CN105677070A - Conductive pattern structure of touch panel and manufacturing method thereof - Google Patents
Conductive pattern structure of touch panel and manufacturing method thereof Download PDFInfo
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Abstract
Description
技术领域technical field
本发明涉及一种触控面板,特别涉及一种触控面板的导电图案结构及其制造方法。The present invention relates to a touch panel, in particular to a conductive pattern structure of the touch panel and a manufacturing method thereof.
背景技术Background technique
随着科技的进步,使得各种信息设备不断地推陈出新,例如手机、平板计算机、超轻薄笔记本电脑、及卫星导航等。除了一般以键盘或鼠标输入或操控之外,利用触控式技术来操控信息设备是一种相当直觉且受欢迎的操控方式。其中,触控面板具有人性化及直觉化的输入操作接口,使得任何年龄层的使用者都可直接以手指或触控笔选取或操控信息设备,因此也愈来愈受市场所喜爱。With the advancement of science and technology, various information devices are continuously introduced, such as mobile phones, tablet computers, ultra-thin notebook computers, and satellite navigation. In addition to generally using a keyboard or a mouse for input or manipulation, using touch technology to manipulate an information device is a rather intuitive and popular manipulation method. Among them, the touch panel has a humanized and intuitive input operation interface, so that users of any age can directly select or control information equipment with fingers or stylus, so it is becoming more and more popular in the market.
一般而言,触控面板依据其感应原理可分为电阻式、电容式与光学式,目前市场的主流技术为感应灵敏高、可多点触控的电容式触控面板。由于电容式触控面板可同时感应多点触控,因此,通常被应用于使用频率高且较为精密的电子装置,例如智能型手机、平板计算机或具有触控式输入功能的笔记本电脑。Generally speaking, touch panels can be classified into resistive, capacitive, and optical based on their sensing principles. Currently, the mainstream technology in the market is capacitive touch panels with high sensitivity and multi-touch capabilities. Since the capacitive touch panel can sense multi-touch at the same time, it is usually applied to high-frequency and relatively sophisticated electronic devices, such as smart phones, tablet computers, or notebook computers with touch input functions.
就电容式触控面板而言,其所采用的材料大都为透明导电薄膜(例如氧化铟锡ITO),利用触控面板上的透明电极与人体手指或导电物体间因接触而形成的电容感应,并通过积体控制电路的运算之后,转为可供操作系统判读的坐标数据,以判断其受触控的位置。而公知的触控面板必须以黄光工艺在玻璃或塑料的衬底上形成相互排列的多个透明电极(或称导电图案)。As far as capacitive touch panels are concerned, most of the materials used are transparent conductive films (such as indium tin oxide ITO), which use the capacitance induction formed by the contact between the transparent electrodes on the touch panel and human fingers or conductive objects. And through the operation of the integrated control circuit, it is converted into coordinate data that can be interpreted by the operating system to determine its touched position. However, in the known touch panel, a plurality of transparent electrodes (or conductive patterns) arranged mutually must be formed on a glass or plastic substrate by a yellow light process.
然而,黄光工艺的工序繁复,必须先涂覆光阻,再以具有前述透明电极相互排列的图样的光罩进行曝光,再经过显影、蚀刻、及清洗等步骤,才可形成相互排列的透明电极。因此,如此繁复的黄光工艺会提高触控面板的制造成本。更不用说多数电容式触控面板,在透明电极交错排列的部分更需要通过绝缘材料的设置,才可避免电路有短路的情形,而此类型面板需要更繁复的工艺。另外,黄光工艺的多道工序及显影剂、蚀刻液的影响均容易造成衬底的损伤。However, the process of the yellow light process is complicated. It is necessary to coat the photoresist first, then expose it with a photomask having the above-mentioned pattern of transparent electrodes arranged with each other, and then go through the steps of developing, etching, and cleaning to form the transparent electrodes arranged with each other. electrode. Therefore, such a complicated yellow light process will increase the manufacturing cost of the touch panel. Not to mention most capacitive touch panels, where the transparent electrodes are staggered, need to be provided with insulating materials to avoid short circuits in the circuit, and this type of panel requires a more complicated process. In addition, the multiple processes of the yellow light process and the influence of the developer and etching solution are likely to cause damage to the substrate.
发明内容Contents of the invention
本发明的目的为提供一种触控面板的导电图案结构及其制造方法,通过该制造方法所制成的触控面板可以达到简化触控面板制造程序的功效。The object of the present invention is to provide a conductive pattern structure of a touch panel and a manufacturing method thereof. The touch panel manufactured by the manufacturing method can achieve the effect of simplifying the manufacturing process of the touch panel.
本发明提出一种触控面板的导电图案结构,包括衬底、至少一个第一轴向导电群组、至少一个第二轴向导电群组以及多个绝缘材料。第一轴向导电群组设置在衬底的一侧,第一轴向导电群组包括多个第一导电单元以及多个第一电性连接部,这些第一导电单元沿第一轴向分隔设置,这些第一电性连接部分别电性连接相邻的这些第一导电单元,至少部分这些第一电性连接部的两端与相邻的这些第一导电单元重叠。第二轴向导电群组与第一轴向导电群组设置在衬底的同一侧,第二轴向导电群组包括多个第二导电单元以及多个第二电性连接部,且这些第二导电单元沿第二轴向分隔设置,这些第二电性连接部分别电性连接相邻的这些第二导电单元,且至少部分这些第二电性连接部的两端与相邻的这些第二导电单元重叠。这些绝缘材料分别设置在第一轴向导电群组与第二轴向导导电群组之间,以使第一轴向导电群组与第二轴向导电群组彼此电性绝缘。The present invention provides a conductive pattern structure of a touch panel, including a substrate, at least one first axial conductive group, at least one second axial conductive group, and a plurality of insulating materials. The first axial conductive group is disposed on one side of the substrate, the first axial conductive group includes a plurality of first conductive units and a plurality of first electrical connections, and these first conductive units are separated along the first axial direction It is provided that the first electrical connection parts are respectively electrically connected to the adjacent first conductive units, and at least part of the two ends of the first electrical connection parts overlap with the adjacent first conductive units. The second axial conductive group and the first axial conductive group are disposed on the same side of the substrate, the second axial conductive group includes a plurality of second conductive units and a plurality of second electrical connection parts, and these first axial conductive groups The two conductive units are spaced apart along the second axial direction, the second electrical connection parts are respectively electrically connected to the adjacent second conductive units, and at least part of the two ends of the second electrical connection parts are connected to the adjacent first second conductive units. The two conductive units overlap. The insulating materials are respectively disposed between the first axial conductive group and the second axial conductive group, so as to electrically insulate the first axial conductive group and the second axial conductive group from each other.
