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CN105666336A - Abrasive particle flow processing experimental verification method for servo valve element nozzle - Google Patents

Abrasive particle flow processing experimental verification method for servo valve element nozzle Download PDF

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Publication number
CN105666336A
CN105666336A CN201610048006.5A CN201610048006A CN105666336A CN 105666336 A CN105666336 A CN 105666336A CN 201610048006 A CN201610048006 A CN 201610048006A CN 105666336 A CN105666336 A CN 105666336A
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nozzle
small hole
processing
hole area
workpiece
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李俊烨
杨兆军
王震
张心明
吴庆堂
李学光
许颖
张宝庆
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Changchun University of Science and Technology
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Changchun University of Science and Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24CABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C1/00Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
    • B24C1/08Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00Measuring or testing not otherwise provided for

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

本发明涉及一种伺服阀阀芯喷嘴的磨粒流加工实验验证方法,利用磨粒流加工技术对伺服阀阀芯喷嘴进行微小孔径通道内表面的抛光加工,实验结束后,为了对其通道内表面的检测,首先需要将已加工工件线切割,零件清洗之后,然后采用相应的检测仪器检测工件内表面的表面粗糙度以及表面形貌和工件的元素成分,具体包括以下方面及步骤:(1)实验工件;(2)高倍显微镜下的检测结果分析;(3)表面粗糙度的检测结果分析。(4)表面形貌的检测结果分析:(a)表面质量的验证分析;(2)小孔区域的预测验证分析。本发明论证了磨粒流加工技术的有效性,磨料介质的微磨损机理以及加工预测的论证。

The invention relates to an experimental verification method of abrasive flow processing of a servo valve spool nozzle. The abrasive flow processing technology is used to polish the inner surface of the micro-aperture channel of the servo valve spool nozzle. For surface detection, firstly, the processed workpiece needs to be cut by wire, after the parts are cleaned, and then the surface roughness of the inner surface of the workpiece, the surface morphology and the elemental composition of the workpiece are detected by corresponding testing instruments, which specifically include the following aspects and steps: (1 ) experimental workpiece; (2) analysis of detection results under a high-power microscope; (3) analysis of detection results of surface roughness. (4) Analysis of detection results of surface topography: (a) Verification analysis of surface quality; (2) Prediction verification analysis of small hole area. The invention demonstrates the validity of the abrasive particle flow processing technology, the micro-abrasion mechanism of the abrasive medium and the demonstration of processing prediction.

Description

一种伺服阀阀芯喷嘴的磨粒流加工实验验证方法Experimental Verification Method for Abrasive Flow Machining of Servo Valve Spool Nozzle

技术领域technical field

本发明涉及磨粒流加工技术领域,具体涉及一种伺服阀阀芯喷嘴的磨粒流加工实验验证方法。The invention relates to the technical field of abrasive flow processing, in particular to an experimental verification method for abrasive flow processing of a valve core nozzle of a servo valve.

背景技术Background technique

伺服阀阀芯喷嘴磨粒流加工机理与不同工况环境下的仿真实验研究,都从理论上证明了磨粒流加工技术可以实现对被加工零件表面的光整加工,并通过颗粒对加工表面的磨损特性能够使被加工表面的表面形貌趋向光滑平整。这些理论论述都是为了说明磨粒流加工技术的磨削机理以及磨粒流加工的有效性。用来检测磨粒流光整加工的加工质量最直接的方法是检测经过磨粒流磨削光整加工的零件表面粗糙度和表面形貌。为证明伺服阀阀芯喷嘴磨粒流加工技术的有效性,本发明对伺服阀阀芯喷嘴零件进行磨粒流光整加工实验,然后对零件进行表面质量检测,通过比较工件加工前后粗糙度和表面形貌的检测结果,对加工方法的可行性和有效性进行验证。The abrasive flow processing mechanism of the servo valve spool nozzle and the simulation experiment research under different working conditions have proved theoretically that the abrasive flow processing technology can realize the smooth processing of the surface of the machined parts, and through the particles to process the surface Excellent wear characteristics can make the surface morphology of the machined surface tend to be smooth and flat. These theoretical discussions are all to explain the grinding mechanism of AFM technology and the effectiveness of AFM. The most direct method to detect the processing quality of abrasive flow finishing is to detect the surface roughness and surface topography of parts after abrasive flow grinding and finishing. In order to prove the effectiveness of the abrasive flow processing technology of the servo valve spool nozzle, the present invention conducts an abrasive flow finishing experiment on the servo valve spool nozzle parts, and then conducts surface quality inspection on the parts, and compares the roughness and surface quality of the workpiece before and after processing. The inspection results of the morphology verified the feasibility and effectiveness of the processing method.

发明内容Contents of the invention

本发明的目的在于提供一种伺服阀阀芯喷嘴的磨粒流加工实验验证方法,以便更好地实现磨粒流加工实验验证,改善使用效果。The purpose of the present invention is to provide an experimental verification method for abrasive flow processing of a servo valve spool nozzle, so as to better realize the experimental verification of abrasive flow processing and improve the use effect.

为了实现上述目的,本发明的技术方案如下。In order to achieve the above object, the technical solution of the present invention is as follows.

