CN105702753B - A kind of ferroelectric thin film device with bulk photovoltaic effect - Google Patents
A kind of ferroelectric thin film device with bulk photovoltaic effect Download PDFInfo
- Publication number
- CN105702753B CN105702753B CN201610039249.2A CN201610039249A CN105702753B CN 105702753 B CN105702753 B CN 105702753B CN 201610039249 A CN201610039249 A CN 201610039249A CN 105702753 B CN105702753 B CN 105702753B
- Authority
- CN
- China
- Prior art keywords
- thin film
- photovoltaic effect
- ferroelectric
- ferroelectric thin
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/20—Electrodes
- H10F77/206—Electrodes for devices having potential barriers
- H10F77/211—Electrodes for devices having potential barriers for photovoltaic cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/12—Active materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Photovoltaic Devices (AREA)
Abstract
本发明公开了一种具有体光伏效应的铁电薄膜器件,包括衬底,所述衬底上沉积铁电薄膜,该铁电薄膜的极化方向垂直于其表面,消除铁电薄膜器件的光伏效应中退极化场的贡献;所述铁电薄膜上沉积有呈正多边形的中心电极,铁电薄膜上还沉积有多个正多边形的边缘电极,边缘电极的数量与所述中心电极的边数相等,边缘电极阵列在中心电极的周围,中心电极的每条边与相邻的边缘电极的边平行且间隔距离为L,所述边缘电极和中心电极的材料相同且同时制备,消除铁电薄膜器件的光伏效应中肖特基势垒的贡献。特别是铁电薄膜为T相时,还可消除铁电薄膜器件的光伏效应中畴壁的贡献,从而得到具有体光伏效应的铁电薄膜器件。
The invention discloses a ferroelectric thin film device with volume photovoltaic effect, which comprises a substrate, on which a ferroelectric thin film is deposited, and the polarization direction of the ferroelectric thin film is perpendicular to its surface, eliminating the photovoltaic effect of the ferroelectric thin film device. The contribution of the depolarization field in the effect; the ferroelectric film is deposited with a regular polygonal central electrode, and the ferroelectric film is also deposited with a plurality of regular polygonal edge electrodes, and the number of edge electrodes is equal to the number of sides of the central electrode , the edge electrode array is around the center electrode, each side of the center electrode is parallel to the side of the adjacent edge electrode and the distance is L, the material of the edge electrode and the center electrode is the same and prepared at the same time, eliminating the ferroelectric thin film device The contribution of the Schottky barrier in the photovoltaic effect. Especially when the ferroelectric thin film is in T phase, the contribution of the domain wall in the photovoltaic effect of the ferroelectric thin film device can also be eliminated, thereby obtaining a ferroelectric thin film device with bulk photovoltaic effect.
Description
技术领域technical field
本发明属于铁电材料领域,具体涉及一种具有体光伏效应的铁电薄膜器件。The invention belongs to the field of ferroelectric materials, in particular to a ferroelectric thin film device with bulk photovoltaic effect.
背景技术Background technique
铁电体材料由于具有反常的光伏效应(光伏电压不受晶体禁带宽度(Eg)的限制,甚至可比Eg高2~4个数量级,达103~105V/cm)而备受关注。Ferroelectric materials have attracted much attention due to their abnormal photovoltaic effect (the photovoltaic voltage is not limited by the crystal band gap (E g ), and can even be 2 to 4 orders of magnitude higher than E g , reaching 10 3 to 10 5 V/cm). focus on.
半个世纪以前,人们在具有非中心对称的各种铁电材料中已经发现了铁电光伏效应,沿着极化的方向能产生稳定的光伏效应。一般认为,铁电材料的光伏效应起源于其自发极化,铁电光伏的显著特点之一就是当极化方向在电场作用下转变的时候,光生电流也随之发生转变,而且在铁电材料内部光生电流的方向始终与极化方向相反。铁电光伏效应与传统的pn结所不同的是:在传统的pn结中,光激发的电子空穴对被pn结中的内建场迅速分离,向相反的方向作漂移运动,最后到达电极,然后被电极收集起来。因此,理论上,pn结太阳能电池所产生的光生电压受到半导体带隙宽度的限制,一般不到1V。对于铁电光伏效应而言,实验上得到的光生电压正比于极化强度以及电极之间的距离,而不受带隙宽度的限制,可以达到104V。太阳能电池的光生电压越高,就意味着产生的电能越多,效率越高。Half a century ago, ferroelectric photovoltaic effect has been found in various ferroelectric materials with non-centrosymmetric, which can produce stable photovoltaic effect along the direction of polarization. It is generally believed that the photovoltaic effect of ferroelectric materials originates from its spontaneous polarization. One of the remarkable characteristics of ferroelectric photovoltaics is that when the polarization direction changes under the action of an electric field, the photo-generated current also changes accordingly, and in ferroelectric materials The direction of the internal photogenerated current is always opposite to the polarization direction. The difference between the ferroelectric photovoltaic effect and the traditional pn junction is that in the traditional pn junction, the electron-hole pairs excited by light are rapidly separated by the built-in field in the pn junction, drift in the opposite direction, and finally reach the electrode , and then collected by the electrodes. Therefore, in theory, the photovoltaic voltage generated by pn junction solar cells is limited by the width of the semiconductor band gap, generally less than 1V. For the ferroelectric photovoltaic effect, the experimentally obtained photovoltage is proportional to the polarization intensity and the distance between electrodes, and is not limited by the band gap width, which can reach 10 4 V. The higher the photovoltaic voltage of a solar cell, the more electricity it generates and the higher its efficiency.
