CN105954591A - Soft-magnetic film material surface resistance high flux testing method - Google Patents
Soft-magnetic film material surface resistance high flux testing method Download PDFInfo
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- CN105954591A CN105954591A CN201610283377.1A CN201610283377A CN105954591A CN 105954591 A CN105954591 A CN 105954591A CN 201610283377 A CN201610283377 A CN 201610283377A CN 105954591 A CN105954591 A CN 105954591A
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- 230000004907 flux Effects 0.000 title claims abstract description 39
- 238000012360 testing method Methods 0.000 title claims abstract description 37
- 239000000463 material Substances 0.000 title claims abstract description 20
- 239000000523 sample Substances 0.000 claims abstract description 182
- 239000000758 substrate Substances 0.000 claims abstract description 22
- 239000010408 film Substances 0.000 claims description 93
- 230000005291 magnetic effect Effects 0.000 claims description 86
- 239000000696 magnetic material Substances 0.000 claims description 31
- 230000005389 magnetism Effects 0.000 claims description 11
- 239000005336 safety glass Substances 0.000 claims description 10
- 238000010998 test method Methods 0.000 claims description 10
- 239000000470 constituent Substances 0.000 claims description 7
- 230000005611 electricity Effects 0.000 claims description 7
- 238000000427 thin-film deposition Methods 0.000 claims description 7
- 238000007716 flux method Methods 0.000 claims description 6
- 238000003491 array Methods 0.000 claims description 5
- 239000012528 membrane Substances 0.000 claims description 5
- 238000012937 correction Methods 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 3
- 238000002360 preparation method Methods 0.000 claims description 3
- 238000012188 high-throughput screening assay Methods 0.000 claims 1
- 238000005496 tempering Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 13
- 238000001659 ion-beam spectroscopy Methods 0.000 abstract description 8
- 238000000151 deposition Methods 0.000 abstract description 4
- 230000008021 deposition Effects 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 abstract description 3
- 238000012216 screening Methods 0.000 abstract description 3
- 239000005341 toughened glass Substances 0.000 abstract 2
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000010409 thin film Substances 0.000 description 7
- 230000005415 magnetization Effects 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 229910017052 cobalt Inorganic materials 0.000 description 3
- 239000010941 cobalt Substances 0.000 description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000013537 high throughput screening Methods 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 238000011056 performance test Methods 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- -1 Qi Zhongtie Chemical compound 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 235000013339 cereals Nutrition 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- RIVZIMVWRDTIOQ-UHFFFAOYSA-N cobalt iron Chemical compound [Fe].[Co].[Co].[Co] RIVZIMVWRDTIOQ-UHFFFAOYSA-N 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000005347 demagnetization Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/08—Measuring resistance by measuring both voltage and current
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Hall/Mr Elements (AREA)
Abstract
The invention relates to a soft-magnetic film material surface resistance high flux testing method. The method comprises the steps of: S1, manufacturing soft-magnetic film samples, wherein a high flux combination material ion beam sputtering film deposition system is adopted, the plurality of soft-magnetic film samples different in component are prepared on a toughened glass substrate, and the plurality of soft-magnetic film samples are arranged in an array mode on the toughened glass substrate; S2, providing a high flux resistivity tester which comprises a probe substrate bearing a plurality of groups of four-point probes which are arranged in the array mode corresponding to the plurality of soft-magnetic film samples; S3, testing the resistance performance of the soft-magnetic film samples, wherein the four-point probes contact the soft-magnetic film samples, a current I and a potential difference V are measured, the plurality of soft-magnetic film samples are tested at one time, and a high flux screening technology is adopted to test the soft-magnetic film samples; and S4, calculating the resistivity.
Description
[technical field]
The present invention relates to a kind of physical quantity method of testing, particularly relate to a kind of soft magnetism
Thin-film material surface resistance high flux method of testing.
[background technology]
Soft magnetic material film becomes at write head, perpendicular magnetic recording medium, thin film
The aspect such as depressor and inductance component is widely used.Traditional ferrite
Thin-film material has high resistivity and an advantage of high pcrmeability, but saturated magnetic
Change intensity the lowest, especially when operating frequency close to time, its pcrmeability is drastically
Decline, but under low saturation magnetization, low resistivity, hot conditions
Crystallization tendency, low Curie temperature make pcrmeability frequency spectrum generation multiple resonance,
Heat stability is deteriorated.Ferrocobalt thin film has high saturation magnetization, but
It is special that low resistivity and big magnetostriction make it difficult to obtain good soft magnetism
Property.
