CN105988179A - Micro-electromechanical zoom lens module and micro-electromechanical brake thereof - Google Patents

Abstract

The invention provides a micro-electromechanical zoom lens module and a micro-electromechanical brake thereof. The micro-electromechanical brake comprises a micro-electromechanical fixed structure and a micro-electromechanical movable structure. The micro-electromechanical fixing structure comprises a first micro-electromechanical fixing piece with a first opening, a second micro-electromechanical fixing piece with a second opening and a third micro-electromechanical fixing piece with a third opening. The micro-electromechanical movable structure comprises a first micro-electromechanical movable part, a second micro-electromechanical movable part and a third micro-electromechanical movable part. The first lens assembly is movably arranged in the first opening of the first micro-electromechanical fixed part through the first micro-electromechanical movable part. The second lens assembly is movably arranged in the second opening of the second micro-electromechanical fixed part through the second micro-electromechanical movable part. The third lens assembly is movably arranged in the third opening of the third micro-electromechanical fixed part through the third micro-electromechanical movable part.

Description

MEMS Zoom Lens Module and Its MEMS Actuator

technical field

The invention relates to a zoom lens module and a brake thereof, in particular to a micro-electromechanical zoom lens module and a micro-electromechanical brake with an operating range in the micron range.

Background technique

Recently, with the increasing standard of human life and increasing technological capabilities, it is no longer in line with the market demand or need for a mobile phone to provide only a simple audio function. The gradual development of additional functional devices or modules and subsequent evolution make the mobile phone more and more multi-functional and intelligent. A miniaturized camera is one such module that enables video communication and image/video capture functions to be implemented. Due to its excellent portability and powerful functionality, smart phones are very popular nowadays and have become one of the most indispensable devices in daily life. Currently, close to 2 billion mobile phones with digital cameras are exported each year, with an additional 8 million smartphone cameras. In addition to the aforementioned smartphones, miniaturized cameras are also widely used in various civilian or military applications, including endoscopes for healthcare, security cameras, and for unmanned aerial vehicles (UAVs) and micro air vehicles (MAVs) surveillance cameras. In view of this large market point of view, there is great interest in miniature cameras from researchers from academia to industry all over the world.

Much effort has been devoted to improving the performance of miniaturized digital video cameras so that their operation more closely resembles conventional digital video cameras. In the early stages of compact digital video camera development, the associated optics were deliberately designed to have a long depth of focus. This optical system simultaneously provides sharp images of nearly all objects in the field of view without the need for an autofocus function. This processing greatly simplifies system configuration, but such simplification occurs at the expense of lower image contrast, at the expense of reduced or suboptimal image quality. Through the increase of pixels and the improvement of corresponding hardware and software and image processing, although better image and video quality and more complex functions have been achieved, such as: auto focus and zoom, there is still a huge demand for technological breakthroughs.

Unlike their traditional counterparts, miniaturized digital video cameras must meet size requirements with respect to limited or very limited available space. Therefore, the known autofocus and zoom machines are not suitable for miniaturized digital video cameras because of their bulky volume. Therefore, in terms of existing requirements, a micro-electromechanical zoom lens module and a micro-electromechanical actuator have yet to be developed.

Contents of the invention

The technical problem to be solved by the present invention is to provide a micro-electro-mechanical zoom lens module and a micro-electro-mechanical brake for the deficiencies of the prior art.

