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CN105634429A - Oscillator with temperature sensing component and method of making same - Google Patents

Oscillator with temperature sensing component and method of making same Download PDF

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Publication number
CN105634429A
CN105634429A CN201410708292.4A CN201410708292A CN105634429A CN 105634429 A CN105634429 A CN 105634429A CN 201410708292 A CN201410708292 A CN 201410708292A CN 105634429 A CN105634429 A CN 105634429A
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wiring pattern
temperature sensing
circuit
sensing component
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CN105634429B (en
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杨瑞阳
谢水源
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Harmony Electronics Corp
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Harmony Electronics Corp
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Abstract

An oscillator with a temperature sensing assembly and a manufacturing method thereof are provided. The base is provided with a body which is provided with a containing chamber and a cover plate which closes the containing chamber. The piezoelectric component is arranged in the accommodating chamber, and the temperature sensing component is arranged on the lower surface of the body and used for sensing the working environment temperature of the piezoelectric component and then carrying out temperature compensation through the integrated circuit. The welding pads are arranged on the lower surface of the body, the electric supporting blocks are respectively jointed on the lower surface of the body through the welding pads and surround the temperature sensing assembly, and the welding pads and the electric supporting blocks have a preset height so as to form a space for accommodating the temperature sensing assembly.

Description

具有温度感测组件的振荡器及其制作方法Oscillator with temperature sensing component and method of making same

技术领域technical field

本发明涉及一种振荡器及其制作方法,特别是涉及一种具有温度感测组件的振荡器及其制作方法。The invention relates to an oscillator and a manufacturing method thereof, in particular to an oscillator with a temperature sensing component and a manufacturing method thereof.

背景技术Background technique

参阅图1,中国台湾第201334404A1早期公开号发明专利案公开一种振荡器1,其包含:一个基座11、一个压电组件12、两个黏着件13、一个上围壁14、一个上盖15、一个热敏电阻组件16,及一个下围壁17。Referring to Fig. 1, China Taiwan No. 201334404A1 Early Publication No. Invention Patent discloses an oscillator 1, which includes: a base 11, a piezoelectric component 12, two adhesive parts 13, an upper surrounding wall 14, and an upper cover 15. A thermistor assembly 16, and a lower surrounding wall 17.

该基座11具有一个上表面110,及一个相反于该上表面110的下表面111。该压电组件12透过所述黏着件13与该基座11的上表面110相互耦接。该上围壁14围绕该压电组件12地设置于该上表面110上。该上盖15设置于该上围壁14上,并与该基座11共同界定出一个容置该压电组件12的封闭容室112。该热敏电阻组件16设置于该基座11的下表面111。该下围壁17围绕该热敏电阻组件16地设置于该基座11的下表面111。The base 11 has an upper surface 110 and a lower surface 111 opposite to the upper surface 110 . The piezoelectric component 12 is coupled to the upper surface 110 of the base 11 through the adhesive member 13 . The upper surrounding wall 14 is disposed on the upper surface 110 around the piezoelectric component 12 . The upper cover 15 is disposed on the upper surrounding wall 14 and together with the base 11 defines a closed chamber 112 for accommodating the piezoelectric element 12 . The thermistor assembly 16 is disposed on the lower surface 111 of the base 11 . The lower surrounding wall 17 is disposed on the lower surface 111 of the base 11 to surround the thermistor assembly 16 .

熟悉此技术领域的相关技术人员都知道,该压电组件12因温度变化所产生的温度与频率的特性会随着该压电组件12的切割角度而有所不同,因此,当该压电组件12具有不同的切割角度时,则会产生不同的温度与频率的特性。Those who are familiar with this technical field know that the temperature and frequency characteristics of the piezoelectric component 12 due to temperature changes will vary with the cutting angle of the piezoelectric component 12. Therefore, when the piezoelectric component 12 When 12 has different cutting angles, it will produce different temperature and frequency characteristics.

又,该振荡器1通常是被装设于一个外部电路板(图未示)上,利用该热敏电阻组件16侦测该振荡器1的工作环境温度,并回授予该外部电路板上的特殊应用集成电路(Application-specificintegratedcircuit,ASIC)(图未示),而让该特殊应用集成电路补偿该压电组件12因温度所产生的频率漂移,进而输出一个稳定的参考频率(Referencefrequency)。而该下围壁17是用以架高整个振荡器1,并保护且避免该热敏电阻组件16与该外部电路板相接触,且该下围壁17主要是由多层氧化铝陶瓷基板或印刷电路板(Printedcircuitboard,PCB)等材料所构成。Moreover, the oscillator 1 is usually mounted on an external circuit board (not shown), and the thermistor assembly 16 is used to detect the working environment temperature of the oscillator 1 and give back the temperature on the external circuit board. Application-specific integrated circuit (ASIC) (not shown), and the application-specific integrated circuit compensates the frequency drift of the piezoelectric element 12 due to temperature, and then outputs a stable reference frequency (Reference frequency). The lower surrounding wall 17 is used to elevate the entire oscillator 1, and protect and prevent the thermistor assembly 16 from contacting the external circuit board, and the lower surrounding wall 17 is mainly made of a multilayer alumina ceramic substrate or It is composed of printed circuit board (Printedcircuitboard, PCB) and other materials.

此外,在该振荡器1结合(Bonding)至该外部电路板的过程中,须先在该外部电路板上配置垫片(图未示),再于垫片上印刷锡膏;接着,再以贴片机搭载该振荡器1于该外部电路板上;最后,经由回流焊(Reflow)使该振荡器1与该外部电路板电性结合。In addition, in the process of bonding the oscillator 1 to the external circuit board, pads (not shown) must be arranged on the external circuit board first, and then solder paste is printed on the pads; The placement machine mounts the oscillator 1 on the external circuit board; finally, the oscillator 1 is electrically combined with the external circuit board through reflow soldering (Reflow).

由上述的说明可知,该振荡器1需先于该外部电路板的垫片上印刷锡膏,才可将其与该外部电路板电性结合。因此,容易造成锡膏与垫片因为两种不同材料间的润湿性不良而产生拒焊的问题。It can be seen from the above description that the oscillator 1 needs to print solder paste on the pad of the external circuit board before it can be electrically combined with the external circuit board. Therefore, it is easy to cause the problem of solder refusal due to poor wettability of the solder paste and the pad between the two different materials.

