CN105887036A - Clamp for clamping workpieces - Google Patents
Clamp for clamping workpieces Download PDFInfo
- Publication number
- CN105887036A CN105887036A CN201610316743.9A CN201610316743A CN105887036A CN 105887036 A CN105887036 A CN 105887036A CN 201610316743 A CN201610316743 A CN 201610316743A CN 105887036 A CN105887036 A CN 105887036A
- Authority
- CN
- China
- Prior art keywords
- workpiece
- hole
- clamping
- fixing
- clamping workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004544 sputter deposition Methods 0.000 claims abstract description 30
- 230000005540 biological transmission Effects 0.000 claims abstract description 23
- 239000007787 solid Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 description 35
- 239000000758 substrate Substances 0.000 description 15
- 239000011248 coating agent Substances 0.000 description 13
- 238000000576 coating method Methods 0.000 description 13
- 238000001755 magnetron sputter deposition Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 10
- 238000007747 plating Methods 0.000 description 7
- 239000007789 gas Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 238000005477 sputtering target Methods 0.000 description 3
- 239000013077 target material Substances 0.000 description 3
- 238000005034 decoration Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- UGACIEPFGXRWCH-UHFFFAOYSA-N [Si].[Ti] Chemical compound [Si].[Ti] UGACIEPFGXRWCH-UHFFFAOYSA-N 0.000 description 1
- QRRWWGNBSQSBAM-UHFFFAOYSA-N alumane;chromium Chemical compound [AlH3].[Cr] QRRWWGNBSQSBAM-UHFFFAOYSA-N 0.000 description 1
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a clamp for clamping workpieces. The clamp comprises a base positioned at the chamber bottom of a sputtering chamber, stationary shafts on the base, workpiece clamping plates positioned between adjacent two stationary shafts, workpiece clamping holes formed in the workpiece clamping plates and a transmission shaft positioned between the base and the chamber bottom of the sputtering chamber. As at least two different types of workpieces can be simultaneously clamped by the workpiece clamping holes in each workpiece clamping plate, different types of workpieces can be simultaneously sputtered, and the sputtering efficiency is improved.
Description
Technical field
The application relates to magnetron sputtering technology field, particularly relates to a kind of workpiece fixture.
Background technology
Along with improving constantly of people's living standard, increasing coated product is widely used, and therewith
It is important that the manufacture of corresponding vacuum coating equipment also becomes further in the lifting of coating technique.Magnetron sputtering
Plated film is exactly the coating technique that one of which is widely used, and its principle is to utilize electronics under the effect of electric field
Collide with sputter gas argon during accelerating to fly to base material, ionize out substantial amounts of argon ion and electronics, electricity
Son flies to base film, the most constantly collides with ar atmo, produces more ar atmo and electronics；
Argon ion accelerates to bombard target under the effect of electric field, sputters substantial amounts of target atom, in neutral target
Atom (or molecule) is deposited on the coating technique of substrate surface.
Magnetron sputtering plating is current wide variety of coating technique method, is widely used in optics, micro-electricity
The industrial fields such as sub, wear-resisting, anti-corrosion, decoration, in order to provide reliable and stable thin film coating.Such as decoration
With colored plated film, mobile phone shell plated film, building glass low-E plated film, transparent conducting glass plated film etc..Plated
The substrate of film or workpiece, it is common that glass, metal-back, Ya Keli, PET (polyethylene terephthalate
Resin, poly (ethylene terephthalate)) film etc., it is placed on fixture, then is placed in movably
In substrate frame, substrate frame automatically bring magnetron sputtering plating indoor into and carry out plated film.
Due to vacuum film formation technical characterstic, complex part surface spatter film forming technique is in the control of thickness, uniformly
Property and show relatively difficult with the adhesion of workpiece and complicated.Along with the fast development of machinery manufacturing industry, work
The range of application of part surface coating technology, is expanded to precise punching die, space flight and aviation parts and electricity by cutter
Subassembly plug-in unit.New high performance membrane layer constantly occurs, such as TiAlCN (cyaniding aluminum titanium), AlCrN (nitridation
Chromium aluminum), TiSiN (titanium silicon nitride), diamond like carbon etc., improve service life and the working (machining) efficiency of tool and mould.
Research to complex part surface magnetic control sputtering coating technique is particularly important at present, uses magnetron sputtering to exist
Planar substrate or the technology of surface of the work plated film and technique are the most extensively with ripe.
