CN105990495A - Light-emitting unit and semiconductor light-emitting device - Google Patents
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
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- H01L25/04—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/075—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H10H20/00
- H01L25/0753—Assemblies consisting of a plurality of semiconductor or other solid state devices all the devices being of a type provided for in a single subclass of subclasses H10B, H10F, H10H, H10K or H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H10H20/00 the devices being arranged next to each other
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- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
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- H10H20/857—Interconnections, e.g. lead-frames, bond wires or solder balls
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
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- H10H20/80—Constructional details
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- H10H20/852—Encapsulations
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- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
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Abstract
Description
[相关申请案][Related applications]
本申请案享有将日本专利申请案2014-187250号(申请日:2014年9月16日)作为基础申请案的优先权。本申请案通过参照该基础申请案而包含基础申请案的全部内容。This application enjoys the priority of Japanese Patent Application No. 2014-187250 (filing date: September 16, 2014) as the basic application. This application includes the entire content of the basic application by referring to this basic application.
技术领域technical field
本发明的实施方式涉及一种发光单元及半导体发光装置。Embodiments of the present invention relate to a light emitting unit and a semiconductor light emitting device.
背景技术Background technique
提出有一种在包含发光层的芯片的一面侧设置着荧光体层、在另一面侧设置着电极、配线层及树脂层的芯片尺寸封装体构造的半导体发光装置。另外,也提出有在多芯片封装体中利用封装体内的配线层将多个芯片间电连接的构造。A semiconductor light emitting device having a chip size package structure in which a phosphor layer is provided on one side of a chip including a light emitting layer and an electrode, a wiring layer, and a resin layer are provided on the other side has been proposed. In addition, in a multi-chip package, a structure in which a plurality of chips are electrically connected by a wiring layer in the package has also been proposed.
发明内容Contents of the invention
本发明的实施方式提供一种能以简单的构造将多芯片封装体中的多个发光元件间连接的发光单元及半导体发光装置。Embodiments of the present invention provide a light emitting unit and a semiconductor light emitting device capable of connecting a plurality of light emitting elements in a multi-chip package with a simple structure.
根据实施方式,发光单元包括安装衬底及半导体发光装置。所述安装衬底具有第一垫、第二垫、及设置在所述第一垫与所述第二垫之间的第三垫。所述半导体发光装置具有:多个发光元件,分别具有两个外部端子;及树脂层,一体地支持所述多个发光元件。所述多个发光元件包含沿第一方向排列的n(n为2以上的整数)个发光元件。所述n个发光元件的(2×n)个所述外部端子沿所述第一方向排列。所述(2×n)个外部端子中,所述第一方向的一端的外部端子与所述第一垫接合,所述第一方向的另一端的外部端子与所述第二垫接合,所述一端的外部端子与所述另一端的外部端子之间的外部端子与所述第三垫接合。According to an embodiment, a light emitting unit includes a mounting substrate and a semiconductor light emitting device. The mount substrate has a first pad, a second pad, and a third pad disposed between the first pad and the second pad. The semiconductor light emitting device includes: a plurality of light emitting elements each having two external terminals; and a resin layer integrally supporting the plurality of light emitting elements. The plurality of light emitting elements include n (n is an integer greater than or equal to 2) light emitting elements arranged along the first direction. The (2×n) external terminals of the n light emitting elements are arranged along the first direction. Among the (2×n) external terminals, an external terminal at one end in the first direction is bonded to the first pad, and an external terminal at the other end in the first direction is bonded to the second pad, so An external terminal between the external terminal at one end and the external terminal at the other end is joined to the third pad.
附图说明Description of drawings
图1是实施方式的发光单元的示意俯视图。FIG. 1 is a schematic plan view of a light emitting unit according to the embodiment.
图2(a)是实施方式的安装衬底的示意俯视图,(b)是实施方式的半导体发光装置的示意俯视图。Fig. 2(a) is a schematic plan view of a mounting substrate according to the embodiment, and Fig. 2(b) is a schematic plan view of the semiconductor light emitting device according to the embodiment.
图3是实施方式的半导体发光装置的示意剖视图。Fig. 3 is a schematic cross-sectional view of the semiconductor light emitting device according to the embodiment.
图4是表示实施方式的半导体发光装置的电极布局的示意俯视图。4 is a schematic plan view showing an electrode layout of the semiconductor light emitting device according to the embodiment.
图5是实施方式的半导体发光装置的局部示意剖视图。5 is a partial schematic cross-sectional view of the semiconductor light emitting device according to the embodiment.
图6是实施方式的安装衬底的示意俯视图。Fig. 6 is a schematic plan view of the mounting substrate of the embodiment.
图7是实施方式的发光单元的示意俯视图。Fig. 7 is a schematic plan view of the light emitting unit of the embodiment.
图8(a)是实施方式的安装衬底的示意俯视图,(b)是实施方式的半导体发光装置的示意俯视图。Fig. 8(a) is a schematic plan view of a mounting substrate according to an embodiment, and Fig. 8(b) is a schematic plan view of a semiconductor light emitting device according to an embodiment.
图9是实施方式的发光单元的示意俯视图。Fig. 9 is a schematic plan view of the light emitting unit of the embodiment.
图10(a)是实施方式的安装衬底的示意俯视图,(b)是实施方式的半导体发光装置的示意俯视图。Fig. 10(a) is a schematic plan view of a mounting substrate according to the embodiment, and Fig. 10(b) is a schematic plan view of the semiconductor light emitting device according to the embodiment.
图11是实施方式的半导体发光装置的示意剖视图。Fig. 11 is a schematic cross-sectional view of the semiconductor light emitting device of the embodiment.
图12是实施方式的半导体发光装置的示意俯视图。Fig. 12 is a schematic plan view of the semiconductor light emitting device of the embodiment.
图13是实施方式的半导体发光装置的示意剖视图。13 is a schematic cross-sectional view of a semiconductor light emitting device according to an embodiment.
图14是实施方式的半导体发光装置的示意剖视图。14 is a schematic cross-sectional view of a semiconductor light emitting device according to an embodiment.
具体实施方式detailed description
以下,参照附图对实施方式进行说明。此外,在各附图中,对相同要素标注相同符号。Embodiments will be described below with reference to the drawings. In addition, in each drawing, the same code|symbol is attached|subjected to the same element.
图1是实施方式的发光单元的示意俯视图。FIG. 1 is a schematic plan view of a light emitting unit according to the embodiment.
图2(a)是实施方式的安装衬底70的示意俯视图。FIG. 2( a ) is a schematic plan view of a mounting substrate 70 according to the embodiment.
图2(b)是实施方式的半导体发光装置1的示意俯视图。Fig. 2(b) is a schematic plan view of the semiconductor light emitting device 1 of the embodiment.
图3是实施方式的半导体发光装置1的示意剖视图。FIG. 3 is a schematic cross-sectional view of the semiconductor light emitting device 1 according to the embodiment.
图2(b)表示半导体发光装置1的安装面,与图3所示的半导体发光装置1的仰视图对应。FIG. 2( b ) shows the mounting surface of the semiconductor light emitting device 1 and corresponds to the bottom view of the semiconductor light emitting device 1 shown in FIG. 3 .
图1表示以图2(b)所示的半导体发光装置1的安装面朝向图2(a)所示的安装衬底70的垫81~83的方式将半导体发光装置1安装在安装衬底70的状态。图1是在将半导体发光装置1安装在安装衬底70的状态下从半导体发光装置1的上表面侧(安装面的相反侧)观察的示意俯视图。1 shows that the semiconductor light emitting device 1 is mounted on the mounting substrate 70 with the mounting surface of the semiconductor light emitting device 1 shown in FIG. 2( b) facing the pads 81-83 of the mounting substrate 70 shown in FIG. 2( a). status. 1 is a schematic plan view of the semiconductor light emitting device 1 viewed from the upper surface side (the side opposite to the mounting surface) in a state where the semiconductor light emitting device 1 is mounted on a mounting substrate 70 .
半导体发光装置1具有多个发光元件10。在图1、图2(b)及图3所示的示例中,半导体发光装置1具有例如两个发光元件10。多个发光元件10以晶片级由树脂层25予以封装,树脂层25一体地支持着多个发光元件10。The semiconductor light emitting device 1 has a plurality of light emitting elements 10 . In the example shown in FIG. 1 , FIG. 2( b ) and FIG. 3 , the semiconductor light emitting device 1 has, for example, two light emitting elements 10 . The plurality of light emitting elements 10 are encapsulated by the resin layer 25 at the wafer level, and the resin layer 25 supports the plurality of light emitting elements 10 integrally.
从上表面或上表面的相反侧的安装面侧观察半导体发光装置1的外形形状例如为矩形。在该矩形的长边方向(第一方向X)排列着例如两个发光元件10。各个发光元件10具有相同的构成。The outer shape of the semiconductor light emitting device 1 viewed from the upper surface or the mounting surface side opposite to the upper surface is, for example, a rectangle. For example, two light emitting elements 10 are arranged in the long side direction (first direction X) of the rectangle. Each light emitting element 10 has the same configuration.
如图3所示,发光元件10具备包含发光层13的半导体层15。半导体层15具有厚度方向的一侧(第一侧)15a及该第一侧15a的相反侧的第二侧15b(图4)。As shown in FIG. 3 , the light emitting element 10 includes a semiconductor layer 15 including a light emitting layer 13 . The semiconductor layer 15 has one side (first side) 15a in the thickness direction and a second side 15b opposite to the first side 15a ( FIG. 4 ).
图4是一个发光元件10中的半导体层15的第二侧15b的示意俯视图,且表示p侧电极16与n侧电极17的平面布局的一例。4 is a schematic plan view of the second side 15 b of the semiconductor layer 15 in one light emitting element 10 , and shows an example of the planar layout of the p-side electrode 16 and the n-side electrode 17 .
半导体层15的第二侧15b具有包含发光层13的部分(发光区域)15e及不含发光层13的部分15f。包含发光层13的部分15e是半导体层15中积层着发光层13的部分。不含发光层13的部分15f是半导体层15中未积层发光层13的部分。包含发光层13的部分15e表示成为能够将发光层13所发出的光提取至外部的积层构造的区域。The second side 15b of the semiconductor layer 15 has a portion (light emitting region) 15e including the light emitting layer 13 and a portion 15f not including the light emitting layer 13 . The portion 15 e including the light emitting layer 13 is a portion of the semiconductor layer 15 on which the light emitting layer 13 is laminated. The portion 15f not containing the light emitting layer 13 is a portion of the semiconductor layer 15 where the light emitting layer 13 is not laminated. The portion 15e including the light emitting layer 13 represents a region having a laminated structure capable of extracting light emitted from the light emitting layer 13 to the outside.
在第二侧15b,在包含发光层13的部分15e上设置着p侧电极16作为第一电极,在不含发光层的部分15f上设置着n侧电极17作为第二电极。On the second side 15b, a p-side electrode 16 is provided as a first electrode on a portion 15e including the luminescent layer 13, and an n-side electrode 17 is provided as a second electrode on a portion 15f not containing the luminescent layer.
在图4所示的示例中,不含发光层13的部分15f包围着包含发光层13的部分15e,n侧电极17包围着p侧电极16。In the example shown in FIG. 4 , a portion 15 f not containing the light emitting layer 13 surrounds a portion 15 e containing the light emitting layer 13 , and the n-side electrode 17 surrounds the p-side electrode 16 .
电流通过p侧电极16及n侧电极17而供给到发光层13,从而发光层13发光。而且,从发光层13放射的光从第一侧15a出射到半导体发光装置1的外部。A current is supplied to the light-emitting layer 13 through the p-side electrode 16 and the n-side electrode 17, so that the light-emitting layer 13 emits light. Furthermore, the light emitted from the light emitting layer 13 is emitted to the outside of the semiconductor light emitting device 1 from the first side 15 a.
