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CN105953749B - A kind of optical 3-dimensional topography measurement method - Google Patents

A kind of optical 3-dimensional topography measurement method Download PDF

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CN105953749B
CN105953749B CN201610451777.9A CN201610451777A CN105953749B CN 105953749 B CN105953749 B CN 105953749B CN 201610451777 A CN201610451777 A CN 201610451777A CN 105953749 B CN105953749 B CN 105953749B
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CN105953749A (en
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赵宏
张春伟
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Xian Jiaotong University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/254Projection of a pattern, viewing through a pattern, e.g. moiré

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Abstract

一种光学三维形貌测量方法,先按照实际测量要求,布置好由投影系统、相机组成的测量系统;然后根据测量需要设计条纹图并由投影系统投影到被测物体表面,被物体反射的条纹图由相机采样;再从采样条纹图解调出包裹相位,解包裹后得到条纹图的真实相位值;然后由远心镜头的放大率、相机像元大小及采样条纹图的图像坐标求解得到被测物体X、Y轴坐标;最后标定得到投影系统的相关参数,结合条纹相位,根据三角关系求得被测物体Z轴的坐标;本发明标定过程简单,既提高了三维坐标的求解速度又能达到更高的测量精度;一次标定即可保证之后所有测量的使用,效率很高。

An optical three-dimensional shape measurement method. First, according to the actual measurement requirements, a measurement system consisting of a projection system and a camera is arranged; then a fringe pattern is designed according to the measurement requirements and projected by the projection system onto the surface of the measured object. The fringes reflected by the object The image is sampled by the camera; then the wrapped phase is demodulated from the sampled fringe image, and the real phase value of the fringe image is obtained after unwrapping; then the measured value is obtained by solving the magnification of the telecentric lens, the pixel size of the camera and the image coordinates of the sampled fringe image X and Y axis coordinates of the object; the relevant parameters of the projection system are finally calibrated, combined with the fringe phase, and the coordinates of the Z axis of the measured object are obtained according to the triangular relationship; the calibration process of the invention is simple, which not only improves the solution speed of the three-dimensional coordinates but also achieves Higher measurement accuracy; one calibration can ensure the use of all subsequent measurements, and the efficiency is very high.

Description

一种光学三维形貌测量方法An optical three-dimensional shape measurement method

技术领域technical field

本发明属于三维测量技术领域,具体涉及一种光学三维形貌测量方法。The invention belongs to the technical field of three-dimensional measurement, and in particular relates to an optical three-dimensional shape measurement method.

背景技术Background technique

三维测量在快速成型、质量检测中有着广泛的需求。同时,它在逆向工程、医疗等领域也有着广泛应用。传统的三维测量方法主要是接触式测量,如三坐标测量机。随着光学技术的进步,光学三维测量技术得到了长足的发展,被越来越广泛地应用到三维测量中。典型的光学三维测量方法有点激光扫描测量、线激光扫描测量、结构光投影测量及干涉测量等。其中,基于正弦条纹投影的结构光投影三维测量方法,由于操作便捷、测量精度较高、测量速度快、适应性好等优点,是一种非常优越的三维测量手段。Three-dimensional measurement has a wide range of requirements in rapid prototyping and quality inspection. At the same time, it is also widely used in reverse engineering, medical and other fields. The traditional three-dimensional measurement method is mainly contact measurement, such as three-coordinate measuring machine. With the advancement of optical technology, optical three-dimensional measurement technology has been greatly developed, and is more and more widely used in three-dimensional measurement. Typical optical three-dimensional measurement methods include laser scanning measurement, line laser scanning measurement, structured light projection measurement and interferometry. Among them, the structured light projection three-dimensional measurement method based on sinusoidal fringe projection is a very superior three-dimensional measurement method due to its advantages of convenient operation, high measurement accuracy, fast measurement speed, and good adaptability.