One embodiment of the present invention provides a micro-electro-mechanical zoom lens module, the micro-electro-mechanical zoom lens module includes: a micro-electro-mechanical actuator and a lens structure. The MEMS actuator includes a MEMS fixed structure and a MEMS movable structure connected to the MEMS fixed structure and moving relative to the MEMS fixed structure. The lens structure moves relative to the MEMS fixed structure through the MEMS movable structure, wherein the lens structure includes a first lens assembly, a second lens assembly and a third lens assembly separated from each other . Wherein, the MEMS fixing structure includes a first MEMS fixing part, a second MEMS fixed on the upper surface of the first MEMS fixing part and electrically connected to the first MEMS fixing part. A fixing part, and a third micro-electro-mechanical fixing part arranged on the lower surface of the first micro-electro-mechanical fixing part and electrically connected to the first micro-electro-mechanical fixing part, wherein the first micro-electro-mechanical fixing part has a first opening connected between the upper surface and the lower surface, the second MEMS fixture has a second opening located directly above the first opening and communicating with the first opening , and the third micro-electro-mechanical fixing part has a third opening located directly below the first opening and communicating with the first opening; wherein, the micro-electro-mechanical movable structure includes a movably arranged on a first microelectromechanical movable part in the first opening and connected to the first microelectromechanical fixing part; a movable part arranged in the second opening and connected to the second microelectromechanical fixing part The second micro-electro-mechanical movable element, and a third micro-electro-mechanical movable element movably arranged in the third opening and connected to the third micro-electro-mechanical fixed element, wherein the first micro-electro-mechanical movable element The part surrounds the first lens assembly and is connected to the first lens assembly, the second microelectromechanical movable part surrounds the second lens assembly and is connected to the second lens assembly, and the third micro The electromechanical movable element surrounds the third lens assembly and is connected to the third lens assembly; wherein, the first lens assembly is movably arranged on the first microelectromechanical movable element through the first microelectromechanical movable element In the first opening of the electromechanical fixing part, the second lens assembly is movably arranged in the second opening of the second microelectromechanical fixing part through the second microelectromechanical movable part, and The third lens assembly is movably disposed in the third opening of the third MEMS fixing element through the third MEMS movable element.

Another embodiment of the present invention provides a micro-electro-mechanical brake, which includes: a micro-electro-mechanical fixed structure and a micro-electro-mechanical movable structure. The MEMS movable structure is connected to the MEMS fixed structure and moves relative to the MEMS fixed structure, wherein a lens structure moves relative to the MEMS fixed structure through the MEMS movable structure , and the lens structure includes a first lens assembly, a second lens assembly and a third lens assembly separated from each other. Wherein, the MEMS fixing structure includes a first MEMS fixing part, a second MEMS fixed on the upper surface of the first MEMS fixing part and electrically connected to the first MEMS fixing part. A fixing part, and a third micro-electro-mechanical fixing part arranged on the lower surface of the first micro-electro-mechanical fixing part and electrically connected to the first micro-electro-mechanical fixing part, wherein the first micro-electro-mechanical fixing part has a first opening connected between the upper surface and the lower surface, the second MEMS fixture has a second opening located directly above the first opening and communicating with the first opening , and the third micro-electro-mechanical fixing part has a third opening located directly below the first opening and communicating with the first opening; wherein, the micro-electro-mechanical movable structure includes a movably arranged on a first microelectromechanical movable part in the first opening and connected to the first microelectromechanical fixing part; a movable part arranged in the second opening and connected to the second microelectromechanical fixing part The second micro-electro-mechanical movable element, and a third micro-electro-mechanical movable element movably arranged in the third opening and connected to the third micro-electro-mechanical fixed element, wherein the first micro-electro-mechanical movable element The part surrounds the first lens assembly and is connected to the first lens assembly, the second microelectromechanical movable part surrounds the second lens assembly and is connected to the second lens assembly, and the third micro The electromechanical movable element surrounds the third lens assembly and is connected to the third lens assembly; wherein, the first lens assembly is movably arranged on the first microelectromechanical movable element through the first microelectromechanical movable element In the first opening of the electromechanical fixing part, the second lens assembly is movably arranged in the second opening of the second microelectromechanical fixing part through the second microelectromechanical movable part, and The third lens assembly is movably disposed in the third opening of the third MEMS fixing element through the third MEMS movable element.

The beneficial effect of the present invention may lie in that the MEMS zoom lens module and its MEMS actuator provided by the embodiment of the present invention can be movably moved by the first lens assembly through the first MEMS movable member. set in the first opening of the first microelectromechanical fixing part", "the second lens assembly is movably arranged in the second microelectromechanical fixing part through the second microelectromechanical movable part In the second opening of the ", and "the third lens assembly is movably arranged in the third opening of the third MEMS fixing part through the third MEMS movable part" The design enables the lens structure to zoom according to different requirements, which helps an image sensor chip to capture correct and unbiased images.

