CN105962887B - A kind of non-intrusion type detection of eyeball tension sensor based on micro-fluidic technologies - Google Patents
A kind of non-intrusion type detection of eyeball tension sensor based on micro-fluidic technologies Download PDFInfo
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Abstract
本发明公开了一种基于微流体技术的非侵入式眼压检测传感器,包括角膜接触镜、螺旋电感、边缘电容和内圈电容,其中,角膜接触镜内部设置有腔体和微流体通道;腔体与微流体通道相连通,用于存放流体,并向该微流体通道内输送流体;该微流体通道内输送的流体的量受眼压影响,内圈电容的电容值随该微流体通道内输送的流体的量的变化而变化;通过边缘电容、螺旋电感和内圈电容构成的CLC回路,实现对眼压的检测。本发明中的眼压检测传感器能够有效解决眼压传感器不便于夜间监测的问题,实现高精度的、24小时的全程测量眼压的波动,具有结构简单、制造方便、灵敏度高、动态范围大的优点。
The invention discloses a non-invasive intraocular pressure detection sensor based on microfluidic technology, which comprises a corneal contact lens, a spiral inductance, an edge capacitor and an inner ring capacitor, wherein a cavity and a microfluidic channel are arranged inside the contact lens; the cavity The body is connected with the microfluidic channel for storing fluid and delivering fluid to the microfluidic channel; the amount of fluid transported in the microfluidic channel is affected by intraocular pressure, and the capacitance value of the inner ring capacitor varies with the microfluidic channel. The amount of fluid delivered varies; through the CLC circuit composed of fringe capacitance, spiral inductance and inner ring capacitance, the detection of intraocular pressure is realized. The intraocular pressure detection sensor in the present invention can effectively solve the problem that the intraocular pressure sensor is not convenient for night monitoring, realize high-precision, 24-hour full-range measurement of intraocular pressure fluctuations, and has the advantages of simple structure, convenient manufacture, high sensitivity, and large dynamic range. advantage.
Description
技术领域technical field
本发明属于医疗器械技术领域,更具体地,涉及一种基于微流体技术的非侵入式眼压检测传感器,该眼压检测传感器采用C-L-C结构,是种基于微流体技术的无线无源非侵入式眼压检测传感器。The invention belongs to the technical field of medical devices, and more specifically relates to a non-invasive intraocular pressure detection sensor based on microfluidic technology. The intraocular pressure detection sensor adopts a C-L-C structure and is a wireless passive non-invasive Eye pressure detection sensor.
背景技术Background technique
青光眼是世界上第一位不可逆性致盲眼病。医学研究表明,青光眼是由于病理性眼压升高导致特征性视神经损害和视野缺陷的一种疾病。而眼压的升高是诊断和治疗青光眼的重要指标,而研究表明,青光眼患者的眼压在24小时内波动较大,一般在睡眠以及清晨时达到峰值,而此时除非在门诊处,一般不会进行眼压的测量。所以实现眼内压的24小时全天检测具有重要的意义。目前能够24小时测量眼压的传感器正在被世界各国研究,包括有侵入式眼压传感器以及非侵入式眼压传感器。Glaucoma is the world's first irreversible blinding eye disease. Medical research shows that glaucoma is a disease characterized by optic nerve damage and visual field defects due to pathological elevated intraocular pressure. The increase in intraocular pressure is an important indicator for the diagnosis and treatment of glaucoma, and studies have shown that the intraocular pressure of glaucoma patients fluctuates greatly within 24 hours, and generally reaches the peak during sleep and early morning. No intraocular pressure measurement will be performed. Therefore, it is of great significance to realize the 24-hour detection of intraocular pressure. Currently, sensors capable of measuring intraocular pressure 24 hours a day are being studied by countries all over the world, including invasive intraocular pressure sensors and non-invasive intraocular pressure sensors.