正弦条纹投影三维测量轮廓术需要投影正弦条纹到被测物体表面,反射的条纹图像被相机采样得到,求解采样条纹相位后,结合标定得到的测量系统参数,即可由相位恢复被测物体的三维形貌。现有的正弦条纹投影三维测量轮廓术具有以下特点:投影的正弦条纹图的相位在整个图像平面内沿某一方向呈线性变化;在由单相机-单投影仪构成的测量系统中,相位到被测物体三维形貌的转化总会用到由投影光线与相机采样光线之间构成的三角关系,很多情况下需要一个参考面,三维求解过程复杂。The sinusoidal fringe projection three-dimensional measurement profilometry needs to project the sinusoidal fringe onto the surface of the measured object, and the reflected fringe image is sampled by the camera. After solving the phase of the sampled fringe, combined with the measurement system parameters obtained by calibration, the three-dimensional shape of the measured object can be recovered from the phase. appearance. The existing sinusoidal fringe projection three-dimensional measurement profilometry has the following characteristics: the phase of the projected sinusoidal fringe pattern changes linearly along a certain direction in the entire image plane; in the measurement system composed of a single camera and a single projector, the phase to The transformation of the three-dimensional shape of the measured object always uses the triangular relationship between the projection light and the camera sampling light. In many cases, a reference surface is required, and the three-dimensional solution process is complicated.

发明内容Contents of the invention

为了克服上述现有技术的缺点,本发明的目的在于提供一种光学三维形貌测量方法,使得三维形貌求解过程简化,X、Y坐标的求解速度及精度得到提高,标定过程简单,最终得到更高的测量精度,而且能够在一次系统标定后即可保证之后所有测量的使用,提高测量效率。In order to overcome the above-mentioned shortcomings of the prior art, the object of the present invention is to provide an optical three-dimensional shape measurement method, which simplifies the process of solving the three-dimensional shape, improves the speed and accuracy of solving X and Y coordinates, and makes the calibration process simple. Higher measurement accuracy, and can ensure the use of all subsequent measurements after one system calibration, improving measurement efficiency.

为了达到上述目的,本发明采取的技术方案为:In order to achieve the above object, the technical scheme that the present invention takes is:

一种光学三维形貌测量方法,包括以下步骤:An optical three-dimensional shape measurement method, comprising the following steps:

步骤1:按照实际测量要求,布置好由投影系统、相机组成的测量系统;Step 1: According to the actual measurement requirements, arrange the measurement system consisting of projection system and camera;

步骤2:根据测量需要设计投影圆条纹图并由投影系统投影到被测物体表面;Step 2: Design the projected circular fringe pattern according to the measurement needs and project it onto the surface of the measured object by the projection system;

步骤3:被物体反射的条纹图由相机采样;Step 3: The fringe pattern reflected by the object is sampled by the camera;

步骤4:从采样条纹图解调出包裹相位,解包裹后得到条纹图的真实相位值;Step 4: demodulate the wrapped phase from the sampled fringe pattern, and obtain the real phase value of the fringe pattern after unwrapping;

步骤5:由远心镜头的放大倍率、相机像元大小及采样条纹图的图像坐标求解得到被测物体X、Y轴坐标;Step 5: Obtain the X and Y axis coordinates of the measured object by solving the magnification of the telecentric lens, the size of the camera pixel and the image coordinates of the sampling fringe pattern;

步骤6:标定得到投影系统的相关参数,结合条纹相位,根据由投影光线和投影光轴构成的三角关系得到被测物体Z轴的坐标。Step 6: Calibrate to obtain the relevant parameters of the projection system, combine the fringe phase, and obtain the coordinates of the Z-axis of the measured object according to the triangular relationship formed by the projection light and the projection optical axis.

所述的步骤1中的投影系统是数字投影仪,或是点光源与光栅、光掩膜版组成的投影系统,其投影图像在量程内要能够覆盖被测对象但不能过多地超过被测对象,而且投影光轴与相机光轴需要保持平行。The projection system in step 1 is a digital projector, or a projection system composed of a point light source, a grating, and a photomask. object, and the projection optical axis and the camera optical axis need to be kept parallel.

所述的步骤1中的相机配有远心镜头,远心镜头的参数根据实际测量需求选用。The camera in step 1 is equipped with a telecentric lens, and the parameters of the telecentric lens are selected according to actual measurement requirements.

所述的步骤2中的投影圆条纹图,其灰度值分布需要满足:The gray value distribution of the projected circular fringe image in step 2 needs to satisfy:

f(xp,yp)=a+bcos(2π·r(xp,yp)/R) (1)f(x p ,y p )=a+bcos(2π·r(x p ,y p )/R) (1)

其中,(xp,yp)表示投影条纹图像素坐标,a表示条纹背景项,b表示条纹幅值,R为以像素距离表示的条纹周期,且Among them, (x p , y p ) represents the pixel coordinates of the projected fringe image, a represents the fringe background item, b represents the fringe amplitude, R is the fringe period represented by the pixel distance, and

其中,(xp0,yp0)表示投影阵列与投影系统光轴的交点,初步认为该点是投影阵列的几何中心。Among them, (x p0 , y p0 ) represents the intersection point of the projection array and the optical axis of the projection system, which is preliminarily considered to be the geometric center of the projection array.