In order to further understand the features and technical content of the present invention, please refer to the following detailed description and accompanying drawings of the present invention. However, the provided drawings are provided for reference and illustration only, and are not intended to limit the present invention.

Description of drawings

FIG. 1 is a schematic perspective view of a MEMS zoom lens module of the present invention.

FIG. 2 is a schematic cross-sectional view of the A-A section line in FIG. 1 .

FIG. 3 is an enlarged schematic view of part B of FIG. 2 .

FIG. 4 is a schematic top view of the MEMS zoom lens module of the present invention.

FIG. 5 is a schematic bottom view of the MEMS zoom lens module of the present invention.

FIG. 6 is a schematic diagram of a MEMS zoom lens module having a first adjustable distance and a second adjustable distance according to the present invention.

Wherein, the reference signs are explained as follows:

MEMS Zoom Lens Module M

MEMS brake 1

Capacity 100

MEMS Fixed Structure 11

The first MEMS fixture 111

first opening 1110

first inner connection surface 1111

upper surface 1112

lower surface 1113

Through hole 1114

Conductive layer 1115

Second MEMS fixture 112

Second opening 1120

Second inner connection surface 1121

The third MEMS fixture 113

Third opening 1130

third inner connection surface 1131

MEMS Movable Structures 12

The first MEMS moving part 121

First holding part 1210

The second MEMS movable part 122

Second holding part 1220

The third MEMS movable part 123

The third holding part 1230

Lens Construction 2

First Lens Assembly 21

first outer peripheral surface 210

The first external part 211

Second Lens Assembly 22

Second outer peripheral surface 220

Second external part 221

third lens unit 23

Third outer peripheral surface 230

The third external part 231

First center point C1

Second center point C2

Third center point C3

First adjustable distance d1

Second adjustable distance d2

Central axis direction Z

detailed description

The following is a specific example to illustrate the implementation of the "micro-electromechanical zoom lens module and its micro-electromechanical brake" disclosed by the present invention. Those skilled in the art can understand the advantages of the present invention from the content disclosed in this specification and efficacy. The present invention can be implemented or applied through other different specific embodiments, and various modifications and changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention. In addition, the drawings of the present invention are only for simple illustration, and are not described in advance according to the actual size. The following embodiments will further describe the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the technical scope of the present invention. The "micro-electro-mechanical system" mentioned below refers to micro-electro-mechanical systems (MEMS for short), which is an industrial technology that integrates microelectronics technology and mechanical engineering. Its operation The range is in the micron range.

Please refer to Fig. 1 to Fig. 6, Fig. 1 is a three-dimensional schematic view of the micro-electromechanical zoom lens module of the present invention, Fig. 2 is a schematic cross-sectional view of the A-A section line of Fig. 1, and Fig. 3 is an enlarged schematic view of part B of Fig. 2 , Fig. 4 is a schematic top view of the micro-electromechanical zoom lens module of the present invention, Fig. 5 is a schematic bottom view of the micro-electromechanical zoom lens module of the present invention, and Fig. 6 is a micro-electromechanical zoom lens module of the present invention having a first adjustable distance and a Schematic diagram of the second adjustable distance. According to the above drawings, the present invention provides a micro-electro-mechanical zoom lens module M, which includes: a micro-electro-mechanical actuator 1 and a lens structure 2 .

First, as shown in FIG. 1 and FIG. 2 , the MEMS actuator 1 includes a MEMS fixed structure 11 and a MEMS movable structure 12 connected to the MEMS fixed structure 11 and capable of moving relative to the MEMS fixed structure 11 , wherein the MEMS brake 1 has an accommodating space 100 . In addition, the lens structure 2 is accommodated in the accommodating space 100 of the MEMS actuator 1 , and the lens structure 2 can be movably disposed in the accommodating space 100 of the MEMS actuator 1 through the MEMS movable structure 12 . Furthermore, the lens structure 2 can move relative to the MEMS fixed structure 11 through the MEMS movable structure 12, wherein the lens structure 2 includes a first lens assembly 21, which are separated from each other. A second lens assembly 22 and a third lens assembly 23 . In addition, since the MEMS movable structure 12 is surrounded by the MEMS fixed structure 11, and the MEMS movable structure 12 is connected between the MEMS fixed structure 11 and the lens structure 2, when the MEMS movable structure 12 is When moving due to the electrostatic relationship between the MEMS fixed structure 11 and the MEMS movable structure 12, the lens structure 2 can be driven by the MEMS movable structure 12 to move within the accommodation space 100 of the MEMS brake 1. Movement in the direction indicated by the symbol Z in FIG. 6 (ie, the central axis direction Z).