For magnetron sputtering plating, planar substrate installation way generally can be divided into vertical, horizontal, cylindrical etc.
Several method.And the research to the installation way of planar substrate is the most quite varied.Such as magnetron sputtering is vertical
Coating clamp, improves the versatility of coating clamp, can be used in the plated film of different size size substrate,
Decrease special fixture manufacturing cost to a certain extent.The most such as certain stationary fixture, to a certain extent
Also realize the change of the distance of target-substrate distance, it is achieved the purpose of regulation target-substrate distance, improve plated film efficiency.
Prior art also has the research to special-shaped workpiece installation way, but is also typically only capable to single different of clamping
Shape workpiece.A kind of steel ball coating clamp device based on magnetron sputtering technique.This device can be necessarily
Solve surface coating unbalanced problem during steel ball plated film in degree, thus improve mechanical performance and the table of steel ball
Surface uniformity.But, the suitability of this device is relatively low, may be inapplicable for other type of special-shaped workpiece.
Therefore, a kind of suitability is designed strong and can the magnetron sputtering special-shaped workpiece plating of clamping different workpieces simultaneously
The clamping device of film, has particularly significant to the raising efficiency of magnetron sputtering special-shaped workpiece plated film, lower cost
Meaning.
Summary of the invention
Invention provides a kind of workpiece fixture, with solve prior art can not clamping inhomogeneity simultaneously
The technical problem of the workpiece of type.
For solving above-mentioned technical problem, the invention provides a kind of workpiece fixture, including:
Base, is positioned at the cavity bottom of sputtering chamber, and the sidewall of described sputtering chamber arranges target；On described base
It is provided with N number of first fixing hole；The distance at the center of each first fixing hole and described base is equal；N≥2
And be positive integer；
N number of fixing axle, corresponding with described N number of first fixing hole, each fixing axle is solid by respective first
Determine hole and connect described base；
M clamping workpiece plate, between adjacent two fixing axles, each clamping workpiece plate is provided with P
Individual clamping workpiece hole, the different types of workpiece of at least two is installed in described P clamping workpiece hole；Wherein, M
For positive integer, P >=2 and be positive integer；
Power transmission shaft, between the cavity bottom of described base and described sputtering chamber；Described power transmission shaft is fixing even
Connecing described base, described power transmission shaft is by driving motor to drive operating, and then drives described base to rotate；
When sputter coating, by described power transmission shaft, the rotation of described base, drive and be in described P work
The different types of workpiece of described at least two on part clamping plate rotates, and is divided by the gas in sputtering chamber
Son clashes into target, makes target atom or molecule be splashed to the different types of surface of the work of described at least two and enters
Row plated film, and then described different types of workpiece is carried out plated film simultaneously.
Preferably, described workpiece fixture also includes:
Top cover is corresponding with described base；
Being provided with N number of second fixing hole on described top cover, each second fixing hole and each self-corresponding first is admittedly
Determine hole to coordinate, respective fixing axle is fixed between described top cover and described base.
Preferably, described first fixing hole and described second fixing hole are all screwed hole；
The two ends of each fixing axle are both provided with the screw thread corresponding with described screwed hole.
Preferably, each clamping workpiece plate is provided with pin, each fixing axle is provided with the pin of correspondence
Hole；
By described pin and the cooperation of described pin-and-hole so that each clamping workpiece plate is in adjacent two and fixes
Between axle.
Preferably, the distance of adjacent two fixing axles and the width of described target are equal.
Preferably, it is provided with clamping device, for clamping workpiece in each clamping workpiece hole.
Preferably, described clamping device includes: hoodle and spring；
Described hoodle is on the medial wall, hole in the clamping workpiece hole of correspondence in the duct offered, described duct
The diameter of opening part is less than the diameter of described hoodle；
One end of described spring and described hoodle connect, and the other end of described spring is fixed on described clamping workpiece
Bottom the duct on sidewall in hole.
Preferably, described top cover is circular top cover；Described base is cup dolly.
Preferably, in described M clamping workpiece plate, the size of each clamping workpiece plate, shape can phases
Together can also be different.
