CN105866968B - A kind of dispersion compensation device based on diffraction lens - Google Patents
A kind of dispersion compensation device based on diffraction lens Download PDFInfo
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- CN105866968B CN105866968B CN201610375066.8A CN201610375066A CN105866968B CN 105866968 B CN105866968 B CN 105866968B CN 201610375066 A CN201610375066 A CN 201610375066A CN 105866968 B CN105866968 B CN 105866968B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/4233—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
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Abstract
本发明提供的基于衍射透镜的色散补偿装置，可以解决光束通过光栅或类似光栅的色散衍射器件在不同衍射级次或光栅常数时，光束色散不能同时补偿的问题；该装置是由光路依次连接的光学元件(5)、衍射透镜(2)、消色差胶合透镜组(3)和显微镜物镜(4)组成。本发明实用性强，可以同时实现调节光路和补偿色散的作用，还可以用于声光偏转器扫描色散的补偿。
The dispersion compensation device based on the diffraction lens provided by the present invention can solve the problem that the dispersion of the light beam cannot be compensated at the same time when the light beam passes through a grating or a grating-like dispersive diffraction device with different diffraction orders or grating constants; the device is sequentially connected by optical paths. The optical element (5), the diffractive lens (2), the achromatic cemented lens group (3) and the microscope objective lens (4) are composed. The invention has strong practicability, can realize the functions of adjusting the optical path and compensating dispersion at the same time, and can also be used for the compensation of the scanning dispersion of the acousto-optic deflector.
Description
Technical field
The present invention relates to a kind of dispersion compensation transposition.The dispersion compensation device to the different dispersions of light beam different angle of diffraction into
It goes while compensating.The invention belongs to optical fields.
Background technique
Acousto-optic deflection device is the device according to made of audio-optical deflection principle.The refractive index of acousto-optic crsytal is by sound in acousto-optic crsytal
Wave modulation forms height periodic distribution along Acoustic Wave Propagation direction, is similar to a grating, space periodic (grating constant)
It is equal to the wavelength of sound wave.Acousto-optic deflection device can be applied to light beam scanning, by quickly changing wave length of sound, can quickly change
Become its space periodic and then changes the angle of diffraction of light beam.The change of frequency of sound wave passes through electronic circuit and PZT (piezoelectric transducer) is realized,
It can achieve very high speed, and because the effect there is no machinery inertial can soon be stable at an assigned frequency,
Thus the speed of angle of diffraction variation is also very fast, while with very high velocity scanning light beam to specified scan position, that is, having
High speed looks for ability at random.
But there is the light beam of certain spectral width by as grating, acousto-optic deflection device is a kind of when acousto-optic deflection device
Dispersion element, after light beam passes through acousto-optic deflection device, the spatially separated introducing space angle dispersion of the light of different wave length.Utilize prism
Or the diagonal dispersion compensation of the optical dispersions element such as grating is the common means of optical field, but this compensation method can only be to spy
The grating constant of fixed a certain diffraction time or fixation compensates, in the case where grating constant or diffraction time change, nothing
Angle dispersion is fully compensated in method.Acousto-optic deflection device is exactly the grating of grating constant variation, when carrying out light beam scanning, grating
Constant is different, and deflection angle is different, while introducing different angle dispersions.Specific deflection angle can only be fully compensated using prism or grating
Spatial dispersion, remaining deflection angle has residual dispersion.
Summary of the invention
The technical problems to be solved by the present invention are: in view of the drawbacks of the prior art or improve improve, one kind is provided and is based on
The dispersion compensation device of diffraction lens, can only null grating particular diffraction order or grating constant to solve current dispersion compensation device
Chromatic dispersion problem, using the confocal system being made of diffraction lens group and achromatism balsaming lens group, while compensating different diffraction
The angle dispersion at angle.
The present invention solves its technical problem, and the following technical solution is employed:
Dispersion compensation device provided by the invention based on diffraction lens is by the sequentially connected optical element of optical path, spreads out
Penetrate lens, achromatism balsaming lens group and micro objective composition.
The diffraction lens and achromatism balsaming lens group, forms confocal system, which realizes tune simultaneously
It saves optical path and compensates the effect of dispersion, residual dispersion is fully compensated.
