CN105846308A - Spectrum synthesis device and method based on 45-degree incident dichroscope - Google Patents
Spectrum synthesis device and method based on 45-degree incident dichroscope Download PDFInfo
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- CN105846308A CN105846308A CN201610374132.XA CN201610374132A CN105846308A CN 105846308 A CN105846308 A CN 105846308A CN 201610374132 A CN201610374132 A CN 201610374132A CN 105846308 A CN105846308 A CN 105846308A
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Abstract
本发明公开了一种基于二向色镜45°入射的光谱合成装置及方法,四个光纤激光器同时发出激光,其中第一光纤激光器发出的激光经第一截止滤光片反射,第二光纤激光器发出的激光经第一截止滤光片透射,透射光与反射光合为一束射入第二截止滤光片,经第二截止滤光片反射,第三激光纤激光器发出的激光经第二截止滤光片透射,所述透射光和发射光合为一束,射入第三截止滤光片,经第三截止滤光片反射,同时第四光纤激光器发出的激光经第三截止滤光片透射,所述透射光和反射光合为一束出射。本发明通过对4个6kW光纤激光器进行合束,获得了超过20kW的激光输出,由于截止滤光片工作角度为45°使得整体装置结构简单、紧凑、合束效率高、光束质量及稳定性好。
The invention discloses a spectrum synthesis device and method based on a 45° incidence of a dichroic mirror. Four fiber lasers emit laser light at the same time, wherein the laser light emitted by the first fiber laser is reflected by the first cut-off filter, and the second fiber laser emits laser light. The emitted laser light is transmitted through the first cut-off filter, the transmitted light and the reflected light are combined into one beam and injected into the second cut-off filter, reflected by the second cut-off filter, and the laser emitted by the third laser fiber laser passes through the second cut-off filter. Filter transmission, the transmitted light and the emitted light are combined into one beam, which enters the third cut-off filter and is reflected by the third cut-off filter, while the laser light emitted by the fourth fiber laser is transmitted through the third cut-off filter , the transmitted light and reflected light are combined into one beam and emitted. The present invention obtains a laser output of more than 20kW by combining four 6kW fiber lasers. Since the working angle of the cut-off filter is 45°, the overall device has a simple and compact structure, high beam combining efficiency, and good beam quality and stability. .
Description
技术领域 technical field
本发明涉及强激光合束领域,具体涉及一种基于二向色镜45°入射的光谱合成装置及方法。 The invention relates to the field of strong laser beam combining, in particular to a spectrum combining device and method based on a 45° incident dichroic mirror.
背景技术 Background technique
中国专利CN201310579762.7提出了一种《基于体布拉格光栅的光谱合束万瓦级光纤激光器》,通过使用体布拉格光栅对五束光纤激光进行有效合束,实现合束万瓦级激光功率输出。 Chinese patent CN201310579762.7 proposes a "spectral beam combining 10,000-watt fiber laser based on volume Bragg grating", which effectively combines five fiber laser beams by using a volume Bragg grating to achieve beam-combining 10,000-watt laser power output.
中国专利CN201510181571.4也提出了《一种多波长合束系统和方法》,通过激光器阵列、透镜组、和色散元件的相互配合,实现对多束不同波长的激光的合束,但它们所采用的合束元件均为光栅,与截止滤光片相比,光栅功率阈值较低,且对位置公差较敏感。同时,随着入射激光功率的增大,激光光谱会逐渐展宽,这将导致合束后的光束质量变差。 Chinese patent CN201510181571.4 also proposes "A Multi-Wavelength Beam Combining System and Method". Through the mutual cooperation of laser arrays, lens groups, and dispersive elements, the beam combining of multiple laser beams with different wavelengths is realized, but they use The beamcombining elements are all gratings, which have a lower power threshold and are more sensitive to positional tolerances than cut-off filters. At the same time, as the incident laser power increases, the laser spectrum will gradually broaden, which will lead to the deterioration of the combined beam quality.
