CN105976833B - Head stack and disk set - Google Patents
Head stack and disk set Download PDFInfo
- Publication number
- CN105976833B CN105976833B CN201610143596.XA CN201610143596A CN105976833B CN 105976833 B CN105976833 B CN 105976833B CN 201610143596 A CN201610143596 A CN 201610143596A CN 105976833 B CN105976833 B CN 105976833B
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- CN
- China
- Prior art keywords
- sliding block
- support plate
- block support
- vibration absorber
- load beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/4806—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives
- G11B5/4826—Mounting, aligning or attachment of the transducer head relative to the arm assembly, e.g. slider holding members, gimbals, adhesive
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/4806—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives
- G11B5/484—Integrated arm assemblies, e.g. formed by material deposition or by etching from single piece of metal or by lamination of materials forming a single arm/suspension/head unit
Landscapes
- Supporting Of Heads In Record-Carrier Devices (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
- Moving Of The Head To Find And Align With The Track (AREA)
- Vibration Prevention Devices (AREA)
Abstract
The control characteristic for inhibiting the resonance for resulting from head stack and improving magnetic head positioning.Head stack (2) has: sliding block (3), has magnetic head element (7)；Sliding block support plate (20) is kept sliding block (3)；Load beam (14) is kept sliding block support plate (20)；Fulcrum protrusion (21) is arranged at the front end of load beam (14) and is freely and rotatably supported sliding block support plate (20)；Drive member (16a, 16b) rotates sliding block support plate (20) centered on fulcrum protrusion (21)；Dynamic vibration absorber (33) is arranged at sliding block support plate (20).Dynamic vibration absorber (33) is more located at the rear end side of load beam (14) than fulcrum protrusion (21) and has the freedom degree of vibration relative to the direction of rotation of sliding block support plate (20).
Description
Technical field
The present invention relates to the head stacies and disk set of the precision positioning mechanism with magnetic head in hard disk drive.
Background technique
In recent years, the packing density for being arranged at the disk of disk set develops with just making rapid progress towards densification.
It proposes in patent document 1 and small driving is carried out to head support spring mechanism by piezoelectric element and is accurately determined magnetic head
Positioned at the head support mechanism of recording track (recording track).
In addition, proposing sliding block in patent document 2 to be arranged at during the fulcrum protrusion of load beam (load beam) is
The heart is rotated and includes the axes of inertia structure substantially consistent with fulcrum protrusion of the rotating part of sliding block.
However, making reaction force when sliding block micro-displacement by a pair of of biasing member in the structure of patent document 1
Head support spring is set to resonate.Therefore, having cannot due to the resonance after carrying out high speed positioning to magnetic head element
Enough extend the problem of control area etc..
In addition, the structure of patent document 2, is rotated centered on the fulcrum protrusion of load beam (load beam) in sliding block
When driving, the rotary mode of the yaw direction (Yaw direction) with sliding block.From now on, in order to further expand magnetic
The control area of head positioning, it is necessary to further set the resonance of the yaw mode of sliding block higher.
Existing technical literature
Patent document
Patent document 1: Japanese Patent Application Laid-open 2-227886 bulletin
Patent document 2: No. 5360129 bulletins of Japanese Patent No.
In the existing structure, when magnetic head element is positioned at magnetic track on a drum or a disk, actuator (actuator)
Operating frequency can excite the resonant frequency of head support mechanism and head support mechanism is made to generate unwanted vibration.Cause
This, existing structure there is a problem of only obtaining not by low control area influenced etc. of resonating.
Summary of the invention
The present invention is the invention completed in view of above-mentioned condition, it is intended that inhibiting to result from being total to for head stack
Shake and improve the control characteristic of magnetic head positioning.
Head stack according to the present invention, which is characterized in that have: sliding block has magnetic head element；Sliding block support plate,
Keep sliding block；Load beam (load beam) keeps sliding block support plate；Fulcrum protrusion, be arranged at the front end of load beam and
It is freely and rotatably supported sliding block support plate；Drive member rotates sliding block support plate centered on fulcrum protrusion；Dynamic vibration absorber
(dynamic vibration absorber), is arranged at sliding block support plate；Dynamic vibration absorber is more located at negative than fulcrum protrusion
The rear end side of carrier beam and the freedom degree relative to the direction of rotation of sliding block support plate with vibration.
According to the present invention, because the dynamic vibration absorber for being arranged at sliding block support plate is more located at load beam than fulcrum protrusion
Rear end side and the freedom degree relative to the direction of rotation of sliding block support plate with vibration, so being able to suppress the swaying of load beam
The resonance peak of mode (Sway mode) and the yaw direction that sliding block can be inhibited on the antiresonance point of dynamic vibration absorber
Whirling vibration.Thereby, it is possible to improve magnetic head positioning control characteristic and can reduce counterweight itself and it is possible to realize light weights
Change.
Dynamic vibration absorber preferably can have counterweight part, counterweight part is linked to the spring portion of sliding block support plate, inhibiting to match
The portion damping (damping) for the amplitude that weight portion is vibrated relative to sliding block support plate.It is dynamic thereby, it is possible to which damping and amortization to be additional to
Power bump leveller acts and can obtain stable characteristic.
Counterweight part preferably can have identical by the direction rotated with the magnetic head element of sliding block relative to fulcrum protrusion
Direction vibration and the first resonance point for resonating, the first resonance point are the resonant frequency of the swaying mode higher than load arm
Frequency.Thereby, it is possible to inhibit the swaying mode of load beam.
Counterweight part, spring portion and damper portion preferably can be by losing flexible element (flexure) with stacking material
Processing is carved to be arranged.Thereby, it is possible to be easy and dynamic vibration absorber is formed in sliding block support plate at low cost.
Counterweight part preferably can have Mass adjust- ment portion.Thereby, it is possible to accurately by the antiresonance frequency of dynamic vibration absorber
Rate is adjusted to the frequency that it is necessary to be inhibited.
Disk set according to the present invention, which is characterized in that equipped with said head component.In accordance with the invention it is possible to
Obtain a kind of disk set of control characteristic for resonating and can be improved magnetic head positioning for being able to suppress and generating in head stack.
The present invention is able to suppress the control characteristic to resonate and can be improved magnetic head positioning generated in head stack.Separately
Outside, it is not necessary that additional new process and can be at a low price mention the positioning accuracy relative to recording track of magnetic head element
It is high.
Detailed description of the invention
Fig. 1 is the general plan of the disk set equipped with head stack involved in the preferred embodiments of the present invention
Figure.
Fig. 2 is the perspective view of head stack involved in the preferred embodiments of the present invention.
Fig. 3 is the exploded perspective view of head stack involved in the preferred embodiments of the present invention.
Fig. 4 is the exploded perspective for the flexible element that head stack involved in the preferred embodiments of the present invention has
Figure.
Fig. 5 a is the plane for the 1st drive member that head stack involved in the preferred embodiments of the present invention has
Figure.
Fig. 5 b is the Section A-A figure in Fig. 5 a.
Fig. 5 c is the section B-B figure in Fig. 5 a.
Fig. 6 is the front main portion of the head stack involved in the preferred embodiments of the present invention in terms of top side
Plan view.
Fig. 7 is the front main portion of the head stack involved in the preferred embodiments of the present invention in terms of following side
Plan view.
Fig. 8 a is the C-C sectional view in Fig. 6.
Fig. 8 b is the D-D sectional view in Fig. 6.
Fig. 8 c is the F-F sectional view in Fig. 6.
Fig. 8 d is the G-G sectional view in Fig. 6.
Fig. 8 e is the H-H sectional view in Fig. 6.
Fig. 8 f is the E-E sectional view in Fig. 6.
Fig. 9 is the figure for indicating the action state of dynamic vibration absorber.
