CN105964105A - Wing-shaped pipe type adsorption column for polycrystalline silicon tail gas recovery system - Google Patents
Wing-shaped pipe type adsorption column for polycrystalline silicon tail gas recovery system Download PDFInfo
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- CN105964105A CN105964105A CN201610461209.7A CN201610461209A CN105964105A CN 105964105 A CN105964105 A CN 105964105A CN 201610461209 A CN201610461209 A CN 201610461209A CN 105964105 A CN105964105 A CN 105964105A
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- adsorption column
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/0407—Constructional details of adsorbing systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
- B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
- B01D53/0407—Constructional details of adsorbing systems
- B01D53/0438—Cooling or heating systems
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
- C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
- C01B3/56—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by contacting with solids; Regeneration of used solids
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2256/00—Main component in the product gas stream after treatment
- B01D2256/16—Hydrogen
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/204—Inorganic halogen compounds
- B01D2257/2045—Hydrochloric acid
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/206—Organic halogen compounds
- B01D2257/2064—Chlorine
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/50—Improvements relating to the production of bulk chemicals
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Combustion & Propulsion (AREA)
- Separation Of Gases By Adsorption (AREA)
Abstract
The invention discloses a wing-shaped pipe type adsorption column for a polycrystalline silicon tail gas recovery system. The wing-shaped pipe type adsorption column comprises an adsorption column body and a tracing tube, wherein the tracing tube is mounted on the outer casing wall of the adsorption column body; backflow sleeves are mounted in the adsorption column body through supporting plates; each backflow sleeve comprises an outer pipe and an inner pipe; each inner pipe is positioned inside the corresponding outer pipe; a cavity between the outer side wall of each inner pipe and the inner side wall of the corresponding outer pipe serves as a medium passage; a sealing cap for enabling medium to flow back is mounted at the top of each outer pipe; a plurality of fins are mounted on the outer side wall of each outer pipe; an adsorbent filling opening and a hydrogen outlet are also formed in the top of the adsorption column body; an adsorbent discharging opening is formed in the bottom of the adsorption column body; a main hydrogen pipe and a plurality of groups of hydrogen inlet branch pipes are also mounted on the side wall of the bottom of the adsorption column body; the hydrogen inlet branch pipes are connected with the main hydrogen pipe. The wing-shaped pipe type adsorption column has the benefits that the heat exchange efficiency is high; heating is uniform; the production cost is reduced; equipment safety and reliability are improved.
Description
Technical field
The present invention relates to polysilicon tail gas reclaimer, particularly polysilicon tail gas recovery system band wing shape bushing type adsorption column.
Background technology
In polycrystalline silicon device exhaust gas recovery system, adsorption column is extremely critical equipment, for absorbing the harmful substances such as HCL and the chlorosilane of the residual in hydrogen, thus obtain highly purified hydrogen, after adsorbent work in adsorption column, for reducing cost, need adsorbent is regenerated, and adsorbent reactivation is accomplished by heating, existing adsorbent heats, because adsorbent is heated uneven, cause the efficiency of heating surface of adsorbent, cooling effectiveness is the highest, thus cause recovery time of adsorbent the longest, and the regeneration effect of adsorbent is the most bad, hydrogen purity is caused not reach requirement.
Summary of the invention
It is an object of the invention to overcome the shortcoming of prior art, it is provided that a kind of heat exchange efficiency is high, be heated evenly and reduce the polysilicon tail gas recovery system band wing shape bushing type adsorption column of production cost.
nullThe purpose of the present invention is achieved through the following technical solutions: polysilicon tail gas recovery system band wing shape bushing type adsorption column，It includes adsorption column body、Backflow sleeve pipe and adjoining pipe，Described adjoining pipe spiral is arranged on the outer tube wall of adsorption column body，Described backflow sleeve pipe is arranged on adsorption column by tube support, and this is internal，Described backflow sleeve pipe includes outer tube and inner tube，Described inner tube is positioned at the endoporus of outer tube，And the cavity between inner tube lateral wall and the medial wall of outer tube forms medium channel，The top of described outer tube is provided with the sealing cap making medium back flow，Multiple fin is installed on the lateral wall of described outer tube，The top of described adsorption column body is further opened with adsorbent charging port and hydrogen outlet，Hydrogen outlet is positioned at the side of adsorbent charging port，Adsorbent discharge port is had in the bottom of adsorption column body，Hydrogen manifold and hydrogen gas arm it is also equipped with on the bottom sidewall of described adsorption column body，Described hydrogen gas arm is connected with hydrogen manifold.
