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CN105845195B - A kind of transition metal oxide/graphene composite film and preparation method thereof - Google Patents

A kind of transition metal oxide/graphene composite film and preparation method thereof Download PDF

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CN105845195B
CN105845195B CN201610182599.4A CN201610182599A CN105845195B CN 105845195 B CN105845195 B CN 105845195B CN 201610182599 A CN201610182599 A CN 201610182599A CN 105845195 B CN105845195 B CN 105845195B
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刘阳桥
纪庆华
孙静
施良晶
王焱
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Shanghai Institute of Ceramics of CAS
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Abstract

本发明涉及一种过渡金属氧化物/石墨烯复合薄膜及其制备方法,将过渡金属醇盐用醇溶解稀释后旋涂在石墨烯表面对其进行掺杂,经过热处理,得到过渡金属氧化物/石墨烯复合薄膜,所述过渡金属氧化物/石墨烯复合薄膜包括石墨烯层和沉积于石墨烯层上的过渡金属氧化物层。本发明成本低廉、操作简便。掺杂处理后,石墨烯表面电阻显著下降,且可以在较长时间内保持稳定。掺杂处理之后石墨烯方阻能降低40~50%,并且表现出非常优异的稳定性和光透过率。本发明对拓展石墨烯透明导电薄膜应用具有重要意义。本发明制备的石墨烯薄膜可望在太阳能电池、触摸屏、电加热膜等领域得到广泛应用。

The invention relates to a transition metal oxide/graphene composite film and a preparation method thereof. After dissolving and diluting transition metal alkoxide with alcohol, it is spin-coated on the surface of graphene to dope it, and after heat treatment, transition metal oxide/graphene is obtained. A graphene composite film, the transition metal oxide/graphene composite film includes a graphene layer and a transition metal oxide layer deposited on the graphene layer. The invention has low cost and simple and convenient operation. After doping treatment, the surface resistance of graphene decreased significantly and remained stable for a long time. After the doping treatment, the square resistance of graphene can be reduced by 40-50%, and it shows very excellent stability and light transmittance. The invention has great significance for expanding the application of the graphene transparent conductive film. The graphene film prepared by the invention is expected to be widely used in the fields of solar cells, touch screens, electric heating films and the like.

Description

一种过渡金属氧化物/石墨烯复合薄膜及其制备方法A kind of transition metal oxide/graphene composite film and preparation method thereof

技术领域technical field

本发明涉及一种一种过渡金属氧化物/石墨烯复合薄膜的制备方法,属于薄膜材料技术领域。The invention relates to a preparation method of a transition metal oxide/graphene composite thin film, belonging to the technical field of thin film materials.

背景技术Background technique

具有优良导电性和透光性的透明导电薄膜被广泛应用到工业生产之中。至今为止,透明导电薄膜所使用的材料一直是ITO,但是ITO具有诸多缺点,例如ITO在酸碱环境之中并不稳定、在近红外光区域透过率不高、缺乏弹性和因为In资源缺乏而导致其日益上涨的价格。石墨烯具有极高的强度、化学稳定性、良好的柔性和导电性,使得石墨烯成为代替ITO制备透明导电薄膜的优良材料。Transparent conductive films with excellent conductivity and light transmission are widely used in industrial production. So far, the material used for transparent conductive films has been ITO, but ITO has many disadvantages, such as ITO is not stable in acid-base environment, low transmittance in the near-infrared region, lack of elasticity and lack of In resources. leading to its rising price. Graphene has extremely high strength, chemical stability, good flexibility and electrical conductivity, making graphene an excellent material to replace ITO to prepare transparent conductive films.

然而,现在基于CVD法制备的石墨烯依然存在大量的缺陷,导致了石墨烯的导电性依然不理想,即方阻较高(100-500Ω/□)在85%的透过率下,是ITO透明导电薄膜的十几倍,再加上由于石墨烯本身的性质零带隙,使其不能作为半导体应用。另外,石墨烯功函数比较低(4.2~4.6eV)使得其作为电极的竞争力较弱。这都是石墨烯在电子器件领域广泛应用的阻碍。例如,石墨烯如果要作为太阳能电池的阴极材料,电极的功函数最好在5.0eV左右,因此石墨烯为满足作为太阳能电池电极的需要就要调节导电性和功函数。However, there are still a large number of defects in the graphene prepared by CVD, which leads to the unsatisfactory conductivity of graphene, that is, the high square resistance (100-500Ω/□) and the transmittance of 85%, which is ITO More than ten times that of the transparent conductive film, plus the zero band gap due to the nature of graphene itself, it cannot be used as a semiconductor. In addition, the relatively low work function of graphene (4.2-4.6eV) makes it less competitive as an electrode. These are all obstacles to the widespread application of graphene in the field of electronic devices. For example, if graphene is to be used as a cathode material of a solar cell, the work function of the electrode is preferably around 5.0eV, so graphene needs to adjust the conductivity and work function to meet the needs of the solar cell electrode.