一种伺服阀阀芯喷嘴的磨粒流加工实验验证方法,利用磨粒流加工技术对伺服阀阀芯喷嘴进行微小孔径通道内表面的抛光加工,实验结束后,为了对其通道内表面的检测,首先需要将已加工工件线切割,零件清洗之后,然后采用相应的检测仪器检测工件内表面的表面粗糙度以及表面形貌和工件的元素成分,具体包括以下方面及步骤:An experimental verification method for abrasive flow processing of servo valve spool nozzles. The abrasive flow processing technology is used to polish the inner surface of the micro-aperture channel of the servo valve spool nozzle. After the experiment, in order to detect the inner surface of the channel Firstly, the processed workpiece needs to be wire-cut, and after the parts are cleaned, the surface roughness of the inner surface of the workpiece, the surface morphology and the elemental composition of the workpiece are detected by corresponding testing instruments, which specifically include the following aspects and steps:

(1)实验工件:主要验证磨粒流加工的有效可行性,需要采用各种检测手段来获得喷嘴内表面的检测数据,观察其加工通道的内表面质量。因伺服阀阀芯喷嘴的内部通道狭小细长,尤其是喷嘴小孔区域,所以实验加工结束后需要采用线切割机床进行零件的切割剖面,然后才能将切割后的零件进行各种环境下的内表面检测;通过对局部放大图的分析发现,加工前的喷嘴零件的内表面粗糙,不光滑,尤其是喷嘴小孔区域,加工后的喷嘴不论是加工通道内还是喷嘴小孔区域其内表面有些改善。为了能更好的对比分析加工前后喷嘴内表面的质量,本发明又采用了不同的检测手段对其加工内表面进行检测:使用高倍显微镜对喷嘴小孔区域进行检测;使用NT1100光栅表面粗糙度测量仪检测加工表面的表面粗糙度;使用JOELJXA-840电子探针显微分析仪检测加工表面的表面形貌以及对加工表面的成分分析。(1) Experimental workpiece: mainly to verify the effectiveness and feasibility of abrasive flow processing, it is necessary to use various detection methods to obtain the detection data of the inner surface of the nozzle, and observe the quality of the inner surface of the processing channel. Because the internal channel of the servo valve spool nozzle is narrow and slender, especially the small hole area of the nozzle, it is necessary to use a wire cutting machine tool to cut the section of the part after the experimental processing is completed, and then the cut part can be used in various environments. Surface detection; through the analysis of the local enlarged image, it is found that the inner surface of the nozzle part before processing is rough and not smooth, especially in the small hole area of the nozzle. improve. In order to better compare and analyze the quality of the inner surface of the nozzle before and after processing, the present invention uses different detection methods to detect the inner surface of the nozzle: use a high-power microscope to detect the small hole area of the nozzle; use NT1100 grating surface roughness measurement The surface roughness of the processed surface is detected by the instrument; the surface morphology of the processed surface and the component analysis of the processed surface are detected by the JOELJXA-840 electron probe microanalyzer.

(2)高倍显微镜下的检测结果分析:(2) Analysis of detection results under a high-power microscope:

采用NikonSMZ745T主要是针对伺服阀阀芯喷嘴小孔区域的表面测量,在不同的放大倍数条件下观察伺服阀阀芯喷嘴加工前后小孔区域的成形样貌,通过观察对比小孔区域的表面形貌以此判断磨粒流加工技术的加工效果。从未加工喷嘴小孔的样貌图可以看出,喷嘴小孔区域位置凹凸不平;从已加工喷嘴小孔的样貌图可以看出,喷嘴小孔区域位置光滑平整。通过对比分析喷嘴小孔区域加工前后的样貌图可以得知,磨粒流加工技术可以改善小孔区域的毛刺现象,对其凹凸不平的表面进行光整加工,以此改善微小细孔的内表面质量。在高倍显微镜下对喷嘴小孔区域的检测,只可以观察出喷嘴区域的大体样貌,还不能准确的分析磨粒流加工技术的加工效果,尤其是在喷嘴通道内表面的加工效果,还需对其进行进一步的检测。The use of NikonSMZ745T is mainly aimed at the surface measurement of the small hole area of the servo valve spool nozzle. Under different magnification conditions, the forming appearance of the small hole area before and after the servo valve spool nozzle is observed, and the surface morphology of the small hole area is compared by observation. In this way, the processing effect of abrasive flow machining technology can be judged. From the image of the small hole of the unprocessed nozzle, it can be seen that the position of the small hole of the nozzle is uneven; from the image of the small hole of the processed nozzle, it can be seen that the position of the small hole of the nozzle is smooth and flat. By comparing and analyzing the appearance pictures of the small hole area of the nozzle before and after processing, it can be known that the abrasive flow processing technology can improve the burr phenomenon in the small hole area, and smooth the uneven surface to improve the inner surface of the tiny hole. Surface Quality. The detection of the small hole area of the nozzle under a high-power microscope can only observe the general appearance of the nozzle area, and cannot accurately analyze the processing effect of the abrasive flow processing technology, especially the processing effect on the inner surface of the nozzle channel. further testing it.

(3)表面粗糙度的检测结果分析:(3) Analysis of the detection results of surface roughness:

本发明在经过线切割后的实验工件内表面选取3个试验点分别进行测量,利用NT1100光栅表面粗糙度测量仪随机安装的软件获得了工件加工表面粗糙度的二维、三维形貌图以及相关数据。The present invention selects three test points on the inner surface of the experimental workpiece after wire cutting to measure respectively, and uses the software installed randomly with the NT1100 grating surface roughness measuring instrument to obtain the two-dimensional and three-dimensional topography diagrams and related data.

通过比较各试验点的检测结果发现:在第一个试验点处,零件内表面的初始粗糙度数值为743.93nm,经过磨粒流抛光加工后其粗糙度数值变为571.64nm;在第二个试验点处,零件内表面的初始粗糙度为823.07nm,经过磨粒流抛光加工后其粗糙度数值变为735.24;在第三个试验点处,零件内表面的初始粗糙度数值为1.1um,经过磨粒流抛光加工后其粗糙度数值变为721.09nm。By comparing the test results of each test point, it is found that: at the first test point, the initial roughness value of the inner surface of the part is 743.93nm, and its roughness value becomes 571.64nm after abrasive flow polishing; At the test point, the initial roughness of the inner surface of the part is 823.07nm, and the roughness value becomes 735.24 after abrasive flow polishing; at the third test point, the initial roughness value of the inner surface of the part is 1.1um, After abrasive flow polishing, its roughness value becomes 721.09nm.