The diffraction lens and achromatism balsaming lens group, is front lens group, rear lens group respectively, two lens groups away from
From for the sum of its focal length, wherein the focal length of diffraction lens is the focal length of lens of center wavelength.
The focal length of the front lens group is f1, the focal length of rear lens group is f2, then:
The focal length of front lens group and the relationship of wavelength are as follows:
The focal distance ratio of front and back lens group are as follows:
In formula: f0For corresponding to central wavelength lambda0Lens group focal length value, λ is optical wavelength.
The diffraction lens group is front lens group, is made of binary diffractive optic face and common plane.
The binary diffractive optic face is that one kind produces embossment phase band structure formation one on common plane
Phase diffractive face, for constituting the diffraction lens of a certain fixed focal length, providing focusing and introducing dispersion.
The achromatism balsaming lens group, be rear lens group, be made of two panels or the common achromatic lens of multi-disc, for and
Diffraction lens constitutes confocal system, and provides the lens of a fixed focal length, and making light beam is still parallel after dispersion compensation
Light.
The achromatism balsaming lens group is double achromatism balsaming lens, and there are three sphericals, in which: the first ball
Shape face is concave surface, divergent beams is used for, by the focal length size for determining the balsaming lens together with third spherical；Second is spherical
Face is cemented surface, and convex surface for the lens of glued two different materials, while decide the size for eliminating color difference；Third is spherical
Face is convex surface, is used for converging beam, it is ensured that the balsaming lens is a positive lens.
The above-mentioned dispersion compensation device based on diffraction lens provided by the invention, in the optical component for introducing dispersion
In compensate or acousto-optic deflection device scanning dispersion in the application that compensates.
The dispersion compensation device based on diffraction lens in application, can the different dispersions to different angle of diffraction carry out simultaneously
Compensation, can also compensate different angle of diffraction in dynamic dispersion compensation optical path；When compensation, which compensates needs
Optical element is placed in the front focal plane of confocal system front lens, compensates the dispersion of the optical element.
The present invention has the following main features compared with prior art:
1. using a kind of confocal system being made of binary diffractive optic lens group and common achromatic lens group, Ke Yitong
Shi Shixian adjusts optical path and compensates the effect of dispersion.
2. can be used for the compensation of acousto-optic deflection device scanning dispersion.In acousto-optic deflection device scanning light beam, prism offset is used
After repaying dispersion, the different scanning angles of emergence possesses different angle dispersions, can compensate simultaneously difference using the confocal system and sweep
Retouch the dispersion at angle.It is 6.7nm when scanning spectrum width using the acousto-optic deflection device that operating frequency range is 40MHZ to 100MHZ range,
When central wavelength is the light beam of 840nm, different operating frequency scanning light beam generates different angle dispersions, and maximum angle dispersion is
0.3mrad.After the dispersion compensation transposition, the available compensation of angle dispersion.
Detailed description of the invention
Fig. 1 is the optical path-tracing schematic diagram in binary diffractive optic face.
Fig. 2 is dispersion compensation device schematic diagram belonging to the present invention.
Fig. 3 is the structural schematic diagram of diffraction lens group.
Fig. 4 is the left view enlarged drawing of Fig. 3.
Fig. 5 is the structural schematic diagram of achromatism balsaming lens group, using cemented doublet as representing in Fig. 5.
In figure: 1. binary diffractive optic faces, 2. diffraction lens groups, 3. achromatism balsaming lens groups, 4. micro objectives, 5.
Optical element, 6. common planes, 7. first sphericals, 8. second sphericals, 9. third sphericals.
Specific embodiment
Dispersion compensation device provided by the invention based on diffraction lens is special using the dispersion of binary diffractive optic lens
Property designs.The dispersion diffractive optical element that light beam be can solve by grating or similar grating is normal in different diffraction times or grating
When number, the problem of light beam dispersion cannot compensate simultaneously.The device is used by binary diffractive optic lens group and common achromatism
The confocal system of lens group composition, can be realized simultaneously the effect for adjusting optical path and compensating dispersion.The device can be also used for sound
The compensation of light deflector scanning dispersion.