在本发明的一个实施例中,第一轴向导电群组在各第一电性连接部与相邻这些第一导电单元重叠的位置上,具有凸部。In one embodiment of the present invention, the first axial conductive group has a convex portion at the position where each first electrical connection portion overlaps with the adjacent first conductive units.
本发明另提出一种触控面板的导电图案结构的制造方法,包括以下步骤:提供衬底;通过掩模在衬底的一侧沉积多个第一导电单元及多个第二导电单元,这些第一导电单元沿第一轴向分隔设置,这些第二导电单元沿第二轴向分隔设置;形成多个第一电性连接部以及多个第二电性连接部,各第一电性连接部电性连接相邻的这些第一导电单元,以形成至少一个第一轴向导电群组,各第二电性连接部电性连接相邻的这些第二导电单元,以形成至少一个第二轴向导电群组;以及在衬底上设置多个绝缘材料,以使第一轴向导电群组及第二轴向导电群组彼此电性绝缘。The present invention further proposes a method for manufacturing a conductive pattern structure of a touch panel, including the following steps: providing a substrate; depositing a plurality of first conductive units and a plurality of second conductive units on one side of the substrate through a mask, these The first conductive units are spaced apart along the first axial direction, and the second conductive units are spaced apart along the second axial direction; a plurality of first electrical connection parts and a plurality of second electrical connection parts are formed, and each first electrical connection The adjacent first conductive units are electrically connected to form at least one first axial conductive group, and the second electrical connection parts are electrically connected to adjacent second conductive units to form at least one second conductive unit. an axial conductive group; and disposing a plurality of insulating materials on the substrate to electrically insulate the first axial conductive group and the second axial conductive group from each other.
在本发明的一个实施例中,这些第一导电单元具有颈部,这些绝缘材料分别设置于颈部。In an embodiment of the present invention, the first conductive units have necks, and the insulating materials are respectively disposed on the necks.
在本发明的一个实施例中,这些第一电性连接部及这些第二电性连接部以沉积、蒸镀、溅镀、印刷或喷墨的方式设置。In an embodiment of the present invention, the first electrical connection parts and the second electrical connection parts are disposed by deposition, evaporation, sputtering, printing or inkjet.
在本发明的一个实施例中,当进行沉积步骤时,这些第一导电单元空间上相互不连续,并且这些第二导电单元空间上相互不连续。In one embodiment of the present invention, when the deposition step is performed, the first conductive units are spatially discontinuous, and the second conductive units are spatially discontinuous.
在本发明的一个实施例中,这些绝缘材料以沉积、蒸镀、印刷、喷墨或点胶的方式设置。In one embodiment of the present invention, these insulating materials are provided by deposition, vapor deposition, printing, inkjet or glue dispensing.
在本发明的一个实施例中,第一轴向导电群组在各第一电性连接部与相邻这些第一导电单元重叠的位置上,具有凸部。In one embodiment of the present invention, the first axial conductive group has a convex portion at the position where each first electrical connection portion overlaps with the adjacent first conductive units.
本发明又提出一种触控面板的导电图案结构,包括衬底、至少一个第一轴向导电群组、至少一个第二轴向导电群组以及多个绝缘材料。第一轴向导电群组设置在衬底的一侧,第一轴向导电群组包括多个第一导电单元及多个第一电性连接部,这些第一导电单元沿第一轴向分隔设置,这些第一电性连接部分别电性连接相邻的这些第一导电单元,其中各第一电性连接部的至少部分厚度小于第一导电单元的厚度。第二轴向导电群组与第一轴向导电群组设置在衬底的同一侧,第二轴向导电群组包括多个第二导电单元以及多个第二电性连接部,且这些第二导电单元沿第二轴向分隔设置,这些第二电性连接部分别电性连接相邻的这些第二导电单元。这些绝缘材料分别设置在第一轴向导电群组与第二轴向导群组之间,以使第一轴向导电群组与第二轴向导电群组彼此电性绝缘。The present invention further provides a conductive pattern structure of a touch panel, including a substrate, at least one first axial conductive group, at least one second axial conductive group, and a plurality of insulating materials. The first axial conductive group is disposed on one side of the substrate, the first axial conductive group includes a plurality of first conductive units and a plurality of first electrical connections, and these first conductive units are separated along the first axial direction It is provided that the first electrical connection parts are respectively electrically connected to the adjacent first conductive units, wherein at least part of the thickness of each first electrical connection part is smaller than the thickness of the first conductive unit. The second axial conductive group and the first axial conductive group are disposed on the same side of the substrate, the second axial conductive group includes a plurality of second conductive units and a plurality of second electrical connection parts, and these first axial conductive groups The two conductive units are spaced apart along the second axis, and the second electrical connection parts are respectively electrically connected to the adjacent second conductive units. These insulating materials are respectively disposed between the first axial conductive group and the second axial conductive group, so as to electrically insulate the first axial conductive group and the second axial conductive group from each other.
