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CN105911642B - A kind of design method of multi-mode multiplexing device - Google Patents

A kind of design method of multi-mode multiplexing device Download PDF

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CN105911642B
CN105911642B CN201610494640.1A CN201610494640A CN105911642B CN 105911642 B CN105911642 B CN 105911642B CN 201610494640 A CN201610494640 A CN 201610494640A CN 105911642 B CN105911642 B CN 105911642B
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waveguide
mode
modes
grating
design
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CN105911642A (en
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朱凝
杨杨
陈俊
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South China Normal University
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South China Normal University
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
    • G02B6/29316—Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

The present invention provides a kind of design method of multi-mode multiplexing device, this method is multiplexed and is demultiplexed to the multiple modes in longitudinal direction in waveguide using etched diffraction grating, and using Rowland circle structure come grating, input waveguide and the output waveguide position in design etched diffraction grating, it may be implemented that disposably multiple modes are multiplexed or are demultiplexed with single etched diffraction grating device, do not need to stack device.

Description

A kind of design method of multi-mode multiplexing device
Technical field
The present invention relates to optical communication fields, more particularly, to a kind of design method of multi-mode multiplexing device.
Background technique
Fiber optic communication rapid development, optical communication network become the basic platform of modern communication networks.Optical fiber telecommunications system experience Several developing stage, the PDH system from 80 years wavelength-division multiplex generation ends, the SDH system of the mid-90, wdm system, optical fiber are logical Letter system rapidly updates.The hot spot of current research first is that DWDM, DWDM laboratory level can reach 100 × 10Gbit/s, repeater span 400km；30 × 40Gbit/s, repeater span 85km；64 × 5Gbit/s, repeater span 720km.It is close Integrate the commercial level of wavelength-division multiplex DWDM as 320Gbit/s, i.e., a pair of of optical fiber can transmit 4,000,000 speech channels.The biography of commercial system at present Movement Capabilities are only that the possible transmission capacity of simple optical fiber is the 1/100 of tens of Tbit/s.
Optical communication technique rapidly develops in decades, supports our increasingly information-based societies and economy.When The development of modern information has rapid expansion to the information capacity extension of simple optical fiber.Wavelength-division multiplex (WDM) or dense wave division multipurpose (DWDM) technology is no longer satisfied demand of the people to fiber capacity.New technology is needed to solve this problem, this side The progress in face always searches for the mode of innovation to increase the data carrying capabilities of a single optical fiber.In order to realize this Point, researcher have explored, and attempt to optimize the time of multiplexing, wavelength, polarization and phase.Business system is now with all Four dimensions pass through a single fiber to send more information.While it may be possible to manufacture optical fiber supports hundreds of spatial modes Formula or comprising multiple kernels, this can be utilized as the parallel channels of independent signal, but the Spatial Dimension of single optical fiber Still it is not developed.So following researcher has carried out various researchs, mode multiplexing is exactly one of.
Different wave length signal is multiplexed and has been separated in WDM, simple optical fiber is allowed to transmit more information, and mould Formula multiplexing (MDM) have different modes in Same Wavelength, to different mode into point multiplexing and separation, can on this basis into As soon as step increases information content, there is this technology of MDM then to solve above-mentioned simple optical fiber capacity problem.Mode division multiplexing transmission system System is that there are D parallel channels in 1 less fundamental mode optical fibre, thus by D times of the capacity extension of transmission.Due to different channels Belong to different mode, in this way under conditions of equal transport capacity, the influence of nonlinear effect is much smaller, this reduces The signal-to-noise ratio degradation as caused by nonlinear effect.
And traditional mode multiplexing is usually transverse mode multiplexing, i.e., lateral multiple modes is multiplexed and is demultiplexed With the mode that it is supported is more, and the bending radius of waveguide is bigger, and being also sized to for device is bigger.Otherwise, the crosstalk of interchannel It just will increase, the technique of device requires also just very harsh.In addition, for lateral multiple modes, general mode multiplexing is usual Can only first separation go out a mode, needed by way of stacking device when demultiplexing three or more modes.And we The device of design is multiplexed and is demultiplexed for the multiple modes in longitudinal direction in waveguide using etched diffraction grating (EDG), by Only it is multimode on the direction perpendicular to chip surface in the longitudinal direction multi-mode wave guiding structure, is single being laterally in horizontal direction Mould, thus its lateral dimension can longitudinally be made very thick with very little, bending radius can be with compared to lateral multimode waveguide It is made very small, the size of multiplex system entire in this way can reduce, and crosstalk will not be very big.EDG can not be to laterally multiple Mode is multiplexed or is demultiplexed, therefore traditional EDG is generally only used as wavelength division multiplex device, can only be used in single mode waveguide, It is not used in the mode multiplexing to transverse multimode waveguiding structure.But EDG can be directed to longitudinal multi-mode working, and Multiple modes (such as tens) can be disposably separated as needed, this is the place different from traditional mode multiplexing device.
As shown in Figure 1, the schematic diagram of etched diffraction grating (EDG) integrated planar waveguide mode multiplexing device, incident light by Optical fiber imports input waveguide, then the light of different communication modes is focused on different positions by etched diffraction grating, by output wave Export, is realized the demultiplexing of multiple modes, the multiplexing of multiple modes similarly reversely can be realized using the device.Device is integrated On monolithic semiconductor substrate, the core of design is etched diffraction grating.
Summary of the invention
