5. In the case of large lateral displacement, the attitude of the reflector is adjusted by the angle adjustment measurement device, so that the reflected light returns to the original path and is received by the feedback imaging system 6, effectively avoiding the problem that the reflected light of the measured object deviates from the measurement system and cannot be measured.

However, with the introduction of the reflector 3, the surface error will be transmitted to the final result, reducing the measurement accuracy of the system; at the same time, the increase of the working distance makes the air disturbance between the reflector 3 and the measured object 5 not negligible, and also It will reduce the measurement accuracy of the system. It can be seen that in order to achieve high-precision measurement, it is necessary to take into account the influence of the surface shape error of the mirror 3 and the air disturbance between the mirror 3 and the measured object 5 on the measurement results. For this reason, specific embodiments are designed. Example seven, and specific embodiment eight.

Specific embodiment six

This embodiment is an embodiment of a high-frequency response and large-working-distance self-collimation method implemented on the high-frequency-response and large-working-distance self-collimation device described in the second specific embodiment.

The self-collimation method with high frequency response and large working distance in this embodiment includes the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b. Turn on the light source 1, place the reference objects selected in step a at the working position A and the near working position B respectively, and the air disturbance wavefront detector 72 obtains two sets of data of GA and GB respectively;

Step c, G1=GA-GB, obtain the wavefront change caused by air disturbance;

Step d, adjusting the parameters of the transmissive liquid crystal spatial light modulator 83 according to f5 (G1), lighting the compensation light source 81, and compensating for air disturbance;

Step e, imaging with the image sensor 65 to obtain the position Δx and Δy of the point image deviating from the center of the image plane;

Step f, using the first driver 411 and the second driver 412 to adjust the angle of the mirror 3, so that the point image formed by the image sensor 65 returns to the center of the image plane;

Step g, read the displacement change Δx1 obtained by the first laser interferometer 427, and the displacement change Δx2 obtained by the second laser interferometer 428, and then convert it into the angle change Δθ and Then obtain the angular changes Δα and Δβ on the surface of the measured object 5; wherein, Δθ=f1(Δx1, Δx2), and f1, f2, f3, and f4 represent four functions.

The method of this embodiment is implemented on the device of the specific embodiment 2, the air disturbance can be separated by the air disturbance wavefront detector 72, and then the air disturbance can be compensated by the wavefront compensation system 8, finally realizing the effect of no air disturbance High precision measurement.

Specific embodiment seven

This embodiment is an embodiment of a high-frequency response and large-working-distance self-collimation method realized on the high-frequency-response and large-working-distance self-collimation device described in Embodiment 3.

The self-collimation method with high frequency response and large working distance in this embodiment includes the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b. Turn on the light source 1, place the reference objects selected in step a at the working position A and the near working position B respectively, and the mirror deformable wavefront detector 73 obtains two sets of data of GC and GD respectively;

Step c, G2=GC-GD, obtain the wavefront change caused by air disturbance and mirror deformation;

Step d, adjust the parameters of the transmissive liquid crystal spatial light modulator 83 according to f5 (G2), turn on the compensation light source 81, and compensate for air disturbance and mirror deformation;

Step e, imaging with the image sensor 65 to obtain the position Δx and Δy of the point image deviating from the center of the image plane;

Step f, using the first driver 411 and the second driver 412 to adjust the angle of the mirror 3, so that the point image formed by the image sensor 65 returns to the center of the image plane;

Step g, read the displacement change Δx1 obtained by the first laser interferometer 427, and the displacement change Δx2 obtained by the second laser interferometer 428, and then convert it into the angle change Δθ and Then obtain the angular changes Δα and Δβ on the surface of the measured object 5; wherein, Δθ=f1(Δx1, Δx2), and f1, f2, f3, and f4 represent four functions.

The method of this embodiment is implemented on the device of the specific embodiment 3, and the air disturbance and the mirror deformation can be separated as a whole by using the mirror deformation wavefront detector 73, and then the air disturbance and the mirror deformation can be completely separated by using the wavefront compensation system 8. Carry out overall compensation, and finally realize high-precision measurement without the influence of air disturbance and mirror deformation.

Embodiment 8

This embodiment is an embodiment of a high-frequency response and large-working-distance self-collimation method implemented on the high-frequency-response and large-working-distance self-collimation device described in Embodiment 4.

The self-collimation method with high frequency response and large working distance in this embodiment includes the following steps:

Step a, selecting a reference object whose surface is perpendicular to the direction of the optical axis;

Step b: Turn on the light source 1, place the reference objects selected in step a at the working position A and the near working position B respectively, the air disturbance wavefront detector 72 obtains two sets of data of GA and GB respectively, and the mirror deformation wavefront detection Device 73 respectively obtains GC and GD two groups of data;

Step c, G1=GA-GB, get the wavefront change caused by air disturbance; G2=GC-GD, get the wavefront change caused by air disturbance and mirror deformation; G=G2-G1, get the wavefront change caused by mirror deformation wavefront variation;

step d.

