CN105737727B - Probe of eddy current sensor and eddy current sensor - Google Patents
Probe of eddy current sensor and eddy current sensor Download PDFInfo
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- CN105737727B CN105737727B CN201610108299.1A CN201610108299A CN105737727B CN 105737727 B CN105737727 B CN 105737727B CN 201610108299 A CN201610108299 A CN 201610108299A CN 105737727 B CN105737727 B CN 105737727B
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- 239000000523 sample Substances 0.000 title claims abstract description 55
- 238000001514 detection method Methods 0.000 claims abstract description 138
- 238000012360 testing method Methods 0.000 claims description 19
- 238000001914 filtration Methods 0.000 claims description 13
- 238000012545 processing Methods 0.000 claims description 7
- 238000012937 correction Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 8
- 238000006073 displacement reaction Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000007689 inspection Methods 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 230000008030 elimination Effects 0.000 description 3
- 238000003379 elimination reaction Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 230000005288 electromagnetic effect Effects 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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Abstract
The invention discloses a probe of an eddy current sensor and the eddy current sensor. The probe of the eddy current sensor comprises a detection coil and a temperature compensation coil, wherein the detection coil is parallel to the detection surface of the probe, the temperature compensation coil is perpendicular to the detection coil and does not exceed the plane of the inner coil of the detection coil, and the inner coil of the detection coil is a circle of detection coil with the shortest distance to the detection surface. The invention solves the problems of low detection precision caused by temperature drift or larger probe volume caused by temperature compensation of the existing eddy current sensor, reduces the size of the probe on the basis of ensuring the detection precision and achieves the effects of wide temperature compensation range and small probe size.
Description
Technical field
The present embodiments relate to the probe and current vortex of distance-measuring equipment more particularly to a kind of current vortex sensor sensings
Device.
Background technique
Eddy current displacement sensor due to big with non-contact, measurement range, high sensitivity, structure are simple, not by non-gold
Belong to many merits such as Effect of Materials, is widely used in detection field.
The probe of common eddy current displacement sensor is by the nonmetallic framework of flat a coil and fixed coil
Composition.Since coil and skeleton generally use common material, if the variation of ambient temperature of sensor probe is little, sensor
Output be influenced by temperature just smaller, the output of sensor can accurately reflect the tested size being displaced.Work as sensor
Environment temperature beyond sensor normal working temperature after, the material of sensor probe can not only bear the work of high temperature
With, and hot environment can make the resistance, inductance and geometric dimension of sensor that apparent variation occur, and cause current vortex displacement
The output of sensor can not accurately reflect the size of tested displacement.
Currently, the temperature-compensating of eddy current displacement sensor in the market is to carry out algorithm compensation, the party in fore-lying device
Method compensation precision is lower.In addition, reducing environment temperature pair using some technical measures using on the head of sensor in the market
The sensor of the influence of sensor electrical parameter is also more, such as uses multiply litzendraht wire or the conducting wire coiling with low-temperature coefficient,
The compensation effect of which is limited.In addition, there are also compensate to reduce environment temperature to the detection coil of sensor in the prior art
Spend the scheme of influence to coil output characteristics, such as using noninductive bucking coil or with negative temperature coefficient resister to coil temperature into
Row compensation etc., can be elongated using the probe size that the compensation method designs, and is unfavorable for installation and displacement detecting in some cases.
Summary of the invention
The present invention provides the probe and current vortex sensor of a kind of current vortex sensor, to realize the base for guaranteeing detection accuracy
Reduce probe size on plinth, achievees the effect that temperature compensation range is wide, probe size is small.
In a first aspect, the embodiment of the invention provides a kind of probe of current vortex sensor, including detection coil and temperature
Bucking coil, the detection coil is parallel with the test surface of probe, the temperature-compensating coil perpendicular to the detection coil, and
No more than plane where the inner coil of the detection coil, wherein the inner coil of the detection coil is and the test surface
Apart from shortest circle detection coil.