虽然有关铁电光伏效应的研究已有几十年,但直到现在,也没有人能够确切指出这种材料光伏过程的原理,关于铁电材料反常光伏效应的起源也一直存在争议。一般来说,影响铁电材料光生电压的因素有多种,例如两个电极之间的距离、光的强度、材料的导电性、剩余极化强度、晶体取向、晶粒尺寸、氧空位、畴壁以及界面等。但从本质上来说,铁电光伏效应的机制主要有以下几种:Although the research on the ferroelectric photovoltaic effect has been done for decades, until now, no one has been able to pinpoint the principle of the photovoltaic process of this material, and there has been controversy about the origin of the anomalous photovoltaic effect of ferroelectric materials. In general, there are many factors that affect the photogenerated voltage of ferroelectric materials, such as the distance between two electrodes, the intensity of light, the conductivity of the material, the remanent polarization, crystal orientation, grain size, oxygen vacancies, domain walls and interfaces. But in essence, the mechanism of ferroelectric photovoltaic effect mainly has the following types:
(1)体光伏效应(1) Bulk photovoltaic effect
这种机制认为,光生电压产生于铁电材料的内部,因此称为“体光伏效应”,铁电材料则作为“电流源”。光照下产生的稳定电流(光生电流:Js)与具有非中心对称铁电材料的性质有关。在具有非中心对称晶体中,电子从动量为k的状态向动量为k′状态所跃迁的概率与其从动量为k′的状态向动量为k状态跃迁的概率不同,导致了光生载流子的动量分布不对称,从而在光照下能形成稳定的电流。通过铁电材料总的电流密度(J)可以表示为:This mechanism believes that the photo-generated voltage is generated inside the ferroelectric material, so it is called "bulk photovoltaic effect", and the ferroelectric material acts as a "current source". The stable current generated under light irradiation (photo-induced current: J s ) is related to the properties of ferroelectric materials having non-centrosymmetry. In non-centrosymmetric crystals, the probability of an electron transitioning from a state with momentum k to a state with momentum k' is different from the probability of electrons transitioning from a state with momentum k' to a state with momentum k, which leads to the photogenerated carrier The momentum distribution is asymmetric, so that a stable current can be formed under light. The total current density (J) through the ferroelectric material can be expressed as:
J=Js+(σd+σph)E (1)J=J s +(σ d +σ ph )E (1)
式中,σd和σph分别表示铁电材料在暗场及明场下的电导,即暗电导和光电导;E=V/d为光照下铁电材料内部的电场,取决于外加电压(V)和两电极之间的距离(d)。由于电极之间的距离通常都比较大,并且大多数铁电材料的暗电导和光电导都非常低,因此由铁电材料构成的太阳能光伏器件可以视为电流源。在铁电材料中,光照下的开路电压Voc可以表示为:In the formula, σd and σph represent the conductance of the ferroelectric material in dark field and bright field, respectively, that is, dark conductance and photoconductance; E=V/d is the electric field inside the ferroelectric material under light, which depends on the applied voltage (V ) and the distance between the two electrodes (d). Since the distance between electrodes is usually relatively large, and the dark conductance and photoconductivity of most ferroelectric materials are very low, solar photovoltaic devices composed of ferroelectric materials can be regarded as current sources. In ferroelectric materials, the open circuit voltage V oc under illumination can be expressed as:
从上式可以看出,如果总的电导率(σd+σph)不明显依赖于光强度的话,开路电压Voc随短路光电流密度Jsc线性增加,表明开路电压正比于短路光电流Ioc(因为短路光电流Ioc等于短路光电流密度Js乘以电流流通的面积),开路电压与短路光电流的比值就等于样品的厚度。也就是说,如果将由铁电材料构成的太阳能光伏器件可以视为电流源的话,光电流就是恒定不变的,那么短路光电压的值就正比于材料的厚度。It can be seen from the above formula that if the total conductivity (σ d +σ ph ) does not depend significantly on the light intensity, the open circuit voltage V oc increases linearly with the short-circuit photocurrent density J sc , indicating that the open circuit voltage is proportional to the short-circuit photocurrent I oc (because the short-circuit photocurrent I oc is equal to the short-circuit photocurrent density J s multiplied by the area where the current flows), the ratio of the open-circuit voltage to the short-circuit photocurrent is equal to the thickness of the sample. That is to say, if the solar photovoltaic device made of ferroelectric materials can be regarded as a current source, the photocurrent is constant, and the value of the short-circuit photovoltage is proportional to the thickness of the material.
(2)畴壁理论(2) Domain wall theory
Yang等人在研究铁酸铋(BiFeO3,简写BFO)薄膜光伏效应时发现,BFO中光生电压随着极化方向上畴壁数量的增加线性增加,垂直于极化方向上则没有观察到明显的光伏效应。畴壁理论认为,由于极化强度在垂直于畴壁处会产生一个分量,其在畴壁处产生的电势为~10mV,畴壁宽度约为2nm,因此极化在畴壁处产生的电场高达5×106V/m,此值远大于pn结中的内电场,被认为铁电材料产生反常光伏效应的起源,也是分离光生载流子的主要驱动力。由于铁电材料中有很多电畴,被极化之后畴与畴之间首尾相连,而畴壁就像串联起来的纳米级光伏发电机,光生电压沿着极化方向逐渐累加起来。这一机制与串联的太阳能电池的概念类似,其输出电压为每一个单元之和。如果两个电极之间的距离越大,则电畴就越多,光照下两电极之间产生的光生电压也就越高,这一模型可以很好的解释反常光伏效应。此外,由于光照下产生连续的光电流,在一些文献中则把畴壁当成电流源,总的开路电压(光生电压)Voc由光照下铁电材料的电流密度、电导率和电极之间的距离Jsc决定。与体光伏效应不同的是,畴壁理论将反常光伏效应归因于畴壁处载流子的激发,认为在畴壁外光激发的载流子复合速度很快,可以将体光伏效应忽略。When Yang et al. studied the photovoltaic effect of bismuth ferrite (BiFeO 3 , abbreviated as BFO) thin films, they found that the photogenerated voltage in BFO increased linearly with the increase of the number of domain walls in the polarization direction, and no obvious observation was observed perpendicular to the polarization direction. the photovoltaic effect. According to the domain wall theory, since the polarization intensity will produce a component perpendicular to the domain wall, the potential generated at the domain wall is ~10mV, and the domain wall width is about 2nm, so the electric field generated by the polarization at the domain wall is as high as 5×10 6 V/m, which is much larger than the internal electric field in the pn junction, is considered to be the origin of the anomalous photovoltaic effect of ferroelectric materials, and is also the main driving force for the separation of photogenerated carriers. Since there are many electric domains in ferroelectric materials, the domains are connected end to end after being polarized, and the domain walls are like nanoscale photovoltaic generators connected in series, and the photogenerated voltage gradually accumulates along the polarization direction. This mechanism is similar to the concept of connecting solar cells in series, where the output voltage is the sum of each unit. If the distance between the two electrodes is larger, there will be more electric domains, and the photovoltage generated between the two electrodes under light will be higher. This model can well explain the anomalous photovoltaic effect. In addition, due to the continuous photocurrent generated under illumination, domain walls are regarded as current sources in some literatures. The distance J sc decides. Different from the bulk photovoltaic effect, the domain wall theory attributes the anomalous photovoltaic effect to the excitation of carriers at the domain wall. It is believed that the recombination speed of photo-excited carriers outside the domain wall is very fast, and the bulk photovoltaic effect can be ignored.