如图3所示,在半导体层15的第二侧设置着支持体100。包含半导体层15、p侧电极16及n侧电极17的发光元件10由设置在第二侧的支持体100支持。As shown in FIG. 3 , a support 100 is provided on the second side of the semiconductor layer 15 . The light emitting element 10 including the semiconductor layer 15 , the p-side electrode 16 and the n-side electrode 17 is supported by the support 100 provided on the second side.
在半导体层15的第一侧15a,设置着荧光体层30作为对半导体发光装置1的发射光赋予所需的光学特性的光学层。荧光体层30包含多个粒子状的荧光体31。荧光体31被发光层13的放射光激发,而放射与该放射光不同波长的光。On the first side 15 a of the semiconductor layer 15 , a phosphor layer 30 is provided as an optical layer that imparts desired optical characteristics to the emitted light of the semiconductor light emitting device 1 . Phosphor layer 30 includes a plurality of particulate phosphors 31 . Phosphor 31 is excited by the radiated light from light-emitting layer 13, and emits light having a wavelength different from the radiated light.
多个荧光体31通过结合材料32而一体化。结合材料32使发光层13的放射光及荧光体31的放射光透过。此处,所谓「透过」,并不限于透过率为100%的情况,也包含吸收光的一部分的情况。A plurality of phosphors 31 are integrated by a bonding material 32 . The bonding material 32 transmits the radiated light of the light emitting layer 13 and the radiated light of the phosphor 31 . Here, the term "transmission" is not limited to the case where the transmittance is 100%, but also includes the case where part of the light is absorbed.
半导体层15具有第一半导体层11、第二半导体层12、及发光层13。发光层13设置在第一半导体层11与第二半导体层12之间。第一半导体层11及第二半导体层12包含例如氮化镓。The semiconductor layer 15 has a first semiconductor layer 11 , a second semiconductor layer 12 , and a light emitting layer 13 . The light emitting layer 13 is disposed between the first semiconductor layer 11 and the second semiconductor layer 12 . The first semiconductor layer 11 and the second semiconductor layer 12 include gallium nitride, for example.
第一半导体层11包含例如基底缓冲层、n型GaN层。第二半导体层12包含例如p型GaN层。发光层13包含发出蓝、紫、蓝紫、紫外光等的材料。发光层13的发光峰值波长例如为430~470nm。The first semiconductor layer 11 includes, for example, a base buffer layer and an n-type GaN layer. The second semiconductor layer 12 includes, for example, a p-type GaN layer. The light-emitting layer 13 contains a material that emits blue, violet, blue-violet, ultraviolet, and the like. The emission peak wavelength of the light emitting layer 13 is, for example, 430 to 470 nm.
半导体层15的第二侧被加工成凹凸形状。该凸部是包含发光层13的部分15e,凹部是不含发光层13的部分15f。包含发光层13的部分15e的表面是第二半导体层12的表面,在第二半导体层12的表面设置着p侧电极16。不含发光层13的部分15f的表面是第一半导体层11的表面,在第一半导体层11的表面设置着n侧电极17。The second side of the semiconductor layer 15 is processed into a concave-convex shape. The convex portion is a portion 15e including the light emitting layer 13 , and the concave portion is a portion 15f not including the light emitting layer 13 . The surface of the portion 15 e including the light emitting layer 13 is the surface of the second semiconductor layer 12 , and the p-side electrode 16 is provided on the surface of the second semiconductor layer 12 . The surface of the portion 15 f not containing the light emitting layer 13 is the surface of the first semiconductor layer 11 , and the n-side electrode 17 is provided on the surface of the first semiconductor layer 11 .
在半导体层15的第二侧,包含发光层13的部分15e的面积大于不含发光层13的部分15f的面积。另外,设置在包含发光层13的部分15e的表面的p侧电极16的面积大于设置在不含发光层13的部分15f的表面的n侧电极17的面积。由此,可获得较广的发光面,从而可提高光输出。On the second side of the semiconductor layer 15 , the area of the portion 15 e containing the light emitting layer 13 is larger than the area of the portion 15 f not containing the light emitting layer 13 . In addition, the area of p-side electrode 16 provided on the surface of portion 15 e including light emitting layer 13 is larger than the area of n-side electrode 17 provided on the surface of portion 15 f not including light emitting layer 13 . Thereby, a wide light-emitting surface can be obtained, so that the light output can be improved.
如图4所示,n侧电极17具有例如四条直线部,在其中的一条直线部设置着在该直线部的宽度方向上突出的接触部17c。如图3所示,在该接触部17c的表面连接n侧配线层22的通孔22a。As shown in FIG. 4 , the n-side electrode 17 has, for example, four straight portions, and one of the straight portions is provided with a contact portion 17 c protruding in the width direction of the straight portion. As shown in FIG. 3, the via hole 22a of the n-side wiring layer 22 is connected to the surface of the contact portion 17c.
如图3所示,半导体层15的第二侧、p侧电极16及n侧电极17由绝缘膜(第一绝缘膜)18覆盖。绝缘膜18例如为氧化硅膜等无机绝缘膜。绝缘膜18还设置在发光层13的侧面及第二半导体层12的侧面,并覆盖这些侧面。As shown in FIG. 3 , the second side of the semiconductor layer 15 , the p-side electrode 16 and the n-side electrode 17 are covered with an insulating film (first insulating film) 18 . The insulating film 18 is, for example, an inorganic insulating film such as a silicon oxide film. The insulating film 18 is also provided on the side surfaces of the light emitting layer 13 and the second semiconductor layer 12 to cover these side surfaces.
另外,绝缘膜18还设置在半导体层15中的从第一侧15a连续的侧面(第一半导体层11的侧面)15c,并覆盖该侧面15c。In addition, the insulating film 18 is also provided on a side surface (side surface of the first semiconductor layer 11 ) 15 c continuous from the first side 15 a in the semiconductor layer 15 , and covers the side surface 15 c.
进而,绝缘膜18还设置在半导体层15的侧面15c周围的芯片外周部。设置在芯片外周部的绝缘膜18在第一侧15a向远离侧面15c的方向延伸。Furthermore, the insulating film 18 is also provided on the outer peripheral portion of the chip around the side surface 15 c of the semiconductor layer 15 . The insulating film 18 provided on the outer peripheral portion of the chip extends on the first side 15a in a direction away from the side surface 15c.
在第二侧的绝缘膜18上,相互分离地设置着作为第一配线层的p侧配线层21与作为第二配线层的n侧配线层22。在绝缘膜18形成通向p侧电极16的多个第一开口、及通向n侧电极17的接触部17c的第二开口。On the insulating film 18 on the second side, a p-side wiring layer 21 as a first wiring layer and an n-side wiring layer 22 as a second wiring layer are provided separately from each other. A plurality of first openings leading to the p-side electrode 16 and second openings leading to the contact portion 17 c of the n-side electrode 17 are formed in the insulating film 18 .
p侧配线层21设置在绝缘膜18上及第一开口的内部。p侧配线层21经由设置在第一开口内的通孔21a而与p侧电极16电连接。The p-side wiring layer 21 is provided on the insulating film 18 and inside the first opening. The p-side wiring layer 21 is electrically connected to the p-side electrode 16 via the via hole 21 a provided in the first opening.
n侧配线层22设置在绝缘膜18上及第二开口的内部。n侧配线层22经由设置在第二开口内的通孔22a而与n侧电极17的接触部17c电连接。The n-side wiring layer 22 is provided on the insulating film 18 and inside the second opening. The n-side wiring layer 22 is electrically connected to the contact portion 17c of the n-side electrode 17 via the via hole 22a provided in the second opening.
p侧配线层21及n侧配线层22占据第二侧的区域的大部分而在绝缘膜18上扩展。p侧配线层21经由多个通孔21a与p侧电极16连接。The p-side wiring layer 21 and the n-side wiring layer 22 occupy most of the second-side area and spread over the insulating film 18 . The p-side wiring layer 21 is connected to the p-side electrode 16 via a plurality of via holes 21 a.
另外,反射膜51介隔绝缘膜18而覆盖着半导体层15的侧面15c。反射膜51不与侧面15c接触,而不与半导体层15电连接。反射膜51相对于p侧配线层21及n侧配线层22分离。反射膜51对发光层13的放射光及荧光体31的放射光具有反射性。In addition, the reflective film 51 covers the side surface 15 c of the semiconductor layer 15 via the insulating film 18 . The reflective film 51 is not in contact with the side surface 15 c and is not electrically connected to the semiconductor layer 15 . The reflective film 51 is separated from the p-side wiring layer 21 and the n-side wiring layer 22 . The reflective film 51 is reflective to the radiated light of the light emitting layer 13 and the radiated light of the phosphor 31 .
反射膜51、p侧配线层21及n侧配线层22包含例如铜膜。反射膜51、p侧配线层21及n侧配线层22通过例如镀敷法而同时形成在图5所示的共用金属膜60上。反射膜51、p侧配线层21及n侧配线层22各自的厚度比金属膜60的厚度厚。The reflective film 51 , the p-side wiring layer 21 and the n-side wiring layer 22 include, for example, a copper film. The reflective film 51 , the p-side wiring layer 21 and the n-side wiring layer 22 are simultaneously formed on the common metal film 60 shown in FIG. 5 by, for example, a plating method. The reflective film 51 , the p-side wiring layer 21 , and the n-side wiring layer 22 are each thicker than the metal film 60 .
金属膜60具有从绝缘膜18侧起依序积层的基底金属膜61、密接层62、及籽晶层63。The metal film 60 has a base metal film 61 , an adhesive layer 62 , and a seed layer 63 laminated in this order from the insulating film 18 side.
基底金属膜61是对发光层13的放射光具有较高的反射性的例如铝膜。The underlying metal film 61 is, for example, an aluminum film that has high reflectivity to light emitted from the light emitting layer 13 .
籽晶层63是用来通过镀敷使铜析出的铜膜。密接层62是相对于铝及铜两者的润湿性优异的例如钛膜。The seed layer 63 is a copper film for depositing copper by plating. The adhesion layer 62 is, for example, a titanium film having excellent wettability to both aluminum and copper.
此外,在与半导体层15的侧面15c邻接的芯片外周部,也可以不在金属膜60上形成镀敷膜(铜膜),而由金属膜60形成反射膜51。反射膜51至少包含铝膜61,由此对发光层13的放射光及荧光体31的放射光具有较高的反射率。In addition, the reflective film 51 may be formed from the metal film 60 instead of forming a plated film (copper film) on the metal film 60 on the outer peripheral portion of the chip adjacent to the side surface 15 c of the semiconductor layer 15 . The reflective film 51 includes at least the aluminum film 61 , thereby having a high reflectance with respect to the radiated light of the light-emitting layer 13 and the radiated light of the phosphor 31 .
另外,因为在p侧配线层21及n侧配线层22下也残留基底金属膜(铝膜)61,所以铝膜61扩展形成在第二侧的大部分区域。由此,可增大朝向荧光体层30侧的光量。In addition, since the underlying metal film (aluminum film) 61 remains under the p-side wiring layer 21 and the n-side wiring layer 22, the aluminum film 61 is spread over most of the second side. Thereby, the amount of light directed toward the phosphor layer 30 side can be increased.
在p侧配线层21的与半导体层15为相反侧的面设置着p侧金属柱23作为第一金属柱。p侧配线层21及p侧金属柱23形成p侧配线部(第一配线部)41。On the surface of the p-side wiring layer 21 opposite to the semiconductor layer 15 , a p-side metal pillar 23 is provided as a first metal pillar. The p-side wiring layer 21 and the p-side metal pillar 23 form a p-side wiring portion (first wiring portion) 41 .
在n侧配线层22的与半导体层15为相反侧的面设置着n侧金属柱24作为第二金属柱。n侧配线层22及n侧金属柱24形成n侧配线部(第二配线部)43。On the surface of the n-side wiring layer 22 opposite to the semiconductor layer 15 , an n-side metal pillar 24 is provided as a second metal pillar. The n-side wiring layer 22 and the n-side metal pillar 24 form an n-side wiring portion (second wiring portion) 43 .