从上述二维表面形貌图中喷嘴加工前后表面粗糙度数值的变化可知,经过磨粒流加工技术抛光后的零件内表面的表面粗糙度数值变小;从三维表面形貌中看出未加工零件表面的红色区域明显,红色区域表征的是此处表面粗糙度大,表面突起的峰值较大,加工之后的零件表面红色区域减少,表明了被加工表面的材料经过磨粒流磨削将突起的表面材料去除,所以其表面突起峰值减小。综上所述,经过磨粒流加工技术后,伺服阀阀芯喷嘴的加工表面得到改善,其内表面光洁度变好,表面粗糙度数值满足零件使用的要求。From the changes in the surface roughness values before and after nozzle processing in the above two-dimensional surface topography diagram, it can be seen that the surface roughness value of the inner surface of the part after polishing by abrasive flow processing technology becomes smaller; from the three-dimensional surface topography, it can be seen The red area on the surface of the part is obvious. The red area indicates that the surface roughness is large here, and the peak of the surface protrusion is large. The red area on the surface of the part after processing is reduced, indicating that the material on the processed surface will protrude after abrasive flow grinding. The surface material is removed, so its surface protrusion peaks are reduced. To sum up, after the abrasive flow processing technology, the processing surface of the servo valve spool nozzle is improved, the inner surface finish is better, and the surface roughness value meets the requirements of the parts.

(4)表面形貌的检测结果分析:(4) Analysis of detection results of surface topography:

(a)表面质量的验证分析:(a) Verification analysis of surface quality:

采用日本电子株式会社生产的JXA-840仪器检测零件加工前后的表面形貌,在伺服阀阀芯喷嘴的加工通道内选取4点位置,利用JXA-840仪器对加工表面微观形貌进行1000倍、2000倍下观察。The JXA-840 instrument produced by Japan Electronics Co., Ltd. is used to detect the surface morphology of the parts before and after processing. Select 4 points in the processing channel of the servo valve valve core nozzle, and use the JXA-840 instrument to measure the microscopic morphology of the processed surface by 1000 times. Observe under 2000 times.

通过观察在JXA-840仪器的1000倍放大倍数条件下的伺服阀阀芯喷嘴内表面的表面形貌图,对比发现,经过抛光加工后的零件内表面形貌发生改变。未加工过的喷嘴零件的内表面为传统加工状态下,喷嘴内表面粗糙、峰谷高低起伏、不平整,虽然其表面纹理不是特别紊乱,但是表面带有深浅不一的划痕和一定数量的夹杂碎屑;经过磨粒流抛光磨削的表面相貌,磨料介质以微磨削的方式实现了加工表面材料的去除,加工之后的内表面纹理清晰、平缓而致密,原本存在的划痕消失不见,表面质量获得改善。综上所述,磨粒流加工技术以磨料介质的微磨削方式实现了对加工表面的光整加工,获得了良好的表面粗糙度,喷嘴内表面的表面质量获得改善。By observing the surface topography of the inner surface of the servo valve valve core nozzle under the condition of 1000 times magnification of the JXA-840 instrument, it is found by comparison that the inner surface topography of the polished part changes. The inner surface of the unprocessed nozzle parts is under the traditional processing state. The inner surface of the nozzle is rough, with undulating peaks and valleys, and unevenness. Although the surface texture is not particularly disordered, the surface has scratches of different shades and a certain number of Inclusion of debris; the appearance of the surface after abrasive flow polishing and grinding, the abrasive medium realizes the removal of the processed surface material by means of micro-grinding, the texture of the inner surface after processing is clear, smooth and dense, and the original scratches disappear , the surface quality is improved. In summary, the abrasive flow machining technology realizes the smoothing of the machined surface by means of abrasive media micro-grinding, obtains good surface roughness, and improves the surface quality of the inner surface of the nozzle.

(2)小孔区域的预测验证分析:(2) Prediction verification analysis of small hole area:

颗粒对各加工区域的磨损量因模型尺寸和流场内连续相与离散相性质的影响而不同,小孔区域的磨损量与其他部位的相比,磨损量较大,所以预测磨粒流加工技术在小孔区域位置的加工效果比其他部位较好。通过对比发现,传统工艺对小孔区域的加工质量不是特别好,这主要是因为小孔的尺寸太小,传统工艺无法对小孔进行精加工。经过磨粒流光整加工后,不论是喷嘴主干通道内表面还是喷嘴小孔区域表面都有改善;通过对比主干通道和小孔区域的表面形貌图显示阀芯喷嘴小孔部位的表面形貌比主干通道的光滑平整,这是由于喷嘴部位与主干通道尺寸差异所导致的流场湍流和颗粒磨损率的不同,所以零件各位置的磨粒流加工效果有所不同,与实验仿真分析中对小孔区域的加工预测是一致的。The wear amount of particles on each processing area is different due to the influence of the size of the model and the properties of the continuous phase and the discrete phase in the flow field. Compared with other parts, the wear amount of the small hole area is larger, so the prediction of abrasive flow processing The processing effect of the technology in the small hole area is better than other parts. Through comparison, it is found that the processing quality of the small hole area is not particularly good by the traditional process, mainly because the size of the small hole is too small, and the traditional process cannot finish the small hole. After abrasive finishing, both the inner surface of the main channel of the nozzle and the surface of the small hole area of the nozzle are improved; by comparing the surface topography of the main channel and the small hole area, the surface topography of the small hole of the valve core nozzle is compared The smoothness of the main channel is due to the difference in flow field turbulence and particle wear rate caused by the difference in size between the nozzle and the main channel, so the abrasive particle flow processing effect at each position of the part is different. Machining predictions for hole regions are consistent.