Furthermore, as shown in FIG. 1 , FIG. 2 and FIG. 3 , the MEMS fixing structure 11 includes a first MEMS fixing member 111 , an upper surface 1112 of the first MEMS fixing member 111 and is electrically connected to the The second microelectromechanical fixture 112 of the first microelectromechanical fixture 111, and a third microelectromechanical fixture arranged on the lower surface 1113 of the first microelectromechanical fixture 111 and electrically connected to the first microelectromechanical fixture 111 Item 113. Furthermore, the first MEMS fixture 111 has a first opening 1110 connected between the upper surface 1112 and the lower surface 1113 . The second MEMS fixture 112 has a second opening 1120 located directly above the first opening 1110 and communicated with the first opening 1110, and the third MEMS fixture 113 has a second opening 1120 located directly below the first opening 1110 and communicated with the first opening 1110. The third opening 1130 in the first opening 1110 . Thereby, the first opening 1110 , the second opening 1120 and the third opening 1130 communicate with each other to form the accommodating space 100 for accommodating all or part of the lens structure 2 .

In addition, as shown in FIG. 2 , FIG. 4 and FIG. 5 , the MEMS movable structure 12 includes a first MEMS movable member movably disposed in the first opening 1110 and connected to the first MEMS fixing member 111 121. A second MEMS movable part 122 movably arranged in the second opening 1120 and connected to the second MEMS fixing part 112, and a movably arranged in the third opening 1130 and connected to the third The third MEMS movable part 123 of the MEMS fixed part 113 . For example, the first MEMS movable element 121 surrounds the first lens assembly 21 , and the first MEMS movable element 121 is connected between the first lens assembly 21 and the first MEMS fixing element 111 . In addition, as shown in FIG. 4 , the second MEMS movable element 122 will surround the second lens assembly 22, and the second MEMS movable element 122 will be connected between the second lens assembly 22 and the second MEMS fixing element 112. between. As shown in FIG. 5 , the third MEMS movable element 123 surrounds the third lens assembly 23 , and the third MEMS movable element 123 is connected between the third lens assembly 23 and the third MEMS fixing element 113 .

It is worth mentioning that the first MEMS fixing part 111 will specially form a plurality of first grooves (not labeled) corresponding to the first MEMS movable part 121, and the first MEMS movable part 121 will partially It is accommodated in a plurality of first grooves to effectively increase the space utilization rate of the first opening 1110 . In addition, as shown in FIG. 4 , the second MEMS fixing part 112 will specially form a plurality of second grooves (not numbered) corresponding to the second MEMS movable part 122, and the second MEMS movable part 122 will Partially accommodated in the plurality of second grooves to effectively increase the space utilization of the second opening 1120 . In addition, as shown in FIG. 5 , the third MEMS fixing part 113 will specially form a plurality of third grooves (not numbered) corresponding to the third MEMS movable part 123, and the third MEMS movable part 123 will Partially accommodated in the plurality of third grooves to effectively increase the space utilization rate of the third opening 1130 .

Thereby, as shown in FIG. 2 , the first lens assembly 21 can be movably arranged in the first opening of the first MEMS fixing member 111 through the first MEMS movable member 121 1110 , wherein the first lens assembly 21 is completely or partially accommodated in the first opening 1110 . In addition, the second lens assembly 22 can be movably disposed in the second opening 1120 of the second MEMS fixing part 112 through the second MEMS movable part 122, wherein the second lens The assembly 22 is fully or partially received within the second opening 1120 . In addition, the third lens assembly 23 can be movably disposed in the third opening 1130 of the third MEMS fixing part 113 through the third MEMS movable part 123, wherein the third lens The assembly 23 is fully or partially accommodated in the third opening 1130 .