在p侧配线部41与n侧配线部43之间设置着树脂层25作为第二绝缘膜。树脂层25以与p侧金属柱23的侧面及n侧金属柱24的侧面接触的方式设置在p侧金属柱23与n侧金属柱24之间。即,在p侧金属柱23与n侧金属柱24之间填充着树脂层25。A resin layer 25 is provided as a second insulating film between the p-side wiring portion 41 and the n-side wiring portion 43 . Resin layer 25 is provided between p-side metal pillar 23 and n-side metal pillar 24 so as to be in contact with side surfaces of p-side metal pillar 23 and n-side metal pillar 24 . That is, the resin layer 25 is filled between the p-side metal pillar 23 and the n-side metal pillar 24 .
另外,树脂层25设置在p侧配线层21与n侧配线层22之间、p侧配线层21与反射膜51之间、及n侧配线层22与反射膜51之间。In addition, resin layer 25 is provided between p-side wiring layer 21 and n-side wiring layer 22 , between p-side wiring layer 21 and reflective film 51 , and between n-side wiring layer 22 and reflective film 51 .
树脂层25设置在p侧金属柱23的周围及n侧金属柱24的周围,覆盖着p侧金属柱23的侧面及n侧金属柱24的侧面。The resin layer 25 is disposed around the p-side metal pillar 23 and the n-side metal pillar 24 , and covers the side surfaces of the p-side metal pillar 23 and the n-side metal pillar 24 .
另外,树脂层25还设置在与半导体层15的侧面15c邻接的芯片外周部、及相互分离的多个半导体层15之间,覆盖着反射膜51。In addition, the resin layer 25 is also provided between the outer peripheral portion of the chip adjacent to the side surface 15 c of the semiconductor layer 15 and between the plurality of semiconductor layers 15 separated from each other, and covers the reflective film 51 .
p侧金属柱23的与p侧配线层21为相反侧的端部(面)从树脂层25露出,作为可与外部电路连接的p侧外部端子23a发挥功能。n侧金属柱24的与n侧配线层22为相反侧的端部(面)从树脂层25露出,作为可与外部电路连接的n侧外部端子24a发挥功能。如下所述,p侧外部端子23a及n侧外部端子24a经由例如焊料或导电性的接合材料而与图2(a)所示的安装衬底70的垫81~83接合。The end (surface) of the p-side metal pillar 23 on the opposite side to the p-side wiring layer 21 is exposed from the resin layer 25 and functions as a p-side external terminal 23a connectable to an external circuit. The end (surface) of the n-side metal pillar 24 on the opposite side to the n-side wiring layer 22 is exposed from the resin layer 25 and functions as an n-side external terminal 24 a connectable to an external circuit. The p-side external terminal 23 a and the n-side external terminal 24 a are bonded to the pads 81 to 83 of the mounting substrate 70 shown in FIG. 2( a ) via, for example, solder or a conductive bonding material as described below.
如图2(b)所示,p侧外部端子23a形成为例如矩形,n侧外部端子24a形成为将与p侧外部端子23a的矩形为相同尺寸的矩形中的两个角切除后的形状。由此,可辨别外部端子的极性。此外,也可以将n侧外部端子24a设为矩形,将p侧外部端子23a设为切除矩形的角所得的形状。As shown in FIG. 2( b ), p-side external terminal 23 a is formed in, for example, a rectangle, and n-side external terminal 24 a is formed in a shape in which two corners of a rectangle having the same dimensions as p-side external terminal 23 a are cut off. Thereby, the polarity of the external terminal can be distinguished. In addition, the n-side external terminal 24a may be formed in a rectangular shape, and the p-side external terminal 23a may be formed in a shape obtained by cutting off corners of the rectangle.
p侧外部端子23a与n侧外部端子24a的间隔比绝缘膜18上的p侧配线层21与n侧配线层22的间隔宽。p侧外部端子23a与n侧外部端子24a的间隔大于安装时的焊料的扩展宽度。由此,可防止通过焊料的p侧外部端子23a与n侧外部端子24a之间的短路。The distance between the p-side external terminal 23 a and the n-side external terminal 24 a is wider than the distance between the p-side wiring layer 21 and the n-side wiring layer 22 on the insulating film 18 . The distance between the p-side external terminal 23 a and the n-side external terminal 24 a is greater than the spreading width of the solder during mounting. Thereby, a short circuit between the p-side external terminal 23a and the n-side external terminal 24a passing through the solder can be prevented.
相对于此,p侧配线层21与n侧配线层22的间隔可缩窄到处理上的极限。因此,可谋求p侧配线层21的面积、及p侧配线层21与p侧金属柱23的接触面积的扩大。由此,可促进发光层13的热的散出。On the other hand, the distance between the p-side wiring layer 21 and the n-side wiring layer 22 can be narrowed to the processing limit. Therefore, the area of the p-side wiring layer 21 and the contact area between the p-side wiring layer 21 and the p-side metal pillar 23 can be enlarged. Thereby, dissipation of heat from the light emitting layer 13 can be promoted.
另外,p侧配线层21通过多个通孔21a与p侧电极16接触的面积大于n侧配线层22通过通孔22a与n侧电极17接触的面积。由此,可使在发光层13中流动的电流的分布均匀化。In addition, the area of the p-side wiring layer 21 in contact with the p-side electrode 16 through the plurality of via holes 21a is larger than the area of the n-side wiring layer 22 in contact with the n-side electrode 17 through the via holes 22a. Thereby, the distribution of the current flowing in the light emitting layer 13 can be made uniform.
在绝缘膜18上扩展的n侧配线层22的面积可大于n侧电极17的面积。而且,可使设置在n侧配线层22上的n侧金属柱24的面积(n侧外部端子24a的面积)大于n侧电极17。由此,可确保对安装来说充分的n侧外部端子24a的面积,并且可减小n侧电极17的面积。即,可缩小半导体层15中的不含发光层13的部分15f的面积,扩大包含发光层13的部分(发光区域)15e的面积,从而提高光输出。The area of the n-side wiring layer 22 extending on the insulating film 18 may be larger than the area of the n-side electrode 17 . Furthermore, the area of the n-side metal pillar 24 provided on the n-side wiring layer 22 (the area of the n-side external terminal 24 a ) can be made larger than the n-side electrode 17 . Thereby, the area of the n-side external terminal 24a sufficient for mounting can be ensured, and the area of the n-side electrode 17 can be reduced. That is, the area of the portion 15f not containing the light-emitting layer 13 in the semiconductor layer 15 can be reduced, and the area of the portion (light-emitting region) 15e including the light-emitting layer 13 can be enlarged, thereby improving light output.
第一半导体层11经由n侧电极17及n侧配线层22而与n侧金属柱24电连接。第二半导体层12经由p侧电极16及p侧配线层21而与p侧金属柱23电连接。The first semiconductor layer 11 is electrically connected to the n-side metal pillar 24 via the n-side electrode 17 and the n-side wiring layer 22 . The second semiconductor layer 12 is electrically connected to the p-side metal pillar 23 via the p-side electrode 16 and the p-side wiring layer 21 .
p侧金属柱23的厚度(连结p侧配线层21与p侧外部端子23a的方向的厚度)比p侧配线层21的厚度厚。n侧金属柱24的厚度(连结n侧配线层22与n侧外部端子24a的方向的厚度)比n侧配线层22的厚度厚。p侧金属柱23、n侧金属柱24及树脂层25各自的厚度比半导体层15厚。The thickness of the p-side metal pillar 23 (the thickness in the direction connecting the p-side wiring layer 21 and the p-side external terminal 23 a ) is thicker than the thickness of the p-side wiring layer 21 . The thickness of the n-side metal pillar 24 (the thickness in the direction connecting the n-side wiring layer 22 and the n-side external terminal 24 a ) is thicker than the thickness of the n-side wiring layer 22 . Each of the p-side metal pillar 23 , the n-side metal pillar 24 , and the resin layer 25 is thicker than the semiconductor layer 15 .
金属柱23、24的纵横比(厚度相对于平面尺寸的比)既可为1以上,也可以小于1。即,金属柱23、24既可比其平面尺寸厚,也可以比其平面尺寸薄。The aspect ratio (ratio of the thickness to the planar size) of the metal pillars 23 and 24 may be 1 or more or less than 1. That is, the metal pillars 23 and 24 may be thicker or thinner than their planar dimensions.
包含p侧配线层21、n侧配线层22、p侧金属柱23、n侧金属柱24及树脂层25的支持体100的厚度比包含半导体层15、p侧电极16及n侧电极17的发光元件(LED(LightEmitting Diode,发光二极管)芯片)10的厚度厚。The thickness of the support 100 including the p-side wiring layer 21, the n-side wiring layer 22, the p-side metal pillar 23, the n-side metal pillar 24, and the resin layer 25 is greater than that of the semiconductor layer 15, the p-side electrode 16, and the n-side electrode. The thickness of the light emitting element (LED (Light Emitting Diode, light emitting diode) chip) 10 of 17 is thick.
半导体层15通过外延生长(epitaxial growth)法而形成在未图示的衬底上。该衬底在形成支持体100后被去除,半导体层15在第一侧15a不含衬底。半导体层15并非由刚直的板状衬底支持,而是由包含金属柱23、24与树脂层25的复合体的支持体100支持。The semiconductor layer 15 is formed on an unillustrated substrate by an epitaxial growth method. The substrate is removed after formation of the carrier 100 , the semiconductor layer 15 being free of the substrate on the first side 15 a. The semiconductor layer 15 is not supported by a rigid plate substrate, but is supported by a support body 100 including a composite body of the metal pillars 23 and 24 and the resin layer 25 .
作为p侧配线部41及n侧配线部43的材料,可使用例如铜、金、镍、银等。如果使用这些材料中的铜,那么可使良好的导热性、较高的耐迁移性及对绝缘材料的密接性提高。As the material of the p-side wiring portion 41 and the n-side wiring portion 43, for example, copper, gold, nickel, silver, or the like can be used. If copper among these materials is used, good thermal conductivity, high migration resistance, and adhesion to insulating materials can be improved.
树脂层25补强p侧金属柱23及n侧金属柱24。树脂层25较理想的是使用热膨胀率与安装衬底70相同或接近的树脂层。作为这种树脂层25,例如可列举主要包含环氧树脂的树脂、主要包含硅酮树脂的树脂、主要包含氟树脂的树脂。The resin layer 25 reinforces the p-side metal pillar 23 and the n-side metal pillar 24 . For the resin layer 25 , it is desirable to use a resin layer having the same or close thermal expansion coefficient as that of the mounting substrate 70 . Examples of such resin layer 25 include resins mainly containing epoxy resins, resins mainly containing silicone resins, and resins mainly containing fluororesins.
另外,树脂层25中的成为基底的树脂中包含遮光材料(光吸收剂、光反射剂、光散射剂等),树脂层25对发光层13发出的光具有遮光性。由此,可抑制光从支持体100的侧面及安装面侧泄漏。In addition, the base resin in the resin layer 25 contains a light-shielding material (light absorber, light reflector, light-scatterer, etc.), and the resin layer 25 has light-shielding properties for light emitted by the light-emitting layer 13 . Thereby, light leakage from the side surface and mounting surface side of the support body 100 can be suppressed.
因将半导体发光装置1安装在安装衬底70时的热循环,而导致将使p侧外部端子23a及n侧外部端子24a与安装衬底70的垫81~83接合的焊料所引起的应力施加到半导体层15。p侧金属柱23、n侧金属柱24及树脂层25吸收并缓和该应力。尤其是通过将比半导体层15更柔软的树脂层25用作支持体100的一部分,可提高应力缓和效果。Due to the thermal cycle when the semiconductor light emitting device 1 is mounted on the mounting substrate 70, the stress due to the solder that joins the p-side external terminal 23a and the n-side external terminal 24a to the pads 81 to 83 of the mounting substrate 70 is applied. to the semiconductor layer 15. The p-side metal pillar 23, the n-side metal pillar 24, and the resin layer 25 absorb and relax the stress. In particular, by using the resin layer 25 softer than the semiconductor layer 15 as a part of the support 100, the stress relaxation effect can be enhanced.