Second aspect, the embodiment of the invention also provides a kind of current vortex sensor, including fore-lying device, extension cable and on
State the probe of first aspect；
The detection coil lead-out wire of the detection coil is electrically connected by extension cable with the fore-lying device；
The bucking coil lead-out wire of the temperature-compensating coil is electrically connected by extension cable with the fore-lying device；
The fore-lying device, for receiving the detection signal of the detection coil and the compensation letter of the temperature-compensating coil
Number, calculus of differences is carried out to the detection signal and the thermal compensation signal, to eliminate the temperature drift of the detection coil.
The present invention carries out the detection coil by increasing the temperature-compensating coil vertical with detection coil in probe
Temperature drift is eliminated in temperature-compensating, improves detection accuracy；Simultaneously as the detection coil and the temperature-compensating coil are perpendicular,
The vortex field that can be eliminated between two coils influences, and obtains wider array of temperature compensation range.The present invention solves existing current vortex
Sensor causes detection accuracy not high or the problem larger because of probe size caused by temperature-compensating because of temperature drift, realizes and guarantees detection essence
Reduce probe size on the basis of degree, achievees the effect that temperature compensation range is wide, probe size is small.
Detailed description of the invention
Fig. 1 is the floor map of the probe of one of the embodiment of the present invention one current vortex sensor；
Fig. 2 is detection coil and temperature-compensating coil in the probe of one of the embodiment of the present invention one current vortex sensor
Stereoscopic schematic diagram；
Fig. 3 is the floor map of the probe of one of the embodiment of the present invention two current vortex sensor；
Fig. 4 is the floor map of the probe of one of the embodiment of the present invention three current vortex sensor；
Fig. 5 is the floor map of the probe of another current vortex sensor in the embodiment of the present invention four；
Fig. 6 is the floor map of the probe of another current vortex sensor in the embodiment of the present invention five；
Fig. 7 is the structural block diagram of one of the embodiment of the present invention six current vortex sensor；
Fig. 8 is the structural block diagram of fore-lying device in one of the embodiment of the present invention seven current vortex sensor.
Specific embodiment
The present invention is described in further detail with reference to the accompanying drawings and examples.It is understood that this place is retouched
The specific embodiment stated is used only for explaining the present invention rather than limiting the invention.It also should be noted that in order to just
Only the parts related to the present invention are shown in description, attached drawing rather than entire infrastructure.
Embodiment one
Fig. 1 is a kind of floor map of the probe for current vortex sensor that the embodiment of the present invention one provides, the present embodiment
Be applicable to guarantee detection accuracy on the basis of reduce probe size the case where, specifically include: detection coil 1 and temperature-compensating line
Circle 2, the detection coil 1 with pop one's head in 3 test surface 31 it is parallel, the temperature-compensating coil 2 perpendicular to the detection coil 1,
And it is no more than plane where the inner coil of the detection coil 1, wherein the inner coil of the detection coil 1 is and the spy
Survey face 31 is apart from shortest circle detection coil.
According to Faraday's electromagnetic induction law, when the detection coil 1 in probe 3 passes to sinusoidal alternating current i1When, detection
1 surrounding space of coil necessarily leads to sine alternating magnetic field H1, it makes the metal conductor measured surface being placed in this magnetic field generate sense
Answer electric current, i.e. current vortex.At the same time, current vortex i2New alternating magnetic field H is generated again2；H2With H1It is contrary, and rise and weaken H1
Magnetic field strength effect, the equivalent resistance so as to cause detection coil 1 correspondingly changes.Its variation degree depends on quilt
Survey the electricalresistivityρ of metallic conductor, magnetic permeability μ, the ginseng such as coil and the frequency f of metallic conductor distance x and coil energizing current
Number.If only changing the distance x in above-mentioned parameter, and remaining parameter is remained unchanged, then the equivalent resistance Z of detection coil 1 just at
For the monotropic function about distance x.It is thus possible to determine the size of distance x by the equivalent resistance Z of detection coil 1.