Figure 10 a is the J-J sectional view in Fig. 6.
Figure 10 b is the I-I sectional view in Fig. 6.
Figure 11 a is a simplified the illustraton of model of one embodiment of the present of invention of the structure of Fig. 6.
Figure 11 b is to simplify sliding block in one embodiment of the invention to be dashed forward by the 1st and the 2nd drive member with fulcrum
The illustraton of model that the case where pivoting about movement is indicated.
Figure 11 c is to simplify sliding block in one embodiment of the invention to be dashed forward by the 1st and the 2nd drive member with fulcrum
The illustraton of model that the case where pivoting about movement is indicated.
Figure 11 d is to further simplify sliding block, sliding block support plate, dynamic vibration absorber in one embodiment of the invention
Illustraton of model.
Figure 11 e is to indicate to further simplify sliding block, sliding block support plate, dynamic absorber in one embodiment of the invention
The figure of the action state of the model of device.
Figure 12 is the control block diagram for carrying out the location control of magnetic head.
Figure 13 a is blank performance plot in the case where not having gain margin in magnetic head locating features.
Figure 13 b is blank performance plot in the case that gain margin is 10dB in magnetic head locating features.
Figure 13 c is blank performance plot in the case that gain margin is 20dB in magnetic head locating features.
Figure 14 is the simple model figure for illustrating the movement of the dynamic vibration absorber in one embodiment of the present of invention.
Figure 15 a is the figure indicated for the frequency response characteristic for illustrating the movement of dynamic vibration absorber.
Figure 15 b is the figure indicated for the frequency response characteristic for illustrating the movement of dynamic vibration absorber.
Figure 15 c is the figure indicated for the frequency response characteristic for illustrating the movement of dynamic vibration absorber.
Figure 16 is the location frequency response characteristic for indicating the magnetic head element of the head stack in one embodiment of the present of invention
Figure.
Figure 17 is that the frequency response of the damping characteristic effect in the head stack indicated in one embodiment of the present of invention is special
The figure of property.
Figure 18 is the plan view of the front main portion of the head stack of the first conventional example in terms of top side.
Figure 19 a is the structural model figure of the head stack of the first conventional example.
Figure 19 b is the action diagram in the structural model of the head stack of the first conventional example.
Figure 19 c is the simple diagram for illustrating the resonance of the load beam in the first conventional example.
Figure 19 d is the figure of the location frequency response characteristic of the magnetic head element in the head stack for indicate the first conventional example.
Figure 20 is the plan view of the front main portion of the head stack of the second conventional example in terms of top side.
Figure 21 a is the structural model figure of the head stack of the second conventional example.
Figure 21 b is the action diagram in the structural model of the head stack of the first conventional example.
Figure 21 c is the rotating part and counterweight (counter that sliding block is further simplified in the second conventional example
Balance illustraton of model).
Figure 21 d is the simple diagram for the structure for illustrating not generating the resonance of load beam in the second conventional example.
Figure 21 e is the figure of the location frequency response characteristic of the magnetic head element in the head stack for indicate the second conventional example.
Specific embodiment
Hereinafter, the preferred embodiment of the present invention will be described referring to attached drawing.In addition, the present invention is not limited to
The following embodiments and the accompanying drawings.In addition, including that those skilled in the art can be easy to imagine in following documented structural element
Element or substantially the same element.Further more, structural element documented by following can be appropriately combined.In addition, not departing from this
In the range of the purport of invention, the various omissions or displacement or change of structural element are possible.
Fig. 1 be diagrammatically denoted by the loading equipped with head stack involved in the preferred embodiments of the present invention/
The integrally-built figure of the disk set (HDD device) of unloading manner.According to Fig. 1, disk set 1 by casing (housing) 4,
The magnetic head of front end is installed in by the disk 6 of spindle motor rotation driving, with the sliding block 3 of magnetic head element 7 centered on axis 5
Component 2 supports the support arm 8 of the head stack 2 to constitute in front end.
The coil part of voice coil motor (VCM) is installed in the rear end of support arm 8.Support arm 8 can be with horizontal rotation shaft 9
Centered on rotated parallelly with the surface of disk 6.VCM is by the coil part (not illustrating) and the magnet part 10 for covering it
It constitutes.Slope mechanism (ramp mechanism) is provided with from the outside of the data area of disk 6 throughout the outside of disk 6
11, the tab (tab) 12 of the front end by being arranged at head stack 2 is stranded in the inclined surface to which sliding block 3 is from magnetic
Disk 6 separates and becomes the state of unloading.
In the movement of disk set 1 (in the high speed rotation of disk), sliding block 3 relative to disk 6 surface with a little
Float-amount floated and in loading condition.On the other hand, (in the stopping of disk or start and stop in non-action
In low speed rotation when only) because the tab 12 of the front end of head stack 2 is lifted by slope mechanism 11, sliding block 3 is in
Unloaded state.
Fig. 2 is the integrally-built solid for the head stack being diagrammatically denoted by the preferred embodiments of the present invention
Figure.After in addition, for ease of description, the Z axis positive direction of attached drawing is known as the upper surface of head stack 2 side, by Z axis negative direction
The referred to as back side of head stack 2 or following side.Sliding block 3 is on rear end (rear, the Y-axis positive direction side of Fig. 2) face of sliding block 3
Have and magnetic is read by induction write head element, giant magnetoresistance effect (GMR) magnetic reading head element or tunnel magneto-resistance effect (TMR)
The MR of head element etc. reads the magnetic head element 7 that film magnetic head is constituted.
In Fig. 2, head stack 2 has the bottom plate 13 as its main structural element, load beam (load beam)
14, the 15, the 1st i.e. the 1st film piezoelectric element of drive member 16a of flexible element (flexure) and the 2nd drive member 16b the i.e. the 2nd
Film piezoelectric element, sliding block 3.In addition, being formed with dynamic vibration absorber 33 on flexible element 15.In addition, bottom plate 13 is to be mounted
Form in the front end of support arm 8 is constituted.
Load beam 14 is fixed on bottom plate 13 by multiple beam pads (beam welding point) 17a.In addition, plate
Spring 18 is formed on load beam 14, and assigns defined thrust to sliding block 3 relative to disk.Further more, load beam 14, which will become, to roll over
Curved processing department 19 is applied to two sides and improves the structure of intensity.In addition, wiring substrate, that is, flexible element 15 passes through beam pad 17b
It is fixed on load beam 14.In Fig. 2, the posture angle of sliding block 3 indicates spacing direction (pitch direction) with Dp, with Dr table
Show rotating direction (roll direction), yaw direction (Yaw direction) is indicated with Dy.In addition, bottom plate 13 or load
Beam 14 is in various figures that line is symmetrical relative to the central axis for being parallel to Y direction.
Fig. 3 is the exploded perspective view for being diagrammatically denoted by head stack involved in the preferred embodiments of the present invention.
That is, Fig. 3 indicates head stack 2 resolving into load beam 14, flexible element 15, bottom plate the 13, the 1st and the 2nd drive member 16a,
The state of 16b, sliding block 3.In general flexible element 15 is that insulating layer is i.e. flexible coated on 18 μm or so of thin stainless steel plate
Stainless steel plate, insulating layer, copper foil are etched into arbitrary shape by the wiring substrate on substrate 24 and by copper foil plating thereon
And Precision Machining is carried out with defined shape.