本发明又提出一种触控面板的导电图案结构的制造方法,包括以下步骤:提供衬底;通过第一掩模在衬底的一侧沉积多个第一导电单元、多个第一电性连接部及多个第二导电单元,这些第一导电单元沿第一轴向分隔设置,这些第一电性连接部分别电性连接相邻的这些第一导电单元,以形成至少一个第一轴向导电群组,其中各第一电性连接部的至少部分厚度小于各第一导电单元的厚度,这些第二导电单元沿第二轴向分隔设置;形成多个第二电性连接部,电性连接相邻的这些第二导电单元,以形成第二轴向导电群组;以及在衬底上设置多个绝缘材料,以使第一轴向导电群组及第二轴向导电群组彼此电性绝缘。The present invention further proposes a method for manufacturing a conductive pattern structure of a touch panel, comprising the following steps: providing a substrate; depositing a plurality of first conductive units, a plurality of first electrical elements on one side of the substrate through a first mask; A connecting portion and a plurality of second conductive units, these first conductive units are arranged at intervals along the first axis, and these first electrical connecting portions are respectively electrically connected to the adjacent first conductive units to form at least one first axis To the conductive group, wherein at least part of the thickness of each first electrical connection part is smaller than the thickness of each first conductive unit, and these second conductive units are arranged separately along the second axis; forming a plurality of second electrical connection parts, electrically These second conductive units adjacent to each other are connected to form a second axial conductive group; and a plurality of insulating materials are arranged on the substrate so that the first axial conductive group and the second axial conductive group are connected to each other Electrically insulated.
承上所述,本发明的触控面板的导电图案结构及其制造方法,其先通过掩模以沉积具有特殊图案的第一导电单元及第二导电单元,于后可直接设置导电材料、第一电性连接部及第二电性连接部,以形成第一轴向导电群组及第二轴向导电群组。因此,可简化触控面板的制造程序。具体而言,即通过以掩模以沉积具有特殊图案的第一导电单元及第二导电单元的方式取代公知多道工序的黄光工艺,以达到减少制造工序的目的。Based on the above, the conductive pattern structure of the touch panel of the present invention and its manufacturing method first pass through a mask to deposit the first conductive unit and the second conductive unit with special patterns, and then directly set the conductive material, the second conductive unit, and the second conductive unit. An electrical connection part and a second electrical connection part are used to form a first axial conductive group and a second axial conductive group. Therefore, the manufacturing process of the touch panel can be simplified. Specifically, by using a mask to deposit the first conductive unit and the second conductive unit with a special pattern instead of the known multi-process yellow light process, the purpose of reducing the manufacturing process is achieved.
附图说明Description of drawings
图1为本发明第一实施例的触控面板的导电图案结构的示意图。FIG. 1 is a schematic diagram of a conductive pattern structure of a touch panel according to a first embodiment of the present invention.
图2为本发明第一实施例的触控面板的导电图案结构的制造方法的步骤流程图。FIG. 2 is a flow chart of the steps of the method for manufacturing the conductive pattern structure of the touch panel according to the first embodiment of the present invention.
图3为图2所示的步骤S10及步骤S20实施方式的示意图。FIG. 3 is a schematic diagram of an implementation of step S10 and step S20 shown in FIG. 2 .
图4为图2所示的步骤S20的掩模的示意图。FIG. 4 is a schematic diagram of a mask in step S20 shown in FIG. 2 .
图5为图2所示的步骤S30实施方式的示意图。FIG. 5 is a schematic diagram of an implementation manner of step S30 shown in FIG. 2 .
图6为图1所示的导电图案结构在A-A剖面线的剖面图。FIG. 6 is a cross-sectional view of the conductive pattern structure shown in FIG. 1 along the line A-A.
图7为本发明第一实施例的导电图案结构的另一制造方法的步骤流程图。FIG. 7 is a flowchart of steps of another manufacturing method of the conductive pattern structure according to the first embodiment of the present invention.
图8为图7所示的步骤S42的掩模的示意图。FIG. 8 is a schematic diagram of a mask in step S42 shown in FIG. 7 .
图9为本发明第一实施例的导电图案结构的另一制造方法实施方式的步骤流程示意图。FIG. 9 is a schematic flowchart of the steps of another manufacturing method implementation manner of the conductive pattern structure according to the first embodiment of the present invention.
图10为本发明第二实施例的触控面板的导电图案结构的制造方法的步骤流程图。FIG. 10 is a flow chart of the steps of the method for manufacturing the conductive pattern structure of the touch panel according to the second embodiment of the present invention.
图11为图10所示的步骤S20的第一掩模的示意图。FIG. 11 is a schematic diagram of the first mask in step S20 shown in FIG. 10 .
图12A为图10所示的步骤S10及步骤S25实施方式的示意图。FIG. 12A is a schematic diagram of an implementation of step S10 and step S25 shown in FIG. 10 .
图12B为图12A所示的A-A剖面线的剖面图。Fig. 12B is a cross-sectional view taken along line A-A shown in Fig. 12A.
图13为本发明第二实施例的触控面板的导电图案结构的示意图。FIG. 13 is a schematic diagram of a conductive pattern structure of a touch panel according to a second embodiment of the present invention.
具体实施方式detailed description
以下将参照相关附图,说明依本发明优选实施例的触控面板的导电图案结构及其制造方法,其中相同的组件将以相同的附图标记加以说明。本发明所有实施方式的附图仅为示意,不代表真实尺寸与比例。The conductive pattern structure and the manufacturing method of the touch panel according to the preferred embodiment of the present invention will be described below with reference to the relevant drawings, wherein the same components will be described with the same reference numerals. The drawings of all the embodiments of the present invention are for illustration only, and do not represent real dimensions and proportions.
图1为本发明第一实施例的触控面板的导电图案结构1的示意图,图2为本发明第一实施例的触控面板的导电图案结构1的制造方法的步骤流程图,故可依据图2所示的制造方法,制成如图1所示的触控面板的导电图案结构1,而导电图案结构1可应用于各式显示面板的触控衬底,例如应用于液晶显示面板(LiquidCrystalDisplay,LCD)、发光二极管(LED)显示面板或有机发光二极管(OLED)显示面板、电子纸(书)等的触控衬底。以下先简述本实施例的触控面板的导电图案结构1的主要结构,再续行说明其制造方法。1 is a schematic diagram of a conductive pattern structure 1 of a touch panel according to a first embodiment of the present invention, and FIG. 2 is a flow chart of the steps of a manufacturing method of a conductive pattern structure 1 of a touch panel according to a first embodiment of the present invention. The manufacturing method shown in FIG. 2 makes the conductive pattern structure 1 of the touch panel shown in FIG. 1, and the conductive pattern structure 1 can be applied to touch substrates of various display panels, such as liquid crystal display panels ( LiquidCrystalDisplay, LCD), light-emitting diode (LED) display panel or organic light-emitting diode (OLED) display panel, electronic paper (book) and other touch substrates. The main structure of the conductive pattern structure 1 of the touch panel of this embodiment will be briefly described below, and then its manufacturing method will be described in a row.