反射膜51相对于p侧配线部41及n侧配线部43分离。因此,在安装时施加到p侧金属柱23及n侧金属柱24的应力不会传递给反射膜51。因此,可抑制反射膜51的剥离。另外,可抑制对半导体层15的侧面15c侧施加的应力。The reflective film 51 is separated from the p-side wiring portion 41 and the n-side wiring portion 43 . Therefore, the stress applied to the p-side metal pillar 23 and the n-side metal pillar 24 during mounting is not transmitted to the reflective film 51 . Therefore, peeling of the reflective film 51 can be suppressed. In addition, stress applied to the side surface 15c of the semiconductor layer 15 can be suppressed.
用于形成半导体层15的衬底从半导体层15被去除。由此,使半导体发光装置1低背化。另外,通过去除衬底,可在半导体层15的第一侧15a形成微小凹凸,从而谋求光提取效率的提高。The substrate for forming the semiconductor layer 15 is removed from the semiconductor layer 15 . As a result, the semiconductor light emitting device 1 has a low profile. In addition, by removing the substrate, fine unevenness can be formed on the first side 15a of the semiconductor layer 15, thereby improving the light extraction efficiency.
例如,对第一侧15a进行使用碱系溶液的湿式蚀刻,而形成微小凹凸。由此,可减少第一侧15a的全反射成分,从而提高光提取效率。For example, wet etching using an alkaline solution is performed on the first side 15a to form minute unevenness. Thus, the total reflection component of the first side 15a can be reduced, thereby improving the light extraction efficiency.
去除衬底后,在第一侧15a上介隔绝缘膜19而形成荧光体层30。绝缘膜19提高半导体层15与荧光体层30的密接性,例如为氧化硅膜、氮化硅膜。After removing the substrate, the phosphor layer 30 is formed on the first side 15 a via the insulating film 19 . The insulating film 19 improves the adhesion between the semiconductor layer 15 and the phosphor layer 30 and is, for example, a silicon oxide film or a silicon nitride film.
荧光体层30具有在结合材料32中分散着多个粒子状的荧光体31的构造。结合材料32可使用例如硅酮树脂。Phosphor layer 30 has a structure in which a plurality of particulate phosphors 31 are dispersed in binder 32 . For the bonding material 32, for example, silicone resin can be used.
荧光体层30还形成在半导体层15的侧面15c周围的芯片外周部上、及发光元件10与发光元件10之间的区域上。在芯片外周部及发光元件10间的区域,在绝缘膜(例如氧化硅膜)18上设置着荧光体层30。Phosphor layer 30 is also formed on the outer peripheral portion of the chip around side surface 15 c of semiconductor layer 15 and on the region between light emitting elements 10 and 10 . A phosphor layer 30 is provided on an insulating film (for example, a silicon oxide film) 18 in a region between the outer periphery of the chip and the light emitting element 10 .
在半导体层15与半导体层15之间的区域(芯片间区域),绝缘膜18并不限于连续,也可以像图13所示那样分断。因树脂层25的热膨胀系数而可能有在绝缘膜18产生裂缝的情况,但通过像图13所示那样利用图案化将芯片间区域的绝缘膜18分断,可抑制裂缝。In the region between the semiconductor layers 15 (inter-chip region), the insulating film 18 is not limited to being continuous, but may be divided as shown in FIG. 13 . Cracks may occur in the insulating film 18 depending on the coefficient of thermal expansion of the resin layer 25 , but the cracks can be suppressed by dividing the insulating film 18 in the interchip region by patterning as shown in FIG. 13 .
荧光体层30被限定在比发光元件10更靠上的区域侧,不会回绕到半导体层15的第二侧、金属柱23、24的周围、及支持体100的侧面而形成。荧光体层30的侧面与支持体100的侧面(树脂层25的侧面)对齐。Phosphor layer 30 is limited to the upper region side of light emitting element 10 , and is formed without wrapping around the second side of semiconductor layer 15 , around metal pillars 23 , 24 , and the side surface of support 100 . The side surfaces of the phosphor layer 30 are aligned with the side surfaces of the support 100 (side surfaces of the resin layer 25 ).
在不将光提取到外部的安装面侧,不多余地形成荧光体层30,从而可谋求降低成本。另外,即便在第一侧15a不存在衬底,也能够经由在第二侧扩展的p侧配线层21及n侧配线层22使发光层13的热向安装衬底70侧散出,虽然小型,但散热性仍优异。On the side of the mounting surface where light is not extracted to the outside, the phosphor layer 30 is not redundantly formed, thereby achieving cost reduction. In addition, even if there is no substrate on the first side 15a, the heat of the light emitting layer 13 can be dissipated to the mounting substrate 70 side through the p-side wiring layer 21 and the n-side wiring layer 22 extending on the second side. Despite its small size, it has excellent heat dissipation.
普通的倒装芯片安装是将LED芯片经由凸块等安装在安装衬底后,以覆盖芯片整体的方式形成荧光体层。或者,在凸块间底填充树脂。In general flip-chip mounting, after mounting an LED chip on a mounting substrate via bumps or the like, a phosphor layer is formed so as to cover the entire chip. Alternatively, resin is underfilled between the bumps.
相对于此,根据实施方式,在安装前的状态下,在p侧金属柱23的周围及n侧金属柱24的周围设置与荧光体层30不同的树脂层25,可对安装面侧赋予适于应力缓和的特性。另外,因为在安装面侧已设置着树脂层25,所以无需安装后的底填充。On the other hand, according to the embodiment, the resin layer 25 different from the phosphor layer 30 is provided around the p-side metal pillar 23 and around the n-side metal pillar 24 in the state before mounting, and the mounting surface side can be provided with a suitable surface. properties for stress relaxation. In addition, since the resin layer 25 is already provided on the mounting surface side, underfill after mounting is unnecessary.
在第一侧15a设置以光提取效率、色转换效率、配光特性等优先而设计的层,在安装面侧设置以安装时的应力缓和、或作为代替衬底的支持体的特性优先的层。例如,树脂层25具有在成为基底的树脂中高密度地填充着二氧化硅粒子等填料的构造,且被调整为作为支持体适当的硬度。A layer designed with priority in light extraction efficiency, color conversion efficiency, light distribution characteristics, etc. is provided on the first side 15a, and a layer with priority in stress relaxation during mounting or the characteristics of a support as a substitute substrate is provided on the mounting surface side. . For example, the resin layer 25 has a structure in which fillers such as silica particles are densely filled in a base resin, and is adjusted to have an appropriate hardness as a support.
从发光层13向第一侧15a放射的光入射至荧光体层30,一部分光激发荧光体31,作为发光层13的光与荧光体31的光的混合光,可获得例如白光。The light emitted from the light emitting layer 13 toward the first side 15 a enters the phosphor layer 30 , a part of the light excites the phosphor 31 , and white light is obtained as mixed light of light from the light emitting layer 13 and light from the phosphor 31 .
此处,如果在第一侧15a上存在衬底,那么会产生不入射至荧光体层30而从衬底的侧面向外部泄漏的光。即,发光层13的光的色彩较强的光从衬底的侧面泄漏,而可能导致在从上表面观察荧光体层30的情况下可在外缘侧看到蓝色光环的现象等色分离或色不均。Here, if there is a substrate on the first side 15a, light that does not enter the phosphor layer 30 and leaks to the outside from the side of the substrate occurs. That is, the light of the light-emitting layer 13 with a strong color leaks from the side of the substrate, which may cause a phenomenon such as color separation or a phenomenon in which a blue halo can be seen on the outer edge side when the phosphor layer 30 is viewed from the upper surface. Uneven color.
相对于此,根据实施方式,因为在第一侧15a与荧光体层30之间不存在用于半导体层15的生长的衬底,因此可防止因发光层13的光的色彩较强的光从衬底侧面泄漏而导致的色分离或色不均。On the other hand, according to the embodiment, since there is no substrate for the growth of the semiconductor layer 15 between the first side 15a and the phosphor layer 30, it is possible to prevent the strong color of light from the light emitting layer 13 from Color separation or color unevenness caused by leakage from the side of the substrate.
进而,根据实施方式,在半导体层15的侧面15c,介隔绝缘膜18而设置着反射膜51。从发光层13朝向半导体层15的侧面15c的光由反射膜51反射,而不会泄漏到外部。因此,与在第一侧15a无衬底的特征相辅相成,可防止因光从半导体发光装置的侧面侧泄漏而导致的色分离或色不均。Furthermore, according to the embodiment, the reflective film 51 is provided on the side surface 15 c of the semiconductor layer 15 via the insulating film 18 . Light from the light emitting layer 13 toward the side surface 15 c of the semiconductor layer 15 is reflected by the reflective film 51 without leaking to the outside. Therefore, complementary to the feature of no substrate on the first side 15a, color separation or color unevenness due to light leakage from the side surfaces of the semiconductor light emitting device can be prevented.
设置在反射膜51与半导体层15的侧面15c之间的绝缘膜18防止反射膜51中所含的金属向半导体层15扩散。由此,可防止半导体层15的例如GaN的金属污染,从而可防止半导体层15的劣化。The insulating film 18 provided between the reflective film 51 and the side surface 15 c of the semiconductor layer 15 prevents metal contained in the reflective film 51 from diffusing into the semiconductor layer 15 . Thereby, metal contamination of the semiconductor layer 15 such as GaN can be prevented, and deterioration of the semiconductor layer 15 can be prevented.
另外,设置在反射膜51与荧光体层30之间、及树脂层25与荧光体层30之间的绝缘膜18提高反射膜51与荧光体层30的密接性、及树脂层25与荧光体层30的密接性。In addition, the insulating film 18 provided between the reflective film 51 and the phosphor layer 30 and between the resin layer 25 and the phosphor layer 30 improves the adhesion between the reflective film 51 and the phosphor layer 30 and the adhesion between the resin layer 25 and the phosphor layer. Adhesiveness of layer 30.
绝缘膜18例如为氧化硅膜、氮化硅膜等无机绝缘膜。即,半导体层15的第一侧15a、第二侧、第一半导体层11的侧面15c、第二半导体层12的侧面、发光层13的侧面由无机绝缘膜覆盖。无机绝缘膜包围半导体层15,将半导体层15封闭使其免受金属或水分等影响。The insulating film 18 is, for example, an inorganic insulating film such as a silicon oxide film or a silicon nitride film. That is, the first side 15a, the second side, the side surface 15c of the first semiconductor layer 11, the side surface of the second semiconductor layer 12, and the side surface of the light emitting layer 13 of the semiconductor layer 15 are covered with an inorganic insulating film. The inorganic insulating film surrounds the semiconductor layer 15 and seals the semiconductor layer 15 from metal, moisture, and the like.
荧光体层30跨及多个发光元件10间而扩展。在荧光体层30上视需要设置透镜50。透镜50由例如透明树脂形成。在图3中例示凸透镜,但也可以是凹透镜。Phosphor layer 30 extends across the plurality of light emitting elements 10 . A lens 50 is optionally provided on the phosphor layer 30 . The lens 50 is formed of, for example, transparent resin. Although a convex lens is illustrated in FIG. 3 , a concave lens may also be used.
多个发光元件10由共用的树脂层25予以封装。因此,能以盖住多个发光元件10的方式形成一体型的透镜。根据实施方式的多芯片封装体,可利用透镜形状进行配光特性控制,这对于在按每一个发光元件分离的个别封装体上形成透镜是无法实现的。A plurality of light emitting elements 10 are encapsulated by a common resin layer 25 . Therefore, an integral lens can be formed so as to cover the plurality of light emitting elements 10 . According to the multi-chip package of the embodiment, it is possible to control the light distribution characteristics using the shape of the lens, which cannot be realized by forming the lens on the individual package separated for each light emitting element.
