CN105949824B - A kind of surface modifying method of ultra-fine diamond micro mist - Google Patents
A kind of surface modifying method of ultra-fine diamond micro mist Download PDFInfo
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- CN105949824B CN105949824B CN201610343069.3A CN201610343069A CN105949824B CN 105949824 B CN105949824 B CN 105949824B CN 201610343069 A CN201610343069 A CN 201610343069A CN 105949824 B CN105949824 B CN 105949824B
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- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 84
- 239000010432 diamond Substances 0.000 title claims abstract description 84
- 239000003595 mist Substances 0.000 title claims abstract description 76
- 238000000034 method Methods 0.000 title claims abstract description 29
- 239000002270 dispersing agent Substances 0.000 claims abstract description 31
- 238000001035 drying Methods 0.000 claims abstract description 14
- 239000007788 liquid Substances 0.000 claims abstract description 12
- 239000012535 impurity Substances 0.000 claims abstract description 11
- 238000001914 filtration Methods 0.000 claims abstract description 7
- 239000007787 solid Substances 0.000 claims abstract description 7
- 238000000926 separation method Methods 0.000 claims abstract description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 20
- 239000008367 deionised water Substances 0.000 claims description 5
- 229910021641 deionized water Inorganic materials 0.000 claims description 5
- 239000002904 solvent Substances 0.000 claims description 5
- RCEAADKTGXTDOA-UHFFFAOYSA-N OS(O)(=O)=O.CCCCCCCCCCCC[Na] Chemical compound OS(O)(=O)=O.CCCCCCCCCCCC[Na] RCEAADKTGXTDOA-UHFFFAOYSA-N 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 2
- 238000003756 stirring Methods 0.000 claims description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims 1
- 238000005498 polishing Methods 0.000 abstract description 12
- 239000006185 dispersion Substances 0.000 abstract description 5
- 230000003287 optical effect Effects 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 239000000843 powder Substances 0.000 description 16
- 239000008187 granular material Substances 0.000 description 11
- 239000000463 material Substances 0.000 description 11
- 230000004048 modification Effects 0.000 description 8
- 238000012986 modification Methods 0.000 description 8
- 238000012360 testing method Methods 0.000 description 8
- 238000002156 mixing Methods 0.000 description 7
- 239000002202 Polyethylene glycol Substances 0.000 description 6
- 238000013461 design Methods 0.000 description 6
- 229920001223 polyethylene glycol Polymers 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- DBMJMQXJHONAFJ-UHFFFAOYSA-M Sodium laurylsulphate Chemical group [Na+].CCCCCCCCCCCCOS([O-])(=O)=O DBMJMQXJHONAFJ-UHFFFAOYSA-M 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 239000005864 Sulphur Substances 0.000 description 1
- ORILYTVJVMAKLC-UHFFFAOYSA-N adamantane Chemical compound C1C(C2)CC3CC1CC2C3 ORILYTVJVMAKLC-UHFFFAOYSA-N 0.000 description 1
- 229910001573 adamantine Inorganic materials 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 239000012736 aqueous medium Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000006059 cover glass Substances 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 230000007096 poisonous effect Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 238000004513 sizing Methods 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 238000013517 stratification Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09C—TREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
- C09C1/00—Treatment of specific inorganic materials other than fibrous fillers; Preparation of carbon black
- C09C1/44—Carbon
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09C—TREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
- C09C3/00—Treatment in general of inorganic materials, other than fibrous fillers, to enhance their pigmenting or filling properties
- C09C3/08—Treatment with low-molecular-weight non-polymer organic compounds
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09C—TREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS, TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES ; PREPARATION OF CARBON BLACK ; PREPARATION OF INORGANIC MATERIALS WHICH ARE NO SINGLE CHEMICAL COMPOUNDS AND WHICH ARE MAINLY USED AS PIGMENTS OR FILLERS
- C09C3/00—Treatment in general of inorganic materials, other than fibrous fillers, to enhance their pigmenting or filling properties
- C09C3/10—Treatment with macromolecular organic compounds
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1409—Abrasive particles per se
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
The invention discloses a kind of surface modifying method of ultra-fine diamond micro mist, comprise the following steps：1）Ultra-fine diamond micro mist and dispersant solution are mixed, then separation of solid and liquid carries out filtering and impurity removing；2）By step 1）Obtained ultra-fine diamond micro mist wet stock is dried by flowing drying mode, obtains the ultra-fine diamond micro mist that surface is modified.Surface modifying method of the ultra-fine diamond micro mist through the present invention is modified, can not only be in stable dispersion under aqueous systems, and it is adapted to the polishing of the high-end sophisticated products such as semiconductor, optical lens, with high polishing efficiency, and quality of finish is good, there is no cut after polishing, the damage to polishing workpiece can be avoided, the requirement of high-end sophisticated product technical field now can be met.