请先参考图1所示,本实施例的导电图案结构1包括衬底11、至少一个第一轴向导电群组12、至少一个第二轴向导电群组13以及多个绝缘材料14。第一轴向导电群组12设置在衬底11的一侧,第一轴向导电群组12包括多个第一导电单元121以及多个第一电性连接部122,这些第一导电单元121沿第一轴向X分隔设置,这些第一电性连接部122分别电性连接相邻的这些第一导电单元121。第二轴向导电群组13与第一轴向导电群组12设置在衬底11的同一侧,第二轴向导电群组13包括多个第二导电单元131以及多个第二电性连接部132,且这些第二导电单元131沿第二轴向Y分隔设置。Please refer to FIG. 1 , the conductive pattern structure 1 of this embodiment includes a substrate 11 , at least one first axial conductive group 12 , at least one second axial conductive group 13 and a plurality of insulating materials 14 . The first axial conductive group 12 is disposed on one side of the substrate 11. The first axial conductive group 12 includes a plurality of first conductive units 121 and a plurality of first electrical connection parts 122. These first conductive units 121 Separated along the first axis X, the first electrical connection portions 122 are respectively electrically connected to the adjacent first conductive units 121 . The second axial conductive group 13 is disposed on the same side of the substrate 11 as the first axial conductive group 12, and the second axial conductive group 13 includes a plurality of second conductive units 131 and a plurality of second electrical connections portion 132 , and the second conductive units 131 are spaced apart along the second axis Y.
如图2所示,导电图案结构1的制造方法包括以下步骤:提供衬底(步骤S10);通过掩模在衬底的一侧沉积多个第一导电单元及多个第二导电单元,这些第一导电单元沿第一轴向分隔设置,这些第二导电单元沿第二轴向分隔设置(步骤S20);在衬底上设置多个绝缘材料(步骤S30);形成多个第一电性连接部以及多个第二电性连接部(步骤S40)。As shown in Figure 2, the manufacturing method of the conductive pattern structure 1 includes the following steps: providing a substrate (step S10); depositing a plurality of first conductive units and a plurality of second conductive units on one side of the substrate through a mask, these The first conductive units are spaced apart along the first axis, and the second conductive units are spaced apart along the second axis (step S20); a plurality of insulating materials are arranged on the substrate (step S30); and a plurality of first electrical elements are formed. A connection part and a plurality of second electrical connection parts (step S40).
图3为图2所示的步骤S10及步骤S20实施方式的示意图,图4为图2所示的步骤S20的掩模2的示意图,请同时参考图2、图3及图4所示。在步骤S10中,提供衬底11,其中,衬底11的材质可包含树脂、金属、陶瓷、玻璃、塑料或其它透光的材质。并在步骤S20中,通过掩模2在衬底11的一侧沉积多个第一导电单元121及多个第二导电单元131,且第一导电单元121沿第一轴向X分隔设置,而第二导电单元131沿第二轴向Y分隔设置。具体而言,本实施例通过掩模2的图案配置,如图4所示,本实施例的掩模2具有多个第一开口21及多个第二开口22,并将导电材料经由掩模2沉积在衬底11上,使衬底11上形成沿第一轴向X分隔设置的第一导电单元121及沿第二轴向Y分隔设置的多个第二导电单元131,如图3所示。也就是说,当进行沉积步骤(S20)时,这些第一导电单元121在空间上相互不连续,并且这些第二导电单元131在空间上相互不连续,以形成相互分隔设置的配置关系。3 is a schematic diagram of the implementation of step S10 and step S20 shown in FIG. 2 , and FIG. 4 is a schematic diagram of the mask 2 in step S20 shown in FIG. 2 , please refer to FIG. 2 , FIG. 3 and FIG. 4 at the same time. In step S10 , a substrate 11 is provided, wherein the material of the substrate 11 may include resin, metal, ceramics, glass, plastic or other transparent materials. And in step S20, a plurality of first conductive units 121 and a plurality of second conductive units 131 are deposited on one side of the substrate 11 through the mask 2, and the first conductive units 121 are spaced apart along the first axis X, and The second conductive units 131 are arranged at intervals along the second axis Y. Specifically, this embodiment adopts the pattern configuration of the mask 2. As shown in FIG. 4, the mask 2 of this embodiment has a plurality of first openings 21 and a plurality of second openings 22, and the conductive material is 2 is deposited on the substrate 11, so that the first conductive units 121 arranged separately along the first axis X and a plurality of second conductive units 131 arranged separately along the second axis Y are formed on the substrate 11, as shown in FIG. 3 Show. That is to say, when the deposition step ( S20 ) is performed, the first conductive units 121 are spatially discontinuous, and the second conductive units 131 are spatially discontinuous, so as to form a configuration relationship separated from each other.
其中,沉积的方式可例如但不限于蒸镀(evaporation)、溅镀(sputter)或化学沉积等方式,通过掩模2在衬底11上形成这些第一导电单元121及这些第二导电单元131,使第一导电单元121的图形与第一开口21相同,第二导电单元131的图形与第二开口22相同。而导电材料(即第一导电单元121及第二导电单元131)可例如但不限于为铟锡氧化物(indium-tinoxide,ITO)或铟锌氧化物(indium-zincoxide,IZO)、金属、石墨烯或其它导电材料。Wherein, the deposition method can be, for example but not limited to, evaporation (evaporation), sputtering (sputter) or chemical deposition, etc., and the first conductive units 121 and the second conductive units 131 are formed on the substrate 11 through the mask 2 , the pattern of the first conductive unit 121 is the same as that of the first opening 21 , and the pattern of the second conductive unit 131 is the same as that of the second opening 22 . The conductive material (namely the first conductive unit 121 and the second conductive unit 131) can be, for example but not limited to, indium tin oxide (indium-tinoxide, ITO) or indium zinc oxide (indium-zinc oxide, IZO), metal, graphite vinyl or other conductive materials.