发明内容 Contents of the invention
本发明的目的在于提供一种基于二向色镜45°入射的光谱合成装置及方法,对位置公差不敏感,系统稳定,且功率阈值较高,可以达到24kW的功率输出,同时由于滤光片光谱曲线陡直度较高,使得激光光谱展宽对合束后的光束质量影响不大。 The object of the present invention is to provide a spectral synthesis device and method based on dichroic mirror 45° incidence, which is not sensitive to position tolerance, the system is stable, and the power threshold is high, which can reach a power output of 24kW. The steepness of the spectral curve is high, so that the broadening of the laser spectrum has little effect on the quality of the combined beam.
实现本发明目的的技术解决方案为:一种基于二向色镜45°入射的光谱合成装置,包括第一光纤激光器、第二光纤激光器、第三激光纤激光器、第四光纤激光器、第一截止滤光片、第二截止滤光片和第三截止滤光片,第一光纤激光器和第三激光纤激光器发出的激光平行,第二光纤激光器和第四光纤激光器发出的激光平行,且第二光纤激光器和第四光纤激光器发出的激光分别与第一光纤激光器和第三激光纤激光器发出的激光垂直;第一截止滤光片位于第一光纤激光器和第二光纤激光器发出激光的交界处,第二截止滤光片位于第二光纤激光器和第三激光纤激光器发出激光的交界处,第三截止滤光片位于第三激光纤激光器和第四光纤激光器发出激光的交界处。 The technical solution to realize the object of the present invention is: a kind of spectrum synthesis device based on dichroic mirror 45° incidence, including the first fiber laser, the second fiber laser, the third laser fiber laser, the fourth fiber laser, the first cut-off filter, the second cut-off filter and the third cut-off filter, the lasers emitted by the first fiber laser and the third fiber laser are parallel, the lasers emitted by the second fiber laser and the fourth fiber laser are parallel, and the second The lasers emitted by the fiber laser and the fourth fiber laser are perpendicular to the lasers emitted by the first fiber laser and the third fiber laser respectively; the first cut-off filter is located at the intersection of the first fiber laser and the second fiber laser. The second cutoff filter is located at the intersection of the second fiber laser and the third fiber laser emitting laser light, and the third cutoff filter is located at the junction of the third fiber laser and the fourth fiber laser emission.
第一光纤激光器、第二光纤激光器、第三激光纤激光器、第四光纤激光器同时发出激光,其中第一光纤激光器发出的激光经第一截止滤光片反射,第二光纤激光器发出的激光经第一截止滤光片透射,透射光与反射光合为一束射入第二截止滤光片,经第二截止滤光片反射,第三激光纤激光器发出的激光经第二截止滤光片透射,所述透射光和发射光合为一束,射入第三截止滤光片,经第三截止滤光片反射,同时第四光纤激光器发出的激光经第三截止滤光片透射,所述透射光和反射光合为一束出射,即将四束激光合束。 The first fiber laser, the second fiber laser, the third fiber laser, and the fourth fiber laser simultaneously emit laser light, wherein the laser light emitted by the first fiber laser is reflected by the first cut-off filter, and the laser light emitted by the second fiber laser passes through the second fiber laser. The first cut-off filter transmits, the transmitted light and the reflected light are combined into one beam and enter the second cut-off filter, reflected by the second cut-off filter, and the laser emitted by the third laser fiber laser is transmitted through the second cut-off filter. The transmitted light and emitted light are combined into one beam, injected into the third cut-off filter, reflected by the third cut-off filter, while the laser light emitted by the fourth fiber laser is transmitted through the third cut-off filter, and the transmitted light Combining the reflected light and the reflected light into one beam, that is, combining the four beams of laser light.