Description
Technical field
The present invention relates to a kind of surface modifying method of ultra-fine diamond micro mist, belongs to Modified Diamond technology neck
Domain.
Background technology
One of most important index of ultra-fine diamond micro mist is granularity, because granularity determines being permitted for diadust
More technical performances and practical ranges, because the granularity of diadust is small to a certain extent, i.e., after so-called " ultra-fine ", powder
The specific surface area and surface particle number of body increased dramatically, and its activity is higher than internal particle, therefore superfine powder has adsorbance
Greatly, and the performance such as unique electrical, magnetic.
Ultra-fine diamond micro mist easily because surface electronic is unsaturated, and impurity, make moist, the factor such as magnetic, electrostatic is polymerized to roll into a ball,
During polishing semiconductor, the first-class precision workpiece of optical frames, the phenomenon for scratching workpiece be present, it is micro- that this will influence ultra-fine diamond
Application of the powder in precise polished field.
The content of the invention
In view of the above the shortcomings that prior art, it is an object of the invention to provide a kind of table of ultra-fine diamond micro mist
Surface modification process, comprise the following steps：1) ultra-fine diamond micro mist and dispersant solution are mixed, then separation of solid and liquid is entered
Row filtering and impurity removing；2) the ultra-fine diamond micro mist wet stock that step 1) obtains is dried by flowing drying mode, obtained
The ultra-fine diamond micro mist that surface is modified.Surface modifying method of the ultra-fine diamond micro mist through the present invention is modified, can not only be
Stable dispersion under aqueous systems, and it is adapted to the polishing of the high-end sophisticated products such as semiconductor, optical lens, there is high polishing to imitate
Rate, and quality of finish is good, does not have cut after polishing, can avoid the damage to polishing workpiece, can meet accurate production high-end now
The requirement of product technical field.
The present invention is achieved by the following technical solutions：
The present invention provides a kind of surface modifying method of ultra-fine diamond micro mist, comprises the following steps：
1) ultra-fine diamond micro mist and dispersant solution are mixed, then separation of solid and liquid carries out filtering and impurity removing；
2) the ultra-fine diamond micro mist wet stock that step 1) obtains is dried by flowing drying mode, obtains surface
Modified ultra-fine diamond micro mist.
The granularity of the ultra-fine diamond micro mist is 0.5-2 μm.
Preferably, in step 1), the dispersant of the dispersant solution is selected from lauryl sodium sulfate, detergent alkylate sulphur
One or more in sour sodium and polyethylene glycol 2000, solvent are deionized water.
It is furthermore preferred that the dispersant is lauryl sodium sulfate, neopelex and polyethylene glycol 2000, three
Mol ratio between person is 1：0.15-0.25：0.45-0.55.
Preferably, in step 1), the molar concentration of the dispersant solution is 0.002-0.008mol/L.Described mole dense
Degree refers to the total mol concentration of lauryl sodium sulfate, neopelex and polyethylene glycol 2000.
Preferably, in step 1), the mass ratio of dispersant and ultra-fine diamond micro mist is 1/ in the dispersant solution
1000-5/1000。
Preferably, in step 1), the time of mixing is 30-60 minutes.
Preferably, in step 2), the flowing drying mode is to be dried using tray drier.
Preferably, in step 2), drying temperature is 100-150 DEG C.