By one or more technical scheme of the present invention, the invention have the advantages that or excellent
Point:
The invention discloses a kind of workpiece fixture, including base, the end of the cavity bottom being positioned at sputtering chamber
Arrange on fixing axle on seat, the clamping workpiece plate being between adjacent two fixing axles, clamping workpiece plate
Clamping workpiece hole, power transmission shaft between the cavity bottom of described base and described sputtering chamber；Due to each
Clamping workpiece hole on clamping workpiece plate can the simultaneously different types of workpiece of clamping at least two, therefore, it is possible to
Time the different types of workpiece of sputter, improve sputter efficiency.
Accompanying drawing explanation
Fig. 1-2 is the structural representation of workpiece fixture in the embodiment of the present invention；
Fig. 3 is the structural representation of base in the embodiment of the present invention；
Fig. 4 is the structural representation of clamping workpiece plate in the embodiment of the present invention.
Description of reference numerals: sputtering chamber 1, target 2, base 3, fixing axle 4, top cover 5, clamping workpiece plate
6, clamping workpiece hole 7, power transmission shaft the 8, first fixing hole 9.
Detailed description of the invention
In order to make the application the technical staff in the technical field be more clearly understood that the application, below in conjunction with
Accompanying drawing, is described in detail technical scheme by specific embodiment.
In embodiments of the present invention, disclose a kind of workpiece fixture, be mainly used to clamping workpiece, such as
Substrate to be coated.Certainly, workpiece is alternatively special-shaped workpiece, and special-shaped workpiece refers to workpiece in irregular shape,
The most hemispheric substrate to be coated.
Refer to Fig. 1-Fig. 2 below, be the structural representation of the workpiece fixture of the present invention.
The sidewall of sputtering chamber 1 is provided with target 2, and workpiece fixture is positioned in the cavity of sputtering chamber 1
The heart, and workpiece fixture is consistent with the distance of each target 2 on sidewall, is so designed that and can ensure to spatter
The uniformity of plating and sputter quality.
In an embodiment of the present invention, workpiece fixture includes: base 3, top cover 5, be in top cover 5 and
Fixing axle 4 between base 3, the clamping workpiece plate 6 being between adjacent two fixing axles 4, clamping workpiece
The clamping workpiece hole 7 arranged on plate 6.
Introduce all parts in detail below.
Base 3, is positioned at the cavity bottom of sputtering chamber 1.The shape of base 3 can be circular, referring to Fig. 3,
And size can customize as required, select various sizes of base 3 just can realize target-substrate distance (target 2
Distance to substrate to be coated (that is: workpiece)) adjustment, thus improve plated film efficiency and coating quality.
It addition, and base 3 correspondence be top cover 5, it may be assumed that the size shape of base 3 and the size shape of top cover 5
Shape is consistent.If top cover 5 is circular top cover, then described base 3 is cup dolly.
It is provided with N number of first fixing hole 9 on the base 3；Each first fixing hole 9 and described base 3
The distance at center is equal.Each first fixing hole 9 can consolidate a piece fixing axle 4 of installation.Owing to fixing one
Clamping workpiece plate 6 needs two fixing axles 4, and therefore the minimum number of the first fixing hole 9 is 2, maximum number
Mesh is not intended to.That is: N >=2 and be positive integer.If the quantity of fixing axle 4 be at least 3, then the of correspondence
One fixing hole 9 circumferentially can be distributed along base 3.As it is shown in figure 1, fixing axle 4 what base 3 was formed is
Octagon.If the quantity of fixing axle 4 is the most, then the first corresponding fixing hole 9 is arranged closer to circle.
Being provided with N number of second fixing hole on top cover 5, each second fixing hole and each self-corresponding first is admittedly
Determine hole 9 to coordinate, respective fixing axle 4 is fixed between described top cover 5 and described base 3.Therefore,
The number of the second fixing hole and the number of the first fixing hole 9 are consistent.
It addition, base 3 can be rotated by power transmission shaft 8.
Power transmission shaft 8, between described base 3 and the cavity bottom of described sputtering chamber 1；Described power transmission shaft 8
The described base 3 of fixing connection, described power transmission shaft 8 is by driving motor to drive operating, and then drives described base 3
Rotate.
Specifically, the cavity bottom in sputtering chamber 1 utilizes movable sealing principle to introduce and drives motor and power transmission shaft
8, under the driving driving motor, this power transmission shaft 8 can do accurate rotation.Power transmission shaft 8 is through base 3
Center, and forming firm connection through place with the form of upper and lower nut, through afterwards to be spirally connected, to weld
Etc. mode and top cover 5 is fixing connects, fixing mode is as the criterion with practical situation, the present invention is the most superfluous
State.Described power transmission shaft 8 is by driving motor to drive operating, and then drives described base 3 to rotate.
