CN105667085B - One kind realizes the fine barrier array of graphical inkjet printing and its manufacture method - Google Patents

Abstract

The invention relates to a patterned inkjet printing fine barrier array and a manufacturing method thereof. The barrier rib array includes a substrate, an array of liquid storage tanks arranged in parallel and staggered intervals along the horizontal and vertical directions on the surface of the substrate, and a transition layer arranged at the bottom of the array of liquid storage tanks. The invention only needs to design and process the required barrier array according to the water-based or oil-based ink-jet printing ink, and use the barrier-rib array as the basic point of ink-jet printing to print, thereby realizing graphic ink-jet printing. The method can not only effectively simplify the manufacturing process of the graphic ink-jet printing, but also improve the precision of the graphic ink-jet printing and reduce the cost of the graphic ink-jet printing.

Description

A patterned inkjet printing fine barrier array and its manufacturing method

technical field

The invention relates to the field of printed display devices, in particular to a patterned inkjet printing fine barrier array and a manufacturing method thereof.

Background technique

Display technology and industry experienced major changes at the turn of the century, that is, the transition from cathode ray tube display (CRT) to flat panel display (FPD) represented by TFT-LCD and PDP. In the past ten years, the display technology and industry have undergone gradual changes. The LCD industry has developed by leaps and bounds and has become the overlord of the global display industry. The organic light-emitting display (OLED) technology and industry have gradually matured and grown stronger. OLED display devices are considered to be the next-generation flat-panel display emerging application technology due to their advantages of self-illumination, no need for backlight, high contrast, thin thickness, wide viewing angle, fast response speed, and flexible panels.

At present, for the preparation of OLED display devices, vacuum evaporation and printing technologies are usually used to prepare, which is the current international mainstream development technology. The vacuum evaporation technology of small molecules is relatively mature and has been industrialized, and small and medium-sized full-color display screens have been launched in batches. However, the equipment investment and maintenance costs of this technology are high, material waste is serious, it is difficult to achieve a large area, and the cost remains high. Facing the cruel market environment, it is difficult to form a competitive advantage. Printing technology is considered to be an effective way to solve the high cost of OLED and realize large area, and has broad development prospects. This technology can combine liquid functional materials and advanced printing equipment to make OLED displays, which can improve the utilization rate of materials and Production efficiency, reduce manufacturing costs, increase production capacity.

The most common printing techniques are inkjet printing and screen printing. Inkjet technology is a new type of non-contact, pressure-free, and plateless printing technology. It can print the information stored in the computer into the inkjet printer. It has many advantages, for example, the resolution is quite high, With flexibility, low cost, and compatibility with almost all types of substrates, it is considered to be the most promising technology for manufacturing organic light-emitting flat-panel displays in the future. However, there are still many problems to be solved in the production of flat-panel displays using inkjet printing technology. For example: (a) develop high-quality functional materials that can be printed; (b) film thickness uniformity and photoelectric performance must meet the application requirements; (c) Bank technology needs to be further optimized to improve the resolution of printed devices; (d ) to develop inkjet printing equipment with reliable performance and high output. Among these difficulties, the development of Bank technology to realize graphic inkjet printing is the most important thing in printing and display technology.

In modern technology, patterning is a common method of process optimization, and there are many methods of patterning at present, such as the patterning method of Chinese patent CN101640169A, which is to deposit a thin layer of aluminum on the substrate used for nitride epitaxial growth. Layer, use femtosecond laser to etch the aluminum thin layer to form periodic shallow pits on the surface, and then electrochemically anodize the prepared aluminum thin layer to form a nano-scale porous network aluminum oxide layer. The aluminum layer is used as a mask, and the nanoscale pattern on the aluminum oxide layer is transferred to the substrate by etching, and then the aluminum oxide layer is etched away to obtain a substrate with nanoscale patterns. This method involves multiple chemical reactions. There will be too many uncertain factors affecting the accuracy and results of the experiment; Chinese patent CN104037063A places a mask plate with the same hollow part as the preset pattern on the substrate and then coats the film, thereby forming a patterned film on the substrate, but This method will cause changes in the film structure when the mask is removed. In particular, this method is only suitable for large-area patterning, but it cannot be achieved for fine patterning. Chinese patent CN105070650A mentions that two times of exposure, development and etching are used to form an inverted trapezoidal pixel area, and a trapezoidal pixel Bank structure with a trapezoidal Bank is obtained. This technology uses two oblique photolithography techniques to prepare the Bank structure, not only The process is complicated, and the production cost is high, so it is not easy to be industrialized on a large scale. Therefore, obtaining a finely patterned liquid storage tank structure with simple process and low manufacturing cost is conducive to the preparation of printed display devices with uniform pixels by solution method. Based on this problem, the present invention proposes a patterned inkjet printing fine liquid reservoir array and a manufacturing method thereof.