The present invention one of at least has the advantages that：
1st, selective flow drying mode is dried to material, because material is the completion heat and mass mistake in flow process
Journey, dry materials are thorough, and dry materials efficiency 30 ﹪ higher than box-type drying, hence it is evident that reduce production cost；Further, flow
Drying mode is as used tray drier, and in thermo-conducting manner, heating is placed in wet stock in the hollow disk of each layer, passes through rotation
Harrow under the mechanism of leaf, the wet part in material for making constantly to roll is evaporated, and powder material can be touched mutually under mechanical action
Hit, effectively eliminate existing hard aggregation between powder granule；
2nd, the unsaturated electronics in the ion of dispersant and ultra-fine diamond micro powder granule surface, effectively prevents ultra-fine adamantine
Attracted each other between stone micro powder granule, and dispersant is hydrophilic, improves diffusion speed of the ultra-fine diamond micro mist in water
Degree, the modified ultra-fine diamond micro mist in surface can be dispersed in water, realizes the de-agglomerated to ultra-fine diamond micro mist；
3rd, by using brand-new drying and process for modifying surface, it is ensured that ultra-fine diamond micro mist is complete after surface modification treatment
It is complete to keep away from moisture and the influence of the factor such as electrostatic, by the ultra-fine diamond micro mist obtained using surface modifying method of the present invention with not
The ultra-fine diamond micro mist of modification is polished Experimental comparison, and the ultra-fine diamond obtained using method of modifying of the present invention is micro-
When polishing high-end precise materials, workpiece no marking in polishing process produces powder；
4th, the solvent that surface modifying method of the present invention uses is deionized water, adds micro dispersant, the matter of dispersant
Measure as the 1/1000-5/1000 of ultra-fine diamond micro mist, so this method has, cost is low, the characteristic such as environment-protecting and non-poisonous.
Brief description of the drawings
State design sketch when Fig. 1 starts scattered for ultra-fine diamond micro mist before modified in water.
Fig. 2 is state design sketch when modified ultra-fine diamond micro mist starts scattered in water.
Fig. 3 state design sketch in dispersion process in water for ultra-fine diamond micro mist before modified.
Fig. 4 is modified ultra-fine diamond micro mist state design sketch in dispersion process in water.
State design sketch when Fig. 5 terminates scattered for ultra-fine diamond micro mist before modified in water.
Fig. 6 is state design sketch when modified ultra-fine diamond micro mist terminates scattered in water.
Fig. 7 is ultra-fine diamond micro mist cut test result figure before modified.
The ultra-fine diamond micro mist cut test result figure of Fig. 8 embodiments 1.
The ultra-fine diamond micro mist cut test result figure of Fig. 9 embodiments 2.
The ultra-fine diamond micro mist cut test result figure of Figure 10 embodiments 3.
Figure 11 is that tray drier dries ultra-fine diamond micro mist SEM figures.
Figure 12 is that chamber dryer dries ultra-fine diamond micro mist SEM figures.
Embodiment
Illustrate technical scheme below by way of specific instantiation.It should be understood that the present invention mention one or
Multiple method and steps, which do not repel before and after the combination step, also has other method step or the step specifically mentioned at these
Other method step can also be inserted between rapid；It should also be understood that these embodiments are merely to illustrate the present invention rather than limitation
The scope of the present invention.Moreover, unless otherwise indicated, the numbering of various method steps is only to differentiate the convenient tool of various method steps,
Rather than ordering or the enforceable scope of the restriction present invention, the change of its relativeness or tune for limitation various method steps
It is whole, in the case where changing technology contents without essence, when being also considered as the enforceable category of the present invention.
The technology of the present invention details is subject to detailed description by following embodiments.It should be noted that for embodiment, its make
With the technical characteristic for simply further illustrating the present invention, rather than the restriction present invention.
