Detailed description of the invention
The present invention is described in further detail with embodiment below in conjunction with the accompanying drawings.It is understood that this
Specific embodiment described by place is used only for explaining the present invention, rather than limitation of the invention.The most also need
It is noted that for the ease of describing, accompanying drawing illustrate only part related to the present invention and not all knot
Structure.
Fig. 1 a is the schematic flow sheet of the manufacture method of a kind of display floater that the embodiment of the present invention provides, figure
1b-1e is the profile of preparation method each step counter structure of the display floater in Fig. 1 a.Below in conjunction with aobvious
Show that the profile of preparation method each step counter structure of panel is discussed in detail the display that the embodiment of the present invention provides
The preparation method of panel.Seeing Fig. 1 a, the method specifically includes following steps:
S110, offer substrate.
Described substrate is preferably glass substrate.
S120, on the substrate formation have the pixel confining layers of multiple opening and are positioned at described pixel limit
Insulated column in given layer.
See Fig. 1 b, can have multiple opening 122 by photoetching and etching technics in substrate 11 formation
Pixel confining layers 121, and be positioned at the insulated column 13 above pixel confining layers 121.Pixel confining layers 121
For limiting multiple pixel cell, the corresponding pixel cell of the most each opening 122.For strengthening stability,
Can also heat after the pixel confining layers 121 completing there is multiple opening 122 and insulated column 13
Curing process.The material of pixel confining layers 121 and insulated column 13 is insulating materials, known in the art
What suitable insulating materials is used equally to this pixel confining layers 121 and insulated column 13.Such as pixel confining layers
121 and insulated column 13 can also is that organic insulation.
It should be noted that have the pixel confining layers 121 of multiple opening 122 and insulated column 13 can with
One manufacture craft is made up of same material, such as can by exposure, develop and the photoetching process such as etching with
Time formed there is the pixel confining layers 121 of multiple opening 122 and be positioned at the isolation in pixel confining layers 121
Post 13.Can also independently form in twice technique, i.e. by exposure, develop and the photoetching process shape such as etching
After becoming to have the pixel confining layers 121 of multiple opening 122, again by exposure, develop and the photoetching such as etching
Technique forms insulated column 13 in pixel confining layers 121.Employing exemplary for Fig. 1 b is single in twice technique
Solely formed and there is the pixel confining layers 121 of multiple opening 122 and be positioned at the isolation in pixel confining layers 121
Post 13.
S130, in described opening deposit formed the first electrode layer.
See Fig. 1 c, mask plate can be used, in the opening 122 of pixel confining layers 121, deposit formation the
One electrode layer 14.Specifically, vapor deposition or sputtering deposit technique can be passed through, be formed in opening 122
First electrode layer 14.
S140, on described first electrode layer formed luminescent layer.
See Fig. 1 d, vapor deposition, sputtering deposit or spin-on deposition technique can be passed through, at the first electrode layer
Luminescent layer 15 is formed on 14.Concrete, luminescent layer 15 can be luminous organic material.
S150, form the second electrode lay on the light-emitting layer.
See Fig. 1 e, evaporation process can be used to form the second electrode lay 16 on luminescent layer 15.
In the present embodiment, due to formed pixel confining layers and be positioned at the insulated column in pixel confining layers it
Rear formation the first electrode layer, compared to being initially formed the first electrode layer in prior art, then forms pixel confining layers
And it is positioned at the insulated column in pixel confining layers, pixel confining layers forming process can be solved and use photoetching process
Cause the problem that the electrode quality of the first electrode layer declines.Such as in preparation pixel confining layers and insulated column mistake
Etching acid solution that photoetching process in journey uses and being heating and curing cause the quality of the first electrode layer decline (aoxidize,
Sulfuration and rough surface increase etc.) problem.The present embodiment deposits formation in pixel confining layers opening
One electrode layer, with prior art use film forming, exposes, develop and the technique such as etching forms electrode layer, no
Only with Simplified flowsheet, and can avoid the bad shadow that the first electrode layer is produced by acid solution in etching process
Ring, such as, the first electrode layer burn into is produced cavity etc..Additionally, the embodiment of the present invention is formed the first electricity
The technological process of pole layer is adjacent with the technological process forming luminescent layer, therefore after deposit forms the first electrode layer,
The preparation of follow-up luminescent layer can also be formed by consecutive deposition, decreases sudden and violent in external environment condition of the first electrode layer
The dew time, solve oxidation and sulfuration that the first electrode layer causes because of single dwell course in external environment condition
Etc. problem.Therefore the manufacture method of the display floater that the embodiment of the present invention provides improves properties of product and yield,
Decrease technological process, reduce production cost.