再者,该振荡器1为了保护该热敏电阻组件16不受该外部电路板挤压与破坏,所以必须透过该下围壁17来架高该热敏电阻组件16。然而,该下围壁17主要是由多层氧化铝陶瓷基板或印刷电路板所构成,其需要利用共烧陶瓷工艺流程或印刷电路板制作工艺流程才能制得,因此,使得制作该下围壁17需要较高的生产成本与较为复杂的工序。且,由于氧化铝陶瓷基板或印刷电路板是由多层结构相互压合所制成,其层叠的结构也会使得该下围壁17的高度调整受到限制,而无法得到最适化的调整,也不符合薄型化的趋势。Furthermore, in order to protect the thermistor assembly 16 from being crushed and damaged by the external circuit board, the oscillator 1 must elevate the thermistor assembly 16 through the lower surrounding wall 17 . However, the lower surrounding wall 17 is mainly composed of a multi-layer alumina ceramic substrate or a printed circuit board, which needs to be manufactured using a co-fired ceramic process or a printed circuit board manufacturing process. Therefore, making the lower surrounding wall 17 requires higher production costs and more complicated procedures. Moreover, since the alumina ceramic substrate or the printed circuit board is made of multi-layer structures pressed together, the stacked structure will also limit the height adjustment of the lower wall 17, and cannot be optimally adjusted. It also does not meet the trend of thinning.

因此,改良现有的振荡器,以解决高成本及其整体高度限制的问题,是此技术领域的相关技术人员所待突破的课题。Therefore, improving the existing oscillator to solve the problems of high cost and its overall height limitation is a subject to be broken through by those skilled in the art.

发明内容Contents of the invention

本发明的目的在于提供一种具有温度感测组件的振荡器。The object of the present invention is to provide an oscillator with a temperature sensing component.

本发明具有温度感测组件的振荡器是电连接于一个外部电路板,并包含一个基座、一个压电组件、一个温度感测组件、多个焊垫,及多个电性支撑块。The oscillator with temperature sensing component of the present invention is electrically connected to an external circuit board, and includes a base, a piezoelectric component, a temperature sensing component, a plurality of welding pads, and a plurality of electrical supporting blocks.

该基座具有一个形成有一个容室的本体、一个封闭该容室的盖板,及配置于该本体的一个第一配线图案与一个第二配线图案。该压电组件设置于该基座的容室中并电连接于该第一配线图案。该温度感测组件设置于该基座的本体的一个下表面并电连接于该第一配线图案与该第二配线图案,且透过该第一配线图案以与该压电组件呈电连接。所述焊垫设置于该基座的本体的下表面并分别电连接于该第二配线图案。所述电性支撑块分别透过所述焊垫接合于该基座的本体的下表面且围绕该温度感测组件,并用以电连接至该外部电路板的电路,所述焊垫与所述电性支撑块具有一个预定高度,该预定高度足以使该基座与该外部电路板间形成一个容置该温度感测组件的空间。The base has a body formed with a chamber, a cover plate closing the chamber, and a first wiring pattern and a second wiring pattern arranged on the body. The piezoelectric component is arranged in the chamber of the base and electrically connected to the first wiring pattern. The temperature sensing component is disposed on a lower surface of the body of the base and is electrically connected to the first wiring pattern and the second wiring pattern, and communicates with the piezoelectric component through the first wiring pattern electrical connection. The welding pads are arranged on the lower surface of the body of the base and are respectively electrically connected to the second wiring patterns. The electrical support blocks are respectively bonded to the lower surface of the body of the base through the solder pads and surround the temperature sensing component, and are used to electrically connect to the circuit of the external circuit board, the solder pads and the The electrical supporting block has a predetermined height, which is sufficient to form a space between the base and the external circuit board for accommodating the temperature sensing component.

较佳地,前述具有温度感测组件的振荡器,该温度感测组件用以侦测该压电组件的工作环境温度并透过外部温度补偿的集成电路或自身温度补偿的集成电路补偿该压电组件因温度差异所产生的频率漂移。Preferably, the aforementioned oscillator has a temperature sensing component, the temperature sensing component is used to detect the working environment temperature of the piezoelectric component and compensate the piezoelectric component through an integrated circuit for external temperature compensation or an integrated circuit for its own temperature compensation. The frequency drift of electrical components due to temperature differences.

较佳地,前述具有温度感测组件的振荡器,该第一配线图案具有一个第一线路及一个第二线路,该第一配线图案的第一线路具有一个自该本体的上表面朝其下表面延伸的第一端部、一个自其第一端部于该本体的内部横向延伸的延伸部,及一个自其延伸部向下延伸至该本体的下表面的第二端部;该第一配线图案的第二线路具有一个自该本体的上表面朝其下表面延伸的第一端部、一个自其第一端部于该本体的内部横向延伸的第一延伸部、一个自其第一延伸部向下延伸至该本体的下表面的第二端部、一个自其第一延伸部于该本体的内部横向延伸的第二延伸部,及一个自其第二延伸部向下延伸至该本体的下表面的第三端部;该第二配线图案具有一个第一线路、一个第二线路、一个第三线路,及一个第四线路,该第二配线图案的第一线路、第二线路、第三线路,及第四线路分别具有一个自该本体的下表面朝上表面延伸的第一端部、一个自其第一端部于该本体的内部朝该本体的周缘横向延伸的延伸部,及一个自其延伸部向下延伸至该本体的下表面的第二端部;该压电组件连接于该第一配线图案的第一线路与第二线路的各第一端部,该温度感测组件连接于该第一配线图案的第一线路的第二端部及其第二线路的第二端部与第三端部,且连接于该第二配线图案的第一线路、第二线路、第三线路,及第四线路的各第一端部;所述焊垫分别连接该第二配线图案的第一线路、第二线路、第三线路,及第四线路的各第二端部。Preferably, in the aforementioned oscillator with a temperature sensing component, the first wiring pattern has a first line and a second line, and the first line of the first wiring pattern has a a first end extending from the lower surface thereof, an extension extending laterally from the first end in the interior of the body, and a second end extending downward from the extension to the lower surface of the body; The second circuit of the first wiring pattern has a first end portion extending from the upper surface of the body toward the lower surface thereof, a first extension portion extending laterally from the first end portion in the interior of the body, a Its first extension extends downward to the second end of the lower surface of the body, a second extension extends laterally from the first extension in the interior of the body, and a second extension extends downward from the second extension extending to the third end of the lower surface of the body; the second wiring pattern has a first line, a second line, a third line, and a fourth line, and the first wiring pattern of the second wiring pattern The circuit, the second circuit, the third circuit, and the fourth circuit respectively have a first end extending from the lower surface of the body toward the upper surface, and a peripheral edge extending from the first end in the interior of the body toward the body an extension portion extending laterally, and a second end portion extending downward from the extension portion to the lower surface of the body; the piezoelectric component is connected to each of the first line and the second line of the first wiring pattern One end, the temperature sensing component is connected to the second end of the first line of the first wiring pattern and the second end and the third end of the second line of the first wiring pattern, and connected to the second wiring Each first end of the first line, the second line, the third line, and the fourth line of the pattern; the pads are respectively connected to the first line, the second line, and the third line of the second wiring pattern, and each second end of the fourth line.