虽然用畴壁理论可以很好的说明反常光伏效应,即光生电压可以远大于禁带宽度,然而,有一些实验现象仅仅用磁畴壁理论是根本无法解释的,必须考虑到体光伏效应理论。例如,根据畴壁模型,由于在畴壁处电势的降落是极化电荷引起的,因此光电流不依赖于光的偏振方向。然而,研究者们在BFO等铁电材料中观察到光电流随着入射光偏振方向的变化而变化的现象,表明铁电材料反常光伏效应的起源比大家预想的更加复杂。在铁电光伏效应中,由于电畴和体效应对光生电流皆有贡献,因此,如果两者相长,则光生电流较大,反之,光生电流比较小,这可以解释为什么在yang等人的实验中平行于畴壁方向没有观察到光电流。Although the domain wall theory can be used to explain the anomalous photovoltaic effect, that is, the photogenerated voltage can be much larger than the forbidden band width, however, there are some experimental phenomena that cannot be explained only by the magnetic domain wall theory, and the bulk photovoltaic effect theory must be taken into account. For example, according to the domain wall model, since the potential drop at the domain wall is caused by polarized charges, the photocurrent does not depend on the polarization direction of light. However, researchers have observed that the photocurrent changes with the polarization direction of incident light in ferroelectric materials such as BFO, indicating that the origin of the anomalous photovoltaic effect of ferroelectric materials is more complicated than everyone expected. In the ferroelectric photovoltaic effect, since both the electric domain and the body effect contribute to the photo-generated current, if the two are constructive, the photo-generated current will be larger, otherwise, the photo-generated current will be smaller, which can explain why in Yang et al. No photocurrent was observed in the direction parallel to the domain wall in the experiment.
(3)肖特基结效应(3) Schottky junction effect
当铁电材料与电极接触形成肖特基势垒时,界面处能带将会弯曲,光照下产生的电子空穴对将被电极附近局部电场驱动,产生的光电流很大程度是由肖特基势垒和耗尽层的的深度决定。根据这一模型,在肖特基势垒内部所产生光生电压的大小依然局限于铁电材料的带隙,在研究铁电光伏效应的早期阶段肖特基效应所引起的电压常被忽略,是因为它远远低于大部分铁电晶体中的反常光生电压。但肖特基效应在铁电薄膜光伏器件中变得越来越重要,因为这些器件中的光伏电压输出通常比较小。一般来说,由相同电极与铁电材料构成的具有三明治结构的铁电光伏器件中,肖特基势垒产生光电流的贡献是不存在的,因为由上下两个相同的电极与铁电材料所构成的两个肖特基结是背靠背的,相互遏制,因此所产生的光生电压和电流相抵消。然而,若采用不同类型的电极,可以实现具有垂直结构的铁电光伏器件中光伏效应的增强。由于肖特基结效应与铁电材料的极化方向无关,根据这一特点就可以区分肖特基结和体光伏效应对光电流的贡献。然而一些研究者认为,肖特基势垒的高度可以通过对铁电材料施加电场改变其极化方向来进行调控。并且,当肖特基势垒和铁电材料的极化方向发生转变的时候,光生电压的符号也随之发生转变。例如,由Au/BFO/Au构成的具有垂直结构的铁电二极管中,光生电流及光生电压都随着极化方向的转变而转变。最初将BFO薄膜体光伏效应认为是产生这一现象的主要原因,但随后的研究表明,BFO薄膜在极化过程中的肖特基势垒的改变主要是由于氧空位的迁移造成的,而当氧空位迁移在低温下被冻结时,光伏效应随着极化方向的转变不再发生转变。When the ferroelectric material is in contact with the electrode to form a Schottky barrier, the energy band at the interface will bend, and the electron-hole pairs generated under the light will be driven by the local electric field near the electrode, and the photocurrent generated is largely driven by the Schottky Depths of the base barrier and depletion layer are determined. According to this model, the magnitude of the photo-generated voltage generated inside the Schottky barrier is still limited to the band gap of the ferroelectric material, and the voltage caused by the Schottky effect is often ignored in the early stage of studying the ferroelectric photovoltaic effect, which is Because it is much lower than the anomalous photogenerated voltage in most ferroelectric crystals. But the Schottky effect is becoming more and more important in ferroelectric thin-film photovoltaic devices, because the photovoltaic voltage output in these devices is usually relatively small. Generally speaking, in a ferroelectric photovoltaic device with a sandwich structure composed of the same electrode and ferroelectric material, the contribution of the photocurrent generated by the Schottky barrier does not exist, because the upper and lower two identical electrodes and ferroelectric material The two Schottky junctions formed are back-to-back and contain each other, so the photo-generated voltage and current generated cancel each other out. However, the enhancement of the photovoltaic effect in ferroelectric photovoltaic devices with vertical structures can be achieved if different types of electrodes are used. Since the Schottky junction effect has nothing to do with the polarization direction of ferroelectric materials, according to this feature, the contribution of the Schottky junction and the bulk photovoltaic effect to the photocurrent can be distinguished. However, some researchers believe that the height of the Schottky barrier can be tuned by changing the polarization direction of the ferroelectric material by applying an electric field. Moreover, when the polarization direction of the Schottky barrier and the ferroelectric material changes, the sign of the photogenerated voltage changes accordingly. For example, in a ferroelectric diode with a vertical structure composed of Au/BFO/Au, both the photo-generated current and the photo-generated voltage change with the change of the polarization direction. Initially, the bulk photovoltaic effect of BFO films was considered to be the main reason for this phenomenon, but subsequent studies showed that the Schottky barrier change of BFO films during the polarization process was mainly caused by the migration of oxygen vacancies, while when When the oxygen vacancy migration is frozen at low temperature, the photovoltaic effect no longer changes with the polarization direction.
