CN105817352A - Structuralized nozzle for atomic layer deposition (ALD) - Google Patents
Structuralized nozzle for atomic layer deposition (ALD) Download PDFInfo
- Publication number
- CN105817352A CN105817352A CN201610259120.2A CN201610259120A CN105817352A CN 105817352 A CN105817352 A CN 105817352A CN 201610259120 A CN201610259120 A CN 201610259120A CN 105817352 A CN105817352 A CN 105817352A
- Authority
- CN
- China
- Prior art keywords
- nozzle
- micropore
- ald
- pipeline
- structuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000231 atomic layer deposition Methods 0.000 title abstract 5
- 238000006243 chemical reaction Methods 0.000 claims abstract description 20
- 238000004140 cleaning Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
- B05B1/06—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in annular, tubular or hollow conical form
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/30—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to control volume of flow, e.g. with adjustable passages
Landscapes
- Nozzles (AREA)
Abstract
The invention discloses a structuralized nozzle for atomic layer deposition (ALD). The structuralized nozzle comprises an arc-shaped hollow nozzle body (1) and a pipeline (2) connected with the middle of the outside wall of the body. Micropores (3) and micropores (4) of different sizes are evenly formed in the inside wall of the nozzle body in the axial direction. According to the structuralized nozzle for ALD, the nozzle and a reaction cavity are highly fused in structure, the air stream uniformity in the reaction cavity is effectively improved, and meanwhile the cavity space is saved. Mounting and dismounting are convenient, and cleaning is facilitated.
Description
Invention field
The present invention relates to a kind of ALD(ald) in system, for the nozzle of gas precursor conveying with water conservancy diversion.
Background technology
In the prior art, according to the principle of ALD, precursor gas is from pipe-line system, reaction cavity is sprayed into by nozzle, adsorbing with substrate surface in cavity within the limited time, two kinds of gas with various of continuous print react at substrate surface, thus cause the deposition of an atomic layer.The premise that reaction can effectively be carried out is, after gas sprays into reaction cavity via nozzle, the most uniform absorption can occur with the substrate in cavity within the limited time, thus for that have large-size, to have certain labyrinth reaction cavity, the design of nozzle, distribution and gas for air-flow, at suprabasil uniform adsorption, have important impact.Nozzle design is unreasonable, mates with cavity body structure bad, can cause air-flow skewness in reaction cavity so that gas cannot in finite time in cavity uniform adsorption in substrate, cause prepared thin film uneven, affect the use of ALD system.
Summary of the invention
For overcoming the deficiencies in the prior art, the present invention proposes a kind of structurized ALD nozzle, it is possible to effectively optimize the air flow method in circular reaction cavity, and what in solution cavity, air-flow inequality caused prepares the phenomenon that thin film is uneven.
A kind of ALD structuring nozzle, it is characterized in that, including circular arc hollow nozzle main body (1) and the pipeline (2) being connected in the middle part of main body lateral wall, inside described nozzle body, on wall body, it is uniformly provided with two kinds of various sizes of first micropores (3) and the second micropore (4) along its axis direction.
Its nozzle body (1) radian is identical with reaction cavity radian.
Described pipeline (2) connects with nozzle interior, for the input of gas；Pipeline (2) middle part with external screw thread (5), fixing for cavity；Pipeline (2) end is used for the connection with exterior line with external screw thread (6)；A diameter of 1/4 inch of pipeline (2).
Described the first micropore (3) is positioned in the middle part of the wall body of nozzle body (1) inner side, and aperture is 1-2mm, and the first micropore (3) spacing is 10mm-50mm, and distributed quantity is 4 row × 14 row, and rectangular distribution.
Described the two the second micropores (4) are positioned at the region of wall body the first micropore (3) both sides, nozzle body (1) inner side, and aperture is 2.5-4mm, and the second micropore (4) spacing is 10mm-50mm, and distribution is respectively 4 row × 14 row, and rectangular distribution.
Described the first micropore (3) connects with nozzle hollow structure nozzle body (1) medial wall is through with at the second micropore (4).