As shown in figure 3, sliding block 3 is adhesively secured in the sliding block support plate 20 for being formed in flexible element 15.Fulcrum protrusion 21
It is formed on the center line near the front end of load beam 14 by integrally prominent.Sliding block support plate 20 is by the 1st prominent bracket
(outrigger) prominent bracket (outrigger) the 22b support of 22a and the 2nd, from back point contact in the center of sliding block simultaneously
Rotatably freely it is supported on fulcrum protrusion 21.Therefore, sliding block support plate 20 is supported 14, beam with pivot (pivot) structure
Support.In addition, the 1st and the 2nd prominent bracket 22a, 22b flexibly keep the posture of sliding block 3.Sliding block 3 corresponds to by disk as a result,
Fluctuating caused by posture variation and smoothly followed.In addition, the thrust generated by the leaf spring 18 of load beam 14
Between fulcrum protrusion 21 and sliding block support plate 20.Therefore, sliding block support plate 20 is in relative to X-direction Y-direction to be pushed away by this
The state that the frictional force that power is formed is kept.
In addition, the 1st drive member 16a and the 2nd drive member 16b are bonded in the 1st piezoelectrics support of flexible element 15
On portion 23a and the 2nd piezoelectrics support portion 23b.1st and the 2nd drive member 16a, 16b alternately stretch and will be along them
The rotary force of the yaw direction (Yaw direction) of plane assigns sliding block support plate 20, and is made centered on fulcrum protrusion 21
Sliding block support plate 20 rotates.In addition, the 1st piezoelectrics support portion 23a and the 2nd piezoelectrics support portion 23b are by constituting flexible element 15
Insulating layer 41 formation.Further more, dynamic vibration absorber 33 is arranged at sliding block support plate 20.In addition, dynamic vibration absorber 33 compares fulcrum
Protrusion 21 is more located at the rear end side of load beam.
Fig. 4 is that the decomposition for the flexible element structure for indicating that the head stack in the preferred embodiments of the present invention has is vertical
Body figure.It was for easy understanding integrated flexible element is still indicated originally in Fig. 4, by 24 He of flexible substrate
Magnetic head element wiring 25 (wiring part) is discretely indicated.Dynamic vibration absorber 33 is by the first counterweight part 33a, the second counterweight part
33e, spring portion 33b and damper portion 33c are constituted and are arranged by being etched processing with stacking material to flexible element.Tool
For body, the first counterweight part 33a and spring portion 33b of dynamic vibration absorber 33 are by copper foil structure identical with magnetic head element wiring 25
At.In addition, damper portion 33c is formed by polyimides insulating layer 41.In addition, the second counterweight part 33e of dynamic vibration absorber 33 from
Flexible substrate 24 is etched to form.In addition, the uper side surface of the first counterweight part 33a, the wiring material of copper foil exposes, and can will weld
The quality (Mass adjust- ment portion) of pellet etc. is additional to the surface.
Fig. 5 a is the plane for the 1st drive member that head stack involved in the preferred embodiments of the present invention has
Figure.In addition, Fig. 5 b is the Section A-A indicated in Fig. 5 a, Fig. 5 c is the section B-B indicated in Fig. 5 a.In addition, because the 1st driving
Component 16a and the 2nd drive member 16b is identical structure, so only illustrating the structure of the 1st drive member 16a herein.In film
The upper surface of piezoelectrics 26 side is formed with upper electrode 27a, and side below is formed with lower electrode 27b.Because of the 1st driving means
16a is the structure of very thin and easy breakage, so being provided as the base station 28 of soft reinforcing material.
1st drive member 16a is whole for protective film piezoelectrics 26 to be covered by the insulating cover 30 of polyimides.Also
Have, the portion C, the portion D of a part of insulating cover 30 in fig 5 a are removed.In the portion C, lower electrode 27b exposes and welds with the 1st electrode
Pad 29a is conducted.In the portion D, upper electrode 27a exposes and is conducted with the 2nd electrode pad 29b.It is applied to as a result, by voltage
1st electrode pad 29a and the 2nd electrode pad 29b, so as to keep the film piezoelectric 26 of the 1st drive member 16a flexible.Also
Have, in figure 5b the polarization direction of film piezoelectric 26 indicated by an arrow.If giving electric field in polarization direction (by negative voltage
Be applied to the 1st electrode pad 29a, positive voltage be applied to the 2nd electrode pad 29b) if then film piezoelectric 26 it is normal by piezoelectricity
It counts d31 and is shunk on direction in the face of piezoelectric film.In addition, if if giving electric field on the contrary with polarization direction into
Row extends.If negative voltage to be applied to the 3rd electrode pad 29c for being equivalent to the 1st electrode pad 29a and applies positive voltage
If the 4th electrode pad 29d for being equivalent to the 2nd electrode pad 29b then the film piezoelectric 26 of the 2nd drive member 16b by pressing
Electric constant d31 and shunk on direction in the face of piezoelectric film.
Fig. 6 is the front end master that head stack involved in the preferred embodiments of the present invention is seen from top side (sliding block side)
Want the plan view of part.Fig. 7 is the front end master of the head stack involved in the preferred embodiments of the present invention in terms of following side
Want the plan view (plan view of the head stack of Fig. 6 in terms of back side) of part.In addition, for ease of description, not illustrating negative
Carrier beam 14.
In Fig. 6, magnetic head element wiring 25 (wiring part) is connected to by solder ball is matched with the shape around sliding block 3
The magnetic head electrode terminal 31 for the sliding block 3 set carries out corresponding magnetic head element wiring 25 (wiring part).It is being configured in sliding block support
The 1st bending part 32a and the 2nd bending are formed on prominent bracket (outrigger) 22a in the 1st and the 2nd of the two sides of plate 20,22b
Portion 32b.Further more, the 1st and the 2nd bending part 32a, 32b be with the 1st and the 2nd bending part 32a, the respective extended line L1 of 32b,
The intersection point of the L2 form consistent with fulcrum protrusion 21 is constituted.Accordingly, because the 1st bending part 32a and the 2nd bending part 32b
It is easy to be bent so sliding block support plate 20 carries out small rotation centered on fulcrum protrusion 21.
The magnetic head element wiring 25 (wiring part) is partially fixed in the 1st and the 2nd prominent bracket 22a, 22b (Fig. 6
The portion C-C) and be similarly also fixed in extend from sliding block support plate 20 the 1st driving rib 36a and the 2nd driving rib 36b
(portion F-F of Fig. 6).
1st and the 2nd drive member 16a, 16b by applying a voltage to the 1st, the 2nd, the 3rd, the 4th electrode pad 29a,
29b, 29c, 29d and driven.Drive wiring 37a with by voltage input to the 1st electrode pad 29a's and the 4th electrode pad 29d
Form is configured, and is grounded the 2nd electrode pad 29b and the 3rd electrode pad 29c of wiring 37b connection.As a result, if alternation driven
Signal be input to driving wiring 37a if then the 1st drive member 16a and the 2nd drive member 16b are carried out in mutual opposite direction
Stretching motion.
In addition, be formed in sliding block support plate 20 for when sliding block 3 is unloaded from disk 6 from disk face
Lift the T-type limiting unit 34 of sliding block 3 (referring to Fig. 6, Fig. 7).The T-type limiting unit 34 is formed bending part 34a and to sliding block 3
Opposite side is engaged in the hole portion 35 (as shown in Figure 3) for being formed in load beam 14 by bending machining.In addition, being unloaded in loading
T-type limiting unit 34 is not contacted with hole portion 35 when usual movement other than load.
Fig. 7 is the figure of Fig. 6 in terms of back side.In Fig. 7, high the 1st chain bar (link) 39a of rigidity is in the be easily deformed
It is formed between 1 connector (joint) 40a and the 2nd connector 40b.The driving rib 36a connection of 1st connector 40a and the 1st, in addition, the 2nd connects
Head 40b is concatenated by a part i.e. the 1st fixed part 24a of flexible element 15.Likewise, rigid the 2nd high chain bar 39b is being easy
It is formed between the 3rd connector 40c and the 4th connector 40d of deformation, the driving rib 36b connection of the 3rd connector 40c and the 2nd, the 4th connector
40d is concatenated by a part i.e. the 2nd fixed part 24b of flexible element 15.