Embodiment 1
1) ultra-fine diamond micro mist and molar concentration are inserted in mixing and blending machine for 0.005mol/L dispersant solution,
The mass ratio of dispersant and ultra-fine diamond micro mist is 2 in the dispersant solution:1000, dispersant is dodecyl sulphate
Sodium, neopelex and polyethylene glycol 2000, mol ratio 1:0.15:0.45, solvent is deionized water, is mixed
60 minutes, then by equipment for separating liquid from solid, filtering and impurity removing is carried out to material；
2) the ultra-fine diamond micro mist wet stock after removal of impurities is dried by tray drier, drying temperature 150
DEG C, obtain the ultra-fine diamond micro mist of surface modification.
Embodiment 2
1) ultra-fine diamond micro mist and molar concentration are inserted in mixing and blending machine for 0.002mol/L dispersant solution,
The mass ratio of dispersant and ultra-fine diamond micro mist is 1 in the dispersant solution:1000, dispersant is dodecyl sulphate
Sodium, neopelex and polyethylene glycol 2000, mol ratio 1:0.2:0.5, mix 45 minutes, then by solid
Liquid separating apparatus, filtering and impurity removing is carried out to material；
2) the ultra-fine diamond micro mist wet stock after removal of impurities is dried by tray drier, drying temperature 120
DEG C, obtain the ultra-fine diamond micro mist of surface modification.
Embodiment 3
1) ultra-fine diamond micro mist and molar concentration are inserted in mixing and blending machine for 0.008mol/L dispersant solution,
The mass ratio of dispersant and ultra-fine diamond micro mist is 5 in the dispersant solution:1000, dispersant is dodecyl sulphate
Sodium, neopelex and polyethylene glycol 2000, mol ratio 1:0.25:0.55, solvent is deionized water, is mixed
30 minutes, then by equipment for separating liquid from solid, filtering and impurity removing is carried out to material；
2) the ultra-fine diamond micro mist wet stock after removal of impurities is dried by tray drier, drying temperature 100
DEG C, obtain the ultra-fine diamond micro mist of surface modification.
Tray drier dispersion effect
The ultra-fine diamond micro mist (being dried through tray drier) that the surface that embodiment 1 obtains is modified is done into SEM surveys
Examination, is as a result shown in Figure 11, it is seen then that it is evenly distributed between powder granule, soilless sticking；Chamber dryer is replaced into tray drier, its
Its condition is constant, and obtained ultra-fine diamond micro mist does SEM tests, as a result sees Figure 12, obvious group between powder granule be present
Poly- phenomenon.Test result illustrates, harrow in tray drier leaf mechanism effectively eliminate it is existing hard between powder granule
Reunite.
Ultra-fine diamond micro mist dispersity in water
Because the ion of surface modifier has neutralized the unsaturated electronics on ultra-fine diamond micro powder granule surface, effectively prevent
Attracted each other between ultra-fine diamond micro powder granule, and surfactant is hydrophilic, improves ultra-fine diamond micro mist and exists
Diffusion velocity in water, the modified ultra-fine diamond micro mist in surface can be dispersed in water；And non-surface modification treatment
Ultra-fine diamond micro powder granule surface stability is poor, is attracted each other between particle, easily the group of being polymerized to.
The modified ultra-fine diamond micro mist of ultra-fine diamond micro mist before modified and embodiment 1 is placed in water：Ultra-fine gold
The mass ratio of hard rock micro mist and water is 1:40, using electron microscope observation, rear ultra-fine diamond micro mist disperses in water before modified
Process, Fig. 1 to Fig. 6 is seen respectively, characterize the state of different scatter stages, due to the modified ultra-fine diamond micro powder granule in surface
Surface stability is good, and migration velocity is fast in aqueous medium, and preferably, as shown in Figure 4 and Figure 6, uniform sizing material state is presented in dispersiveness；
And the ultra-fine diamond micro powder granule of non-surface modification treatment, as shown in Figure 3 and Figure 5, stratification state is presented.
Ultra-fine diamond micro mist cut is tested
From ultra-fine diamond micro mist before modified and embodiment 1 to the modified ultra-fine diamond micro mist in the surface of embodiment 3
Lapping liquid is configured in accordance with the following methods：
To the modified ultra-fine diamond micro mist of ultra-fine diamond micro mist and surface be according to mass ratio with water respectively before modified
3:100 are placed in container, are well mixed by stirring action, are prepared into lapping liquid；
It is respectively placed between sheet glass, carries out testing mill as follows：The appropriate lapping liquid configured is taken, is placed in
On slide, another cover glass is placed above in lapping liquid, lapping liquid is between two slides, then passes through rubbing between slide
Wiping acts on, and whether observation slide occurs cut.