Adjust the parameters of the transmissive liquid crystal spatial light modulator 83 according to f5 (G1), turn on the compensation light source 81, and compensate for the air disturbance;

or

Adjust the parameters of the transmissive liquid crystal spatial light modulator 83 according to f5 (G2), turn on the compensation light source 81, and compensate for air disturbance and mirror deformation;

or

Adjust the parameters of the transmissive liquid crystal spatial light modulator 83 according to f5(G), turn on the compensation light source 81, and compensate the deformation of the mirror;

Step e, imaging with the image sensor 65 to obtain the position Δx and Δy of the point image deviating from the center of the image plane;

Step f, using the first driver 411 and the second driver 412 to adjust the angle of the mirror 3, so that the point image formed by the image sensor 65 returns to the center of the image plane;

Step g, read the displacement change Δx1 obtained by the first laser interferometer 427, and the displacement change Δx2 obtained by the second laser interferometer 428, and then convert it into the angle change Δθ and Then obtain the angular changes Δα and Δβ on the surface of the measured object 5; wherein, Δθ=f1(Δx1, Δx2), and f1, f2, f3, and f4 represent four functions.

The method of this embodiment is implemented on the device of Embodiment 4, and the air disturbance and mirror deformation can be separated separately by using the air disturbance wavefront detector 72 and the mirror deformation wavefront detector 73, and then the air disturbance can be selectively analyzed. Individual compensation for disturbance, independent compensation for mirror deformation, or overall compensation for air disturbance and mirror deformation, and finally achieve high-precision measurement without air disturbance, or without mirror deformation, or without air disturbance and mirror deformation .

Another advantage of this embodiment is that after the air turbulence and mirror deformation are separated separately, the influence of each part on the result can be independently evaluated, not only can it be found out who is affecting the measurement in the air turbulence and mirror deformation The main contradiction of precision, and can independently evaluate the deformation of the mirror, and effectively evaluate the processing quality of the mirror at the same time.

Claims (4)

1. a kind of big working distance autocollimation of high frequency sound, which is characterized in that including light source (1), transmission-type collimating mirror (21), anti- Mirror (3) and feedback imaging system (6) are penetrated, angled adjustment measuring device (4) is set on the speculum (3)；Light source (1) The light beam of outgoing is reflected after transmission-type collimating mirror (21) is collimated into collimated light beam, then by speculum (3), is incident on tested The surface of object (5)；From the light beam of measured object (5) surface reflection, after being reflected using speculum (3), by feedback imaging system (6) Acquisition imaging；

The feedback imaging system (6) is one kind in following two forms：

The first, it is arranged between light source (1) and transmission-type collimating mirror (21), including the first feedback spectroscope (61) and setting are saturating Penetrate the imaging sensor (65) of formula collimating mirror (21) focal point；From the light beam of measured object (5) surface reflection, using speculum (3) after reflecting, successively pass through transmission-type collimating mirror (21) transmission, the first feedback spectroscope (61) reflects, by imaging sensor (65) acquisition imaging；Under conditions of measured object (5) surface is vertical with optical axis, imaging sensor (65) institute is at picture in image planes Heart position；

The second, it is arranged between transmission-type collimating mirror (21) and speculum (3), including the first feedback spectroscope (61), first are instead It presents object lens (63) and the imaging sensor (65) in transmission-type collimating mirror (21) focal point is set；From measured object (5) surface reflection Light beam, using speculum (3) reflect after, successively pass through first feedback spectroscope (61) reflect, first feedback object lens (63) Transmission acquires imaging by imaging sensor (65)；Under conditions of measured object (5) surface is vertical with optical axis, imaging sensor (65) institute at picture in image plane center position；

The angle adjustment measuring device (4) includes the angular adjustment apparatus being arranged on speculum (3), angular deflection measurement dress It sets and universal shaft (43), angular adjustment apparatus includes the first driver (411) and the second driver (412)；Angular deflection is surveyed It is dry including the first speculum (425), the second speculum (426), the first laser of corresponding first speculum (425) position to measure device The second laser interferometer (428) of interferometer (427) and corresponding second speculum (426) position；First driver (411), One speculum (425) and universal shaft (43) point-blank, the second driver (412), the second speculum (426) and Universal shaft (43) point-blank, and the first driver (411) the second driver vertical with the line of universal shaft (43) (412) with the line of universal shaft (43)；

Further include Wavefront detecting system (7) and wavefront compensation system (8)；

The Wavefront detecting system (7) is one kind in following three kinds of situations：Situation one including Wavefront detecting spectroscope (71) and Air agitation wave front detector (72)；Situation two including Wavefront detecting spectroscope (71) and speculum deformation wave front detector (73)；Situation three including Wavefront detecting spectroscope (71), air agitation wave front detector (72) and speculum deformation Wavefront detecting Device (73)；The Wavefront detecting spectroscope (71) is arranged between speculum (3) and measured object (5), air agitation Wavefront detecting Device (72) is arranged on the reflected light path of Wavefront detecting spectroscope (71), and speculum deformation wave front detector (73) setting is being reflected In the secondary reflection light path of mirror (3)；

The wavefront compensation system (8) includes compensatory light (81), compensation collimating mirror (82) and transmission liquid crystal spatial light tune Device (83) processed；The light beam of compensatory light (81) outgoing, after overcompensation collimating mirror (82) is collimated into collimated light beam, then by transmission-type LCD space light modulator (83) is modulated, and is incident on Wavefront detecting spectroscope (71).