It is provided with the 1st drive member 16a of separation and separates groove 44a with the 1st of the 2nd connector 40b and flexible substrate 24.It should
1st separation groove 44a is formed along the range of the length for the longitudinal direction (Y direction) for being equivalent to film piezoelectric 26.Magnetic
Head assembly 2 is the symmetrical shape on the symmetry axis for be parallel to Y-axis, also identical about the 2nd separation groove 44b.
Fig. 8 a~Fig. 8 f is the figure for indicating the major part section in Fig. 6.Flexible element 15, in 18 μm of stainless steel of thickness
The insulating layer 41 of polyimides etc. is formed on the flexible substrate 24 of material and is formed thereon magnetic head element wiring 25 (wiring part),
Magnetic head element wiring 25 is covered with the purpose that insulate or protect by the wiring coating 42 of polyimides etc..In addition, flexible
The function that part 15 passes through mechanism necessary to ensuring 24 etching and processing of flexible substrate at arbitrary shape.Fig. 8 a is to indicate Fig. 6
In the section C-C sectional view.Fig. 8 b is the sectional view for indicating the section D-D in Fig. 6, and Fig. 8 c is the section F-F indicated in Fig. 6
Sectional view, Fig. 8 d is the sectional view for indicating the section G-G in Fig. 6, and Fig. 8 e is the sectional view for indicating the section H-H in Fig. 6, figure
8f is the sectional view for indicating the section E-E in Fig. 6.
In the part C-C represented by Fig. 8 a, the 1st prominent bracket (outrigger) 22a is made of flexible substrate 24 and quilt
It is linked to sliding block support plate 20.Insulating layer 41 is formed on a part on the 1st prominent bracket 22a, be formed on by
The magnetic head element wiring 25 (wiring part) that copper foil is formed is formed with wiring covering to cover the form of magnetic head wiring 25 (wiring part)
Layer 42.In the part D-D represented by Fig. 8 b, the flexible substrate 24 of the back side in magnetic head element wiring 25 (wiring part) is logical
Overetch and be removed, and the prominent bracket 22a of sliding block support plate the 20, the 1st and magnetic head element wiring 25 (wiring part) are divided
From.In the part F-F represented by Fig. 8 c, the flexible substrate 24 the i.e. the 1st extended from sliding block support plate 20 drives rib 36a and magnetic
A part of head element wiring 25 (wiring part) is fixed, and magnetic head element wiring 25 (wiring part) and the 1st prominent bracket 22a
It is separated.
In the part G-G represented by Fig. 8 d, the 1st connector 40a is for cross sectional shape identical with the section D-D and by etching
Eliminate magnetic head element wiring 25 (wiring part), insulating layer 41, wiring coating 42 formation of the flexible substrate 24 of flexible element 15.
In the part H-H represented by Fig. 8 e, the 2nd connector 40b eliminates the magnetic head element of the flexible substrate 24 of flexible element 15 by etching
Wiring 25 (wiring part), insulating layer 41, the formation of wiring coating 42.In addition, because the 1st and the 2nd connector 40a, 40b and the 1st
It is soft structure that chain bar 39a, which compares, so the 1st chain bar 39a is when the 1st drive member 16a stretching motion with the 2nd
Small rotary motion is carried out centered on engagement 40b.Likewise, when the 2nd drive member 16b stretching motion, the 2nd chain bar
39b carries out small rotary motion centered on the 4th connector 40d.With this gearing, sliding block support plate 20 is centered on fulcrum protrusion 21
It is rotated.
As illustrated in fig. 8f, the 1st drive member 16a is in the position (void of Fig. 8 f for being overlapped in the reinforcing plate 43a of the 1st chain bar 39a
The part of line P) it is bonded on the 1st piezoelectrics support portion 23a.In addition, the front end of another party of the 1st drive member 16a
It is overlapped in the flexible substrate 24 (part of the dotted line Q of Fig. 8 f) of flexible element 15 and is bonded on the 1st piezoelectrics support portion 23a.
2nd drive member 16b is also identical, on the reinforcing plate 43b of the 2nd chain bar 39b, the quilt on the position that the front end of a side is overlapped
It is bonded on the 2nd piezoelectrics support portion 23b.Further more, the front end of another party of the 2nd drive member 16b is also being overlapped in flexibility
It is bonded on the position of the flexible substrate 24 of part 15 on the 2nd piezoelectrics support portion 23b.Thereby, it is possible to reliably by film pressure
The displacement of electric body 26 is transmitted to the 1st chain bar 39a (or the 2nd chain bar 39b).
In the present embodiment, dynamic vibration absorber 33 more positioned at the rear end side of load beam 14 and is set than fulcrum protrusion 21
In in being pressed from both sides by the 1st drive member 16a and the 2nd drive member 16b between the 1st drive member 16a and the 2nd drive member 16b
The position held.Dynamic vibration absorber 33 is linked to sliding block by the first counterweight part 33a, the second counterweight part 33e, by the first counterweight part 33a
The damper portion of the spring portion 33b of support plate 20, the amplitude for inhibiting the first counterweight part 33a to be vibrated relative to sliding block support plate 20
The frame section 33d of 33c, support spring portion 33b and damper portion 33c are constituted.First counterweight part 33a and spring portion 33b by with magnetic head
The etching of the identical copper foil of element wiring 25 and be formed on the insulating layer 41 of flexible element 15.In addition, damper portion 33c is formed
For the insulating layer 41 of polyimides a part and be etched to form.Further more, the second counterweight part 33e is formed flexible element 24
A part and be etched to form.In such manner, it is possible to by the etch process of flexible element 15 come the structure of processing dynamics bump leveller 33, institute
Not need new processing technology, and processing cost will not improve completely.
In the present embodiment, the first counterweight part 33a and the second counterweight part 33e is substantially rectangular and along the diagram side X
To being set, still, as long as relative to diagram Y-axis it is symmetrical if then shape can arbitrarily set.These first and second
Counterweight part 33a, 33e play the function as the Quality Mgmt Dept in dynamic vibration absorber 33.
Frame section 33d is configured to frame in the form of around the first counterweight part 33a, spring portion 33b, the second counterweight part 33e
Shape.Spring portion 33b is set in the form that the negative direction along Y-axis is extended, and one end of longitudinal direction is linked to frame
Portion 33d, in addition, being linked to the first counterweight part 33a near the center of the longitudinal direction of spring portion 33b.
In this way, the first counterweight part 33a, the second counterweight part 33e, spring portion 33b, damper portion 33c are presented big as a whole
Cause the shape of H-type.By the structure, dynamic vibration absorber 33 has the freedom of vibration relative to the direction of rotation of sliding block support plate 20
Degree.Here, damper portion 33c takes on the role for inhibiting vibration relative to the direction of rotation of sliding block support plate 20.
Fig. 9 is the figure for indicating the action state of dynamic vibration absorber.It is pivoted about in sliding block 3 with fulcrum protrusion 21
When, the first counterweight part 33a (the second counterweight part 33e) carries out of reciprocating vibration in the arrow direction represented by attached drawing.In addition, should
Arrow direction is consistent with the direction of the transversal recording track of magnetic head element 7 of sliding block 3.In the resonance mode of the big amplitude resonance of sliding block 3
In, the first and second counterweight part 33a, 33e of dynamic vibration absorber 33 absorbs the vibration of sliding block 3 and carries out inhibiting the dynamic of resonance
Make.