图5为图2所示的步骤S30实施方式的示意图,接着,在步骤S30中,在衬底11上设置多个绝缘材料14。详细地说,请先参考图3所示,本实施例的第一导电单元121具有颈部123,除了第一导电单元121周缘的尖端以外,颈部123即为第一导电单元121最窄的区域,且优选地,颈部123配置在第一导电单元121靠近中央的位置,使第一导电单元121呈对称的图形。接着,请搭配图5所示,在步骤S30则将绝缘材料14分别设置于颈部123。另外,在本实施例中,绝缘材料14可例如但不限于二氧化硅(SiO2),并可以例如但不限于沉积、蒸镀、印刷(printing)、喷墨(inkjeting)或点胶的方式设置,优选地,本实施例的绝缘材料14以印刷的方式,形成在第一导电单元121的颈部123。其中,绝缘材料14可使如图1所示的第一轴向导电群组12及第二轴向导电群组13彼此电性绝缘,其细节在下文中进行详细阐述。FIG. 5 is a schematic diagram of an embodiment of step S30 shown in FIG. 2 , and then, in step S30 , a plurality of insulating materials 14 are disposed on the substrate 11 . Specifically, please refer to FIG. 3, the first conductive unit 121 of this embodiment has a neck 123, except for the tip of the first conductive unit 121, the neck 123 is the narrowest part of the first conductive unit 121. region, and preferably, the neck portion 123 is disposed near the center of the first conductive unit 121 so that the first conductive unit 121 has a symmetrical shape. Next, as shown in FIG. 5 , in step S30 , insulating materials 14 are respectively disposed on the necks 123 . In addition, in this embodiment, the insulating material 14 can be, for example but not limited to, silicon dioxide (SiO2), and can be provided in a manner such as but not limited to deposition, evaporation, printing (printing), inkjet (inkjeting) or dispensing , preferably, the insulating material 14 of this embodiment is formed on the neck portion 123 of the first conductive unit 121 by printing. Wherein, the insulating material 14 can electrically insulate the first axial conductive group 12 and the second axial conductive group 13 shown in FIG. 1 from each other, details of which will be described in detail below.
请参考图1及图2所示,在步骤S40中,形成多个第一电性连接部122以及多个第二电性连接部132,而其配置方式为,各第一电性连接部122电性连接相邻的第一导电单元121,以形成至少一个第一轴向导电群组12,各第二电性连接部132设置在绝缘材料14上,以电性连接相邻的这些第二导电单元131,以形成至少一个第二轴向导电群组13。Please refer to FIG. 1 and FIG. 2, in step S40, a plurality of first electrical connection parts 122 and a plurality of second electrical connection parts 132 are formed, and the arrangement thereof is that each first electrical connection part 122 The adjacent first conductive units 121 are electrically connected to form at least one first axial conductive group 12, and each second electrical connection part 132 is disposed on the insulating material 14 to electrically connect the adjacent second The conductive unit 131 is used to form at least one second axial conductive group 13 .
也就是说,本实施例的第一轴向导电群组12由多个第一导电单元121以及多个第一电性连接部122所组成,其中,第一导电单元121具有颈部123并沿着第一轴向X分隔设置,而第一电性连接部122分别电性连接相邻的两个第一导电单元121。其中,本实施例的第一电性连接部122的宽度与前述的第一导电单元121的颈部123大致相同,当然,本发明并不限制第一电性连接部122的宽度,也可以为布满相邻两个第一导电单元121之间的空隙的结构,即第一电性连接部122的宽度也可与第一导电单元121最宽的部分相等,本发明并不对此进行限制。本实施例的第二轴向导电群组13则由多个第二导电单元131及多个第二电性连接部132所组成,且这些第二导电单元131沿第二轴向Y分隔设置,而第二电性连接部132设置在绝缘材料14上,进而使相邻两个第二导电单元131电性连接。That is to say, the first axial conductive group 12 of this embodiment is composed of a plurality of first conductive units 121 and a plurality of first electrical connection parts 122, wherein the first conductive units 121 have a neck portion 123 and extend along the They are spaced apart along the first axis X, and the first electrical connection portions 122 are respectively electrically connected to two adjacent first conductive units 121 . Wherein, the width of the first electrical connection portion 122 in this embodiment is approximately the same as the aforementioned neck portion 123 of the first conductive unit 121. Of course, the present invention does not limit the width of the first electrical connection portion 122, and may also be The structure that fills the gap between two adjacent first conductive units 121 , that is, the width of the first electrical connection portion 122 may also be equal to the widest part of the first conductive unit 121 , which is not limited in the present invention. The second axial conductive group 13 of this embodiment is composed of a plurality of second conductive units 131 and a plurality of second electrical connection parts 132, and these second conductive units 131 are arranged separately along the second axis Y, The second electrical connection portion 132 is disposed on the insulating material 14 to electrically connect two adjacent second conductive units 131 .