通过掺杂提高石墨烯载流子浓度,是提高其电导率的最有效方法之一。石墨烯的掺杂主要分为化学(替位)掺杂与表面物理掺杂。与化学掺杂不同,表面物理掺杂不会破坏石墨烯的六元环结构,而仅是借助掺杂剂与石墨烯功函数的差异,实现对石墨烯的载流子注入。因而表面物理掺杂可以在不降低载流子迁移率的条件下显著提高其载流子数目,显示出巨大的优势。目前已报道的石墨烯表面掺杂物质主要包括,有机分子(TFSA,DDQ,F4-TCNQ等)、无机盐类/酸(HNO3,AuCl3,SOCl2等)、金属微粒以及氧化性气体等(O2,NO2)。然而,无机酸、有机分子及气体掺杂剂等掺杂效果极不稳定,如HNO3掺杂的石墨烯电极在空气中放置480小时后,电阻增加90%。而金属微粒及AuCl3等则成本过高,很难大规模应用。Increasing the carrier concentration of graphene by doping is one of the most effective ways to increase its electrical conductivity. The doping of graphene is mainly divided into chemical (substitution) doping and surface physical doping. Different from chemical doping, surface physical doping will not destroy the six-membered ring structure of graphene, but only achieves carrier injection into graphene by virtue of the difference in work function between the dopant and graphene. Therefore, surface physical doping can significantly increase the number of carriers without reducing the carrier mobility, showing great advantages. The reported graphene surface doping substances mainly include organic molecules (TFSA, DDQ, F 4 -TCNQ, etc.), inorganic salts/acids (HNO 3 , AuCl 3 , SOCl 2 , etc.), metal particles, and oxidizing gases. etc. (O 2 , NO 2 ). However, the doping effects of inorganic acids, organic molecules, and gas dopants are extremely unstable. For example, the resistance of graphene electrodes doped with HNO3 increases by 90% after being placed in air for 480 hours. However, the cost of metal particles and AuCl 3 is too high, and it is difficult to apply them on a large scale.

发明内容Contents of the invention

针对已有的石墨烯掺杂方法成本高、掺杂后电阻不稳定的不足,本发明旨在提供一种过渡金属氧化物/石墨烯复合薄膜和一种简单方便、低成本掺杂石墨烯的方法,可以明显提高石墨烯导电性、并保证电阻在较长时间内保持稳定,从而解决石墨烯应用的瓶颈问题。Aiming at the shortcomings of the existing graphene doping methods, such as high cost and unstable resistance after doping, the present invention aims to provide a transition metal oxide/graphene composite thin film and a simple, convenient, and low-cost graphene-doped The method can significantly improve the conductivity of graphene and ensure that the resistance remains stable for a long time, thereby solving the bottleneck problem of graphene application.

为了解决上述问题,本发明提供了一种过渡金属氧化物/石墨烯复合薄膜,将过渡金属醇盐用醇溶解稀释后旋涂在石墨烯表面对其进行掺杂,经过热处理,得到过渡金属氧化物/石墨烯复合薄膜,所述过渡金属氧化物/石墨烯复合薄膜包括石墨烯层和沉积于石墨烯层上的过渡金属氧化物层。In order to solve the above problems, the present invention provides a transition metal oxide/graphene composite thin film, which dissolves and dilutes the transition metal alkoxide with alcohol and spin-coats it on the surface of graphene to dope it. After heat treatment, a transition metal oxide film is obtained. Object/graphene composite film, the transition metal oxide/graphene composite film includes a graphene layer and a transition metal oxide layer deposited on the graphene layer.