较佳地,前述具有温度感测组件的振荡器,所述焊垫呈圆形,且该预定高度与所述焊垫的直径成反比。Preferably, in the aforementioned oscillator with a temperature sensing component, the welding pad is circular, and the predetermined height is inversely proportional to the diameter of the welding pad.

较佳地,前述具有温度感测组件的振荡器,所述电性支撑块是由具有导电性的材料所构成。Preferably, in the aforementioned oscillator with a temperature sensing component, the electrical support block is made of conductive material.

此外,本发明的另一个目的在于提供一种具有温度感测组件的振荡器的制作方法。In addition, another object of the present invention is to provide a method for manufacturing an oscillator with a temperature sensing component.

本发明具有温度感测组件的振荡器的制作方法包含一个材料准备步骤、一个压电组件设置步骤、一个封止步骤、一个电性支撑块接着步骤,及一个温度感测组件搭载步骤。The manufacturing method of the oscillator with temperature sensing components of the present invention includes a material preparation step, a piezoelectric component setting step, a sealing step, an electrical support block bonding step, and a temperature sensing component mounting step.

该材料准备步骤是准备一个基座、一个压电组件、一个温度感测组件,及多个电性支撑块,该基座具有一个形成有一个容室的本体、一个盖板,及彼此电性隔绝的配置于该本体的一个第一配线图案与一个第二配线图案。The material preparation step is to prepare a base, a piezoelectric component, a temperature sensing component, and a plurality of electrical support blocks. A first wiring pattern and a second wiring pattern are isolated on the body.

该压电组件设置步骤是将该压电组件设置于该基座的容室中,并电连接于该第一配线图案。The step of arranging the piezoelectric component is to set the piezoelectric component in the chamber of the base and electrically connect to the first wiring pattern.

该封止步骤是利用该盖板封闭该基座的本体的容室,以将该压电组件封闭于该容室中。In the sealing step, the cover plate is used to close the chamber of the body of the base, so as to seal the piezoelectric component in the chamber.

该电性支撑块接着步骤是透过设置于该基座的下表面且电连接于该第二配线图案的多个焊垫,以将多个电性支撑块接着于该基座的下表面。The step of connecting the electrical support block is to attach a plurality of electrical support blocks to the lower surface of the base through a plurality of welding pads disposed on the lower surface of the base and electrically connected to the second wiring pattern. .

该温度感测组件搭载步骤是将该温度感测组件设置于该基座的下表面且由所述电性支撑块所围绕,并电连接于该第一配线图案与该第二配线图案,以令该温度感测组件与该压电组件透过该第一配线图案而呈电连接,从而构成一个具有温度感测组件的振荡器。The step of mounting the temperature sensing component is to place the temperature sensing component on the lower surface of the base surrounded by the electrical support block, and electrically connect the first wiring pattern and the second wiring pattern , so that the temperature sensing component and the piezoelectric component are electrically connected through the first wiring pattern, thereby forming an oscillator with a temperature sensing component.

在本发明中,所述焊垫与所述电性支撑块所形成的预定高度足以令该振荡器在电连接于一个外部电路板时,使该基座与该外部电路板间形成一个容置该温度感测组件的空间。In the present invention, the predetermined height formed by the solder pad and the electrical supporting block is enough to make the oscillator electrically connected to an external circuit board to form a receiving space between the base and the external circuit board. space for the temperature sensing component.

较佳地,前述具有温度感测组件的振荡器的制作方法,还包含一个封装测试步骤,该封装测试步骤是将该振荡器进行一个电特性检测与一个老化测试,以确认该振荡器能正常运作并符合应用端的需求。Preferably, the manufacturing method of the aforementioned oscillator with a temperature sensing component also includes a package test step, the package test step is to conduct an electrical characteristic detection and an aging test on the oscillator to confirm that the oscillator can be normal work and meet the needs of the application side.

较佳地,前述具有温度感测组件的振荡器的制作方法,在该材料准备步骤中,该基座的第一配线图案具有一个第一线路及一个第二线路,该第一配线图案的第一线路具有一个自该本体的一上表面朝其下表面延伸的第一端部、一个自其第一端部于该本体的内部横向延伸的延伸部,及一个自其延伸部向下延伸至该本体的下表面的第二端部;该第一配线图案的第二线路具有一个自该本体的上表面朝其下表面延伸的第一端部、一个自其第一端部于该本体的内部横向延伸的第一延伸部、一个自其第一延伸部向下延伸至该本体的下表面的第二端部、一个自其第一延伸部于该本体的内部横向延伸的第二延伸部,及一个自其第二延伸部向下延伸至该本体的下表面的第三端部;该第二配线图案具有一个第一线路、一个第二线路、一个第三线路,及一个第四线路,该第二配线图案的第一线路、第二线路、第三线路,及第四线路分别具有一个自该本体的下表面朝上表面延伸的第一端部、一个自其第一端部于该本体的内部朝该本体的周缘横向延伸的延伸部,及一个自其延伸部向下延伸至该本体的下表面的第二端部;在该压电组件设置步骤、电性支撑块接着步骤与温度感测组件搭载步骤中,该压电组件连接于该第一配线图案的第一线路与第二线路的各第一端部,该温度感测组件连接于该第一配线图案的第一线路的第二端部及其第二线路的第二端部与第三端部,且连接于该第二配线图案的第一线路、第二线路、第三线路,及第四线路的各第一端部;所述电性支撑块透过所述焊垫分别连接该第二配线图案的第一线路、第二线路、第三线路,及第四线路的各第二端部。Preferably, in the aforementioned manufacturing method of an oscillator with a temperature sensing component, in the material preparation step, the first wiring pattern of the base has a first circuit and a second circuit, and the first wiring pattern The first line has a first end extending from an upper surface of the body toward its lower surface, an extension extending laterally from the first end in the interior of the body, and an extension extending downward from the extension Extending to the second end of the lower surface of the body; the second line of the first wiring pattern has a first end extending from the upper surface of the body toward its lower surface, and a first end extending from the first end to the lower surface of the body. A first extension extending laterally inside the body, a second end extending downward from the first extension to the lower surface of the body, a first extension extending laterally inside the body from the first extension Two extensions, and a third end extending downward from the second extension to the lower surface of the body; the second wiring pattern has a first line, a second line, a third line, and A fourth line, the first line, the second line, the third line, and the fourth line of the second wiring pattern respectively have a first end extending from the lower surface of the body toward the upper surface, a The first end extends laterally toward the periphery of the body in the interior of the body, and a second end extends downward from the extension to the lower surface of the body; in the step of setting the piezoelectric component, the electric In the following step of the permanent support block and the step of mounting the temperature sensing component, the piezoelectric component is connected to the first ends of the first line and the second line of the first wiring pattern, and the temperature sensing component is connected to the first end of the second line. The second end of the first line of a wiring pattern, the second end and the third end of the second line, and connected to the first line, the second line, and the third line of the second wiring pattern , and each first end of the fourth circuit; the electrical support block is respectively connected to the first circuit, the second circuit, the third circuit, and the fourth circuit of the second wiring pattern through the pad each second end.