Contents of the invention

The object of the present invention is to provide a patterned inkjet printing fine barrier rib array and its manufacturing method, so as to overcome the defects in the prior art.

In order to achieve the above object, the technical solution of the present invention is: a patterned inkjet printing fine barrier array, including: a number of liquid storage tanks arranged on the upper surface of a substrate and distributed in an array, and correspondingly arranged on the liquid storage tanks. A transition layer at the bottom of the tanks; the distance between the reservoirs is 10 nm to 500 microns.

In an embodiment of the present invention, the width a of the cross section of the bottom surface of the liquid storage tank is 10 microns to 2000 microns, the length b is 10 microns to 2000 microns, and the depth h of the liquid storage tank is 10 nanometers to 10 microns.

In one embodiment of the present invention, the inner peripheral side of the liquid storage tank is a plane, and the included angle between the inner peripheral side and the substrate is 30° to 90°.

In one embodiment of the present invention, the inner peripheral side of the storage tank is an arc surface, and the radius of curvature r of the inner peripheral side is based on the width a, length b, and depth of the storage tank bottom cross-section h determines the value range; when the width a>length b, the value range of the radius of curvature r is: depth h-length b; when the width a<length b, the value range of the radius of curvature r is: depth h - width a.

Further, there is also provided a manufacturing method for patterned inkjet printing of fine barrier rib arrays, which is realized according to the following steps:

Step S1: providing a substrate;

Step S2: coating a protective layer on the substrate;

Step S3: processing the protective layer into patterned and distributed liquid storage tanks in an array;

Step S4: filling a layer of transition layer at the bottom of the liquid storage tanks in the liquid storage tank array; the chemical properties of the materials used in the transition layer are opposite to those of the above protective layer;

Step S5: using inkjet printing technology to fill the surface of the transition layer with a printable material to realize the patterning of the printing layer.

In one embodiment of the present invention, the inkjet printing ink includes water-based ink and oil-based ink; the water-based ink is composed of carboxylic acid groups, sulfonic acid groups, sulfuric acid Ether group, hydroxyl group, carboxylate, block polyether and other materials containing amino group and quaternary ammonium group; the oily ink is a material containing alkane group, cycloalkane group and aromatic hydrocarbon group;

In one embodiment of the present invention, the hydrophobic or hydrophilic film layer of the protective layer is selected according to the water or oiliness of the inkjet printing ink; if the inkjet printing ink is water-based ink, the protective layer is Hydrophobic film layer; if the inkjet printing ink is oily ink, then the protective layer is a hydrophilic film layer;

In one embodiment of the present invention, the protective layer is a uniform film layer with a thickness of 10 nanometers to 10 microns; the manufacturing method of the protective layer includes printing, spin coating, film sticking, physical vapor deposition or chemical vapor deposition.

In an embodiment of the present invention, the manufacturing method of the liquid storage tank array includes film sticking, coating, wet etching, sandblasting, laser processing, inkjet printing, 3D printing, screen printing and microcontact printing.

In one embodiment of the present invention, the transition layer is a film layer with opposite chemical properties to the protective layer; if the protective layer is a hydrophobic film layer, the transition layer is a hydrophilic film layer; On the contrary, if the protective layer is a hydrophilic film layer, then the transition layer is a hydrophobic film layer.

In one embodiment of the present invention, the thickness of the transition layer is less than the depth h of the liquid storage tank, and its thickness is 1 nanometer to 1 micron; the manufacturing method of the transition layer includes film sticking, physical vapor deposition or chemical vapor deposition, inkjet Printing, 3D printing, screen printing, microcontact printing.

In an embodiment of the present invention, the inkjet printing ink is filled on the surface of the transition layer under the action of an inkjet printer, thereby realizing patterned inkjet printing; the upper surface of the patterned ink is lower than the protective layer Or be on the same level as the protective layer.

