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CN105643820A - Cutting device of diamond wire mono-crystal silicon rods - Google Patents

Cutting device of diamond wire mono-crystal silicon rods Download PDF

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Publication number
CN105643820A
CN105643820A CN201610158042.7A CN201610158042A CN105643820A CN 105643820 A CN105643820 A CN 105643820A CN 201610158042 A CN201610158042 A CN 201610158042A CN 105643820 A CN105643820 A CN 105643820A
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CN
China
Prior art keywords
guide wheel
feed unit
feed
tension
installing rack
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201610158042.7A
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Chinese (zh)
Other versions
CN105643820B (en
Inventor
傅林坚
何守龙
曹建伟
沈文杰
朱亮
卢嘉彬
邱文杰
沈加富
邱敏秀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang Jingsheng Mechanical and Electrical Co Ltd
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Zhejiang Jingsheng Mechanical and Electrical Co Ltd
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Publication date
Application filed by Zhejiang Jingsheng Mechanical and Electrical Co Ltd filed Critical Zhejiang Jingsheng Mechanical and Electrical Co Ltd
Priority to CN201610158042.7A priority Critical patent/CN105643820B/en
Publication of CN105643820A publication Critical patent/CN105643820A/en
Application granted granted Critical
Publication of CN105643820B publication Critical patent/CN105643820B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D7/00Accessories specially adapted for use with machines or devices of the preceding groups

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The invention relates to a special cutting device for processing mono-crystal silicon rods and aims to provide a cutting device of diamond wire mono-crystal silicon rods. The cutting device of the diamond wire mono-crystal silicon rods comprises a large bottom frame, portal frames, wire arranging and mounting frames, tension motor mounting frames, tension motors, tension arms, a worktable head base, a worktable tail base, a wire arranging part, a wire winding and unwinding part, a wire deviation detecting part, cutter feeding units, transition guide wheels and tension guide wheels, wherein crystal rods are clamped by the worktable head base and the workbench tail base; and the crystal rods are controlled to rotate around axes of the worktable head base and the worktable tail base. The cutting device of the diamond wire mono-crystal silicon rods is compact in structure and reasonable in layout; the mono-crystal silicon rods are cut by a diamond wire saw; the cutting marks are small; the quality of the cutting surfaces is high; the loss of the raw materials is greatly reduced; the working environment is greatly improved; and the environmentally-friendly production is implemented.