(4)退极化场效应(4) Depolarization field effect
对于处于极化状态的铁电薄膜而言,薄膜表面具有高浓度的极化电荷,如果不考虑屏蔽效应,这些高密度的极化电荷将会在铁电层内产生一个巨大的电场。以BFO薄膜为例,其剩余极化强度约为100μC/cm2,未被屏蔽的极化电荷所产生的电场可达3×1010V/m。当铁电薄膜与金属或半导体接触时,剩余极化引起的表面电荷将会被金属或半导体中的自由电荷部分屏蔽。通常,表面电荷之所以不完全被屏蔽因为极化电荷和自由补偿电荷重心不重合,在整个铁电薄膜内部就产生电场,即退极化场。退极化场可能很大,例如对于厚度为10到30nm的BTO薄膜而言,由BTO与SrRuO3电极构成的三明治结构中的退极化场约为45×106V/m。如此高的退极化场被认为是分离光生载流子的主要驱动力,同时也表明反常光伏效应与极化电荷的屏蔽程度密切相关。屏蔽电荷的分布取决于铁电材料和金属(或半导体)的性质,例如剩余极化强度、自由电荷密度及介电常数等。另一方面未被屏蔽的极化电荷对退极化场的影响主要取决于铁电层的厚度:厚度小的铁电层结果退极化场大。一般来说,半导体与铁电材料接触产生的退极化场比金属与铁电材料接触所产生的退极化场大,这是由于半导体材料具有较小的自由电荷密度和较大的介电常数,从而产生较弱的屏蔽效应。For a ferroelectric film in a polarized state, the surface of the film has a high concentration of polarized charges. If the shielding effect is not considered, these high-density polarized charges will generate a huge electric field in the ferroelectric layer. Taking BFO film as an example, its remnant polarization is about 100μC/cm 2 , and the electric field generated by unshielded polarized charges can reach 3×10 10 V/m. When the ferroelectric film is in contact with a metal or semiconductor, the surface charge caused by remanent polarization will be partially shielded by the free charge in the metal or semiconductor. Usually, the reason why the surface charge is not completely shielded is that the center of gravity of the polarized charge and the free compensation charge do not coincide, and an electric field is generated inside the entire ferroelectric film, that is, a depolarization field. The depolarization field can be very large, for example, for a BTO film with a thickness of 10 to 30 nm, the depolarization field in a sandwich structure composed of BTO and SrRuO 3 electrodes is about 45×10 6 V/m. Such a high depolarization field is considered to be the main driving force for the separation of photogenerated carriers, and also indicates that the anomalous photovoltaic effect is closely related to the shielding degree of polarized charges. The distribution of shielding charges depends on the properties of ferroelectric materials and metals (or semiconductors), such as remanent polarization, free charge density, and dielectric constant. On the other hand, the influence of unshielded polarized charges on the depolarization field depends mainly on the thickness of the ferroelectric layer: a thinner ferroelectric layer results in a larger depolarization field. In general, the depolarization field generated by the contact between a semiconductor and a ferroelectric material is larger than that generated by a metal in contact with a ferroelectric material, because the semiconductor material has a smaller free charge density and a larger dielectric constant, resulting in a weaker shielding effect.
总的来说,影响铁电薄膜光伏效应的机制有多种,体效应、退极化场、电畴、界面势垒等因素对光伏效应的影响同事存在,而且相互之间存在一定的联系。因此,如何区分每种机制对铁电光伏效应的贡献、弄清在铁电材料中哪一种机制对光伏效应占主导地位具有重要的意义。In general, there are many mechanisms that affect the photovoltaic effect of ferroelectric thin films. Factors such as bulk effect, depolarization field, electric domain, and interface barriers have simultaneous effects on the photovoltaic effect, and there is a certain relationship between them. Therefore, it is of great significance to distinguish the contribution of each mechanism to the ferroelectric photovoltaic effect and to find out which mechanism is dominant to the photovoltaic effect in ferroelectric materials.
在众多的铁电材料中,铁酸铋(BFO)由于具有较大的极化强度、相对较小的光学带隙而备受关注。由于BFO薄膜和衬底之间存在晶格失配,因此BFO薄膜将受到应力作用。当应力比较小的时候,BFO属于菱形结构(rhombohedral Structure,即R相)。如果R相的BFO薄膜受到的面内压应力继续增大,则其晶格常数及结构将会变得不同,从而影响其物理性质。c方向的晶格常数随着应力的增加而增加,当应力达到一定程度时,R相转变为扭曲了的四方晶体结构(tetragonal structure,即T相)。面内及面外的晶格常数分别为 c/a=1.26,属于P4mm点群。Among many ferroelectric materials, bismuth ferrite (BFO) has attracted much attention due to its large polarization and relatively small optical bandgap. Due to the lattice mismatch between the BFO film and the substrate, the BFO film will be stressed. When the stress is relatively small, BFO belongs to the rhombohedral structure (R phase). If the in-plane compressive stress of the R-phase BFO film continues to increase, its lattice constant and structure will become different, thereby affecting its physical properties. The lattice constant in the c direction increases as the stress increases, and when the stress reaches a certain level, the R phase transforms into a distorted tetragonal crystal structure (tetragonal structure, ie T phase). The in-plane and out-of-plane lattice constants are c/a=1.26, which belongs to the P4mm point group.
对于R相BFO而言,其极化方向沿着对角线。因此,在研究BFO光伏效应的时候,由于极化方向(退极化场的反方向)在面内(平行于表面)及面外(垂直于表面)存在分量,因此对光伏效应就有一个贡献。这样就很难得到体光伏效应的本正值,因为所测量的体光伏效应中就包含了退极化场的贡献。此外,如果BFO两面(上下电极或者左右电极)的电极不对称的话,所得到的光伏效应除了体光伏效应之外,还包括界面势垒的贡献。与R相不同的是,T相BFO的极化方向垂直于其表面。For R-phase BFO, its polarization direction is along the diagonal. Therefore, when studying the BFO photovoltaic effect, since the polarization direction (the opposite direction of the depolarization field) has components in the plane (parallel to the surface) and out of the plane (perpendicular to the surface), there is a contribution to the photovoltaic effect. . In this way, it is difficult to obtain the positive value of the bulk photovoltaic effect, because the measured bulk photovoltaic effect includes the contribution of the depolarization field. In addition, if the electrodes on both sides of the BFO (upper and lower electrodes or left and right electrodes) are asymmetrical, the resulting photovoltaic effect includes the contribution of the interface barrier in addition to the bulk photovoltaic effect. Different from the R-phase, the polarization direction of the T-phase BFO is perpendicular to its surface.