侵入式眼内压传感器多采用“L-C谐振回路”原理的无线无源传感器形式,将传感器通过MEMS加工技术小型化,通过外科手术侵入到眼内,具有系统复杂,发热大,不舒适等特点,同时其采用侵入眼睛内部,可能对眼睛造成不可逆的伤害。非侵入式眼内压传感器一般将传感器集成到角膜接触镜中,采用无线无源的方式实现角膜变形测量,从而对应出相应的眼压。现有技术中的24小时眼压测量有利用“L-C谐振电路”的,也有通过应变片的,两者目前都处于实验室阶段。近来,美国提出了采用微流体技术的非侵入式眼压传感器参见论文(参见论文“An unpowered,wireless contact lens pressure sensor for point-of-care glaucoma diagnosis”),具备高灵敏度的特点,但其采用拍照方式进行图像处理进行微通道中微流 体位置的确定,具有设备昂贵、算法处理复杂,且不能在晚上睡觉时进行测量等缺点,无法在夜间人们睡觉而眼压达到高峰时对眼压进行测量。而中国专利文献“无线无源非侵入MEMS眼压传感器及其制作方法(专利申请号:201510065578.X)”采用C-L-C结构形式的传感器,制造方便,但其利用电容间距的改变的方式实现眼压测量,灵敏度较低。Invasive intraocular pressure sensors mostly use the wireless passive sensor form of the "L-C resonant circuit" principle. The sensor is miniaturized through MEMS processing technology and invaded into the eye through surgery. It has the characteristics of complex system, high heat generation, and discomfort. At the same time, its use invades the interior of the eye, which may cause irreversible damage to the eye. Non-invasive intraocular pressure sensors generally integrate the sensor into the contact lens, and use a wireless passive method to measure corneal deformation, thereby corresponding to the corresponding intraocular pressure. The 24-hour intraocular pressure measurement in the prior art uses "L-C resonant circuit" and also uses strain gauges, both of which are currently in the laboratory stage. Recently, the United States proposed a non-invasive intraocular pressure sensor using microfluidic technology. The position of the microfluid in the microchannel is determined by image processing by taking pictures, which has the disadvantages of expensive equipment, complex algorithm processing, and the inability to measure the intraocular pressure at night when people are sleeping and the intraocular pressure reaches its peak. . However, the Chinese patent document "Wireless Passive Non-Invasive MEMS Intraocular Pressure Sensor and Its Manufacturing Method (Patent Application No.: 201510065578.X)" adopts a C-L-C structure sensor, which is easy to manufacture, but it realizes intraocular pressure by changing the capacitance distance. measurement with low sensitivity.
发明内容Contents of the invention
针对现有技术的以上缺陷或改进需求,本发明的目的在于提供一种基于微流体技术的非侵入式眼压检测传感器,其中通过对其关键的各个组件的结构、材料及各组件间的连接方式等进行改进,与现有技术相比能够有效解决眼压传感器不便于夜间监测的问题,实现高精度的、24小时的全程测量眼压的波动。In view of the above defects or improvement needs of the prior art, the purpose of the present invention is to provide a non-invasive intraocular pressure detection sensor based on microfluidic technology, in which the structure, material and connection between the various components critical to it Compared with the existing technology, it can effectively solve the problem that the intraocular pressure sensor is not convenient for night monitoring, and realize high-precision, 24-hour full-range measurement of intraocular pressure fluctuations.
为实现上述目的,按照本发明提供了一种基于微流体技术的非侵入式眼压检测传感器,其特征在于,包括角膜接触镜、螺旋电感、边缘电容和内圈电容,其中,In order to achieve the above object, the present invention provides a non-invasive intraocular pressure detection sensor based on microfluidic technology, which is characterized in that it includes a contact lens, a spiral inductor, an edge capacitor and an inner ring capacitor, wherein,
所述角膜接触镜呈球冠状,并用于在佩戴时与患者的眼球形状相匹配地进行贴合;The contact lens is spherically crowned and adapted to conform to the shape of the patient's eyeball when worn;
所述边缘电容和所述螺旋电感均位于所述角膜接触镜上;该螺旋电感呈螺旋形分布,所述边缘电容在所述角膜接触镜的圆形边缘所在平面上的投影位于该螺旋电感在所述角膜接触镜的圆形边缘所在平面上的螺旋形投影的外部;Both the fringe capacitance and the spiral inductance are located on the contact lens; the spiral inductance is distributed in a spiral shape, and the projection of the fringe capacitance on the plane where the circular edge of the contact lens is located is located on the spiral inductance. the outer portion of the helical projection on the plane in which the rounded edge of the contact lens lies;
所述内圈电容位于所述角膜接触镜上,该内圈电容在所述角膜接触镜的圆形边缘所在平面上的投影位于所述螺旋电感在所述角膜接触镜的圆形边缘所在平面上的螺旋形投影的内部;The inner ring capacitor is located on the contact lens, and the projection of the inner ring capacitor on the plane where the circular edge of the contact lens is located is located on the plane where the spiral inductor is located on the circular edge of the contact lens The interior of the spiral projection of ;
所述螺旋电感的一端与所述边缘电容的一端相连,该螺旋电感的另一端与所述内圈电容的一端相连;所述边缘电容的另一端与所述内圈电容的另一端相连;One end of the spiral inductor is connected to one end of the fringe capacitor, the other end of the spiral inductor is connected to one end of the inner ring capacitor; the other end of the fringe capacitor is connected to the other end of the inner ring capacitor;
所述角膜接触镜内部设置有腔体和微流体通道;所述腔体与所述微流体通道相连通,用于存放流体,并向该微流体通道内输送所述流体;该微流体通道内输送的所述流体的量受眼压影响,所述内圈电容的电容值随该微流体通道内输送的所述流体的量的变化而变化;通过所述边缘电容、所述螺旋电感和所述内圈电容构成的CLC回路,实现对所述眼压的检测。A cavity and a microfluidic channel are arranged inside the contact lens; the cavity communicates with the microfluidic channel for storing fluid and transporting the fluid into the microfluidic channel; The amount of the fluid delivered is affected by intraocular pressure, and the capacitance value of the inner ring capacitor changes with the amount of the fluid delivered in the microfluidic channel; through the fringe capacitance, the spiral inductance and the The CLC loop formed by the inner ring capacitor realizes the detection of the intraocular pressure.