When sputter coating, by described power transmission shaft 8, the rotation of described base 3, drive and be in described P
The different types of workpiece of described at least two on clamping workpiece plate 6 rotates, by sputtering chamber 1
Gas molecule clashes into target 2, makes target 2 atom or molecule be splashed to the different types of work of described at least two
Part surface carries out plated film, and then described different types of workpiece is carried out plated film simultaneously, and due to each workpiece
Clamping plate 6 is consistent apart from the distance of target 2, therefore, it is possible to ensure the uniformity of plated film.
N number of fixing axle 4, and described N number of first fixing hole 9 is corresponding.The number of fixing axle 4 and first is admittedly
The number determining hole 9 is consistent.
Each fixing axle 4 connects described base 3 by respective first fixing hole 9.Be provided with at top cover 5 and
In the case of second fixing hole of the first fixing hole 9 correspondence, the two ends of each fixing axle 4 are inserted first and are fixed
Between hole 9 and the second fixing hole.In alternatively possible embodiment, described first fixing hole 9 and described
Second fixing hole is all screwed hole；And the two ends of each fixing axle 4 are both provided with corresponding with described screwed hole
Screw thread, the most each fixing axle 4 is screwed onto between described top cover 5 and described base 3.And about fixing axle 4
Shape, the present invention does not limits.Such as, the mid portion of fixing axle 4 can be any geometric form
Shape, including cylinder, long strip type, elongated rectangular shape, prismatic etc., it is simple to consolidating of clamping workpiece plate 6
Fixed.
M clamping workpiece plate 6, is between adjacent two fixing axles 4.Wherein, M is positive integer, it may be assumed that
The clamping workpiece plate 6 of the present invention at least one piece.The structural representation of clamping workpiece plate 6 is referring to Fig. 4.
And on each clamping workpiece plate 6, it is provided with P clamping workpiece hole 7, P >=2 and be positive integer.
Two distinct types of workpiece at least can be installed in P the clamping workpiece hole 7 of the present invention, during sputter, and can be same
Time workpiece different types of at least two carry out sputter.The minimum number in the clamping workpiece hole 7 of the present invention is 2
Individual, maximum number is not intended to, as long as each clamping workpiece plate 6 can accommodate.
When M clamping workpiece plate 6 is installed, each clamping workpiece plate 6 is provided with pin, each fixing
The pin-and-hole of correspondence it is provided with on axle 4；By described pin and the cooperation of described pin-and-hole so that each workpiece fills
Clamping plate 6 are between adjacent two fixing axles 4.Specifically, each fixing axle 4 is provided with 4
The pin-and-hole that individual size is identical, wherein 2 pin-and-holes are positioned at the upper end of the fixing middle unthreaded portion of axle 4, additionally
Two pin-and-holes are positioned at the lower end of the fixing middle unthreaded portion of axle 4.These pin-and-holes are used for fixing clamping workpiece plate
6, each clamping workpiece plate 6 is both provided with pin, by the cooperation of pin and pin-and-hole by clamping workpiece plate 6
Being fixed between adjacent two fixing axles 4, only need to take off clamping workpiece plate 6 during dismounting, handling are extremely
Convenient.Certainly, if only two fixing axles 4 fix clamping workpiece plate 6, then each fixing axle 4
Two ends can be respectively provided with a pin-and-hole, is used for and clamping workpiece plate 6 pin joint.
Depending on the size of clamping workpiece plate 6 is according to adjacent two fixing axles 4 combination, and each clamping workpiece plate 6
On have multiple clamping workpiece hole 7, the spread geometry in all clamping workpiece holes 7 on each clamping workpiece plate 6
Being indefinite, such as clamping workpiece hole 7 can be arranged as multiple circular concentric, it is also possible to is arranged in rectangular
Shape, it is also possible to be arranged as wavy etc..In a kind of possible embodiment, clamping workpiece plate 6 is square
Shape, it arranges substantial amounts of clamping workpiece hole 7, and the number in clamping workpiece hole 7 can be according to clamping workpiece plate 6
Receiving degree, the quantity of workpiece, type, size etc. comprehensively determine.