Furthermore, the present invention also provides another manufacturing method for patterned inkjet printing of fine barrier rib arrays, which is realized according to the following steps:

Step S1: providing a substrate;

Step S2: making a patterned transition layer on the substrate; selecting whether the transition layer is a hydrophilic film layer or a hydrophobic film layer according to the water or oiliness of the inkjet printing ink;

Step S3: coating a protective layer on the surface of the transition layer, the protective layer is a material opposite to that of the transition layer;

Step S4: processing the protective layer into patterned and distributed liquid storage tanks in an array;

Step S5: using inkjet printing technology to fill the surface of the transition layer with a printable material to realize the patterning of the printing layer.

In one embodiment of the present invention, the inkjet printing ink includes water-based ink and oil-based ink; the water-based ink is composed of carboxylic acid groups, sulfonic acid groups, sulfuric acid Ether group, hydroxyl group, carboxylate, block polyether and other materials containing amino group and quaternary ammonium group; the oily ink is a material containing alkane group, cycloalkane group and aromatic hydrocarbon group;

In one embodiment of the present invention, the hydrophobic or hydrophilic film layer of the protective layer is selected according to the water or oiliness of the inkjet printing ink; if the inkjet printing ink is water-based ink, the protective layer is Hydrophobic film layer; if the inkjet printing ink is oily ink, then the protective layer is a hydrophilic film layer;

In one embodiment of the present invention, the protective layer is a uniform film layer with a thickness of 10 nanometers to 10 microns; the manufacturing method of the protective layer includes printing, spin coating, film sticking, physical vapor deposition or chemical vapor deposition.

In an embodiment of the present invention, the manufacturing method of the liquid storage tank array includes film sticking, coating, wet etching, sandblasting, laser processing, inkjet printing, 3D printing, screen printing and microcontact printing.

In one embodiment of the present invention, the transition layer is a film layer with opposite chemical properties to the protective layer; if the protective layer is a hydrophobic film layer, the transition layer is a hydrophilic film layer; On the contrary, if the protective layer is a hydrophilic film layer, then the transition layer is a hydrophobic film layer.

In one embodiment of the present invention, the thickness of the transition layer is less than the depth h of the liquid storage tank, and its thickness is 1 nanometer to 1 micron; the manufacturing method of the transition layer includes film sticking, physical vapor deposition or chemical vapor deposition, inkjet Printing, 3D printing, screen printing, microcontact printing.

In an embodiment of the present invention, the inkjet printing ink is filled on the surface of the transition layer under the action of an inkjet printer, thereby realizing patterned inkjet printing; the upper surface of the patterned ink is lower than the protective layer Or be on the same level as the protective layer.

Compared with the prior art, the present invention has the following beneficial effects: a patterned inkjet printing fine barrier array and its manufacturing method mentioned in the present invention only need to be designed and processed according to the water-based or oily ink-jet printing ink The required barrier array is printed by using the barrier array as the basic point of inkjet printing to realize graphic inkjet printing. The method can not only effectively simplify the manufacturing process of the graphic ink-jet printing, but also improve the precision of the graphic ink-jet printing and reduce the cost of the graphic ink-jet printing.

Description of drawings

FIG. 1 is a schematic structural diagram of a fine barrier rib array for patterned inkjet printing in Embodiment 1 of the present invention.

FIG. 2 is a cross-sectional view of a patterned inkjet printing fine barrier array in Embodiment 1 of the present invention.

FIG. 3 is a flow chart of a manufacturing process for patterned inkjet printing of fine barrier rib arrays in Embodiment 1 of the present invention.

FIG. 4 is a schematic structural view of coating a protective layer on the surface of a substrate in Embodiment 1 of the present invention.

FIG. 5 is a schematic diagram of the structure after the protective layer is processed into a patterned liquid storage tank in Embodiment 1 of the present invention.

FIG. 6 is a schematic structural view of the liquid storage tank filled with a transition layer in Embodiment 1 of the present invention.

FIG. 7 is a schematic structural view of filling printing material on the surface of the transition layer in Embodiment 1 of the present invention.

FIG. 8 is a schematic structural diagram of a patterned inkjet printing fine barrier array in Embodiment 2 of the present invention.

9 is a cross-sectional view of a patterned inkjet printing fine barrier array in Embodiment 2 of the present invention.

FIG. 10 is a flow chart of a manufacturing process for patterned inkjet printing of fine barrier rib arrays in Embodiment 2 of the present invention.

FIG. 11 is a schematic structural view of forming a patterned transitional layer on the surface of a substrate in Embodiment 2 of the present invention.

Fig. 12 is a schematic structural view of coating a protective layer on the surface of the transition layer in the second embodiment of the present invention.