作为本发明的进一步优选,所述基于微流体技术的非侵入式眼压检测传感器还包括接收线圈,该接收线圈用于检测由所述边缘电容、所述螺旋电感和所述内圈电容构成的CLC回路的谐振频率,并根据检测到的所述谐振频率判断眼压的大小。As a further preference of the present invention, the non-invasive intraocular pressure detection sensor based on microfluidic technology further includes a receiving coil, which is used to detect The resonant frequency of the CLC circuit, and judge the magnitude of intraocular pressure according to the detected resonant frequency.
作为本发明的进一步优选,所述内圈电容为平板电容,所述微流体通道位于该平板电容的两电容极板之间。As a further preference of the present invention, the inner ring capacitor is a flat capacitor, and the microfluidic channel is located between two capacitor plates of the flat capacitor.
作为本发明的进一步优选,所述边缘电容的电容值至少是所述内圈电容电容值的4倍;优选的,所述螺旋电感的电感值为50nH~500nH,所述边缘电容的电容值为46.9pF~71.4pF,所述内圈电容的电容值为10.7pF~16.05pF。As a further preference of the present invention, the capacitance value of the fringe capacitor is at least 4 times the capacitance value of the inner ring capacitor; preferably, the inductance value of the spiral inductor is 50nH to 500nH, and the capacitance value of the fringe capacitor is 46.9pF-71.4pF, and the capacitance value of the inner ring capacitor is 10.7pF-16.05pF.
作为本发明的进一步优选,所述腔体为多个,这多个腔体均位于所述角膜接触镜的内部,所述腔体的中心在所述角膜接触镜的圆形边缘所在平面上的投影沿与该角膜接触镜的圆形边缘同心的圆的圆周分布。As a further preference of the present invention, there are multiple cavities, all of which are located inside the contact lens, and the centers of the cavities are on the plane where the circular edge of the contact lens is located. The projections are distributed along the circumference of a circle concentric with the circular edge of the contact lens.
作为本发明的进一步优选,所述角膜接触镜的尺寸规格被设定为直径13mm~18mm。As a further preference of the present invention, the size specification of the contact lens is set to a diameter of 13mm-18mm.
作为本发明的进一步优选,所述微流体通道的高度为10μm~30μm,宽度为20μm~80μm,总长度为40mm~100mm。As a further preference of the present invention, the microfluidic channel has a height of 10 μm-30 μm, a width of 20 μm-80 μm, and a total length of 40 mm-100 mm.
作为本发明的进一步优选,所述流体为甘油、水或室温离子液体。As a further preference of the present invention, the fluid is glycerin, water or room temperature ionic liquid.
作为本发明的进一步优选,所述角膜接触镜由硬质层和软质层叠加而成;所述软质层用于在该角膜接触镜佩戴时与患者的眼球直接接触,优选的,该软质层采用PDMS材料;所述硬质层的厚度为60μm~80μm,所述 角膜接触镜的整体厚度不超过300μm;所述微流体通道、所述螺旋电感、所述边缘电容和所述内圈电容均位于该硬质层内,优选的,该硬质层采用派瑞林、PMMA、PC或PET材料。As a further preference of the present invention, the contact lens is composed of a hard layer and a soft layer; the soft layer is used for direct contact with the patient's eyeball when the contact lens is worn, preferably, the soft layer The hard layer is made of PDMS material; the thickness of the hard layer is 60 μm to 80 μm, and the overall thickness of the contact lens is not more than 300 μm; the microfluidic channel, the spiral inductor, the fringe capacitance and the inner ring Capacitors are located in the hard layer. Preferably, the hard layer is made of parylene, PMMA, PC or PET.
作为本发明的进一步优选,所述腔体为圆柱体形,该圆柱体形的高度为80μm~150μm,半径为0.5mm~1mm。As a further preference of the present invention, the cavity is in the shape of a cylinder, the height of the cylinder is 80 μm-150 μm, and the radius is 0.5 mm-1 mm.