Furthermore, as shown in FIG. 2 , FIG. 3 , FIG. 4 and FIG. 5 , the first MEMS fixture 111 has a plurality of first internal connection surfaces 1111 located in the first opening 1110 , and the first MEMS can be The moving part 121 is connected to the plurality of first inner connecting surfaces 1111 of the first MEMS fixing part 111 . In addition, the second MEMS fixing part 112 has a plurality of second internal connection surfaces 1121 located in the second opening 1120 , and the second MEMS movable part 122 is connected to the plurality of second inner connecting surfaces 1121 of the second MEMS fixing part 112 . on the internal connection surface 1121 . In addition, the third MEMS fixing part 113 has a plurality of third inner connecting surfaces 1131 located in the third opening 1130 , and the third MEMS movable part 123 is connected to the plurality of third inner connecting surfaces 1131 of the third MEMS fixing part 113 . On the internal connection surface 1131 . Furthermore, the second MEMS movable element 122 can be arranged directly above the first MEMS movable element 121, and the third MEMS movable element 123 can be arranged directly below the first MEMS movable element 121, Therefore, the positions of the first MEMS movable element 121 , the second MEMS movable element 122 and the third MEMS movable element 123 are designed to correspond to each other.

Furthermore, as shown in FIG. 2 and FIG. 3 , the first outer peripheral surface 210 of the first lens assembly 21 has a plurality of first external parts 211 corresponding to the first micro-electromechanical movable element 121, and the second lens assembly 21 The second outer peripheral surface 220 of the assembly 22 has a plurality of second outer connecting parts 221 corresponding to the second micro-electromechanical movable element 122, and the third outer peripheral surface 230 of the third lens assembly 23 has a plurality of second outer connecting parts corresponding to the first Three external connection parts 231 of the MEMS movable element 123 . Wherein, the plurality of second outer border portions 221 are respectively disposed directly above the plurality of first outer border portions 211 , and the plurality of third outer border portions 231 are respectively disposed directly below the plurality of first outer border portions 211 . In addition, the end of the first microelectromechanical movable part 121 has a plurality of first holding parts 1210 respectively fixed on the plurality of first outer connecting parts 211, and the end of the second microelectromechanical movable part 122 has a plurality of The second holding part 1220 on the second outer connecting part 221, and the end of the third MEMS movable part 123 has a plurality of third holding parts 1230 respectively fixed on the third outer connecting parts 231. Therefore, through the cooperation between the first holding part 1210 and the first outer connecting part 211, the first MEMS movable part 121 is connected to the first lens assembly 21, so that the first MEMS movable part 121 and the second A linkage relationship can be established between a lens assembly 21 . Through the mutual cooperation of the second holding part 1220 and the second external part 221, the second microelectromechanical movable part 122 is connected to the second lens assembly 22, so that the second microelectromechanical movable part 122 and the second lens A linkage relationship can be established between components 22 . Through the mutual cooperation of the third holding part 1230 and the third external part 231, the third microelectromechanical movable part 123 is connected to the third lens assembly 23, so that the third microelectromechanical movable part 123 and the third lens A linkage relationship can be established between components 23 .

Furthermore, as shown in FIG. 2 and FIG. 3 , the first MEMS fixture 111 has a plurality of through holes 1114 penetrating through the first MEMS fixture 111 and connected between the upper surface 1112 and the lower surface 1113 and multiple Each conductive layer 1115 respectively passes through the plurality of through holes 1114 and extends from the upper surface 1112 to the lower surface 1113 . Thereby, both the second MEMS fixture 112 and the third MEMS fixture 113 can be electrically connected to each other through the plurality of conductive layers 1115 . For example, the second MEMS fixture 112 and the third MEMS fixture 113 can be electrically connected to the conductive layer 1115 respectively through solder balls (not numbered) in advance, whereby the second MEMS fixture 112 and the third MEMS fixture The two MEMS fixtures 113 can be electrically connected to each other through a plurality of conductive layers 1115 .