FIG. 13 is a schematic diagram of the structure after the protective layer is processed into a patterned liquid storage tank in the second embodiment of the present invention.

FIG. 14 is a schematic structural view of the second embodiment of the present invention after filling the printing material on the surface of the transition layer.

[Description of symbols]: 11—substrate, 12—protective layer, 13—reservoir array, 131—reservoir, 14—transition layer, 15—printable material.

detailed description

The technical solution of the present invention will be specifically described below in conjunction with the accompanying drawings.

In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below through specific embodiments and related drawings. In the drawings, the thicknesses of layers and regions are exaggerated for clarity, but as a schematic diagram, it should not be considered as strictly reflecting the proportional relationship of geometric dimensions. Here, the referenced figures are schematic diagrams of idealized embodiments of the present invention, and embodiments of the present invention should not be construed as limited to the particular shapes of regions shown in the figures, but to include resulting shapes, such as manufacturing-induced deviations. In this embodiment, they are all represented by rectangles or circles, and the representations in the figure are schematic, but this should not be considered as limiting the scope of the present invention. In this embodiment, the size of the undulation pattern and the undulation period of the barrier have a certain range. In actual production, the size of the undulation pattern and its undulation period can be designed according to actual needs. limit the scope of the invention.

FIG. 1 and FIG. 2 are a schematic structural view and a cross-sectional view of a fine barrier rib array for patterned inkjet printing according to the first preferred embodiment of the present invention. FIG. 3 is a flow chart of a manufacturing process for patterned inkjet printing of fine barrier rib arrays according to the first preferred embodiment of the present invention. 4-7 are schematic diagrams of specific implementation steps for realizing patterned inkjet printing of fine barrier rib arrays according to the first preferred embodiment of the present invention.

Please refer to FIG. 3, and in combination with FIGS. 4-7, a detailed description of a manufacturing method for patterned inkjet printing of a fine barrier barrier array provided by the first embodiment of the present invention is provided, which specifically includes the following steps:

(S11) Provide a substrate 11, and clean the substrate. Select a substrate 11 of required size, place it in a cleaning solution with a volume ratio of Win-10: DI water = 3: 97, use an ultrasonic machine with a frequency of 32KHz to clean it for 15 minutes, spray it for 2 minutes, and then place it in a volume ratio of Win-41 : DI water = 5 : 95 cleaning solution, use an ultrasonic machine with a frequency of 40KHz to clean for 10 minutes, spray and rinse with circulating tap water for 2 minutes, then use an ultrasonic machine with a frequency of 28KHz to clean in DI pure water for 10 minutes, and pass through nitrogen After drying the gun, place it in a clean oven at 50°C for at least 30 minutes for further use.

(S12) Coating a protective layer on the substrate, the specific steps are as follows:

(S121) Protection layer selection. The protective layer is to choose a hydrophobic or hydrophilic film layer according to the water or oiliness of the inkjet printing ink. If the inkjet printing ink is water-based ink, the protective layer is a hydrophobic film layer; otherwise, when the inkjet printing ink is oily ink, the protective layer is a hydrophilic film layer. Inkjet printing inks include hydrophilic groups containing carboxylic acid groups, sulfonic acid groups, sulfuric acid groups and phosphoric acid groups, or ether groups composed of oxygen-containing groups, hydroxyl groups and carboxylate, block polyethers and other groups containing amino groups and quaternary ammonium groups. Water-based inks with groups and oil-based inks containing alkane groups, cycloalkane groups, and aromatic hydrocarbon groups. In this embodiment, naphthene-based oily ink is preferred as the printing ink, and the protective layer is preferably an ether-based aqueous film layer composed of oxygen-containing groups.

(S122) Protective layer coating. The protective layer is a uniform water-based film layer with a thickness of 10 nanometers to 10 microns, and its coating method includes printing, spin coating, film sticking, physical vapor deposition or chemical vapor deposition. In this embodiment, the spin coating method is preferred to coat a protective layer 12 with a thickness of 2 microns on the surface of the substrate 11 , as shown in FIG. 3 .

(S123) Baking the protective layer. Place the substrate obtained in step (S122) in a baking oven at 85° C. and bake for 30 minutes.