The high efficiency of electronic device, high frequency, low-dimensional and low-loss such one
Soft magnetic material film is proposed higher by the development trend of individual " two high two low "
Requirement, the highest saturation magnetization, low coercivity, high resistivity,
High pcrmeability, high ferromagnetic resonance frequency etc..Especially recent years,
The unit single magnetic from original single farmland district till now that records of disk is received
Rice grain, recording mode by recorded present perpendicular recording in original face,
These all make the packing density of disk exponentially rise.The increasing of magnetic recording density
Add the development on the one hand having benefited from magnetic head, on the other hand have benefited from the magnetic of high-quality
The exploitation of material.Soft magnetic material film is as the substrate of perpendicular magnetic recording medium
Layer, to have high resistivity at high frequencies, plays increase magnetic flux and makes write
Magnetic head preferably writes information to record the effect of medium.
The most conventional mode is to prepare soft magnetic material film, then by four spies
The resistance of every piece of soft magnetic material film tested by pin tester, therefore tests substantial amounts of
During many ratios component soft magnetic material film, testing efficiency is low, labor intensive cost
Greatly, test period is long, also easily produces experiment by mistake in substantial amounts of test simultaneously
Difference.
[summary of the invention]
During for overcoming existing test multielement, many ratios soft magnetic material film, need
The skills such as wanting single sample to test one by one, therefore efficiency is low, and cost is high, time-consuming length
Art problem, the present invention provides a kind of soft magnetic material film sheet resistance high pass to measure
Method for testing.
The present invention solves the technical scheme of technical problem, and to be to provide a kind of soft magnetism thin
Membrane material sheet resistance high flux method of testing, including step S1, makes soft magnetism
Film sample: use high flux combined material ion beam sputtering thin film deposition system
System, prepares the soft magnetic film that multiple constituent content is different on safety glass substrate
Sample, plurality of soft magnetic film sample array on safety glass substrate sets
Put；Step S2, it is provided that a high flux resistivity tester: it includes a probe
Substrate, carries and at most organizes four probes, and described many groups four probes are thin with multiple soft magnetisms
The corresponding array of membrane sample is arranged；Step S3, test soft magnetic film sample electricity
Resistive energy: by four probe contact soft magnetic film samples, detected current value I and electricity
Potential difference V, disposable test the plurality of soft magnetic film sample, and use high pass
Soft magnetic film sample is tested by amount triage techniques；And step S4, calculate electricity
Resistance rate.
Preferably, described four probe arrays are the arrays of eight row eight row, often
Eight group of four probe configuration one power supply of row, an ammeter, a potential difference meter.
Preferably, described often organize four probes include the first probe, the second probe,
3rd probe and the 4th probe, the first probe and the 4th probe connect power supply, and
Connect ammeter, the second probe and the 3rd probe and connect potential difference meter, four probes
During contact soft magnetic film sample, soft magnetic film sample has electric current to pass through, interior
Portion produces potential difference.
Preferably, described first probe and the spacing of the second probe, the second probe
With the spacing of the 3rd probe, the spacing of the 3rd probe and the 4th probe is equal.
Preferably, described safety glass substrate length × a width of 80mm × 80mm.
Preferably, soft magnetic film sample length × a width of 10mm of described preparation ×
10mm。
Preferably, in described step S4, one component of one group of four probe contact contains
The soft magnetic film sample of amount, according to described potential difference V recorded and current value I,
Use formula ρ=2 π SV (B0I)-1Calculate soft magnetic film sample resistivity, wherein
ρ is soft magnetic film sample resistivity, and S is adjacent probe spacing, B0For revising
Coefficient.
Compared with prior art, one soft magnetic material film sheet resistance of the present invention
High flux method of testing has the advantage that employing high flux combined material ion
Beam sputtering thin film deposition system can disposably prepare the soft magnetism of multiple constituent content
Film sample, multiple soft magnetic film sample array formulas arrange, facilitate subsequent high pass
Amount resistivity meter test, is also beneficial to the softest by the fast data search recorded
Magnetic thin film sample, four probe array formulas of high flux resistivity tester are arranged,
Can be with soft magnetic film sample one_to_one corresponding engaged test, by many on probe substrate
Organize four probes to contact with corresponding many groups soft magnetic film sample respectively, disposably survey
Obtain current value I and potential difference V of described many group soft magnetic film samples.By record
Potential difference, current value and resistivity computing formula, can calculate soft magnetic film sample
The resistivity of product, according to test result, can search the group of required resistivity
Divide content soft magnetic film sample.Thus it is low to solve testing efficiency, cost is high,
The problems such as time-consuming length, can also decrease experimental error simultaneously.
