CN105652527A - Color film substrate, manufacture method thereof and display device - Google Patents
Color film substrate, manufacture method thereof and display device Download PDFInfo
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- CN105652527A CN105652527A CN201610046024.XA CN201610046024A CN105652527A CN 105652527 A CN105652527 A CN 105652527A CN 201610046024 A CN201610046024 A CN 201610046024A CN 105652527 A CN105652527 A CN 105652527A
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
- G02F1/13394—Gaskets; Spacers; Sealing of cells spacers regularly patterned on the cell subtrate, e.g. walls, pillars
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
- G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
- G02F1/13396—Spacers having different sizes
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Abstract
本发明提供一种彩膜基板,包括彩膜层、多个主隔垫物和多个辅助隔垫物,主隔垫物位于彩膜层上,彩膜层上对应于辅助隔垫物的位置形成有安置孔,辅助隔垫物的下部位于彩膜层上的安置孔中,以使得主隔垫物的顶端与彩膜层的表面之间的距离大于辅助隔垫物的顶端与彩膜层的表面之间的距离。本发明还提供一种显示装置和一种彩膜基板的制造方法。在同一步构图工艺中同时形成主隔垫物和辅助隔垫物,由于辅助隔垫物的下部分位于安置孔中,因此,辅助隔垫物的顶端高度小于主隔垫物的顶端高度。在形成隔垫物时,无需使用透过度不同的半色调掩膜板,只需在彩膜层上形成安置孔,从而降低了制作彩膜基板的成本。
The invention provides a color filter substrate, comprising a color filter layer, a plurality of main spacers and a plurality of auxiliary spacers, the main spacers are located on the color filter layer, and the position of the color filter layer corresponds to the auxiliary spacers A placement hole is formed, and the lower part of the auxiliary spacer is located in the placement hole on the color filter layer, so that the distance between the top of the main spacer and the surface of the color filter layer is greater than the distance between the top of the auxiliary spacer and the color filter layer. distance between the surfaces. The invention also provides a display device and a manufacturing method of the color filter substrate. The main spacer and the auxiliary spacer are formed simultaneously in the same patterning process. Since the lower part of the auxiliary spacer is located in the placement hole, the height of the top of the auxiliary spacer is smaller than that of the main spacer. When forming spacers, there is no need to use half-tone mask plates with different transmittances, and only need to form installation holes on the color filter layer, thereby reducing the cost of manufacturing the color filter substrate.
Description
技术领域technical field
本发明涉及显示装置领域,具体地,涉及一种彩膜基板、该彩膜基板的制造方法和包括所述彩膜基板的显示装置。The present invention relates to the field of display devices, in particular to a color filter substrate, a method for manufacturing the color filter substrate, and a display device including the color filter substrate.
背景技术Background technique
液晶显示装置包括彩膜基板和与该彩膜基板对盒设置的阵列基板。为了维持液晶显示装置的盒厚,需要在彩膜基板和阵列基板之间设置隔垫物。隔垫物包括主隔垫物和辅助隔垫物,主隔垫物的高度大于辅助隔垫物的高度。通常,可以利用半色调掩膜板来形成主隔垫物和辅助隔垫物。The liquid crystal display device includes a color filter substrate and an array substrate arranged opposite to the color filter substrate. In order to maintain the cell thickness of the liquid crystal display device, spacers need to be provided between the color filter substrate and the array substrate. The spacers include main spacers and auxiliary spacers, and the height of the main spacers is greater than that of the auxiliary spacers. Generally, the main spacers and the auxiliary spacers can be formed using a halftone mask.
发明内容Contents of the invention
本发明的目的在于提供一种彩膜基板、该彩膜基板的制造方法和包括所述彩膜基板的显示装置,利用所述制造方法可以在彩膜基板上形成高度不同的主隔垫物和辅助隔垫物。The object of the present invention is to provide a color filter substrate, a manufacturing method of the color filter substrate and a display device including the color filter substrate, and main spacers and spacers with different heights can be formed on the color filter substrate by the manufacturing method. Auxiliary spacer.