形成发光元件10、支持体100、荧光体层30及透镜50的步骤是以包含多个半导体层15的晶片状态进行。之后,晶片被分离为包含至少两个发光元件10(半导体层15)的多个半导体发光装置1。在半导体层15与半导体层15之间的区域(切割区域)进行切断。通过任意地选择切割区域,可选择一个半导体发光装置中所包含的发光元件10(半导体层15)的数量。The steps of forming the light-emitting element 10 , the support 100 , the phosphor layer 30 and the lens 50 are performed in the state of a wafer including a plurality of semiconductor layers 15 . After that, the wafer is separated into a plurality of semiconductor light emitting devices 1 including at least two light emitting elements 10 (semiconductor layers 15). Cutting is performed in a region (cut region) between the semiconductor layer 15 and the semiconductor layer 15 . By arbitrarily selecting the dicing area, the number of light-emitting elements 10 (semiconductor layers 15 ) included in one semiconductor light-emitting device can be selected.
至切割为止的各步骤是以晶片状态总括地进行,因此无需针对分离后所得的各个半导体发光装置的每一个进行配线层的形成、柱的形成、利用树脂层的封装、及荧光体层的形成,可大幅地降低成本。Since the steps up to dicing are collectively performed in the wafer state, it is not necessary to form a wiring layer, form a pillar, encapsulate with a resin layer, and form a phosphor layer for each semiconductor light emitting device obtained after separation. Formation can greatly reduce the cost.
在以晶片状态形成支持体100及荧光体层30后,将它们切断,因此荧光体层30的侧面与支持体100的侧面(树脂层25的侧面)对齐,这些侧面形成分离后所得的半导体发光装置1的侧面。因此,也和无衬底的情况相辅相成,可提供小型的半导体发光装置。After forming the support body 100 and the phosphor layer 30 in a wafer state, they are cut so that the side faces of the phosphor layer 30 are aligned with the side faces of the support body 100 (the side faces of the resin layer 25 ), and these side faces form the separated semiconductor light emitting diodes. Side of device 1. Therefore, it is also possible to provide a small semiconductor light-emitting device in conjunction with the absence of a substrate.
根据实施方式,在半导体层15的第一侧15a设置着光学层。在光学层与安装面(设置着外部端子23a、24a的面)之间设置着包含半导体层15及电极16、17的发光元件10。According to an embodiment, an optical layer is arranged on the first side 15 a of the semiconductor layer 15 . The light emitting element 10 including the semiconductor layer 15 and the electrodes 16 and 17 is provided between the optical layer and the mounting surface (the surface on which the external terminals 23 a and 24 a are provided).
作为光学层,并不限于荧光体层,也可以是散射层。散射层包含使发光层13的放射光散射的多个粒子状的散射材料(例如钛化合物)、及将多个散射材料一体化且使发光层13的放射光透过的结合材料(例如树脂层)。The optical layer is not limited to a phosphor layer, and may be a scattering layer. The scattering layer includes a plurality of particulate scattering materials (such as a titanium compound) that scatters the radiated light of the luminescent layer 13, and a bonding material (such as a resin layer) that integrates the plurality of scattering materials and transmits the radiated light of the luminescent layer 13. ).
所述半导体发光装置1安装在图2(a)所示的安装衬底70。安装衬底70具有第一垫81、第二垫82、及第三垫83。第一垫81、第二垫82及第三垫83由金属(例如铜)形成。第一垫81、第二垫82及第三垫83形成在绝缘体上。第一垫81、第二垫82及第三垫83的周围分别由绝缘体包围。The semiconductor light emitting device 1 is mounted on a mounting substrate 70 shown in FIG. 2( a ). The mounting substrate 70 has a first pad 81 , a second pad 82 , and a third pad 83 . The first pad 81 , the second pad 82 and the third pad 83 are formed of metal (such as copper). The first pad 81, the second pad 82, and the third pad 83 are formed on the insulator. Surroundings of the first pad 81 , the second pad 82 and the third pad 83 are respectively surrounded by insulators.
第一垫81、第二垫82及第三垫83在第一方向X上相互隔开排列。在第一垫81与第二垫82之间设置着第三垫83。The first pad 81 , the second pad 82 and the third pad 83 are spaced apart from each other in the first direction X. A third pad 83 is provided between the first pad 81 and the second pad 82 .
第一垫81与半导体发光装置1的p侧外部端子23a处于全等图形的关系,第二垫82与半导体发光装置1的n侧外部端子24a处于全等图形的关系。The first pad 81 is in a congruent pattern relationship with the p-side external terminal 23a of the semiconductor light emitting device 1 , and the second pad 82 is in a congruent pattern relationship with the n-side external terminal 24a of the semiconductor light emitting device 1 .
第一垫81形成为具有沿相对于第一方向X正交的第二方向Y延伸的长边的矩形。第二垫82形成为将与第一垫81的矩形为相同尺寸的矩形中的两个角切除后的形状。由此,可辨别垫的极性。The first pad 81 is formed in a rectangle having a long side extending in a second direction Y orthogonal to the first direction X. As shown in FIG. The second pad 82 is formed in a shape obtained by cutting two corners of a rectangle having the same size as the rectangle of the first pad 81 . Thereby, the polarity of the pad can be distinguished.
此外,在将半导体发光装置1的n侧外部端子24a设为矩形,将p侧外部端子23a设为切除矩形的角所得的形状的情况下,可将第二垫82设为矩形,将第一垫81设为切除矩形的角所得的形状。In addition, when the n-side external terminal 24a of the semiconductor light emitting device 1 is formed into a rectangle, and the p-side external terminal 23a is formed into a shape obtained by cutting off the corners of the rectangle, the second pad 82 can be formed into a rectangle, and the first pad 82 can be formed into a rectangle. The pad 81 has a shape obtained by cutting off corners of a rectangle.
第三垫83形成为例如四边形状。第三垫83的面积大于第一垫81的面积及第二垫82的面积。相对于将第三垫83在第一方向X上分成二等份的中心线C,第一垫81与第二垫82对称配置。The third pad 83 is formed in, for example, a quadrangular shape. The area of the third pad 83 is larger than the area of the first pad 81 and the area of the second pad 82 . The first pad 81 and the second pad 82 are arranged symmetrically with respect to the center line C that divides the third pad 83 into two equal parts in the first direction X.
如图2(b)所示,在半导体发光装置1中,两个发光元件10沿第一方向X排列。各个发光元件10具有一个p侧外部端子23a与一个n侧外部端子24a。在一个发光元件10中,p侧外部端子23a与n侧外部端子24a沿第一方向X排列。As shown in FIG. 2( b ), in the semiconductor light emitting device 1 , two light emitting elements 10 are arranged along the first direction X. As shown in FIG. Each light emitting element 10 has one p-side external terminal 23a and one n-side external terminal 24a. In one light emitting element 10 , the p-side external terminal 23 a and the n-side external terminal 24 a are arranged along the first direction X.
因此,两个发光元件10的四个外部端子23a、24a沿第一方向X排列。p侧外部端子23a与n侧外部端子24a交替地沿第一方向X排列。Therefore, the four external terminals 23a, 24a of the two light emitting elements 10 are arranged along the first direction X. As shown in FIG. The p-side external terminals 23 a and the n-side external terminals 24 a are alternately arranged along the first direction X.
在图2(b)中,左侧的发光元件10的p侧外部端子23a连接在左侧的发光元件10的p侧电极16,左侧的发光元件10的n侧外部端子24a连接在左侧的发光元件10的n侧电极17。In FIG. 2( b ), the p-side external terminal 23a of the light-emitting element 10 on the left is connected to the p-side electrode 16 of the light-emitting element 10 on the left, and the n-side external terminal 24a of the light-emitting element 10 on the left is connected to the left side. The n-side electrode 17 of the light emitting element 10.
在图2(b)中,右侧的发光元件10的p侧外部端子23a连接在右侧的发光元件10的p侧电极16,右侧的发光元件10的n侧外部端子24a连接在右侧的发光元件10的n侧电极17。In FIG. 2( b ), the p-side external terminal 23a of the light-emitting element 10 on the right is connected to the p-side electrode 16 of the light-emitting element 10 on the right, and the n-side external terminal 24a of the light-emitting element 10 on the right is connected to the right side. The n-side electrode 17 of the light emitting element 10.
沿第一方向X排列的四个外部端子23a、24a中,第一方向X的一端的p侧外部端子23a经由例如焊料而与安装衬底70的第一垫81接合。即,在图2(b)中,左侧的发光元件10的p侧外部端子23a与第一垫81接合。Among the four external terminals 23a and 24a arranged in the first direction X, the p-side external terminal 23a at one end in the first direction X is bonded to the first pad 81 of the mounting substrate 70 via, for example, solder. That is, in FIG. 2( b ), the p-side external terminal 23 a of the light emitting element 10 on the left is bonded to the first pad 81 .
四个外部端子23a、24a中,第一方向X的另一端的n侧外部端子24a经由例如焊料而与安装衬底70的第二垫82接合。即,在图2(b)中,右侧的发光元件10的n侧外部端子24a与第二垫82接合。Among the four external terminals 23a and 24a, the n-side external terminal 24a at the other end in the first direction X is bonded to the second pad 82 of the mounting substrate 70 via, for example, solder. That is, in FIG. 2( b ), the n-side external terminal 24 a of the light emitting element 10 on the right is bonded to the second pad 82 .
接合在第一垫81的左端的p侧外部端子23a与接合在第二垫82的右端的n侧外部端子24a之间的两个外部端子23a、24a经由焊料而与安装衬底70的第三垫83接合。这两个外部端子23a、24a与共用的第三垫83接合。The two external terminals 23a, 24a between the p-side external terminal 23a bonded to the left end of the first pad 81 and the n-side external terminal 24a bonded to the right end of the second pad 82 are connected to the third terminal of the mounting substrate 70 via solder. Pad 83 engages. These two external terminals 23a, 24a are bonded to a common third pad 83 .
因此,在第一方向X上相邻的两个发光元件10中,其中一个(图2(b)中为左侧的)发光元件10的n侧外部端子24a、及另一个(图2(b)中为右侧的)发光元件10的p侧外部端子23a与共用的第三垫83接合。Therefore, among the two adjacent light emitting elements 10 in the first direction X, the n-side external terminal 24a of the light emitting element 10 of one (the left side in FIG. ) The p-side external terminal 23 a of the light emitting element 10 on the right side is bonded to the common third pad 83 .
对第一垫81,通过形成在安装衬底70的未图示的配线而赋予阳极电位。对第二垫82,通过形成在安装衬底70的未图示的配线而赋予比阳极电位低的阴极电位。An anode potential is applied to the first pad 81 through an unillustrated wiring formed on the mounting substrate 70 . A cathode potential lower than an anode potential is given to the second pad 82 by an unillustrated wiring formed on the mounting substrate 70 .
第三垫83不与任一处电连接,该第三垫83的电位浮动。其中一个(左侧)发光元件10的n侧外部端子24a与另一个(右侧)发光元件10的p侧外部端子23a经由第三垫83而电连接。The third pad 83 is not electrically connected to any one, and the potential of the third pad 83 floats. The n-side external terminal 24 a of one (left) light emitting element 10 and the p-side external terminal 23 a of the other (right) light emitting element 10 are electrically connected via the third pad 83 .
电流经由第一垫81、与该第一垫81接合的左端的p侧外部端子23a、左侧的发光元件10的p侧金属柱23、p侧配线层21、p侧电极16、及第二半导体层12被供给到发光层13,进而流经左侧的发光元件10的第一半导体层11、n侧电极17、n侧配线层22、n侧金属柱24、及n侧外部端子24a。The current passes through the first pad 81, the p-side external terminal 23a at the left end bonded to the first pad 81, the p-side metal post 23 of the light-emitting element 10 on the left, the p-side wiring layer 21, the p-side electrode 16, and the first pad 81. The second semiconductor layer 12 is supplied to the light-emitting layer 13, and then flows through the first semiconductor layer 11, the n-side electrode 17, the n-side wiring layer 22, the n-side metal column 24, and the n-side external terminal of the light-emitting element 10 on the left. 24a.