本发明将过渡金属醇盐用醇溶解稀释后,旋涂在石墨烯表面,最后经过热处理,得到过渡金属氧化物/石墨烯复合薄膜。本发明在薄膜制备过程中完成了过渡金属氧化物对石墨烯的掺杂,属于表面物理掺杂。当石墨烯表面旋涂过渡金属氧化物后,由于氧化物比石墨烯功函数高,二者界面处将产生能带弯曲,从而使电子由石墨烯注入到金属氧化物中,即石墨烯发生p型掺杂。与替位掺杂不同,过渡金属氧化物对石墨烯的掺杂不会破坏石墨烯的六元环结构,因而可以在不降低载流子迁移率的条件下显著提高石墨烯载流子数目,进而显著降低石墨烯的方阻,在提高石墨烯的导电性方面显示出巨大的优势。过渡金属氧化物的掺杂在保证一定光透过率的情况下显著提高石墨烯的功函数,降低石墨烯方阻,掺杂石墨烯功函数最大能够提高0.3eV以上,方阻最多可下降50%以上。In the invention, the transition metal alkoxide is dissolved and diluted with alcohol, spin-coated on the graphene surface, and finally heat-treated to obtain a transition metal oxide/graphene composite film. The present invention completes the doping of transition metal oxides on graphene during the film preparation process, which belongs to surface physical doping. When the surface of graphene is spin-coated with transition metal oxide, since the work function of the oxide is higher than that of graphene, the energy band bending will occur at the interface between the two, so that electrons are injected from graphene into the metal oxide, that is, graphene undergoes p type doping. Unlike substitutional doping, the doping of graphene with transition metal oxides will not destroy the six-membered ring structure of graphene, so the number of graphene carriers can be significantly increased without reducing the carrier mobility. In turn, the square resistance of graphene is significantly reduced, and it shows great advantages in improving the conductivity of graphene. The doping of transition metal oxides can significantly improve the work function of graphene and reduce the square resistance of graphene while ensuring a certain light transmittance. The work function of doped graphene can be increased by more than 0.3eV at most, and the square resistance can be reduced by up to 50 %above.

较佳地,所述过渡金属氧化物层的组成为金属Mo、V、W和Ni的氧化物中的至少一种,优选为金属V的氧化物。Preferably, the composition of the transition metal oxide layer is at least one of metal oxides of Mo, V, W and Ni, preferably metal V oxide.

较佳地,所述过渡金属氧化物层厚度为1nm~20nm,优选为10nm。Preferably, the thickness of the transition metal oxide layer is 1 nm to 20 nm, preferably 10 nm.

本发明还提供了一种过渡金属氧化物/石墨烯复合薄膜的制备方法,包括:The present invention also provides a preparation method of transition metal oxide/graphene composite film, comprising:

(1)将过渡金属醇盐溶液旋涂到石墨烯表面;(1) transition metal alkoxide solution is spin-coated onto the graphene surface;

(2)将(1)所得旋涂后石墨烯置于在空气气氛中在25℃~800℃下,优选100~500℃,煅烧0.5~24小时,优选1~5小时,得到过渡金属氧化物/石墨烯复合薄膜。(2) Place the spin-coated graphene obtained in (1) in an air atmosphere at 25°C to 800°C, preferably 100 to 500°C, and calcinate for 0.5 to 24 hours, preferably 1 to 5 hours, to obtain a transition metal oxide / graphene composite film.

较佳地,所述过渡金属醇盐为异丙醇盐,优选为异丙醇钼、异丙醇钨、异丙醇钒、异丙醇镍中的至少一种。Preferably, the transition metal alkoxide is isopropoxide, preferably at least one of molybdenum isopropoxide, tungsten isopropoxide, vanadium isopropoxide and nickel isopropoxide.

较佳地,所述过渡金属醇盐溶液的溶剂为乙醇、正丙醇、异丙醇、丙三醇、正丁醇、乙二醇中的至少一种。Preferably, the solvent of the transition metal alkoxide solution is at least one of ethanol, n-propanol, isopropanol, glycerol, n-butanol and ethylene glycol.

较佳地,所述醇盐溶液的浓度为大于0.001mol/L且在0.1mol/L以下,优选为0.001mol/L到0.016mol/L之间。Preferably, the concentration of the alkoxide solution is greater than 0.001 mol/L and below 0.1 mol/L, preferably between 0.001 mol/L and 0.016 mol/L.

较佳地,所述旋涂的旋涂速度为0到5000rpm之间,优选为1000到5000rpm之间。Preferably, the spin coating speed of the spin coating is between 0 and 5000 rpm, preferably between 1000 and 5000 rpm.

较佳地,所述煅烧的气氛为空气气氛。Preferably, the calcination atmosphere is air atmosphere.