为了实现上述目的,作为本发明的一个方面,提供一种彩膜基板,所述彩膜基板包括彩膜层、多个主隔垫物和多个辅助隔垫物,其中,所述主隔垫物位于所述彩膜层上,所述彩膜层上对应于所述辅助隔垫物的位置形成有安置孔,所述辅助隔垫物的下部位于所述彩膜层上的安置孔中,以使得所述主隔垫物的顶端与所述彩膜层的表面之间的距离大于所述辅助隔垫物的顶端与所述彩膜层的表面之间的距离。In order to achieve the above object, as one aspect of the present invention, a color filter substrate is provided, the color filter substrate includes a color filter layer, a plurality of main spacers and a plurality of auxiliary spacers, wherein the main spacers The object is located on the color filter layer, and a placement hole is formed on the color filter layer corresponding to the position of the auxiliary spacer, and the lower part of the auxiliary spacer is located in the placement hole on the color filter layer, Such that the distance between the top of the main spacer and the surface of the color filter layer is greater than the distance between the top of the auxiliary spacer and the surface of the color filter layer.
优选地,所述彩膜层包括色阻层和形成在所述色阻层上的透明平坦化层,所述主隔垫物形成在所述透明平坦化层上。Preferably, the color filter layer includes a color-resist layer and a transparent planarization layer formed on the color-resist layer, and the main spacer is formed on the transparent planarization layer.
优选地,所述安置孔形成在所述透明平坦化层上。Preferably, the installation holes are formed on the transparent planarization layer.
优选地,所述色阻层上对应于所述辅助隔垫物的位置形成有凹槽,所述透明平坦化层的材料落入所述凹槽中,以形成所述安置孔。Preferably, a groove is formed on the color-resisting layer corresponding to the position of the auxiliary spacer, and the material of the transparent planarization layer falls into the groove to form the placement hole.
优选地,所述安置孔包括贯穿所述透明平坦化层的第一安置孔部和形成在所述色阻层中且与所述第一安置孔部对准的第二安置孔部。Preferably, the settling hole includes a first settling hole portion penetrating through the transparent planarizing layer and a second settling hole portion formed in the color resist layer and aligned with the first settling hole portion.
作为本发明的另一个方面,提供一种显示装置,所述显示装置包括彩膜基板,其中,所述彩膜基板为本发明所提供的上述彩膜基板。As another aspect of the present invention, a display device is provided, and the display device includes a color filter substrate, wherein the color filter substrate is the above-mentioned color filter substrate provided by the present invention.
作为本发明的还一个方面,提供一种彩膜基板的制造方法,其中,所述制造方法包括:As yet another aspect of the present invention, a method for manufacturing a color filter substrate is provided, wherein the method includes:
形成彩膜层以及多个安置孔,所述安置孔的位置对应于辅助隔垫物的位置;forming a color filter layer and a plurality of placement holes, the positions of the placement holes correspond to the positions of the auxiliary spacers;
形成多个主隔垫物和多个所述辅助隔垫物,所述辅助隔垫物的下部位于所述安置孔中。A plurality of main spacers and a plurality of the auxiliary spacers are formed, the lower portions of the auxiliary spacers being located in the seating holes.
优选地,形成彩膜层以及多个安置孔的步骤包括:Preferably, the step of forming the color filter layer and the plurality of placement holes includes:
形成色阻层;Form a color resist layer;
在色阻层上对应所述辅助隔垫物的位置形成凹槽;forming grooves on the color resist layer at positions corresponding to the auxiliary spacers;
形成透明材料层,所述透明材料层的材料落入所述凹槽中形成所述安置孔。A transparent material layer is formed, and the material of the transparent material layer falls into the groove to form the placement hole.
优选地,形成彩膜层以及多个安置孔的步骤包括:Preferably, the step of forming the color filter layer and the plurality of placement holes includes:
形成色阻层;Form a color resist layer;
形成透明平坦化层;forming a transparent planarization layer;
在透明平坦化层上形成所述安置孔。The placement holes are formed on the transparent planarization layer.