( S13 ) Processing the protective layer 12 into a patterned reservoir array 13 , as shown in FIG. 4 . The array of liquid storage tanks is composed of several liquid storage tanks that are evenly distributed on the surface of the substrate along the horizontal direction and several liquid storage tanks that are uniformly distributed on the surface of the substrate in a vertical direction. The distance of the grooves is from 10 nanometers to 500 micrometers. The width a of the reservoir is 10 microns-2000 microns, the length b is 10 microns-2000 microns, the depth h is 10 nanometers-3 microns, and its structure can be rectangular, square, circular or other irregular figures. The liquid storage tank can be inclined around along the depth direction, and the angle formed by the inclined surface of the liquid storage tank and the horizontal plane of the substrate is 30°-90°. The liquid storage tank can also be processed into an arc along the depth direction, and the range of the curvature radius r is between depth h-length b (a>b) or depth h-width a (a<b). Manufacturing methods include lamination, coating, wet etching, sandblasting, laser processing, inkjet printing, 3D printing, screen printing, and microcontact printing. In this embodiment, the protective layer 12 is preferably processed by a sandblasting process, and the liquid storage tank array 13 as shown in FIG. 1 and FIG. 4 is finally formed by controlling the sandblasting process. Wherein, the distance between the horizontal and vertical liquid reservoirs 131 is 100 microns. The length a and width b of each reservoir 131 are 250 microns, the depth h is 2 microns, and the inclined surface of the reservoir 131 is a rectangular reservoir array formed at 60° to the substrate 11 .

(S14) Filling a transition layer 14 at the bottom of the reservoir array, as shown in FIG. 5 . The transition layer 14 is a material opposite in chemical properties to the protective layer 12; wherein, the thickness of the transition layer 14 is less than the depth h of the reservoir 131, and its thickness is between 1 nanometer and 1 micron. The manufacturing method of the transition layer includes film sticking, physical vapor deposition or chemical vapor deposition, inkjet printing, 3D printing, screen printing, and micro-contact printing. In this implementation, inkjet printing technology is preferred to manufacture a transition layer 14 of aromatic hydrocarbon groups with a thickness of 200 nanometers at the bottom of the reservoir array 13 .

(S15) Filling the surface of the transition layer with printable material 15 . The surface of the transition layer 14 is filled with a printable material 15 using inkjet printing technology to realize patterning of the printing layer. In this embodiment, an inkjet printing device (Jetlab2) is preferably used to fill the reservoir array 13 coated with the transition layer 14 with naphthene-based printing material 15 by controlling the printing parameters, wherein the upper surface of the patterned ink is lower than The protective layer 12 may be on the same level as the protective layer 12, so as to realize patterned inkjet printing, as shown in FIG. 6 .

So far, the manufacture of a patterned inkjet printing fine barrier array has been completed.

Embodiment two

A detailed barrier rib array for implementing patterned inkjet printing and a manufacturing method thereof according to the second embodiment of the present invention will be described in detail below with reference to FIGS. 8-14 . Among them, FIG. 8 and FIG. 9 are a schematic structural view and a cross-sectional view of a fine barrier rib array for patterned inkjet printing according to the second preferred embodiment of the present invention. FIG. 10 is a flow chart of a manufacturing process for patterned inkjet printing of fine barrier rib arrays according to the second preferred embodiment of the present invention. 11 to 14 are schematic diagrams of specific implementation steps for realizing patterned inkjet printing of fine barrier rib arrays according to the second preferred embodiment of the present invention.

Please refer to FIG. 10 , and in combination with FIGS. 11-14 , a detailed description of a manufacturing method for patterned inkjet printing fine barrier barrier array provided by the second embodiment of the present invention is provided, which specifically includes the following steps:

(S21) Provide a substrate 11, and clean the substrate. Select a substrate 11 of required size, place it in a cleaning solution with a volume ratio of Win-10: DI water = 3: 97, use an ultrasonic machine with a frequency of 32KHz to clean it for 15 minutes, spray it for 2 minutes, and then place it in a volume ratio of Win-41 : DI water = 5 : 95 cleaning solution, use an ultrasonic machine with a frequency of 40KHz to clean for 10 minutes, spray and rinse with circulating tap water for 2 minutes, then use an ultrasonic machine with a frequency of 28KHz to clean in DI pure water for 10 minutes, and pass through nitrogen After drying the gun, place it in a clean oven at 50°C for at least 30 minutes for further use.