如图1所示,依据本实施例的制造方法所制成的导电图案结构1,其至少部分第一电性连接部122的两端与相邻的第一导电单元121重叠,且由于第二电性连接部132分别电性连接相邻的两个第二导电单元131,故至少部分第二电性连接部132的两端与相邻的第二导电单元131重叠。因此,本实施例的部分第一电性连接部122和第二电性连接部132,其两端皆与相邻的第一导电单元121或第二导电单元131重叠,故在重叠区域,第一电性连接部122和第二电性连接部132的高度也高于第一导电单元121或第二导电单元131。图6为图1所示的导电图案结构1在A-A剖面线的剖面图,图6所示的是相邻两个第一导电单元121与其间连接的第一电性连接部122,由图6所示可知,本实施例的第一电性连接部122与第一导电单元121重叠之处,第一电性连接部122的高度高于第一导电单元121。进而言之,请搭配图1所示,即本实施第一轴向导电群组12在各第一电性连接部122与相邻第一导电单元121重叠的位置上,具有凸部124。同样地,第二轴向导电群组13在各第二电性连接部132与相邻第二导电单元131重叠的位置上,也具有凸部(图未显示)。As shown in FIG. 1 , in the conductive pattern structure 1 manufactured according to the manufacturing method of this embodiment, at least part of the two ends of the first electrical connection part 122 overlaps with the adjacent first conductive unit 121 , and due to the second The electrical connection parts 132 are respectively electrically connected to two adjacent second conductive units 131 , so at least part of the two ends of the second electrical connection parts 132 overlap with the adjacent second conductive units 131 . Therefore, part of the first electrical connection portion 122 and the second electrical connection portion 132 in this embodiment overlap with the adjacent first conductive unit 121 or second conductive unit 131 at both ends, so in the overlapping area, the second The heights of the first electrical connection portion 122 and the second electrical connection portion 132 are also higher than the first conductive unit 121 or the second conductive unit 131 . FIG. 6 is a cross-sectional view of the conductive pattern structure 1 shown in FIG. 1 on the A-A section line. FIG. 6 shows two adjacent first conductive units 121 and the first electrical connection portion 122 connected therebetween. As can be seen from the illustration, where the first electrical connection portion 122 and the first conductive unit 121 overlap in this embodiment, the height of the first electrical connection portion 122 is higher than that of the first conductive unit 121 . Furthermore, as shown in FIG. 1 , the first axial conductive group 12 in this embodiment has a convex portion 124 at the position where each first electrical connection portion 122 overlaps with an adjacent first conductive unit 121 . Similarly, the second axial conductive group 13 also has a convex portion (not shown) at the position where each second electrical connection portion 132 overlaps with the adjacent second conductive unit 131 .
在制造方法上,请参考图5所示,第一电性连接部122及第二电性连接部132可以例如但不限于沉积(可以为蒸镀、溅镀或化学沉积)、印刷或喷墨的方式设置在衬底11上,在本实施例中,是以印刷的方式,故可通过印刷钢板的设计,将第一电性连接部122设置在相邻两个第一导电单元121之间,并且将第二电性连接部132设置在绝缘材料14上,以电性连接相邻两个第二导电单元131。In terms of manufacturing method, please refer to FIG. 5, the first electrical connection part 122 and the second electrical connection part 132 can be, for example but not limited to, deposition (which can be vapor deposition, sputtering or chemical deposition), printing or inkjet It is arranged on the substrate 11 in a manner, in this embodiment, it is printed, so the first electrical connection part 122 can be arranged between two adjacent first conductive units 121 through the design of the printed steel plate. , and the second electrical connection portion 132 is disposed on the insulating material 14 to electrically connect two adjacent second conductive units 131 .
在其它实施例中,也可通过沉积的方式形成第一电性连接部122及第二电性连接部132,如图7所示,图7为本发明第一实施例的导电图案结构的另一制造方法的步骤流程图。本实施例的步骤S42通过另一掩模3在衬底11的一侧沉积多个第一电性连接部122以及多个第二电性连接部132。图8为图7所示的步骤S42的掩模3的示意图,请同时参考图5、图7及图8所示,掩模3具有多个第三开口31及多个第四开口32(如图8),且第三开口31的图形及其位置对应于第一电性连接部122,而第四开口32的图形及其位置则对应于第二电性连接部132。将掩模3对应于衬底11设置,并将导电材料经由掩模3沉积于衬底11,使第一电性连接部122与第二电性连接部132沉积在衬底11上,且本实施例以溅镀(sputter)的方式沉积到衬底11,可参考图1所示,以形成电性导通的第一轴向导电群组12与第二轴向导电群组13。当然,形成第一导电单元121及第二导电单元131的导电材料,与形成第一电性连接部122及第二电性连接部132的导电材料可以为相同或不相同,其材质都可例如但不限于为铟锡氧化物、或铟锌氧化物。In other embodiments, the first electrical connection portion 122 and the second electrical connection portion 132 can also be formed by deposition, as shown in FIG. 7 , which is another example of the conductive pattern structure of the first embodiment of the present invention. A flow chart of the steps of the manufacturing method. Step S42 of this embodiment deposits a plurality of first electrical connection parts 122 and a plurality of second electrical connection parts 132 on one side of the substrate 11 through another mask 3 . FIG. 8 is a schematic diagram of the mask 3 in step S42 shown in FIG. 7. Please refer to FIG. 5, FIG. 7 and FIG. 8 ), and the pattern and position of the third opening 31 correspond to the first electrical connection portion 122 , while the pattern and position of the fourth opening 32 correspond to the second electrical connection portion 132 . The mask 3 is set corresponding to the substrate 11, and the conductive material is deposited on the substrate 11 through the mask 3, so that the first electrical connection part 122 and the second electrical connection part 132 are deposited on the substrate 11, and this The embodiment is deposited on the substrate 11 by sputtering, as shown in FIG. 1 , to form the first axial conductive group 12 and the second axial conductive group 13 that are electrically connected. Certainly, the conductive material forming the first conductive unit 121 and the second conductive unit 131 may be the same as or different from the conductive material forming the first electrical connection portion 122 and the second electrical connection portion 132, and their materials may be, for example, But not limited to indium tin oxide, or indium zinc oxide.
如前所述,步骤S30中所设置的多个绝缘材料14,即分别设置在第一轴向导电群组12与第二轴向导导电群组13之间,以使第一轴向导电群组12与第二轴向导电群组13彼此电性绝缘,以避免短路的情形发生。As mentioned above, the plurality of insulating materials 14 provided in step S30 are respectively provided between the first axial conductive group 12 and the second axial conductive group 13, so that the first axial conductive group 12 and the second axial conductive group 13 are electrically insulated from each other to avoid short circuit.
另外,本发明也不限制形成第一导电单元121及第二导电单元131(步骤S20),与形成第一电性连接部122及第二电性连接部132(步骤S40)的步骤实施顺序。图9为本发明第一实施例的导电图案结构的另一制造方法的步骤流程图,如图9所示,也可先形成第一电性连接部122及第二电性连接部132(步骤S40),再对应于第二电性连接部132的位置,并设置绝缘材料14(步骤S30),接着,再沉积第一导电单元121与第二导电单元131(步骤S20),以形成第一轴向导电群组12与第二轴向导导电群组13。In addition, the present invention does not limit the implementation sequence of the steps of forming the first conductive unit 121 and the second conductive unit 131 (step S20 ) and forming the first electrical connection portion 122 and the second electrical connection portion 132 (step S40 ). 9 is a flow chart of the steps of another manufacturing method of the conductive pattern structure according to the first embodiment of the present invention. As shown in FIG. S40), then corresponding to the position of the second electrical connection portion 132, and setting the insulating material 14 (step S30), then, depositing the first conductive unit 121 and the second conductive unit 131 (step S20), to form the first The axial conductive group 12 and the second axial conductive group 13 .