优选地,形成彩膜层及多个安置孔的步骤包括:Preferably, the step of forming the color filter layer and the plurality of placement holes includes:
形成色阻层;Form a color resist layer;
形成透明平坦化层;forming a transparent planarization layer;
形成贯穿所述透明平坦化层以及穿过所述色阻层的至少一部分的安置孔。A placement hole is formed through the transparent planarization layer and through at least a portion of the color resist layer.
在同一步构图工艺中同时形成主隔垫物和辅助隔垫物,由于辅助隔垫物的下部分位于所述安置孔中,因此,辅助隔垫物的顶端高度小于主隔垫物的顶端高度。在形成所述隔垫物时,无需使用透过度不同的半色调掩膜板,只需在彩膜层上形成所述安置孔,从而降低了制作所述彩膜基板的成本。The main spacer and the auxiliary spacer are simultaneously formed in the same patterning process, and since the lower part of the auxiliary spacer is located in the placement hole, the height of the top of the auxiliary spacer is smaller than that of the main spacer . When forming the spacers, there is no need to use half-tone masks with different transmittances, and only the placement holes need to be formed on the color filter layer, thereby reducing the cost of manufacturing the color filter substrate.
附图说明Description of drawings
附图是用来提供对本发明的进一步理解,并且构成说明书的一部分,与下面的具体实施方式一起用于解释本发明,但并不构成对本发明的限制。在附图中:The accompanying drawings are used to provide a further understanding of the present invention, and constitute a part of the description, together with the following specific embodiments, are used to explain the present invention, but do not constitute a limitation to the present invention. In the attached picture:
图1是本发明所提供的彩膜基板的第一种实施方式;Fig. 1 is the first embodiment of the color filter substrate provided by the present invention;
图2是本发明所提供的彩膜基板的第二种实施方式;Fig. 2 is the second embodiment of the color filter substrate provided by the present invention;
图3是本发明所提供的彩膜基板的第三种实施方式。Fig. 3 is a third embodiment of the color filter substrate provided by the present invention.
附图标记说明Explanation of reference signs
110:主隔垫物120:辅助隔垫物110: main spacer 120: auxiliary spacer
200:彩膜层210:色阻层200: color filter layer 210: color resist layer
220:透明平坦化层300:黑矩阵220: transparent planarization layer 300: black matrix
400:透明基板400: transparent substrate
具体实施方式detailed description
以下结合附图对本发明的具体实施方式进行详细说明。应当理解的是,此处所描述的具体实施方式仅用于说明和解释本发明,并不用于限制本发明。Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to illustrate and explain the present invention, and are not intended to limit the present invention.
容易理解的是,在本发明中,表示方位的词“上、下”“高、低”等都是图1至图3中的方位。It is easy to understand that, in the present invention, the words "up, down", "high, low", etc. representing orientation are the orientations in Fig. 1 to Fig. 3 .
作为本发明的一个方面,提供一种彩膜基板,如图1所示,所述彩膜基板包括彩膜层200、多个主隔垫物110和多个辅助隔垫物120,其中,主隔垫物110位于彩膜层200上,彩膜层200上对应于辅助隔垫物120的位置形成有安置孔,辅助隔垫物120的下部位于彩膜层200上的安置孔中,以使得主隔垫物110与彩膜层200的表面之间的距离D1大于辅助隔垫物120与彩膜层200的表面之间的距离D2。As one aspect of the present invention, a color filter substrate is provided. As shown in FIG. 1 , the color filter substrate includes a color filter layer 200, a plurality of main spacers 110 and a plurality of auxiliary spacers 120, wherein the main The spacer 110 is located on the color filter layer 200, and a placement hole is formed on the color filter layer 200 corresponding to the position of the auxiliary spacer 120, and the lower part of the auxiliary spacer 120 is located in the placement hole on the color filter layer 200, so that The distance D1 between the main spacer 110 and the surface of the color filter layer 200 is greater than the distance D2 between the auxiliary spacer 120 and the surface of the color filter layer 200 .