本发明采用金属醇盐为原料,用旋涂法成膜,在空气中热处理,成本低廉、操作简便。掺杂处理后,石墨烯表面电阻显著下降,且可以在较长时间内保持稳定。掺杂处理之后石墨烯方阻能降低40~50%,并且表现出非常优异的稳定性和光透过率。本发明对拓展石墨烯透明导电薄膜应用具有重要意义。本发明制备的石墨烯薄膜可望在太阳能电池、触摸屏、电加热膜等领域得到广泛应用。The invention adopts metal alkoxide as raw material, forms film by spin coating method, heats treatment in air, has low cost and is easy to operate. After doping treatment, the surface resistance of graphene decreased significantly and remained stable for a long time. After the doping treatment, the square resistance of graphene can be reduced by 40-50%, and it shows very excellent stability and light transmittance. The invention has great significance for expanding the application of the graphene transparent conductive film. The graphene film prepared by the invention is expected to be widely used in the fields of solar cells, touch screens, electric heating films and the like.

附图说明Description of drawings

图1为实施例1中过渡金属氧化物/石墨烯复合薄膜的XRD衍射图谱;Fig. 1 is the XRD diffraction spectrum of transition metal oxide/graphene composite film in embodiment 1;

图2为实施例1中过渡金属氧化物/石墨烯复合薄膜的SEM照片;Fig. 2 is the SEM photo of transition metal oxide/graphene composite film in embodiment 1;

图3为实施例1中过渡金属氧化物/石墨烯复合薄膜的拉曼图谱;Fig. 3 is the Raman spectrum of transition metal oxide/graphene composite film in embodiment 1;

图4为实施例1中过渡金属氧化物/石墨烯复合薄膜的方阻随时间变化图;Fig. 4 is the change diagram of square resistance with time of transition metal oxide/graphene composite thin film in embodiment 1;

图5为实施例1中过渡金属氧化物/石墨烯复合薄膜在不同煅烧温度下的光透过率-波长曲线;Fig. 5 is the light transmittance-wavelength curve of transition metal oxide/graphene composite film at different calcination temperatures in embodiment 1;

图6为不同气氛下热处理获得的过渡金属氧化物/石墨烯复合薄膜的方阻变化趋势图;Fig. 6 is the change trend diagram of the square resistance of the transition metal oxide/graphene composite film obtained by heat treatment under different atmospheres;

图7为对比例1中不同物质掺杂所得复合薄膜的方阻下降百分比随热处理温度变化曲线(纵坐标负号表示方阻升高);Fig. 7 is the percentage decrease of the square resistance of the composite film obtained by doping with different substances in Comparative Example 1 as a function of the heat treatment temperature variation curve (the negative sign of the ordinate indicates that the square resistance increases);

图8为对比例2中所得复合薄膜的方阻下降百分比随异丙醇钒溶液浓度的变化曲线。Fig. 8 is a graph showing the percentage decrease of square resistance of the composite film obtained in Comparative Example 2 as a function of the concentration of the vanadium isopropoxide solution.

具体实施方式detailed description

以下结合附图和实施方式进一步说明本发明,应理解,下述实施方式仅用于说明本发明,而非限制本发明。The present invention will be further described below in conjunction with the accompanying drawings and embodiments. It should be understood that the following embodiments are only used to illustrate the present invention, not to limit the present invention.

本发明以过渡金属醇盐的醇溶液为原料,在石墨烯表面沉积成膜,在空气中热处理,得到过渡金属氧化物/石墨烯复合薄膜。本发明在薄膜制备过程中完成了过渡金属的掺杂,其中过渡金属氧化物层的组成为金属Mo、V、W和Ni的氧化物中的至少一种,优选为金属V的氧化物。金属V的氧化物降低石墨烯电阻的效果最好,能够降低石墨烯方阻达50%以上,并且能够提高石墨烯功函数0.3eV以上。The invention uses the alcohol solution of transition metal alkoxide as raw material, deposits film on the surface of graphene, heats in the air, and obtains transition metal oxide/graphene composite film. In the present invention, transition metal doping is completed in the film preparation process, wherein the composition of the transition metal oxide layer is at least one of metal Mo, V, W and Ni oxides, preferably metal V oxide. The metal V oxide has the best effect in reducing graphene resistance, can reduce graphene square resistance by more than 50%, and can increase graphene work function by more than 0.3eV.

以下示例的说明本发明提供的过渡金属氧化物/石墨烯复合薄膜的制备方法。The following examples illustrate the preparation method of the transition metal oxide/graphene composite film provided by the present invention.