该发明的有益效果在于:本发明以伺服阀阀芯喷嘴为实验加工零件,对零件加工前后的表面质量进行研究。本发明采用多种检测手段对零件内表面进行检测,分别采用高倍显微镜、NT1100光栅表面粗糙度以及JEOLJXA-840检测仪器,观察分析了加工前后的喷嘴内表面各位置点的表面粗糙度和表面形貌,以此论证了磨粒流加工技术的有效性,磨料介质的微磨损机理以及加工预测的论证。The beneficial effect of the invention lies in that the invention takes the servo valve valve core nozzle as the experimental processing part, and studies the surface quality of the part before and after processing. The present invention uses a variety of detection means to detect the inner surface of the part, respectively adopts a high-power microscope, NT1100 grating surface roughness and JEOLJXA-840 detection instrument, observes and analyzes the surface roughness and surface shape of each position point on the inner surface of the nozzle before and after processing. In order to demonstrate the effectiveness of abrasive flow processing technology, the micro-wear mechanism of abrasive media and the demonstration of processing prediction.

附图说明Description of drawings

图1是本发明实施例中所使用样品结构示意图。Fig. 1 is a schematic diagram of the sample structure used in the embodiment of the present invention.

图2是本发明实施例中未加工喷嘴小孔的扫描电镜样貌图。Fig. 2 is a scanning electron microscope view of an unprocessed nozzle hole in an embodiment of the present invention.

图3是本发明实施例中已加工喷嘴小孔的扫描电镜样貌图。Fig. 3 is a scanning electron microscope view of the processed nozzle hole in the embodiment of the present invention.

具体实施方式detailed description

下面结合附图对本发明的具体实施方式进行描述,以便更好的理解本发明。Specific embodiments of the present invention will be described below in conjunction with the accompanying drawings, so as to better understand the present invention.

实施例Example

实验加工的仪器准备:Instrument preparation for experimental processing:

(1)磨粒流加工实验器材:(1) Abrasive flow processing experimental equipment:

磨粒流加工装置主要包含了液压缸、动力系统、磨料缸、夹具、加工实验底座以及其他的加工附件。其中,采用三相异步电动机的小型液压站为实验加工提供动力,磨料缸和液压缸的直径为100mm,夹具是依据被加工工件的结构和尺寸大小而设定。The abrasive flow processing device mainly includes hydraulic cylinders, power systems, abrasive cylinders, fixtures, processing experiment bases and other processing accessories. Among them, a small hydraulic station using a three-phase asynchronous motor provides power for the experimental processing. The diameter of the abrasive cylinder and hydraulic cylinder is 100mm, and the fixture is set according to the structure and size of the workpiece to be processed.

(2)线切割机床:(2) Wire cutting machine:

实验加工结束后,为了检测实验加工的内表面,在被加工工件检测之前,需要采用线切割机床对被加工工件进行切割,实验采用型号为AQ550LDE高性能的电火花线切割机床,其线切割机床的切割精度范围-0.002mm~+0.002mm,加工范围550*350*270。After the experimental processing, in order to detect the inner surface of the experimental processing, before the workpiece is inspected, it is necessary to use a wire cutting machine tool to cut the workpiece. The cutting accuracy range is -0.002mm~+0.002mm, and the processing range is 550*350*270.

(3)高倍显微镜:(3) High power microscope:

采用NikonSMZ745T显微镜,其总放大倍范围为3.35-300,可以通过改变其放大倍数结合SUNJOYSH200视频检测系统对零件的各微小部位进行放大观察,观察其表面形貌。The Nikon SMZ745T microscope is used, and its total magnification range is 3.35-300. By changing its magnification and combining with the SUNJOYSH200 video inspection system, it is possible to magnify and observe each tiny part of the part and observe its surface morphology.

(4)表面粗糙度检测仪器:(4) Surface roughness testing instrument:

采用型号NT1100光栅表面粗糙度测量仪对工件加工前后的通道内表面的表面粗糙度进行检测,NT1100光栅表面粗糙度测量仪可以通过对加工表面的测量呈现表面粗糙度的三维测量图,测量范围从亚纳米级粗糙度到毫米级粗糙度,其检测快速,具有高分辨率和高重复性,保证了对工件表面粗糙度测量的准确性。Use the model NT1100 grating surface roughness measuring instrument to detect the surface roughness of the inner surface of the channel before and after workpiece processing. The NT1100 grating surface roughness measuring instrument can present a three-dimensional measurement map of the surface roughness through the measurement of the processed surface. The measurement range is from Sub-nanometer roughness to millimeter-level roughness, its detection is fast, with high resolution and high repeatability, which ensures the accuracy of the surface roughness measurement of the workpiece.

(5)电子探针显微分析仪:(5) Electron probe microanalyzer:

为更好观察加工前后的内面加工效果,当加工完成时还需要利用电子扫描电镜对工件的加工表面进行检测观察。实验采用日本电子生产的JEOLJXA-840电子探针显微分析仪,它可以用来检测材料的化学成分定性或定量分析以及组织形貌的检测。In order to better observe the processing effect of the inner surface before and after processing, when the processing is completed, it is necessary to use an electronic scanning electron microscope to detect and observe the processed surface of the workpiece. The experiment adopts the JEOL JXA-840 electron probe microanalyzer produced by JEOL, which can be used to detect the qualitative or quantitative analysis of the chemical composition of the material and the detection of the tissue morphology.

