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CN105698820B - A kind of laser gyro cavity translatory mirror shakes deformation active compensation device - Google Patents

A kind of laser gyro cavity translatory mirror shakes deformation active compensation device Download PDF

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CN105698820B
CN105698820B CN201610055265.0A CN201610055265A CN105698820B CN 105698820 B CN105698820 B CN 105698820B CN 201610055265 A CN201610055265 A CN 201610055265A CN 105698820 B CN105698820 B CN 105698820B
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deformation
cavity
active compensation
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vibration
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CN105698820A (en
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谢元平
罗晖
黄云
于旭东
李耿
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National University of Defense Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C25/00Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
    • G01C25/005Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass initial alignment, calibration or starting-up of inertial devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/58Turn-sensitive devices without moving masses
    • G01C19/64Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams

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Abstract

一种激光陀螺腔平移镜抖动形变主动补偿装置,包括误差处理电路、模数转换器、控制器、数模转换器、移相电路、乘法器、求和电路,将激光陀螺输出的光强信号或正交计数信号进行处理得到代表抖动调制的误差信号,控制器根据该误差信号调整抖动反馈信号的幅度和相位得到抖动形变主动补偿信号,抖动形变主动补偿信号与腔长控制电压叠加后对激光陀螺的腔平移镜进行控制,在补偿热膨胀和热变形引起的激光陀螺腔长变化及由于机械抖动导致的腔平移镜径向形变,从而减小或消除机械抖动导致的陀螺腔长变化,提高了激光陀螺的精度。本发明不改变激光陀螺的现有结构,仅通过电子线路和信号处理对机械抖动导致的腔平移镜径向形变进行主动补偿,实施成本低。

An active compensation device for vibration and deformation of a laser gyro cavity translation mirror, including an error processing circuit, an analog-to-digital converter, a controller, a digital-to-analog converter, a phase-shifting circuit, a multiplier, and a summation circuit, and the light intensity signal output by the laser gyro Or the quadrature counting signal is processed to obtain the error signal representing the jitter modulation. The controller adjusts the amplitude and phase of the jitter feedback signal according to the error signal to obtain the jitter deformation active compensation signal. The jitter deformation active compensation signal and the cavity length control voltage are superimposed on the laser The cavity translation mirror of the gyroscope is controlled to compensate the laser gyro cavity length change caused by thermal expansion and thermal deformation and the radial deformation of the cavity translation mirror caused by mechanical vibration, thereby reducing or eliminating the gyro cavity length change caused by mechanical vibration and improving the The accuracy of the laser gyro. The invention does not change the existing structure of the laser gyroscope, only actively compensates the radial deformation of the cavity translation mirror caused by mechanical vibration through electronic circuit and signal processing, and has low implementation cost.

Description

一种激光陀螺腔平移镜抖动形变主动补偿装置An Active Compensation Device for Vibration and Deformation of Laser Gyro Cavity Translating Mirror

技术领域technical field

本发明涉及激光陀螺,特指一种激光陀螺腔平移镜抖动形变主动补偿装置,用于减小或消除机械抖动导致的陀螺径向腔长变化。The invention relates to a laser gyroscope, in particular to an active compensation device for vibration and deformation of a laser gyroscope cavity translation mirror, which is used to reduce or eliminate the radial cavity length change of the gyroscope caused by mechanical vibration.

背景技术Background technique

环形激光陀螺具有动态范围宽、比例因子线性度好、启动迅速、对加速度不敏感等一系列优点,是捷联惯性系统的理想元件,广泛应用于航海、航空、航天和陆地等领域。Ring laser gyro has a series of advantages such as wide dynamic range, good linearity of scale factor, fast start-up, and insensitivity to acceleration. It is an ideal component of strapdown inertial system and is widely used in navigation, aviation, aerospace and land and other fields.

激光陀螺存在着闭锁现象,采用机械抖动偏频可以消除闭锁。一个典型的机械抖动偏频激光陀螺为三角形或方形配置,包含三片或四片反射镜。图1为方形配置的机械抖动偏频激光陀螺结构简图,两片可动镜2、3和两片固定镜4、5与方形微晶玻璃腔体1构成激光谐振腔,腔内产生两束相向运行的激光。两片可动镜2、3外侧粘有压电陶瓷(PZT),改变压电陶瓷上的电压可产生伸缩运动,带动可动镜2、3沿轴向移动,从而使陀螺谐振腔腔长发生变化。可动镜、压电陶瓷及其组件组成腔平移镜(或腔长控制机构、程长控制机构、稳频装置)。激光陀螺在运行过程中由于腔体的热膨胀和热变形会引起总腔长的变化,为了稳定激光频率,需要利用腔平移镜来稳定总腔长。The laser gyroscope has a lock-up phenomenon, and the lock-up can be eliminated by using mechanical jitter bias frequency. A typical mechanically dithered frequency-biased laser gyro has a triangular or square configuration with three or four mirrors. Figure 1 is a schematic diagram of the structure of a mechanically dithered frequency-biased laser gyro in a square configuration. Two movable mirrors 2, 3, two fixed mirrors 4, 5 and a square glass-ceramic cavity 1 form a laser resonant cavity, and two beams are generated in the cavity. Lasers running in opposite directions. The outer sides of the two movable mirrors 2 and 3 are bonded with piezoelectric ceramics (PZT). Changing the voltage on the piezoelectric ceramics can produce telescopic movement, which drives the movable mirrors 2 and 3 to move in the axial direction, so that the cavity length of the gyro resonant cavity occurs Variety. The movable mirror, piezoelectric ceramics and their components form a cavity translation mirror (or a cavity length control mechanism, a path length control mechanism, and a frequency stabilization device). During the operation of the laser gyro, the total cavity length will change due to the thermal expansion and thermal deformation of the cavity. In order to stabilize the laser frequency, it is necessary to use a cavity translation mirror to stabilize the total cavity length.