通过本发明所构思的以上技术方案,与现有技术相比,由于是采用基于微流体技术的C-L-C结构形成无线无源非侵入式眼压检测传感器,具有结构简单、制作方便、灵敏度高、动态范围大、稳定性好、检测简单等特点。本发明通过对眼压传感方式进行调整,基于微流体变介质电容的原理,既保持了原有CLC结构制备方便的特点,避免电容与电感的跨层引线键合连接,又使得该传感器具有极高的检测灵敏度。Through the above technical scheme conceived by the present invention, compared with the prior art, since the C-L-C structure based on microfluidic technology is used to form a wireless passive non-invasive intraocular pressure detection sensor, it has the advantages of simple structure, convenient manufacture, high sensitivity, dynamic Large range, good stability, simple detection and so on. The present invention adjusts the intraocular pressure sensing method, based on the principle of microfluidic variable medium capacitance, not only maintains the characteristics of the original CLC structure, which is convenient for preparation, avoids the cross-layer wire bonding connection of capacitance and inductance, but also makes the sensor have Very high detection sensitivity.
本发明是将边缘电容、螺旋电感和内圈电容三者串联形成CLC回路,边缘电容、螺旋电感和内圈电容三者均具有两个导线端,螺旋电感的一端与边缘电容的一端相连,该螺旋电感的另一端与内圈电容的一端相连,边缘电容的另一端与内圈电容的另一端相连,由此形成CLC回路。内圈电容优选为平板电容,在该内圈电容的两个电容极板之间分布有微流体通道,液态微流体分布在微流通道以及微腔内;受实时眼压的影响,在微流通道内的液态微流体的量将发生改变,影响内圈电容的电容值,并最终影响到该CLC回路的谐振频率。当患者眼压变化时,引起角膜接触镜变形,引起微腔的挤压吸合变形,由此实现液态微流体在微流通道内的移动,而微流通道分布在内圈电容的介电层中,由于液态微流体的移动,导致部分内圈电容间的介电常数改变,从而实现C-L-C回路谐振频率的改变,外部通过例如天线电感扫频利用网络分析仪等实现谐振频率检测,从而实现眼内压检测。具体来说,当患者眼压升高时,微腔内的微流体被挤压进入到微通道中;当患者眼压降低时,微腔中形成局部真空,由于微通道末端与大气相连,大气压直接将微流体压回微腔中;由于微腔与微通道内液体的总体 积不变,构成动态平衡,微腔相当于一个泵一样。In the present invention, fringe capacitance, spiral inductance and inner-ring capacitance are connected in series to form a CLC circuit. The fringe capacitance, spiral inductance and inner-ring capacitance all have two wire ends, and one end of the spiral inductance is connected to one end of the fringe capacitance. The other end of the spiral inductor is connected to one end of the inner ring capacitor, and the other end of the fringe capacitor is connected to the other end of the inner ring capacitor, thereby forming a CLC loop. The inner ring capacitor is preferably a flat plate capacitor, and a microfluidic channel is distributed between the two capacitor plates of the inner ring capacitor, and the liquid microfluid is distributed in the microfluidic channel and the microcavity; affected by the real-time intraocular pressure, in the microfluidic channel The amount of liquid microfluid in the channel will change, affecting the capacitance value of the inner ring capacitor, and finally affecting the resonant frequency of the CLC circuit. When the intraocular pressure of the patient changes, it will cause the deformation of the corneal contact lens, causing the extrusion and suction deformation of the microcavity, thereby realizing the movement of liquid microfluid in the microfluidic channel, and the microfluidic channel is distributed in the dielectric layer of the inner ring capacitor , due to the movement of the liquid microfluid, the dielectric constant between some inner ring capacitors changes, thereby realizing the change of the resonant frequency of the C-L-C loop. Externally, the resonant frequency detection is realized by using a network analyzer, such as antenna inductance frequency sweep, so as to realize intraocular pressure detection. Specifically, when the patient's intraocular pressure increases, the microfluid in the microcavity is squeezed into the microchannel; when the patient's intraocular pressure decreases, a partial vacuum is formed in the microcavity, and since the end of the microchannel is connected to the atmosphere, the atmospheric pressure The microfluid is directly pressed back into the microcavity; since the total volume of the liquid in the microcavity and the microchannel remains unchanged, a dynamic balance is formed, and the microcavity is equivalent to a pump.