所述的步骤4中的相位解调采用经典相位解调方法,相位解包裹采用经典相位解包裹方法。The phase demodulation in step 4 adopts the classical phase demodulation method, and the phase unwrapping adopts the classical phase unwrapping method.

所述的步骤5中被测物体X、Y轴坐标采用如下公式求得:In the described step 5, the X and Y axis coordinates of the measured object are obtained by the following formula:

其中:(xc,yc)为采样图像坐标,β为远心镜头放大倍率,s为相机像元尺寸。Where: (x c , y c ) is the sampled image coordinates, β is the magnification of the telecentric lens, and s is the pixel size of the camera.

所述的步骤6中被测物体Z坐标的求解公式为:The solution formula of the Z coordinate of the measured object in the described step 6 is:

其中,R为以像素距离表示的圆条纹周期,p为投影系统参数,Φ(xc,yc)为采样图像点(xc,yc)的相位值,d(xc,yc)为采样图像上点(xc,yc)与零相位点间的空间距离,通过如下公式计算:Among them, R is the circular fringe period represented by the pixel distance, p is the projection system parameter, Φ(x c , y c ) is the phase value of the sampled image point (x c , y c ), d(x c , y c ) is the spatial distance between the point (x c , y c ) on the sampling image and the zero-phase point, calculated by the following formula:

其中,s为相机像元尺寸,(xc0,yc0)为采样条纹图零相位点的像素坐标,β为远心镜头放大倍率。Among them, s is the pixel size of the camera, (x c0 , y c0 ) is the pixel coordinate of the zero phase point of the sampling fringe image, and β is the magnification of the telecentric lens.

与传统的正弦条纹投影三维测量轮廓术相比,本发明具有以下有益效果:不需要对相机进行标定;被测物体X、Y坐标求解较传统方法有非常大的简化,既极大提高了X、Y坐标的求解速度也能保证求解精度;被测物体Z坐标的求解中涉及的标定参量少,标定过程简单,测量误差来源少,能够达到更高的测量精度;当投影仪的焦距确定后,一次标定即可保证之后所有测量的使用,效率极高。Compared with the traditional sinusoidal fringe projection three-dimensional measurement profilometry, the present invention has the following beneficial effects: no need to calibrate the camera; the solution of the X and Y coordinates of the measured object is greatly simplified compared with the traditional method, which greatly improves the X , The solution speed of the Y coordinate can also guarantee the solution accuracy; the calibration parameters involved in the solution of the Z coordinate of the measured object are less, the calibration process is simple, the source of the measurement error is less, and a higher measurement accuracy can be achieved; when the focal length of the projector is determined Finally, one calibration can ensure the use of all subsequent measurements, which is extremely efficient.

附图说明Description of drawings

图1为本发明方法采用的一种测量系统结构示意图。Fig. 1 is a schematic structural diagram of a measurement system used in the method of the present invention.

图2为本发明方法原理图。Fig. 2 is a schematic diagram of the method of the present invention.

图3为本发明中所使用的圆条纹图。Fig. 3 is a circular fringe diagram used in the present invention.

图4为模拟图3条纹图投影到待测球形表面采样得到的条纹图。Fig. 4 is the fringe pattern obtained by simulating the projection of the fringe pattern in Fig. 3 to the spherical surface to be tested.

图5为图4条纹图的解调相位图。FIG. 5 is a demodulation phase diagram of the fringe pattern in FIG. 4 .

图6为图4条纹图的解包裹相位图。FIG. 6 is an unwrapped phase diagram of the fringe pattern in FIG. 4 .

图7为采用本发明方法恢复得到的被测物体三维形貌。Fig. 7 shows the three-dimensional shape of the measured object restored by the method of the present invention.

图8为图7处理后的三维形貌图。Fig. 8 is a three-dimensional topography diagram after processing in Fig. 7 .