Description

Diamond wire monocrystal silicon-rod butting equipment
Technical field
The present invention processes special cutting device field about silicon single crystal rod, particularly to diamond wire monocrystal silicon-rod butting equipment.
Background technology
Silicon single crystal rod needs to proceed series of processes after drawing out from single crystal growing furnace, early stage include block, the machining such as evolution, angle rounding and flat surface grinding; Then, also need carrying out after silicon rod viscose cutting into slices, clean, chamfering, corrosion and cleaning etc. again; Last silicon chip just can produce the solar battery sheet for photovoltaic generation after carrying out the operations such as making herbs into wool, diffusion, system knot, plated film and sintering.
Diamond wire monocrystal silicon-rod butting equipment is used for evolution operation, and the cylindrical crystal bar blocked is cut into square rod by it. Diamond wire monocrystal silicon-rod butting equipment utilization diamond stone line is as line of cut, and diamond stone line is, by resin bonding or electric plating method, diamond is sticked to steel wire surface, and diamond stone line is called for short diamond wire. Diamond cutting line slicing machine reaches dissection by the diamond on diamond wire and silicon rod friction therebetween.
Current domestic main silicon single crystal rod evolution equipment carrys out evolution with traditional blade or mortar line, common blade thickness is at about 3mm, and the saw kerf of diamond fretsaw is only 0.3-0.45mm, adopts diamond fretsaw can reduce raw-material loss, significantly reduce production cost. Traditional mortar free type cutting mode, its bad environments, not environmentally, there is substantial amounts of mortar to need recycling, consume substantial amounts of manpower, financial resources. And during diamond wire saw cut, can directly use clear water as cutting liquid, greatly improved the working environment of workman, it is achieved that environmental protection produces.
Summary of the invention
Present invention is primarily targeted at and overcome deficiency of the prior art, it is provided that a kind of equipment using diamond fretsaw butt. For solving above-mentioned technical problem, the solution of the present invention is:
Diamond wire monocrystal silicon-rod butting equipment is provided, including great underframe, portal frame, winding displacement installing rack, tension motor installing rack, tension motor, tension arm, workbench headstock, workbench tailstock, winding displacement parts, retractable cable parts, the inclined detection part of line, feed unit, transition guide wheel, tension force guide wheel, described portal frame is provided with two, respectively left portal frame and right portal frame; Described winding displacement installing rack is provided with two, respectively left bank line installing rack and right winding displacement installing rack; Described tension motor installing rack is provided with two, respectively left tension motor installing rack and right tension motor installing rack; Described tension motor is provided with two, respectively left tension motor and right tension motor; Described tension arm is provided with two, respectively left tension arm and right tension arm; Described transition guide wheel is provided with five, respectively First Transition guide wheel, the second transition guide wheel, the 3rd transition guide wheel, the 4th transition guide wheel and the 5th transition guide wheel; Described tension force guide wheel is provided with two, respectively left tension force guide wheel and right tension force guide wheel; Described feed unit is provided with four, respectively the first feed unit, the second feed unit, the 3rd feed unit and the 4th feed unit; Described winding displacement parts are provided with two, respectively left bank line parts and right winding displacement parts, and winding displacement parts for being evenly spaced in retractable cable parts by diamond wire; Described retractable cable parts are provided with two, respectively left retractable cable parts and right retractable cable parts, and retractable cable parts are for realizing the reciprocating motion of diamond wire; The inclined detection part of described line is provided with two, respectively the inclined detection part of left line and the inclined detection part of right line, and the inclined detection part of line is for detecting whether the diamond wire on retractable cable parts is uniformly distributed;
Described left bank line installing rack is arranged on the left side of great underframe, and left bank line parts are arranged on the top of left bank line installing rack;Described left retractable cable parts are arranged on the top of left bank line parts; Described left portal frame is arranged on the upper left side of great underframe, and left tension motor installing rack is arranged on the top of left portal frame, and the inclined detection part of left line is arranged on the outside of left portal frame, and the first feed unit and the 4th feed unit are arranged on the inner side of left portal frame; Being provided with First Transition guide wheel, the second transition guide wheel, left tension motor, left tension arm on described left tension motor installing rack, described left tension force guide wheel is arranged on left tension arm;
Described right winding displacement installing rack is arranged on the right side of great underframe, and right winding displacement parts are arranged on the top of right winding displacement installing rack; Described right retractable cable parts are arranged on the top of right winding displacement parts; Described right portal frame is arranged on the upper right side of great underframe, and right tension motor installing rack is arranged on the top of right portal frame, and the inclined detection part of right line is arranged on the outside of right portal frame, and the second feed unit and the 3rd feed unit are arranged on the inner side of right portal frame; Being provided with the 3rd transition guide wheel, the 4th transition guide wheel, right tension motor, right tension arm on described right tension motor installing rack, described right tension force guide wheel is arranged on right tension arm;