进而,电流经由第三垫83、右侧的发光元件10的p侧外部端子23a、p侧金属柱23、p侧配线层21、p侧电极16、及第二半导体层12被供给到右侧的发光元件10的发光层13,进而流经右侧的发光元件10的第一半导体层11、n侧电极17、n侧配线层22、n侧金属柱24、n侧外部端子24a、及接合着该n侧外部端子24a的第二垫82。Furthermore, the current is supplied to the right side through the third pad 83, the p-side external terminal 23a of the light-emitting element 10 on the right side, the p-side metal post 23, the p-side wiring layer 21, the p-side electrode 16, and the second semiconductor layer 12. The light-emitting layer 13 of the light-emitting element 10 on the right side, and then flows through the first semiconductor layer 11, the n-side electrode 17, the n-side wiring layer 22, the n-side metal pillar 24, the n-side external terminal 24a, And the second pad 82 to which the n-side external terminal 24a is bonded.
即,像图1中以二极管的电路记号示意性地表示那样,两个发光元件10在第一垫81与第二垫82之间串联连接。That is, two light emitting elements 10 are connected in series between the first pad 81 and the second pad 82 as schematically represented by a circuit symbol of a diode in FIG. 1 .
两个发光元件10通过形成在安装衬底70的第三垫83而电连接。无需利用封装体内的配线层连接两个发光元件10便可简单地形成多芯片封装体的半导体发光装置1的构造。The two light emitting elements 10 are electrically connected through the third pad 83 formed on the mounting substrate 70 . The structure of the semiconductor light-emitting device 1 in a multi-chip package can be easily formed without connecting the two light-emitting elements 10 through a wiring layer in the package.
第三垫83的面积大于第一垫81的面积及第二垫82的面积。另外,第三垫83的面积大于将第一垫81的面积与第二垫82的面积相加所得的面积。进而,第三垫83的面积大于将一个p侧外部端子23a的面积与一个n侧外部端子24a的面积相加所得的面积。通过这种较宽的第三垫83,可使半导体发光装置1的热高效率地逸散到安装衬底70侧。The area of the third pad 83 is larger than the area of the first pad 81 and the area of the second pad 82 . In addition, the area of the third pad 83 is larger than the area obtained by adding the area of the first pad 81 and the area of the second pad 82 . Furthermore, the area of the third pad 83 is larger than the area obtained by adding the area of one p-side external terminal 23a and the area of one n-side external terminal 24a. With such a wide third pad 83 , the heat of the semiconductor light emitting device 1 can be efficiently dissipated to the mounting substrate 70 side.
为了不易引起经由焊料的短路,第一垫81与第三垫83之间的距离、即图2(b)中左侧的发光元件10的p侧外部端子23a与n侧外部端子24a之间的距离较理想的是200μm以上。同样地,为了不易引起经由焊料的短路,第二垫82与第三垫83之间的距离、即图2(b)中右侧的发光元件10的p侧外部端子23a与n侧外部端子24a之间的距离也较理想的是200μm以上。In order not to easily cause a short circuit via solder, the distance between the first pad 81 and the third pad 83, that is, the distance between the p-side external terminal 23a and the n-side external terminal 24a of the light-emitting element 10 on the left in FIG. The distance is preferably 200 μm or more. Similarly, the distance between the second pad 82 and the third pad 83, that is, the p-side external terminal 23a and the n-side external terminal 24a of the light-emitting element 10 on the right side in FIG. The distance between them is also preferably 200 μm or more.
相对于此,因为其中一个(左侧)发光元件10的n侧外部端子24a及另一个(右侧)发光元件10的p侧外部端子23a与共用的第三垫83接合,所以这些相邻的发光元件10的相邻的外部端子23a、24a间的距离不受制约,设计自由度较高。On the other hand, since the n-side external terminal 24a of one (left) light emitting element 10 and the p-side external terminal 23a of the other (right) light emitting element 10 are bonded to the common third pad 83, these adjacent The distance between the adjacent external terminals 23a and 24a of the light emitting element 10 is not restricted, and the degree of freedom in design is high.
在使一个封装体中包含一个发光元件的单芯片构造的两个半导体发光装置邻接而安装在安装衬底的情况下,在所安装的半导体发光装置间必须具有间隙,以使保持半导体发光装置的筒夹不与相邻的半导体发光装置发生碰撞。因此,即便使各个半导体发光装置的封装体尺寸小型化,安装空间仍受到筒夹尺寸的制约。When two semiconductor light-emitting devices of a single-chip structure including one light-emitting element are adjacently mounted on a mounting substrate in a package, there must be a gap between the mounted semiconductor light-emitting devices so that the semiconductor light-emitting devices can be kept. The collet does not collide with adjacent semiconductor light emitting devices. Therefore, even if the size of the package of each semiconductor light emitting device is miniaturized, the mounting space is still limited by the size of the collet.
相对于此,根据实施方式,因为能够在一个封装体内使多个发光元件10接近,所以相比逐一地安装经单片化的多个发光元件,可缩小安装衬底上的安装空间。On the other hand, according to the embodiment, since a plurality of light emitting elements 10 can be brought close together in one package, the mounting space on the mounting substrate can be reduced compared to mounting a plurality of singulated light emitting elements one by one.
图6是表示安装衬底的垫的另一例的示意俯视图。Fig. 6 is a schematic plan view showing another example of the pad of the mounting substrate.
根据图6,在第三垫83一体地设置第4垫84,从而散热面积比图2(a)所示的示例扩大。第4垫84以避开第一垫81及第二垫82的方式从第三垫83沿第二方向Y扩展。According to FIG. 6 , the fourth pad 84 is provided integrally with the third pad 83 , so that the heat dissipation area is larger than that shown in FIG. 2( a ). The fourth pad 84 extends from the third pad 83 in the second direction Y so as to avoid the first pad 81 and the second pad 82 .
图7是另一实施方式的发光单元的示意俯视图。Fig. 7 is a schematic top view of a light emitting unit according to another embodiment.
图8(a)是另一实施方式的安装衬底70的示意俯视图。FIG. 8( a ) is a schematic plan view of a mounting substrate 70 according to another embodiment.
图8(b)是另一实施方式的半导体发光装置1的示意俯视图。Fig. 8(b) is a schematic plan view of a semiconductor light emitting device 1 according to another embodiment.
图7、图8(a)及图8(b)是分别与图1、图2(a)及图2(b)对应的图,对相同要素标注相同符号。FIG. 7 , FIG. 8( a ) and FIG. 8( b ) are diagrams respectively corresponding to FIG. 1 , FIG. 2( a ) and FIG. 2( b ), and the same symbols are attached to the same elements.
图8(b)所示的半导体发光装置1具有例如四个发光元件10。四个发光元件10是以晶片级由树脂层25予以封装,树脂层25一体地支持着四个发光元件10。The semiconductor light emitting device 1 shown in FIG. 8( b ) has, for example, four light emitting elements 10 . The four light emitting elements 10 are encapsulated by the resin layer 25 at the wafer level, and the resin layer 25 integrally supports the four light emitting elements 10 .
沿第一方向X排列的两个发光元件10的群组(列)在相对于第一方向X正交的第二方向Y上排成两列。Two groups (rows) of light emitting elements 10 arranged in the first direction X are arranged in two rows in the second direction Y perpendicular to the first direction X.
在沿第一方向X排列的两个发光元件10的群组(列)中,p侧外部端子23a与n侧外部端子24a交替地沿第一方向X排列。In a group (column) of two light emitting elements 10 arranged in the first direction X, p-side external terminals 23 a and n-side external terminals 24 a are arranged in the first direction X alternately.
在安装衬底70形成着一个第一垫81、一个第二垫82、及两个第三垫83。One first pad 81 , one second pad 82 , and two third pads 83 are formed on the mounting substrate 70 .
两个第三垫83在第一垫81与第二垫82之间沿第二方向Y相互隔开排列。The two third pads 83 are spaced apart from each other along the second direction Y between the first pad 81 and the second pad 82 .
沿第一方向X排成一列的四个外部端子23a、24a中,第一方向X的一端的p侧外部端子23a经由例如焊料而与安装衬底70的第一垫81接合。即,在图8(b)中,左侧的两个发光元件10的两个p侧外部端子23a与第一垫81接合。Among the four external terminals 23a and 24a arranged in a row along the first direction X, the p-side external terminal 23a at one end in the first direction X is bonded to the first pad 81 of the mounting substrate 70 via, for example, solder. That is, in FIG. 8( b ), the two p-side external terminals 23 a of the two light emitting elements 10 on the left are bonded to the first pad 81 .
沿第一方向X排成一列的四个外部端子23a、24a中,第一方向X的另一端的n侧外部端子24a经由例如焊料而与安装衬底70的第二垫82接合。即,在图8(b)中,右侧的两个发光元件10的两个n侧外部端子24a与第二垫82接合。Among the four external terminals 23a and 24a arranged in a row along the first direction X, the n-side external terminal 24a at the other end in the first direction X is bonded to the second pad 82 of the mounting substrate 70 via, for example, solder. That is, in FIG. 8( b ), the two n-side external terminals 24 a of the two light emitting elements 10 on the right are bonded to the second pad 82 .
接合在第一垫81的左端的p侧外部端子23a与接合在第二垫82的右端的n侧外部端子24a之间的外部端子23a、24a经由焊料而与安装衬底70的第三垫83接合。The external terminals 23a, 24a between the p-side external terminal 23a bonded to the left end of the first pad 81 and the n-side external terminal 24a bonded to the right end of the second pad 82 are connected to the third pad 83 of the mounting substrate 70 via solder. join.
在图8(b)中,上侧列中在第一方向X上相邻的两个发光元件10中,其中一个(左侧)发光元件10的n侧外部端子24a、及另一个(右侧)发光元件10的p侧外部端子23a与两个第三垫83中的其中一个接合。In FIG. 8( b ), among the two light-emitting elements 10 adjacent in the first direction X in the upper column, the n-side external terminal 24a of one (left side) light-emitting element 10 and the other (right side) ) The p-side external terminal 23 a of the light emitting element 10 is bonded to one of the two third pads 83 .
在图8(b)中,下侧列中在第一方向X上相邻的两个发光元件10中,其中一个(左侧)发光元件10的n侧外部端子24a、及另一个(右侧)发光元件10的p侧外部端子23a与两个第三垫83中的另一个接合。In FIG. 8( b ), among the two light-emitting elements 10 adjacent in the first direction X in the lower column, the n-side external terminal 24a of one (left side) light-emitting element 10 and the other (right side) ) The p-side external terminal 23 a of the light emitting element 10 is bonded to the other of the two third pads 83 .
对第一垫81,通过形成在安装衬底70的未图示的配线而赋予阳极电位。对第二垫82,通过形成在安装衬底70的未图示的配线而赋予比阳极电位低的阴极电位。An anode potential is applied to the first pad 81 through an unillustrated wiring formed on the mounting substrate 70 . A cathode potential lower than an anode potential is given to the second pad 82 by an unillustrated wiring formed on the mounting substrate 70 .
第三垫83不与任一处电连接,该第三垫83的电位浮动。在第一方向X上相邻的其中一个(左侧)发光元件10的n侧外部端子24a与另一个(右侧)发光元件10的p侧外部端子23a经由第三垫83而电连接。The third pad 83 is not electrically connected to any one, and the potential of the third pad 83 floats. The n-side external terminal 24 a of one (left) light emitting element 10 adjacent in the first direction X is electrically connected to the p-side external terminal 23 a of the other (right) light emitting element 10 via the third pad 83 .
因此,像图7中以二极管的电路记号示意性地表示那样,沿第一方向X排列的两个发光元件10在第一垫81与第二垫82之间串联连接。另外,上列与下列在第一垫81与第二垫82之间并联连接。Therefore, two light emitting elements 10 arranged in the first direction X are connected in series between the first pad 81 and the second pad 82 as schematically indicated by a circuit symbol of a diode in FIG. 7 . In addition, the upper row and the lower row are connected in parallel between the first pad 81 and the second pad 82 .