It addition, each clamping workpiece hole 7 is provided with clamping device, for the two distinct types of work of clamping
Part.Specifically, clamping device is provided with hoodle and spring.
Described clamping device includes: hoodle and spring.Hoodle can include steel ball.
Duct is offered on the medial wall, hole in clamping workpiece hole 6.
Described hoodle is on the medial wall, hole in the clamping workpiece hole 6 of correspondence in the duct offered, described duct
The diameter of opening part less than the diameter of described hoodle；
One end of described spring and described hoodle connect, and the other end of described spring is fixed on described clamping workpiece
Bottom the duct on sidewall in hole.
When clamping workpiece (such as hemispherical workpiece), hemispherical workpiece is put into clamping workpiece hole 7
In, by the elastic force of spring, hoodle is withstood on the recess of described hemispherical workpiece, makes the projection of hemispherical workpiece
Part ejects in clamping workpiece hole 7, and remainder is fixed in being stuck in clamping workpiece hole 7.
The type of the workpiece according to required plated film, shape, size etc., these clamping workpiece holes 7 can be arranged
For circular, square or other shape, and can be set to different size dimensions.This clamping workpiece plate 6
Being prone to processing, size can standardization.And according to different workpiece, customizable different clamping workpiece hole 7,
And clamping quantity is many, it is possible to be applicable to difformity and different size of workpiece.That is: fill at same workpiece
In clamping plate 6, the shape in each clamping workpiece hole 7, size can be different.Therefore, each clamping workpiece hole 7
Different types of workpiece can be installed.It addition, clamping workpiece plate 7 is the most customizable.
Target 2, is positioned on the sidewall of described sputtering chamber 1.In a kind of possible embodiment, adjacent two
The distance of fixing axle 4 and the width of described target 2 are equal.It is so designed that, it is possible to ensure the uniform of plated film
Property, improve the quality of plated film.
Owing to the number of fixing axle 4, clamping workpiece plate 6 is all indefinite, therefore the present invention lifts with fixed number
The structure of example explanation workpiece fixture, certainly, citing herein is intended merely to explain the present invention, is not limiting as
The present invention.
It is provided with the first fixing hole 9 being circumferentially distributed, each first fixing hole 9 and base 3 on the base 3
Centre distance equal, the first fixing hole 9 totally 8.The big I of base 3 customizes as required.
Top cover 5 and base 3 are corresponding, and top cover 5 is provided with the second fixing hole being circumferentially distributed, Mei Ge
The centre distance of two fixing holes and base 3 is equal, the second fixing hole totally 8.
And 8 fixing axles 4 are fixed in respective first fixing hole 9 and the second fixing hole, so, install
It is formed for an octagon prism support afterwards.Each fixing axle 4 is provided with 4 size phases
Same pin-and-hole, lays respectively at the two ends up and down of the fixing middle unthreaded portion of axle 4, often holds each two.These
Pin-and-hole is used for fixing clamping workpiece plate 6, convenient handling.
Clamping workpiece plate 6 herein, as a example by rectangle, is arranged above with substantial amounts of clamping workpiece hole 7.Each workpiece
Clamping hole 7 is provided with clamping device, is used for clamping workpiece.The shape of the workpiece according to required plated film is with big
Small size, these clamping workpiece holes 7 may be configured as circle, square or other shape, and can be set to
Different size dimensions.And on each clamping workpiece plate 6 arrangement mode in all of clamping workpiece hole 7 is not
Fixed.
This clamping workpiece plate 6 be prone to processing, size can standardization, according to different workpiece, customizable difference
Clamping workpiece hole 7, and clamping quantity is many, it is possible to be applicable to difformity and different size of workpiece.
After clamping workpiece, clamping workpiece plate 6 is installed on octagon prism support by pin joint
On, material is thus formed the octagon prism of an opposing seal, thus prevent workpiece " inner surface " or
The surface being not required to plated film is contaminated (diffraction of magnetron sputtering plating is the strongest).Octagon prism props up and mounts
In the center of magnetron sputtering chamber, it is little that we are provided with cathodic sputtering in the position that each faceted pebble is corresponding
Room, thus most 7 sputtering target materials 2 can be laid.Each sputtering target material 2 can be identical material, thus
It is greatly improved the efficiency of sputter coating, and can be used at surface of the work coating thick film.Each sputtering target material 2
It is alternatively different materials, therefore along with the accurate rotation of octagon prism support, can be at surface of the work one
Secondary property plates the thin film of multiple difference in functionality.It addition, according to different targets 2 and the various requirement of institute's plated film,
Optional different base 3 disk, but the regular polygon prism formed after ensureing to install fixing axle 4 is every
One end land width is consistent with target 2 width.So, different base 3 disks is selected just can to realize target base
Away from adjustment, thus improve plated film efficiency and coating quality.