光电二极管7粘接在固定镜4的合光棱镜上,用于输出两路正交的陀螺计数信号A、B,光电二极管8粘接在固定镜5上用于输出光强信号LIM,LIM可用于光强监控或者作为腔长控制电路的反馈输入。抖轮6安装在微晶玻璃腔体1的中心位置,抖轮的辐条上贴有PZT片,通过PZT片的驱动使得抖轮带动腔体产生小幅快速交变振动,从而给陀螺加入一个正负交变的抖动偏频,消除陀螺闭锁效应。The photodiode 7 is bonded to the light-combining prism of the fixed mirror 4 for outputting two orthogonal gyro counting signals A and B, and the photodiode 8 is bonded to the fixed mirror 5 for outputting the light intensity signal LIM, which can be used It can be used for light intensity monitoring or as a feedback input for cavity length control circuit. The shaking wheel 6 is installed in the center of the glass-ceramic cavity 1, and the spokes of the shaking wheel are pasted with PZT sheets. Driven by the PZT sheets, the shaking wheel drives the cavity to produce small and rapid alternating vibrations, thereby adding a positive and negative to the gyroscope. Alternating jitter bias frequency eliminates gyro lock-in effect.

抖轮带动腔体小幅快速交变振动的同时,腔平移镜也产生相同的运动,表现为腔平移镜受到交变惯性力。陀螺抖动的幅度θ通常为200~600角秒,抖动频率f为300Hz~1000Hz,抖动角加速度a=θ·(2πf)2非常大,在腔平移镜3处的切向加速度也很大,相应的腔平移镜将承受很大的交变惯性力。由于腔平移镜的刚度较微晶玻璃腔体1小,且其各组件的刚度也不同,因此腔平移镜必然产生切向形变X,同时由于腔平移镜的一些非理想因素也会导致径向形变Y。径向形变使谐振器腔长受到调制,导致稳频精度下降,对陀螺性能产生影响,陀螺输出光强LIM与正交计数信号A、B的幅度均会受到调制,调制频率和抖动频率相关,调制幅度与径向形变有关,径向形变越大,幅度调制越大。机械抖动反馈信号Ud及抖动调制下的陀螺输出A如图2所示,可见陀螺输出A的幅度受到抖动的调制,陀螺输出B类似,同时光强信号LIM也会受到抖动调制。抖动调制导致陀螺性能下降。While the vibrating wheel drives the cavity body to vibrate slightly and rapidly alternately, the cavity translation mirror also produces the same movement, which is manifested as the cavity translation mirror being subjected to alternating inertial force. The amplitude θ of the gyro shake is usually 200-600 arc seconds, the shake frequency f is 300Hz-1000Hz, the shake angular acceleration a=θ·(2πf) 2 is very large, and the tangential acceleration at the cavity translation mirror 3 is also very large, correspondingly The cavity translation mirror will bear a large alternating inertial force. Because the stiffness of the cavity translation mirror is smaller than that of the glass-ceramic cavity 1, and the stiffness of its components is also different, the cavity translation mirror will inevitably produce tangential deformation X, and at the same time, due to some non-ideal factors of the cavity translation mirror, it will also cause radial Deformation Y. The radial deformation modulates the cavity length of the resonator, which leads to a decrease in frequency stabilization accuracy and affects the performance of the gyroscope. The output light intensity LIM of the gyroscope and the amplitude of the quadrature counting signals A and B will be modulated, and the modulation frequency is related to the jitter frequency. The modulation amplitude is related to the radial deformation, the greater the radial deformation, the greater the amplitude modulation. The mechanical jitter feedback signal U d and the gyro output A under jitter modulation are shown in Figure 2. It can be seen that the amplitude of the gyro output A is modulated by the jitter, and the gyro output B is similar. At the same time, the light intensity signal LIM is also modulated by the jitter. Jitter modulation results in degraded gyro performance.

目前,激光陀螺正常工作时均有配套的腔长控制电路(稳频电路),用于补偿热膨胀和热变形引起的腔长的变化。腔长控制电路具体示意图如图3所示,光电二极管输出的光强LIM输入到腔长控制电路1,腔长控制电路1根据光强信号LIM的变化输出相应的腔长控制电压VPLC经电压放大器2放大后加到腔平移镜以补偿热变形引起的陀螺腔长变化。但由于腔长控制电路的频率响应一般远低于机械抖动频率,而机械抖动导致的腔平移镜径向形变和陀螺腔长是以抖动频率动态变化,因而无法通过腔长控制电路对机械抖动导致的腔平移镜径向形变和陀螺腔长变化进行补偿;为了减小机械抖动导致的腔平移镜形变及其对陀螺性能的影响,现有技术下的一般做法是优化腔平移镜结构设计、增加腔平移镜结构刚度,其困难在于需要改变陀螺的现有结构、成本高。At present, when the laser gyroscope works normally, it has a supporting cavity length control circuit (frequency stabilization circuit), which is used to compensate the change of the cavity length caused by thermal expansion and thermal deformation. The specific schematic diagram of the cavity length control circuit is shown in Figure 3. The light intensity LIM output by the photodiode is input to the cavity length control circuit 1, and the cavity length control circuit 1 outputs the corresponding cavity length control voltage V PLC according to the change of the light intensity signal LIM. Amplifier 2 is amplified and added to the cavity translation mirror to compensate the change of gyroscope cavity length caused by thermal deformation. However, since the frequency response of the cavity length control circuit is generally much lower than the mechanical jitter frequency, the radial deformation of the cavity translation mirror and the gyro cavity length caused by mechanical jitter are dynamically changed at the jitter frequency, so the cavity length control circuit cannot be used to control the mechanical vibration. The radial deformation of the cavity translation mirror and the change of the gyroscope cavity length are compensated; in order to reduce the deformation of the cavity translation mirror caused by mechanical vibration and its influence on the performance of the gyro, the general practice in the prior art is to optimize the structural design of the cavity translation mirror, increase The structural stiffness of the cavity translation mirror is difficult in that the existing structure of the gyroscope needs to be changed and the cost is high.