发明内容Contents of the invention
为了测量铁电薄膜本征的光伏效应,本发明提供了一种具有体光伏效应的铁电薄膜器件,在铁电薄膜上沉积正多边形的中心电极,在中心电极的的周围阵列与中心电极的边数相等的边缘电极,中心电极的每条边与相邻的边缘电极的边平行且相隔一定距离,所述中心电极和边缘电极的材料相同且同时制备则测得该铁电薄膜的光伏效应中就没有肖特基势垒(即界面势垒);同时铁电薄膜的极化方向垂直于铁电薄膜表面,则中心电极与边缘电极的连接线与退极化场垂直,则测得该铁电薄膜的光伏效应中也不包含退极化场的贡献,当铁电薄膜为T相时只有180度畴壁,畴壁与铁电薄膜表面也是垂直的,则测得该铁电薄膜的光伏效应中也不包含不含畴壁的贡献,仅仅是铁电薄膜本征的体光伏效应。In order to measure the intrinsic photovoltaic effect of ferroelectric thin film, the invention provides a kind of ferroelectric thin film device with bulk photovoltaic effect, on the ferroelectric thin film deposit the central electrode of regular polygon, the surrounding array of central electrode and central electrode The edge electrodes with the same number of sides, each side of the center electrode is parallel to the side of the adjacent edge electrode and separated by a certain distance, and the materials of the center electrode and the edge electrode are the same and the photovoltaic effect of the ferroelectric film is measured at the same time. There is no Schottky barrier (that is, the interface barrier); at the same time, the polarization direction of the ferroelectric film is perpendicular to the surface of the ferroelectric film, and the connection line between the center electrode and the edge electrode is perpendicular to the depolarization field, then the measured The photovoltaic effect of the ferroelectric film does not include the contribution of the depolarization field. When the ferroelectric film is in the T phase, there are only 180-degree domain walls, and the domain walls are also perpendicular to the surface of the ferroelectric film. The photovoltaic effect does not include the contribution of domain walls, but only the intrinsic bulk photovoltaic effect of ferroelectric thin films.
本发明通过以下技术方案实现:The present invention is realized through the following technical solutions:
一种具有体光伏效应的铁电薄膜器件,包括衬底,所述衬底上沉积铁电薄膜,该铁电薄膜的极化方向垂直于其表面;所述铁电薄膜上沉积有呈正多边形的中心电极,铁电薄膜上还沉积有多个正多边形的边缘电极,边缘电极的数量与所述中心电极的边数相等,边缘电极阵列在中心电极的周围,中心电极的每条边与相邻的边缘电极的边平行且间隔距离为L,所述边缘电极和中心电极的材料相同且同时制备。A ferroelectric thin film device with bulk photovoltaic effect, comprising a substrate on which a ferroelectric thin film is deposited, the polarization direction of the ferroelectric thin film is perpendicular to its surface; A central electrode, a plurality of regular polygonal edge electrodes are also deposited on the ferroelectric film, the number of edge electrodes is equal to the number of sides of the central electrode, the array of edge electrodes is around the central electrode, and each side of the central electrode is connected to the adjacent The sides of the edge electrodes are parallel and separated by a distance L, and the materials of the edge electrodes and the center electrodes are the same and are prepared at the same time.
进一步,所述铁电薄膜为T相,T相铁电薄膜只有180度畴壁,畴壁与铁电薄膜表面也是垂直的,则测得该铁电薄膜的光伏效应中不含畴壁的贡献。Further, the ferroelectric film is T-phase, and the T-phase ferroelectric film has only 180-degree domain walls, and the domain walls are also perpendicular to the surface of the ferroelectric film, so it is measured that the photovoltaic effect of the ferroelectric film does not contain the contribution of domain walls .
进一步,所述中心电极的边长d1,所述边缘电极的边长d2,d1≥d2>L,中心电极的边长d1和边缘电极的边长d2均远远大于中心电极与边缘电极向平行的边之间的间隔距离L,中心电极与相邻的边缘电极可以视为平板电容,之间的电场就是平行电场。Further, the side length d1 of the center electrode, the side length d2 of the edge electrode, d1≥d2>L, the side length d1 of the center electrode and the side length d2 of the edge electrode are far greater than the parallel direction of the center electrode and the edge electrode The distance L between the sides, the center electrode and the adjacent edge electrodes can be regarded as plate capacitors, and the electric field between them is the parallel electric field.
进一步,边缘电极的边长d2>0.3mm,中心电极与相邻边缘电极平行的边的间隔距离0<L<0.1mm。Further, the side length d2 of the edge electrodes is >0.3mm, and the distance between the central electrode and the side parallel to the adjacent edge electrodes is 0<L<0.1mm.
进一步,所述中心电极、边缘电极材质相同为Ag、Au、Cu、Pt、ITO其中一种。Further, the materials of the center electrode and the edge electrodes are the same as one of Ag, Au, Cu, Pt, and ITO.
本发明的有益效果:Beneficial effects of the present invention:
本发明的具有体光伏效应的铁电薄膜器件,在铁电薄膜上同时沉积材料相同的中心电极和多个边缘电极,该铁电薄膜的极化方向垂直于铁电薄膜的表面,当铁电薄膜为T相时只有180度畴壁,畴壁与铁电薄膜表面也是垂直的,则测得的该铁电薄膜的光伏效应中就不包含肖特基势垒(即界面势垒)、退极化场以及畴壁的贡献,仅仅是本征的体光伏效应。由于体光伏效应与入射光的偏振方向有关,本发明的铁电薄膜器件在中心电极的周围阵列多个与中心电极的边平行的边缘电极,可以在不改变入射光的情况下,分别测量中心电极的每条面与相邻边缘电极之间的光伏效应,从而得到的光伏效应与角度关系(及光伏效应与入射光的偏振方向的关系)。The ferroelectric thin film device with bulk photovoltaic effect of the present invention deposits the same central electrode and a plurality of edge electrodes of the material simultaneously on the ferroelectric thin film, and the polarization direction of the ferroelectric thin film is perpendicular to the surface of the ferroelectric thin film, when the ferroelectric thin film When the film is in the T phase, there are only 180 degree domain walls, and the domain walls are also perpendicular to the surface of the ferroelectric film, so the measured photovoltaic effect of the ferroelectric film does not include Schottky barriers (ie, interface barriers), regression The contribution of the polarization field and the domain wall is only the intrinsic bulk photovoltaic effect. Since the bulk photovoltaic effect is related to the polarization direction of the incident light, the ferroelectric thin film device of the present invention arrays a plurality of edge electrodes parallel to the sides of the central electrode around the central electrode, and can measure the center respectively without changing the incident light. The photovoltaic effect between each surface of the electrode and the adjacent edge electrodes, thereby obtaining the relationship between the photovoltaic effect and the angle (and the relationship between the photovoltaic effect and the polarization direction of the incident light).
附图说明Description of drawings
图1是本发明的铁电薄膜器件的结构示意图;Fig. 1 is the structural representation of ferroelectric thin film device of the present invention;
图2是图1的俯视图;Fig. 2 is the top view of Fig. 1;
图3是T相铁酸铋薄膜的XRD衍射图谱;Fig. 3 is the XRD diffraction pattern of T phase bismuth ferrite film;
图4是测量铁电薄膜器件的光伏效应对电极的编号;Fig. 4 is to measure the numbering of the photovoltaic effect of ferroelectric thin film device to electrode;
图5是中心电极与不同边缘电极之间短路光电流值的趋势图。Fig. 5 is a trend graph of short-circuit photocurrent values between the center electrode and different edge electrodes.