本发明中,微流体通道的高度为10μm~30μm,宽度为20μm~80μm,总长度为40mm~100mm;圆柱体形的腔体的高度为80μm~150μm,半径为0.5mm~1mm;初始设置的边缘电容的电容值是所述内圈电容电容值的4倍以上,例如,螺旋电感的电感值为50nH~500nH,边缘电容的初始电容值为46.9pF~71.4pF,内圈电容的初始电容值为10.7pF~16.05pF,通过与微流体通道(包括微腔等)的配合,能够测量0-65mmHg范围内的眼压值,具有较高的检测灵敏度。螺旋电感在角膜接触镜的圆形边缘所在平面上的投影为螺旋线形,边缘电容在角膜接触镜的圆形边缘所在平面上的投影位于该螺旋线形的外部,内圈电容在角膜接触镜的圆形边缘所在平面上的投影位于该螺旋线形的内部。In the present invention, the height of the microfluidic channel is 10 μm to 30 μm, the width is 20 μm to 80 μm, and the total length is 40 mm to 100 mm; the height of the cylindrical cavity is 80 μm to 150 μm, and the radius is 0.5 mm to 1 mm; the initially set edge The capacitance value of the capacitor is more than 4 times the capacitance value of the inner ring capacitor. For example, the inductance value of the spiral inductor is 50nH~500nH, the initial capacitance value of the edge capacitor is 46.9pF~71.4pF, and the initial capacitance value of the inner ring capacitor is 10.7pF ~ 16.05pF, through cooperation with microfluidic channels (including microcavities, etc.), it can measure intraocular pressure in the range of 0-65mmHg, and has high detection sensitivity. The projection of the spiral inductance on the plane where the circular edge of the contact lens is located is a helix, the projection of the fringe capacitance on the plane where the circular edge of the contact lens is located is located outside the helix, and the inner ring capacitance is in the circle of the contact lens. The projection on the plane of the edge of the shape is inside the helix shape.
本发明中的眼压传感器中的硬质层(如采用Parylene-C材料等),不易变形,由此可使得液体挤压跟多到微通道中。微流通道、螺旋电感、边缘电容以及内圈电容结构分布在硬质层中,在微通道中不进入流体时,本身的电容值以及电感值不易改变,提高检测的精度。本发明优选甘油、水或离子液体作为液态微流体,甘油的介电常数高、且对人眼无害的液体,可与水互溶成一定粘度的溶液从而在微通道中流动,使眼压检测传感器具有良好的灵敏度。The hard layer in the intraocular pressure sensor of the present invention (such as using Parylene-C material, etc.) is not easily deformed, so that the liquid can be squeezed more into the microchannel. The microfluidic channels, spiral inductors, edge capacitors, and inner ring capacitor structures are distributed in the hard layer. When no fluid enters the microchannels, the capacitance and inductance values are not easy to change, which improves the detection accuracy. In the present invention, glycerin, water or ionic liquid are preferably used as liquid microfluids. Glycerin is a liquid with a high dielectric constant and is harmless to human eyes. The sensor has good sensitivity.
综上,本发明中基于微流体技术的非侵入式眼压检测传感器,采用C-L-C结构,为无线无源的、非侵入式的眼压检测传感器,能够实现眼压力的全天候测量,同时甘油等电介质常数高,传感器具有高灵敏度,动态范围广的特点。In summary, the non-invasive intraocular pressure detection sensor based on microfluidic technology in the present invention adopts the C-L-C structure, which is a wireless, passive, non-invasive intraocular pressure detection sensor, which can realize all-weather measurement of intraocular pressure, and at the same time dielectrics such as glycerin The constant is high, the sensor has the characteristics of high sensitivity and wide dynamic range.
附图说明Description of drawings
图1(a)为本发明基于微流体技术的非侵入式眼压检测传感器的俯视结构示意图;Fig. 1 (a) is the top view structure schematic diagram of the non-invasive intraocular pressure detection sensor based on microfluidic technology of the present invention;
图1(b)为本发明基于微流体技术的非侵入式眼压检测传感器的微腔的 俯视结构示意图;Fig. 1 (b) is the top view structure schematic diagram of the microcavity of the non-invasive intraocular pressure detection sensor based on microfluidic technology of the present invention;
图2为该眼压传感器的剖视图,该剖视图被展开成平面显示;Fig. 2 is a cross-sectional view of the intraocular pressure sensor, which is unfolded into a plane display;
图3为该眼压传感器分层制造原理示意图,各层被展开为平面显示;Fig. 3 is a schematic diagram of the layered manufacturing principle of the intraocular pressure sensor, and each layer is unfolded into a plane display;
图4为本发明基于微流体技术的非侵入式眼压检测传感器的整体示意图,包括球冠状角膜接触镜片以及集成在该角膜接触镜中的眼压传感器其他组件。Fig. 4 is an overall schematic diagram of the non-invasive intraocular pressure detection sensor based on microfluidic technology of the present invention, including a spherical contact lens and other components of the intraocular pressure sensor integrated in the contact lens.