发明内容Contents of the invention

本发明的目的是:提供一种激光陀螺腔平移镜抖动形变主动补偿装置,可在激光陀螺现有结构的基础上,通过电子线路和信号处理对机械抖动导致的腔平移镜径向形变进行主动补偿,减小或消除机械抖动导致的陀螺腔长变化,从而改善激光陀螺精度。The purpose of the present invention is to provide an active compensation device for vibration and deformation of the laser gyroscope cavity translation mirror, which can actively compensate the radial deformation of the cavity translation mirror caused by mechanical jitter through electronic circuits and signal processing on the basis of the existing structure of the laser gyroscope. Compensate, reduce or eliminate the change of gyroscope cavity length caused by mechanical vibration, so as to improve the accuracy of laser gyroscope.

为实现本发明而采用的技术解决方案是:The technical solution adopted for realizing the present invention is:

激光陀螺腔平移镜抖动形变主动补偿装置,包括腔长控制电路,其特征在于:还包括:误差处理电路(10)、模数转换器(20)、控制器(30)、数模转换器(40)、移相电路(50)、乘法器(60)、求和电路(70);误差处理电路(10)接收激光陀螺的光强信号,输出误差电压通过模数转换器(20)传入控制器(30);机械抖动反馈信号经所述移相电路(50)移相后与控制器(30)通过数模转换器(40)输出的补偿控制量经乘法器(60)相乘得到幅度和相位可调的抖动形变主动补偿信号,该信号与原先已有的腔长控制电压叠加后一同对激光陀螺的腔平移镜进行控制,在补偿热膨胀和热变形引起的激光陀螺腔长变化的同时补偿由于机械抖动导致的腔平移镜径向形变,从而减小或消除机械抖动导致的陀螺腔长变化。The active compensation device for vibration and deformation of the laser gyro cavity translation mirror includes a cavity length control circuit, and is characterized in that it also includes: an error processing circuit (10), an analog-to-digital converter (20), a controller (30), a digital-to-analog converter ( 40), phase shifting circuit (50), multiplier (60), summation circuit (70); error processing circuit (10) receives the light intensity signal of laser gyro, and the output error voltage is imported through analog-to-digital converter (20) Controller (30); the mechanical jitter feedback signal is phase-shifted by the phase-shifting circuit (50) and then multiplied by the multiplier (60) with the compensation control quantity output by the controller (30) through the digital-to-analog converter (40) The jitter deformation active compensation signal with adjustable amplitude and phase, the signal is superimposed with the original cavity length control voltage to control the cavity translation mirror of the laser gyroscope, and compensates for the cavity length change of the laser gyroscope caused by thermal expansion and thermal deformation. At the same time, the radial deformation of the cavity translation mirror caused by the mechanical vibration is compensated, thereby reducing or eliminating the change of the gyroscope cavity length caused by the mechanical vibration.

所述误差处理电路(10)对陀螺输出光强或正交计数信号处理得到误差电压。The error processing circuit (10) processes the output light intensity of the gyroscope or the quadrature counting signal to obtain an error voltage.

调整抖动形变主动补偿信号的幅度和相位使误差电压最小可减小或消除机械抖动导致的腔平移镜径向形变和陀螺腔长变化。Adjusting the amplitude and phase of the jitter deformation active compensation signal to minimize the error voltage can reduce or eliminate the radial deformation of the cavity translation mirror and the change of the gyroscope cavity length caused by mechanical jitter.

所述的控制器(30)为激光陀螺自带的控制器,或者额外增加的控制器。The controller (30) is a built-in controller of the laser gyro, or an additional controller.

所述误差处理电路(10)由带通滤波器(11)和交流/直流转换电路(12)组成,或由包络检波器(13)和交流/直流转换电路(13)组成。The error processing circuit (10) is composed of a band-pass filter (11) and an AC/DC conversion circuit (12), or an envelope detector (13) and an AC/DC conversion circuit (13).

所述的控制器(30)为单片机、FPGA或DSP。The controller (30) is a single-chip microcomputer, FPGA or DSP.

所述的交流/直流转换电路(12)为由型号AD736的芯片组成的交流/直流转换电路。The AC/DC conversion circuit (12) is an AC/DC conversion circuit composed of AD736 chips.

所述的移相电路(50)为包括运算放大器、电阻和电容的多端反馈全通滤波器,通过改变电阻和电容的值从而改变移相的角度。The phase shifting circuit (50) is a multi-terminal feedback all-pass filter including operational amplifiers, resistors and capacitors, and the phase shifting angle is changed by changing the values of the resistors and capacitors.