Figure 10 a, Figure 10 b are the figures for indicating the section of dynamic vibration absorber 33, and Figure 10 a is section for indicating the section J-J in Fig. 6
Face figure.Figure 10 b is the sectional view for indicating the section I-I in Fig. 6.Spring portion 33b is arranged at the damping formed by insulating layer 41
The side the upper surface of portion 33c.In addition, the first counterweight part 33a is arranged at the upper surface of insulating layer 41 side, the second counterweight part 33e is set
In the back side of insulating layer 41.Because the resonant frequency of dynamic vibration absorber 33 is matched to most just when can arbitrarily determine
The shape of fixed first counterweight part 33a and the second counterweight part 33e.In addition, the first counterweight part 33a also can have Mass adjust- ment
Portion.Specifically, solder ball 33f can be additional to the first counterweight part 33a resonant frequency to be micro-adjusted.Additional solder
The position of ball 33f can be arranged at one on the symmetry axis (Y-axis) by fulcrum protrusion 21, then having can also be with substantially symmetrical about its central axis
Ground setting is multiple.In addition, wiring coating 42 is not provided in the position of additional solder ball 33f on the first counterweight part 33a.
[embodiment]
Hereinafter, according to the present embodiment, specifically indicates to have and not resonate in the track direction of magnetic head element
The head stack of frequency response characteristic.
(conventional example)
Firstly, being illustrated to the structure of the first conventional example and the second conventional example.Figure 18 indicates the first conventional example
The figure of head stack.Figure 20 is the figure for indicating the head stack of the second conventional example.In addition, the first existing structure represented by Figure 18
Related head stack be it is a kind of eliminated from the structure of the head stack 2 of present embodiment represented by Fig. 6 power suction
The head stack of vibration device 33, other structures are identical as structure represented by Fig. 6.In addition, the second conventional example represented by Figure 20
Related head stack is a kind of head stack for being equivalent to patent document 2, and is this embodiment party represented by alternate figures 6
Dynamic vibration absorber 33 in the structure of the head stack 2 of formula and by the counterweight of centre of gravity adjustment (counter balance)
60 are installed on sliding block support plate 20 and the center of gravity Gr of rotating part are matched to the structure of fulcrum protrusion 21.Other structures and Fig. 6
Represented structure is identical, so omitting the description.
Figure 19 a is a simplified the illustraton of model of the first conventional example in Figure 18.Figure 19 b is to indicate to pass through in the first conventional example
Alternating voltage is applied to the 1st drive member and the 2nd drive member to which sliding block carries out reciprocating rotary centered on fulcrum protrusion
The figure of the dynamic state of transhipment.The center of gravity Gr of rotating part comprising sliding block 3 and sliding block support plate 20 is in from 21 court of fulcrum protrusion
Side's separation distance S of magnetic head element 71Position.Therefore, it is rotated by sliding block 3 to which center of gravity Gr is in X-direction
On moved.The reaction as caused by the movement of center of gravity Gr is transmitted to load beam 14 via fulcrum protrusion 21, thus in X
Load beam 14 is waved on direction.
Figure 19 d is the magnetic head element 7 indicated in the first conventional example relative to the input voltage for being applied in drive member
X-direction displacement response characteristic figure.For the response characteristic, show gain 20dB's under the frequency of 25kHz
Big peak value.The center of gravity Gr of rotating part comprising sliding block 3 and sliding block support plate 20 is separated from fulcrum protrusion 21, by the rotary motion
The reaction force of the X-direction of generation is transmitted to load beam 14 via fulcrum protrusion 21.If the frequency of the rotary motion and negative
The swaying resonance mode of load beam 14 can be then excited if the swaying mode (Sway mode) of carrier beam 14 is consistent.
Then, the second conventional example is illustrated.Figure 21 a is a simplified the illustraton of model of the second conventional example in Figure 20.Figure
21b is indicated in the second conventional example by the way that alternating voltage is applied to the 1st drive member and the 2nd drive member to sliding block
The figure of the state of crankmotion is carried out centered on fulcrum protrusion.Figure 21 c is further simplified in the second conventional example
The rotating part of sliding block and the illustraton of model of counterweight.Here, M is equivalent to sliding block 3 and sliding block support plate comprising the first conventional example
The weight of 20 rotating part, m3It is equivalent to the quality of counterweight 60.S1Indicate M mass centre at a distance from fulcrum protrusion 21,
S3Indicate the mass centre of counterweight 60 at a distance from fulcrum protrusion 21.In addition, if including sliding block 3 and sliding block support plate 20
Rotating part and the whole center of gravity of counterweight 60 be in if the position of fulcrum protrusion 21 then in whole progress reciprocating rotary transhipment
Reaction force will not betide fulcrum protrusion 21 when dynamic.If indicating that center of gravity is in fulcrum protrusion 21 with simple mathematical expression
Position condition if then become formula below (1).
[number 1]
M×S1=m3×S3 (1)
If by the angular speed of the rotation amount θ of rotary motion multiplied by the both sides of formula (1) if become formula below (2).
[number 2]
Here, because angular speed × distance is speed, by the angular speed of rotation amount θ × distance S1It is set as speed V1And
And by the angular speed of rotation amount θ × distance S3It is set as speed V3If can be then indicated with formula below (3).
[number 3]
M×V1=m3×V3 (3)
Therefore, if obtaining M and m centered on fulcrum protrusion 213Amount of exercise balance if then it will be appreciated that being anti-
Active force does not act on fulcrum protrusion 21.That is, because reaction force does not act on fulcrum protrusion 21, even if load beam 14 exists
Swaying mode also can be static.The state is shown in Figure 21 d.
Figure 21 e is the magnetic head element indicated in the second conventional example relative to the input voltage for being applied in drive member
The figure of the response characteristic of X-direction displacement.Pass through the shadow of the reaction force of additional equilibrium counterweight 60 and reduction in fulcrum protrusion 21
It rings, to significantly reduce the swaying resonance of the load beam 14 of 25kHz.But it will appear the wave crest of new resonance in 30kHz.
The resonance depends on the quality of sliding block 3 and sliding block support plate 20 and the spring constant of drive member 16, and is the inclined of sliding block 3
The resonance of boat direction (Yaw direction).In this way, the resonance of the first conventional example 25kHz is enhanced in the second conventional example,
But produce the new resonance of 30kHz.This further becomes project when extending the control area of magnetic head positioning.
(embodiment)
Hereinafter, being illustrated to one embodiment of the present of invention.Figure 11 a is a simplified of the invention one of the structure of Fig. 6
The illustraton of model of a embodiment.First counterweight part 33a (the second counterweight part 33e) is pacified via spring portion 33b and damper portion 33c
Loaded on sliding block support plate 20.One square end is fixed on the 1st chain bar 39a of L-shaped, another square end is consolidated by the 1st drive member 16a
Due to flexible substrate 24.The 1st connector 40a and the 2nd connector 40b is configured at the both ends of the 1st chain bar 39a.Likewise, the 2nd drives
One square end, is fixed on the 2nd chain bar 39b of L-shaped, another square end is fixed in flexible substrate 24 by dynamic component 16b.In the 2nd chain
The both ends of bar 39b are configured with the 3rd connector 40c and the 4th connector 40d.In fig. 11 a, link the 1st connector 40a and the 2nd connector
The 2nd line segment L2 of the 1st line segment L1 and connection the 3rd connector 40c and the 4th connector 40d of 40b are in the fulcrum protrusion 21 of load beam 14
Intersect.
Here, firstly, being illustrated to the function of dynamic vibration absorber 33 involved in embodiment.Figure 14 be for illustrate by
The simple model figure of the effect for the dynamic vibration absorber that first counterweight part (the second counterweight part), spring portion and damper portion generate.?