The bottom of described adjoining pipe is adjoining pipe entrance, and the top of adjoining pipe is adjoining pipe outlet.
Described fin is multi-disc, and is evenly distributed on same circumference.
Described tube support includes outer shroud, internal ring, sleeve pipe and gripper shoe, described outer shroud is connected with the medial wall of adsorption column body, described sleeve pipe is arranged in internal ring and gripper shoe, and the outer wall of outer tube is surrounded by sleeve pipe, described outer shroud and internal ring are connected by gripper shoe, and gripper shoe is net distribution.
Described inner and outer tubes are metal material.
It is provided with temperature instrumentation on the lateral wall, upper, middle and lower portion of described adsorption column body.
The invention have the advantages that the adsorption column of the present invention, use adjoining pipe and backflow sleeve heat exchange, thus the adsorbent realized from outside to inside and from inside to outside heat exchange is carried out simultaneously, thus improve the heat exchange efficiency of adsorbent；And outer tube is provided with fin, it is added significantly to heat exchange area, thus further improves heat exchange efficiency, thus reduce the time of adsorbent reactivation, improve regeneration efficiency, saved production cost；And the sleeve pipe that refluxes is for being uniformly distributed, thus improve the heat exchange uniformity in adsorbent unit volume, thus improve the regeneration effect of adsorbent.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention
Fig. 2 is the schematic diagram of backflow sleeve pipe
Fig. 3 is the sectional schematic diagram of backflow sleeve pipe
Fig. 4 is the scheme of installation of adjoining pipe
Fig. 5 is the structural representation of tube support
In figure, 1-adsorbent charging port, 2-hydrogen outlet, 3-adjoining pipe exports, 4-tube support, 5-adsorption column body, 6-adjoining pipe, 7-refluxes sleeve pipe, 8-adjoining pipe entrance, 9-adsorbent discharge port, 10-temperature detection pipe, 11-hydrogen manifold, 12-hydrogen gas arm, 13-outer tube, 14-medium channel, 15-inner tube, 16-fin, 17-seals cap, 18-sleeve pipe, 19-gripper shoe, 20-outer shroud, 21-internal ring.
Detailed description of the invention
The present invention will be further described below in conjunction with the accompanying drawings, and protection scope of the present invention is not limited to the following stated:
nullAs shown in Fig. 1 ~ Fig. 4，Polysilicon tail gas recovery system band wing shape bushing type adsorption column，It includes adsorption column body 5、Backflow sleeve pipe 7 and adjoining pipe 6，Described adjoining pipe 6 spiral is arranged on the outer tube wall of adsorption column body 5，Described backflow sleeve pipe 7 is arranged in adsorption column body 5 by tube support 4，Described backflow sleeve pipe 7 includes outer tube 13 and inner tube 15，In the present embodiment，Described inner tube 13 and outer tube 15 are metal material，Metal material requires have good heat conductivility，Can quickly realize heat exchange，Thus reach the purpose being quickly heated or cooled，Also require that there is higher voltage endurance capability simultaneously，Described inner tube 15 is positioned at the endoporus of outer tube 13，And the cavity between the medial wall of inner tube 15 lateral wall and outer tube 13 forms medium channel 14，The top of described outer tube 13 is provided with the sealing cap 17 making medium back flow，The endoporus of inner tube 15 is return flow line，And outlet is connected with return header，Multiple fin 16 is installed on the lateral wall of described outer tube 13，The top of described adsorption column body 5 is further opened with adsorbent charging port 1 and hydrogen outlet 2，Hydrogen outlet 2 is positioned at the side of adsorbent charging port 1，Adsorbent discharge port 9 is had in the bottom of adsorption column body 5，Hydrogen manifold 11 and hydrogen gas arm 12 it is also equipped with on the bottom sidewall of described adsorption column body 5，Described hydrogen gas arm 12 is connected with hydrogen manifold 11，During regeneration，The temperature of adsorbent is heated to regeneration temperature，The harmful substance of adsorbent release is collected under the blowback effect of hydrogen and passes through pipeline device for transferring；The when of absorption, tail gas enters in adsorption column body 5, and harmful substance is then adsorbed by adsorbent, and hydrogen rises, and is discharged by hydrogen outlet 2, and is collected by hydrogen, for the production of polysilicon.