所述的包络检波电路(13)为包括调幅电阻和调幅电容的电路。The envelope detection circuit (13) is a circuit including an amplitude modulation resistor and an amplitude modulation capacitor.

本发明的优点在于:The advantages of the present invention are:

本发明不改变激光陀螺的现有结构,仅通过电子线路和信号处理对机械抖动导致的腔平移镜径向形变进行主动补偿,提高了激光陀螺精度,同时实施成本低。The present invention does not change the existing structure of the laser gyroscope, only actively compensates the radial deformation of the cavity translation mirror caused by mechanical vibration through electronic circuits and signal processing, improves the accuracy of the laser gyroscope, and at the same time has low implementation cost.

附图说明Description of drawings

图1是方形配置的机械抖动偏频激光陀螺结构简图。Figure 1 is a schematic diagram of the structure of a mechanically shaken frequency-biased laser gyroscope in a square configuration.

图2是机械抖动反馈信号及抖动调制下的陀螺输出计数信号A波形图。Figure 2 is a waveform diagram of the mechanical jitter feedback signal and the gyroscope output count signal A under jitter modulation.

图3为背景技术的激光陀螺腔长控制电路示意图。FIG. 3 is a schematic diagram of a laser gyro cavity length control circuit in the background technology.

图4是本发明第一例激光陀螺腔平移镜抖动形变主动补偿装置的结构框图。Fig. 4 is a structural block diagram of the first example of the laser gyro cavity translation mirror vibration deformation active compensation device of the present invention.

图5是本发明第二例激光陀螺腔平移镜抖动形变主动补偿装置的结构框图。Fig. 5 is a structural block diagram of a second example of an active compensation device for vibration and deformation of a laser gyro cavity translation mirror according to the present invention.

图6是本发明的交流/直流转换电路的具体实施例的电路原理图。FIG. 6 is a circuit schematic diagram of a specific embodiment of the AC/DC conversion circuit of the present invention.

图7是本发明的移相电路的具体实施例的电路原理图。Fig. 7 is a schematic circuit diagram of a specific embodiment of the phase shifting circuit of the present invention.

图8是本发明的乘法器电路的具体实施例的电路原理图。FIG. 8 is a circuit schematic diagram of a specific embodiment of the multiplier circuit of the present invention.

图9是本发明的包络检波电路的具体实施例的电路原理图。FIG. 9 is a circuit schematic diagram of a specific embodiment of the envelope detection circuit of the present invention.

图10是本发明的求和电路的具体实施例的电路原理图。Fig. 10 is a schematic circuit diagram of a specific embodiment of the summation circuit of the present invention.

具体实施方式Detailed ways

以下将结合具体实施例和说明书附图对本发明做进一步详细说明。The present invention will be further described in detail below in conjunction with specific embodiments and accompanying drawings.

如图4所示,本发明第一例激光陀螺腔平移镜抖动形变主动补偿装置包括误差处理电路10、模数转换器20、控制器30、数模转换器40、移相电路50、乘法器60、求和电路70。所述误差处理电路10包括带通滤波器11和交流/直流转换电路12。所述控制器20为单片机、FPGA或者DSP,可以采用激光陀螺配套电路中已有的控制器,也可以额外增加一个控制器。所述模数转换器20优选分辨率为10位或10位以上、每秒转换速度大于100次的模数转换芯片。所述数模转换器40优选分辨率为10位或10位以上、每秒转换速度大于100次的数模转换芯片。图4中腔长控制电路1与电压放大器2属于激光陀螺正常工作所需的配套电路,可以是已有的能满足腔长控制需要的任何形式的电路。As shown in Figure 4, the first example of the active compensation device for vibration and deformation of the laser gyroscope cavity translation mirror of the present invention includes an error processing circuit 10, an analog-to-digital converter 20, a controller 30, a digital-to-analog converter 40, a phase-shifting circuit 50, and a multiplier 60. A summation circuit 70. The error processing circuit 10 includes a band-pass filter 11 and an AC/DC conversion circuit 12 . The controller 20 is a single-chip microcomputer, FPGA or DSP, and the existing controller in the supporting circuit of the laser gyro can be used, or an additional controller can be added. The analog-to-digital converter 20 is preferably an analog-to-digital conversion chip with a resolution of 10 bits or more and a conversion rate greater than 100 times per second. The digital-to-analog converter 40 is preferably a digital-to-analog conversion chip with a resolution of 10 bits or more and a conversion rate greater than 100 times per second. The cavity length control circuit 1 and the voltage amplifier 2 in Fig. 4 belong to the supporting circuits required for the normal operation of the laser gyroscope, and can be any existing circuits that can meet the cavity length control requirements.