As a result such as Fig. 7 to Figure 10, from testing result as can be seen that compared with ultra-fine diamond micro mist before modified, using this
The ultra-fine diamond micro mist that the surface modifying method of invention obtains, effectively prevent the scuffing workpiece occurred during polishing operation
Phenomenon, and the polishing effect of embodiment 1 is better than embodiment 2 and 3.
Claims (4)
1. a kind of surface modifying method of ultra-fine diamond micro mist, it is characterised in that comprise the following steps：
1）Ultra-fine diamond micro mist and dispersant solution are mixed, then separation of solid and liquid carries out filtering and impurity removing；
2）By step 1）Obtained ultra-fine diamond micro mist wet stock is dried by flowing drying mode, is obtained surface and is modified
Ultra-fine diamond micro mist；
Step 1）In, the dispersant of the dispersant solution is lauryl sodium sulfate, neopelex and poly- second two
Alcohol 2000, the mol ratio between three are 1：0.15-0.25：0.45-0.55, solvent are deionized water, the dispersant solution
Molar concentration be 0.002-0.008mol/L, the mass ratio of dispersant and ultra-fine diamond micro mist is in the dispersant solution
1/1000-5/1000。
2. the surface modifying method of ultra-fine diamond micro mist according to claim 1, it is characterised in that step 1）In, mix
The time for closing stirring is 30-60 minutes.
3. the surface modifying method of ultra-fine diamond micro mist according to claim 1, it is characterised in that step 2）In, institute
Flowing drying mode is stated to be dried using tray drier.
4. the surface modifying method of ultra-fine diamond micro mist according to claim 1, it is characterised in that step 2）In, do
Dry temperature is 100-150 DEG C.
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| CN201610343069.3A CN105949824B (en) | 2016-05-20 | 2016-05-20 | A kind of surface modifying method of ultra-fine diamond micro mist |
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| CN201610343069.3A CN105949824B (en) | 2016-05-20 | 2016-05-20 | A kind of surface modifying method of ultra-fine diamond micro mist |
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| CN113999617A (en) * | 2021-11-20 | 2022-02-01 | 河南工业大学 | Method for preparing inorganic thermally conductive adhesive by etching diamond micropowder as filler |
| CN115651607A (en) * | 2022-09-27 | 2023-01-31 | 郑州磨料磨具磨削研究所有限公司 | Titanium oxide coated superfine diamond abrasive and preparation method thereof |
| CN116333602A (en) * | 2023-02-20 | 2023-06-27 | 绍兴自远磨具有限公司 | Diamond liquid for thinning silicon carbide substrate and application thereof |
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| JP4245310B2 (en) * | 2001-08-30 | 2009-03-25 | 忠正 藤村 | Diamond suspension aqueous solution excellent in dispersion stability, metal film containing this diamond, and product thereof |
| CN1560161A (en) * | 2004-03-01 | 2005-01-05 | 长沙矿冶研究院 | Water-based nano diamond polishing solution and preparation method thereof |
| CN1331581C (en) * | 2004-05-14 | 2007-08-15 | 深圳市金刚源新材料发展有限公司 | Surface treatment method for Nano diamond fine particles added to lubricant |
| CN101007252B (en) * | 2006-01-24 | 2010-11-10 | 河南省联合磨料磨具有限公司 | Apparent particle size controllable ultra-fine and ultra-dispersed micropowder of nanocrystalline diamond and its producing method |
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Denomination of invention: A Surface Modification Method for Ultrafine Diamond Powder Effective date of registration: 20230807 Granted publication date: 20180313 Pledgee: Agricultural Bank of China Limited Shanghai Songjiang Sub-branch Pledgor: CR GEMS SUPERABRASIVES CO.,LTD. Registration number: Y2023980051176 |
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