In Figure 14, main counterweight part 50 is equivalent to the inertia mass of the rotating part comprising sliding block 3 and sliding block support plate 20.Main spring portion 51 is main
It is equivalent to the coefficient of elasticity of the first and second drive member 16a, 16b.In addition, main damper portion 52, which is equivalent to, has driving structure
The summation of the damped coefficient of the insulating cover 30 of part 16, base station 28, first and the second piezoelectrics support portion 23a, 23b.Secondary counterweight
Portion 53 is to be generated by the quality of the first counterweight part 33a and the second counterweight part 33e by the inertia matter centered on fulcrum protrusion 21
The sum of amount.Auxiliary spring portion 54 is equivalent to spring portion 33b.Secondary damper portion 55 is equivalent to damper portion 33c.Basal plane 56 is equivalent to Figure 11 a
In flexible substrate 24.
The case where Figure 15 a is the dynamic vibration absorber in no Figure 14, and be to indicate periodic external force f being applied to master
The figure of frequency response characteristic when counterweight part.In the case, it may appear that led from main counterweight part 50 and main spring portion 51
Resonant frequency ω 0 out, ω 0 at this time are indicated by formula below (4).Here, M is the quality (inertia of main counterweight part 50
Quality), K is the spring constant of main spring portion.
[number 4]
Figure 15 b is the frequency response characteristic in the case where the secondary damper portion for indicating the dynamic vibration absorber in no Figure 14
Figure.In the frequency response characteristic, it may appear that 2 resonance peak ω 1, ω 3 will appear antiresonance between these resonance peaks
Peak value ω 2.Here, 3 < ω of ω, 2 < ω 1, if ignoring main damper portion 52 if resonance peak ω 1 and resonance peak ω 3 by
Formula (5) below, (6) are indicated.In addition, antiresonance peak value ω 2 is indicated by formula below (7).Here, matching based on M
The quality (inertia mass) in weight portion 50, K are the spring constant of main spring portion, and m is the quality of secondary counterweight part, and k is secondary counterweight part
Spring constant.
[number 5]
[number 6]
[number 7]
In order to inhibit the resonance of ω 0 with dynamic vibration absorber 33, the form setting of ω 0 is substantially matched to antiresonance ω 2
The k and m of dynamic vibration absorber 33.
Figure 15 c is the figure for indicating the frequency response characteristic in Figure 14.By the effect of secondary damper portion 55, presented in Figure 15 b
Resonance peak out is eliminated, and can equably obtain flat characteristic from the low place of frequency to high place.In this way,
System by the way that dynamic vibration absorber 33 is additional to the resonance with ω 0 originally, so as to eliminate the resonance of main counterweight part 50
ω 0 simultaneously obtains flat frequency response.
Then, the movement of one embodiment of the present of invention that dynamic vibration absorber 33 is applied to head stack 2 is said
It is bright.Figure 11 c is to simplify sliding block in one embodiment of the invention by the 1st and the 2nd drive member to be with fulcrum protrusion
The case where center is rotated is come the illustraton of model that indicates.Firstly, if the 1st drive member 16a shrink and the 2nd drives
Dynamic component extended if then sliding block 3 by the effect of the 1st chain bar 39a and the 2nd chain bar 39b and centered on fulcrum protrusion 21 into
The small rotation counterclockwise of row.The X-direction position of the magnetic head element 7 of input voltage relative to the drive member 16 being applied at this time
The response characteristic of shifting is shown in Figure 16.The response characteristic shows the characteristic that resonance peak is steadily inhibited.From control system
Design from the perspective of, if resonance peak is present in response characteristic if be difficult to ensure the gain margin of control characteristic.
Therefore, obtain flat frequency response characteristic throughout broadband becomes weight for the precision positioning of realization magnetic head element
It wants.
In the case where first conventional example represented by Figure 19 d, big resonance peak is generated in 25kHz.The resonance peak phase
When in the swaying mode of load beam.In the case, it as control characteristic, is at most only able to ensure the control zone of 3kHz or so
Domain.In the case where second conventional example represented by Figure 21 e because the center of gravity Gr of the rotating part of sliding block 3 by counterweight 60 and with
Fulcrum protrusion 21 is consistent, so the swaying mode of the load beam of 25kHz is not in.However, will appear sliding block in 30kHz
Rotary mode (Yaw mode).30kHz is equivalent to the ω 0 of Figure 15 a.In the case, the case where control area is than the first conventional example
It makes moderate progress, still, it is ensured that the control area of 10kHz is difficult.On the other hand, a reality of the invention represented by Figure 16
In the case where applying example, because resonance peak can be steady, the control characteristic of 10kHz or more can be fully ensured.Here,
Response characteristic in the case where ignoring damped coefficient in the characteristic of Figure 16 is shown in Figure 17 with solid line.In figure, dotted line be with
The identical performance plot of Figure 16.According to Figure 17, it is able to confirm that by obtaining Figure 16's to damped coefficient progress optimization
Characteristic.
Using Figure 12 and Figure 13, the optimization of damped coefficient is illustrated.Figure 12 is to indicate to have used the first driving structure
The figure of the control module of part and the servo controller of the second drive member.By the first drive member 16a and the second drive member 16b
The micro-actuator and VCM of composition are connected in parallel, and magnetic head positioning amount becomes the sum of micro-actuator and the output of VCM.It is connected in parallel
The gain Cvcm of the controller of the gain Cma and VCM of the controller of micro-actuator.The control stability of the system can be to open
Ring transmission function (open loop transfer function) and substantially understand.
Open-loop transfer function G is indicated with formula below (8).
[number 8]
G=Cma·Gma+Cvcm·GVCM (8)
Here, Gma is the transmission function of head support mechanism, Gvcm is the transmission function of VCM.Open-loop transfer function G
Bode diagram (Bode diagram) be shown in Figure 13.In the case, control area becomes gain=0dB 5kHz.Figure
13a indicates the situation of the damper portion deficiency of dynamic vibration absorber.At this point, because the peak value of the first resonance point of dynamic vibration absorber 33 is
0dB, so being a kind of situation problematic in terms of control stability.Figure 13 b indicates the case where gain margin is 10dB, figure
13c indicates the case where gain margin is 20dB.In general, it is ensured that gain margin 10dB is necessary.In addition, Figure 13 c's
In the case of, control area can be set as 10kHz.
Then, swaying mode (Sway mode) mechanism of load beam 14 is inhibited to be illustrated to dynamic vibration absorber 33.Figure
11b is when indicating to act drive member in the frequency range of the first resonant frequency (ω 3) lower than dynamic vibration absorber
Dynamic vibration absorber the first and second counterweight part movement figure.In addition, Figure 11 c indicates be higher than dynamic vibration absorber
First of dynamic vibration absorber when acting drive member in the frequency range of first resonant frequency (ω 3) and second matches
The figure of the movement in weight portion.In Figure 11 b, when sliding block 3 is rotated in a counterclockwise direction, the first and second counterweight part
33a, 33e are also substantially vibrated centered on fulcrum protrusion 21 in the counterclockwise direction.It is opposite, in Figure 11 c, sliding block 3 with
When counterclockwise rotation, the first and second counterweight part 33a, 33e is centered on fulcrum protrusion 21 clockwise
It is vibrated on direction.In this way, the first resonant frequency ω 3 is changed by the action mode of dynamic vibration absorber 33 as boundary.?
This, the first resonant frequency ω 3 of dynamic vibration absorber 33 is the frequency of the swaying resonance mode higher than load beam 14.In addition, inhibiting
The mode of the ω 0 of 30kHz is equivalent to Figure 11 c.