The present invention proposes a kind of structurized ALD nozzle, and it includes circular arc hollow nozzle main body and the pipeline being connected in the middle part of body outer wall, is uniformly provided with two kinds of various sizes of micropores along its axis direction inside described nozzle body on wall body.
Described nozzle body, its circular arc radian is identical with reaction chamber radian, it is simple to be installed on reaction chamber inwall；
Described pipeline connects with nozzle body hollow structure inside；With external screw thread in the middle part of pipeline, fixing for reaction chamber；Pipe ends is used for the connection with exterior line with external screw thread；
Described micropore, for being uniformly distributed nozzle inner wall is rectangular, central region uses the micropore that size is little, and both sides use larger-size micropore, and micropore is through in medial wall to be connected with nozzle hollow structure.
Present invention have the advantage that
Nozzle inner wall the most of the present invention is uniformly distributed various sizes of micropore, uses aperture especially with central region, and both sides use punching, it is possible to effectively regulate the gas flow entering nozzle difference micropore, it is ensured that gas is being uniformly distributed within reaction chamber；
2. the design of nozzle arrangements so that nozzle merges with reaction cavity structure height, saves reaction cavity space, simultaneously facilitates dismounting, it is simple to clean very much.
Accompanying drawing explanation
With embodiment, the present invention is described in detail below in conjunction with the accompanying drawings, wherein:
Fig. 1 is the schematic diagram of present pre-ferred embodiments；
Fig. 2 is the medial wall schematic diagram of present pre-ferred embodiments.
Detailed description of the invention
As shown in Fig. 1 and 2, structural representation for present pre-ferred embodiments, described one structurized ALD nozzle, including circular arc hollow nozzle main body (1) and the pipeline (2) being connected in the middle part of main body lateral wall, being uniformly provided with two kinds of various sizes of micropores (3) and micropore (4) along, its axis direction on wall body inside described nozzle body, micropore (3) connects with nozzle hollow structure with micropore (4) medial wall is through.Its nozzle body (1) radian is identical with reaction cavity radian.Pipeline (2) connects with nozzle interior, for the input of gas；Pipeline (2) middle part with external screw thread (5), fixing for cavity；Pipeline (2) end is used for the connection with exterior line with external screw thread (6)；A diameter of 1/4 inch of pipeline (2).Micropore (3) is positioned in the middle part of the wall body of nozzle body (1) inner side, and aperture is 1-2mm, and micropore (3) spacing is 10mm ~ 50mm, and rectangular distribution.In the present embodiment, micropore (3), aperture is 1mm, and pitch of holes is 20mm.Aperture can also take 1.5mm, 2mm etc. as required, and pitch of holes can also take 10mm, 30mm, 40mm or 50mm etc..Micropore (4) is positioned at the region of wall body micropore (3) both sides, nozzle body (1) inner side, and aperture is 2.5-4mm, and micropore (4) spacing is 10mm ~ 50mm, and rectangular distribution.In the present embodiment, micropore (4), aperture is 2.5mm, and pitch of holes is 20mm.Aperture can also take 3mm, 4mm etc. as required, and pitch of holes can also take 10mm, 30mm, 40mm or 50mm etc..
During installation, allow pipeline of the present invention (2) by reaction chamber inwall through reaction chamber, nozzle body of the present invention (1) is close to reaction chamber inwall, because there is external screw thread at pipeline (2) middle part, screw can be utilized to fix pipeline (2), utilize the external screw thread of pipe ends simultaneously, connect extraneous gas pipeline, make nozzle body (1) and equipment entirety pipeline system connectivity.
Claims (6)
1. an ALD structuring nozzle, it is characterized in that, including circular arc hollow nozzle main body (1) and the pipeline (2) being connected in the middle part of main body lateral wall, inside described nozzle body, on wall body, it is uniformly provided with two kinds of various sizes of first micropores (3) and the second micropore (4) along its axis direction.
2. a kind of ALD structuring nozzle as claimed in claim 1, it is characterised in that its nozzle body (1) radian is identical with reaction cavity radian.