较佳地,前述具有温度感测组件的振荡器的制作方法,在该电性支撑块接着步骤中,所述焊垫呈圆形,且该预定高度与所述焊垫的直径成反比。Preferably, in the aforementioned manufacturing method of an oscillator with a temperature sensing component, in the step of affixing the electrical support block, the welding pad is circular, and the predetermined height is inversely proportional to the diameter of the welding pad.

较佳地,前述具有温度感测组件的振荡器的制作方法,在该电性支撑块接着步骤中,所述电性支撑块是由具有导电性的材料所构成。Preferably, in the aforementioned manufacturing method of an oscillator with a temperature sensing component, in the step of following the electrical support block, the electrical support block is made of conductive material.

本发明的有益的效果在于:借由直接设置于该基座下的所述电性支撑块,可有效地解决现有以多层氧化铝陶瓷基板或印刷电路板所构成的下围壁,其所衍生高成本与高度限制的问题;此外,当将本发明该振荡器结合至该外部电路板时,也可解决因材料不同所产生的拒焊的问题。The beneficial effect of the present invention is that: by means of the electrical support block directly arranged under the base, it can effectively solve the problem of the existing lower surrounding wall composed of a multi-layer alumina ceramic substrate or a printed circuit board. The resulting problems of high cost and height limitation; in addition, when the oscillator of the present invention is combined with the external circuit board, the problem of solder rejection caused by different materials can also be solved.

附图说明Description of drawings

图1是一个剖视示意图,说明台湾第201334404A1早期公开号发明专利案所公开的振荡器;FIG. 1 is a schematic cross-sectional view illustrating an oscillator disclosed in Taiwan's Early Publication No. 201334404A1 Invention Patent;

图2是一个立体分解图,说明本发明具有温度感测组件的振荡器的一实施例;FIG. 2 is an exploded perspective view illustrating an embodiment of an oscillator of the present invention having a temperature sensing component;

图3是一个侧视示意图,说明本发明该实施例的组件间的连接关系;Fig. 3 is a schematic side view illustrating the connection relationship between the components of this embodiment of the present invention;

图4是一个俯视示意图,说明本发明该实施例的一基座的一上表面,及其上表面所显示的一第一配线图案;4 is a schematic top view illustrating an upper surface of a base of the embodiment of the present invention and a first wiring pattern displayed on the upper surface thereof;

图5是一个示意图,说明本发明该实施例的该基座的内部,及其内部所显示的第一配线图案与一第二配线图案;5 is a schematic diagram illustrating the interior of the base of the embodiment of the present invention, and a first wiring pattern and a second wiring pattern shown inside;

图6是一个仰视示意图,说明本发明该实施例的该基座的一下表面,及其下表面所显示的第一配线图案、第二配线图案与多个焊垫;6 is a schematic bottom view illustrating the lower surface of the base of the embodiment of the present invention, and the first wiring pattern, the second wiring pattern and a plurality of welding pads displayed on the lower surface;

图7是一个X-Y散布图,说明本发明该实施例的电性支撑块球径与预定高度的关系;Figure 7 is an X-Y scatter diagram illustrating the relationship between the ball diameter of the electrical support block and the predetermined height of this embodiment of the present invention;

图8是一个X-Y散布图,说明本发明该实施例的焊垫直径与预定高度的关系;Figure 8 is an X-Y scatter diagram illustrating the relationship between the diameter of the pad and the predetermined height of this embodiment of the present invention;

图9是一个流程图,说明本发明具有温度感测组件的振荡器的制作方法的一实施例。FIG. 9 is a flow chart illustrating an embodiment of the method for fabricating an oscillator with a temperature sensing element of the present invention.

具体实施方式detailed description

下面结合附图及实施例对本发明进行详细说明。The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.

参阅图2与图3,本发明具有温度感测组件的振荡器的一个实施例是电连接于一个外部电路板200,本发明具有温度感测组件的振荡器的该实施例包含一个基座2、一个压电组件5、一个温度感测组件6、多个焊垫7,及多个电性支撑块8。Referring to FIG. 2 and FIG. 3, an embodiment of the oscillator with temperature sensing components of the present invention is electrically connected to an external circuit board 200, and this embodiment of the oscillator with temperature sensing components of the present invention includes a base 2 , a piezoelectric component 5 , a temperature sensing component 6 , a plurality of welding pads 7 , and a plurality of electrical supporting blocks 8 .

该基座2具有一个形成有一个容室21的本体22、一个封闭该容室21的盖板23,及配置于该本体22的一个第一配线图案3与一个第二配线图案4。在本发明该实施例中,该第一配线图案3与该第二配线图案4是如图4、图5,与图6所示。且该基座2是以陶瓷材料(Ceramics)构成,但不限于此。The base 2 has a body 22 forming a chamber 21 , a cover 23 closing the chamber 21 , and a first wiring pattern 3 and a second wiring pattern 4 disposed on the body 22 . In this embodiment of the present invention, the first wiring pattern 3 and the second wiring pattern 4 are shown in FIG. 4 , FIG. 5 , and FIG. 6 . And the base 2 is made of ceramic material (Ceramics), but not limited thereto.

该压电组件5是设置于该基座2的容室21中,并透过一个第一电性接着剂51电连接于该第一配线图案3,且受该盖板23保护以封闭于该容室21中,在本实施例中,该压电组件5是由石英(Quartz)所构成,但本发明并不以此为限。The piezoelectric component 5 is disposed in the chamber 21 of the base 2, and is electrically connected to the first wiring pattern 3 through a first electrical adhesive 51, and is protected by the cover plate 23 to be enclosed in the In the chamber 21 , in this embodiment, the piezoelectric component 5 is made of quartz (Quartz), but the present invention is not limited thereto.