承上所述,前述实施例是在步骤S20中,通过掩模2在衬底11的一侧直接沉积多个第一导电单元121及多个第二导电单元131,故可取代公知多道工序的黄光工艺,以达到减少制造工序的目的。Based on the above, in the previous embodiment, in step S20, a plurality of first conductive units 121 and a plurality of second conductive units 131 are directly deposited on one side of the substrate 11 through the mask 2, so it can replace the known multiple processes Yellow light process, in order to achieve the purpose of reducing the manufacturing process.
在本发明第二实施例中,提供不同的掩模,在此称为第一掩模4,同样可达到在衬底的一侧直接沉积多个第一导电单元及多个第二导电单元,以达到减少制造工序的目的。图10为本发明第二实施例的触控面板的导电图案结构的制造方法的步骤流程图,可通过实施如图10的制造方法,得到本发明第二实施例的导电图案结构5(请先参考图13所示)。In the second embodiment of the present invention, a different mask is provided, which is referred to as the first mask 4 herein, which can also directly deposit a plurality of first conductive units and a plurality of second conductive units on one side of the substrate, In order to achieve the purpose of reducing the manufacturing process. 10 is a flow chart of the steps of the method for manufacturing the conductive pattern structure of the touch panel according to the second embodiment of the present invention. The conductive pattern structure 5 of the second embodiment of the present invention can be obtained by implementing the manufacturing method as shown in FIG. 10 (please first Refer to Figure 13).
本发明第二实施例的导电图案结构2的制造方法包括以下步骤:提供衬底(步骤S10);通过第一掩模在衬底的一侧沉积多个第一导电单元、多个第一电性连接部及多个第二导电单元,这些第一导电单元沿第一轴向分隔设置,这些第一电性连接部分别电性连接相邻的这些第一导电单元,以形成至少一个第一轴向导电群组,其中各第一电性连接部的至少部分厚度小于各第一导电单元的厚度,这些第二导电单元沿第二轴向分隔设置(步骤S25);在衬底上设置多个绝缘材料(步骤S30);在衬底的一侧形成多个第二电性连接部,电性连接相邻的这些第二导电单元,以形成第二轴向导电群组(步骤S45)。The manufacturing method of the conductive pattern structure 2 according to the second embodiment of the present invention includes the following steps: providing a substrate (step S10); These first conductive units are spaced apart along the first axial direction, and these first electrical connection parts are respectively electrically connected to the adjacent first conductive units to form at least one first An axial conductive group, wherein at least part of the thickness of each first electrical connection part is smaller than the thickness of each first conductive unit, and these second conductive units are arranged separately along the second axial direction (step S25); an insulating material (step S30); forming a plurality of second electrical connection parts on one side of the substrate to electrically connect adjacent second conductive units to form a second axial conductive group (step S45).
图11为图10所示的步骤S20的第一掩模4的示意图,图12A为图10所示的步骤S10及步骤S25实施方式的示意图,请同时搭配图11及图12A所示。首先,在步骤S10提供衬底51,接着,在步骤S25中,通过第一掩模4在衬底51的一侧沉积多个第一导电单元521、多个第一电性连接部522及多个第二导电单元531。具体而言,本实施例的第一掩模4具有多个第五开口41,及多个第六开口42。其中,第五开口41的图形对应于第一导电单元521及部分的第一电性连接部522,如图11所示的第五开口41a的图形对应于第一导电单元521,而第五开口41b的图形对应于部分的第一电性连接部522。另外,第六开口42的图形对应于第二导电单元531。在步骤S25中,将导电材料通过第一掩模4沉积在衬底51的一侧,并可在衬底51沉积形成第一导电单元521、第一电性连接部522及多个第二导电单元531,如图12A所示。而本实施例的沉积的方式同样可以例如但不限于溅镀、蒸镀、化学沉积等方式。其中,虽然本实施例所使用的第一掩模4具有第五开口41b对应于部分的第一电性连接部522,而在沉积的过程中,导电材料通过第五开口41b后,将会往两侧扩散,进而可形成相互电性连接的第一电性连接部522,其中,第一电性连接部522的至少部分厚度小于各第一导电单元521的厚度,如图12B所示。图12B为图12A所示的A-A剖面线的剖面图,其显示第一电性连接部522靠近中央处的厚度小于第一导电单元521。FIG. 11 is a schematic diagram of the first mask 4 in step S20 shown in FIG. 10 , and FIG. 12A is a schematic diagram of an implementation of step S10 and step S25 shown in FIG. 10 , please match FIG. 11 and FIG. 12A . First, the substrate 51 is provided in step S10, and then, in step S25, a plurality of first conductive units 521, a plurality of first electrical connection parts 522 and a plurality of first conductive units 521 are deposited on one side of the substrate 51 through the first mask 4. a second conductive unit 531. Specifically, the first mask 4 of this embodiment has a plurality of fifth openings 41 and a plurality of sixth openings 42 . Wherein, the pattern of the fifth opening 41 corresponds to the first conductive unit 521 and part of the first electrical connection portion 522, the pattern of the fifth opening 41a shown in FIG. 11 corresponds to the first conductive unit 521, and the fifth opening The figure 41b corresponds to a part of the first electrical connection portion 522 . In addition, the pattern of the sixth opening 42 corresponds to the second conductive unit 531 . In step S25, a conductive material is deposited on one side of the substrate 51 through the first mask 4, and can be deposited on the substrate 51 to form a first conductive unit 521, a first electrical connection portion 522 and a plurality of second conductive materials. Unit 531, as shown in Figure 12A. The deposition method in this embodiment can also be, for example but not limited to, sputtering, vapor deposition, chemical deposition and the like. Wherein, although the first mask 4 used in this embodiment has the fifth opening 41b corresponding to the part of the first electrical connection portion 522, during the deposition process, after the conductive material passes through the fifth opening 41b, it will go to Both sides are diffused to form first electrical connection parts 522 electrically connected to each other, wherein at least part of the thickness of the first electrical connection part 522 is smaller than the thickness of each first conductive unit 521 , as shown in FIG. 12B . FIG. 12B is a cross-sectional view along line A-A shown in FIG. 12A , which shows that the thickness of the first electrical connection portion 522 near the center is smaller than that of the first conductive unit 521 .