磨粒流加工的材料:是以伺服阀阀芯喷嘴为研究对象,在室温条件下,采用自行研制的研磨液对喷嘴进行加工实验,研磨液载流体采用的是航空液压油,固体颗粒采用碳化硅颗粒。Materials for abrasive flow processing: Servo valve spool nozzles are used as the research object. Under room temperature conditions, self-developed grinding liquid is used for processing experiments on the nozzles. The carrier fluid of the grinding liquid is aviation hydraulic oil, and the solid particles are carbonized. silicon particles.

工件要求:Artifact requirements:

喷嘴是伺服阀阀芯前置级的重要零件,它可以和挡板结构构成可变节流孔,可以实现对阀芯的位移控制。喷嘴是一种小型的精密回转体零件,外圆尺寸分为两种,内孔尺寸为两种,射流小孔直径为小孔的长度为0.3-0.5mm,总长度为6-20mm,且喷嘴具有很高的尺寸精度、形位精度以及表面粗糙度。其结构图如图1所示。The nozzle is an important part of the pre-stage of the spool of the servo valve. It can form a variable orifice with the baffle structure, and can realize the displacement control of the spool. The nozzle is a small precision rotary part, the size of the outer circle is divided into and Two types, the inner hole size is and Two types, jet orifice diameter is The length of the small hole is 0.3-0.5mm, the total length is 6-20mm, and the nozzle has high dimensional accuracy, shape accuracy and surface roughness. Its structural diagram is shown in Figure 1.

喷嘴要求在一定的压力条件下,喷嘴小孔在70mm范围内的射流液流成柱状,无散射、斜射、螺旋等缺陷,成对使用的喷嘴的小孔流量差值要控制在±2%以内。这决定了小孔尺寸的一致性、孔内微小毛刺的去除、内孔粗糙度以及圆度等要满足很高的要求。The nozzle requires that under a certain pressure condition, the nozzle hole within the range of 70mm will form a columnar jet without defects such as scattering, oblique shooting, and spiral, and the flow difference of the nozzles used in pairs should be controlled within ±2%. . This determines that the consistency of the small hole size, the removal of tiny burrs in the hole, the roughness and roundness of the inner hole must meet high requirements.

喷嘴零件材料属于难加工材料,现如今对喷嘴小孔的加工主要采用的是精密车床钻铰方法进行加工,但是由于小孔直径小,材料难加工,小孔尺寸及形位公差要求高,加工不易保证;射流小孔与通油孔相交处毛刺难以去除干净,容易造成喷嘴射流散射和螺旋;且小孔尺寸和通油孔尺寸过小,没有适合的工具对其相交处进行毛刺去除。综上所述,喷嘴小孔的加工合格率低,加工效率低,依据磨粒流加工技术的加工特点,可以对喷嘴加工出现的问题进行改善。The materials of nozzle parts are difficult to process. Nowadays, the precision lathe drilling and reaming method is mainly used to process the small holes of nozzles. However, due to the small diameter of small holes, the materials are difficult to process, and the requirements for small hole size and shape and position tolerance are high. Processing It is not easy to guarantee; the burr at the intersection of the small jet hole and the oil hole is difficult to remove cleanly, and it is easy to cause the nozzle jet to scatter and spiral; and the size of the small hole and the oil hole are too small, there is no suitable tool to remove the burr at the intersection. To sum up, the processing pass rate of small nozzle holes is low, and the processing efficiency is low. According to the processing characteristics of abrasive flow processing technology, the problems in nozzle processing can be improved.

实验研磨液:Experimental grinding fluid:

本次实验加工采用的是自行研制的研磨液,载流体为航空液压油,固体颗粒为碳化硅颗粒,根据加工工件的尺寸大小和加工工况,选用合理的颗粒直径按照一定的比例进行配置。This experimental processing uses self-developed grinding fluid, the carrier fluid is aviation hydraulic oil, and the solid particles are silicon carbide particles. According to the size of the workpiece and the processing conditions, a reasonable particle diameter is selected and configured according to a certain ratio.

实验结果与讨论:Experimental Results and Discussion:

本实验主要是利用磨粒流加工技术对伺服阀阀芯喷嘴进行微小孔径通道内表面的抛光加工,实验结束后,为了对其通道内表面的检测,首先需要将已加工工件线切割,零件清洗之后,然后采用相应的检测仪器检测工件内表面的表面粗糙度以及表面形貌和工件的元素成分。This experiment mainly uses abrasive flow processing technology to polish the inner surface of the micro-aperture channel of the servo valve valve core nozzle. Afterwards, the surface roughness of the inner surface of the workpiece as well as the surface morphology and the elemental composition of the workpiece are detected by corresponding testing instruments.

(1)实验工件(1) Experimental workpiece

主要验证磨粒流加工的有效可行性,需要采用各种检测手段来获得喷嘴内表面的检测数据,观察其加工通道的内表面质量。因伺服阀阀芯喷嘴的内部通道狭小细长,尤其是喷嘴小孔区域,所以实验加工结束后需要采用线切割机床进行零件的切割剖面,然后才能将切割后的零件进行各种环境下的内表面检测。To verify the effectiveness and feasibility of abrasive flow machining, it is necessary to use various detection methods to obtain the detection data of the inner surface of the nozzle and observe the quality of the inner surface of the processing channel. Because the internal channel of the servo valve spool nozzle is narrow and slender, especially the small hole area of the nozzle, it is necessary to use a wire cutting machine tool to cut the section of the part after the experimental processing is completed, and then the cut part can be used in various environments. Surface detection.