将过渡金属醇盐溶液旋涂到石墨烯表面。本发明所述醇盐在石墨烯表面的沉积方法为旋涂法。因为该方法易于操作且能耗较低。Spin-coat the transition metal alkoxide solution onto the graphene surface. The deposition method of the alkoxide on the graphene surface of the present invention is a spin coating method. Because the method is easy to operate and consumes less energy.

上述过渡金属醇盐醇盐可为但不仅限于异丙醇盐,优选可为异丙醇钼、异丙醇钨、异丙醇钒、异丙醇镍中的至少一种。本发明选择过渡金属异丙醇盐因成本较低且易得。The aforementioned transition metal alkoxide may be but not limited to isopropoxide, preferably at least one of molybdenum isopropoxide, tungsten isopropoxide, vanadium isopropoxide and nickel isopropoxide. The present invention selects transition metal isopropoxide because of its low cost and easy availability.

上述用于溶解异丙醇盐的溶剂一般可为醇,其中醇包括但不限于乙醇、丙醇、异丙醇、丙三醇、正丁醇中的至少一种,优选为异丙醇。因为异丙醇价格低廉、且与石墨烯浸润性良好,成膜效果较好。The above-mentioned solvent for dissolving isopropoxide may generally be alcohol, wherein alcohol includes but not limited to at least one of ethanol, propanol, isopropanol, glycerol, n-butanol, preferably isopropanol. Because isopropanol is cheap and has good wettability with graphene, the film-forming effect is better.

上述过渡金属醇盐溶液的浓度大于0.001mol/L且为0.1mol/L以下,优选为介于0.001mol/L到0.016mol/L之间。浓度较高,成膜较厚,影响透过率;浓度较低,则掺杂效果不明显。The concentration of the transition metal alkoxide solution is greater than 0.001 mol/L and less than 0.1 mol/L, preferably between 0.001 mol/L and 0.016 mol/L. The higher the concentration, the thicker the film will affect the transmittance; the lower the concentration, the doping effect will not be obvious.

上述旋涂的旋涂速度介于0到5000rpm之间,优选介于1000到5000rpm之间。旋涂速度过高或过低,薄膜厚度都不理想。The spin coating speed of the above spin coating is between 0 to 5000 rpm, preferably between 1000 to 5000 rpm. If the spin coating speed is too high or too low, the film thickness is not ideal.

在石墨烯表面旋涂成膜后进行热处理得到过渡金属氧化物/石墨烯复合薄膜。The transition metal oxide/graphene composite thin film is obtained by heat treatment after the graphene surface is spin-coated to form a film.

上述热处理的温度介于25℃到800℃之间,优选为介于100℃到500℃之间。由于在热处理过程中,氧化物薄膜会继续发生化学或者物理变化。过低的温度,反应尚未进行,掺杂效果提升不明显,甚至会下降。温度过高,可能会破坏石墨烯薄膜导致掺杂石墨烯导电性变差。总之,即使在25-100℃温度下热处理,与未掺杂石墨烯相比,掺杂石墨烯薄膜的电阻仍能明显降低,因而本方法的成本更加低廉。The temperature of the heat treatment is between 25°C and 800°C, preferably between 100°C and 500°C. Due to the heat treatment process, the oxide film will continue to undergo chemical or physical changes. If the temperature is too low, the reaction has not yet progressed, and the doping effect is not significantly improved, or even decreased. If the temperature is too high, the graphene film may be destroyed, resulting in poor conductivity of doped graphene. In conclusion, even with heat treatment at 25-100°C, the electrical resistance of doped graphene films can be significantly reduced compared with undoped graphene, and thus the cost of this method is lower.

上述所述热处理的气氛可为空气。因为空气中的氧气会提高金属氧化物功函数,注入更多载流子到石墨烯之中,巩固掺杂效果。The atmosphere of the heat treatment mentioned above may be air. Because the oxygen in the air will increase the work function of the metal oxide, inject more carriers into the graphene, and consolidate the doping effect.

上述所述热处理的时间介于0.5小时到24小时之间,优选为介于1小时到5小时之间。煅烧时间过短会影响石墨烯的掺杂程度,煅烧时间过长会浪费能源。The above-mentioned heat treatment time is between 0.5 hour and 24 hours, preferably between 1 hour and 5 hours. If the calcination time is too short, the doping degree of graphene will be affected, and if the calcination time is too long, energy will be wasted.

本发明制备的过渡金属氧化物/石墨烯复合薄膜中过渡金属氧化物层的厚度在10nm左右(见图2)。复合薄膜的光透过率在85~92%(550nm)左右(见图5),方阻为100~300Ω/sq左右(见图4)。The thickness of the transition metal oxide layer in the transition metal oxide/graphene composite film prepared by the present invention is about 10 nm (see FIG. 2 ). The light transmittance of the composite film is about 85-92% (550nm) (see Figure 5), and the square resistance is about 100-300Ω/sq (see Figure 4).