该温度感测组件6设置于该基座2的本体22的一个下表面,且用以侦测该压电组件5的工作环境温度,并透过外部温度补偿的集成电路或自身温度补偿的集成电路补偿该压电组件5因温度差异所产生的频率漂移。在本实施例中,该温度感测组件6是由自身温度补偿的集成电路所构成,其主要包括一个温度感测读取架构、一个补偿电路架构,与一个用以驱动该压电组件5产生振荡的驱动电路架构。该温度感测组件6是透过如图3所示的多个第二电性接着剂61电连接于该第一配线图案3与该第二配线图案4,透过该第一配线图案3与该压电组件5呈电连接,并透过该第二配线图案4输出一个稳定的参考频率(Referencefrequency)。此外,还要说明的是,该温度感测组件6也可以是一个热敏电阻组件,并透过该第二配线图案4与该外部电路板200进行电连接,且利用该外部电路板200补偿该压电组件5因温度差异所产生的频率漂移。The temperature sensing component 6 is arranged on a lower surface of the body 22 of the base 2, and is used to detect the working environment temperature of the piezoelectric component 5, and through the integrated circuit of external temperature compensation or the integration of its own temperature compensation The circuit compensates the frequency drift of the piezoelectric component 5 due to temperature difference. In this embodiment, the temperature sensing component 6 is composed of an integrated circuit with its own temperature compensation, which mainly includes a temperature sensing reading structure, a compensation circuit structure, and a device for driving the piezoelectric component 5 to generate Oscillating drive circuit architecture. The temperature sensing component 6 is electrically connected to the first wiring pattern 3 and the second wiring pattern 4 through a plurality of second electrical adhesives 61 as shown in FIG. The pattern 3 is electrically connected to the piezoelectric element 5 and outputs a stable reference frequency through the second wiring pattern 4 . In addition, it should be noted that the temperature sensing component 6 can also be a thermistor component, and is electrically connected to the external circuit board 200 through the second wiring pattern 4, and the external circuit board 200 Compensate the frequency drift of the piezoelectric component 5 due to the temperature difference.

所述焊垫7设置于该基座2的本体22的下表面并分别电连接于该第二配线图案4。The welding pads 7 are disposed on the lower surface of the main body 22 of the base 2 and are respectively electrically connected to the second wiring patterns 4 .

所述电性支撑块8是用以电连接至该外部电路板200的电路,且分别透过所述焊垫7接合于该基座2的本体22的下表面并围绕该温度感测组件6,所述焊垫7与所述电性支撑块8具有一个预定高度H,该预定高度H足以使该基座2与该外部电路板200间形成一个容置该温度感测组件6的空间。所述电性支撑块8分别是由具有导电性的材料所构成,于本实施例中,所述电性支撑块8是以锡球(Solderball)为例来做说明。The electrical support block 8 is used to electrically connect to the circuit of the external circuit board 200 , and is respectively connected to the lower surface of the body 22 of the base 2 through the solder pads 7 and surrounds the temperature sensing component 6 , the welding pad 7 and the electrical supporting block 8 have a predetermined height H, the predetermined height H is sufficient to form a space between the base 2 and the external circuit board 200 for accommodating the temperature sensing component 6 . The electrical supporting blocks 8 are respectively made of conductive materials. In this embodiment, the electrical supporting blocks 8 are described by taking solder balls as an example.

详细地来说,该基座2的第一配线图案3具有如图2所示的一个第一线路31及一个第二线路32。再参阅图2,并同时配合参阅图4、图5与图6,该第一配线图案3的第一线路31具有一个自该本体22的上表面朝其下表面延伸的第一端部311、一个自其第一端部311于该本体22的内部横向延伸的延伸部312,及一个自其延伸部312向下延伸至该本体22的下表面的第二端部313;该第一配线图案3的第二线路32具有一个自该本体22的上表面朝其下表面延伸的第一端部321、一个自其第一端部321于该本体22的内部横向延伸的第一延伸部322、一个自其第一延伸部322向下延伸至该本体22的下表面的第二端部323、一个自其第一延伸部322于该本体22的内部横向延伸的第二延伸部324,及一个自其第二延伸部324向下延伸至该本体22的下表面的第三端部325。In detail, the first wiring pattern 3 of the base 2 has a first circuit 31 and a second circuit 32 as shown in FIG. 2 . Referring to FIG. 2 again, and referring to FIG. 4 , FIG. 5 and FIG. 6 together, the first circuit 31 of the first wiring pattern 3 has a first end portion 311 extending from the upper surface of the body 22 toward the lower surface thereof. , an extension 312 extending laterally from the first end 311 of the body 22, and a second end 313 extending downward from the extension 312 to the lower surface of the body 22; The second line 32 of the line pattern 3 has a first end portion 321 extending from the upper surface of the body 22 toward its lower surface, and a first extension portion extending laterally from the first end portion 321 inside the body 22 322, a second end portion 323 extending downward from the first extension portion 322 to the lower surface of the body 22, a second extension portion 324 extending laterally from the first extension portion 322 in the interior of the body 22, and a third end portion 325 extending downward from the second extension portion 324 to the lower surface of the main body 22 .

再参阅图5与图6,该第二配线图案4具有一个第一线路41、一个第二线路42、一个第三线路43,及一个第四线路44。该第二配线图案4的第一线路41、第二线路42、第三线路43及第四线路44,分别具有一个自该本体22的下表面朝上表面延伸的第一端部411、421、431、441、一个自其第一端部411、421、431、441于该本体22的内部朝该本体22的周缘横向延伸的延伸部412、422、432、442,及一个自其延伸部412、422、432、442向下延伸至该本体22的下表面的第二端部413、423、433、443。Referring to FIG. 5 and FIG. 6 again, the second wiring pattern 4 has a first line 41 , a second line 42 , a third line 43 , and a fourth line 44 . The first line 41, the second line 42, the third line 43 and the fourth line 44 of the second wiring pattern 4 respectively have a first end portion 411, 421 extending from the lower surface of the body 22 toward the upper surface. . 412 , 422 , 432 , 442 extend down to the second end 413 , 423 , 433 , 443 of the lower surface of the body 22 .

同样再参阅图2,并同时配合参阅图4、图5与图6,也就是说,该压电组件5是连接于该第一配线图案3的第一线路31与第二线路32的各第一端部311、321,而该温度感测组件6是连接于该第一配线图案3的第一线路31的第二端部313及其第二线路32的第二端部323与第三端部325,且连接于该第二配线图案4的第一线路41、第二线路42、第三线路43,及第四线路44的各第一端部411、421、431、441;所述焊垫7则分别连接该第二配线图案4的第一线路41、第二线路42、第三线路43,及第四线路44的各第二端部413、423、433、443。Also refer to FIG. 2 again, and refer to FIG. 4 , FIG. 5 and FIG. 6 at the same time. The first ends 311, 321, and the temperature sensing component 6 is connected to the second end 313 of the first line 31 of the first wiring pattern 3 and the second end 323 of the second line 32 and the second end 323 of the second line 32. Three end portions 325, and connected to the first end portions 411, 421, 431, 441 of the first line 41, the second line 42, the third line 43, and the fourth line 44 of the second wiring pattern 4; The pads 7 are respectively connected to the second ends 413 , 423 , 433 , 443 of the first circuit 41 , the second circuit 42 , the third circuit 43 , and the fourth circuit 44 of the second wiring pattern 4 .