一种采用基于二向色镜45°入射的光谱合成装置的光谱合成方法,方法如下: A method for spectral synthesis using a spectral synthesis device based on a dichroic mirror 45 ° of incidence, the method is as follows:
第一光纤激光器、第二光纤激光器、第三激光纤激光器、第四光纤激光器同时发出激光,其中第一光纤激光器发出的激光经第一截止滤光片反射,第二光纤激光器发出的激光经第一截止滤光片透射,透射光与反射光合为一束射入第二截止滤光片,经第二截止滤光片反射,第三激光纤激光器发出的激光经第二截止滤光片透射,所述透射光和发射光合为一束,射入第三截止滤光片,经第三截止滤光片反射,同时第四光纤激光器发出的激光经第三截止滤光片透射,所述透射光和反射光合为一束出射,即将四束激光合束。 The first fiber laser, the second fiber laser, the third fiber laser, and the fourth fiber laser simultaneously emit laser light, wherein the laser light emitted by the first fiber laser is reflected by the first cut-off filter, and the laser light emitted by the second fiber laser passes through the second fiber laser. The first cut-off filter transmits, the transmitted light and the reflected light are combined into one beam and enter the second cut-off filter, reflected by the second cut-off filter, and the laser emitted by the third laser fiber laser is transmitted through the second cut-off filter. The transmitted light and emitted light are combined into one beam, injected into the third cut-off filter, reflected by the third cut-off filter, while the laser light emitted by the fourth fiber laser is transmitted through the third cut-off filter, and the transmitted light Combining the reflected light and the reflected light into one beam, that is, combining the four beams of laser light.
本发明与现有技术相比,其显著优点在于:通过对4个6kW光纤激光器进行合束,获得了超过20kW的激光输出,由于截止滤光片工作角度为45°使得整体装置结构简单、紧凑、合束效率高、光束质量及稳定性好。 Compared with the prior art, the present invention has the remarkable advantages that: by combining four 6kW fiber lasers, a laser output exceeding 20kW is obtained, and the structure of the overall device is simple and compact because the working angle of the cut-off filter is 45° , High beam combining efficiency, good beam quality and stability.
附图说明 Description of drawings
图1为本发明基于二向色镜45°入射的光谱合成装置的结构示意图 Fig. 1 is the structural schematic diagram of the spectral synthesis device based on the dichroic mirror 45 ° of incidence of the present invention
具体实施方式 detailed description
下面结合附图对本发明作进一步详细描述。 The present invention will be described in further detail below in conjunction with the accompanying drawings.
结合图1,一种基于二向色镜45°入射的光谱合成装置,包括第一光纤激光器1、第二光纤激光器2、第三激光纤激光器3、第四光纤激光器4、第一截止滤光片5、第二截止滤光片6和第三截止滤光片7,第一光纤激光器1和第三激光纤激光器3发出的激光平行,第二光纤激光器2和第四光纤激光器4发出的激光平行,且第二光纤激光器2和第四光纤激光器4发出的激光分别与第一光纤激光器1和第三激光纤激光器3发出的激光垂直;第一截止滤光片5位于第一光纤激光器1和第二光纤激光器2发出激光的交界处,第二截止滤光片6位于第二光纤激光器2和第三激光纤激光器3发出激光的交界处,第三截止滤光片7位于第三激光纤激光器3和第四光纤激光器4发出激光的交界处。 In conjunction with Figure 1, a spectral synthesis device based on a dichroic mirror at 45° incidence, including a first fiber laser 1, a second fiber laser 2, a third fiber laser 3, a fourth fiber laser 4, a first cut-off filter sheet 5, the second cut-off filter 6 and the third cut-off filter 7, the lasers emitted by the first fiber laser 1 and the third fiber laser 3 are parallel, the lasers emitted by the second fiber laser 2 and the fourth fiber laser 4 parallel, and the laser light emitted by the second fiber laser 2 and the fourth fiber laser 4 is perpendicular to the laser light emitted by the first fiber laser 1 and the third fiber laser 3 respectively; the first cut-off filter 5 is located between the first fiber laser 1 and the The junction where the second fiber laser 2 emits laser light, the second cut-off filter 6 is located at the junction where the second fiber laser 2 and the third fiber laser 3 emit laser light, and the third cut-off filter 7 is located at the third fiber laser 3 and the fourth fiber laser 4 emit laser light at the junction.