在同一步构图工艺中同时形成主隔垫物110和辅助隔垫物120,由于辅助隔垫物120的下部分位于所述安置孔中,因此,辅助隔垫物120的顶端高度小于主隔垫物110的顶端高度。在形成所述隔垫物时,无需使用透过度不同的半色调掩膜板,只需在彩膜层上形成所述安置孔,从而降低了制作所述彩膜基板的成本。并且,可以提供控制所述安置孔的深度来调节主隔垫物110和辅助隔垫物120之间的高度差,则使得本发明所提供的彩膜基板适用于多种不同尺寸的显示装置。The main spacer 110 and the auxiliary spacer 120 are simultaneously formed in the same patterning process, and since the lower part of the auxiliary spacer 120 is located in the placement hole, the height of the top of the auxiliary spacer 120 is smaller than that of the main spacer. The top height of object 110. When forming the spacers, there is no need to use half-tone masks with different transmittances, and only the placement holes need to be formed on the color filter layer, thereby reducing the cost of manufacturing the color filter substrate. Moreover, it is possible to control the depth of the installation holes to adjust the height difference between the main spacer 110 and the auxiliary spacer 120 , so that the color filter substrate provided by the present invention is suitable for display devices of various sizes.
容易理解的是,所述彩膜基板还可以包括黑矩阵300和透明衬底400。由于黑矩阵和透明衬底400是本领域所公知的,因此,之类不再赘述。It is easy to understand that the color filter substrate may also include a black matrix 300 and a transparent substrate 400 . Since the black matrix and the transparent substrate 400 are well known in the art, the descriptions thereof will not be repeated here.
在所述彩膜层中,主隔垫物110的个数和辅助隔垫物120的个数都为多个。例如,在21.5寸的显示装置的彩膜基板中,每18个像素单元中设置一个主隔垫物,没18个像素单元那种设置4个辅助隔垫物。在22寸的显示装置的彩膜基板中,每21个像素单元中设置一个主隔垫物,每21个像素单元中设置19个辅助隔垫物。In the color filter layer, the number of main spacers 110 and the number of auxiliary spacers 120 are multiple. For example, in the color filter substrate of a 21.5-inch display device, one main spacer is provided for every 18 pixel units, and four auxiliary spacers are provided for every 18 pixel units. In the color filter substrate of a 22-inch display device, one main spacer is arranged in every 21 pixel units, and 19 auxiliary spacers are arranged in every 21 pixel units.
在本发明所提供的彩膜基板上,多个辅助隔垫物的高度可以不尽相同。可以通过设置各个辅助隔垫物对应的安置孔的深度来确定最终的辅助隔垫物的顶端与彩膜层的上表面之间的距离。On the color filter substrate provided by the present invention, the heights of the plurality of auxiliary spacers may be different. The final distance between the top of the auxiliary spacer and the upper surface of the color filter layer can be determined by setting the depth of the installation hole corresponding to each auxiliary spacer.
优选地,彩膜层200的上表面除了所述安置孔之外其他的部分都应当是平坦的,从而便于获得高度一致的主隔垫物110。作为一种具体实施方式,彩膜层200包括色阻层210和形成在该色阻层210上的透明平坦化层220,主隔垫物110形成在透明平坦化层220上。色阻层可以包括多个色阻块,色阻块包括红色色阻块R、蓝色色阻块B和绿色色阻块(未示出)。Preferably, other parts of the upper surface of the color filter layer 200 except the placement holes should be flat, so as to facilitate obtaining the main spacer 110 with a consistent height. As a specific implementation manner, the color filter layer 200 includes a color resist layer 210 and a transparent planarization layer 220 formed on the color resist layer 210 , and the main spacers 110 are formed on the transparent planarization layer 220 . The color-resist layer may include a plurality of color-resist blocks, and the color-resist blocks include a red color-resist block R, a blue color-resist block B, and a green color-resist block (not shown).