请参考图12A所示,在步骤S25中,即可形成第一导电单元521沿第一轴向X分隔设置,第一电性连接部522分别电性连接相邻的第一导电单元521,以形成至少一个第一轴向导电群组52的图案结构,且第二导电单元531沿第二轴向Y分隔设置。Please refer to FIG. 12A , in step S25, the first conductive units 521 can be formed to be separated along the first axis X, and the first electrical connection parts 522 are respectively electrically connected to the adjacent first conductive units 521, so as to A pattern structure of at least one first-axis conductive group 52 is formed, and the second conductive units 531 are arranged at intervals along the second axis Y.
图13为本发明第二实施例的触控面板的导电图案结构的示意图,请同时参考图10、图12A及图13所示。接着,在步骤S30中,在衬底51上设置多个绝缘材料54,且在本实施例设置在第一电性连接部522上,并在步骤S45中,在衬底51的一侧形成多个第二电性连接部532,在本实施例中设置于绝缘材料54上,以电性连接相邻的第二导电单元531,以形成第二轴向导电群组53。因此,本实施例的绝缘材料54设置在第一电性连接部522与第二电性连接部532之间,以使第一轴向导电群组52及第二轴向导电群组53彼此电性绝缘。FIG. 13 is a schematic diagram of a conductive pattern structure of a touch panel according to a second embodiment of the present invention, please refer to FIG. 10 , FIG. 12A and FIG. 13 at the same time. Next, in step S30, a plurality of insulating materials 54 are disposed on the substrate 51, and in this embodiment, disposed on the first electrical connection portion 522, and in step S45, a plurality of insulating materials 54 are formed on one side of the substrate 51. A second electrical connection portion 532 is disposed on the insulating material 54 in this embodiment to electrically connect adjacent second conductive units 531 to form the second axial conductive group 53 . Therefore, the insulating material 54 of this embodiment is disposed between the first electrical connection portion 522 and the second electrical connection portion 532, so that the first axial conductive group 52 and the second axial conductive group 53 are electrically connected to each other. sex insulation.
承上所述,本发明第二实施例的触控面板的导电图案结构5,可经由上述的制造方法制备完成,其主要结构包括衬底51、第一轴向导电群组52、第二轴向导电群组53以及绝缘材料54。第一轴向导电群组52设置在衬底51的一侧,第一轴向导电群组52包括第一导电单元521及第一电性连接部522,第一导电单元521沿第一轴向X分隔设置,第一电性连接部522分别电性连接相邻的第一导电单元521,其中第一电性连接部522的至少部分厚度小于第一导电单元521的厚度。第二轴向导电群组53与第一轴向导电群组52设置在衬底51的同一侧,第二轴向导电群组53包括第二导电单元531以及第二电性连接部532,且第二导电单元531沿第二轴向Y分隔设置,第二电性连接部532分别电性连接相邻的第二导电单元531。绝缘材料54分别设置在第一轴向导电群组52与第二轴向导群组53之间,以使第一轴向导电群组52与第二轴向导电群53组彼此电性绝缘。Based on the above, the conductive pattern structure 5 of the touch panel of the second embodiment of the present invention can be prepared through the above-mentioned manufacturing method, and its main structure includes a substrate 51, a first axial conductive group 52, a second axial To the conductive group 53 and the insulating material 54 . The first axial conductive group 52 is disposed on one side of the substrate 51. The first axial conductive group 52 includes a first conductive unit 521 and a first electrical connection portion 522. The first conductive unit 521 is along the first axial direction. The Xs are spaced apart, and the first electrical connection parts 522 are respectively electrically connected to the adjacent first conductive units 521 , wherein at least part of the thickness of the first electrical connection parts 522 is smaller than the thickness of the first conductive units 521 . The second axial conductive group 53 is disposed on the same side of the substrate 51 as the first axial conductive group 52, the second axial conductive group 53 includes a second conductive unit 531 and a second electrical connection portion 532, and The second conductive units 531 are spaced apart along the second axis Y, and the second electrical connection portions 532 are respectively electrically connected to adjacent second conductive units 531 . The insulating material 54 is respectively disposed between the first axial conductive group 52 and the second axial conductive group 53 to electrically insulate the first axial conductive group 52 and the second axial conductive group 53 from each other.
综上所述,本发明的触控面板的导电图案结构及其制造方法,其先通过掩模以沉积具有特殊图案的第一导电单元及第二导电单元,于后可直接设置导电材料、第一电性连接部及第二电性连接部,以形成第一轴向导电群组及第二轴向导电群组。因此,可简化触控面板的制造程序。具体而言,即通过以掩模以沉积具有特殊图案的第一导电单元及第二导电单元的方式取代公知多道工序的黄光工艺,以达到减少制造工序的目的。To sum up, the conductive pattern structure of the touch panel of the present invention and the manufacturing method thereof first pass through a mask to deposit the first conductive unit and the second conductive unit with a special pattern, and then directly set the conductive material, the second conductive unit, etc. An electrical connection part and a second electrical connection part are used to form a first axial conductive group and a second axial conductive group. Therefore, the manufacturing process of the touch panel can be simplified. Specifically, by using a mask to deposit the first conductive unit and the second conductive unit with a special pattern instead of the known multi-process yellow light process, the purpose of reducing the manufacturing process is achieved.
以上所述仅为举例性的,而非为限制性的。任何未脱离本发明的精神与范畴,而对其进行的等效修改或变更,均应包含在后附的权利要求书中。The foregoing descriptions are illustrative only, not limiting. Any equivalent modifications or changes made without departing from the spirit and scope of the present invention shall be included in the appended claims.
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