第一光纤激光器1、第二光纤激光器2、第三激光纤激光器3、第四光纤激光器4同时发出激光,其中第一光纤激光器1发出的激光经第一截止滤光片5反射,第二光纤激光器2发出的激光经第一截止滤光片5透射,透射光与反射光合为一束射入第二截止滤光片6,经第二截止滤光片6反射,第三激光纤激光器3发出的激光经第二截止滤光片6透射,所述透射光和发射光合为一束,射入第三截止滤光片7,经第三截止滤光片7反射,同时第四光纤激光器4发出的激光经第三截止滤光片7透射,所述透射光和反射光合为一束出射,即将四束激光合束。 The first fiber laser 1, the second fiber laser 2, the third fiber laser 3, and the fourth fiber laser 4 simultaneously emit laser light, wherein the laser light emitted by the first fiber laser 1 is reflected by the first cut-off filter 5, and the second fiber laser The laser light emitted by the laser 2 is transmitted through the first cut-off filter 5, the transmitted light and the reflected light are combined into a beam and injected into the second cut-off filter 6, reflected by the second cut-off filter 6, and the third laser fiber laser 3 emits The laser light is transmitted through the second cut-off filter 6, the transmitted light and the emitted light are combined into one beam, injected into the third cut-off filter 7, reflected by the third cut-off filter 7, and the fourth fiber laser 4 emits The laser light is transmitted through the third cut-off filter 7, and the transmitted light and reflected light are combined into one beam and emitted, that is, the four laser beams are combined.
所述第一截止滤光片5与第一光纤激光器1发出的激光所呈的夹角为45°;第二截止滤光片6与第三激光纤激光器3发出的激光所呈的夹角为45°;第三截止滤光片7与第三激光纤激光器3发出的激光所呈的夹角为45°。 The included angle between the first cut-off filter 5 and the laser emitted by the first fiber laser 1 is 45°; the included angle between the second cut-off filter 6 and the laser emitted by the third fiber laser 3 is 45°; the included angle between the third cut-off filter 7 and the laser light emitted by the third laser fiber laser 3 is 45°.
所述第一光纤激光器1、第二光纤激光器2、第三激光纤激光器3和第四光纤激光器4均为掺镱光纤激光器,中心波长λ介于1.06-1.1μm之间,20dB线宽小于23nm,激光束准直输出,可连续输出6kW平均功率。 The first fiber laser 1, the second fiber laser 2, the third fiber laser 3 and the fourth fiber laser 4 are all ytterbium-doped fiber lasers, the central wavelength λ is between 1.06-1.1 μm, and the 20dB linewidth is less than 23nm , Laser beam collimated output, continuous output 6kW average power.
四台光纤激光器的中心波长λ1,λ2,λ3,λ4等间隔,波长间距大于7nm。 The center wavelengths λ 1 , λ 2 , λ 3 , and λ 4 of the four fiber lasers are equally spaced, and the wavelength spacing is greater than 7nm.
所述第一截止滤光片5直径为50mm,宽度为10mm,第一截止滤光片5对第一光纤激光器1发出的激光高反,反射率大于99.9%,对第二光纤激光器2发出的激光高透,透射率大于98%,透射率从0.1%到98%的带宽小于9nm。 The diameter of the first cut-off filter 5 is 50 mm, and the width is 10 mm. The first cut-off filter 5 is highly reflective to the laser light emitted by the first fiber laser 1, and the reflectivity is greater than 99.9%. The laser is highly transparent, the transmittance is greater than 98%, and the bandwidth from 0.1% to 98% of the transmittance is less than 9nm.
所述第二截止滤光片6直径为50mm,宽度为10mm,第二截止滤光片6对第一光纤激光器1发出的激光和第二光纤激光器2发出的激光高反,反射率大于99.9%,对第三激光纤激光器3发出的激光高透,透射率大于98%,透射率从0.1%到98%的带宽小于9nm。 The diameter of the second cut-off filter 6 is 50 mm, and the width is 10 mm. The second cut-off filter 6 is highly reflective to the laser light emitted by the first fiber laser 1 and the laser light emitted by the second fiber laser 2, and the reflectivity is greater than 99.9%. , the laser light emitted by the third laser fiber laser 3 is highly transparent, the transmittance is greater than 98%, and the bandwidth from 0.1% to 98% of the transmittance is less than 9nm.