图中各附图标记的含义如下:1为角膜接触镜,2为硬质层,3为软质层,4为微流通道(即微流体通道、微通道),5为液态微流体(即流体),6为微腔(即腔体),7为螺旋电感,8为边缘电容,9为内圈电容。The meanings of each reference sign in the figure are as follows: 1 is a contact lens, 2 is a hard layer, 3 is a soft layer, 4 is a microfluidic channel (ie, a microfluidic channel, a microchannel), and 5 is a liquid microfluidic (ie, a microfluidic channel). Fluid), 6 is a microcavity (that is, a cavity), 7 is a spiral inductor, 8 is a fringe capacitance, and 9 is an inner ring capacitance.
具体实施方式detailed description
为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。此外,下面所描述的本发明各个实施方式中所涉及到的技术特征只要彼此之间未构成冲突就可以相互组合。In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.
实施例1Example 1
如图1(a)、图2所示,本发明中基于微流体技术的非侵入式眼压检测传感器,该眼压检测传感器是种基于微流体技术的C-L-C结构无线无源非侵入式眼压检测传感器,包括软性的角膜接触镜、硬质层、软质层、微流通道(即微通道)、液态微流体、微腔、螺旋电感、边缘电容、内圈电容,其中:As shown in Figure 1(a) and Figure 2, the non-invasive intraocular pressure detection sensor based on microfluidic technology in the present invention is a C-L-C structure wireless passive non-invasive intraocular pressure sensor based on microfluidic technology Detection sensors, including soft contact lenses, hard layers, soft layers, microfluidic channels (ie, microchannels), liquid microfluidics, microcavities, spiral inductors, fringe capacitance, and inner ring capacitance, among which:
角膜接触镜整体呈球冠状,并用于在佩戴时与患者的眼球形状相匹配的进行贴合;该角膜接触镜由硬质层与软质层叠加构成,其中软质层直接与患者眼角膜相互贴合;角膜接触镜的尺寸规格被设定为直径13mm~18mm;硬质层的厚度为60-80μm,主体由parylene-c(即C型派瑞林)材料制作,不易变形;软质层采用PDMS材料,具有高的透氧性,其表面可 进行离子改性使其具有生物相容性,适合于角膜佩戴;角膜接触镜的整体厚度小于300μm。The contact lens has a spherical crown as a whole, and is used to fit the patient's eyeball shape when worn; the contact lens is composed of a hard layer and a soft layer, and the soft layer directly interacts with the patient's cornea. Fitting; the size of the contact lens is set to be 13mm-18mm in diameter; the thickness of the hard layer is 60-80μm, and the main body is made of parylene-c (ie C-type parylene) material, which is not easy to deform; the soft layer The PDMS material is used, which has high oxygen permeability, and its surface can be ionically modified to make it biocompatible, suitable for corneal wear; the overall thickness of the contact lens is less than 300 μm.
微流通道、螺旋电感、边缘电容以及内圈电容结构分布在硬质层中;微腔可由分布在硬质层和软质层中的小腔体共同组成(例如,可由硬质层和软质层共同组成微腔,微腔壁一部分由硬质层构成,一部分由软质层构成);Microfluidic channels, spiral inductors, fringe capacitors, and inner ring capacitor structures are distributed in the hard layer; the microcavity can be composed of small cavities distributed in the hard layer and the soft layer (for example, it can be composed of the hard layer and the soft layer. Layers together form a microcavity, a part of the microcavity wall is composed of a hard layer, and a part is composed of a soft layer);
微流通道分布在内圈电容的介电层中;微通道的高度可为10μm~30μm,宽度为20μm~80μm,总体长度可为40mm~100mm。The microfluidic channel is distributed in the dielectric layer of the inner ring capacitor; the height of the microchannel can be 10 μm to 30 μm, the width can be 20 μm to 80 μm, and the overall length can be 40 mm to 100 mm.
液态微流体分布在微流通道以及微腔内;液态微流体可为甘油等介电常数高且对人眼无害的液体,其可与水互溶成一定粘度的溶液从而在微通道中流动。The liquid microfluid is distributed in the microfluidic channel and the microcavity; the liquid microfluid can be a liquid with a high dielectric constant such as glycerin and is harmless to human eyes, which can be miscible with water to form a solution with a certain viscosity to flow in the microchannel.