在该实施例中,激光陀螺的光电二极管检测激光陀螺的光强,输出光强信号LIM,该光强信号同时输入到腔长控制电路1和误差处理电路10。一路光强信号输入到腔长控制电路1后,形成腔长控制量VPLC,用于对激光陀螺的热膨胀和热变形引起的腔长变化进行补偿。另一路光强信号LIM输入到误差处理电路10的带通滤波电路11,带通滤波器的中心频率必须设置为与机械抖动频率接近,其输出误差信号err反映了机械抖动对光强的幅度调制,该误差信号由交流/直流转换电路12转换为直流误差电压Verr。直流误差电压Verr经模数转换器20转换成数字信号输入到控制器30中,控制器根据该误差电压的大小计算得出主动补偿控制量Vc,主动补偿控制量Vc经数模转换器40输出。In this embodiment, the photodiode of the laser gyro detects the light intensity of the laser gyro and outputs a light intensity signal LIM, which is input to the cavity length control circuit 1 and the error processing circuit 10 at the same time. After one light intensity signal is input to the cavity length control circuit 1, a cavity length control value V PLC is formed, which is used to compensate the cavity length change caused by the thermal expansion and thermal deformation of the laser gyroscope. The other light intensity signal LIM is input to the band-pass filter circuit 11 of the error processing circuit 10. The center frequency of the band-pass filter must be set close to the frequency of the mechanical dithering, and the output error signal err reflects the amplitude modulation of the mechanical dithering on the light intensity. , the error signal is converted into a DC error voltage Verr by the AC/DC conversion circuit 12 . The DC error voltage V err is converted into a digital signal by the analog-to-digital converter 20 and input to the controller 30. The controller calculates the active compensation control value V c according to the size of the error voltage, and the active compensation control value V c is converted by digital-to-analog conversion device 40 output.

表征机械抖动幅度与频率的抖动反馈信号Ud经过移相电路50移相角度θ后得到U,移相后的抖动反馈信号U送入乘法器60,与主动补偿控制量Vc相乘得到腔平移镜抖动形变主动补偿信号UCOMP。乘法器60输出UCOMP=S·U·Vc,其中S为乘法器的比例因子,因此改变补偿控制量Vc即可改变抖动形变主动补偿信号UCOMP的幅度,改变移相电路的移相角度θ即可改变抖动形变主动补偿信号UCOMP的相位。移相电路的移相角度θ的确定方式如下:保持补偿控制量Vc不变,相应地叠加到腔平移镜上的抖动形变主动补偿信号UCOMP幅度不变,改变移相角度θ的值,使误差电压Verr最小的角度θ即为所需要的移相角度。The jitter feedback signal U d representing the amplitude and frequency of the mechanical jitter is passed through the phase-shifting circuit 50 to shift the angle θ to obtain U , and the phase-shifted jitter feedback signal U is sent to the multiplier 60 to be multiplied by the active compensation control amount V c The vibration deformation active compensation signal U COMP of the cavity translation mirror is obtained. The multiplier 60 outputs U COMP =S U V c , where S is the scaling factor of the multiplier, so changing the compensation control amount V c can change the amplitude of the jitter deformation active compensation signal U COMP and change the phase shifting circuit The phase angle θ can change the phase of the jitter deformation active compensation signal U COMP . The method of determining the phase shift angle θ of the phase shift circuit is as follows: keep the compensation control amount V c unchanged, correspondingly the amplitude of the jitter deformation active compensation signal U COMP superimposed on the cavity translation mirror remains unchanged, and change the value of the phase shift angle θ, The angle θ that makes the error voltage V err the smallest is the required phase shift angle.

腔长控制电压VPLC与抖动形变主动补偿信号UCOMP经求和电路70相加、电压放大器2放大后一同加到腔平移镜,其中腔长控制电压VPLC补偿热膨胀和热变形引起的腔长变化,抖动形变主动补偿信号UCOMP补偿机械抖动导致的腔平移镜径向形变和陀螺腔长变化。The cavity length control voltage V PLC and the jitter deformation active compensation signal U COMP are summed by the summation circuit 70, amplified by the voltage amplifier 2, and then added to the cavity translation mirror together, wherein the cavity length control voltage V PLC compensates the cavity length caused by thermal expansion and thermal deformation The active compensation signal U COMP compensates for the radial deformation of the cavity translation mirror and the change of the gyroscope cavity length caused by mechanical jitter.

根据如上所述的激光陀螺腔平移镜的抖动形变补偿的过程,可以看到误差电压Verr的大小与主动补偿控制量Vc的大小直接相关,因此控制器的目的就在于计算主动补偿控制量Vc的大小,从而使得误差电压Verr最小。一个可选的控制策略为:固定一增量电压值ΔV,控制器输出一个初始的主动补偿控制量Vc,然后令下一个控制周期的主动补偿控制量Vc增加K·ΔV,其中K初始值为1,然后控制器检测改变后的误差电压Verr:如果Verr变小则K不变,反之如果Verr变大则改变K的符号,重复此过程即可找到使Verr最小的控制电压Vc,此时主动补偿信号将机械抖动对腔平移镜径向形变和陀螺腔长的影响减到最小。According to the vibration deformation compensation process of the laser gyro cavity translation mirror as mentioned above, it can be seen that the size of the error voltage Verr is directly related to the size of the active compensation control amount Vc , so the purpose of the controller is to calculate the active compensation control amount The size of V c , so that the error voltage V err is the smallest. An optional control strategy is: fix an incremental voltage value ΔV, the controller outputs an initial active compensation control variable V c , and then increase the active compensation control variable V c in the next control cycle by K·ΔV, where K is initially The value is 1, and then the controller detects the changed error voltage V err : if V err becomes smaller, K remains unchanged; otherwise, if V err becomes larger, the sign of K is changed, and this process can be repeated to find the control that minimizes V err Voltage V c , at this time, the active compensation signal minimizes the influence of mechanical vibration on the radial deformation of the cavity translation mirror and the length of the gyro cavity.