本发明制备的掺杂石墨烯薄膜,与未掺杂石墨烯薄膜相比,石墨烯功函数提高0.01-2.0eV左右,方阻降低40%~50%。放置于空气中700h后,方阻仅上升20%~60%。Compared with the non-doped graphene film, the doped graphene film prepared by the present invention has the work function of the graphene increased by about 0.01-2.0eV, and the square resistance is reduced by 40%-50%. After being placed in the air for 700 hours, the square resistance only increases by 20% to 60%.

下面进一步例举实施例以详细说明本发明。同样应理解,以下实施例只用于对本发明进行进一步说明,不能理解为对本发明保护范围的限制,本领域的技术人员根据本发明的上述内容作出的一些非本质的改进和调整均属于本发明的保护范围。下述示例具体的工艺参数等也仅是合适范围中的一个示例,即本领域技术人员可以通过本文的说明做合适的范围内选择,而并非要限定于下文示例的具体数值。Examples are given below to describe the present invention in detail. It should also be understood that the following examples are only used to further illustrate the present invention, and should not be construed as limiting the protection scope of the present invention. Some non-essential improvements and adjustments made by those skilled in the art according to the above contents of the present invention all belong to the present invention scope of protection. The specific process parameters and the like in the following examples are only examples of suitable ranges, that is, those skilled in the art can make a selection within a suitable range through the description herein, and are not limited to the specific values exemplified below.

实施例1Example 1

将0.01ml异丙醇钒(纯度99%,Sigma-Aldrich)用1ml异丙醇稀释,滴在转移至石英基底的未掺杂石墨烯表面,5000rpm转速下旋涂1分钟。上述石墨烯片置于管式炉中,以20℃/分钟的速率升温至300℃,并保温30min,得到VOx掺杂的石墨烯透明导电薄膜。附图1为其XRD衍射图谱。可以看出在该温度下,VOx呈一定晶化态,其在20.26°和41.26°的衍射峰对应于结晶态的V2O5(JCPDF#41-1426),而在24.45°出现的小衍射峰则对应于结晶态V3O7(JCPDF#27-0940)。薄膜表面SEM照片如附图2a所示,可以看出VOx晶粒呈短棒状,长度小于100nm。截面SEM照片(附图2b)表明,VOx层的厚度为10nm左右。掺杂前后石墨烯薄膜的拉曼光谱如附图3所示,可以看出与未掺杂石墨烯相比,掺杂后石墨烯G峰出现了较大幅度的红移,这表明石墨烯发生了p型掺杂。掺杂前后石墨烯方阻变化及其稳定性测试结果如附图4所示,掺杂前石墨烯薄膜的方阻为400/sq,掺杂后石墨烯薄膜方阻为176/sq,下降幅度达到56%。从图中还可以看出,样品的稳定性十分优异,在空气中放置700h之后,方阻仅上升59%。附图5为未掺杂和掺杂石墨烯的光透过率曲线,可见掺杂石墨烯在近红外和可见光区具有优异的光透过率,550nm处光透过率约为86%。Dilute 0.01ml of vanadium isopropoxide (purity 99%, Sigma-Aldrich) with 1ml of isopropanol, drop it on the surface of the undoped graphene transferred to the quartz substrate, spin-coat at 5000rpm for 1 minute. The above-mentioned graphene sheets were placed in a tube furnace, and the temperature was raised to 300° C. at a rate of 20° C./minute, and kept at a temperature of 30 minutes to obtain a VO x doped graphene transparent conductive film. Accompanying drawing 1 is its XRD diffraction pattern. It can be seen that at this temperature, VO x is in a certain crystalline state, and its diffraction peaks at 20.26° and 41.26° correspond to crystalline V 2 O 5 (JCPDF#41-1426), while the small peak at 24.45° The diffraction peaks correspond to crystalline V 3 O 7 (JCPDF#27-0940). The SEM photo of the surface of the film is shown in Figure 2a. It can be seen that the VO x grains are in the shape of short rods with a length of less than 100 nm. The cross-sectional SEM photo (Fig. 2b) shows that the thickness of the VOx layer is about 10nm. The Raman spectra of graphene films before and after doping are shown in Figure 3. It can be seen that compared with undoped graphene, the graphene G peak after doping has a large red shift, which indicates that graphene has p-type doping. The graphene square resistance change and stability test results before and after doping are shown in Figure 4. The square resistance of the graphene film before doping is 400/sq, and the square resistance of the graphene film after doping is 176/sq. to 56%. It can also be seen from the figure that the stability of the sample is excellent, and the square resistance only increases by 59% after being placed in the air for 700 hours. Accompanying drawing 5 is the light transmittance curve of undoped and doped graphene, it can be seen that doped graphene has excellent light transmittance in the near-infrared and visible light regions, and the light transmittance at 550nm is about 86%.