Described 5th transition guide wheel is arranged between left portal frame and right portal frame; Described workbench headstock and workbench tailstock are arranged on the surface of great underframe, are used for clamping crystal bar between workbench headstock and workbench tailstock, and can control crystal bar and rotate along the axis of workbench headstock and workbench tailstock.
In the present invention, described first feed unit being provided with the first feed guide wheel, the first feed unit can independently control feed velocity and the depth of cut of the first feed guide wheel in the vertical direction.
In the present invention, described second feed unit being provided with the second feed guide wheel, the second feed unit can independently control feed velocity and the depth of cut of the second feed guide wheel in the vertical direction.
In the present invention, described 3rd feed unit being provided with the 3rd feed guide wheel, the 3rd feed unit can independently control feed velocity and the depth of cut of the 3rd feed guide wheel in the vertical direction.
In the present invention, described 4th feed unit being provided with the 4th feed guide wheel, the 4th feed unit can independently control feed velocity and the depth of cut of the 4th feed guide wheel in the vertical direction.
In the present invention, described 5th transition guide wheel is provided with speed measuring device, it is possible to the linear velocity of diamond wire is detected acquisition in real time.
Compared with prior art, the invention has the beneficial effects as follows:
Present configuration is compact, rationally distributed; The present invention adopts diamond wire saw cut, and cutting tool marks are little, and quality of cut face is high, greatly reduces raw-material loss; The present invention substantially improves working environment, it is achieved that environmental protection produces.
Accompanying drawing explanation
Fig. 1 is the front view of the present invention.
Fig. 2 is the rearview of the present invention.
Accompanying drawing in figure is labeled as: 1 great underframe; 2 left bank line installing racks; 3 left bank line parts; 4 left retractable cable parts; The 5 inclined detection parts of left line; 6 first feed guide wheels; 7 first feed unit; 8 left tension force guide wheels; 9 left tension arms; 10 First Transition guide wheels; 11 second transition guide wheels; 12 the 3rd transition guide wheels; 13 the 4th transition guide wheels; 14 right tension arms; 15 right tension force guide wheels; 16 second feed unit; The 17 inclined detection parts of right line; 18 second feed guide wheels; 19 right retractable cable parts; 20 crystal bars; 21 right winding displacement parts; 22 right winding displacement installing racks;23 workbench tailstocks; 24 right tension motors; 25 right tension motor installing racks; 26 the 5th transition guide wheels; 27 right portal frames; 28 the 3rd feed unit; 29 the 3rd feed guide wheels; 30 workbench headstocks; 31 left tension motors; 32 left tension motor installing racks; 33 left portal frames; 34 the 4th feed unit; 35 the 4th feed guide wheels.
Detailed description of the invention
Below in conjunction with accompanying drawing and detailed description of the invention, the present invention is described in further detail:
Diamond wire monocrystal silicon-rod butting equipment as shown in Figure 1 and Figure 2, including great underframe 1, portal frame, winding displacement installing rack, tension motor installing rack, tension motor, tension arm, workbench headstock 30, workbench tailstock 23, winding displacement parts, retractable cable parts, the inclined detection part of line, feed unit, transition guide wheel, tension force guide wheel.
Described portal frame is provided with two, respectively left portal frame 33 and right portal frame 27. Described winding displacement installing rack is provided with two, respectively left bank line installing rack 2 and right winding displacement installing rack 22. Described tension motor installing rack is provided with two, respectively left tension motor installing rack 32 and right tension motor installing rack 25. Described tension motor is provided with two, respectively left tension motor 31 and right tension motor 24. Described tension arm is provided with two, respectively left tension arm 9 and right tension arm 14. Described transition guide wheel is provided with five, respectively First Transition guide wheel the 10, second transition guide wheel the 11, the 3rd transition guide wheel the 12, the 4th transition guide wheel 13 and the 5th transition guide wheel 26. Described tension force guide wheel is provided with two, respectively left tension force guide wheel 8 and right tension force guide wheel 15. Described winding displacement parts are provided with two, respectively left bank line parts 3 and right winding displacement parts 21; Winding displacement parts for being arranged in retractable cable parts uniformly by diamond wire. Described retractable cable parts are provided with two, respectively left retractable cable parts 4 and right retractable cable parts 19; Retractable cable parts are for realizing the reciprocating motion of diamond wire. The inclined detection part of described line is provided with two, respectively the inclined detection part of left line 5 and the inclined detection part 17 of right line; The inclined detection part of line is for detecting from whether the diamond wire retractable cable parts is uniformly distributed.
Described feed unit is provided with four, respectively the first feed unit the 7, second feed unit the 16, the 3rd feed unit 28 and the 4th feed unit 34; Being provided with the first feed guide wheel 6 on first feed unit 7, the first feed unit 7 can independently control feed velocity and the depth of cut of the first feed guide wheel 6 in the vertical direction; Being provided with the second feed guide wheel 18 on second feed unit 16, the second feed unit 16 can independently control feed velocity and the depth of cut of the second feed guide wheel 18 in the vertical direction; Being provided with the 3rd feed guide wheel 29 on 3rd feed unit 28, the 3rd feed unit 28 can independently control feed velocity and the depth of cut of the 3rd feed guide wheel 29 in the vertical direction; Being provided with the 4th feed guide wheel 35 on 4th feed unit 34, the 4th feed unit 34 can independently control feed velocity and the depth of cut of the 4th feed guide wheel 35 in the vertical direction.