Figure 11 d is the illustraton of model for further simplifying sliding block in Figure 11 a, sliding block support plate, dynamic vibration absorber.Figure 11 e
It is the illustraton of model simplified for indicating the action state of Figure 11 b.In Figure 11 e, the mass M of sliding block 3 and sliding block support plate 20
(being only denoted as " mass M " below) is rotated centered on fulcrum protrusion 21 and with rotation amount θ 1, is configured in prominent away from fulcrum
Play the quality m of the first counterweight part 33a (the second counterweight part 33e) of the dynamic vibration absorber 33 of the position of 21 distance S2 (below only
Referred to as " quality m ") it is moved centered on fulcrum protrusion 21 and with rotation amount θ 2.The swaying mode of load beam 14 is less than
The frequency of one resonant frequency ω 3, so the vibration period of the reciprocating motion of the rotation amount θ 2 of the rotation amount θ 1 and quality m of mass M
Identical and delayed phase is also few.In addition, dynamic vibration absorber 33 if if being compared amplitude (rotation amount) θ 1 and θ 2
The first counterweight part 33a (the second counterweight part 33e) amplitude θ 2 be greater than sliding block 3 amplitude θ 1.That is, becoming 1 < θ 2 of θ.Because of matter
Amount M is identical with the vibration period of quality m, so the angle speed of the first counterweight part 33a (the second counterweight part 33e) of dynamic vibration absorber 33
Degree (being only denoted as " angular speed of dynamic vibration absorber 33 " below) is significantly increased.That is, angular speed and the vibration of amplitude (rotation amount) θ 1
The angular speed of width θ 2 becomes the relationship of formula below (9).
[number 9]
Here, because reaction force can be made not make if if the amount of exercise of mass M is equal with the amount of exercise of quality m
For fulcrum protrusion 21, so if the speed of mass M is set as V1And the speed of quality m is set as V2If, as long as then
Formula (10) below, reaction force do not betide fulcrum protrusion.
[number 10]
M×V1=m × V2 (10)
In addition, in the present embodiment, because sliding block 3 and the amplitude (rotation amount) of the mass M of sliding block support plate 20 are made
For θ 1, thus the speed V of mass M1Angular speed × distance S as amplitude θ 11And the speed V of quality m2Angle as amplitude θ 2
Speed × distance S2, so formula (10) can be expressed as formula below (11).
[number 11]
When keeping the amount of exercise of quality m consistent with the amount of exercise of mass M, formula (11) expression is free to set
Quality m, dynamic vibration absorber 33 amplitude θ 2 angular speed and distance S2.That is, amplitude θ 2 can also be increased even if quality m is small
Angular speed or distance S2.In the frequency response characteristic of Figure 17, the swaying mode of load beam 14 is 25kHz, dynamic vibration absorber
33 the first resonant frequency (ω 3) is 27.5kHz, in this way, passing through the frequency to become the slightly higher than swaying mode of load beam
Form setting dynamic vibration absorber 33 the first resonant frequency (ω 3) and the amount of exercise of equalization quality M and the amount of exercise of quality m,
So as to which the dynamic center of gravity of sliding block 3 and sliding block support plate 20 is matched with fulcrum protrusion 21.That is, the spinning movement of sliding block 3
Reaction be not transferred to load beam 14.Thereby, it is possible to inhibit the swaying mode of load beam 14.That is, counterweight part have by with
The vibration in the identical direction in direction that the magnetic head element 7 of sliding block 3 is rotated relative to fulcrum protrusion 21 and resonate
One resonance point (ω 3), the first resonance point (ω 3) is above the frequency of the resonant frequency of the swaying mode of load beam, so can
Inhibit the swaying resonance of load beam 14.Further more, if further make first resonant frequency (ω 3) close to swaying mode
On the direction of frequency change dynamic vibration absorber 33 resonant frequency setting if then quality m amplitude increase and dynamic absorber
The angular speed of device 33 sharply becomes larger.Therefore, because quality m can be reduced, it is possible to seek to support comprising sliding block 3 and sliding block
The lightweight of the rotating part of plate 20.
As previously discussed, according to the present embodiment, dynamic vibration absorber 33 is configured by substituting counterweight, so as to press down
The yaw mode (Yaw mode) of sliding block 3 processed and the swaying mode that load beam 14 can also be inhibited, and can significantly expand
Open up control area.Further more, the quality m for capableing of the first counterweight part 33a (the second counterweight part 33e) to dynamic vibration absorber 33 carry out it is light
Quantization, and the collision of the magnetic head and disk when sliding block 3 floats on disk can be further reduced.Therefore, it can obtain
Obtain the floating characteristic of stable sliding block 3.
The explanation of symbol
1 disk set
2 head stacies
3 sliding blocks
4 casings
The axis of 5 spindle motors
6 disks
7 magnetic head elements
8 support arms
The horizontal rotation shaft of 9 VCM
10 magnet parts
11 slope mechanisms
12 tabs
13 bottom plates
14 load beams
15 flexible elements
The 1st drive member (film piezoelectric element) of 16a
The 2nd drive member (film piezoelectric element) of 16b
17a, 17b beam pad
18 leaf springs
19 Bending Processing portions
20 sliding block support plates
21 fulcrum protrusions
22a the 1st protrudes bracket
22b the 2nd protrudes bracket
The 1st piezoelectrics support portion of 23a
The 2nd piezoelectrics support portion of 23b
24 flexible substrates
The 1st fixed part of 24a
The 2nd fixed part of 24b
25 magnetic head element wirings
26 film piezoelectrics
27a upper electrode
27b lower electrode
28 base stations
The 1st electrode pad of 29a
The 2nd electrode pad of 29b
The 3rd electrode pad of 29c
The 4th electrode pad of 29d
30 insulating covers
31 magnetic head electrode terminals
The 1st bending part of 32a
The 2nd bending part of 32b
33 dynamic vibration absorbers
First counterweight part of 33a dynamic vibration absorber
The spring portion of 33b dynamic vibration absorber
The damper portion of 33c dynamic vibration absorber
The frame section of 33d dynamic vibration absorber
Second counterweight part of 33e dynamic vibration absorber
33f solder ball
34 T-type limiting units
34a bending part
The hole portion of 35 load beams
36a the 1st drives rib
36b the 2nd drives rib
37a drives wiring
37b is grounded wiring
The 1st chain bar of 39a
The 2nd chain bar of 39b
The 1st connector of 40a
The 2nd connector of 40b
The 3rd connector of 40c
The 4th connector of 40d
41 insulating layers
42 wiring coatings
43a, 43b reinforcing plate
44a the 1st separates groove
44b the 2nd separates groove
50 main counterweight parts
51 main spring portions
52 main damper portions
53 secondary counterweight parts
54 auxiliary spring portions
55 secondary damper portions
56 basal planes
60 counterweights
Claims (4)
1. a kind of head stack, it is characterised in that:
Have:
Sliding block has magnetic head element；
Sliding block support plate keeps the sliding block；
Load beam keeps the sliding block support plate；
Fulcrum protrusion is arranged at the front end of the load beam and is freely and rotatably supported the sliding block support plate；
Drive member rotates the sliding block support plate centered on the fulcrum protrusion；
Dynamic vibration absorber is arranged at the sliding block support plate,
The dynamic vibration absorber be located at the position of rear end side than the fulcrum protrusion closer to the load beam and relative to
The direction of rotation of the sliding block support plate has the freedom degree of vibration,
The dynamic vibration absorber has counterweight part, the counterweight part is linked to the spring portion of the sliding block support plate, inhibits institute
The damper portion for the amplitude that counterweight part is vibrated relative to the sliding block support plate is stated,
The counterweight part has identical by the direction rotated with the magnetic head element of the sliding block relative to the fulcrum protrusion
Vibration on direction and the first resonance point to resonate,
First resonance point is the frequency of the resonant frequency of the swaying mode higher than the load beam.