On the basis of above-described embodiment, due to formed on the substrate 11 pixel confining layers 121, separation layer 13,
Before first electrode layer 14, luminescent layer 15 and the second electrode lay 16, it is also possible to form other functional membranes
Layer, such as some metal lead wires.After the formation of these functional film layer can cause surface irregularity, and then impact
The display effect of continuous display floater.Therefore, the embodiment of the present invention preferably in step S120, at described substrate
Before upper formation has the pixel confining layers of multiple opening and is positioned at the insulated column in described pixel confining layers,
Also include: form planarization layer on the substrate.The material of planarization layer is also insulating materials.In preparation
In technological process, planarization layer can use single manufacturing process.For reducing manufacturing process, improve and produce
Efficiency can also be made planarization layer by same material in same manufacture craft and have multiple opening 122
Pixel confining layers 121.Further, it is also possible in same manufacture craft by same material make planarization layer,
There is the pixel confining layers 121 of multiple opening 122, and the insulated column 13 being positioned in pixel confining layers 121.
In an embodiment of the present embodiment, seeing Fig. 2, the first electrode layer 15 is metallic reflector,
The material that magnesium silver isoreflectance is high can be used.The second electrode lay 16 is transparency conducting layer, concretely aoxidizes
Indium tin nesa coating.Owing to metallic reflector has the effect of reflection light, the light that luminescent layer 15 produces, warp
After the reflection of the first electrode layer 14, penetrate from the second electrode lay 16.Arrow in figure represents display floater
Light emission direction.As shown in Figure 2, the display floater that the present embodiment provides is emission structure at top.
In the another embodiment of the present embodiment, seeing Fig. 3, the first electrode layer 14 is transparency conducting layer,
Described the second electrode lay 16 is metallic reflector.Relative to above-mentioned emission structure at top, luminescent layer 15 produces
Light, after the second electrode lay 16 reflects, penetrates from the first electrode layer 14.Arrow in figure represents display surface
The light emission direction of plate.From the figure 3, it may be seen that the display floater that the present embodiment provides is bottom emitting structure.
Exemplary in Fig. 2 and Fig. 3 show planarization layer 17.
It should be noted that the manufacture method of the display floater of embodiment of the present invention offer can be prepared active
OLED display panel, it is also possible to prepare passive type OLED display panel.
Fig. 4 a is the knot of the passive type display floater that the display floater manufacture method that the embodiment of the present invention provides is formed
Structure schematic diagram.Fig. 4 b is the schematic flow sheet of the manufacture method of passive type display floater shown in Fig. 4 a.Fig. 4 c-
Fig. 4 e is the schematic diagram of preparation method each step counter structure of the display floater in Fig. 4 b.See Fig. 4 a,
Unlike the display panel structure in above-described embodiment, the first electrode layer 14 includes multiple arranged in parallel
First sub-electrode 141.The second electrode lay 16 includes multiple second sub-electrode 161 arranged in parallel, the first son
Electrode 141 and described second sub-electrode 161 insulation intersect.Seeing Fig. 4 b, the method specifically includes following step
Rapid:
S210, offer substrate.
S220, form planarization layer on the substrate.
S230, on described planarization layer formed there is the pixel confining layers of multiple opening and be positioned at described picture
Insulated column in element confining layers.
See Fig. 4 c, after forming planarization layer 17 on the substrate 11, planarization layer 17 is formed and has
The pixel confining layers 121 of multiple openings 122, and the insulated column 13 being positioned in pixel confining layers 121.
S240, in described opening deposit formed the first electrode layer, wherein, described first electrode layer includes many
Individual first sub-electrode arranged in parallel.
Seeing Fig. 4 d, in the opening of pixel confining layers, deposit forms the first electrode layer 14, the first electricity of formation
Pole layer 14 includes multiple first sub-electrode 141 arranged in parallel.