通过对局部放大图的分析发现,加工前的喷嘴零件的内表面粗糙,不光滑,尤其是喷嘴小孔区域,加工后的喷嘴不论是加工通道内还是喷嘴小孔区域其内表面有些改善。为了能更好的对比分析加工前后喷嘴内表面的质量,本发明又采用了不同的检测手段对其加工内表面进行检测:使用高倍显微镜对喷嘴小孔区域进行检测;使用NT1100光栅表面粗糙度测量仪检测加工表面的表面粗糙度;使用JOELJXA-840电子探针显微分析仪检测加工表面的表面形貌以及对加工表面的成分分析。Through the analysis of the partial enlarged picture, it is found that the inner surface of the nozzle parts before processing is rough and not smooth, especially in the area of the small hole of the nozzle. In order to better compare and analyze the quality of the inner surface of the nozzle before and after processing, the present invention uses different detection methods to detect the inner surface of the nozzle: use a high-power microscope to detect the small hole area of the nozzle; use NT1100 grating surface roughness measurement The surface roughness of the processed surface is detected by the instrument; the surface morphology of the processed surface and the component analysis of the processed surface are detected by the JOELJXA-840 electron probe microanalyzer.

(2)高倍显微镜下的检测结果分析:(2) Analysis of detection results under a high-power microscope:

采用NikonSMZ745T主要是针对伺服阀阀芯喷嘴小孔区域的表面测量,在不同的放大倍数条件下观察伺服阀阀芯喷嘴加工前后小孔区域的成形样貌,通过观察对比小孔区域的表面形貌以此判断磨粒流加工技术的加工效果。因其实验数据颇多,无法一一论述,在此只选取了一组喷嘴小孔加工前的测量结果和两组喷嘴小孔加工后的测量结果,其喷嘴小孔区域的检测结果如图2、图3所示。The use of NikonSMZ745T is mainly aimed at the surface measurement of the small hole area of the servo valve spool nozzle. Under different magnification conditions, the forming appearance of the small hole area before and after the servo valve spool nozzle is observed, and the surface morphology of the small hole area is compared by observation. In this way, the processing effect of abrasive flow machining technology can be judged. Because of the large amount of experimental data, it is impossible to discuss them one by one. Here, only one set of measurement results before the small nozzle hole machining and two sets of measurement results after the nozzle small hole machining are selected. The detection results of the nozzle small hole area are shown in Figure 2 , as shown in Figure 3.

从未加工喷嘴小孔的样貌图可以看出,喷嘴小孔区域位置凹凸不平;从已加工喷嘴小孔的样貌图可以看出,喷嘴小孔区域位置光滑平整。通过对比分析喷嘴小孔区域加工前后的样貌图可以得知,磨粒流加工技术可以改善小孔区域的毛刺现象,对其凹凸不平的表面进行光整加工,以此改善微小细孔的内表面质量。From the image of the small hole of the unprocessed nozzle, it can be seen that the position of the small hole of the nozzle is uneven; from the image of the small hole of the processed nozzle, it can be seen that the position of the small hole of the nozzle is smooth and flat. By comparing and analyzing the appearance pictures of the small hole area of the nozzle before and after processing, it can be known that the abrasive flow processing technology can improve the burr phenomenon in the small hole area, and smooth the uneven surface to improve the inner surface of the tiny hole. Surface Quality.

在高倍显微镜下对喷嘴小孔区域的检测,只可以观察出喷嘴区域的大体样貌,还不能准确的分析磨粒流加工技术的加工效果,尤其是在喷嘴通道内表面的加工效果,还需对其进行进一步的检测。The detection of the small hole area of the nozzle under a high-power microscope can only observe the general appearance of the nozzle area, and cannot accurately analyze the processing effect of the abrasive flow processing technology, especially the processing effect on the inner surface of the nozzle channel. further testing it.

(3)表面粗糙度的检测结果分析:(3) Analysis of the detection results of surface roughness:

本发明在经过线切割后的实验工件内表面选取3个试验点分别进行测量,利用NT1100光栅表面粗糙度测量仪随机安装的软件获得了工件加工表面粗糙度的二维、三维形貌图以及相关数据。The present invention selects three test points on the inner surface of the experimental workpiece after wire cutting to measure respectively, and uses the software installed randomly with the NT1100 grating surface roughness measuring instrument to obtain the two-dimensional and three-dimensional topography diagrams and related data.

通过比较各试验点的检测结果发现:在第一个试验点处,零件内表面的初始粗糙度数值为743.93nm,经过磨粒流抛光加工后其粗糙度数值变为571.64nm;在第二个试验点处,零件内表面的初始粗糙度为823.07nm,经过磨粒流抛光加工后其粗糙度数值变为735.24;在第三个试验点处,零件内表面的初始粗糙度数值为1.1um,经过磨粒流抛光加工后其粗糙度数值变为721.09nm。By comparing the test results of each test point, it is found that: at the first test point, the initial roughness value of the inner surface of the part is 743.93nm, and its roughness value becomes 571.64nm after abrasive flow polishing; At the test point, the initial roughness of the inner surface of the part is 823.07nm, and the roughness value becomes 735.24 after abrasive flow polishing; at the third test point, the initial roughness value of the inner surface of the part is 1.1um, After abrasive flow polishing, its roughness value becomes 721.09nm.

从上述二维表面形貌图中喷嘴加工前后表面粗糙度数值的变化可知,经过磨粒流加工技术抛光后的零件内表面的表面粗糙度数值变小;从三维表面形貌中看出未加工零件表面的红色区域明显,红色区域表征的是此处表面粗糙度大,表面突起的峰值较大,加工之后的零件表面红色区域减少,表明了被加工表面的材料经过磨粒流磨削将突起的表面材料去除,所以其表面突起峰值减小。综上所述,经过磨粒流加工技术后,伺服阀阀芯喷嘴的加工表面得到改善,其内表面光洁度变好,表面粗糙度数值满足零件使用的要求。From the changes in the surface roughness values before and after nozzle processing in the above two-dimensional surface topography diagram, it can be seen that the surface roughness value of the inner surface of the part after polishing by abrasive flow processing technology becomes smaller; from the three-dimensional surface topography, it can be seen The red area on the surface of the part is obvious. The red area indicates that the surface roughness is large here, and the peak of the surface protrusion is large. The red area on the surface of the part after processing is reduced, indicating that the material on the processed surface will protrude after abrasive flow grinding. The surface material is removed, so its surface protrusion peaks are reduced. To sum up, after the abrasive flow processing technology, the processing surface of the servo valve spool nozzle is improved, the inner surface finish is better, and the surface roughness value meets the requirements of the parts.