实施例2Example 2

将0.01ml异丙醇钨(纯度99%,Sigma-Aldrich)用1ml异丙醇稀释,滴到预先转移至石英基底的石墨烯表面,5000rpm转速下旋涂1分钟,形成表面覆盖薄层WOx的石墨烯薄膜。上述薄膜以20℃/分钟速率升至300℃,并保温30min,获得WOx掺杂的石墨烯透明导电薄膜。经测定,掺杂后石墨烯薄膜的表面电阻为250/sq,与未掺杂石墨烯薄膜(400/sq)相比,电阻下降幅度达到37.5%。其在550nm处光透过率为92%。Dilute 0.01ml of tungsten isopropoxide (purity 99%, Sigma-Aldrich) with 1ml of isopropanol, drop onto the graphene surface transferred to the quartz substrate in advance, and spin-coat at 5000rpm for 1 minute to form a surface covering thin layer WO x graphene film. The above film was raised to 300° C. at a rate of 20° C./min, and kept at a temperature of 30 minutes to obtain a WO x doped graphene transparent conductive film. It is determined that the surface resistance of the doped graphene film is 250/sq, and compared with the undoped graphene film (400/sq), the resistance drops by 37.5%. Its light transmittance at 550 nm is 92%.

对比例1Comparative example 1

将0.01ml异丙醇钒和异丙醇钨分别用1ml异丙醇稀释,滴到预先转移至石英基底的石墨烯表面,5000rpm转速下旋涂1分钟,形成表面分别覆盖薄层VOx和WOx的石墨烯薄膜。上述薄膜置于管式炉中,在空气气氛下,以20℃/分钟速率升温至150℃、300℃、400℃,并保温30min,获得掺杂石墨烯透明导电薄膜。掺杂后石墨烯薄膜方阻下降百分比如附图7所示。可以看出,异丙醇钒的掺杂效果要优于异丙醇钨。Dilute 0.01ml of vanadium isopropoxide and tungsten isopropoxide with 1ml of isopropanol respectively, drop onto the graphene surface transferred to the quartz substrate in advance, spin-coat at 5000rpm for 1 minute, and form a thin layer of VO x and WO on the surface respectively. x graphene film. The above film was placed in a tube furnace, and in an air atmosphere, the temperature was raised to 150°C, 300°C, and 400°C at a rate of 20°C/min, and kept for 30 minutes to obtain a graphene-doped transparent conductive film. The percentage decrease in square resistance of the graphene film after doping is shown in Figure 7. It can be seen that the doping effect of vanadium isopropoxide is better than that of tungsten isopropoxide.

对比例2Comparative example 2

分别量取0.0035ml、0.005ml和0.015ml异丙醇钒用1ml异丙醇稀释,滴到预先转移至石英基底的石墨烯表面,5000rpm转速下旋涂1分钟,形成表面覆盖VOx薄层的石墨烯薄膜。将上述石墨烯薄膜放置于管式炉中,在空气中以20℃/分钟速率升温至一定温度之后保温30min,得到掺杂石墨烯透明导电薄膜。掺杂后石墨烯薄膜方阻下降百分比如附图8所示。可以看出,空气中煅烧后,异丙醇钒的浓度越高掺杂效果越好。Measure 0.0035ml, 0.005ml and 0.015ml of vanadium isopropoxide and dilute it with 1ml of isopropanol, drop it onto the graphene surface transferred to the quartz substrate in advance, and spin-coat at 5000rpm for 1 minute to form a thin layer of VO x on the surface. Graphene film. The above-mentioned graphene film was placed in a tube furnace, heated to a certain temperature in the air at a rate of 20°C/min and then kept for 30 minutes to obtain a transparent conductive film doped with graphene. The decrease percentage of square resistance of graphene film after doping is shown in Figure 8. It can be seen that after calcination in air, the higher the concentration of vanadium isopropoxide, the better the doping effect.