However, the output signal of detection coil 1 will receive the influence of temperature in the higher situation of temperature, lead to electric whirlpool
The output signal of flow sensor generates biggish error.Thus, increase temperature-compensating in the probe 3 of the current vortex sensor
Coil 2 balances out the temperature drift of detection coil 1 according to the temperature drift of temperature-compensating coil 2.Wherein, temperature-compensating coil 2 preferably with
The structurally and electrically parameter of the detection coil 1 is identical.Further, coiling detection line can be distinguished using identical enameled wire
Circle 1 and temperature-compensating coil 2, and detection coil 1 is with temperature-compensating coil 2Circle coil beam, wherein L is line
The outer diameter of circle and the difference of internal diameter, W are the width of coil.Benchmark due to temperature-compensating coil 2 as detection coil 1 passes through inspection
Test coil lead-out wire 11 will test the equivalent resistance Z of coil 11It exports with the output signal that distance x changes to fore-lying device, meanwhile,
By bucking coil lead-out wire 21 by the equivalent resistance Z of temperature-compensating coil 22It exports with the output signal that distance x changes to preceding
Set device.Identical change occurs for the impedance with two coils of variation of temperature, carries out what calculus of differences obtained by fore-lying device
Two coil impedance differences remain unchanged, and therefore, effectively can carry out temperature to detection coil 1 by temperature-compensating coil 2
Compensation.
Referring to described in Fig. 1, the detection coil 1 is parallel with the test surface 31 of probe 3, and the temperature-compensating coil 2 is vertical
In the detection coil 1.Frequency is passed to detection coil 1 and temperature-compensating coil 2 respectively by peripheral circuit and amplitude is homogeneous
Same pumping signal.Necessarily lead to the magnetic field of a high frequency oscillation in 1 surrounding space of detection coil, it can according to right-hand screw rule
Know, magnetic direction is perpendicular to measured object 4.Also necessarily lead to the magnetic field of a high frequency oscillation in 2 surrounding space of temperature-compensating coil,
According to right-hand screw rule it is found that magnetic direction is parallel to measured object 4.At this point, the magnetic field of temperature-compensating coil 2 will not interfere inspection
The magnetic field of test coil 1 reaches and is compensated temperature in movement detection process, and be not introduced into due to two coils it
Between electromagnetic effect and the purpose of new error that generates.
Described referring to fig. 2, detection coil 1 is parallel to measured object 4, and temperature-compensating coil 2 is perpendicular to the detection line
Circle 1, and be no more than the detection coil 1 inner coil where plane, wherein the inner coil of the detection coil 1 for institute
Test surface 31 is stated apart from shortest circle detection coil.Due in actual package, the test surface 31 of detection coil 1 and probe 3
The distance between it is smaller, if temperature-compensating coil 2 exceed detection coil, will affect encapsulation.For the ease of encapsulation, using temperature
The design method of plane where bucking coil 2 is no more than the inner coil of detection coil 1.
The technical solution of the present embodiment is right by increasing the temperature-compensating coil 2 vertical with detection coil in probe 3
The detection coil carries out temperature-compensating, eliminates temperature drift, improves detection accuracy；Simultaneously as the detection coil and the temperature
Degree bucking coil 2 is perpendicular, and the vortex field that can be eliminated between two coils influences, and obtains wider array of temperature compensation range.This
The technical solution of embodiment solves existing current vortex sensor because temperature drift causes detection accuracy not high or because visiting caused by temperature-compensating
The larger problem of first 3 volume is realized that 3 length of probe for making sensor on the basis of guaranteeing detection accuracy reduces 20%-30%, is reached
The effect wide to temperature compensation range, 3 sizes of probe are small.
Embodiment two
Fig. 3 is the floor map of the probe of one of the embodiment of the present invention two current vortex sensor.The present embodiment
Technical solution on the basis of the above embodiments, specifically limits the position of detection coil 1 and temperature-compensating coil 2, tool
Body includes: the detection coil 1 and the profile of the temperature-compensating coil 2 is circle, the inner coil of the detection coil 1
Diameter and the temperature-compensating coil 2 outer profile it is tangent.Designing in this way is advantageous in that 2 pairs of temperature-compensating coil inspections of elimination
The vortex field of test coil 1 reduces probe size while influence.