Furthermore, as shown in FIG. 2 and FIG. 6, the first lens assembly 21 has a first center point C1, the second lens assembly 22 has a second center point C2, and the third lens assembly 23 has a third Center point C3. When the first MEMS movable part 121 moves due to the electrostatic interaction between the first MEMS fixed part 111 and the first MEMS movable part 121, the first lens assembly 21 can pass the first MEMS movable The moving part 121 is driven to move in the Z direction (central axis direction) in the first opening 1110 of the first MEMS fixing part 111 . When the second microelectromechanical movable part 122 moves due to the electrostatic interaction between the second microelectromechanical fixed part 112 and the second microelectromechanical movable part 122, the second lens assembly 22 can pass through the second microelectromechanical movable The moving part 122 is driven to move in the Z direction (central axis direction) in the second opening 1120 of the second MEMS fixing part 112 . When the third microelectromechanical movable part 123 moves due to the electrostatic effect between the third microelectromechanical fixed part 113 and the third microelectromechanical movable part 123, the third lens assembly 23 can The moving part 123 is driven to move in the Z direction (central axis direction) in the third opening 1130 of the third MEMS fixing part 113 . Thereby, a first adjustable distance d1 will be formed between the first center point C1 of the first lens assembly 21 and the second center point C2 of the second lens assembly 22, and the first center point of the first lens assembly 21 A second adjustable distance d2 is formed between C1 and the third center point C3 of the third lens assembly 23 , so that the lens structure 2 of the MEMS zoom lens module M can zoom according to different requirements.

[Possible efficacy of the embodiment]

To sum up, the beneficial effects of the present invention may lie in that the microelectromechanical zoom lens module and its microelectromechanical brake provided by the embodiment of the present invention can be moved by "the first lens assembly through the first microelectromechanical The part is movably arranged in the first opening of the first micro-electromechanical fixing part", "the second lens assembly is movably arranged in the first micro-electro-mechanical movable part through the second micro-electro-mechanical movable part". In the second opening of the second micro-electro-mechanical fixing part", and "the third lens assembly is movably arranged on the first micro-electro-mechanical fixing part through the third micro-electro-mechanical movable part The design of "three openings" enables the lens structure to zoom according to different requirements, which helps an image sensor chip to obtain correct and unbiased images.

The above descriptions are only preferred feasible embodiments of the present invention, and therefore do not limit the patent scope of the present invention. Therefore, all equivalent technical changes made by using the description of the present invention and the contents of the accompanying drawings are included in the protection of the claims of the present invention. within range.

Claims (10)