(S22) Forming a patterned transition layer 14 on the substrate, the specific steps are as follows:

(S221) Transition layer selection. The transition layer is to choose a hydrophilic or hydrophobic film layer according to the water or oiliness of the inkjet printing ink. If the inkjet printing ink is water-based ink, the transition layer is a hydrophilic film layer; otherwise, when the inkjet printing ink is oily ink, the transition layer is a hydrophobic film layer. Inkjet printing inks include hydrophilic groups containing carboxylic acid groups, sulfonic acid groups, sulfuric acid groups and phosphoric acid groups, or ether groups composed of oxygen-containing groups, hydroxyl groups and carboxylate, block polyethers and other groups containing amino groups and quaternary ammonium groups. Water-based inks with groups and oil-based inks containing alkane groups, cycloalkane groups, and aromatic hydrocarbon groups. In this embodiment, naphthene-based oily ink is preferred as the printing ink, and the transition layer is preferably an oily film layer composed of aromatic hydrocarbon-based groups.

( S222 ) Fabricate the patterned transition layer 14 . The thickness of the transition layer 14 is less than the depth h of the reservoir 131 , and its thickness is between 1 nanometer and 1 micrometer. The manufacturing method of the transition layer includes film sticking, physical vapor deposition or chemical vapor deposition, inkjet printing, 3D printing, screen printing, and micro-contact printing. In this implementation, inkjet printing technology is preferred to manufacture a transition layer 14 of aromatic hydrocarbon groups with a thickness of 200 nanometers at the bottom of the reservoir array 13 .

(S223) Baking the transition layer. Place the substrate obtained in step ( S222 ) in a baking oven at 105° C. and bake for 30 minutes to form a patterned transition layer 14 , as shown in FIG. 9 .

(S23) Coating a protective layer 12 on the surface of the transition layer. Specific steps are as follows:

(S231) The protective layer is a hydrophobic or hydrophilic film layer selected according to the water or oiliness of the inkjet printing ink. If the inkjet printing ink is water-based ink, the protective layer is a hydrophobic film layer; otherwise, when the inkjet printing ink is oily ink, the protective layer is a hydrophilic film layer. Inkjet printing inks include hydrophilic groups containing carboxylic acid groups, sulfonic acid groups, sulfuric acid groups and phosphoric acid groups, or ether groups composed of oxygen-containing groups, hydroxyl groups and carboxylate, block polyethers and other groups containing amino groups and quaternary ammonium groups. Water-based inks with groups and oil-based inks containing alkane groups, cycloalkane groups, and aromatic hydrocarbon groups. In this embodiment, naphthene-based oily ink is preferred as the printing ink, and the protective layer is preferably an ether-based aqueous film layer composed of oxygen-containing groups.

(S232) Protective layer coating. The protective layer is a uniform water-based film layer with a thickness of 10 nanometers to 10 microns, and its coating method includes printing, spin coating, film sticking, physical vapor deposition or chemical vapor deposition. In this embodiment, a protective layer 12 with a thickness of 2 microns is coated on the surface of the substrate 11 by the spin coating method, as shown in FIG. 10 .

(S223) Baking the protective layer. Place the substrate obtained in step (S222) in a baking oven at 85° C. and bake for 30 minutes.

( S24 ) Process the protective layer 12 into a patterned reservoir array 13 , as shown in FIG. 11 . The array of liquid storage tanks is composed of several liquid storage tanks that are evenly distributed on the surface of the substrate along the horizontal direction and several liquid storage tanks that are uniformly distributed on the surface of the substrate in a vertical direction. The distance of the grooves is from 10 nanometers to 500 micrometers. The width a of the reservoir is 10 microns-2000 microns, the length b is 10 microns-2000 microns, the depth h is 10 nanometers-3 microns, and its structure can be rectangular, square, circular or other irregular figures. The liquid storage tank can be inclined around along the depth direction, and the angle formed by the inclined surface of the liquid storage tank and the horizontal plane of the substrate is 30°-90°. The liquid storage tank can also be processed into an arc along the depth direction, and the range of the curvature radius r is between depth h-length b (a>b) or depth h-width a (a<b). Manufacturing methods include lamination, coating, wet etching, sandblasting, laser processing, inkjet printing, 3D printing, screen printing, and microcontact printing. In this embodiment, the protective layer 12 is preferably processed by a sandblasting process, and the liquid storage tank array 13 as shown in FIG. 1 and FIG. 4 is finally formed by controlling the sandblasting process. Wherein, the distance between the horizontal and vertical liquid reservoirs 131 is 100 microns. Each storage tank 131 has a length a and a width b of 250 microns, a depth h of 2 microns, and an arc-shaped storage tank array with a radius of curvature of 180 microns.