参阅图7,改变本实施例所述电性支撑块8(锡球)的球径,并固定所述焊垫7的直径为0.3mm,由图7所显示的量测数据可知,随着所述电性支撑块8的球径增大,其所形成的预定高度H也逐渐递增,即该预定高度H是与所述电性支撑块8的球径成正比。参阅图8,则是改变本实施例所述焊垫7的直径,并固定所述电性支撑块8(锡球)的球径为0.45mm,由图8所显示的量测数据可知,随着所述焊垫7的直径增大,其所形成的预定高度H则逐渐递减,即该预定高度H是与所述焊垫7的直径成反比。因此,由上述的说明可知,所述焊垫7与所述电性支撑块8的尺寸大小皆会影响该预定高度H,也就是说,本发明可借由改变所述焊垫7与所述电性支撑块8的尺寸大小,便可进一步控制该预定高度H,且该预定高度H调整的范围可精确至0.1mm以下,与现有的氧化铝陶瓷基板或印刷电路板相较,便可有效地解决其高度限制的问题,也更能符合薄型化的趋势。Referring to FIG. 7, change the ball diameter of the electrical support block 8 (solder ball) described in this embodiment, and fix the diameter of the solder pad 7 to 0.3 mm. From the measurement data shown in FIG. 7, it can be seen that with the As the ball diameter of the electrical support block 8 increases, the predetermined height H formed by it gradually increases, that is, the predetermined height H is proportional to the ball diameter of the electric support block 8 . Referring to FIG. 8, the diameter of the welding pad 7 in this embodiment is changed, and the ball diameter of the fixed electrical support block 8 (solder ball) is 0.45mm. It can be known from the measurement data shown in FIG. As the diameter of the welding pad 7 increases, the predetermined height H formed by it gradually decreases, that is, the predetermined height H is inversely proportional to the diameter of the welding pad 7 . Therefore, it can be seen from the above description that the size of the welding pad 7 and the electrical support block 8 will affect the predetermined height H, that is to say, the present invention can change the welding pad 7 and the The size of the electrical support block 8 can further control the predetermined height H, and the adjustment range of the predetermined height H can be accurate to below 0.1mm, compared with the existing alumina ceramic substrate or printed circuit board, it can It effectively solves the problem of its height limitation and is more in line with the trend of thinning.

本发明该实施例借由该第一配线图案3与该第二配线图案4的相互配合,使分别设置于该基座2的容室21中的该压电组件5与设置于该基座2的本体22的下表面的温度感测组件6呈电连接,而该第二配线图案4电连接至所述焊垫7,同时,所述焊垫7分别与所述电性支撑块8相互电连接/结合(Bonding),从而使该实施例可透过所述电性支撑块8与该外部电路板200电连接。In this embodiment of the present invention, through the mutual cooperation of the first wiring pattern 3 and the second wiring pattern 4, the piezoelectric components 5 respectively arranged in the chamber 21 of the base 2 and the piezoelectric element 5 arranged in the base The temperature sensing component 6 on the lower surface of the body 22 of the seat 2 is electrically connected, and the second wiring pattern 4 is electrically connected to the welding pad 7, and at the same time, the welding pad 7 is respectively connected to the electrical support block 8 are electrically connected/bonded to each other, so that this embodiment can be electrically connected to the external circuit board 200 through the electrical supporting block 8 .

参阅图9,本发明具有温度感测组件的振荡器的制作方法的一个实施例是制作出如图3所示具有温度感测组件的振荡器。本发明的制作方法的该实施例包含一个材料准备步骤91、一个压电组件设置步骤92、一个封止步骤93、一个电性支撑块接着步骤94、一个温度感测组件搭载步骤95,及一个封装测试步骤96。Referring to FIG. 9 , an embodiment of the manufacturing method of an oscillator with a temperature sensing component of the present invention is to manufacture an oscillator with a temperature sensing component as shown in FIG. 3 . This embodiment of the manufacturing method of the present invention includes a material preparation step 91, a piezoelectric component setting step 92, a sealing step 93, an electrical support block subsequent step 94, a temperature sensing component mounting step 95, and a Package test step 96.

该材料准备步骤91是准备该基座2、该压电组件5、该温度感测组件6,及所述电性支撑块8。在本发明中,该基座2的细部结构,以及该基座2与该压电组件5所使用的具体材质,皆已记载于前述说明中,于此不再赘述。但此处需特别说明的是,于该制作方法的实施例中,是利用硅晶穿孔(Throughsiliconvia)技术以将该第一配线图案3的第一线路31的延伸部312、该第一配线图案3的第二线路32的第一延伸部322与第二延伸部324,及该第二配线图案4的第一线路41、第二线路42、第三线路43与第四线路44的各延伸部412、422、432、442设置于该本体22内。此外,该压电组件5是先将一个石英经研磨至所需厚度以粗调其频率;接着,将该石英进行蚀刻清洗以去除研磨过程中所产生的裂痕及附着的异物与油渍,并进行烘干,以使该石英的频率范围更加集中;最后,在该石英的表面蒸镀电极(适用电极成分可以是Ag、Cr/Ag/Cr或Cr/Ag),即可准备取得该压电组件5。The material preparation step 91 is to prepare the base 2 , the piezoelectric component 5 , the temperature sensing component 6 , and the electrical support block 8 . In the present invention, the detailed structure of the base 2 and the specific materials used for the base 2 and the piezoelectric component 5 have been described in the foregoing description, and will not be repeated here. But what needs to be specially explained here is that in the embodiment of the manufacturing method, the through silicon via (Through silicon via) technology is used to form the extension part 312 of the first line 31 of the first wiring pattern 3, the first wiring pattern 3 The first extension part 322 and the second extension part 324 of the second line 32 of the line pattern 3, and the first line 41, the second line 42, the third line 43 and the fourth line 44 of the second wiring pattern 4 Each extension portion 412 , 422 , 432 , 442 is disposed in the main body 22 . In addition, the piezoelectric component 5 firstly grinds a quartz to the desired thickness to roughly adjust its frequency; then, the quartz is etched and cleaned to remove cracks and attached foreign matter and oil stains generated during the grinding process, and Drying to make the frequency range of the quartz more concentrated; finally, the electrode is evaporated on the surface of the quartz (the applicable electrode composition can be Ag, Cr/Ag/Cr or Cr/Ag), and the piezoelectric component can be prepared 5.