在本发明中,安置孔的最终深度是由辅助隔垫物120与主隔垫物110之间的设计高度差所决定的。当所述设计高度差小于平坦化层220的厚度时,如图1所示,作为本发明的第一种实施方式,所述安置孔可以形成在透明平坦化层220上,且不贯穿该平坦化层220。In the present invention, the final depth of the installation hole is determined by the designed height difference between the auxiliary spacer 120 and the main spacer 110 . When the designed height difference is smaller than the thickness of the planarization layer 220, as shown in FIG. layer 220.
作为本发明的第二种实施方式,如图2所示,可以在色阻层210上对应于辅助隔垫物120的位置形成凹槽,透明平坦化层220的材料落入所述凹槽中,以形成所述安置孔。As a second embodiment of the present invention, as shown in FIG. 2 , grooves can be formed on the color-resist layer 210 corresponding to the positions of the auxiliary spacers 120 , and the material of the transparent planarization layer 220 falls into the grooves. , to form the placement hole.
当所述设计高度差大于平坦化层220的厚度时,如图1所示,作为本发明的第三种实施方式,所述安置孔包括贯穿透明平坦化层220的第一安置孔部和形成在色阻层210中且与所述第一安置孔部对准的第二安置孔部。When the designed height difference is greater than the thickness of the planarization layer 220, as shown in FIG. A second installation hole part in the color resist layer 210 and aligned with the first installation hole part.
作为本发明的另一个方面,提供一种显示装置,所述显示装置包括彩膜基板,其中,所述彩膜基板为本发明所提供的上述彩膜基板。As another aspect of the present invention, a display device is provided, and the display device includes a color filter substrate, wherein the color filter substrate is the above-mentioned color filter substrate provided by the present invention.
由于所述彩膜基板的制造成本较低,因此,所述显示装置的成本也相应较低。Since the manufacturing cost of the color filter substrate is low, the cost of the display device is correspondingly low.
作为本发明的还一个方面,提供上述彩膜基板的制造方法,其中,所述制造方法包括:As yet another aspect of the present invention, a method for manufacturing the above-mentioned color filter substrate is provided, wherein the method includes:
形成彩膜层以及安置孔,所述安置孔的位置对应于辅助隔垫物的位置;forming a color filter layer and placement holes, the positions of the placement holes correspond to the positions of the auxiliary spacers;
形成主隔垫物和所述辅助隔垫物,所述辅助隔垫物的下部位于所述安置孔中。A main spacer and the auxiliary spacer are formed, and a lower portion of the auxiliary spacer is located in the seating hole.
容易理解的是,所述彩膜层是设置在透明衬底上的。所述彩膜基板还包括黑矩阵,因此,所述制造方法还包括在形成彩膜层之前进行的形成黑矩阵的步骤。It is easy to understand that the color filter layer is provided on a transparent substrate. The color filter substrate also includes a black matrix, therefore, the manufacturing method further includes a step of forming a black matrix before forming the color filter layer.
由于所述辅助隔垫物的下部位于所述安置孔中,因此,所述辅助隔垫物的顶端低于所述主隔垫物的顶端。Since the lower part of the auxiliary spacer is located in the installation hole, the top end of the auxiliary spacer is lower than the top end of the main spacer.
在形成主隔垫物和所述辅助隔垫物的步骤可以通过同一步构图工艺获得,并且,形成所述主隔垫物和所述辅助隔垫物时,无需使用半色调掩膜板,所以,利用本发明书所提供的制造方法制造所述彩膜基板的成本较低。The step of forming the main spacer and the auxiliary spacer can be obtained by the same patterning process, and when forming the main spacer and the auxiliary spacer, there is no need to use a half-tone mask, so , the cost of manufacturing the color filter substrate by using the manufacturing method provided in the present invention is relatively low.