Use this workpiece fixture can carry out workpiece (such as hemisphere face special-shaped workpiece) plating two-layer functional membrane,
Institute's plated film is optical anti-reflective film.
1, as requested, select suitable base 3, assemble octagon prism support, including power transmission shaft
8, base 3, fixing axle 4, the assembling of top cover 5.After assembling, target-substrate distance is 80mm.
2, by hemisphere face special-shaped workpiece clamping with on clamping workpiece plate 6, by clamping device, clamping consolidates.
3, the clamping workpiece plate 6 installing hemisphere face special-shaped workpiece is installed on octagon prism support, logical
Cross pin joint to fix.
4, selecting the target 2 being suitable for, target 2 number is two, and symmetry is placed in octagon prism support
On the sputter cathode on both sides.
5, close vacuum chamber, open mechanical pump and vacuum chamber is extracted into 10 by molecular pump-4torr。
6, be filled with reacting gas, regulation air-flow size be 260sccm, detected gas pressure stability in
10～30Pa, reach the gas pressure required for build-up of luminance.
7, opening magnetron sputtering power supply, open cycle cooling water, regulation sets target sputtering power as being more than
5～7KW.
8, simultaneously, power transmission shaft 8 drives octagon prism support to rotate, and rotary speed is 1r/min.
9, plated film completes, and opens hatch door, after taking off clamping workpiece plate 6 successively, then installs next group half successively
Sphere special-shaped workpiece.
10, step 5 to 9 is repeated, until the whole plated film of hemispherical workpiece is complete.
11, cleaning equipment, closes hull closure.
By one or more embodiment of the present invention, the invention have the advantages that or advantage:
The invention discloses a kind of workpiece fixture, including base, the end of the cavity bottom being positioned at sputtering chamber
Arrange on fixing axle on seat, the clamping workpiece plate being between adjacent two fixing axles, clamping workpiece plate
Clamping workpiece hole, power transmission shaft between the cavity bottom of described base and described sputtering chamber；Due to each
Clamping workpiece hole on clamping workpiece plate can the simultaneously different types of workpiece of clamping at least two, therefore, it is possible to
Time the different types of workpiece of sputter, improve sputter efficiency.
Although having been described for the preferred embodiment of the application, but one of ordinary skilled in the art once learning
Basic creative concept, then can make other change and amendment to these embodiments.So, appended power
Profit requires to be intended to be construed to include preferred embodiment and fall into all changes and the amendment of the application scope.
Obviously, those skilled in the art can carry out various change and modification without deviating from this Shen to the application
Spirit and scope please.So, if the application these amendment and modification belong to the application claim and
Within the scope of its equivalent technologies, then the application is also intended to comprise these change and modification.
Claims (9)
1. a workpiece fixture, it is characterised in that including:
Base, is positioned at the cavity bottom of sputtering chamber, and the sidewall of described sputtering chamber arranges target；On described base
It is provided with N number of first fixing hole；The distance at the center of each first fixing hole and described base is equal；N≥2
And be positive integer；
N number of fixing axle, corresponding with described N number of first fixing hole, each fixing axle is solid by respective first
Determine hole and connect described base；
M clamping workpiece plate, between adjacent two fixing axles, each clamping workpiece plate is provided with P
Individual clamping workpiece hole, the different types of workpiece of at least two is installed in described P clamping workpiece hole；Wherein, M
For positive integer, P >=2 and be positive integer；
Power transmission shaft, between the cavity bottom of described base and described sputtering chamber；Described power transmission shaft is fixing even
Connecing described base, described power transmission shaft is by driving motor to drive operating, and then drives described base to rotate；
When sputter coating, by described power transmission shaft, the rotation of described base, drive and be in described P work
The different types of workpiece of described at least two on part clamping hole rotates, and is divided by the gas in sputtering chamber
Son clashes into target, makes target atom or molecule be splashed to the different types of surface of the work of described at least two and enters
Row plated film, and then described different types of workpiece is carried out plated film simultaneously.