微腔的高度为80μm~150μm,微腔可以有多个,多个微腔之间连通。微腔由硬质层与软质层共同构成,多个呈环形排布且互连在一起,以此能感受角膜接触镜随眼压增大时的最大变形,在初始微腔处有进液口,可由此处将甘油等微流液体注入,注入后,将微腔“缝合”。与微腔相连的微流体通道,其末端开口,并暴露在角膜镜的外表面上,直接与大气相连通;当患者眼压变化时,引起角膜接触镜变形,引起微腔的挤压吸合变形,由此实现液态微流体在微流通道内的移动,而微流通道分布在内圈电容的介电层中,由于液态微流体的移动,导致部分内圈电容间的介电常数改变,从而实现C-L-C回路谐振频率的改变,外部通过检测谐振频率实现眼内压检测。具体来说,当患者眼压升高时,微腔内的微流体被挤压进入到微通道中;当患者眼压降低时,微腔中形成局部真空,由于微通道末端与大气相连,大气压直接将微流体压回微腔中;由于微腔与微通道内液体的总体积不变,构成动态平衡,微腔相当于一个泵一样。The height of the microcavity is 80 μm to 150 μm, there may be multiple microcavities, and the multiple microcavities are connected. The microcavity is composed of a hard layer and a soft layer. Several are arranged in a ring and interconnected together, so that the maximum deformation of the contact lens with the increase of intraocular pressure can be felt, and there is liquid in the initial microcavity. The microfluidic fluid such as glycerin can be injected from here, and the microcavity is "sewn" after injection. The microfluidic channel connected to the microcavity has an open end and is exposed on the outer surface of the corneal lens, directly communicating with the atmosphere; when the intraocular pressure of the patient changes, the contact lens is deformed and the microcavity is squeezed and closed deformation, thereby realizing the movement of the liquid microfluid in the microfluidic channel, and the microfluidic channel is distributed in the dielectric layer of the inner ring capacitor. Due to the movement of the liquid microfluid, the dielectric constant between some inner ring capacitors changes, thereby Realize the change of the resonant frequency of the C-L-C circuit, and realize the intraocular pressure detection by detecting the resonant frequency externally. Specifically, when the patient's intraocular pressure increases, the microfluid in the microcavity is squeezed into the microchannel; when the patient's intraocular pressure decreases, a partial vacuum is formed in the microcavity, and since the end of the microchannel is connected to the atmosphere, the atmospheric pressure The microfluid is directly pressed back into the microcavity; since the total volume of the liquid in the microcavity and the microchannel remains unchanged, a dynamic equilibrium is formed, and the microcavity is equivalent to a pump.
如图1(b)所示,与硬质层微通道相连接口,即与位于平板电容两电极极板之间的微流体通道直接相连的接口;多个微腔的中心在角膜接触镜的 圆形边缘所在平面上的投影沿与该角膜接触镜的圆形边缘同心的圆的圆周分布(同心圆可以为多个,如图1(b)所示),位于平板电容两电极极板之间的微流体通道在该平面上的投影既可以在该同心圆的内部,也可以在该同心圆的外部,只需调整对应的与硬质层微通道相连接口位置即可。As shown in Figure 1 (b), it is connected with the microchannel of the hard layer, that is, the interface directly connected with the microfluidic channel between the two electrode plates of the plate capacitor; the centers of multiple microcavities are in the circle of the contact lens. The projection on the plane where the edge of the shape is located is distributed along the circumference of a circle concentric with the circular edge of the contact lens (there can be multiple concentric circles, as shown in Figure 1 (b)), and is located between the two electrode plates of the flat capacitor The projection of the microfluidic channel on the plane can be either inside the concentric circle or outside the concentric circle, and only need to adjust the corresponding interface position connected with the hard layer microchannel.
上述螺旋电感、边缘电容和内圈电容串联在一起构成C-L-C谐振回路,边缘电容的大小设计为远大于内圈电容(一般情况下初始设置的边缘电容的电容值在46.9pF~71.4pF范围内,内圈电容的电容值在10.7pF~16.05pF范围内,边缘电容的电容值至少是内圈电容电容值的4倍;螺旋电感的电感值设置为50nH~500nH),通过采用内外电容串联的形式可使传感器结构简单、布局合理、制造方便。The above-mentioned spiral inductance, fringe capacitance and inner ring capacitance are connected in series to form a C-L-C resonant circuit, and the size of the fringe capacitance is designed to be much larger than the inner ring capacitance (generally, the capacitance value of the initially set fringe capacitor is in the range of 46.9pF to 71.4pF, The capacitance value of the inner ring capacitor is in the range of 10.7pF ~ 16.05pF, the capacitance value of the edge capacitor is at least 4 times the capacitance value of the inner ring capacitor; the inductance value of the spiral inductor is set to 50nH ~ 500nH), by adopting the form of series connection of internal and external capacitors The structure of the sensor can be simple, the layout is reasonable, and the manufacture is convenient.