该压电组件设置步骤92是将该压电组件5设置于该基座2的容室21中,且透过该第一电性接着剂51以电连接于该第一配线图案3的第一线路31与第二线路32的各第一端部311、321后,并予以硬化。此处需补充说明的是,在该封止步骤93前,还实施一个水晶频率调整步骤(图未示)。该水晶频率调整步骤是采用离子束(Ionbeam)来对该石英的电极施予干蚀刻,以借此微调其频率。The piezoelectric component setting step 92 is to set the piezoelectric component 5 in the chamber 21 of the base 2, and to electrically connect to the first wiring pattern 3 through the first electrical adhesive 51. The respective first end portions 311, 321 of the first line 31 and the second line 32 are hardened. What needs to be added here is that before the blocking step 93, a crystal frequency adjustment step (not shown in the figure) is also implemented. The step of adjusting the frequency of the crystal is to use ion beam (Ionbeam) to perform dry etching on the electrode of the quartz, so as to fine-tune its frequency.

该封止步骤93是利用配置在该基座2本体22的顶缘的一个密封环(Sealring,图未示),以透过滚焊封止技术(Seamsealing)使该盖板23封闭该基座2的本体22的容室21,以将该压电组件5封闭于该容室21中。在本实施例中,该密封环与该盖板23是以Fe-Co-Ni为例做说明,但本发明并不限于此。The sealing step 93 is to utilize a sealing ring (Sealring, not shown) disposed on the top edge of the main body 22 of the base 2 to seal the base with the cover plate 23 through seam sealing. 2 in the chamber 21 of the body 22, so that the piezoelectric assembly 5 is enclosed in the chamber 21. In this embodiment, the sealing ring and the cover plate 23 are illustrated by taking Fe—Co—Ni as an example, but the present invention is not limited thereto.

该电性支撑块接着步骤94是分别透过设置于该基座2的下表面,且电连接于该第二配线图案4的第一线路41、第二线路42、第三线路43与第四线路44的各第二端部413、423、433、443的所述焊垫7,以将所述电性支撑块8接着于该基座2的下表面,而使其在电连接于该外部电路板200时,具有一个预定高度H,可使该基座2与该外部电路板200间形成该可容置该温度感测组件6的空间。Following step 94, the electrical support block is separately disposed on the lower surface of the base 2 and electrically connected to the first circuit 41, the second circuit 42, the third circuit 43 and the second circuit 4 of the second wiring pattern 4. The welding pads 7 of the second ends 413, 423, 433, 443 of the four lines 44 are used to connect the electrical supporting block 8 to the lower surface of the base 2 so that it is electrically connected to the base 2. The external circuit board 200 has a predetermined height H, so that the space between the base 2 and the external circuit board 200 can accommodate the temperature sensing component 6 .

此处要说明的是,所述电性支撑块8原则上虽是由具有导电性的材料所构成,且形状也无限制。然而,当所选用的材料不同时,其接着的方式就会有所不同。于本发明该制作方法的实施例中,所述电性支撑块8是以锡球(Solderball)为例来做说明,而所述锡球则可利用锡球网格数组(Ballgridarray,BGA)的植球技术(Ballattachmentprocess)或网印印刷锡膏技术,经由回流焊形成于呈圆形的所述焊垫7下。It should be noted here that although the electrical support block 8 is made of conductive material in principle, its shape is not limited. However, when the selected materials are different, the following methods will be different. In the embodiment of the manufacturing method of the present invention, the electrical support block 8 is illustrated by taking solder balls (Solderball) as an example, and the solder balls can use the solder ball grid array (BGA) Ball attachment process or screen printing solder paste technology is formed under the circular pad 7 through reflow soldering.

此外,还要进一步说明的是,为了更加精确地控制该预定高度H,需使所述焊垫7的外观呈圆形,才能配合所述电性支撑块8(锡球)的轮廓。因此,为了令所述焊垫7的外观呈圆形,便需利用硅穿孔(via)的制程方式,使该第二配线图案4的该第一线路41、第二线路42、第三线路43与第四线路44的各延伸部412、422、432、442分别透过穿孔向下延伸至该本体22的下表面的各第二端部413、423、433、443(见图5与图6)。也就是说,利用穿孔将该第二配线图案4的各延伸部412、422、432、442分别与各第二端部413、423、433、443进行导通的方式,与现有的经由外部导线进行导通的方式相较,可有效地避免于植锡球的过程中,锡被外部导线所吸附,而导致所述锡球的高度产生偏移,进而影响该预定高度H。In addition, it should be further explained that, in order to control the predetermined height H more precisely, the appearance of the welding pad 7 needs to be circular so as to match the contour of the electrical supporting block 8 (solder ball). Therefore, in order to make the appearance of the welding pad 7 round, it is necessary to use the process method of through silicon via (via) to make the first line 41, the second line 42, and the third line of the second wiring pattern 4 43 and the extensions 412, 422, 432, 442 of the fourth line 44 respectively extend downwards to the second ends 413, 423, 433, 443 of the lower surface of the body 22 through the through holes (see FIG. 5 and FIG. 6). That is to say, the method of conducting the extension parts 412, 422, 432, 442 of the second wiring pattern 4 with the second end parts 413, 423, 433, 443 through the through holes is different from the existing via Compared with the conduction mode of the external wires, it can effectively avoid the tin being absorbed by the external wires during the process of planting the solder balls, which will cause the height of the solder balls to deviate, thereby affecting the predetermined height H.

该温度感测组件搭载步骤95是利用表面黏着技术(Surfacemountingtechnology,SMT),将该温度感测组件6设置于该基座2的下表面且由所述电性支撑块8所围绕,并透过所述第二电性接着剂61电连接于该第一配线图案3的第一线路31的第二端部313及其第二线路32的第二端部323与第三端部325,且连接于该第二配线图案4的第一线路41、第二线路42、第三线路43,及第四线路44的各第一端部411、421、431、441,以令该温度感测组件6与该压电组件5透过该第一配线图案3而呈电连接,从而构成如图3所示的该具有温度感测组件的振荡器。The temperature sensing component mounting step 95 is to use surface mount technology (Surfacemountingtechnology, SMT), the temperature sensing component 6 is arranged on the lower surface of the base 2 and surrounded by the electrical support block 8, and through The second electrical adhesive 61 is electrically connected to the second end 313 of the first line 31 of the first wiring pattern 3 and the second end 323 and the third end 325 of the second line 32 , and Connected to each first end 411, 421, 431, 441 of the first line 41, the second line 42, the third line 43, and the fourth line 44 of the second wiring pattern 4, so as to sense the temperature The component 6 and the piezoelectric component 5 are electrically connected through the first wiring pattern 3 to form the oscillator with a temperature sensing component as shown in FIG. 3 .