Below with reference to examples and drawings, the present invention will be further described, but is not limited to content described below.
Dispersion compensation device provided by the invention based on diffraction lens, as shown in Fig. 2, by the sequentially connected grating of optical path
Or optical element 5, diffraction lens 2, achromatism balsaming lens group 3 and the micro objective 4 of similar grating form, in which: diffraction
Lens 2 and achromatism balsaming lens group 3 form confocal system, which, which can be realized simultaneously, adjusts optical path and compensation dispersion
Effect, to residual dispersion be fully compensated.
The diffraction lens group 2 is front lens group, as shown in Figure 3 and Figure 4, can be by binary diffractive optic face 1 and general
Logical plane 6 is constituted, in which: binary diffractive optic face 1 is a kind of to produce embossment phase band structure on common plane and formed
One phase diffractive face, for constituting the diffraction lens of a certain fixed focal length, providing focusing and introducing dispersion；Common plane 6 is used
In constituting diffraction lens, the diffraction lens can be made to be a pure phase diffractive lens using common plane rather than roll over the lens that spread out,
Determine that the focal length of the diffraction lens by diffraction surfaces completely.
The achromatism balsaming lens group 3 is rear lens group, belongs to refractor, can be common by two panels or multi-disc
Achromatic lens are constituted, which is used for and diffraction lens constitutes confocal system, are provided the lens of a fixed focal length, are made light
Beam is still directional light after dispersion compensation.The common achromatic lens are to guarantee not introducing excessive color difference when in use.
Using double achromatism balsaming lens as example, illustrate the structure of achromatism balsaming lens group 3, as shown in figure 5, there are three
Spherical, in which: the first spherical 7 is concave surface, can be used for divergent beams, by determining the glue together with third spherical 9
Close the focal length size of lens；Second spherical 8 is cemented surface, and convex surface can be used for the lens of glued two different materials, simultaneously
Decide the size for eliminating color difference；Third spherical 9 is convex surface, is used for converging beam, it is ensured that balsaming lens is a positive lens.
The distance of above-mentioned two lens group is the sum of front lens group and the focal length of rear lens group, during front lens group focal length is here
The long focal length of lens of cardiac wave, in which:
The focal length of front lens group and the relationship of wavelength are as follows:
The focal distance ratio of front and back lens group are as follows:
In formula: f1For the focal length of front lens group, f2For the focal length of rear lens group, f0For corresponding to central wavelength lambda0Lens
Group focal length value, λ is optical wavelength.
The optical element 5 is the optical element of grating or similar grating, can be using changeable grating constant
Dynamic raster, the light beam for introducing different angle possess different dispersions.
The confocal system being made of diffraction lens group and achromatism balsaming lens group that the present invention uses, can be to grating not
The dispersion of the angle of diffraction of same grating constant or diffraction time compensates simultaneously.It is different using the chief ray of zero dispersion light beam as optical axis
The angle of diffraction of grating constant or diffraction time enters confocal system with different incidence angles, and different incidence angles possesses different angles
Dispersion.In confocal system, due to binary diffractive optic lens, confocal system causes the characteristic of dispersion to be also different light beam
Incidence angle introduces different angle dispersions, just similar to the dispersion profile characteristic to be compensated, and residual dispersion can be fully compensated.
Dispersion compensation device provided by the invention based on diffraction lens, the optical component for being directed to similar grating draw
The dispersion entered compensates, and can compensate the different dispersions of different angle of diffraction simultaneously.Wherein, when acousto-optic deflection device is used to scan,
Change the angle of diffraction by changing grating constant, which can be fully compensated the dispersion of acousto-optic deflection device.