具体实施方式Detailed ways

下面结合附图和实施例对本发明作详细描述。The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.

一种光学三维形貌测量方法,包括以下步骤:An optical three-dimensional shape measurement method, comprising the following steps:

步骤1:按照实际测量要求,布置好由投影系统、配有远心镜头的相机组成的测量系统,参照图1,测量系统中投影系统光轴与相机光轴通过光路设计等效共线,在实际使用中,投影系统光轴与相机光轴不必共线,测量原理如图2所示,其中,ON为投影系统光轴,点B为投影系统光轴与投影像元阵列间的交点,从光源O发射的光经由A处的投影像元投影照射到被测物体上的点M,MN为垂直于投影光轴的线段,点N为一虚拟点,在实际中不必求得,图2中还标示了三维重建中所使用的Z坐标,设M点在采样图像上的坐标值为(xc,yc),线段MN的长度为d(xc,yc),在图示的定义下,点M的Z坐标为Step 1: According to the actual measurement requirements, arrange a measurement system consisting of a projection system and a camera equipped with a telecentric lens. Referring to Figure 1, in the measurement system, the optical axis of the projection system and the optical axis of the camera are equivalently collinear through the optical path design. In actual use, the optical axis of the projection system and the optical axis of the camera do not have to be collinear. The measurement principle is shown in Figure 2, where ON is the optical axis of the projection system, point B is the intersection point between the optical axis of the projection system and the projection pixel array, from The light emitted by the light source O is projected onto the point M on the measured object through the projection pixel at A, MN is a line segment perpendicular to the projection optical axis, and point N is a virtual point, which does not need to be obtained in practice, as shown in Figure 2 The Z coordinate used in the 3D reconstruction is also indicated. Let the coordinate value of point M on the sampling image be (x c , y c ), and the length of the line segment MN be d(x c , y c ), defined in the illustration Next, the Z coordinate of point M is

由于ΔOAB∽ΔOMN,Since ΔOAB∽ΔOMN,

因而,thus,

实际中的值由标定得到,在本实施例中设定:In reality The value of is obtained by calibration, and is set in this embodiment:

步骤2:根据测量需要设计投影圆条纹图并由投影系统投影到被测物体表面,所用到的投影圆条纹图参照图3,与传统的正弦条纹图不同的是,它的相位并非在整个图像平面内沿特定方向线性变化,而是以图像中心为中心向外线性辐射,因而看上去像是一组明暗相间的圆环,图示条纹的周期为10像素,利用投影系统将该条纹投影到被测物体表面;Step 2: Design the projected circular fringe pattern according to the measurement needs and project it onto the surface of the measured object by the projection system. The projected circular fringe pattern used is shown in Figure 3. Unlike the traditional sinusoidal fringe pattern, its phase is not in the entire image It changes linearly along a specific direction in the plane, but radiates linearly outward from the center of the image, so it looks like a set of light and dark rings. The period of the fringe in the illustration is 10 pixels, and the projection system is used to project the fringe onto The surface of the object to be measured;

步骤3:被物体反射的条纹图由配有远心镜头的相机采样,参照图4,图4为模拟采样得到的条纹图;Step 3: The fringe pattern reflected by the object is sampled by a camera equipped with a telecentric lens, refer to Figure 4, which is the fringe pattern obtained by analog sampling;

步骤4:由采样条纹相位图利用四步相移法解调得到图4所示条纹图的包裹相位,如图5所示,采用多频解包裹技术对图5所示的包裹相位解包裹,解包裹相位如图6所示,设其值为Φ(xc,yc);Step 4: demodulate the sampled fringe phase image using the four-step phase shift method to obtain the wrapping phase of the fringe image shown in Figure 4, as shown in Figure 5, use the multi-frequency unwrapping technology to unwrap the wrapped phase shown in Figure 5, The unwrapped phase is shown in Figure 6, and its value is set to Φ(x c , y c );

步骤5:由远心镜头的放大率、相机像元大小及采样条纹图的图像坐标求解得到被测物体X、Y轴坐标,设远心镜头放大倍率为β=0.1,相机像元尺寸s=0.005mm,那么采样点M对应的横向坐标可以很容易地求得:Step 5: Solve the X and Y axis coordinates of the measured object from the magnification of the telecentric lens, the size of the camera pixel and the image coordinates of the sampling fringe pattern, set the magnification of the telecentric lens to β=0.1, and the pixel size of the camera to s= 0.005mm, then the horizontal coordinates corresponding to the sampling point M can be easily obtained:

步骤6:标定得到投影系统的相关参数,设定投影仪像元尺寸为0.005mm,那么有Step 6: Calibrate to obtain the relevant parameters of the projection system, set the pixel size of the projector to 0.005mm, then there is

结合条纹相位,根据三角关系得到被测物体Z轴的坐标,Combined with the fringe phase, the coordinates of the Z-axis of the measured object are obtained according to the triangular relationship,

最终求解得到的模拟被测物体三维形貌如图7所示。为了更清楚地看到被测物体的三维形貌,用模拟被测物体的最大高度1990减去图7中的数据,此时绘制得到的被测物体三维形貌为图8所示,可见,本发明能够非常便捷地实现对被测对象三维轮廓的测量。The three-dimensional shape of the simulated measured object obtained by the final solution is shown in Figure 7. In order to see the three-dimensional shape of the measured object more clearly, subtract the data in Figure 7 from the maximum height 1990 of the simulated measured object, and the three-dimensional shape of the measured object drawn at this time is shown in Figure 8. It can be seen that The invention can realize the measurement of the three-dimensional profile of the measured object very conveniently.

以上所述仅为本发明的一个实施例,并不用以限制本发明,凡在本发明基础上所做的任何修改、等同替换及拓展等,均应包含在本发明的保护范围内。The above description is only an embodiment of the present invention, and is not intended to limit the present invention. Any modification, equivalent replacement and expansion made on the basis of the present invention shall be included in the protection scope of the present invention.

Claims (5)

1. a kind of optical 3-dimensional topography measurement method, which comprises the following steps:
Step 1: being required according to actual measurement, arrange the measuring system being made of optical projection system, camera;
Step 2: needing to design projection circle bar graph according to measurement and by projection systems project to testee surface;
Step 3: the bar graph being reflected by the object is sampled by camera;
Step 4: recalling wrapped phase from sampling striped diagram, the true phase value of bar graph is obtained after unpacking;
Step 5: being solved and be tested by the image coordinate of the enlargement ratio of telecentric lens, camera Pixel size and sampling bar graph Object X, Y axis coordinate;
Step 6: calibration obtains the relevant parameter of optical projection system, in conjunction with fringe phase, according to by projection ray and projection optical axis structure At triangle relation acquire the coordinate of testee Z axis;
The solution formula of testee Z coordinate is in the step 6
Wherein, R is the circle fringe period indicated with pixel distance, and p is optical projection system parameter, Φ (xc,yc) it is sample graph picture point (xc,yc) phase value, d (xc,yc) it is point (x on sampled imagesc,yc) and phase zero points between space length, pass through following public Formula calculates:
Wherein, s is camera pixel dimension, (xc0,yc0) it is the pixel coordinate for sampling bar graph phase zero points, β is put for telecentric lens Big multiplying power.
2. a kind of optical 3-dimensional topography measurement method according to claim 1, it is characterised in that: in the step 1 Optical projection system is the optical projection system that digital projector or point light source and grating, photomask board form, and projected image is in range It inside wants that measurand can be covered but cannot too much be more than measurand, and projection optical axis and camera optical axis need to keep flat Row.
3. a kind of optical 3-dimensional topography measurement method according to claim 1, it is characterised in that: in the step 1 Camera is furnished with telecentric lens, and the parameter of telecentric lens is selected according to actual measurement demand.
4. a kind of optical 3-dimensional topography measurement method according to claim 1, it is characterised in that: in the step 2 Circle bar graph is projected, grey value profile needs to meet:
f(xp,yp)=a+bcos (2 π r (xp,yp)/R) (1)
Wherein, (xp,yp) indicating that projection round bar print image element coordinate, a indicate striped background item, b indicates streak amplitude, and R is with picture The circle fringe period that element distance indicates, and
Wherein, (xp0,yp0) indicate projected array and optical projection system optical axis intersection point, it was initially believed that the point is the geometry of projected array Center.
5. a kind of optical 3-dimensional topography measurement method according to claim 1, it is characterised in that: quilt in the step 5 Survey object X, Y axis coordinate is acquired using following formula:
Wherein: (xc,yc) it is sampled images coordinate, s is camera pixel dimension, and β is telecentric lens enlargement ratio.
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