(4)表面形貌的检测结果分析:(4) Analysis of detection results of surface topography:

(a)表面质量的验证分析(a) Verification analysis of surface quality

采用日本电子株式会社生产的JXA-840仪器检测零件加工前后的表面形貌,在伺服阀阀芯喷嘴的加工通道内选取4点位置,利用JXA-840仪器对加工表面微观形貌进行1000倍、2000倍下观察。The JXA-840 instrument produced by Japan Electronics Co., Ltd. is used to detect the surface morphology of the parts before and after processing. Select 4 points in the processing channel of the servo valve valve core nozzle, and use the JXA-840 instrument to measure the microscopic morphology of the processed surface by 1000 times. Observe under 2000 times.

通过观察在JXA-840仪器的1000倍放大倍数条件下的伺服阀阀芯喷嘴内表面的表面形貌图,对比发现,经过抛光加工后的零件内表面形貌发生改变。未加工过的喷嘴零件的内表面为传统加工状态下,喷嘴内表面粗糙、峰谷高低起伏、不平整,虽然其表面纹理不是特别紊乱,但是表面带有深浅不一的划痕和一定数量的夹杂碎屑;经过磨粒流抛光磨削的表面相貌,磨料介质以微磨削的方式实现了加工表面材料的去除,加工之后的内表面纹理清晰、平缓而致密,原本存在的划痕消失不见,表面质量获得改善。综上所述,磨粒流加工技术以磨料介质的微磨削方式实现了对加工表面的光整加工,获得了良好的表面粗糙度,喷嘴内表面的表面质量获得改善。By observing the surface topography of the inner surface of the servo valve valve core nozzle under the condition of 1000 times magnification of the JXA-840 instrument, it is found by comparison that the inner surface topography of the polished part changes. The inner surface of the unprocessed nozzle parts is under the traditional processing state. The inner surface of the nozzle is rough, with undulating peaks and valleys, and unevenness. Although the surface texture is not particularly disordered, the surface has scratches of different shades and a certain number of Inclusion of debris; the appearance of the surface after abrasive flow polishing and grinding, the abrasive medium realizes the removal of the processed surface material by means of micro-grinding, the texture of the inner surface after processing is clear, smooth and dense, and the original scratches disappear , the surface quality is improved. In summary, the abrasive flow machining technology realizes the smoothing of the machined surface by means of abrasive media micro-grinding, obtains good surface roughness, and improves the surface quality of the inner surface of the nozzle.

(2)小孔区域的预测验证分析:(2) Prediction verification analysis of small hole area:

颗粒对各加工区域的磨损量因模型尺寸和流场内连续相与离散相性质的影响而不同,小孔区域的磨损量与其他部位的相比,磨损量较大,所以预测磨粒流加工技术在小孔区域位置的加工效果比其他部位较好。通过对比发现,传统工艺对小孔区域的加工质量不是特别好,这主要是因为小孔的尺寸太小,传统工艺无法对小孔进行精加工。经过磨粒流光整加工后,不论是喷嘴主干通道内表面还是喷嘴小孔区域表面都有改善;通过对比主干通道和小孔区域的表面形貌图显示阀芯喷嘴小孔部位的表面形貌比主干通道的光滑平整,这是由于喷嘴部位与主干通道尺寸差异所导致的流场湍流和颗粒磨损率的不同,所以零件各位置的磨粒流加工效果有所不同,与实验仿真分析中对小孔区域的加工预测是一致的。The wear amount of particles on each processing area is different due to the influence of the size of the model and the properties of the continuous phase and the discrete phase in the flow field. Compared with other parts, the wear amount of the small hole area is larger, so the prediction of abrasive flow processing The processing effect of the technology in the small hole area is better than other parts. Through comparison, it is found that the processing quality of the small hole area is not particularly good by the traditional process, mainly because the size of the small hole is too small, and the traditional process cannot finish the small hole. After abrasive finishing, both the inner surface of the main channel of the nozzle and the surface of the small hole area of the nozzle are improved; by comparing the surface topography of the main channel and the small hole area, the surface topography of the small hole of the valve core nozzle is compared The smoothness of the main channel is due to the difference in flow field turbulence and particle wear rate caused by the difference in size between the nozzle and the main channel, so the abrasive particle flow processing effect at each position of the part is different. Machining predictions for hole regions are consistent.

以上所述是本发明的优选实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明原理的前提下,还可以做出若干改进和润饰,这些改进和润饰也视为本发明的保护范围。The above description is a preferred embodiment of the present invention, and it should be pointed out that for those skilled in the art, without departing from the principle of the present invention, some improvements and modifications can also be made, and these improvements and modifications are also considered Be the protection scope of the present invention.