Described left bank line installing rack 2 is arranged on the left side of great underframe 1, and left bank line parts 3 are arranged on the top of left bank line installing rack 2; Described left retractable cable parts 4 are arranged on the top of left bank line parts 3. Described left portal frame 33 is arranged on the upper left side of great underframe 1, left tension motor installing rack 32 is arranged on the top of left portal frame 33, the inclined detection part of left line 5 is arranged on the outside of left portal frame 33, and the first feed unit 7 and the 4th feed unit 34 are arranged on the inner side of left portal frame 33.Being provided with First Transition guide wheel the 10, second transition guide wheel 11, left tension motor 31, left tension arm 9 on described left tension motor installing rack 32, described left tension force guide wheel 8 is arranged on left tension arm 9.
Described right winding displacement installing rack 22 is arranged on the right side of great underframe 1, and right winding displacement parts 21 are arranged on the top of right winding displacement installing rack 22; Described right retractable cable parts 19 are arranged on the top of right winding displacement parts 21. Described right portal frame 27 is arranged on the upper right side of great underframe 1, right tension motor installing rack 25 is arranged on the top of right portal frame 27, the inclined detection part of right line 17 is arranged on the outside of right portal frame 27, and the second feed unit 16 and the 3rd feed unit 28 are arranged on the inner side of right portal frame 27. Being provided with the 3rd transition guide wheel the 12, the 4th transition guide wheel 13, right tension motor 24, right tension arm 14 on described right tension motor installing rack 25, described right tension force guide wheel 15 is arranged on right tension arm 14.
Described 5th transition guide wheel 26 is arranged between left portal frame 33 and right portal frame 27, and the 5th transition guide wheel 26 is additionally provided with speed measuring device, it is possible to the linear velocity of diamond wire is detected acquisition in real time. Described workbench headstock 30 and workbench tailstock 23 are arranged on the surface of great underframe 1, are used for clamping crystal bar 20 between workbench headstock 30 and workbench tailstock 23, and can control crystal bar 20 and rotate along the axis of workbench headstock 30 and workbench tailstock 23.
Diamond wire out, sequentially passes through the inclined detection part of left line 5, First Transition guide wheel 10, left tension force guide wheel the 8, second transition guide wheel 11 from left retractable cable parts 4; Then the first feed guide wheel 6 on the first feed unit 7 straight down; Again in the horizontal direction after the 4th feed guide wheel 35 on the 4th feed unit 34, diamond wire vertically walks around the 5th transition guide wheel 26; Following the 3rd feed guide wheel 29 on the 3rd feed unit 28 and the second feed guide wheel 18 on the second feed unit 16 in the horizontal direction; And then diamond wire is vertically up around the 3rd transition guide wheel 12; Then sequentially pass through right tension force guide wheel the 15, the 4th transition guide wheel 13, the inclined detection part 17 of right line, finally enter right retractable cable parts 19.
During cutting, left retractable cable parts 4 and right retractable cable parts 19 carry out back rotation, drive diamond wire thereon to move reciprocatingly; First feed unit 7 drives the first feed guide wheel 6 downfeed simultaneously, and the 4th feed unit 34 drives the 4th feed guide wheel 35 downfeed, and from the diamond wire driven between the first feed guide wheel 6 and the 4th feed guide wheel 35 to incision people's crystal bar 20; Second feed unit 16 drives the second feed guide wheel 18 downfeed, and the 3rd feed unit 28 drives the 3rd feed guide wheel 29 downfeed, thus driving the diamond wire between the second feed guide wheel 18 and the 3rd feed guide wheel 29 in incision people's crystal bar 20; When cutting, control the tension force on diamond wire by left tension motor 31 and right tension motor 24.
After crystal bar 20 opposing sides cuts, first feed unit 7 drives the first feed guide wheel 6 upwards withdrawing, second feed unit 16 drives the second feed guide wheel 18 upwards withdrawing, 3rd feed unit 28 drives the 3rd feed guide wheel 29 upwards withdrawing, and the 4th feed unit 34 drives setback cutter on the 4th feed guide wheel 35; After withdrawing completes, workbench headstock 30 and workbench tailstock 23 drive the crystal bar 20 of middle clamping to be rotated in a clockwise direction 90 degree;Then left retractable cable parts 4 and right retractable cable parts 19 carry out back rotation, drive diamond wire thereon to move reciprocatingly; First feed unit 7 drives the first feed guide wheel 6 downfeed simultaneously, and the 4th feed unit 34 drives the 4th feed guide wheel 35 downfeed, and from the diamond wire driven between the first feed guide wheel 6 and the 4th feed guide wheel 35 to incision people's crystal bar 20; Second feed unit 16 drives the second feed guide wheel 18 downfeed, and the 3rd feed unit 28 drives the 3rd feed guide wheel 29 downfeed, thus driving the diamond wire between the second feed guide wheel 18 and the 3rd feed guide wheel 29 in incision people's crystal bar 20. After all being cut in the 4 of crystal bar 20 faces, complete cutting.
Finally it should be noted that listed above is only specific embodiments of the invention. It is clear that the invention is not restricted to above example, it is also possible to there is many variations. All deformation that those of ordinary skill in the art can directly derive from present disclosure or associate, are all considered as protection scope of the present invention.