Embodiment three
Fig. 4 is the floor map of the probe of one of the embodiment of the present invention three current vortex sensor.The present embodiment
Technical solution on the basis of example 1, specifically limits the position of detection coil 1 and temperature-compensating coil 2, specifically
It include: the detection coil 1 and the profile of the temperature-compensating coil 2 is circle, the inner coil of the detection coil 1
The outer profile of diameter and the temperature-compensating coil 2 is mutually from and the diameter of the outer coil of the detection coil 1 and the temperature
The outer profile of bucking coil 2 intersects, wherein the outer coil of the detection coil 1 is with the test surface apart from farthest one
Circle detection coil.Designing in this way is advantageous in that eliminate temperature-compensating coil 2 subtracts while influence on the vortex field of detection coil 1
Small probe size.
Example IV
Fig. 5 is the floor map of the probe of one of the embodiment of the present invention four current vortex sensor.The present embodiment
Technical solution on the basis of example 1, specifically limits the position of detection coil 1 and temperature-compensating coil 2, specifically
It include: the detection coil 1 and the profile of the temperature-compensating coil 2 is circle, the outer coil of the detection coil 1
The outer profile of diameter and the temperature-compensating coil 2 is tangent, wherein the outer coil of the detection coil 1 be and the detection
Identity distance is from a farthest circle detection coil.Designing in this way is advantageous in that elimination temperature-compensating coil 2 to the vortex of detection coil 1
Field reduces probe size while influence.
Embodiment five
Fig. 6 is the floor map of the probe of one of the embodiment of the present invention five current vortex sensor.The present embodiment
Technical solution on the basis of example 1, specifically limits the position of detection coil 1 and temperature-compensating coil 2, specifically
It include: the detection coil 1 and the profile of the temperature-compensating coil 2 is circle, the outer coil of the detection coil 1
The outer profile of diameter and the temperature-compensating coil 2 is mutually and the detection from, wherein the outer coil of the detection coil 1
Identity distance is from a farthest circle detection coil.Designing in this way is advantageous in that elimination temperature-compensating coil 2 to the vortex of detection coil 1
Field reduces probe size while influence.
Embodiment six
Fig. 7 is the structural block diagram of one of the embodiment of the present invention six current vortex sensor.The current vortex sensor includes
The probe 710 of fore-lying device 730, extension cable 720 and any of the above-described embodiment；
The detection coil lead-out wire of the detection coil is electrically connected by extension cable 720 with the fore-lying device 730；
The bucking coil lead-out wire of the temperature-compensating coil is electrically connected by extension cable 720 with the fore-lying device 730；
The fore-lying device 730, the compensation of detection signal and the temperature-compensating coil for receiving the detection coil
Signal carries out calculus of differences to the detection signal and the thermal compensation signal, to eliminate the temperature drift of the detection coil.
The technical solution of the present embodiment realizes two coil magnetic fields by using the probe 710 recorded in above-described embodiment
It is vertically independent of each other, the vortex field that can either be eliminated between two coils influences, and can carry out temperature-compensating, reaches reduction and passes
The purpose of sensor probe size effectively reduces sensor bulk, and due to the addition of temperature-compensating coil, before making in turn
The operation set in device 730 forms closed loop, effectively can carry out temperature feedback compensation to detection coil.
Embodiment seven
Fig. 8 is the structural block diagram of fore-lying device in one of the embodiment of the present invention seven current vortex sensor.The present embodiment
Technical solution is further defined the structure of fore-lying device, specifically includes on the basis of embodiment seven: difference channel 731,
Detecting circuit 732, filtering and amplifying circuit 733 and processor 734；
The difference channel 731 is electrically connected with the detection coil and temperature-compensating coil respectively, for receiving the inspection
Survey signal and the thermal compensation signal, output difference signal to the detecting circuit 732；
The detecting circuit 732 is electrically connected with the filtering and amplifying circuit 733, for receiving the differential signal, is exported
Low frequency signal is to the filtering and amplifying circuit 733；
The filtering and amplifying circuit 733 is electrically connected with the processor 734, for receiving the low frequency signal, to described
Low frequency signal amplifies processing and filtering processing obtains output signal, and the output signal is inputted the processor 734；
The processor 734 operates to obtain testing result for carrying out linearity correction to the output signal.