在本发明中,对形成多个主隔垫物和多个辅助隔垫物的具体构图工艺并没有特殊的限制。通常,形成主隔垫物和辅助隔垫物的材料为光敏树脂,因此,形成多个主隔垫物和多个所述辅助隔垫物包括:In the present invention, there is no particular limitation on the specific patterning process for forming the plurality of main spacers and the plurality of auxiliary spacers. Usually, the material for forming the main spacers and auxiliary spacers is photosensitive resin, therefore, forming a plurality of main spacers and a plurality of auxiliary spacers includes:
在彩膜层上涂敷形成所述主隔垫物和所述辅助隔垫物的材料层;Coating a material layer forming the main spacer and the auxiliary spacer on the color filter layer;
利用掩膜板对所述材料层进行曝光;exposing the material layer by using a mask;
对曝光后的材料层进行显影,以形成所述主隔垫物和所述辅助隔垫物。The exposed material layer is developed to form the main spacers and the auxiliary spacers.
在本发明中,对如何具体执行形成彩膜层以及安置孔的步骤并没有特殊的规定。例如,在形成图1中所示的彩膜基板时,形成彩膜层以及多个安置孔的步骤包括:In the present invention, there is no special regulation on how to specifically implement the steps of forming the color filter layer and arranging holes. For example, when forming the color filter substrate shown in Figure 1, the steps of forming the color filter layer and a plurality of placement holes include:
形成色阻层;Form a color resist layer;
形成透明平坦化层;forming a transparent planarization layer;
在透明平坦化层上形成所述安置孔。The placement holes are formed on the transparent planarization layer.
在本发明中,可以利用光敏性的热固化树脂制成所述平坦化层。因此,通过对所述透明平坦化层进行曝光显影即可获得所述安置孔。In the present invention, the planarization layer may be made of a photosensitive thermosetting resin. Therefore, the placement holes can be obtained by exposing and developing the transparent planarization layer.
在形成图2中所示的彩膜基板时,形成彩膜层以及多个安置孔的步骤包括:When forming the color filter substrate shown in FIG. 2, the steps of forming the color filter layer and a plurality of placement holes include:
形成色阻层;Form a color resist layer;
在色阻层上对应所述辅助隔垫物的位置形成凹槽;forming grooves on the color resist layer at positions corresponding to the auxiliary spacers;
形成透明材料层,所述透明材料层的材料落入所述凹槽中形成所述安置孔。A transparent material layer is formed, and the material of the transparent material layer falls into the groove to form the placement hole.
在本实施方式中,形成色阻层的材料也可以为光敏性材料,因此,通过利用掩膜板对色阻层进行曝光显影即可获得所述凹槽。In this embodiment, the material forming the color-resist layer may also be a photosensitive material, therefore, the grooves can be obtained by exposing and developing the color-resist layer by using a mask.
在形成图3中所述的彩膜基板时,形成彩膜层及多个安置孔的步骤包括:When forming the color filter substrate described in Figure 3, the steps of forming the color filter layer and a plurality of placement holes include:
形成色阻层;Form a color resist layer;
形成透明平坦化层;forming a transparent planarization layer;
形成贯穿所述透明平坦化层以及穿过所述色阻层的至少一部分的安置孔。A placement hole is formed through the transparent planarization layer and through at least a portion of the color resist layer.
同样地,在本实施方式中,形成平坦化层的材料可以为光敏性热固化树脂,形成色阻层的材料为光敏材料,利用曝光显影形成所述安置孔。Likewise, in this embodiment, the material forming the planarization layer may be a photosensitive thermosetting resin, the material forming the color resist layer may be a photosensitive material, and the placement holes are formed by exposure and development.
可以理解的是,以上实施方式仅仅是为了说明本发明的原理而采用的示例性实施方式,然而本发明并不局限于此。对于本领域内的普通技术人员而言,在不脱离本发明的精神和实质的情况下,可以做出各种变型和改进,这些变型和改进也视为本发明的保护范围。It can be understood that, the above embodiments are only exemplary embodiments adopted for illustrating the principle of the present invention, but the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also regarded as the protection scope of the present invention.
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