如图3所示,该传感器可采用分层工艺加工,分为4层分别加工,各层薄膜通过光刻等工艺加工出来后,采用氧气离子体/紫外线处理进行改性,之后进行对准键合实现平面式的传感器的各个组件及它们之间的连接结构。例如,第2层、第4层包含金属电极,可采用磁控溅射+光刻+电镀的工艺来制作,使用的材料为Cu,这两层金属层的厚度均为5μm~10μm;第2层、第3层、第4层中包含有微通道以及引液口,可采用等离子刻蚀、激光刻蚀等工艺制作;平面式的传感器最后采用热压法塑形成曲面式(即与球冠状的角膜接触镜相匹配的弧形形状)隐形眼镜眼压传感器。As shown in Figure 3, the sensor can be processed by a layered process, which is divided into four layers and processed separately. After each layer of film is processed by photolithography and other processes, it is modified by oxygen ion plasma/ultraviolet treatment, and then the alignment key is carried out. Combined to realize the various components of the planar sensor and the connection structure between them. For example, the second layer and the fourth layer contain metal electrodes, which can be produced by magnetron sputtering + photolithography + electroplating. The material used is Cu, and the thickness of the two metal layers is 5 μm to 10 μm; The first layer, the third layer, and the fourth layer contain microchannels and liquid inlets, which can be made by plasma etching, laser etching and other processes; the planar sensor is finally molded into a curved surface by hot pressing (that is, it is the same as the spherical crown The contact lens matches the curved shape of the contact lens with the IOP sensor.
本发明中无线无源的眼压传感器,由角膜接触镜随眼压而变形而实现微腔中液体的排出进入微通道中,引起内圈电容的介电常数的改变。电容与电感构成C-L-C谐振回路,可由外部集成在眼镜上或则贴在眼眶的扫频天线线圈等实现谐振频率的检测,从而实现对眼内压的检测。通过本发明,能够根据谐振频率的变化实现眼内压24小时的精确测量,具有灵敏度高,动态范围大,稳定性好,检测简单等特点。本发明中的微腔除了如图1(b)所示的圆柱体形外,还可以是其他形状,只要多个微腔的中心在角膜接触镜的圆形边缘所在平面上的投影沿与该角膜接触镜的圆形边缘同心的圆的 圆周均匀分布即可,如图1(a)所示。In the wireless passive intraocular pressure sensor of the present invention, the liquid in the microcavity is discharged into the microchannel by the deformation of the corneal contact lens with the intraocular pressure, which causes the change of the dielectric constant of the inner ring capacitance. Capacitance and inductance form a C-L-C resonant circuit, and the resonant frequency can be detected by an external integrated on the glasses or a frequency-sweeping antenna coil attached to the eye socket, thereby realizing the detection of intraocular pressure. Through the present invention, 24-hour accurate measurement of the intraocular pressure can be realized according to the change of the resonance frequency, and has the characteristics of high sensitivity, large dynamic range, good stability, simple detection and the like. The microcavity among the present invention can also be other shapes except the cylindrical shape as shown in Figure 1 (b), as long as the projection of the center of a plurality of microcavities on the plane where the circular edge of the contact lens is in line with the cornea The circular edge of the contact lens can be evenly distributed on the circumference of the concentric circle, as shown in Fig. 1(a).
本发明中的眼压传感器为柔性,是种非侵入式的眼压检测传感器。上述实施例中,角膜接触镜的硬质层材料为派瑞林Parylene-c,除了派瑞林外,还可以采用PC(即,Polycarbonate,聚碳酸酯)、PMMA(即,聚甲基丙烯酸甲酯,有机玻璃)或PET(即,聚对苯二甲酸乙二醇酯);派瑞林材料可由化学气相沉积工艺制备,PMMA、PC、PET等材料可采用对应的薄膜制造工艺制备。The intraocular pressure sensor in the present invention is flexible and is a non-invasive intraocular pressure detection sensor. In the above-described embodiment, the hard layer material of the contact lens is Parylene-c. In addition to Parylene, PC (i.e., Polycarbonate, polycarbonate), PMMA (i.e., polymethylmethacrylate) can also be used. ester, plexiglass) or PET (that is, polyethylene terephthalate); parylene materials can be prepared by chemical vapor deposition processes, and materials such as PMMA, PC, and PET can be prepared by corresponding film manufacturing processes.
本发明中的液态微流体可用水、甘油等介电常数较高的液态(从微流液体粘度的角度出发,也可以采用甘油与水的混合溶液),还可以是室温离子液体,可以形成液体化学界面电容、电极/离子液体界面电容,具有极高的灵敏度。Liquid microfluids in the present invention can be liquids with higher dielectric constants such as water and glycerol (from the perspective of microfluidic liquid viscosity, a mixed solution of glycerin and water can also be used), and can also be room temperature ionic liquids, which can form liquid Chemical interface capacitance, electrode/ionic liquid interface capacitance, with extremely high sensitivity.
本领域的技术人员容易理解,以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。Those skilled in the art can easily understand that the above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention, All should be included within the protection scope of the present invention.
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