Shown in Figure 8, the output voltage of detection coil is V1, the output voltage of temperature-compensating coil is V2, pass through difference
Circuit 731 is to V1And V2It carries out subtraction and obtains differential signal, the voltage of differential signal is V, i.e. V=V1-V2。
It is popping one's head under the condition of high temperature, detection coil output voltage V1With temperature-compensating coil output voltage V2It can produce
Raw temperature drift, two coil dimensions are identical as structural parameters, and temperature is identical as the temperature drift that temperature-compensating coil generates to detection coil
(predominantly the equivalent resistance of coil, which changes, generates), the temperature drift generated at such a temperature is VR, defeated under current high-temperature condition
Voltage V outout, i.e. Vout=(V1±VR)-(V2±VR)=V1-V2=V.Therefore, in the high temperature environment, the difference of current vortex sensor
Total voltage V is exported after the processing of parallel circuit 731outUnder temperature-compensating coil effect with the differential signal that is exported in normal environment
Voltage V is identical, and therefore, temperature-compensating coil is effectively to detection coil in current vortex sensor because the temperature drift that high temperature generates carries out
Compensation.731 output difference signal of difference channel is to the detecting circuit 732, and output low frequency signal is to amplifying filtering after detection
Circuit 733.Filtering and amplifying circuit 733 receives the low frequency signal, amplifies processing and filtering processing to the low frequency signal
Output signal is obtained, the output signal is inputted into the processor 734.Turn the behaviour of digital signal (A/D) by analog signal
Make and linearity correction operates to obtain testing result.
Note that the above is only a better embodiment of the present invention and the applied technical principle.It will be appreciated by those skilled in the art that
The invention is not limited to the specific embodiments described herein, be able to carry out for a person skilled in the art it is various it is apparent variation,
It readjusts and substitutes without departing from protection scope of the present invention.Therefore, although being carried out by above embodiments to the present invention
It is described in further detail, but the present invention is not limited to the above embodiments only, without departing from the inventive concept, also
It may include more other equivalent embodiments, and the scope of the invention is determined by the scope of the appended claims.
Claims (6)
1. a kind of probe of current vortex sensor, including detection coil and temperature-compensating coil, which is characterized in that the detection line
Circle is parallel with the test surface of probe, and the outer profile of the temperature-compensating coil is no more than described perpendicular to the detection coil
Plane where the inner coil of detection coil, wherein the inner coil of the detection coil is with the test surface apart from shortest
One circle detection coil, plane where the inner coil of the outer profile and the detection coil is tangent or the outer profile and institute
Plane where stating the inner coil of detection coil mutually from；Wherein, the structure of the detection coil and the temperature-compensating coil and
Electric parameter is identical；The detection coil is with the temperature-compensating coilCircle coil beam, wherein L is coil
Outer diameter and internal diameter difference, W be coil width.
2. probe according to claim 1, which is characterized in that the profile of the detection coil and the temperature-compensating coil
It is circle, and the diameter of the outer coil of the detection coil intersects with the outer profile of the temperature-compensating coil, wherein institute
The outer coil for stating detection coil is a circle detection coil farthest with the test surface distance.
3. probe according to claim 1, which is characterized in that the profile of the detection coil and the temperature-compensating coil
It is circle, the diameter of the outer coil of the detection coil and the outer profile of the temperature-compensating coil are tangent, wherein described
The outer coil of detection coil is a circle detection coil farthest with the test surface distance.
4. probe according to claim 1, which is characterized in that the profile of the detection coil and the temperature-compensating coil
Be circle, the outer profile of the diameter of the outer coil of the detection coil and the temperature-compensating coil mutually from, wherein it is described
The outer coil of detection coil is a circle detection coil farthest with the test surface distance.