S250, on described first electrode layer formed luminescent layer.
See Fig. 4 e, the first electrode layer 14 is formed luminescent layer 15.
S260, forming the second electrode lay on the light-emitting layer, wherein, the second electrode lay includes multiple parallel
Second sub-electrode of arrangement.
Seeing Fig. 4 a, form the second electrode lay 16 on luminescent layer 15, the second electrode lay 16 of formation includes
Multiple second sub-electrodes 161 arranged in parallel.First sub-electrode 141 and the second sub-electrode 161 cross arrangement.
In the passive type display floater that said method is formed, display floater includes N row the second sub-electrode and M row
First sub-electrode (Fig. 4 a exemplary 5 row the second sub-electrodes and 5 row the first sub-electrodes are set).Use by
The mode of row scanning, applies pulse cyclically to often row the second electrode, executes to all row the first sub-electrodes simultaneously
Add drive current, thus realize the display of pixel line by line.
Fig. 5 a is the knot of the active display panel that the display floater manufacture method that the embodiment of the present invention provides is formed
Structure schematic diagram.Fig. 5 b is the schematic flow sheet of the manufacture method of active display panel shown in Fig. 5 a.Fig. 5 c-
Fig. 5 h is the profile of preparation method each step counter structure of the display floater in Fig. 5 b.
Seeing Fig. 5 a, unlike the display panel structure in above-described embodiment, active display panel is also
Including forming transistor array 18 on the substrate.First electrode layer 14 includes the first of matrix arrangement
Sub-electrode 141, and each first sub-electrode 141 electrically connects with a transistor.The second electrode lay 16 is planar
Electrode (hardware and software platform layer, pixel confining layers and insulated column are not shown).See Fig. 5 b, the method specifically include as
Lower step:
S310, offer substrate.
S320, form transistor array on the substrate.
See Fig. 5 c, photoetching process can be used to form transistor array 18 on the substrate 11.
S330, in described transistor array formed planarization layer.
See Fig. 5 d, transistor array 18 is formed planarization layer 17.
S340, on described planarization layer formed there is the pixel confining layers of multiple opening and be positioned at described picture
Insulated column in element confining layers.
See Fig. 5 e, can by exposure, develop and the photoetching process such as etching is formed at planarization layer 17 and to have
The pixel confining layers 121 of multiple openings 122 and the insulated column 13 being positioned in pixel confining layers 121.
S350, in described opening deposit formed the first electrode layer, wherein said first electrode layer includes matrix
First sub-electrode of formula arrangement, and each described first sub-electrode and a transistor electrically connect.
Seeing Fig. 5 f, in pixel confining layers opening 122, deposit forms the first electrode layer 14.First electrode layer
14 the first sub-electrodes 141 including matrix arrangement.Each first sub-electrode 141 is by planarization layer 17
Via and a transistor connect.
S360, on described first electrode layer formed luminescent layer.
See Fig. 5 g, form luminescent layer 15 at the first electrode layer 14.
S370, forming the second electrode lay on the light-emitting layer, described the second electrode lay is plane-shape electrode.
Seeing Fig. 5 h, form the second electrode lay 16 on luminescent layer 15, the second electrode lay 16 is plane-shape electrode.
In the active display panel that said method is formed, in the opening 122 of each pixel confining layers 121 the
The corresponding pixel cell of one sub-electrode 141, by controlling opening and disconnecting of each transistor, Xiang Yujing
The first sub-electrode 141 that body pipe connects applies to drive electric current, and the opening 122 controlling pixel confining layers 121 is right
The pixel cell answered sends the light of respective color, each first sub-electrode 141 independently can be adjusted and
Control.
Note, above are only presently preferred embodiments of the present invention and institute's application technology principle.Those skilled in the art
It will be appreciated that the invention is not restricted to specific embodiment described here, can enter for a person skilled in the art
Row various obvious changes, readjust and substitute without departing from protection scope of the present invention.Therefore, though
So by above example, the present invention is described in further detail, but the present invention be not limited only to
Upper embodiment, without departing from the inventive concept, it is also possible to include other Equivalent embodiments more,
And the scope of the present invention is determined by scope of the appended claims.