1. A micro-electromechanical zoom lens module, characterized in that, the micro-electromechanical zoom lens module comprises: A micro-electro-mechanical actuator, the micro-electro-mechanical brake comprising a micro-electro-mechanical fixed structure and a micro-electro-mechanical movable structure connected to the micro-electro-mechanical fixed structure and moving relative to the micro-electro-mechanical fixed structure; and A lens structure, the lens structure moves relative to the MEMS fixed structure through the MEMS movable structure, wherein the lens structure includes a first lens assembly, a second lens assembly and a a third lens assembly; Wherein, the MEMS fixing structure includes a first MEMS fixing part, a second MEMS fixed on the upper surface of the first MEMS fixing part and electrically connected to the first MEMS fixing part. A fixing part, and a third micro-electro-mechanical fixing part arranged on the lower surface of the first micro-electro-mechanical fixing part and electrically connected to the first micro-electro-mechanical fixing part, wherein the first micro-electro-mechanical fixing part has a first opening connected between the upper surface and the lower surface, the second MEMS fixture has a second opening located directly above the first opening and communicating with the first opening , and the third MEMS fixture has a third opening located directly below the first opening and communicating with the first opening; Wherein, the microelectromechanical movable structure includes a first microelectromechanical movable part movably arranged in the first opening and connected to the first microelectromechanical fixing part, a first microelectromechanical movable part movably arranged in the first opening The second MEMS movable part in the second opening and connected to the second MEMS fixing part, and a first MEMS movable part arranged in the third opening and connected to the third MEMS fixing part Three microelectromechanical movable parts, wherein the first microelectromechanical movable part surrounds the first lens assembly and is connected to the first lens assembly, and the second microelectromechanical movable part surrounds the second lens assembly and connected to the second lens assembly, and the third MEMS movable element surrounds the third lens assembly and is connected to the third lens assembly; Wherein, the first lens assembly is movably disposed in the first opening of the first MEMS fixing element through the first MEMS movable element, and the second lens assembly is movably disposed in the first opening of the first MEMS fixing element through the first MEMS movable element. Two microelectromechanical movable parts are movably arranged in the second opening of the second microelectromechanical fixing part, and the third lens assembly is movably arranged by the third microelectromechanical movable part within the third opening of the third MEMS fixing member. 2. The MEMS zoom lens module according to claim 1, wherein the first lens assembly has a first center point, the second lens assembly has a second center point, and the third lens assembly has a second center point. The lens assembly has a third center point, wherein there is a first adjustable distance between the first center point of the first lens assembly and the second center point of the second lens assembly, and the There is a second adjustable distance between the first center point of the first lens assembly and the third center point of the third lens assembly. 3. The micro-electro-mechanical zoom lens module according to claim 1, wherein the first micro-electro-mechanical fixing member has a plurality of first inner connection surfaces located in the first opening, and the first micro-electromechanical The electromechanical movable part is connected to the plurality of first internal connection surfaces of the first MEMS fixed part, wherein the second MEMS fixed part has a plurality of second internal connections located in the second openings surface, and the second microelectromechanical movable part is connected to a plurality of the second internal connecting surfaces of the second microelectromechanical fixing part, wherein the third microelectromechanical fixing part has a plurality of The third inner connecting surface in the three openings, and the third MEMS movable element is connected to multiple third inner connecting surfaces of the third MEMS fixed element, wherein the second MEMS can be The movable element is arranged directly above the first microelectromechanical movable element, and the third microelectromechanical movable element is arranged directly below the first microelectromechanical movable element. 4. The micro-electro-mechanical zoom lens module according to claim 1, wherein there are a plurality of first external parts corresponding to the first micro-electro-mechanical movable element on the outer peripheral surface of the first lens assembly, The outer peripheral surface of the second lens assembly has a plurality of second circumscribed parts corresponding to the second MEMS movable element, and the outer peripheral surface of the third lens assembly has a plurality of second circumscribed parts corresponding to the The third outer connection part of the third micro-electromechanical movable element, wherein the plurality of second outer connection parts are respectively arranged directly above the plurality of first outer connection parts, and the plurality of third outer connection parts are respectively arranged on the plurality of the first outer connection parts. directly below the first outer connection parts, wherein the end of the first microelectromechanical movable part has a plurality of first holding parts respectively fixed on the plurality of first outer connection parts, and the second microelectromechanical The end of the movable part has a plurality of second holding parts respectively fixed on the plurality of the second outer parts, and the end of the third micro-electromechanical movable part has a plurality of respectively fixed on the plurality of the third The third holding part on the outer connection part. 5. The micro-electro-mechanical zoom lens module according to claim 1, wherein the first micro-electro-mechanical fixing member has a plurality of penetrating the first micro-electro-mechanical fixing member and is connected to the upper surface and the lower surface. through-holes between the surfaces and a plurality of conductive layers respectively passing through the plurality of through-holes and extending from the upper surface to the lower surface, and the second micro-electro-mechanical fixing member and the third micro-electro-mechanical fixing The components are electrically connected to each other through a plurality of the conductive layers. 