因为在第一方向X上相邻的其中一个(左侧)发光元件10的n侧外部端子24a、及另一个(右侧)发光元件10的p侧外部端子23a与共用的第三垫83接合,所以这些相邻的发光元件10的相邻的外部端子23a、24a间的距离不受制约,设计自由度较高。Because the n-side external terminal 24a of one (left) light-emitting element 10 adjacent in the first direction X and the p-side external terminal 23a of the other (right) light-emitting element 10 are bonded to the common third pad 83 Therefore, the distance between the adjacent external terminals 23a, 24a of these adjacent light-emitting elements 10 is not restricted, and the degree of freedom in design is high.
另外,因为能够在一个封装体内使多个发光元件10接近,所以相比逐一地安装经单片化的多个发光元件,可缩小安装衬底上的安装空间。In addition, since a plurality of light emitting elements 10 can be brought close together in one package, the mounting space on the mounting substrate can be reduced compared to mounting a plurality of singulated light emitting elements one by one.
图9是又一实施方式的发光单元的示意俯视图。Fig. 9 is a schematic plan view of a light emitting unit according to yet another embodiment.
图10(a)是又一实施方式的安装衬底70的示意俯视图。Fig. 10(a) is a schematic plan view of a mounting substrate 70 according to still another embodiment.
图10(b)是又一实施方式的半导体发光装置1的示意俯视图。Fig. 10(b) is a schematic plan view of a semiconductor light emitting device 1 according to still another embodiment.
图9、图10(a)及图10(b)是分别与图7、图8(a)及图8(b)对应的图,对相同要素标注相同符号。FIG. 9 , FIG. 10( a ) and FIG. 10( b ) are diagrams respectively corresponding to FIG. 7 , FIG. 8( a ) and FIG. 8( b ), and the same reference numerals are attached to the same elements.
图10(b)所示的半导体发光装置1具有例如六个发光元件10。六个发光元件10是以晶片级由树脂层25予以封装,树脂层25一体地支持着六个发光元件10。The semiconductor light emitting device 1 shown in FIG. 10( b ) has, for example, six light emitting elements 10 . The six light emitting elements 10 are encapsulated by the resin layer 25 at the wafer level, and the resin layer 25 integrally supports the six light emitting elements 10 .
在第一方向X上排列着三个发光元件10。沿第一方向X排列的三个发光元件10的群组(列)在相对于第一方向X正交的第二方向Y上排成两列。Three light emitting elements 10 are arranged in the first direction X. Groups (rows) of three light emitting elements 10 arranged in the first direction X are arranged in two rows in a second direction Y perpendicular to the first direction X. FIG.
在沿第一方向X排列的三个发光元件10的群组(列)中,p侧外部端子23a与n侧外部端子24a交替地沿第一方向X排列。In a group (column) of three light emitting elements 10 arranged in the first direction X, p-side external terminals 23 a and n-side external terminals 24 a are arranged in the first direction X alternately.
在安装衬底70形成着两个第一垫81、两个第二垫82、及四个第三垫83。Two first pads 81 , two second pads 82 , and four third pads 83 are formed on the mounting substrate 70 .
两个第一垫81在第二方向Y上相互隔开排列。两个第二垫82在第二方向Y上相互隔开排列。或者,也可以像图8(a)所示的示例那样为沿第二方向Y连结的一个第一垫81与沿第二方向Y连结的一个第二垫82。在该情况下,垫面积增大,散热性提高。The two first pads 81 are arranged spaced apart from each other in the second direction Y. The two second pads 82 are arranged spaced apart from each other in the second direction Y. Alternatively, one first pad 81 connected in the second direction Y and one second pad 82 connected in the second direction Y may be used like the example shown in FIG. 8( a ). In this case, the pad area increases and heat dissipation improves.
在第一垫81与第二垫82之间,组合沿第一方向X排列的两个第三垫83及沿第二方向Y排列的两个第三垫83而设置着四个第三垫83。Between the first pad 81 and the second pad 82, four third pads 83 are provided by combining two third pads 83 arranged in the first direction X and two third pads 83 arranged in the second direction Y. .
沿第一方向X排成一列的三个发光元件10的六个外部端子23a、24a中,第一方向X的一端的p侧外部端子23a经由例如焊料而与安装衬底70的第一垫81接合。即,在图10(b)中,沿第二方向Y排列的左端的两个发光元件10的两个p侧外部端子23a与第一垫81接合。Among the six external terminals 23a, 24a of the three light emitting elements 10 arranged in a row along the first direction X, the p-side external terminal 23a at one end in the first direction X is connected to the first pad 81 of the mounting substrate 70 via, for example, solder. join. That is, in FIG. 10( b ), the two p-side external terminals 23 a of the left end two light emitting elements 10 arranged in the second direction Y are bonded to the first pad 81 .
沿第一方向X排成一列的六个外部端子23a、24a中,第一方向X的另一端的n侧外部端子24a经由例如焊料而与安装衬底70的第二垫82接合。即,在图10(b)中,沿第二方向Y排列的右端的两个发光元件10的两个n侧外部端子24a与第二垫82接合。Among the six external terminals 23a and 24a arranged in a row along the first direction X, the n-side external terminal 24a at the other end in the first direction X is bonded to the second pad 82 of the mounting substrate 70 via, for example, solder. That is, in FIG. 10( b ), the two n-side external terminals 24 a of the two light emitting elements 10 at the right end arranged in the second direction Y are bonded to the second pad 82 .
接合在第一垫81的左端的p侧外部端子23a与接合在第二垫82的右端的n侧外部端子24a之间的外部端子23a、24a经由焊料而与安装衬底70的第三垫83接合。The external terminals 23a, 24a between the p-side external terminal 23a bonded to the left end of the first pad 81 and the n-side external terminal 24a bonded to the right end of the second pad 82 are connected to the third pad 83 of the mounting substrate 70 via solder. join.
在图10(b)中,上侧列的左端及其右侧相邻的两个发光元件10中,其中一个(左侧)发光元件10的n侧外部端子24a、及另一个(右侧)发光元件10的p侧外部端子23a与图10(a)所示的第一垫81旁边的两个第三垫83中的其中一个接合。In FIG. 10( b ), among the two light-emitting elements 10 adjacent to the left end of the upper row and its right side, the n-side external terminal 24a of one (left side) light-emitting element 10 and the other (right side) The p-side external terminal 23a of the light emitting element 10 is bonded to one of the two third pads 83 next to the first pad 81 shown in FIG. 10( a ).
在图10(b)中,下侧列的左端及其右侧相邻的两个发光元件10中,其中一个(左侧)发光元件10的n侧外部端子24a、及另一个(右侧)发光元件10的p侧外部端子23a与图10(a)所示的第一垫81旁边的两个第三垫83中的另一个接合。In Fig. 10(b), among the two light-emitting elements 10 adjacent to the left end and the right side of the lower column, the n-side external terminal 24a of one (left side) light-emitting element 10, and the other (right side) The p-side external terminal 23 a of the light emitting element 10 is bonded to the other of the two third pads 83 next to the first pad 81 shown in FIG. 10( a ).
在图10(b)中,上侧列的右端及其左侧相邻的两个发光元件10中,其中一个(左侧)发光元件10的n侧外部端子24a、及另一个(右侧)发光元件10的p侧外部端子23a与图10(a)所示的第二垫82旁边的两个第三垫83中的其中一个接合。In FIG. 10( b ), among the two light-emitting elements 10 adjacent to the right end of the upper column and its left side, the n-side external terminal 24a of one (left side) light-emitting element 10 and the other (right side) The p-side external terminal 23 a of the light emitting element 10 is bonded to one of the two third pads 83 next to the second pad 82 shown in FIG. 10( a ).
在图10(b)中,下侧列的右端及其左侧相邻的两个发光元件10中,其中一个(左侧)发光元件10的n侧外部端子24a、及另一个(右侧)发光元件10的p侧外部端子23a与图10(a)所示的第二垫82旁边的两个第三垫83中的另一个接合。In FIG. 10( b ), among the two light-emitting elements 10 adjacent to the right end and left side of the lower column, the n-side external terminal 24a of one (left side) light-emitting element 10 and the other (right side) The p-side external terminal 23 a of the light emitting element 10 is bonded to the other of the two third pads 83 next to the second pad 82 shown in FIG. 10( a ).
对第一垫81,通过形成在安装衬底70的未图示的配线而赋予阳极电位。对第二垫82,通过形成在安装衬底70的未图示的配线而赋予比阳极电位低的阴极电位。An anode potential is applied to the first pad 81 through an unillustrated wiring formed on the mounting substrate 70 . A cathode potential lower than an anode potential is given to the second pad 82 by an unillustrated wiring formed on the mounting substrate 70 .
第三垫83不与任一处电连接,该第三垫83的电位浮动。在第一方向X上相邻的两个发光元件10的其中一个发光元件10的n侧外部端子24a(p侧外部端子23a)与另一个发光元件10的p侧外部端子23a(n侧外部端子24a)经由第三垫83而电连接。The third pad 83 is not electrically connected to any one, and the potential of the third pad 83 floats. The n-side external terminal 24a (p-side external terminal 23a) of one of the two light-emitting elements 10 adjacent in the first direction X is connected to the p-side external terminal 23a (n-side external terminal 23a) of the other light-emitting element 10. 24a) is electrically connected via the third pad 83 .
因此,像图9中以二极管的电路记号示意性地表示那样,沿第一方向X排列的三个发光元件10在第一垫81与第二垫82之间串联连接。Therefore, three light emitting elements 10 arranged in the first direction X are connected in series between the first pad 81 and the second pad 82 as schematically indicated by the circuit symbols of diodes in FIG. 9 .
因为在第一方向X上相邻的其中一个发光元件10的n侧外部端子24a(p侧外部端子23a)、及另一个发光元件10的p侧外部端子23a(n侧外部端子24a)与共用的第三垫83接合,所以这些相邻的发光元件10的相邻的外部端子23a、24a间的距离不受制约,设计自由度较高。Because the n-side external terminal 24a (p-side external terminal 23a) of one of the light-emitting elements 10 adjacent in the first direction X and the p-side external terminal 23a (n-side external terminal 24a) of the other light-emitting element 10 are connected to the common Therefore, the distance between the adjacent external terminals 23a, 24a of these adjacent light-emitting elements 10 is not restricted, and the degree of freedom in design is high.
另外,因为能够在一个封装体内使多个发光元件10接近,所以相比逐一地安装经单片化的多个发光元件,可缩小安装衬底上的安装空间。In addition, since a plurality of light emitting elements 10 can be brought close together in one package, the mounting space on the mounting substrate can be reduced compared to mounting a plurality of singulated light emitting elements one by one.
图11是另一实施方式的半导体发光装置2的示意剖视图。FIG. 11 is a schematic cross-sectional view of a semiconductor light emitting device 2 according to another embodiment.
图12是半导体发光装置2的示意俯视图。图12表示半导体发光装置2的安装面,与图11所示的半导体发光装置2的仰视图对应。FIG. 12 is a schematic plan view of the semiconductor light emitting device 2 . FIG. 12 shows the mounting surface of the semiconductor light emitting device 2 and corresponds to the bottom view of the semiconductor light emitting device 2 shown in FIG. 11 .
半导体发光装置2在具有第三金属柱26及第三外部端子26a方面不同于所述实施方式的半导体发光装置1。在半导体发光装置2中,对与半导体发光装置1相同的要素标注相同符号,并省略该要素的详细说明。The semiconductor light emitting device 2 is different from the semiconductor light emitting device 1 of the above-mentioned embodiment in that it has the third metal pillar 26 and the third external terminal 26a. In the semiconductor light emitting device 2 , the same elements as those in the semiconductor light emitting device 1 are denoted by the same reference numerals, and detailed descriptions of the elements are omitted.
半导体发光装置2具有多个发光元件10。在图11、图12所示的示例中,半导体发光装置2具有例如两个发光元件10。多个发光元件10是以晶片级由树脂层25予以封装,树脂层25一体地支持着多个发光元件10。The semiconductor light emitting device 2 has a plurality of light emitting elements 10 . In the example shown in FIGS. 11 and 12 , the semiconductor light emitting device 2 has, for example, two light emitting elements 10 . The plurality of light emitting elements 10 are encapsulated by the resin layer 25 at the wafer level, and the resin layer 25 integrally supports the plurality of light emitting elements 10 .