Claims (1)

1.一种伺服阀阀芯喷嘴的磨粒流加工实验验证方法,其特征在于:利用磨粒流加工技术对伺服阀阀芯喷嘴进行微小孔径通道内表面的抛光加工,实验结束后,为了对其通道内表面的检测,首先需要将已加工工件线切割,零件清洗之后,然后采用相应的检测仪器检测工件内表面的表面粗糙度以及表面形貌和工件的元素成分,具体包括以下方面及步骤:1. A method for verifying the abrasive flow processing experiment of a servo valve spool nozzle, characterized in that: the abrasive flow processing technology is used to polish the inner surface of the micro-aperture passage to the servo valve spool nozzle. After the experiment, in order to The detection of the inner surface of the channel first needs to cut the processed workpiece by wire, after cleaning the parts, and then use the corresponding detection equipment to detect the surface roughness of the inner surface of the workpiece, the surface morphology and the elemental composition of the workpiece, specifically including the following aspects and steps : (1)实验工件:实验加工结束后需要采用线切割机床进行零件的切割剖面,然后才能将切割后的零件进行各种环境下的内表面检测;通过对局部放大图的分析发现,加工前的喷嘴零件的内表面粗糙,不光滑,尤其是喷嘴小孔区域,加工后的喷嘴不论是加工通道内还是喷嘴小孔区域其内表面有些改善;为了能更好的对比分析加工前后喷嘴内表面的质量,本发明又采用了不同的检测手段对其加工内表面进行检测:使用高倍显微镜对喷嘴小孔区域进行检测;使用NT1100光栅表面粗糙度测量仪检测加工表面的表面粗糙度;使用JOELJXA-840电子探针显微分析仪检测加工表面的表面形貌以及对加工表面的成分分析;(1) Experimental workpiece: After the experimental processing is completed, it is necessary to use a wire cutting machine tool to cut the cutting section of the part, and then the inner surface of the cut part can be tested in various environments; The inner surface of the nozzle part is rough and not smooth, especially in the small hole area of the nozzle. The inner surface of the processed nozzle is somewhat improved, whether in the processing channel or the small hole area of the nozzle; in order to better compare and analyze the inner surface of the nozzle before and after processing quality, the present invention adopts different detection means to detect the inner surface of its processing: use a high-power microscope to detect the small hole area of the nozzle; use the NT1100 grating surface roughness measuring instrument to detect the surface roughness of the processed surface; use JOELJXA-840 Electron probe microanalyzer detects the surface morphology of the processed surface and analyzes the composition of the processed surface; (2)高倍显微镜下的检测结果分析:(2) Analysis of detection results under a high-power microscope: 采用NikonSMZ745T主要是针对伺服阀阀芯喷嘴小孔区域的表面测量,在不同的放大倍数条件下观察伺服阀阀芯喷嘴加工前后小孔区域的成形样貌,通过观察对比小孔区域的表面形貌以此判断磨粒流加工技术的加工效果;The use of NikonSMZ745T is mainly aimed at the surface measurement of the small hole area of the servo valve spool nozzle. Under different magnification conditions, the forming appearance of the small hole area before and after the servo valve spool nozzle is observed, and the surface morphology of the small hole area is compared by observation. In this way, the processing effect of abrasive flow processing technology can be judged; (3)表面粗糙度的检测结果分析:(3) Analysis of the detection results of surface roughness: 在经过线切割后的实验工件内表面选取3个试验点分别进行测量,利用NT1100光栅表面粗糙度测量仪随机安装的软件获得了工件加工表面粗糙度的二维、三维形貌图以及相关数据;Three test points were selected to measure the inner surface of the experimental workpiece after wire cutting, and the two-dimensional and three-dimensional topography and related data of the workpiece surface roughness were obtained by using the software installed with the NT1100 grating surface roughness measuring instrument; (4)表面形貌的检测结果分析:(4) Analysis of detection results of surface topography: (a)表面质量的验证分析:(a) Verification analysis of surface quality: 采用日本电子株式会社生产的JXA-840仪器检测零件加工前后的表面形貌,在伺服阀阀芯喷嘴的加工通道内选取4点位置,利用JXA-840仪器对加工表面微观形貌进行1000倍、2000倍下观察;The JXA-840 instrument produced by Japan Electronics Co., Ltd. is used to detect the surface morphology of the parts before and after processing. Select 4 points in the processing channel of the servo valve valve core nozzle, and use the JXA-840 instrument to measure the microscopic morphology of the processed surface by 1000 times. Observation under 2000 times; (2)小孔区域的预测验证分析:(2) Prediction verification analysis of small hole area: 颗粒对各加工区域的磨损量因模型尺寸和流场内连续相与离散相性质的影响而不同,小孔区域的磨损量与其他部位的相比,磨损量较大,所以预测磨粒流加工技术在小孔区域位置的加工效果比其他部位较好;通过对比发现,传统工艺对小孔区域的加工质量不是特别好,这主要是因为小孔的尺寸太小,传统工艺无法对小孔进行精加工;经过磨粒流光整加工后,不论是喷嘴主干通道内表面还是喷嘴小孔区域表面都有改善;通过对比主干通道和小孔区域的表面形貌图显示阀芯喷嘴小孔部位的表面形貌比主干通道的光滑平整,这是由于喷嘴部位与主干通道尺寸差异所导致的流场湍流和颗粒磨损率的不同,所以零件各位置的磨粒流加工效果有所不同,与实验仿真分析中对小孔区域的加工预测是一致的。The wear amount of particles on each processing area is different due to the influence of the size of the model and the properties of the continuous phase and the discrete phase in the flow field. Compared with other parts, the wear amount of the small hole area is larger, so the prediction of abrasive flow processing The processing effect of the technology in the small hole area is better than other parts; through comparison, it is found that the processing quality of the small hole area by the traditional process is not particularly good, mainly because the size of the small hole is too small, and the traditional process cannot be processed on the small hole. Finishing; After abrasive flow finishing, both the inner surface of the nozzle main channel and the surface of the small hole area of the nozzle are improved; by comparing the surface topography of the main channel and the small hole area, the surface of the small hole of the valve core nozzle is shown The shape is smoother and flatter than that of the main channel. This is due to the difference in flow field turbulence and particle wear rate caused by the size difference between the nozzle part and the main channel. The processing predictions in the small hole area are consistent.
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