Claims (6)

1. diamond wire monocrystal silicon-rod butting equipment, including great underframe, portal frame, winding displacement installing rack, tension motor installing rack, tension motor, tension arm, workbench headstock, workbench tailstock, winding displacement parts, retractable cable parts, the inclined detection part of line, feed unit, transition guide wheel, tension force guide wheel, it is characterized in that, described portal frame is provided with two, respectively left portal frame and right portal frame; Described winding displacement installing rack is provided with two, respectively left bank line installing rack and right winding displacement installing rack; Described tension motor installing rack is provided with two, respectively left tension motor installing rack and right tension motor installing rack; Described tension motor is provided with two, respectively left tension motor and right tension motor; Described tension arm is provided with two, respectively left tension arm and right tension arm; Described transition guide wheel is provided with five, respectively First Transition guide wheel, the second transition guide wheel, the 3rd transition guide wheel, the 4th transition guide wheel and the 5th transition guide wheel; Described tension force guide wheel is provided with two, respectively left tension force guide wheel and right tension force guide wheel; Described feed unit is provided with four, respectively the first feed unit, the second feed unit, the 3rd feed unit and the 4th feed unit; Described winding displacement parts are provided with two, respectively left bank line parts and right winding displacement parts, and winding displacement parts for being evenly spaced in retractable cable parts by diamond wire; Described retractable cable parts are provided with two, respectively left retractable cable parts and right retractable cable parts, and retractable cable parts are for realizing the reciprocating motion of diamond wire; The inclined detection part of described line is provided with two, respectively the inclined detection part of left line and the inclined detection part of right line, and the inclined detection part of line is for detecting whether the diamond wire on retractable cable parts is uniformly distributed;
Described left bank line installing rack is arranged on the left side of great underframe, and left bank line parts are arranged on the top of left bank line installing rack; Described left retractable cable parts are arranged on the top of left bank line parts; Described left portal frame is arranged on the upper left side of great underframe, and left tension motor installing rack is arranged on the top of left portal frame, and the inclined detection part of left line is arranged on the outside of left portal frame, and the first feed unit and the 4th feed unit are arranged on the inner side of left portal frame; Being provided with First Transition guide wheel, the second transition guide wheel, left tension motor, left tension arm on described left tension motor installing rack, described left tension force guide wheel is arranged on left tension arm;
Described right winding displacement installing rack is arranged on the right side of great underframe, and right winding displacement parts are arranged on the top of right winding displacement installing rack; Described right retractable cable parts are arranged on the top of right winding displacement parts; Described right portal frame is arranged on the upper right side of great underframe, and right tension motor installing rack is arranged on the top of right portal frame, and the inclined detection part of right line is arranged on the outside of right portal frame, and the second feed unit and the 3rd feed unit are arranged on the inner side of right portal frame; Being provided with the 3rd transition guide wheel, the 4th transition guide wheel, right tension motor, right tension arm on described right tension motor installing rack, described right tension force guide wheel is arranged on right tension arm;
Described 5th transition guide wheel is arranged between left portal frame and right portal frame; Described workbench headstock and workbench tailstock are arranged on the surface of great underframe, are used for clamping crystal bar between workbench headstock and workbench tailstock, and can control crystal bar and rotate along the axis of workbench headstock and workbench tailstock.
2. diamond wire monocrystal silicon-rod butting equipment according to claim 1, it is characterized in that, being provided with the first feed guide wheel on described first feed unit, the first feed unit can independently control feed velocity and the depth of cut of the first feed guide wheel in the vertical direction.
3. diamond wire monocrystal silicon-rod butting equipment according to claim 1, it is characterized in that, being provided with the second feed guide wheel on described second feed unit, the second feed unit can independently control feed velocity and the depth of cut of the second feed guide wheel in the vertical direction.
4. diamond wire monocrystal silicon-rod butting equipment according to claim 1, it is characterized in that, being provided with the 3rd feed guide wheel on described 3rd feed unit, the 3rd feed unit can independently control feed velocity and the depth of cut of the 3rd feed guide wheel in the vertical direction.
5. diamond wire monocrystal silicon-rod butting equipment according to claim 1, it is characterized in that, being provided with the 4th feed guide wheel on described 4th feed unit, the 4th feed unit can independently control feed velocity and the depth of cut of the 4th feed guide wheel in the vertical direction.
6. the diamond wire monocrystal silicon-rod butting equipment according to claim 1 to 5 any one, it is characterised in that described 5th transition guide wheel is provided with speed measuring device, it is possible to the linear velocity of diamond wire is detected acquisition in real time.
CN201610158042.7A 2016-03-18 2016-03-18 Diamond wire monocrystal silicon-rod butting equipment Active CN105643820B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610158042.7A CN105643820B (en) 2016-03-18 2016-03-18 Diamond wire monocrystal silicon-rod butting equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610158042.7A CN105643820B (en) 2016-03-18 2016-03-18 Diamond wire monocrystal silicon-rod butting equipment