2. a kind of head stack, it is characterised in that:
Have:
Sliding block has magnetic head element；
Sliding block support plate keeps the sliding block；
Load beam keeps the sliding block support plate；
Fulcrum protrusion is arranged at the front end of the load beam and is freely and rotatably supported the sliding block support plate；
Drive member rotates the sliding block support plate centered on the fulcrum protrusion；
Dynamic vibration absorber is arranged at the sliding block support plate,
The dynamic vibration absorber be located at the position of rear end side than the fulcrum protrusion closer to the load beam and relative to
The direction of rotation of the sliding block support plate has the freedom degree of vibration,
The dynamic vibration absorber has counterweight part, the counterweight part is linked to the spring portion of the sliding block support plate, inhibits institute
The damper portion for the amplitude that counterweight part is vibrated relative to the sliding block support plate is stated,
The counterweight part, the spring portion and the damper portion are set by being etched processing with stacking material to flexible element
It sets.
3. a kind of head stack, it is characterised in that:
Have:
Sliding block has magnetic head element；
Sliding block support plate keeps the sliding block；
Load beam keeps the sliding block support plate；
Fulcrum protrusion is arranged at the front end of the load beam and is freely and rotatably supported the sliding block support plate；
Drive member rotates the sliding block support plate centered on the fulcrum protrusion；
Dynamic vibration absorber is arranged at the sliding block support plate,
The dynamic vibration absorber be located at the position of rear end side than the fulcrum protrusion closer to the load beam and relative to
The direction of rotation of the sliding block support plate has the freedom degree of vibration,
The dynamic vibration absorber has counterweight part, the counterweight part is linked to the spring portion of the sliding block support plate, inhibits institute
The damper portion for the amplitude that counterweight part is vibrated relative to the sliding block support plate is stated,
The counterweight part has Mass adjust- ment portion.
4. a kind of disk set, it is characterised in that:
Equipped with head stack described in any one in claims 1 to 3.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910191198.9A CN110060705A (en) | 2015-03-13 | 2016-03-14 | Head stack and disk set |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015050233 | 2015-03-13 | ||
| JP2015-050233 | 2015-03-13 | ||
| JP2015248121A JP6146463B2 (en) | 2015-03-13 | 2015-12-21 | Head assembly and magnetic disk drive |
| JP2015-248121 | 2015-12-21 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910191198.9A Division CN110060705A (en) | 2015-03-13 | 2016-03-14 | Head stack and disk set |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105976833A CN105976833A (en) | 2016-09-28 |
| CN105976833B true CN105976833B (en) | 2019-04-09 |
Family
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Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910191198.9A Pending CN110060705A (en) | 2015-03-13 | 2016-03-14 | Head stack and disk set |
| CN201610143596.XA Expired - Fee Related CN105976833B (en) | 2015-03-13 | 2016-03-14 | Head stack and disk set |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910191198.9A Pending CN110060705A (en) | 2015-03-13 | 2016-03-14 | Head stack and disk set |
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| Country | Link |
|---|---|
| JP (3) | JP6146463B2 (en) |
| CN (2) | CN110060705A (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9773516B2 (en) * | 2015-03-13 | 2017-09-26 | Tdk Corporation | Head assembly and magnetic disk device |
| JP7183076B2 (en) * | 2019-02-28 | 2022-12-05 | 日本発條株式会社 | Disk device suspension |
| CN111982090A (en) * | 2019-05-24 | 2020-11-24 | 张家欧 | Structure and method for detecting position of inertia shaft of defective quartz hemispherical shell |
| JP7301721B2 (en) * | 2019-11-14 | 2023-07-03 | 日本発條株式会社 | Disk device suspension |
| JP7314072B2 (en) * | 2020-01-31 | 2023-07-25 | 日本発條株式会社 | Disk device suspension |
| JP7314081B2 (en) * | 2020-03-11 | 2023-07-25 | 日本発條株式会社 | Disk device suspension |
| CN118120048B (en) * | 2021-10-18 | 2025-03-14 | Lg电子株式会社 | Assembling device |
| JP2024135835A (en) * | 2023-03-23 | 2024-10-04 | 株式会社東芝 | Disk device |
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| JPS63306575A (en) * | 1987-06-08 | 1988-12-14 | Hitachi Ltd | head support device |
| US6222704B1 (en) * | 1997-04-16 | 2001-04-24 | International Business Machines Corporation | Suspension assembly with resilient shock bumpers for a disk drive device |
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| CN1797550A (en) * | 2004-12-30 | 2006-07-05 | 新科实业有限公司 | Micro-driver, vibration damper, magnetic head folding sheet combination and disk drive unit thereof |
| US7433156B2 (en) * | 2006-02-10 | 2008-10-07 | Sae Magnetics (Hk) Ltd. | Flexure for minimizing fly height modulation of near-contact recording sliders in a disk drive |
| KR20100028908A (en) * | 2008-09-05 | 2010-03-15 | 삼성전자주식회사 | Flexure, head suspension assembly with the flexure, and hard disk drive with the head suspension assembly |
| JP2011253603A (en) * | 2010-06-04 | 2011-12-15 | Hitachi Ltd | Magnetic disk device |
| JP5360129B2 (en) * | 2011-05-11 | 2013-12-04 | Ｔｄｋ株式会社 | Head support mechanism |
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2015
- 2015-12-21 JP JP2015248121A patent/JP6146463B2/en not_active Expired - Fee Related
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2016
- 2016-03-14 CN CN201910191198.9A patent/CN110060705A/en active Pending
- 2016-03-14 CN CN201610143596.XA patent/CN105976833B/en not_active Expired - Fee Related
-
2017
- 2017-03-31 JP JP2017071197A patent/JP6243070B2/en not_active Expired - Fee Related
- 2017-11-08 JP JP2017215163A patent/JP6390780B2/en not_active Expired - Fee Related
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| JPS63306575A (en) * | 1987-06-08 | 1988-12-14 | Hitachi Ltd | head support device |
| US6222704B1 (en) * | 1997-04-16 | 2001-04-24 | International Business Machines Corporation | Suspension assembly with resilient shock bumpers for a disk drive device |
| CN1372248A (en) * | 2001-02-09 | 2002-10-02 | 日本发条株式会社 | Hanging device for floppy disc driver |
| CN1497593A (en) * | 2002-10-16 | 2004-05-19 | ���µ�����ҵ��ʽ���� | Piezoelectric actuators and disc devices |
| CN1637863A (en) * | 2004-01-05 | 2005-07-13 | 日立环球储存科技荷兰有限公司 | Technique to compensate for resonances and disturbances on primary actuator through use of a secondary actuator |
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| CN101105949A (en) * | 2006-07-13 | 2008-01-16 | 富士通株式会社 | Magnetic head suspension assembly and storage device |
| CN101339774A (en) * | 2007-07-05 | 2009-01-07 | 新科实业有限公司 | Magnetic head folding sheet combination with balance weight, disk drive unit and manufacturing method thereof |
| CN101546562A (en) * | 2008-03-28 | 2009-09-30 | 日立环球储存科技荷兰有限公司 | Systems, methods, and apparatus for flexure-integrated microactuator |
| CN102087856A (en) * | 2009-12-03 | 2011-06-08 | Tdk株式会社 | Magnetic head assembly, magnetic disk and rotary mechanism |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6146463B2 (en) | 2017-06-14 |
| JP2017117515A (en) | 2017-06-29 |
| JP2016170852A (en) | 2016-09-23 |
| JP6243070B2 (en) | 2017-12-06 |
| CN110060705A (en) | 2019-07-26 |
| JP2018028960A (en) | 2018-02-22 |
| CN105976833A (en) | 2016-09-28 |
| JP6390780B2 (en) | 2018-09-19 |
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