(S25) Filling the surface of the transition layer with printable material 15 . The surface of the transition layer 14 is filled with a printable material 15 using inkjet printing technology to realize patterning of the printing layer. In this embodiment, an inkjet printing device (Jetlab2) is preferably used to fill the reservoir array 13 coated with the transition layer 14 with naphthene-based printing material 15 by controlling the printing parameters, wherein the upper surface of the patterned ink is lower than The protective layer 12 may be on the same level as the protective layer 12 , so as to realize patterned inkjet printing, as shown in FIG. 12 .

So far, the manufacture of a patterned inkjet printing fine barrier array has been completed.

A manufacturing method for inkjet printing a finely patterned barrier rib array provided by the present invention is not limited to the above-mentioned embodiments. The above-listed preferred embodiments have further described the purpose, technical solutions and advantages of the present invention in detail. It is understood that the above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall include Within the protection scope of the present invention.

Claims (19)

1. one kind realizes the fine barrier array of graphical inkjet printing, it is characterised in that including：Several are arranged on a substrate Surface and reservoir in array distribution and it is correspondingly arranged in the transition zone of the liquid storage trench bottom；Between the reservoir Distance is 10 nanometers to 500 microns；Reservoir inner circumferential side is cambered surface, and inner circumferential side radius of curvature r according to Width a, the length b of liquid storage groove bottom cross section and the liquid storage groove depth h determine span；As width a>During length b, The radius of curvature r spans are：Depth h- length b；As width a<During length b, the radius of curvature r spans are： Depth h- width a.

2. one kind according to claim 1 realizes the fine barrier array of graphical inkjet printing, it is characterised in that the storage The width a of liquid bath bottom surface cross section is 10 microns to 2000 microns, and length b is 10 microns to 2000 microns, the liquid storage groove depth It is 10 nanometers to 10 microns to spend h.

3. one kind according to claim 1 realizes the fine barrier array of graphical inkjet printing, it is characterised in that the storage Liquid bath inner circumferential side is plane, and inner circumferential side and the angle of the substrate are 30 degree to 90 degree.

4. a kind of manufacture method for realizing the fine barrier array of graphical inkjet printing, it is characterised in that real in accordance with the following steps It is existing：

Step S1：One substrate is provided；

Step S2：Layer protective layer is coated on the substrate；

Step S3：The protective layer is processed into graphically and in array distribution reservoir；The reservoir adds along depth direction Work camber, its radius of curvature r scopes are between depth h- length b or depth h- width a；

Step S4：One layer of transition zone of the underfill of reservoir in the reservoir array；The transition zone uses material Chemical characteristic it is opposite with the upper protective layer；

Step S5：Using inkjet technology in the printable material of transition layer surface filling, the graphical of printable layer is realized.

5. a kind of manufacture method for realizing the fine barrier array of graphical inkjet printing according to claim 4, its feature It is, the ink-jet printing ink includes water-base ink and oily ink；The water-base ink is by containing carboxylic acid group, sulfonic acid Base, sulfate and phosphate hydrophilic radical or the ether being made up of oxy radical, hydroxyl, carboxylate, block polyether and contain ammonia The material of base, quaternary ammonium group group；The oily ink be containing alkenyl group, cycloalkyl group, aryl radical group material.

6. a kind of manufacture method for realizing the fine barrier array of graphical inkjet printing according to claim 4, its feature It is, the protective layer hydrophobicity or hydrophilic film is selected according to the aqueous or oiliness of the ink-jet printing ink；If described Ink-jet printing ink is water-base ink, then the protective layer is hydrophobic film layer；If the ink-jet printing ink is oily ink, Then the protective layer is hydrophilic film.

7. a kind of manufacture method for realizing the fine barrier array of graphical inkjet printing according to claim 6, its feature It is, the protective layer is the uniform film layer that a layer thickness is 10 nanometers to 10 microns；The manufacture method of the protective layer includes Printing, spin coating, pad pasting, physical vapour deposition (PVD) or chemical vapor deposition.

8. a kind of manufacture method for realizing the fine barrier array of graphical inkjet printing according to claim 4, its feature It is, the manufacture method of the reservoir array includes pad pasting, plated film, wet etching, sandblasting, Laser Processing, inkjet printing, 3D Printing, silk-screen printing and micro-contact printing.