In the present embodiment, the bottom of described adjoining pipe 6 is adjoining pipe entrance 8, the top of adjoining pipe 6 is adjoining pipe outlet 3, adjoining pipe entrance 8 connects with medium pipeline, medium pipeline can the freest switchable dielectric, such as: when needs heat, then adds thermal medium in medium pipeline adjoining pipe 6 conveying, when if desired cooling down, then medium pipeline carries cooling medium to adjoining pipe 6.
In the present embodiment, described fin 16 is multi-disc, and be evenly distributed on same circumference, fin 16 can increase the heat exchange area of backflow sleeve pipe, thus realize quickly being heated or cooled of adsorption column body 5 internal adsorption agent, thus accelerate the extraction of hydrogen and the regeneration of adsorbent, and fin 16 preferably uses metal material, therefore fin 16 not only has good heat conductivility, and can bear certain pressure.
In the present embodiment, as shown in Figure 5, described tube support 4 includes outer shroud 20, internal ring 21, sleeve pipe 18 and gripper shoe 19, described outer shroud 20 is connected with the medial wall of adsorption column body 5, described sleeve pipe 18 is arranged in internal ring 21 and gripper shoe 19, and the outer wall of outer tube 13 is surrounded by sleeve pipe 18, described outer shroud 20 and internal ring 21 are connected by gripper shoe 19, and gripper shoe 19 is in net distribution, and sleeve pipe 8 is also in net distribution, so that the backflow sleeve pipe 7 that the adsorbent in adsorption column body 5 is in unit volume is evenly distributed, thus improve the heat exchange efficiency of adsorbent and the heat exchange uniformity of adsorbent.
In the present embodiment, it is provided with temperature instrumentation 10 on the lateral wall, upper, middle and lower portion of described adsorption column body, the intrinsic real time temperature of adsorption column can be detected by temperature instrumentation 10, thus ensure adsorption tower normal working temperature, absorption regeneration temperature, thus improve the response rate of hydrogen and ensure persistently carrying out of adsorbent reactivation, improve the service life of adsorbent.
The work process of the present invention is as follows: medium high pressure is sent in medium channel 14, and medium carries in medium channel 14 from lower to upper, medium passes through fin 16, outer tube 13 and adsorbent carry out heat exchange, thus realize being heated or cooled of adsorbent, then medium enters in dielectric film filter pipe by inner tube 15 more from top to bottom, and whole device is when normal sorption, adsorbent need not heating, after absorption, the hydrogen of residual is reclaimed by hydrogen outlet, and when adsorbent reactivation, need first to heat to cool down afterwards, adsorbent temperature regeneration temperature to be reached after its heating, adsorbent temperature after cooling is then at room temperature, during regeneration, the harmful gas that adsorbent is discharged, under the blowback effect of hydrogen, harmful substance is reclaimed；During absorption, tail gas enters in adsorption column body 5, and harmful substance is then adsorbed by adsorbent, and hydrogen rises, and is discharged by hydrogen outlet 2, and is collected by hydrogen, for the production of polysilicon.
Claims (6)
- null1. polysilicon tail gas recovery system band wing shape bushing type adsorption column，It is characterized in that: it includes adsorption column body (5)、Backflow sleeve pipe (7) and adjoining pipe (6)，Described adjoining pipe (6) spiral is arranged on the outer wall of adsorption column body (5)，Described backflow sleeve pipe (7) is arranged in adsorption column body (5) by tube support (4)，Described backflow sleeve pipe (7) includes outer tube (13) and inner tube (15)，Described inner tube (15) is positioned at the endoporus of outer tube (13)，And the cavity between the medial wall of inner tube (15) lateral wall and outer tube (13) forms medium channel (14)，The top of described outer tube (13) is provided with the sealing cap (17) making medium back flow，On the lateral wall of described outer tube (13), multiple fin (16) is installed，The top of described adsorption column body (5) is further opened with adsorbent charging port (1) and hydrogen outlet (2)，Hydrogen outlet (2) is positioned at the side of adsorbent charging port (1)，Adsorbent discharge port (9) is had in the bottom of adsorption column body (5)，Hydrogen manifold (11) and hydrogen gas arm (12) it is also equipped with on the bottom sidewall of described adsorption column body (5)，Described hydrogen gas arm (12) is connected with hydrogen manifold (11).