2. a kind of workpiece fixture as claimed in claim 1, it is characterised in that described clamping workpiece presss from both sides
Tool also includes:
Top cover is corresponding with described base；
Being provided with N number of second fixing hole on described top cover, each second fixing hole and each self-corresponding first is admittedly
Determine hole to coordinate, respective fixing axle is fixed between described top cover and described base.
3. a kind of workpiece fixture as claimed in claim 2, it is characterised in that
Described first fixing hole and described second fixing hole are all screwed hole；
The two ends of each fixing axle are both provided with the screw thread corresponding with described screwed hole.
4. a kind of workpiece fixture as claimed in claim 1, it is characterised in that
It is provided with pin on each clamping workpiece plate, each fixing axle is provided with the pin-and-hole of correspondence；
By described pin and the cooperation of described pin-and-hole so that each clamping workpiece plate is in adjacent two and fixes
Between axle.
5. a kind of workpiece fixture as claimed in claim 1, it is characterised in that adjacent two fixing axles
Distance and the width of described target equal.
6. a kind of workpiece fixture as claimed in claim 1, it is characterised in that each clamping workpiece hole
Inside it is provided with clamping device, for clamping workpiece.
7. a kind of workpiece fixture as claimed in claim 6, it is characterised in that described clamping device bag
Include: hoodle and spring；
Described hoodle is on the medial wall, hole in the clamping workpiece hole of correspondence in the duct offered, described duct
The diameter of opening part is less than the diameter of described hoodle；
One end of described spring and described hoodle connect, and the other end of described spring is fixed on described clamping workpiece
Bottom the duct on sidewall in hole.
8. a kind of workpiece fixture as claimed in claim 2, it is characterised in that
Described top cover is circular top cover；Described base is cup dolly.
9. a kind of workpiece fixture as claimed in claim 1, it is characterised in that at described M workpiece
In clamping plate, the size of each clamping workpiece plate, shape can be the same or different.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610316743.9A CN105887036B (en) | 2016-05-12 | 2016-05-12 | A kind of workpiece fixture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610316743.9A CN105887036B (en) | 2016-05-12 | 2016-05-12 | A kind of workpiece fixture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105887036A true CN105887036A (en) | 2016-08-24 |
| CN105887036B CN105887036B (en) | 2018-07-06 |
Family
ID=56716063
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610316743.9A Expired - Fee Related CN105887036B (en) | 2016-05-12 | 2016-05-12 | A kind of workpiece fixture |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105887036B (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107675139A (en) * | 2017-11-13 | 2018-02-09 | 赫得纳米科技(昆山)有限公司 | Coating apparatus and film plating process |
| CN108660455A (en) * | 2017-04-01 | 2018-10-16 | 深圳先进技术研究院 | Coating clamp and filming equipment |
| CN109652782A (en) * | 2019-01-28 | 2019-04-19 | 杭州东兴电讯材料有限公司 | A special fixture for valve sleeve coating |
| CN109890732A (en) * | 2016-10-27 | 2019-06-14 | 康宁股份有限公司 | Method and apparatus for consolidated article |
| CN111218646A (en) * | 2020-03-04 | 2020-06-02 | 赵俊亮 | Extreme environment resistant motor bearing manufacturing equipment and manufacturing method thereof |
| CN112176307A (en) * | 2020-09-25 | 2021-01-05 | 湖南玉丰真空科学技术有限公司 | Adjustable workpiece rotating stand of vacuum magnetron sputtering coating equipment |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003268530A (en) * | 2002-03-13 | 2003-09-25 | Nippon Sheet Glass Co Ltd | Tool for sputtering |
| US8371565B2 (en) * | 2010-04-08 | 2013-02-12 | Hon Hai Precision Industry Co., Ltd. | Clamping device and coating apparatus having same |
| CN203960324U (en) * | 2014-07-25 | 2014-11-26 | 蓝思科技股份有限公司 | A kind of two sides coating clamp of magnetron sputtering coater |