6. A micro-electromechanical brake, characterized in that the micro-electromechanical brake comprises: a MEMS fixed structure; and A MEMS movable structure, the MEMS movable structure is connected to the MEMS fixed structure and moves relative to the MEMS fixed structure, wherein a lens structure moves relative to the MEMS fixed structure through the MEMS movable structure The MEMS fixed structure moves, and the lens structure includes a first lens assembly, a second lens assembly and a third lens assembly separated from each other; Wherein, the MEMS fixing structure includes a first MEMS fixing part, a second MEMS fixed on the upper surface of the first MEMS fixing part and electrically connected to the first MEMS fixing part. A fixing part, and a third micro-electro-mechanical fixing part arranged on the lower surface of the first micro-electro-mechanical fixing part and electrically connected to the first micro-electro-mechanical fixing part, wherein the first micro-electro-mechanical fixing part has a first opening connected between the upper surface and the lower surface, the second MEMS fixture has a second opening located directly above the first opening and communicating with the first opening , and the third MEMS fixture has a third opening located directly below the first opening and communicating with the first opening; Wherein, the microelectromechanical movable structure includes a first microelectromechanical movable part movably arranged in the first opening and connected to the first microelectromechanical fixing part, a first microelectromechanical movable part movably arranged in the first opening The second MEMS movable part in the second opening and connected to the second MEMS fixing part, and a first MEMS movable part arranged in the third opening and connected to the third MEMS fixing part Three microelectromechanical movable parts, wherein the first microelectromechanical movable part surrounds the first lens assembly and is connected to the first lens assembly, and the second microelectromechanical movable part surrounds the second lens assembly and connected to the second lens assembly, and the third MEMS movable element surrounds the third lens assembly and is connected to the third lens assembly; Wherein, the first lens assembly is movably disposed in the first opening of the first MEMS fixing element through the first MEMS movable element, and the second lens assembly is movably disposed in the first opening of the first MEMS fixing element through the first MEMS movable element. Two microelectromechanical movable parts are movably arranged in the second opening of the second microelectromechanical fixing part, and the third lens assembly is movably arranged by the third microelectromechanical movable part within the third opening of the third MEMS fixing member. 7. The MEMS actuator according to claim 6, wherein the first lens assembly has a first center point, the second lens assembly has a second center point, and the third lens assembly has a third center point, wherein there is a first adjustable distance between the first center point of the first lens assembly and the second center point of the second lens assembly, and the first There is a second adjustable distance between the first center point of the lens assembly and the third center point of the third lens assembly. 8. The micro-electro-mechanical brake according to claim 6, wherein the first micro-electro-mechanical fixing member has a plurality of first inner connection surfaces located in the first opening, and the first micro-electro-mechanical can be The moving part is connected to the plurality of first inner connecting surfaces of the first MEMS fixing part, wherein the second MEMS fixing part has a plurality of second inner connecting surfaces located in the second opening, And the second microelectromechanical movable part is connected to a plurality of the second internal connection surfaces of the second microelectromechanical fixing part, wherein the third microelectromechanical fixing part has a plurality of The third inner connection surface in the inner part, and the third microelectromechanical movable part is connected to a plurality of the third inner connection surfaces of the third microelectromechanical fixed part, wherein the second microelectromechanical movable part It is arranged directly above the first microelectromechanical movable element, and the third microelectromechanical movable element is arranged directly below the first microelectromechanical movable element. 9. The microelectromechanical actuator according to claim 6, characterized in that, the outer peripheral surface of the first lens assembly has a plurality of first circumscribed parts corresponding to the first microelectromechanical movable element, the The outer peripheral surface of the second lens assembly has a plurality of second external parts corresponding to the second micro-electromechanical movable element, and the outer peripheral surface of the third lens assembly has a plurality of second external parts corresponding to the third The third outer connection part of the micro-electromechanical movable element, wherein the plurality of second outer connection parts are respectively arranged directly above the plurality of the first outer connection parts, and the plurality of third outer connection parts are respectively arranged on the plurality of the first outer connection parts. directly below the first external connection part, wherein the end of the first microelectromechanical movable part has a plurality of first holding parts respectively fixed on a plurality of the first external connection parts, and the second microelectromechanical movable part The end of the part has a plurality of second holding parts respectively fixed on a plurality of the second outer parts, and the end of the third micro-electromechanical movable part has a plurality of respectively fixed on a plurality of the third outer parts on the third holding part. 10. The micro-electromechanical brake according to claim 6, wherein the first micro-electro-mechanical fixing part has a plurality of holes that pass through the first micro-electro-mechanical fixing part and are connected to the upper surface and the lower surface. through-holes between them and a plurality of conductive layers respectively passing through the plurality of through-holes and extending from the upper surface to the lower surface, and the second micro-electro-mechanical fixing part and the third micro-electro-mechanical fixing part are both or are electrically connected to each other through a plurality of the conductive layers.