从上表面或上表面的相反侧的安装面侧观察半导体发光装置2的外形形状例如为矩形。在该矩形的长边方向(第一方向X)排列着例如两个发光元件10。The outer shape of the semiconductor light emitting device 2 viewed from the upper surface or the mounting surface side opposite to the upper surface is, for example, a rectangle. For example, two light emitting elements 10 are arranged in the long side direction (first direction X) of the rectangle.
在第一方向X上相邻的两个发光元件10的其中一个发光元件10具有p侧金属柱23及p侧外部端子23a,不具有n侧金属柱24及n侧外部端子24a。另一个发光元件10相反,不具有p侧金属柱23及p侧外部端子23a,而具有n侧金属柱24及n侧外部端子24a。One of the two light-emitting elements 10 adjacent in the first direction X has a p-side metal pillar 23 and a p-side external terminal 23a, but does not have an n-side metal pillar 24 and an n-side external terminal 24a. In contrast, the other light emitting element 10 does not have the p-side metal pillar 23 and the p-side external terminal 23a, but has the n-side metal pillar 24 and the n-side external terminal 24a.
在第一方向X上相邻的两个发光元件10共用地设置着第三金属柱26。第三金属柱26由与p侧金属柱23及n侧金属柱24相同的材料形成,且利用相同的方法(例如镀敷法)同时形成。Two adjacent light emitting elements 10 in the first direction X share the third metal post 26 . The third metal post 26 is formed of the same material as the p-side metal post 23 and the n-side metal post 24 , and is formed simultaneously by the same method (eg, plating method).
第三金属柱26将第一方向X上相邻的两个发光元件10的其中一个发光元件10的n侧配线层22与另一个发光元件10的p侧配线层21连接。The third metal pillar 26 connects the n-side wiring layer 22 of one of the two light-emitting elements 10 adjacent in the first direction X to the p-side wiring layer 21 of the other light-emitting element 10 .
第三金属柱26的端部(图11中的下表面)从树脂层25露出,作为第三外部端子26a发挥功能。The end portion (lower surface in FIG. 11 ) of the third metal post 26 is exposed from the resin layer 25 and functions as a third external terminal 26a.
如图12所示,两个发光元件10沿第一方向X排列。其中一个发光元件10的p侧外部端子23a设置在第一方向X的一端,另一个发光元件10的n侧外部端子24a设置在第一方向X的另一端。在这些第一方向X的两端的p侧外部端子23a与n侧外部端子24a之间设置着第三外部端子26a。As shown in FIG. 12 , two light emitting elements 10 are arranged along the first direction X. As shown in FIG. The p-side external terminal 23a of one light emitting element 10 is disposed at one end in the first direction X, and the n-side external terminal 24a of the other light emitting element 10 is disposed at the other end in the first direction X. The third external terminal 26 a is provided between the p-side external terminal 23 a and the n-side external terminal 24 a at both ends in the first direction X.
第三外部端子26a形成为例如四边形状。第三外部端子26a的面积大于p侧外部端子23a的面积及n侧外部端子24a的面积。相对于将第三外部端子26a在第一方向X上分成二等份的中心线C,p侧外部端子23a与n侧外部端子24a对称配置。The third external terminal 26a is formed in, for example, a quadrangular shape. The area of the third external terminal 26a is larger than the area of the p-side external terminal 23a and the area of the n-side external terminal 24a. The p-side external terminal 23 a and the n-side external terminal 24 a are arranged symmetrically with respect to the center line C that divides the third external terminal 26 a into two equal parts in the first direction X.
在图11、12中,左侧的发光元件10的p侧外部端子23a连接在左侧的发光元件10的p侧电极16,左侧的发光元件10的n侧电极17连接在第三外部端子26a。In FIGS. 11 and 12, the p-side external terminal 23a of the left light-emitting element 10 is connected to the p-side electrode 16 of the left light-emitting element 10, and the n-side electrode 17 of the left light-emitting element 10 is connected to the third external terminal. 26a.
在图11、12中,右侧的发光元件10的n侧外部端子24a连接在右侧的发光元件10的n侧电极17,右侧的发光元件10的p侧电极16连接在第三外部端子26a。In FIGS. 11 and 12, the n-side external terminal 24a of the right light-emitting element 10 is connected to the n-side electrode 17 of the right light-emitting element 10, and the p-side electrode 16 of the right light-emitting element 10 is connected to the third external terminal. 26a.
图11、12所示的半导体发光装置2可安装在例如图2(a)所示的安装衬底。The semiconductor light emitting device 2 shown in FIGS. 11 and 12 can be mounted on, for example, a mounting substrate as shown in FIG. 2( a ).
p侧外部端子23a经由例如焊料而与安装衬底70的第一垫81接合。n侧外部端子24a经由例如焊料而与安装衬底70的第二垫82接合。p侧外部端子23a与n侧外部端子24a之间的第三外部端子26a经由焊料而与安装衬底70的第三垫83接合。The p-side external terminal 23 a is bonded to the first pad 81 of the mounting substrate 70 via, for example, solder. The n-side external terminal 24 a is bonded to the second pad 82 of the mounting substrate 70 via, for example, solder. The third external terminal 26 a between the p-side external terminal 23 a and the n-side external terminal 24 a is bonded to the third pad 83 of the mounting substrate 70 via solder.
对第一垫81,通过形成在安装衬底70的未图示的配线而赋予阳极电位。对第二垫82,通过形成在安装衬底70的未图示的配线而赋予比阳极电位低的阴极电位。An anode potential is applied to the first pad 81 through an unillustrated wiring formed on the mounting substrate 70 . A cathode potential lower than an anode potential is given to the second pad 82 by an unillustrated wiring formed on the mounting substrate 70 .
第三垫83不与任一处电连接,该第三垫83的电位浮动。其中一个(左侧)发光元件10的n侧电极17与另一个(右侧)发光元件10的p侧电极16经由第三金属柱26、第三外部端子26a、及第三垫83而电连接。The third pad 83 is not electrically connected to any one, and the potential of the third pad 83 floats. The n-side electrode 17 of one (left) light-emitting element 10 is electrically connected to the p-side electrode 16 of the other (right) light-emitting element 10 via the third metal pillar 26, the third external terminal 26a, and the third pad 83 .
电流经由第一垫81、与该第一垫81接合的其中一个发光元件10的p侧外部端子23a、p侧金属柱23、p侧配线层21、p侧电极16、及第二半导体层12被供给到发光层13,进而流经该其中一个发光元件10的第一半导体层11、n侧电极17、n侧配线层22、第三金属柱26、及第三外部端子26a。The current passes through the first pad 81, the p-side external terminal 23a of one of the light emitting elements 10 bonded to the first pad 81, the p-side metal post 23, the p-side wiring layer 21, the p-side electrode 16, and the second semiconductor layer. 12 is supplied to the light-emitting layer 13, and then flows through the first semiconductor layer 11, the n-side electrode 17, the n-side wiring layer 22, the third metal pillar 26, and the third external terminal 26a of one of the light-emitting elements 10.
进而,电流经由第三垫83、另一个发光元件10的p侧配线层21、p侧电极16、及第二半导体层12被供给到另一个发光元件10的发光层13,进而流经另一个发光元件10的第一半导体层11、n侧电极17、n侧配线层22、n侧金属柱24、n侧外部端子24a、及第二垫82。Furthermore, the current is supplied to the light emitting layer 13 of the other light emitting element 10 via the third pad 83, the p-side wiring layer 21 of the other light emitting element 10, the p-side electrode 16, and the second semiconductor layer 12, and then flows through the other light emitting element 10. The first semiconductor layer 11 , the n-side electrode 17 , the n-side wiring layer 22 , the n-side metal pillar 24 , the n-side external terminal 24 a , and the second pad 82 of one light emitting element 10 .
即,像图12中以二极管的电路记号示意性地表示那样,半导体发光装置2的两个发光元件10在第一垫81与第二垫82之间串联连接。That is, the two light emitting elements 10 of the semiconductor light emitting device 2 are connected in series between the first pad 81 and the second pad 82 as schematically indicated by the circuit symbol of a diode in FIG. 12 .
两个发光元件10通过包含第三外部端子26a的第三金属柱26而电连接。两个发光元件10在未安装于安装衬底70的状态下,不经由焊料而通过由导热率高于焊料的例如铜形成的第三金属柱26而电连接。进而,两个发光元件10通过比封装体内的配线层21、22厚的第三金属柱26而连接。The two light emitting elements 10 are electrically connected by the third metal post 26 including the third external terminal 26a. When the two light emitting elements 10 are not mounted on the mounting substrate 70 , they are electrically connected by the third metal pillar 26 formed of, for example, copper, which has higher thermal conductivity than solder, without solder. Furthermore, the two light emitting elements 10 are connected by the third metal pillar 26 thicker than the wiring layers 21 and 22 in the package.
即,通过散热性比焊料或较薄的配线层优异的较厚的金属柱26而连接多个芯片。因此,可使多个芯片(半导体层15)间的温度特性差(发光特性差)较小。That is, a plurality of chips are connected by thick metal pillars 26 having better heat dissipation than solder or a thinner wiring layer. Therefore, the difference in temperature characteristics (difference in light emission characteristics) among a plurality of chips (semiconductor layer 15 ) can be made small.
另外,可通过比p侧外部端子23a及n侧外部端子24a大的第三外部端子26a及第三垫83将发光元件10的热向安装衬底70侧高效率地释放。In addition, the heat of the light emitting element 10 can be efficiently released to the mounting substrate 70 side through the third external terminal 26a and the third pad 83 that are larger than the p-side external terminal 23a and the n-side external terminal 24a.
另外,因为能够在一个封装体内使多个发光元件10接近,所以相比逐一地安装经单片化的多个发光元件,可缩小安装衬底上的安装空间。In addition, since a plurality of light emitting elements 10 can be brought close together in one package, the mounting space on the mounting substrate can be reduced compared to mounting a plurality of singulated light emitting elements one by one.
多芯片封装体构造的一个半导体发光装置中所包含的发光元件10(半导体层15)的数量并不限于所述实施方式中所示的数量,可通过选择切割区域而任意地选择。The number of light emitting elements 10 (semiconductor layers 15 ) included in one semiconductor light emitting device having a multi-chip package structure is not limited to the number shown in the above embodiment, and can be arbitrarily selected by selecting a dicing area.
在图11的构造中,在半导体层15与半导体层15之间的区域(芯片间区域),绝缘膜18也并不限于连续,也可以像图14所示那样分断。通过利用图案化将芯片间区域的绝缘膜18分断,可抑制裂缝。In the structure of FIG. 11 , the insulating film 18 is not limited to be continuous in the region between the semiconductor layers 15 (inter-chip region), but may be divided as shown in FIG. 14 . Cracks can be suppressed by dividing the insulating film 18 in the interchip region by patterning.
对本发明的若干个实施方式进行了说明,但这些实施方式是作为示例而提出的,并非意欲限定发明的范围。这些新颖的实施方式能以其他各种方式来实施,且能够在不脱离发明主旨的范围内进行各种省略、替换、变更。这些实施方式或其变化包含在发明的范围或主旨内,并且包含在权利要求书所记载的发明及其均等的范围内。Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in other various forms, and various omissions, substitutions, and changes can be made without departing from the gist of the invention. These embodiments and modifications thereof are included in the scope or gist of the invention, and are included in the invention described in the claims and their equivalents.
[符号的说明][explanation of the symbol]
1、2 半导体发光装置1, 2 semiconductor light emitting device
10 发光元件10 light emitting elements
13 发光层13 luminous layer
15 半导体层15 semiconductor layer
16 p侧电极16 p side electrode
17 n侧电极17 n side electrode
23a p侧外部端子23a p side external terminal
24a n侧外部端子24a n-side external terminal
25 树脂层25 layers of resin
26a 第三外部端子26a Third external terminal
30 荧光体层30 phosphor layer
70 安装衬底70 mounting substrate
81 第一垫81 first pad
82 第二垫82 second pad
83 第三垫83 third pad
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