如图5所示,本发明第二例激光陀螺腔平移镜抖动形变主动补偿装置包括误差处理电路10、模数转换器20、控制器30、数模转换器40、移相电路50、乘法器60、求和电路70。所述误差处理电路10包括包络检波电路13和交流/直流转换电路12。所述控制器20为单片机、FPGA或者DSP,可以采用激光陀螺配套电路中已有的控制器,也可以额外增加一个控制器。所述模数转换器20优选分辨率为10位或10位以上、每秒转换速度大于100次的模数转换芯片。所述数模转换器40优选分辨率为10位或10位以上、每秒转换速度大于100次的数模转换芯片。图5中腔长控制电路1与电压放大器2属于激光陀螺正常工作所需的配套电路,可以是已有的能满足腔长控制需要的任何形式的电路。As shown in Figure 5, the second example of the active compensation device for vibration and deformation of the laser gyroscope cavity translation mirror of the present invention includes an error processing circuit 10, an analog-to-digital converter 20, a controller 30, a digital-to-analog converter 40, a phase-shifting circuit 50, and a multiplier 60. A summation circuit 70. The error processing circuit 10 includes an envelope detection circuit 13 and an AC/DC conversion circuit 12 . The controller 20 is a single-chip microcomputer, FPGA or DSP, and the existing controller in the supporting circuit of the laser gyro can be used, or an additional controller can be added. The analog-to-digital converter 20 is preferably an analog-to-digital conversion chip with a resolution of 10 bits or more and a conversion rate greater than 100 times per second. The digital-to-analog converter 40 is preferably a digital-to-analog conversion chip with a resolution of 10 bits or more and a conversion rate greater than 100 times per second. The cavity length control circuit 1 and the voltage amplifier 2 in Fig. 5 belong to the supporting circuits required for the normal operation of the laser gyroscope, and can be any existing circuits that can meet the cavity length control requirements.

在该实施例中,激光陀螺光强信号LIM输入到腔长控制电路1,形成腔长控制电压VPLC,用于对激光陀螺的热膨胀和热变形引起的腔长变化进行补偿。激光陀螺正交信号A(或B)输入到误差处理电路10的包络检波电路13,包络检波电路13输出误差信号err反映了机械抖动对光强的幅度调制,该误差信号由交流/直流转换电路12转换为直流误差电压Verr。直流误差电压Verr经模数转换器20转换成数字信号输入到控制器30,控制器30采用和实施例一中相同的方法得到抖动形变主动补偿信号UCOMP,再与腔长控制电压VPLC叠加,形成最终的控制量对激光陀螺的腔平移镜进行控制。In this embodiment, the laser gyro light intensity signal LIM is input to the cavity length control circuit 1 to form a cavity length control voltage V PLC for compensating the cavity length change caused by the thermal expansion and thermal deformation of the laser gyro. The laser gyro quadrature signal A (or B) is input to the envelope detection circuit 13 of the error processing circuit 10, and the envelope detection circuit 13 outputs the error signal err, which reflects the amplitude modulation of the light intensity by the mechanical jitter, and the error signal is composed of AC/DC The conversion circuit 12 converts it into a DC error voltage V err . The DC error voltage V err is converted into a digital signal by the analog-to-digital converter 20 and input to the controller 30. The controller 30 uses the same method as in Embodiment 1 to obtain the jitter deformation active compensation signal U COMP , and then compares it with the cavity length control voltage V PLC superimposed to form the final control amount to control the cavity translation mirror of the laser gyroscope.

如图6所示,为本发明的交流/直流转换电路12的具体实施例的电路原理图:在该实施例中,交流/直流转换电路采用型号为AD736的有效值芯片完成。带通滤波器11或包络检波器13的输出误差信号err输入到AD736芯片的2号引脚,芯片的7脚与电源+15V连接,4脚与电源-15V连接,1脚与8脚接地,5脚通过电容Cav与4脚连接,芯片6脚输出Verr为直流电压,其值等于输入err的有效值,反映了机械抖动对光强的幅度调制。As shown in FIG. 6 , it is a schematic circuit diagram of a specific embodiment of the AC/DC conversion circuit 12 of the present invention: in this embodiment, the AC/DC conversion circuit is completed by an effective value chip of the model AD736. The output error signal err of bandpass filter 11 or envelope detector 13 is input to pin 2 of AD736 chip, pin 7 of the chip is connected to power supply +15V, pin 4 is connected to power supply -15V, pin 1 and pin 8 are grounded , Pin 5 is connected to pin 4 through a capacitor C av , and pin 6 of the chip outputs V err as a DC voltage, whose value is equal to the effective value of input err, reflecting the amplitude modulation of mechanical jitter on light intensity.

如图7所示,为本发明的移相电路的具体实施例的电路原理图:在该实施例中,移相电路为运算放大器、电阻和电容组成的多端反馈全通滤波器。图中电阻R2的阻值为电阻R1的阻值的四分之一,电阻R3和电阻R4的阻值相同,均为电阻R1的阻值的两倍;电容C1和C2的容值相同。改变电路中电阻的阻值或电容的容值即可改变移相角度θ的大小。在激光陀螺腔平移镜的抖动形变补偿装置的工作过程中,上述的移相电路的移相角度θ,可以在装置第一次上电初始化时进行一次校正,或者也可以在每次上电初始化时由控制器自动调整。对于由控制器自动调整的情况,则需要采用数字电位器代替电阻以保证控制器对于移相角度θ的调整。As shown in FIG. 7 , it is a schematic circuit diagram of a specific embodiment of the phase shifting circuit of the present invention: in this embodiment, the phase shifting circuit is a multi-terminal feedback all-pass filter composed of an operational amplifier, a resistor and a capacitor. In the figure, the resistance value of the resistor R2 is 1/4 of the resistance value of the resistor R1, the resistance values of the resistor R3 and the resistor R4 are the same, which are twice the resistance value of the resistor R1; the capacitance values of the capacitors C1 and C2 are the same. Changing the resistance value of the resistor or the capacitance value of the capacitor in the circuit can change the size of the phase shift angle θ. During the working process of the jitter deformation compensation device of the laser gyro cavity translation mirror, the phase shift angle θ of the above-mentioned phase shift circuit can be corrected once when the device is first powered on and initialized, or it can be initialized every time it is powered on automatically adjusted by the controller. In the case of automatic adjustment by the controller, it is necessary to use a digital potentiometer instead of a resistor to ensure that the controller can adjust the phase shift angle θ.