5. a kind of current vortex sensor, including fore-lying device and extension cable, which is characterized in that further include appointing in Claims 1-4
Probe described in one；
The detection coil lead-out wire of the detection coil is electrically connected by extension cable with the fore-lying device；
The bucking coil lead-out wire of the temperature-compensating coil is electrically connected by extension cable with the fore-lying device；
The fore-lying device, the thermal compensation signal of detection signal and the temperature-compensating coil for receiving the detection coil are right
The detection signal and the thermal compensation signal carry out calculus of differences, to eliminate the temperature drift of the detection coil.
6. current vortex sensor according to claim 5, which is characterized in that the fore-lying device includes difference channel, detection
Circuit, filtering and amplifying circuit and processor；
The difference channel is electrically connected with the detection coil and temperature-compensating coil respectively, for receive the detection signal and
The thermal compensation signal, output difference signal to the detecting circuit；
The detecting circuit is electrically connected with the filtering and amplifying circuit, and for receiving the differential signal, output low frequency signal is extremely
The filtering and amplifying circuit；
The filtering and amplifying circuit is electrically connected with the processor, for receiving the low frequency signal, to the low frequency signal into
Row enhanced processing and filtering processing obtain output signal, and the output signal is inputted the processor；
The processor operates to obtain testing result for carrying out linearity correction to the output signal.
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| CN201610108299.1A CN105737727B (en) | 2016-02-25 | 2016-02-25 | Probe of eddy current sensor and eddy current sensor |
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| CN105737727B true CN105737727B (en) | 2019-03-19 |
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| CN108489371B (en) * | 2018-03-15 | 2020-09-15 | 北京航空航天大学 | An eddy current displacement sensor for axial use of high temperature magnetic suspension bearing |
| CN110608661B (en) * | 2019-09-19 | 2020-12-11 | 珠海格力电器股份有限公司 | Sensor detection circuit and method and magnetic suspension bearing system |
| CN110987244B (en) * | 2019-10-08 | 2021-01-29 | 珠海格力电器股份有限公司 | Flat disc type six-dimensional force sensor, detection method and intelligent equipment |
| CN113311065B (en) * | 2021-05-25 | 2024-01-23 | 北京航空航天大学 | Coil probe heat dissipation method for pulsed eddy current detection |
| CN114483635A (en) * | 2022-01-26 | 2022-05-13 | 广东美的暖通设备有限公司 | Magnetic bearing system, compressor and air conditioner |
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| CN1225167A (en) * | 1996-07-12 | 1999-08-04 | 国际壳牌研究有限公司 | Eddy current detection technology |
| DE10212999A1 (en) * | 2001-04-12 | 2002-10-24 | Micro Epsilon Messtechnik | Eddy current probe for measuring the approach distance of an electrically conducting object has temperature compensation for the probe connection cable in the form of an additional compensation cable |
| CN1587894A (en) * | 2004-08-18 | 2005-03-02 | 浙江大学 | Temperature compensation method for electric eddy shift sensor |
| US7173417B1 (en) * | 2003-03-28 | 2007-02-06 | Nanometrics Incorporated | Eddy current sensor with concentric confocal distance sensor |
| CN104142431A (en) * | 2014-07-28 | 2014-11-12 | 天津大学 | Eddy current conductivity measuring sensor |
| CN205619868U (en) * | 2016-02-25 | 2016-10-05 | 珠海格力节能环保制冷技术研究中心有限公司 | Current vortex sensor's probe and current vortex sensor |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1225167A (en) * | 1996-07-12 | 1999-08-04 | 国际壳牌研究有限公司 | Eddy current detection technology |
| DE10212999A1 (en) * | 2001-04-12 | 2002-10-24 | Micro Epsilon Messtechnik | Eddy current probe for measuring the approach distance of an electrically conducting object has temperature compensation for the probe connection cable in the form of an additional compensation cable |
| US7173417B1 (en) * | 2003-03-28 | 2007-02-06 | Nanometrics Incorporated | Eddy current sensor with concentric confocal distance sensor |
| CN1587894A (en) * | 2004-08-18 | 2005-03-02 | 浙江大学 | Temperature compensation method for electric eddy shift sensor |
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