[accompanying drawing explanation]
Fig. 1 is one soft magnetic material film sheet resistance high flux of the present invention test
The operating process schematic diagram of method.
Fig. 2 is one soft magnetic material film sheet resistance high flux of the present invention test
Method provides soft magnetic material film schematic diagram to be tested, including 64
The constituent content difference soft magnetic film sample of 10mm × 10mm.
Fig. 3 is one soft magnetic material film sheet resistance high flux of the present invention test
The high flux resistivity tester structural representation that method uses.
Fig. 4 is a soft magnetic film sample resistance performance test signal shown in Fig. 2
Figure.
Fig. 5 is one soft magnetic material film sheet resistance high flux of the present invention test
Method integrated testability schematic diagram.
[detailed description of the invention]
In order to make the purpose of the present invention, technical scheme and advantage are more clear bright
In vain, below in conjunction with accompanying drawing and embodiment, the present invention is carried out the most in detail
Explanation.Should be appreciated that specific embodiment described herein is only in order to explain
The present invention, is not intended to limit the present invention.
Soft magnetic materials (soft magnetic material) is when magnetization occurs
Coercivity is not more than the material of 100A/m, and such material is referred to as soft magnetic bodies.
Soft magnetic materials has the magnetic material of low-coercivity and high magnetic permeability, it is easy to magnetic
Change, be also easy to demagnetization, be widely used in electrical equipment and electronic equipment.Typical case
Soft magnetic materials, the maximum intensity of magnetization can be realized by minimum external magnetic field,
Applying most soft magnetic materials is ferro-silicium (stalloy) and various soft magnetism
Ferrite etc..Wherein coercivity (coercive force, represent with Hc) is
Refer to magnetic material after saturated magnetization, its magnetic induction when external magnetic field returns to zero
Intensity B does not fall back on zero, only at former magnetizing field rightabout plus certain
The magnetic field of size just can make magnetic induction return to zero, and this magnetic field is referred to as coercive
Magnetic field, also known as coercivity.
Refer to Fig. 1, one soft magnetic material film sheet resistance high pass of the present invention
Weight testing method includes step S1, makes soft magnetic film sample；Step S2,
One high flux resistivity tester is provided；Step S3, tests soft magnetic film sample
Product resistive performance；And step S4, calculate resistivity.Its specific embodiments
For:
Step S1, makes soft magnetic film sample: refer to Fig. 2, it is provided that a steel
Change glass substrate 10, use high flux combined material ion beam sputtering thin film to sink
Long-pending system prepares the soft magnetic film sample 101 of many ratios component.In high flux group
Condensation material ion beam sputtering thin film deposition system prepare intracavity, configure ferrum, cobalt
Two targets on the workbench of carrying target, safety glass substrate 10 is long ×
A width of 80mm × 80mm is fixed on the sample stage of base, and mask plate is fixed on
Between sample stage and target, according to the demand of soft magnetic film sample 101, select
Suitable mask plate, target is positioned at above mask plate, and base is rotatable, and carries
On dynamic sample stage, safety glass substrate 10 rotates, and mask plate is provided with aperture,
Different mask plate little hole number thereon are different with aperture.Combine at this high flux
Material ions beam sputtering thin film deposition system, starts base and makes safety glass substrate
10 horizontal directions rotate, by ion beam sputtering target, at safety glass base
Sheet 10 surface deposition is prepared as soft magnetic film sample 101.
High flux combined material ion beam sputtering thin film deposition system is for height
Special efficient coating apparatus prepared by flux combined material chip.This system uses
Brand-new fine vacuum, multi cavity design thinking, change target and in situ by storage target in situ
Heat treatment integrates, and the ion beam being equipped with assisting ion source deposition spatters
Penetrate system, it is achieved that high homogeneity, high-compactness, high-purity, high-resolution
Combined material chip prepare.This system includes sputtering chamber, storage target chamber, changes target
Chamber, situ heat treatment chamber and sample cavity, accurately control continuous moving mask system,
Sputtering of materials is made to arrive the number of times of sample area different with the time such that it is able at steel
The gradient preparing the most up to a million different components on change glass substrate 10 is sunk
The soft magnetic film samples 101 such as long-pending, sequential aggradation.