如图8所示,为本发明的乘法器的具体实施例的电路原理图:在该实施例中,乘法器采用型号为AD633的乘法器芯片构成;芯片的1脚和3脚分别输入主动补偿控制量Vc和移相后的抖动反馈信号U;芯片的引脚2、引脚4和引脚6直接接地;芯片的5脚与电源-15V连接,同时通过一个0.1uF的滤波电容接地;芯片的8脚与电源+15V连接,同时通过一个0.1uF的滤波电容接地;芯片的输出引脚7输出信号UCOMP=0.1·U·VcAs shown in Figure 8, it is the circuit schematic diagram of the specific embodiment of the multiplier of the present invention: in this embodiment, the multiplier adopts the multiplier chip that the model is AD633 to form; Pin 1 and pin 3 of the chip input active compensation The control variable V c and the jitter feedback signal U after phase shifting; the pin 2, pin 4 and pin 6 of the chip are directly grounded; the pin 5 of the chip is connected to the power supply -15V, and grounded through a 0.1uF filter capacitor ; Pin 8 of the chip is connected to the power supply +15V, and grounded through a 0.1uF filter capacitor; the output pin 7 of the chip outputs signal U COMP =0.1·U ·V c .

如图9所示,为本发明的包络检波电路的具体实施例的电路原理图:在该实施例中,包络检波电路由二极管D1、滤波电容C1、滤波电阻R1和隔离电容C2组成;电路的输入端接激光陀螺正交信号A或B,电路输出端为误差信号err,反映了机械抖动对光强的幅度调制。选择C1、R1使幅度调制信号可以通过,而高于抖动频率的载波信号被滤除,C2用于隔离直流信号。As shown in Figure 9, it is a schematic circuit diagram of a specific embodiment of the envelope detection circuit of the present invention: in this embodiment, the envelope detection circuit is composed of a diode D1, a filter capacitor C1, a filter resistor R1 and an isolation capacitor C2; The input end of the circuit is connected to the laser gyro quadrature signal A or B, and the output end of the circuit is the error signal err, which reflects the amplitude modulation of the light intensity by the mechanical jitter. Select C1 and R1 to allow the amplitude modulation signal to pass, while the carrier signal higher than the jitter frequency is filtered out, and C2 is used to isolate the DC signal.

如图10所示,为本发明的求和电路的具体实施例的电路原理图:在该实施例中,电阻R1、R2、R3、R4的阻值相同,腔长控制电压VPLC接电阻R1,抖动形变主动补偿信号UCOMP接电阻R2。输出VOUT为VPLC与UCOMP之和。As shown in Figure 10, it is the circuit schematic diagram of the specific embodiment of the summation circuit of the present invention: in this embodiment, the resistance values of the resistors R1, R2, R3, R4 are the same, and the cavity length control voltage V PLC is connected to the resistor R1 , The jitter deformation active compensation signal U COMP is connected to the resistor R2. The output V OUT is the sum of V PLC and U COMP .

综上所述,本发明由于采用主动补偿的方式,将激光陀螺输出的光强信号或正交计数信号进行处理得到代表抖动调制的误差信号,控制器根据该误差信号调整抖动反馈信号的幅度和相位得到抖动形变主动补偿信号,抖动形变主动补偿信号与原先已有的腔长控制电压叠加后一同对激光陀螺的腔平移镜进行控制,在补偿热膨胀和热变形引起的激光陀螺腔长变化的同时补偿由于机械抖动导致的腔平移镜径向形变,从而减小或消除机械抖动导致的陀螺腔长变化,提高了激光陀螺的精度;本发明不改变激光陀螺的现有结构,仅通过电子线路和信号处理对机械抖动导致的腔平移镜径向形变进行主动补偿,实施成本低。In summary, since the present invention adopts the active compensation method, the light intensity signal or the quadrature counting signal output by the laser gyro is processed to obtain an error signal representing jitter modulation, and the controller adjusts the amplitude and frequency of the jitter feedback signal according to the error signal. The phase obtains the jitter deformation active compensation signal, and the jitter deformation active compensation signal is superimposed with the existing cavity length control voltage to control the cavity translation mirror of the laser gyroscope together, while compensating for the laser gyroscope cavity length change caused by thermal expansion and thermal deformation. Compensate the radial deformation of the cavity translation mirror caused by mechanical jitter, thereby reducing or eliminating the change of gyroscope cavity length caused by mechanical jitter, and improving the accuracy of the laser gyroscope; the present invention does not change the existing structure of the laser gyroscope, only through electronic circuits and The signal processing actively compensates the radial deformation of the cavity translation mirror caused by mechanical jitter, and the implementation cost is low.