所述第三截止滤光片7直径为50mm,宽度为10mm,第三截止滤光片7对第一光纤激光器1、第二光纤激光器2和第三激光纤激光器3发出的激光高反,反射率大于99.9%,对第四光纤激光器4发出的激光高透,透射率大于98%,透射率从0.1%到98%的带宽小于9nm。 The third cut-off filter 7 has a diameter of 50 mm and a width of 10 mm. The third cut-off filter 7 is highly reflective to the laser light emitted by the first fiber laser 1, the second fiber laser 2 and the third laser fiber laser 3. The transmission rate is greater than 99.9%, and the laser light emitted by the fourth fiber laser 4 is highly transparent, the transmittance is greater than 98%, and the bandwidth from 0.1% to 98% of the transmittance is less than 9nm.
所述第一截止滤光片5、第二截止滤光片6和第三截止滤光片7的功率阈值均大于24kW。 The power thresholds of the first cut-off filter 5 , the second cut-off filter 6 and the third cut-off filter 7 are all greater than 24kW.
一种采用基于二向色镜45°入射的光谱合成装置的光谱合成方法,方法如下: A method for spectral synthesis using a spectral synthesis device based on a dichroic mirror 45 ° of incidence, the method is as follows:
第一光纤激光器1、第二光纤激光器2、第三激光纤激光器3、第四光纤激光器4同时发出激光,其中第一光纤激光器1发出的激光经第一截止滤光片5反射,第二光纤激光器2发出的激光经第一截止滤光片5透射,透射光与反射光合为一束射入第二截止滤光片6,经第二截止滤光片6反射,第三激光纤激光器3发出的激光经第二截止滤光片6透射,所述透射光和发射光合为一束,射入第三截止滤光片7,经第三截止滤光片7反射,同时第四光纤激光器4发出的激光经第三截止滤光片7透射,所述透射光和反射光合为一束出射,即将四束激光合束。 The first fiber laser 1, the second fiber laser 2, the third fiber laser 3, and the fourth fiber laser 4 simultaneously emit laser light, wherein the laser light emitted by the first fiber laser 1 is reflected by the first cut-off filter 5, and the second fiber laser The laser light emitted by the laser 2 is transmitted through the first cut-off filter 5, the transmitted light and the reflected light are combined into a beam and injected into the second cut-off filter 6, reflected by the second cut-off filter 6, and the third laser fiber laser 3 emits The laser light is transmitted through the second cut-off filter 6, the transmitted light and the emitted light are combined into one beam, injected into the third cut-off filter 7, reflected by the third cut-off filter 7, and the fourth fiber laser 4 emits The laser light is transmitted through the third cut-off filter 7, and the transmitted light and reflected light are combined into one beam and emitted, that is, the four laser beams are combined.
所述第一截止滤光片5与第一光纤激光器1发出的激光所呈的夹角为45°;第二截止滤光片6与第三激光纤激光器3发出的激光所呈的夹角为45°;第三截止滤光片7与第三激光纤激光器3发出的激光所呈的夹角为45°。 The included angle between the first cut-off filter 5 and the laser emitted by the first fiber laser 1 is 45°; the included angle between the second cut-off filter 6 and the laser emitted by the third fiber laser 3 is 45°; the included angle between the third cut-off filter 7 and the laser light emitted by the third laser fiber laser 3 is 45°.
综上所述,本发明通过对4个6kW光纤激光器进行合束,获得了超过20kW的激光输出,由于截止滤光片工作角度为45°使得整体装置结构简单、紧凑、合束效率高、光束质量及稳定性好。 In summary, the present invention obtains a laser output exceeding 20kW by combining four 6kW fiber lasers. Since the working angle of the cut-off filter is 45°, the structure of the overall device is simple and compact, and the efficiency of combining beams is high. Good quality and stability.
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