At safety glass substrate 10 surface deposition 64 10mm × 10mm of preparation
Soft magnetic film sample 101, is 1-64 by from left to right number consecutively, forms eight
The array of row eight row, soft magnetic film sample 101 constituent content is different, component bag
Including ferrum, cobalt and oxygen, Qi Zhongtie, cobalt and oxygen mass percent scope are respectively as follows:
60-70%, 29-39%, 0-1%, soft magnetic film sample 101 thicknesses of layers is
0.1mm。
Step S2, it is provided that a high flux resistivity tester 1: refer to Fig. 3,
High flux resistivity tester 1 include probe substrate 11, four probe 13,
Power supply 15, ammeter 17 and potential difference meter 19.Probe substrate 11 is used for holding
Carrying many groups four probes 13, the present embodiment is 64 groups, is the array of eight row eight row
Arrange, corresponding with multiple soft magnetic film samples 101, one group of four probe 13
Including first probe the 131, second probe 132 being from left to right arranged in order,
3rd probe the 133, the 4th probe 134, is metal material, is arranged on one
On bar straight line, and the first probe 131 and spacing of the second probe 132, the
Two probe 131 and the spacing of the 3rd probe 132, the 3rd probe 131 and the 4th
The spacing of probe 132 is the most equal, and eight group of four probe 13 of every a line configures an electricity
Source 15, ammeter 17 and a potential difference meter 19, the first probe 131 and
Four probes 134 switch on power 15, and connect ammeter 17, the second probe 132
Connecting potential difference meter 19 with the 3rd probe 133, one group of four probe 13 tests one
The soft magnetic film sample 101 of individual ratio component.
Step S3, tests soft magnetic film sample resistance performance: first by high flux
Resistivity tester 1 preheats, estimation soft magnetic film sample 101 resistance or resistance
The scope of rate, and scope arranges suitable range according to this, then places soft magnetism thin
Membrane sample 101, by four probes 13 and the soft magnetic film sample 101 of array arrangement
Contact, the power supply 15 that the first probe 131 is connected with the 4th probe 134 provides
Constant current, makes soft magnetic film sample 101 have electric current to pass through, the most internal product
Give birth to potential difference, from ammeter 17 read current value I, from potential difference meter 19
Read potential difference V.
Why use four probe method to measure resistance, be because four probe 13 Hes
Soft magnetic film sample 101 has a contact resistance, this contact resistance when contacting
Very big, if measure electric current with the first probe 131 and the 4th probe 134 simultaneously
And potential difference, contact resistance will affect the result of measurement.Second probe 132
With the voltage that the 3rd between probe 133 is that potential difference meter 19 uses penalty method to measure
, as long as there is no letting out of electric current between the second probe 132 and the 3rd probe 133
Dew, it becomes possible to avoid contact with the error that resistance brings, improves the precision measured.
This method of testing utilizes accelerated test that soft magnetic film sample 101 is carried out high pass
Amount screening, directly disposably completes multiple soft magnetic film sample in the same time
101 resistive performance tests.High flux screening (High throughput
Screening, HTS) technology refers to the experiment with molecular level and cellular level
Based on method, using microplate format as experimental tool carrier, grasp with automatization
Make system and perform process of the test, with sensitive quick detecting instrument collection experiment knot
Really data, analyze and process experimental data with computer, at same time detecting number
With the soft magnetic film sample 101 of ten million, and with the associated databases support obtained
The technical system of operating, it has trace, the feature such as quick, sensitive and accurate.
Refer to Fig. 5, high flux resistivity tester 1 tests soft magnetic film sample
Whole structure figure during product 101, the point 103 in soft magnetic film sample 101
When testing soft magnetic film sample 101 for high flux resistivity tester 1, four visit
Pin 13 and the contact position of soft magnetic film sample 101.
Step S4, calculates resistivity: use high flux resistivity tester 1
Soft magnetic film sample 101 resistivity is tested, according to the first probe 131
And the electric current I recorded between the 4th probe 134 and the second probe 132 and the 3rd spy
Potential difference V recorded between pin 133, it is possible to calculate the electricalresistivityρ of thin film:
ρ=CV/I (2-1)
Wherein C is probe coefficient, maker be measured probe spacing
After determine, and being supplied to user, D1 is the first probe 131 and the second probe
Spacing between 132, D2 is between the second probe 132 and the 3rd probe 133
Spacing, D3 is the spacing between the 3rd probe 133 and the 4th probe 134, four
Individual probe equidistantly arranges, and represents by adjacent probe spacing S, therefore
D1=D2=D3=S.
C=2 π S
ρ=2 π SV/I (2-2)
Formula (2-2) is to derive, when the geometry of sample when sample infinity
Size is more many times greater than the spacing of probe, can regard infinitely great as, therefore can be by
Formula ρ=2 π SV/I calculates the resistivity of sample；If sample is not nothing
Poor big, but thickness, lateral dimension is certain, at this moment utilizes four probe method to measure
During resistivity, cannot directly use formula (2-2), further analyze
Show, as long as formula (2-2) being introduced suitable correction in four probe method
Coefficient B0, B0Size and probe spacing with soft magnetic film sample 101
Correction function and sample shape is relevant with measurement position correction function (can be by accordingly
Several tables check in), now:
ρ=2 π SV (B0I)-1 (2-3)
Therefore the resistivity of soft magnetic film sample can be calculated by formula (2-3).