2. the big working distance auto-collimation of high frequency sound realized on a kind of big working distance autocollimation of the high frequency sound described in claim 1 Method, it is desirable that Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and air agitation wave front detector (72)；

It is characterized by comprising the following steps：

Step a, reference substance of the surface perpendicular to optical axis direction is chosen；

Step b, point bright light source (1), operating position A and nearly operating position B are individually positioned in by the selected reference substances of step a, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB；

Step c, G1=GA-GB obtains wavefront variation caused by air agitation；

Step d, transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G1), lights compensatory light (81), compensated Air agitation, f5 indicate 1 function；

Step e, imaging sensor (65) is imaged, and is obtained a picture and is deviateed image plane center position Δ x and Δ y；

Step f, speculum (3) angle is adjusted using the first driver (411) and the second driver (412), makes imaging sensor (65) institute returns to image plane center position at a picture；

The change in displacement Δ x1 and second laser interferometer (428) that step g, reading first laser interferometer (427) obtains The change in displacement Δ x2 arrived, be reconverted into speculum (3) angle change Δ θ andAnd then obtain the angle on measured object (5) surface Spend changes delta α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 indicate 4 functions.

3. the big working distance auto-collimation of high frequency sound realized on a kind of big working distance autocollimation of the high frequency sound described in claim 1 Method, it is desirable that Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and speculum deformation wave front detector (73)；

It is characterized by comprising the following steps：

Step a, reference substance of the surface perpendicular to optical axis direction is chosen；

Step b, point bright light source (1), operating position A and nearly operating position B are individually positioned in by the selected reference substances of step a, Speculum deformation wave front detector (73) respectively obtains two groups of data of GC and GD；

Step c, G2=GC-GD, obtain air agitation and speculum deformation it is common caused by wavefront variation；

Step d, transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G2), lights compensatory light (81), compensated Air agitation and speculum deformation, f5 indicate 1 function；

Step e, imaging sensor (65) is imaged, and is obtained a picture and is deviateed image plane center position Δ x and Δ y；

Step f, speculum (3) angle is adjusted using the first driver (411) and the second driver (412), makes imaging sensor (65) institute returns to image plane center position at a picture；

The change in displacement Δ x1 and second laser interferometer (428) that step g, reading first laser interferometer (427) obtains The change in displacement Δ x2 arrived, be reconverted into speculum (3) angle change Δ θ andAnd then obtain the angle on measured object (5) surface Spend changes delta α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 indicate 4 functions.

4. the big working distance auto-collimation of high frequency sound realized on a kind of big working distance autocollimation of the high frequency sound described in claim 1 Method, it is desirable that Wavefront detecting system (7) while including Wavefront detecting spectroscope (71), air agitation wave front detector (72) and anti- Penetrate mirror deformation wave front detector (73)；

It is characterized by comprising the following steps：

Step a, reference substance of the surface perpendicular to optical axis direction is chosen；

Step b, point bright light source (1), operating position A and nearly operating position B are individually positioned in by the selected reference substances of step a, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB, and speculum deformation wave front detector (73) respectively obtains Two groups of data of GC and GD；

Step c, G1=GA-GB obtains wavefront variation caused by air agitation；G2=GC-GD obtains air agitation and speculum Wavefront variation caused by deformation is common；G=G2-G1 obtains wavefront variation caused by speculum deformation；

Step d,

Transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G1), lights compensatory light (81), make-up air is disturbed Dynamic, f5 indicates 1 function；

Or

Transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G2), lights compensatory light (81), make-up air is disturbed Dynamic and speculum deformation, f5 indicate 1 function；

Or

Transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G), lights compensatory light (81), compensatory reflex mirror shape Become, f5 indicates 1 function；

Step e, imaging sensor (65) is imaged, and is obtained a picture and is deviateed image plane center position Δ x and Δ y；

Step f, speculum (3) angle is adjusted using the first driver (411) and the second driver (412), makes imaging sensor (65) institute returns to image plane center position at a picture；

The change in displacement Δ x1 and second laser interferometer (428) that step g, reading first laser interferometer (427) obtains The change in displacement Δ x2 arrived, be reconverted into speculum (3) angle change Δ θ andAnd then obtain the angle on measured object (5) surface Spend changes delta α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 indicate 4 functions.