3. a kind of ALD structuring nozzle as claimed in claim 1, it is characterised in that described pipeline (2) connects with nozzle interior, for the input of gas；Pipeline (2) middle part with external screw thread (5), fixing for cavity；Pipeline (2) end is used for the connection with exterior line with external screw thread (6)；A diameter of 1/4 inch of pipeline (2).
4. a kind of ALD structuring nozzle as claimed in claim 1, it is characterised in that described the first micropore (3) is positioned in the middle part of the wall body of nozzle body (1) inner side, aperture is 1-2mm, first micropore (3) spacing is 10mm-50mm, and distributed quantity is 4 row × 14 row, and rectangular distribution.
5. a kind of ALD structuring nozzle as claimed in claim 1, it is characterized in that, described the two the second micropores (4) are positioned at the region of wall body the first micropore (3) both sides, nozzle body (1) inner side, aperture is 2.5-4mm, second micropore (4) spacing is 10mm-50mm, distribution is respectively 4 row × 14 row, and rectangular distribution.
6. ALD structuring nozzle as claimed in claim 1 a kind of, it is characterised in that described the first micropore (3) connects with nozzle hollow structure nozzle body (1) medial wall is through with at the second micropore (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610259120.2A CN105817352B (en) | 2016-04-25 | 2016-04-25 | A kind of ALD structuring nozzle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610259120.2A CN105817352B (en) | 2016-04-25 | 2016-04-25 | A kind of ALD structuring nozzle |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105817352A true CN105817352A (en) | 2016-08-03 |
| CN105817352B CN105817352B (en) | 2019-01-18 |
Family
ID=56526538
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610259120.2A Active CN105817352B (en) | 2016-04-25 | 2016-04-25 | A kind of ALD structuring nozzle |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105817352B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112517311A (en) * | 2020-10-29 | 2021-03-19 | 肇庆学院 | Semi-automatic brushing device for wheel axle end anti-corrosion wax |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2357848A1 (en) * | 1972-12-28 | 1974-07-04 | Solvay | METHOD AND DEVICE FOR INJECTING A LIQUID INTO THE INTERIOR OF A FLUID BED |
| JPS52145611U (en) * | 1976-04-30 | 1977-11-04 | ||
| CN2301264Y (en) * | 1997-04-24 | 1998-12-23 | 梁宏 | Multihead spray head |
| CN202983946U (en) * | 2012-12-15 | 2013-06-12 | 萧旺强 | Special liquid sprayer for fruit trees |
| CN203355946U (en) * | 2013-07-11 | 2013-12-25 | 西安电炉研究所有限公司 | Electrode spraying device |
| CN204365499U (en) * | 2014-05-30 | 2015-06-03 | 许玉方 | Jet rose |
| CN204448325U (en) * | 2015-01-20 | 2015-07-08 | 赵利新 | A kind of annular nozzle |
-
2016
- 2016-04-25 CN CN201610259120.2A patent/CN105817352B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2357848A1 (en) * | 1972-12-28 | 1974-07-04 | Solvay | METHOD AND DEVICE FOR INJECTING A LIQUID INTO THE INTERIOR OF A FLUID BED |
| JPS52145611U (en) * | 1976-04-30 | 1977-11-04 | ||
| CN2301264Y (en) * | 1997-04-24 | 1998-12-23 | 梁宏 | Multihead spray head |
| CN202983946U (en) * | 2012-12-15 | 2013-06-12 | 萧旺强 | Special liquid sprayer for fruit trees |
| CN203355946U (en) * | 2013-07-11 | 2013-12-25 | 西安电炉研究所有限公司 | Electrode spraying device |
| CN204365499U (en) * | 2014-05-30 | 2015-06-03 | 许玉方 | Jet rose |
| CN204448325U (en) * | 2015-01-20 | 2015-07-08 | 赵利新 | A kind of annular nozzle |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112517311A (en) * | 2020-10-29 | 2021-03-19 | 肇庆学院 | Semi-automatic brushing device for wheel axle end anti-corrosion wax |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105817352B (en) | 2019-01-18 |
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