| CN105088169A (en) * | 2015-08-23 | 2015-11-25 | 洛阳新兆电子有限公司 | Application method of vacuum sputtering coated substrate clamping device |
| CN204825043U (en) * | 2015-08-06 | 2015-12-02 | 国营第二二八厂 | Vertical film fixture that plates of magnetron sputtering |
| CN205688006U (en) * | 2016-05-12 | 2016-11-16 | 成都西沃克真空科技有限公司 | A kind of workpiece fixture |
-
2016
- 2016-05-12 CN CN201610316743.9A patent/CN105887036B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003268530A (en) * | 2002-03-13 | 2003-09-25 | Nippon Sheet Glass Co Ltd | Tool for sputtering |
| US8371565B2 (en) * | 2010-04-08 | 2013-02-12 | Hon Hai Precision Industry Co., Ltd. | Clamping device and coating apparatus having same |
| CN203960324U (en) * | 2014-07-25 | 2014-11-26 | 蓝思科技股份有限公司 | A kind of two sides coating clamp of magnetron sputtering coater |
| CN204825043U (en) * | 2015-08-06 | 2015-12-02 | 国营第二二八厂 | Vertical film fixture that plates of magnetron sputtering |
| CN105088169A (en) * | 2015-08-23 | 2015-11-25 | 洛阳新兆电子有限公司 | Application method of vacuum sputtering coated substrate clamping device |
| CN205688006U (en) * | 2016-05-12 | 2016-11-16 | 成都西沃克真空科技有限公司 | A kind of workpiece fixture |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109890732A (en) * | 2016-10-27 | 2019-06-14 | 康宁股份有限公司 | Method and apparatus for consolidated article |
| CN108660455A (en) * | 2017-04-01 | 2018-10-16 | 深圳先进技术研究院 | Coating clamp and filming equipment |
| CN107675139A (en) * | 2017-11-13 | 2018-02-09 | 赫得纳米科技(昆山)有限公司 | Coating apparatus and film plating process |
| CN107675139B (en) * | 2017-11-13 | 2020-02-07 | 赫得纳米科技(昆山)有限公司 | Film coating device |
| CN109652782A (en) * | 2019-01-28 | 2019-04-19 | 杭州东兴电讯材料有限公司 | A special fixture for valve sleeve coating |
| CN111218646A (en) * | 2020-03-04 | 2020-06-02 | 赵俊亮 | Extreme environment resistant motor bearing manufacturing equipment and manufacturing method thereof |
| CN112176307A (en) * | 2020-09-25 | 2021-01-05 | 湖南玉丰真空科学技术有限公司 | Adjustable workpiece rotating stand of vacuum magnetron sputtering coating equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105887036B (en) | 2018-07-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105887036A (en) | Clamp for clamping workpieces | |
| US8241473B2 (en) | Sputter-coating apparatus | |
| EP2483907B1 (en) | Method for coating a substrate | |
| CN101736292B (en) | Composite magnetic control and ion beam sputtering and depositing system | |
| CN101634012B (en) | An Ion Beam Assisted Magnetron Sputtering Deposition Method for Surface Protection | |
| KR20200127061A (en) | Systems and methods for forming a layer of sputtered material | |
| EP2855729A1 (en) | Method for coating a substrate and coater | |
| CN208266260U (en) | Block platen component and semiconductor processing | |
| CN108315702A (en) | A kind of planar rectangular magnetic control sputtering cathode plating film uniformity adjusting apparatus and method | |
| CN211227346U (en) | Double-sided film coating machine | |
| KR20140057208A (en) | Combinatorial and full substrate sputter deposition tool and method | |
| CN205688006U (en) | A kind of workpiece fixture | |
| CN1793416A (en) | Apparatus and tech., for composite preparing metal film | |
| CN1718847A (en) | A pair of target twin magnetron sputtering ion plating deposition device | |
| CN109338320B (en) | Process for magnetron sputtering coating on surface of plastic part | |
| CN202576553U (en) | Magnetron sputtering target material | |
| CN101082123A (en) | Sputtering device and method | |
| CN209412306U (en) | Bottom plate and Sputting film-plating apparatus | |
| CN104372303B (en) | Position structure of arc targets of multi-arc ion coating apparatus | |
| WO2022218592A1 (en) | Sputtering apparatus for coating of 3d-objects | |
| CN102808156A (en) | Evaporation plating apparatus | |
| CN108048811B (en) | Magnetron sputter magnetron sputtering inlet seal flange | |
| US20100116654A1 (en) | Film coating apparatus | |
| CN219689836U (en) | Vacuum magnetron sputtering double-sided film plating machine | |
| CN204224697U (en) | A kind of positional structure of electric arc target of multi-arc ion plating equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180706 Termination date: 20200512 |