附图标记reference sign
1-衬底; 2-铁酸铋薄膜; 3-中心电极; 4-边缘电极。1-substrate; 2-bismuth ferrite film; 3-center electrode; 4-edge electrode.
具体实施方式detailed description
下面结合附图和实施例对本发明作进一步说明。The present invention will be further described below in conjunction with drawings and embodiments.
如图1和图2所示,一种具有体光伏效应的铁电薄膜器件,包括衬底1,所述衬底1上沉积铁电薄膜2,该铁电薄膜2的极化方向垂直于其表面,则测得铁电薄膜的光伏效应中就不包含退极化场的贡献。优化的,所述铁电薄膜2为T相,只有180度畴壁,畴壁与铁电薄膜表面也是垂直的,则测得该铁电薄膜的光伏效应中也不包含不含畴壁的贡献。所述铁电薄膜2上沉积有呈正多边形的中心电极3,铁电薄膜2上还沉积有多个正多边形的边缘电极4,边缘电极4的数量与所述中心电极3的边数相等,边缘电极4阵列在中心电极3的周围,中心电极3的每条边与相邻的边缘电极4的边平行且间隔距离为L,所述边缘电极4和中心电极3的材料相同且同时制备,则测得的铁电薄膜的光伏效应中也没有肖特基势垒(即界面势垒)的贡献,则该铁电薄膜器件测得的光伏效应仅仅是铁电薄膜本征的体光伏效应。多个边缘电极阵列在中心电极的边缘且边缘电极的边与中心电极相邻的边平行且相隔一定距离,可以在不改变入射光的情况下,分别测量中心电极的每条面与相邻边缘电极之间的光伏效应,从而得到的光伏效应与角度关系(及光伏效应与入射光的偏振方向的关系),结构简单,方便测量。优化的,所述中心电极3的边长d1,所述边缘电极4的边长d2,d1≥2>L,中心电极的边长d1和边缘电极的边长d2均远远大于中心电极与边缘电极向平行的边之间的间隔距离L。边缘电极4的边长d2>0.3mm,中心电极3与相邻边缘电极4平行的边的间隔距离0<L<0.1mm。所述中心电极3、边缘电极4材质相同为Ag、Au、Cu、Pt、ITO其中一种。本实施例中,铁电薄膜2为BFO薄膜,衬底1选择晶格常数小于BFO薄膜的晶格常数的LaAlO3、YAlO3其中一种,容易形成四方向的铁酸铋。其它情况下容易生长出菱形的铁酸铋;d1=d2=0.3mm,L<0.1mm;d1=d2=5mm,L<1mm;d1=d2=0.1mm,L<0.01mm。As shown in Fig. 1 and Fig. 2, a kind of ferroelectric thin film device with bulk photovoltaic effect comprises substrate 1, deposits ferroelectric thin film 2 on described substrate 1, and the polarization direction of this ferroelectric thin film 2 is perpendicular to its surface, the measured photovoltaic effect of the ferroelectric thin film does not include the contribution of the depolarization field. Optimally, the ferroelectric film 2 is in T phase, with only 180-degree domain walls, and the domain walls are also perpendicular to the surface of the ferroelectric film, so it is measured that the photovoltaic effect of the ferroelectric film does not include the contribution of domain walls. . The ferroelectric thin film 2 is deposited with a regular polygonal center electrode 3, and a plurality of regular polygonal edge electrodes 4 are also deposited on the ferroelectric thin film 2. The number of edge electrodes 4 is equal to the number of sides of the central electrode 3, and the edge The electrodes 4 are arrayed around the center electrode 3, each side of the center electrode 3 is parallel to the side of the adjacent edge electrode 4 and the distance is L, and the materials of the edge electrode 4 and the center electrode 3 are the same and prepared at the same time, then The measured photovoltaic effect of the ferroelectric thin film does not have the contribution of the Schottky barrier (that is, the interface barrier), so the measured photovoltaic effect of the ferroelectric thin film device is only the intrinsic bulk photovoltaic effect of the ferroelectric thin film. A plurality of edge electrode arrays are on the edge of the center electrode and the sides of the edge electrodes are parallel to the adjacent sides of the center electrode and separated by a certain distance. The photovoltaic effect between the electrodes, thus obtaining the relationship between the photovoltaic effect and the angle (and the relationship between the photovoltaic effect and the polarization direction of the incident light), has a simple structure and is convenient for measurement. Optimally, the side length d1 of the center electrode 3, the side length d2 of the edge electrode 4, d1≥2>L, the side length d1 of the center electrode and the side length d2 of the edge electrode are far greater than the center electrode and the edge The separation distance L between the electrodes to the parallel sides. The side length d2 of the edge electrode 4 is >0.3 mm, and the distance between the center electrode 3 and the side parallel to the adjacent edge electrode 4 is 0<L<0.1 mm. The material of the center electrode 3 and the edge electrode 4 is one of Ag, Au, Cu, Pt and ITO. In this embodiment, the ferroelectric thin film 2 is a BFO thin film, and the substrate 1 selects one of LaAlO 3 and YAlO 3 whose lattice constant is smaller than that of the BFO thin film, so that four-directional bismuth ferrite is easily formed. In other cases, diamond-shaped bismuth ferrite is easy to grow; d1=d2=0.3mm, L<0.1mm; d1=d2=5mm, L<1mm; d1=d2=0.1mm, L<0.01mm.