It is difficult to realize to solve traditional mode multiplexing device only with single multiplexing device to three or more multiple modes It is disposable to realize that multiplexing or demultiplexing, and traditional transverse multimode waveguide bend-radius cause greatly very much system dimension is excessive to lack Point, the present invention provide a kind of design method of multi-mode multiplexing device, and this method is carried out for the multiple modes in longitudinal direction in waveguide Multiplexing and demultiplexing, and the grating flank of tooth, input waveguide and the output waveguide come design pattern multiplexing device are justified using Rowland, It may be implemented that disposably multiple modes are multiplexed or are demultiplexed, do not need to stack device, while used longitudinal multimode Waveguide can substantially reduce compared to the bending radius of traditional transverse multimode waveguide and (can usually differ one to two orders of magnitude), from And greatly improve the integrated level of entire on piece Transmission system.
In order to reach above-mentioned technical effect, technical scheme is as follows:
A kind of design method of multi-mode multiplexing device, comprising the following steps:
S1: designing longitudinal multimode waveguide layer structure, which supports on longitudinal (perpendicular to chip surface direction) Three or three or more multiple communication modes.
Using silica as substrate, using silicon as waveguide core layer, coating is air or silica, waveguide core layer height Greater than 0.5um, the effective refractive index of supported multiple communication modes is calculated.
S2: design etched diffraction grating come realize multiplexing and demultiplexing:
Using the waveguiding structure designed in S1, the etched diffraction grating that design thickness matches answering for implementation pattern With with demultiplexing.
Detailed process is as follows by the step S2:
S21: operation wavelength and diffraction time m are determined；
S22: incidence angle θ is determinediIt is 30~45 °；
S23: the diffraction angle of basic mode is determinedkIt is 30~45 °；
S24: according to grating equation:
neffd(sinθi+sinθk)=m λ (1)
To multiple modes present in waveguide, remaining each mode is calculated separately out according to the equivalent refractive index of remaining each mode The corresponding angle of diffraction；
S25: according to the reflecting tooth face of the above parameter designing etched diffraction grating.
Compared with prior art, the beneficial effect of technical solution of the present invention is:
The method of the present invention is multiplexed and is demultiplexed for the multiple modes in longitudinal direction in waveguide, and using Rowland justify come The grating flank of tooth, input waveguide and the output waveguide of design pattern multiplexing device may be implemented disposably to answer multiple modes With or demultiplexing, do not need to stack device, while used longitudinal multimode waveguide is curved compared to traditional transverse multimode waveguide Bilge radius can substantially reduce and (can usually differ one to two orders of magnitude), to greatly improve the collection of entire on piece Transmission system Cheng Du.
Detailed description of the invention
Fig. 1 is the schematic illustration of etched diffraction grating integrated planar waveguide mode multiplexing device；
Fig. 2 is plane reflection grating schematic diagram, wherein rRFor the radius of Rowland circle；2rRIt is sieve for the radius of grating profile 2 times of blue radius of circle；PgFor grating facet；θiFor angle of incidence of light, θkFor the angle of diffraction of light.
Specific embodiment
The attached figures are only used for illustrative purposes and cannot be understood as limitating the patent；
In order to better illustrate this embodiment, the certain components of attached drawing have omission, zoom in or out, and do not represent actual product Size；
To those skilled in the art, it is to be understood that certain known features and its explanation, which may be omitted, in attached drawing 's.
Below with reference to embodiment, the following further describes the technical solution of the present invention.
As shown in Fig. 2, select waveguiding structure using silica as substrate, using silicon as waveguide core layer, coating be air or Person's silica, waveguide core layer height are 1um, and 3 communication modes effective refractive index n corresponding with them can be supported by calculating1, n2,n3.The wavelength for choosing 1550nm is the correspondence operation wavelength of the device, diffraction time 15, incidence angle θiIt is 35 °, basic mode The diffraction angle of (an i.e. minimum mode)kIt is 40 °.
Then according to grating equation:
neffd(sinθi+sinθk)=m λ (1)
To multiple modes present in waveguide, it is calculated separately out according to the equivalent refractive index of remaining each mode in addition to basic mode The corresponding diffraction angle of remaining each modek.According to grating equation it is recognised that for different modes, due to effective refractive index neff It is taken as n respectively1, n2, n3, therefore each mode corresponds respectively to the different angles of diffraction, and the angle of diffraction determines that output waveguide exists Position on Rowland circle.
The working principle of EDG are as follows: some placement input waveguide for corresponding to incidence angle on Rowland circle will be located at, then wave Lead propagation the respective light field of multiple modes enter EDG and reflected after, will be according to the different convergence imagings of effective refractive index At the position for corresponding to different angle of diffraction degree on same Rowland circle, thus output waveguide can be placed in these positions Place, so that different mode export to be realized to the demultiplexing of multiple modes.Conversely, the applied in reverse device, by multiple outputs The multiplexing of multiple modes then may be implemented using input waveguide as output as input in waveguide.
It has been determined that input waveguide and output waveguide after corresponding angle, that is, may be selected suitably on Rowland circle Rowland radius of circle is set as 500 microns in this example, so that the spacing between output waveguide is sufficiently large to avoid crosstalk, this example Middle its spacing is greater than 3 microns.Then, it on the basis of input waveguide position and the corresponding output waveguide position of basic mode, and utilizes Following relationship: (1) light returns the light path under central wavelength at basic mode output waveguide from input waveguide to i-th of tooth of grating Than light from being returned from input waveguide to grating i+1 tooth during the light path under central wavelength at basic mode output waveguide reduces M times of cardiac wave length.(2) all grating flank of tooth center is located at 2 times for Rowland radius of circle with the Rowland tangent and radius of circle Great circle on, so as to calculate the position of all grating flank of tooth, complete the design of EDG.
The same or similar label correspond to the same or similar components；
Described in attached drawing positional relationship for only for illustration, should not be understood as the limitation to this patent；
Obviously, the above embodiment of the present invention be only to clearly illustrate example of the present invention, and not be pair The restriction of embodiments of the present invention.For those of ordinary skill in the art, may be used also on the basis of the above description To make other variations or changes in different ways.There is no necessity and possibility to exhaust all the enbodiments.It is all this Made any modifications, equivalent replacements, and improvements etc., should be included in the claims in the present invention within the spirit and principle of invention Protection scope within.