9. a kind of manufacture method for realizing the fine barrier array of graphical inkjet printing according to claim 4, its feature It is, the transition zone is a kind of film layer opposite with the protective layer chemical property；If the protective layer is hydrophobic film layer, Then the transition zone is hydrophilic film；Conversely, the protective layer is hydrophilic film, then the transition zone is hydrophobic film Layer.

10. a kind of manufacture method for realizing the fine barrier array of graphical inkjet printing according to claim 9, its feature It is, the thickness of the transition zone is less than liquid storage groove depth h, and its thickness is 1 nanometer to 1 micron；The manufacturer of the transition zone Method includes pad pasting, physical vapour deposition (PVD) or chemical vapor deposition, inkjet printing, 3D printing, silk-screen printing, micro-contact printing.

11. a kind of manufacture method for realizing the fine barrier array of graphical inkjet printing according to claim 4, its feature It is, the ink-jet printing ink is filled in the transition layer surface under ink-jet printer effect, so as to realize graphical spray Ink printing；The upper surface of the graphical ink exists together a horizontal plane less than the protective layer or with the protective layer.

12. a kind of manufacture method for realizing the fine barrier array of graphical inkjet printing, it is characterised in that real in accordance with the following steps It is existing：

Step S1：One substrate is provided；

Step S2：The transition zone of a layer pattern is made on the substrate；Selected according to the aqueous or oiliness of ink-jet printing ink It is hydrophilic film or hydrophobic film layer to select the transition zone；

Step S3：Layer protective layer is coated in the transition layer surface, the protective layer is and the transition zone chemical characteristic phase Anti- material；

Step S4：The protective layer is processed into graphically and in array distribution reservoir；The reservoir adds along depth direction Work camber, its radius of curvature r scopes are between depth h- length b or depth h- width a；

Step S5：Using inkjet technology in the printable material of transition layer surface filling, the graphical of printable layer is realized.

13. a kind of manufacture method for realizing the fine barrier array of graphical inkjet printing according to claim 12, it is special Levy and be, the ink-jet printing ink includes water-base ink and oily ink；The water-base ink is by containing carboxylic acid group, sulphur Acidic group, sulfate and phosphate hydrophilic radical or the ether being made up of oxy radical, hydroxyl, carboxylate, block polyether and contain The material of amino, quaternary ammonium group group；The oily ink be containing alkenyl group, cycloalkyl group, aryl radical group material.

14. a kind of manufacture method for realizing the fine barrier array of graphical inkjet printing according to claim 12, it is special Levy and be, the protective layer hydrophobicity or hydrophilic film are selected according to the aqueous or oiliness of the ink-jet printing ink；If institute It is water-base ink to state ink-jet printing ink, then the protective layer is hydrophobic film layer；If the ink-jet printing ink is oiliness ink Water, then the protective layer is hydrophilic film.

15. a kind of manufacture method for realizing the fine barrier array of graphical inkjet printing according to claim 14, it is special Levy and be, the protective layer is the uniform film layer that a layer thickness is 10 nanometers to 10 microns；The manufacture method bag of the protective layer Include printing, spin coating, pad pasting, physical vapour deposition (PVD) or chemical vapor deposition.

16. a kind of manufacture method for realizing the fine barrier array of graphical inkjet printing according to claim 12, it is special Levy and be, the manufacture method of the reservoir array comprising pad pasting, plated film, wet etching, sandblasting, Laser Processing, inkjet printing, 3D printing, silk-screen printing and micro-contact printing.

17. a kind of manufacture method for realizing the fine barrier array of graphical inkjet printing according to claim 12, it is special Levy and be, the transition zone is a kind of film layer opposite with the protective layer chemical property；If the protective layer is hydrophobic film Layer, then the transition zone is hydrophilic film；Conversely, the protective layer is hydrophilic film, then the transition zone is hydrophobicity Film layer.

18. a kind of manufacture method for realizing the fine barrier array of graphical inkjet printing according to claim 17, it is special Levy and be, the thickness of the transition zone is less than liquid storage groove depth h, and its thickness is 1 nanometer to 1 micron；The manufacture of the transition zone Method includes pad pasting, physical vapour deposition (PVD) or chemical vapor deposition, inkjet printing, 3D printing, silk-screen printing, micro-contact printing.

19. a kind of manufacture method for realizing the fine barrier array of graphical inkjet printing according to claim 12, it is special Levy and be, the ink-jet printing ink is filled in the transition layer surface under ink-jet printer effect, so as to realize graphical Inkjet printing；The upper surface of the graphical ink exists together a horizontal plane less than the protective layer or with the protective layer.