Dispersion compensation device provided by the invention based on diffraction lens, for spreading out in dynamic dispersion compensation optical path to difference
Firing angle compensates, as shown in Fig. 2, the front focal plane that the dispersion element compensated will be needed to be placed in confocal system front lens, color
Dissipate the available compensation of dispersion of element.Its operation principle and process is as follows:
A branch of light beam for having certain broadband passes through a binary diffractive optic face, such as Fig. 1.λ0For center wavelength, m is diffraction
Grade,For the phase parameter in binary optical face, optical path difference is Δ F.Two kinds of different wave length λ1And λ2The optical path difference of light are as follows:
From above formula, it can be seen that can be compensated by the phase parameter in control binary diffractive optic face by material and other originals
Because of the dispersion of introducing, and compensation ability then depends on the size of phase parameter, in the range of this is discussed, can use light
The method of trace carries out Chromatically compensated design to binary optical device, to carry out dispersion compensation design.
Phase function representation in rotational symmetry binary diffractive optic face are as follows:
Above formula r is radial coordinate, AλAnd GλFor quadratic phase coefficient and four phase coefficients.
The focal length of diffraction lens and the wavelength of incident light are related, and different wavelengths of light has different diffraction lens focal lengths:
F in formula0For corresponding to central wavelength lambda0Focal length of lens value.
When a branch of directional light is after confocal system, the ratio of angular dimension is the focal distance ratio of former and later two lens.
θ in formula1And θ2For the angular dimension of light beam incidence and outgoing confocal system.From the above equation, we can see that light beam passes through confocal system
After system, the size of the angle of emergence is related with wavelength, introduces dispersion, dispersion size are as follows:
Light beam is after the dispersion compensation device based on diffraction lens, beam exit angle, θ2Change by following formula meter
It calculates:
In formula: θ1And θ2For the angular dimension of light beam incidence and outgoing confocal system.f1With f2It is saturating for first group of confocal system
The focal length of mirror and second group of lens.
The dispersion of the diffraction lens group 2 is related with the wavelength of incident light, and different wavelengths of light has different diffraction lens burnt
Away from diffraction lens is the front lens of confocal system, the focal length of lens are as follows:
In formula: f0For corresponding to central wavelength lambda0Focal length of lens value.Light beam passes through diffraction lens and achromatic lens group group
At confocal system angular dimension change are as follows:
The size of the angle of emergence is related with wavelength, introduces dispersion, dispersion size are as follows:
Confocal system causes the characteristic of dispersion to be different incidence angle light beam and introduces different angle dispersions.
When the very little of optical grating diffraction angle, light beam enter grating incidence angle be 0 when, the angle of diffraction may be expressed as:
In formula: m is diffraction time, and d is grating constant.
Grating diffration angle size is equal to the incidence angle that light beam enters confocal system:
The angle of emergence of the light beam after grating and confocal system are as follows:
By discussed above, light beam generates dispersion after grating, after confocal system, the shooting angle and wavelength of light beam
Unrelated i.e. dispersion is compensated, while in multiple diffraction times or grating constant, and dispersion can also be compensated simultaneously.In addition to completing
Dispersion compensation, confocal system also correspond to a relaying optical path, adjustable optical path, by light path imaging in the place of needs and
Light beam is expanded.
Wavelength spectrum width is 7nm, and central wavelength is the light beam of 840nm, angle dispersion is generated after grating, grating constant is
Arbitrary constant between 10um to 50um, after the optical path of Fig. 2, dispersion can be obtained well for the angle dispersion that light beam generates
Compensation.When the front lens group focal length of the diffraction lens 2 in Fig. 2 is 225mm, the focal length of achromatism balsaming lens group 3 is 180mm
When, micro objective 4 is 40 times of object lens (NA=0.8), focal length 4.5mm.The spot radius of non-dispersion compensating is 2u, is passed through
Spot radius is less than 0.7um after the dispersion compensation device compensates dispersion.
Claims (8)
1. the dispersion compensation device based on diffraction lens, it is characterized in that by the sequentially connected optical element of optical path (5), diffraction lens
Group (2), achromatism balsaming lens group (3) and micro objective (4) composition；The diffraction lens (2) and achromatism are glued thoroughly
Microscope group (3), is front lens group, rear lens group respectively, the distance of two lens groups is the sum of its focal length, wherein diffraction lens (2)
Focal length is the focal length of lens of center wavelength, and diffraction lens group (2) is made of binary diffractive optic face (1) and common plane (6).