Compared with prior art, one soft magnetic material film sheet resistance of the present invention
High flux method of testing has the advantage that employing high flux combined material ion
Beam sputtering thin film deposition system can disposably prepare the soft magnetism of multiple constituent content
Film sample 101, multiple soft magnetic film sample 101 arrays are arranged, after convenience
Continuous high flux resistivity meter 1 is tested, and is also beneficial to by the fast data search recorded
Corresponding soft magnetic film sample 101, four probes of high flux resistivity tester 1
13 arrays are arranged, and can contact with soft magnetic film sample 101 one_to_one corresponding.Will
Many groups of four probes 13 on probe substrate 11 are thin with corresponding many groups soft magnetism respectively
Membrane sample 101 contacts, and disposably records described many group soft magnetic film samples 101
Current value I and potential difference V.By the potential difference recorded, current value and resistivity
Computing formula, can calculate the resistivity of soft magnetic film sample 101, Ke Yigen
According to test result, search the constituent content soft magnetic film sample of required resistivity
101.Thus it is low to solve testing efficiency, the problems such as cost is high, time-consuming length,
Experimental error can also be decreased simultaneously.
The foregoing is only present pre-ferred embodiments, not in order to limit
The present invention, all any amendments made within principle of the present invention, equivalent
Within protection scope of the present invention all should being comprised with improvement etc..
Claims (7)
1. a soft magnetic material film sheet resistance high flux method of testing, it is special
Levy and be, including:
Step S1, make soft magnetic film sample: use high flux combined material from
Sub-beam sputtering thin film deposition system, prepares multiple component on safety glass substrate
The soft magnetic film sample that content is different, plurality of soft magnetic film sample is at tempering
On glass substrate, array is arranged；
Step S2, it is provided that a high flux resistivity tester: it includes a probe
Substrate, carries and at most organizes four probes, and described many groups four probes are thin with multiple soft magnetisms
The corresponding array of membrane sample is arranged；
Step S3, tests soft magnetic film sample resistance performance: by four probe contacts
Soft magnetic film sample, detected current value I and potential difference V, described in disposable test
Multiple soft magnetic film samples, and use High Throughput Screening Assay to soft magnetic film sample
Product are tested；
And step S4, calculate resistivity.
2. a kind of soft magnetic material film sheet resistance as claimed in claim 1 is high
Flux test method, it is characterised in that: described four probe arrays are eight row eight row
Array, often eight group of four probe configuration one power supply of row, an ammeter, a current potential
Difference meter.
3. a kind of soft magnetic material film sheet resistance as claimed in claim 1 is high
Flux test method, it is characterised in that: described four probes of often organizing include the first spy
Pin, the second probe, the 3rd probe and the 4th probe, the first probe and the 4th is visited
Pin connects power supply, and connects ammeter, and the second probe and the 3rd probe connect electricity
Tentiometer, during four probe contact soft magnetic film samples, soft magnetic film sample has electricity
Stream passes through, the most internal generation potential difference.
4. a kind of soft magnetic material film sheet resistance as claimed in claim 3 is high
Flux test method, it is characterised in that: described first probe and the second probe
Spacing, the second probe and the spacing of the 3rd probe, the 3rd probe and the 4th probe
Spacing equal.
5. a kind of soft magnetic material film sheet resistance as claimed in claim 1 is high
Flux test method, it is characterised in that: described safety glass substrate length × a width of
80mm×80mm。
6. a kind of soft magnetic material film sheet resistance as claimed in claim 1 is high
Flux test method, it is characterised in that: the soft magnetic film sample of described preparation is long
× a width of 10mm × 10mm.
7. a kind of soft magnetic material film sheet resistance as claimed in claim 1 is high
Flux test method, it is characterised in that: in step S4, one group of four probe contact
The soft magnetic film sample of one constituent content, according to described potential difference V recorded
With current value I, use formula ρ=2 π SV (B0I)-1Calculate soft magnetic film sample electricity
Resistance rate, wherein ρ is soft magnetic film sample resistivity, and S is adjacent probe spacing,
B0For correction factor.
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| CN111796148A (en) * | 2020-07-31 | 2020-10-20 | 上海华力微电子有限公司 | Resistance test structure |
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