Claims (1)

1.一种多模式复用器件的设计方法，其特征在于，包括以下步骤：1. a design method of multi-mode multiplexing device, is characterized in that, comprises the following steps: S1：设计纵向多模波导层结构，该多模波导在纵向即垂直于芯片表面方向上支持三个或三个以上的多个传播模式。S1: Design a longitudinal multi-mode waveguide layer structure, the multi-mode waveguide supports three or more multiple propagation modes in the longitudinal direction, that is, in the direction perpendicular to the chip surface. 以二氧化硅为衬底，以硅为波导芯层，覆盖层为空气或者二氧化硅，波导芯层高度大于0.5um，计算出可支持的多个传播模式的有效折射率。Using silicon dioxide as the substrate, silicon as the waveguide core layer, air or silicon dioxide as the cover layer, the height of the waveguide core layer is greater than 0.5um, and the effective refractive index of multiple supported propagation modes is calculated. S2：设计蚀刻衍射光栅来实现复用与解复用：S2: Design an etched diffraction grating for multiplexing and demultiplexing: 利用S1中设计出来的波导结构，设计厚度相匹配的蚀刻衍射光栅来实现模式的复用与解复用；Using the waveguide structure designed in S1, an etched diffraction grating with matching thickness is designed to realize the multiplexing and demultiplexing of modes; 所述步骤S2的具体过程如下：The specific process of the step S2 is as follows: S21：确定工作波长与衍射级次m；S21: Determine the working wavelength and the diffraction order m; S22：确定入射角θi为30～45°；S22: Determine the incident angle θ i to be 30-45°; S23：确定基模的衍射角θk为30～45°；S23: Determine the diffraction angle θ k of the fundamental mode to be 30-45°; S24：根据光栅方程：S24: According to the grating equation: neffd(sinθi+sinθk)＝mλ (1)n eff d(sinθ i +sinθ k )=mλ (1) 其中neff为有效折射率，d为光栅常数，λ为工作波长，对波导中存在的多个模式，根据其余各模式的等效折射率分别计算出其余各模式对应的衍射角；where n eff is the effective refractive index, d is the grating constant, and λ is the working wavelength. For multiple modes existing in the waveguide, the diffraction angles corresponding to the remaining modes are calculated according to the equivalent refractive indices of the remaining modes; S25：根据以上参数设计蚀刻衍射光栅的反射齿面。S25: Design the reflection tooth surface of the etched diffraction grating according to the above parameters.
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CN109445751B (en) * 2018-11-19 2020-12-29 浙江大学 A Diffraction Grating-Based Multi-wavelength Spatial Light Field Differential Computing Device
CN112859246B (en) * 2020-12-31 2023-08-18 武汉科宇智联信息技术有限公司 Echelle grating flat-top type demultiplexer

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