2. the dispersion compensation device according to claim 1 based on diffraction lens, it is characterised in that the diffraction lens
Group (2) and achromatism balsaming lens group (3) form confocal system, which realizes simultaneously adjusts optical path and compensate dispersion
Residual dispersion is fully compensated in effect.
3. the dispersion compensation device according to claim 1 based on diffraction lens, it is characterised in that the front lens group
Focal length be f1, the focal length of rear lens group is f2, then:
The focal length of front lens group and the relationship of wavelength are as follows:
The focal distance ratio of front and back lens group are as follows:
In formula: being optical wavelength for the lens group focal length value corresponding to central wavelength.
4. the dispersion compensation device according to claim 1 based on diffraction lens, it is characterised in that the binary optical
Diffraction surfaces (1) are that one kind produces one phase diffractive face of embossment phase band structure formation on common plane, for constituting
The diffraction lens of a certain fixed focal length provides focusing and introduces dispersion.
5. the dispersion compensation device according to claim 1 based on diffraction lens, it is characterised in that the achromatism glue
It closes lens group (3), is rear lens group, is made of two panels or the common achromatic lens of multi-disc, for being constituted altogether with diffraction lens group (2)
Burnt system provides the lens of a fixed focal length, and making light beam is still directional light after dispersion compensation.
6. the dispersion compensation device according to claim 5 based on diffraction lens, it is characterised in that the achromatism glue
It closes lens group (3), is double achromatism balsaming lens, there are three sphericals, in which: the first spherical (7) is concave surface, for sending out
Spreading beam, by the focal length size for determining the balsaming lens together with third spherical (9)；Second spherical (8) is cemented surface,
Convex surface for the lens of glued two different materials, while decide the size for eliminating color difference；Third spherical (9) is convex surface,
For converging beam, it is ensured that the balsaming lens is a positive lens.
7. according to claim 1 to the application of any dispersion compensation device based on diffraction lens in 6, it is characterized in that the dress
Set the dispersion that optical element (5) introduce compensate or acousto-optic deflection device scanning dispersion in the application that compensates.
8. the application of the dispersion compensation device based on diffraction lens according to claim 7, it is characterized in that in application, to difference
The different dispersions of the angle of diffraction compensate simultaneously, compensate in dynamic dispersion compensation optical path to different angle of diffraction；When compensation,
The front focal plane that the device will need the optical element compensated to be placed in confocal system front lens, obtains the dispersion of the optical element
To compensation.
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| JP2020514809A (en) * | 2017-08-24 | 2020-05-21 | 艶 馮 | Four-dimensional multi-plane broadband imaging system based on non-reentrant second-order distorted (NRQD) grating and grating prism |
| JP7309728B2 (en) * | 2018-01-15 | 2023-07-18 | ライカ マイクロシステムズ シーエムエス ゲゼルシャフト ミット ベシュレンクテル ハフツング | Acousto-optic device and method |
| CN110515215B (en) * | 2019-09-27 | 2024-03-12 | 深圳惠牛科技有限公司 | Ultrathin optical module and ultrathin display device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1560703A (en) * | 2004-03-04 | 2005-01-05 | 中国科学院上海光学精密机械研究所 | High resolution femtosecond holographic device |
| CN101191842A (en) * | 2006-11-22 | 2008-06-04 | 日立麦克赛尔株式会社 | Coupling lens and optical pickup device |
| CN105589209A (en) * | 2016-03-22 | 2016-05-18 | 武汉理工大学 | Dispersion compensation device |
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| CN103235405B (en) * | 2008-04-11 | 2015-07-01 | 株式会社尼康 | Microscope objective lens |
| CN102959451B (en) * | 2010-08-25 | 2015-06-24 | 株式会社尼康 | Microscope optical assembly and microscope system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1560703A (en) * | 2004-03-04 | 2005-01-05 | 中国科学院上海光学精密机械研究所 | High resolution femtosecond holographic device |
| CN101191842A (en) * | 2006-11-22 | 2008-06-04 | 日立麦克赛尔株式会社 | Coupling lens and optical pickup device |
| CN105589209A (en) * | 2016-03-22 | 2016-05-18 | 武汉理工大学 | Dispersion compensation device |
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