- Polysilicon tail gas recovery system band wing shape bushing type adsorption column the most according to claim 1, it is characterised in that: the bottom of described adjoining pipe (6) is adjoining pipe entrance (8), and the top of adjoining pipe (6) is that adjoining pipe exports (3).
- Polysilicon tail gas recovery system band wing shape bushing type adsorption column the most according to claim 1, it is characterised in that: described fin (16) is multiple, and is evenly distributed on same circumference.
- Polysilicon tail gas recovery system band wing shape bushing type adsorption column the most according to claim 1, it is characterized in that: described tube support (4) includes outer shroud (20), internal ring (21), sleeve pipe (18) and gripper shoe (19), described outer shroud (20) is connected with the medial wall of adsorption column body (5), described sleeve pipe (18) is arranged in internal ring (21) and gripper shoe (19), and the outer wall of outer tube (13) is surrounded by sleeve pipe (18), described outer shroud (20) and internal ring (21) are connected by gripper shoe (19), and gripper shoe (19) is in net distribution.
- Polysilicon tail gas recovery system band wing shape bushing type adsorption column the most according to claim 1, it is characterised in that: described inner tube (13) and outer tube (15) are metal material.
- Polysilicon tail gas recovery system band wing shape bushing type adsorption column the most according to claim 1, it is characterised in that: it is provided with temperature instrumentation (10) on the lateral wall, upper, middle and lower portion of described adsorption column body (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610461209.7A CN105964105A (en) | 2016-06-23 | 2016-06-23 | Wing-shaped pipe type adsorption column for polycrystalline silicon tail gas recovery system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610461209.7A CN105964105A (en) | 2016-06-23 | 2016-06-23 | Wing-shaped pipe type adsorption column for polycrystalline silicon tail gas recovery system |
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| CN105964105A true CN105964105A (en) | 2016-09-28 |
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| CN201610461209.7A Pending CN105964105A (en) | 2016-06-23 | 2016-06-23 | Wing-shaped pipe type adsorption column for polycrystalline silicon tail gas recovery system |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110237645A (en) * | 2018-03-07 | 2019-09-17 | 新特能源股份有限公司 | Electric heating adsorption column and its temperature control system |
| CN110559795A (en) * | 2019-09-04 | 2019-12-13 | 中国恩菲工程技术有限公司 | adsorber and method for raising temperature using same |
| CN110762934A (en) * | 2019-11-18 | 2020-02-07 | 江苏双良低碳产业技术研究院有限公司 | Heat exchange device and method of adsorption system |
| CN111530226A (en) * | 2020-05-08 | 2020-08-14 | 黄龙标 | Unitized self-cleaning type filtering device for organic waste gas treatment |
| CN111991985A (en) * | 2020-09-11 | 2020-11-27 | 江苏东方瑞吉能源装备有限公司 | A polysilicon tail gas adsorption device and its working method |
| CN112657311A (en) * | 2020-12-21 | 2021-04-16 | 陕西延长石油（集团）有限责任公司 | Device and method for separating industrial gas by using powder adsorbent |
| CN115055026A (en) * | 2022-05-25 | 2022-09-16 | 云南通威高纯晶硅有限公司 | Method for purifying mixed gas by using tube array adsorption column |
| CN115400544A (en) * | 2022-11-02 | 2022-11-29 | 北京中科富海低温科技有限公司 | Gas adsorption device and purification equipment |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110237645A (en) * | 2018-03-07 | 2019-09-17 | 新特能源股份有限公司 | Electric heating adsorption column and its temperature control system |
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| CN112657311A (en) * | 2020-12-21 | 2021-04-16 | 陕西延长石油（集团）有限责任公司 | Device and method for separating industrial gas by using powder adsorbent |
| CN115055026A (en) * | 2022-05-25 | 2022-09-16 | 云南通威高纯晶硅有限公司 | Method for purifying mixed gas by using tube array adsorption column |
| CN115400544A (en) * | 2022-11-02 | 2022-11-29 | 北京中科富海低温科技有限公司 | Gas adsorption device and purification equipment |
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Application publication date: 20160928 |