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CN105643820A true CN105643820A (en) 2016-06-08
CN105643820B CN105643820B (en) 2018-01-19

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106273017A (en) * 2016-11-02 2017-01-04 内蒙古中环光伏材料有限公司 A kind of diamond wire squaring device and the method applying this device cutting silicon rod
CN107322823A (en) * 2017-08-09 2017-11-07 福州天瑞线锯科技有限公司 Dual drive silicon single crystal rod double side cutting machine
CN108724500A (en) * 2018-08-13 2018-11-02 浙江贝盛新材料科技有限公司 A kind of silicon single crystal rod cutting machine that the scope of application is wider
CN108995062A (en) * 2018-08-13 2018-12-14 浙江贝盛新材料科技有限公司 It is a kind of to adjust more conveniently silicon single crystal rod cutter device
CN110026826A (en) * 2018-09-30 2019-07-19 浙江晶盛机电股份有限公司 A kind of full-automatic silicon single crystal rod cuts Compound Machining integrated equipment and its application method

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JPH0970820A (en) * 1995-09-06 1997-03-18 Seiko Epson Corp Wire type cutting equipment
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CN202439138U (en) * 2012-02-19 2012-09-19 上海日进机床有限公司 Cutting jig for silicon on sapphire bar
CN202862421U (en) * 2012-08-30 2013-04-10 大连连城数控机器股份有限公司 Four-roller winding mechanism
CN103878893A (en) * 2013-12-31 2014-06-25 无锡市和迅亿阳自动化工程有限公司 Automatic control system and automatic control method for multi-wire cutting machine
CN205497823U (en) * 2016-03-18 2016-08-24 浙江晶盛机电股份有限公司 Buddha's warrior attendant line single crystal silicon rod butt equipment

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JPH0970820A (en) * 1995-09-06 1997-03-18 Seiko Epson Corp Wire type cutting equipment
JP2001232550A (en) * 2000-02-21 2001-08-28 Toyo Advanced Technologies Co Ltd Cutting method using wire saw and wire saw
CN202439138U (en) * 2012-02-19 2012-09-19 上海日进机床有限公司 Cutting jig for silicon on sapphire bar
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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106273017A (en) * 2016-11-02 2017-01-04 内蒙古中环光伏材料有限公司 A kind of diamond wire squaring device and the method applying this device cutting silicon rod
CN106273017B (en) * 2016-11-02 2018-10-19 内蒙古中环光伏材料有限公司 A kind of method of squaring silicon bar
CN107322823A (en) * 2017-08-09 2017-11-07 福州天瑞线锯科技有限公司 Dual drive silicon single crystal rod double side cutting machine
CN108724500A (en) * 2018-08-13 2018-11-02 浙江贝盛新材料科技有限公司 A kind of silicon single crystal rod cutting machine that the scope of application is wider
CN108995062A (en) * 2018-08-13 2018-12-14 浙江贝盛新材料科技有限公司 It is a kind of to adjust more conveniently silicon single crystal rod cutter device
CN108995062B (en) * 2018-08-13 2020-06-02 浙江贝盛新材料科技有限公司 Adjust more convenient single crystal silicon rod cutting device
CN110026826A (en) * 2018-09-30 2019-07-19 浙江晶盛机电股份有限公司 A kind of full-automatic silicon single crystal rod cuts Compound Machining integrated equipment and its application method
CN110026826B (en) * 2018-09-30 2024-04-16 浙江晶盛机电股份有限公司 Full-automatic monocrystalline silicon rod cutting and grinding combined machining integrated equipment and application method thereof

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