Claims (9)

1.一种激光陀螺腔平移镜抖动形变主动补偿装置,包括腔长控制电路,其特征在于:还包括:误差处理电路(10)、模数转换器(20)、控制器(30)、数模转换器(40)、移相电路(50)、乘法器(60)、求和电路(70);误差处理电路(10)接收激光陀螺的光强信号,输出误差电压通过模数转换器(20)传入控制器(30);机械抖动反馈信号经所述移相电路(50)移相后与控制器(30)通过数模转换器(40)输出的补偿控制量经乘法器(60)相乘得到幅度和相位可调的抖动形变主动补偿信号,该信号与原先已有的腔长控制电压叠加后一同对激光陀螺的腔平移镜进行控制,在补偿热膨胀和热变形引起的激光陀螺腔长变化的同时补偿由于机械抖动导致的腔平移镜径向形变,从而减小或消除机械抖动导致的陀螺腔长变化。1. A laser gyroscope cavity translation mirror shake deformation active compensation device, comprising a cavity length control circuit, is characterized in that: also includes: error processing circuit (10), analog-to-digital converter (20), controller (30), digital analog converter (40), phase shifting circuit (50), multiplier (60), and summation circuit (70); the error processing circuit (10) receives the light intensity signal of the laser gyroscope, and the output error voltage passes through the analog-to-digital converter ( 20) into the controller (30); the mechanical jitter feedback signal is phase-shifted by the phase-shifting circuit (50) and the compensation control output output by the controller (30) through the digital-to-analog converter (40) is passed through the multiplier (60 ) is multiplied to obtain an active compensation signal for jitter deformation with adjustable amplitude and phase. This signal is superimposed with the existing cavity length control voltage to control the cavity translation mirror of the laser gyro. The radial deformation of the cavity translation mirror caused by mechanical vibration is compensated while the cavity length changes, thereby reducing or eliminating the change in the cavity length of the gyroscope caused by mechanical vibration. 2.根据权利要求1所述的激光陀螺腔平移镜抖动形变主动补偿装置,其特征在于:所述误差处理电路(10)对陀螺输出光强或正交计数信号处理得到误差电压。2. The active compensation device for vibration and deformation of the laser gyro cavity translation mirror according to claim 1, characterized in that: the error processing circuit (10) processes the output light intensity of the gyro or the quadrature count signal to obtain an error voltage. 3.根据权利要求1所述的激光陀螺腔平移镜抖动形变主动补偿装置,其特征在于:调整抖动形变主动补偿信号的幅度和相位使误差电压最小可减小或消除机械抖动导致的腔平移镜径向形变和陀螺腔长变化。3. The laser gyroscope cavity translation mirror vibration deformation active compensation device according to claim 1, characterized in that: adjusting the amplitude and phase of the vibration deformation active compensation signal to minimize the error voltage can reduce or eliminate the cavity translation mirror caused by mechanical vibration Radial deformation and gyro cavity length variation. 4.根据权利要求1所述的激光陀螺腔平移镜抖动形变主动补偿装置,其特征在于:所述的控制器(30)为激光陀螺自带的控制器,或者额外增加的控制器。4. The active compensation device for vibration and deformation of the laser gyroscope cavity translation mirror according to claim 1, characterized in that: the controller (30) is a built-in controller of the laser gyroscope, or an additional controller. 5.根据权利要求1~4之一所述的激光陀螺腔平移镜抖动形变主动补偿装置,其特征在于:所述误差处理电路(10)由带通滤波器(11)和交流/直流转换电路(12)组成,或由包络检波器(13)和交流/直流转换电路(12)组成。5. The laser gyro cavity translation mirror vibration and deformation active compensation device according to any one of claims 1 to 4, characterized in that: the error processing circuit (10) is composed of a bandpass filter (11) and an AC/DC conversion circuit (12), or consists of an envelope detector (13) and an AC/DC conversion circuit (12). 6.根据权利要求1~4之一所述的激光陀螺腔平移镜抖动形变主动补偿装置,其特征在于:所述的控制器(30)为单片机、FPGA或DSP。6. The active compensation device for vibration and deformation of the laser gyro cavity translation mirror according to any one of claims 1 to 4, characterized in that: the controller (30) is a single-chip microcomputer, FPGA or DSP. 7.根据权利要求5所述的激光陀螺腔平移镜抖动形变主动补偿装置,其特征在于:所述的交流/直流转换电路(12)为由型号AD736的芯片组成的交流/直流转换电路。7. The active compensation device for vibration and deformation of the laser gyroscope cavity translation mirror according to claim 5, characterized in that: the AC/DC conversion circuit (12) is an AC/DC conversion circuit composed of AD736 chips. 8.根据权利要求1~4之一所述的激光陀螺腔平移镜抖动形变主动补偿装置,其特征在于:所述的移相电路(50)为包括运算放大器、电阻和电容的多端反馈全通滤波器,通过改变电阻和电容的值从而改变移相的角度。8. The active compensation device for vibration and deformation of the laser gyro cavity translation mirror according to any one of claims 1 to 4, characterized in that: the phase shifting circuit (50) is a multi-terminal feedback all-pass including operational amplifiers, resistors and capacitors Filter, by changing the value of the resistor and capacitor to change the phase shift angle. 9.根据权利要求5所述的激光陀螺腔平移镜抖动形变主动补偿装置,其特征在于:所述的包络检波器(13)为包括调幅电阻和调幅电容的电路。9. The active compensation device for vibration and deformation of the laser gyro cavity translation mirror according to claim 5, characterized in that: the envelope detector (13) is a circuit including an amplitude modulation resistor and an amplitude modulation capacitor.
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