对比例3Comparative example 3

分别量取0.01ml异丙醇盐溶液(钒和钨)用1ml异丙醇稀释,滴到预先转移至石英基底的石墨烯表面,5000rpm转速下旋涂1分钟,形成表面分别覆盖薄层VOx和WOx的石墨烯薄膜。将上述石墨烯薄膜放置于管式炉中,在空气中以20℃/分钟速率升温至300℃之后,保温30min、1小时和3小时。得到热处理温度不同的掺杂石墨烯。测试结果表明,掺杂薄膜的电阻和光透过率基本相同,表明热处理时间对掺杂效果影响不大。Take 0.01ml of isopropoxide solution (vanadium and tungsten) and dilute with 1ml of isopropanol, drop onto the graphene surface transferred to the quartz substrate in advance, spin-coat at 5000rpm for 1 minute, and form a thin layer of VO x on the surface and graphene films of WO x . The above-mentioned graphene film was placed in a tube furnace, and after the temperature was raised to 300° C. at a rate of 20° C./min in air, it was kept for 30 minutes, 1 hour and 3 hours. Doped graphene with different heat treatment temperatures is obtained. The test results show that the electrical resistance and light transmittance of the doped films are basically the same, indicating that the heat treatment time has little effect on the doping effect.

测试方法:利用四探针法测试掺杂石墨烯薄膜表面方阻,利用拉曼光谱仪测试石墨烯掺杂程度,利用紫外-可见-近红外分光光度计,测试薄膜光透过率。Test method: Use the four-probe method to test the surface resistance of the doped graphene film, use the Raman spectrometer to test the graphene doping degree, and use the ultraviolet-visible-near-infrared spectrophotometer to test the light transmittance of the film.

图6为不同气氛下热处理获得的掺杂石墨烯方阻变化趋势图。从图6中可知,掺杂石墨烯薄膜在空气中退火比在氩气中退火效果更为显著,掺杂石墨烯透明导电薄膜导电性提升更为明显。Fig. 6 is a graph showing the change trend of the square resistance of doped graphene obtained by heat treatment under different atmospheres. It can be seen from Figure 6 that the annealing effect of the doped graphene film in air is more significant than that in argon, and the conductivity of the doped graphene transparent conductive film is more obvious.

Claims (11)

1. a kind of transition metal oxide/graphene composite film, it is characterised in that by transition metal alkoxide alcohol dissolved dilution After be spin-coated on graphenic surface it be doped, be heat-treated by being calcined in air atmosphere, obtain transition metal oxide/ Graphene composite film, the transition metal oxide/graphene composite film includes graphene layer and is deposited on graphene layer On transition metal oxide layer, the transition metal oxide layer composition for metal Mo, V, W and Ni oxide in extremely Few one kind.
2. transition metal oxide/graphene composite film according to claim 1, it is characterised in that the transition gold Category oxide layer thicknesses are the nm of 1 nm~20.
3. a kind of preparation method of transition metal oxide/graphene composite film as claimed in claim 1 or 2, its feature exists In, including:
(1)Transition metal alkoxide salting liquid is spun to graphenic surface;
(2)Will(1)Graphene at 25 DEG C~800 DEG C, is calcined 0.5~24 hour, obtained in air atmosphere after gained spin coating Cross metal oxide/graphene composite film.
4. preparation method according to claim 3, it is characterised in that will(1)Graphene is in air atmosphere after gained spin coating In at 100~500 DEG C, calcine 1~5 hour, obtain transition metal oxide/graphene composite film.
5. preparation method according to claim 3, it is characterised in that the transition metal alkoxide is isopropoxide.
6. preparation method according to claim 5, it is characterised in that the isopropoxide be isopropanol molybdenum, isopropanol tungsten, At least one of isopropanol vanadium, isopropanol nickel.
7. the preparation method according to any one of claim 3-6, it is characterised in that the transition metal alkoxide salting liquid Solvent is at least one of ethanol, normal propyl alcohol, isopropanol, glycerine, n-butanol, ethylene glycol.
8. preparation method according to claim 3, it is characterised in that the concentration of the alkoxide solution is more than 0.001 Mol/L and in 0.1 below mol/L.
9. preparation method according to claim 8, it is characterised in that the concentration of the alkoxide solution is 0.001 mol/L To between 0.016 mol/L.
10. preparation method according to claim 3, it is characterised in that the spin speed of the spin coating is 0 to 5000 rpm Between.
11. preparation method according to claim 10, it is characterised in that the spin speed of the spin coating is 1000 to 5000 Between rpm.
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