对本实施例中的具有体光伏效应的铁酸铋薄膜器件进行光伏效应的测试:图3是T相铁酸铋薄膜的XRD衍射图谱,BFO薄膜为T相,是外延生长,只有(00L)其中L可以去1,2,3……衍射峰,而且没有其它杂相产生。光伏效应的测试所用的激光波长为408nm,功率为50mW的线偏振光。测量用的仪器为数字源表keithley2611。图4是测量铁电薄膜器件的光伏效应对电极的编号,测得结果如图图5所示。图5为不同角度(即a-b1(与水平方向呈0°)、a-b2(45°)、...a-b8(315°))的时候,中心电极与对应边缘电极之间短路光电流的大小。可以看到,在不改变入射光的情况下,所得到的短路光电流与角度具有一定的依赖关系(相当于不改变角度,而改变入射光的偏振方向)。由于该铁电薄膜器件中极化方向和畴壁垂直于铁酸铋薄膜表面,铁酸铋薄膜表面的电极为同一种电极,因此实验结果直接证明了是由体光伏效应所产生的光电流。The bismuth ferrite thin film device with bulk photovoltaic effect in the present embodiment is carried out the test of photovoltaic effect: Fig. 3 is the XRD diffraction pattern of T phase bismuth ferrite thin film, BFO thin film is T phase, is epitaxial growth, only (00L) wherein L can remove 1, 2, 3... diffraction peaks, and no other impurity phases are produced. The wavelength of the laser used in the test of the photovoltaic effect is 408nm, and the power is linearly polarized light of 50mW. The instrument used for measurement is Keithley2611 Digital Source Meter. Fig. 4 is the numbering of the electrodes for measuring the photovoltaic effect of the ferroelectric thin film device, and the measured results are shown in Fig. 5 . Figure 5 shows the short circuit between the center electrode and the corresponding edge electrode at different angles (that is, a-b1 (0° to the horizontal direction), a-b2 (45°), ... a-b8 (315°)) The magnitude of the photocurrent. It can be seen that, without changing the incident light, the obtained short-circuit photocurrent has a certain dependence on the angle (equivalent to changing the polarization direction of the incident light without changing the angle). Since the polarization direction and domain wall in the ferroelectric thin film device are perpendicular to the surface of the bismuth ferrite film, and the electrodes on the surface of the bismuth ferrite film are the same electrode, the experimental results directly prove that the photocurrent is generated by the bulk photovoltaic effect.
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610039249.2A CN105702753B (en) | 2016-01-21 | 2016-01-21 | A kind of ferroelectric thin film device with bulk photovoltaic effect |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610039249.2A CN105702753B (en) | 2016-01-21 | 2016-01-21 | A kind of ferroelectric thin film device with bulk photovoltaic effect |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105702753A CN105702753A (en) | 2016-06-22 |
CN105702753B true CN105702753B (en) | 2017-08-25 |
Family
ID=56227707
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610039249.2A Active CN105702753B (en) | 2016-01-21 | 2016-01-21 | A kind of ferroelectric thin film device with bulk photovoltaic effect |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN105702753B (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102176472A (en) * | 2011-02-21 | 2011-09-07 | 华东师范大学 | Bulk effect solar cell material and preparation method thereof |
CN102651428A (en) * | 2012-05-24 | 2012-08-29 | 常州大学 | Fabrication method of gradient ferroelectric film solar cell |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7851697B2 (en) * | 2005-03-22 | 2010-12-14 | Agency For Science, Technology And Research | Thin film photovoltaic device |
JP6146559B2 (en) * | 2013-03-28 | 2017-06-14 | セイコーエプソン株式会社 | Photoelectric conversion element and solar cell |
-
2016
- 2016-01-21 CN CN201610039249.2A patent/CN105702753B/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102176472A (en) * | 2011-02-21 | 2011-09-07 | 华东师范大学 | Bulk effect solar cell material and preparation method thereof |
CN102651428A (en) * | 2012-05-24 | 2012-08-29 | 常州大学 | Fabrication method of gradient ferroelectric film solar cell |
Also Published As
Publication number | Publication date |
---|---|
CN105702753A (en) | 2016-06-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Yang et al. | Above-bandgap voltages from ferroelectric photovoltaic devices | |
Zenkevich et al. | Giant bulk photovoltaic effect in thin ferroelectric BaTiO 3 films | |
Pei et al. | Enhanced photovoltaic effect in Ca and Mn co-doped BiFeO3 epitaxial thin films | |
Butler et al. | Ferroelectric materials for solar energy conversion: photoferroics revisited | |
Yang et al. | Enhancement of photocurrent in ferroelectric films via the incorporation of narrow bandgap nanoparticles | |
Seyfouri et al. | Recent progress in bismuth ferrite-based thin films as a promising photovoltaic material | |
Zhou et al. | Switchable ferroelectric diode and photovoltaic effects in polycrystalline BiFeO3 thin films grown on transparent substrates | |
Yan et al. | High-performance self-driven solar-blind ultraviolet photodetectors based on HfZrO2/β-Ga2O3 heterojunctions | |
Hussein et al. | Enhancements of p-Si/CdO thin films solar cells with doping (Sb, Sn, Se) | |
Gogolin et al. | Silicon heterojunction solar cells: Influence of H2-dilution on cell performance | |
Wani et al. | What ails the photovoltaic performance in single-layered unpoled BFO?–The role of oxygen annealing in improving the photovoltaic efficiency | |
Yee et al. | Copper interstitial recombination centers in Cu 3 N | |
CN105702762B (en) | A kind of method for preparing T-phase bismuth ferrite thin film | |
Liang et al. | Above-band-gap voltage from oriented bismuth ferrite ceramic photovoltaic cells | |
Gao et al. | Anomalous photovoltaic effect with high fill factor in Fe3+-Li+ co-doped ZnO films | |
Ding et al. | Revealing photovoltaic behavior in 2D hybrid perovskite ferroelectric single-crystalline microwire arrays for self-powered photodetectors | |
Gao et al. | Switchable photovoltaic effect in Au/Bi0. 9La0. 1FeO3/La0. 7Sr0. 3MnO3 heterostructures | |
Chen et al. | Impact of ferroelectric domain structure on bulk photovoltaic effect of epitaxial BiFe1− xCoxO3 films | |
Huang et al. | A CdS nanodipole solar cell | |
CN105702753B (en) | A kind of ferroelectric thin film device with bulk photovoltaic effect | |
Li et al. | Ultraviolet photovoltaic effect in BiFeO3/Nb-SrTiO3 heterostructure | |
Nakashima et al. | Influence of the polarization direction of light on the anomalous photovoltaic effect in BiFeO3 thin films | |
CN110943137B (en) | Ferroelectric photovoltaic device and preparation method thereof | |
Sharma et al. | Journal of Nanoscience and Technology | |
Xu et al. | Novel near-unity 0D organic-inorganic copper-based halide TEA2Cu2Br4 for high-efficiency and stable ultraviolet photodetectors |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20201221 Address after: Building 647, Century Avenue, Chongfu Town, Tongxiang City, Jiaxing City, Zhejiang Province Patentee after: Jiaxing Juteng Information Technology Co.,Ltd. Address before: 401331 Huxi University Town, Shapingba District, Chongqing Patentee before: Chongqing University of Science & Technology |
|
EE01 | Entry into force of recordation of patent licensing contract | ||
EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20160622 Assignee: TAIZHOU BAIGELA ELECTROMECHANICAL CO.,LTD. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005141 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240430 Application publication date: 20160622 Assignee: WENLING JINYIYANG MACHINERY Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005115 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240430 Application publication date: 20160622 Assignee: Taizhou Xingneng Machinery Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005107 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240430 Application publication date: 20160622 Assignee: TAIZHOU SHAOSHI TOOL Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005105 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240430 Application publication date: 20160622 Assignee: Taizhou bird electromechanical Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005103 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240430 Application publication date: 20160622 Assignee: THE SECOND CIGARETTE MACHINERY FACTORY OF WENLING Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005182 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240430 |
|
EE01 | Entry into force of recordation of patent licensing contract | ||
EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20160622 Assignee: Wenling Oudian Shoes Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005261 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240506 Application publication date: 20160622 Assignee: WENLING CITY ANTONG ELECTRIC APPLIANCE Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005260 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240506 Application publication date: 20160622 Assignee: Wenling Liyu Machinery Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005255 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240506 Application publication date: 20160622 Assignee: ZHEJIANG HAOLEI MECHANICS & ELECTRICAL Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005249 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240506 Application publication date: 20160622 Assignee: ZHEJIANG HONGDUN MACHINERY Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005246 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240506 Application publication date: 20160622 Assignee: ZHEJIANG SHENGYI MACHINERY Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005239 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240506 Application publication date: 20160622 Assignee: Zhejiang Huayi Shipbuilding Equipment Manufacturing Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005234 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240506 Application publication date: 20160622 Assignee: Zhejiang Yuanhua Machinery Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005232 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240506 Application publication date: 20160622 Assignee: Qianjiang Group Qiangjiang Electromechanical (Wenling) Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005230 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240506 Application publication date: 20160622 Assignee: WENLING DELIZHONG MACHINERY MANUFACTURING Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005229 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240506 |
|
EE01 | Entry into force of recordation of patent licensing contract | ||
EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20160622 Assignee: Wenling Shuangjun Sports Goods Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980008275 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240701 Application publication date: 20160622 Assignee: Taizhou Ruihong Aluminum Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980008271 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240628 Application publication date: 20160622 Assignee: ZHEJIANG HONGAO ELECTROMECHANICAL Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980008269 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240628 Application publication date: 20160622 Assignee: Zhejiang Yanzhi pneumatic tools Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980008266 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240628 Application publication date: 20160622 Assignee: Zhejiang Baitong Cable Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980008265 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240628 Application publication date: 20160622 Assignee: Taizhou Zhengbiao Shoes Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980008251 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240628 Application publication date: 20160622 Assignee: ZHEJIANG MAOQUAN MACHINERY CO.,LTD. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980008243 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240628 Application publication date: 20160622 Assignee: Wenling Yizheng Machinery Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980008178 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240628 Application publication date: 20160622 Assignee: Wenling Oukai Mechanical and Electrical Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980008169 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240628 Application publication date: 20160622 Assignee: WENLING JIANGNAN AUTO PARTS FACTORY Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980008167 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240628 Application publication date: 20160622 Assignee: Wenling Southeast Instrument Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980008165 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240628 Application publication date: 20160622 Assignee: Zhejiang Jingfan Saddle Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980008164 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240628 |
|
EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20160622 Assignee: Zhejiang Hongxing Aquatic Products Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980016487 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240926 Application publication date: 20160622 Assignee: Yinyang Bearing Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980016355 Denomination of invention: A ferroelectric thin film device with bulk photovoltaic effect Granted publication date: 20170825 License type: Common License Record date: 20240925 |
|
EE01 | Entry into force of recordation of patent licensing contract | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20250126 Address after: No. 30, East Road, Shapu Wengjia New Village, Xiaotuanpu Village, Guanhaiwei Town, Cixi City, Zhejiang Province 315300 Patentee after: Wu Qiongdi Country or region after: China Address before: Building 647, Century Avenue, Chongfu Town, Tongxiang City, Jiaxing City, Zhejiang Province Patentee before: Jiaxing Juteng Information Technology Co.,Ltd. Country or region before: China |
|
EC01 | Cancellation of recordation of patent licensing contract | ||
EC01 | Cancellation of recordation of patent licensing contract |
Assignee: Wenling Oudian Shoes Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005261 Date of cancellation: 20250306 Assignee: WENLING CITY ANTONG ELECTRIC APPLIANCE Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005260 Date of cancellation: 20250306 Assignee: Wenling Liyu Machinery Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005255 Date of cancellation: 20250306 Assignee: ZHEJIANG HONGDUN MACHINERY Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005246 Date of cancellation: 20250306 Assignee: ZHEJIANG SHENGYI MACHINERY Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005239 Date of cancellation: 20250306 Assignee: Zhejiang Huayi Shipbuilding Equipment Manufacturing Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005234 Date of cancellation: 20250306 Assignee: Zhejiang Yuanhua Machinery Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005232 Date of cancellation: 20250306 Assignee: Qianjiang Group Qiangjiang Electromechanical (Wenling) Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005230 Date of cancellation: 20250306 Assignee: WENLING DELIZHONG MACHINERY MANUFACTURING Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005229 Date of cancellation: 20250306 Assignee: THE SECOND CIGARETTE MACHINERY FACTORY OF WENLING Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005182 Date of cancellation: 20250306 Assignee: TAIZHOU BAIGELA ELECTROMECHANICAL CO.,LTD. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005141 Date of cancellation: 20250306 Assignee: WENLING JINYIYANG MACHINERY Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005115 Date of cancellation: 20250306 Assignee: Taizhou Xingneng Machinery Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005107 Date of cancellation: 20250306 Assignee: TAIZHOU SHAOSHI TOOL Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005105 Date of cancellation: 20250306 Assignee: Taizhou bird electromechanical Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005103 Date of cancellation: 20250306 |
|
EC01 | Cancellation of recordation of patent licensing contract | ||
EC01 | Cancellation of recordation of patent licensing contract |
Assignee: ZHEJIANG HAOLEI MECHANICS & ELECTRICAL Co.,Ltd. Assignor: Jiaxing Juteng Information Technology Co.,Ltd. Contract record no.: X2024980005249 Date of cancellation: 20250310 |
|
TR01 | Transfer of patent right |
Effective date of registration: 20250425 Address after: No. 558 Jingmao Street, Shengshan Town, Cixi City, Ningbo Province 315000 (Room 1201, 12th Floor, Building 1, Cixi Textile City) (self declared) Patentee after: Ningbo Zhiwang Energy Co.,Ltd. Country or region after: China Address before: No. 30, East Road, Shapu Wengjia New Village, Xiaotuanpu Village, Guanhaiwei Town, Cixi City, Zhejiang Province 315300 Patentee before: Wu Qiongdi Country or region before: China |
|
TR01 | Transfer of patent right |