该封装测试步骤96是将该振荡器进行一个电特性检测与一个老化测试,以确认该振荡器能正常运作并符合应用端的需求。The packaging test step 96 is to conduct an electrical characteristic test and an aging test on the oscillator to confirm that the oscillator can operate normally and meet the requirements of the application end.

本发明具有温度感测组件的振荡器的制作方法有别于该振荡器1的优点在于(再配合参阅图1),该振荡器1如欲将其电连接至外部电路板时,还需利用表面黏着技术于外部电路板印刷锡膏,才可将该振荡器1电连接于该外部电路板上。然而,根据本案先前技术内所记载的内容可知,由于材料不同容易因润湿性不良而产生拒焊的问题。反观本发明具有温度感测组件的振荡器的制作方法的该实施例,由于所述电性支撑块8(锡球)是直接取代该振荡器1的下围壁17,一方面可避免因为材质不同所产生拒焊的问题,且可轻易地将本发明具有温度感测组件的振荡器黏着于该外部电路板200;另一方面,也可改善该下围壁17因采用多层氧化铝陶瓷或玻璃纤维等昂贵材质所衍生的高成本及高度限制的问题。The advantage of the method for making the oscillator with the temperature sensing component of the present invention is different from that of the oscillator 1 (refer to FIG. 1 again), the oscillator 1 needs to use The oscillator 1 can be electrically connected to the external circuit board by printing solder paste on the external circuit board by surface mount technology. However, according to the content recorded in the prior art of this case, it is known that due to different materials, the problem of solder rejection is likely to occur due to poor wettability. In contrast to this embodiment of the method for manufacturing an oscillator with a temperature sensing component of the present invention, since the electrical support block 8 (solder ball) directly replaces the lower surrounding wall 17 of the oscillator 1, on the one hand it can avoid It is different from the problem of solder rejection, and the oscillator with temperature sensing components of the present invention can be easily adhered to the external circuit board 200; on the other hand, the lower wall 17 can also be improved due to the use of multilayer alumina ceramic Or the high cost and height restrictions derived from expensive materials such as fiberglass.

综上所述,本发明具有温度感测组件的振荡器及其制作方法,借由设置在该基座2下的所述电性支撑块8,以取代一般振荡器1的下围壁17,不仅可改善高成本的问题,还能使本发明该振荡器与该外部电路板200接合时,因材料兼容而无拒焊的问题;此外,利用调整所述焊垫7或所述电性支撑块8的尺寸大小,即可得到所欲使用的预定高度H,确实能达成本发明的目的。To sum up, the oscillator with temperature sensing components and the manufacturing method thereof of the present invention replace the lower surrounding wall 17 of the general oscillator 1 by the electrical support block 8 arranged under the base 2, Not only can the problem of high cost be improved, but also when the oscillator of the present invention is bonded to the external circuit board 200, there is no problem of solder rejection due to material compatibility; in addition, by adjusting the solder pad 7 or the electrical support The size of the block 8 can obtain the desired predetermined height H, which can indeed achieve the purpose of the present invention.

Claims (10)

1. having an agitator for temperature sensing component, be electrically connected to a external circuit board, this has the agitator of temperature sensing component, comprises a pedestal, piezoelectric element, temperature sensing component, a multiple weld pad and multiple electrical bracer; It is characterized in that:
This pedestal has one and is formed with the body of a room, a cover plate closing this room, and is configured at first Wiring pattern of this body and second Wiring pattern;
This piezoelectric element, is arranged in the room of this pedestal and is electrically connected to this first Wiring pattern;
This temperature sensing component, is arranged at a lower surface of the body of this pedestal and is electrically connected to this first Wiring pattern and this second Wiring pattern, and through this first Wiring pattern with this piezoelectric element in electrically connecting;
Described weld pad, is arranged at the lower surface of the body of this pedestal and is electrically connected in this second Wiring pattern;
Described electrical bracer, the lower surface of the body of this pedestal it is engaged in respectively and around this temperature sensing component through described weld pad, and in order to be electrically connected to the circuit of this external circuit board, described weld pad and described electrical bracer have a predetermined altitude, and this predetermined altitude is enough to the space making to form this temperature sensing component accommodating between this pedestal and this external circuit board.
2. there is the agitator of temperature sensing component as claimed in claim 1, it is characterised in that: this temperature sensing component compensates this piezoelectric element because of frequency drift produced by temperature contrast in order to the integrated circuit detecting the operating ambient temperature of this piezoelectric element the integrated circuit compensated through external temperature or own temperature compensates.
3. there is the agitator of temperature sensing component as claimed in claim 1, it is characterized in that: this first Wiring pattern has a first line and second circuit, the first line of this first Wiring pattern has a first end extended from the upper surface of this body, an extension extended in the inner transverse of this body from its first end towards its lower surface, and portion of extending from extends downward the second end of lower surface of this body; Second circuit of this first Wiring pattern have a first end extended towards its lower surface from the upper surface of this body, first extension extended in the inner transverse of this body from its first end, one extend downward the second end of lower surface of this body, second extension extended from its first extension and the 3rd end of a lower surface extending downward this body from its second extension in the inner transverse of this body from its first extension; This second Wiring pattern has a first line, the second circuit, a tertiary circuit, and the 4th circuit, the first line of this second Wiring pattern, the second circuit, tertiary circuit, and the 4th circuit be respectively provided with a first end extended towards upper surface from the lower surface of this body, one from its first end in the inside of this body the extension towards the periphery horizontal expansion of this body, and portion of extending from extends downward the second end of lower surface of this body; This piezoelectric element is connected to the first line of this first Wiring pattern and each first end of the second circuit, this temperature sensing component is connected to the second end of the first line of this first Wiring pattern and the second end of the second circuit thereof and the 3rd end, and it is connected to the first line of this second Wiring pattern, the second circuit, tertiary circuit and each first end of the 4th circuit; Described weld pad connects the first line of this second Wiring pattern, the second circuit, tertiary circuit and each the second end of the 4th circuit respectively.
4. there is the agitator of temperature sensing component as claimed in claim 1, it is characterised in that: described weld pad is rounded, and the diameter of this predetermined altitude and described weld pad is inversely proportional to.
5. there is the agitator of temperature sensing component as claimed in claim 1, it is characterised in that: described electrical bracer is made up of the material with electric conductivity.
6. there is a manufacture method for the agitator of temperature sensing component, comprise a material preparation process, piezoelectric element setting steps, sealing step, an electrical bracer then step, and a temperature sensing component carries step; It is characterized in that:
This material preparation process, it is prepare pedestal, piezoelectric element, a temperature sensing component, and multiple electrical bracer, this pedestal has one and is formed with the body of a room, a cover plate, and first Wiring pattern being configured at this body being electrically insulated from each other and second Wiring pattern;
This piezoelectric element setting steps, is be arranged in the room of this pedestal by this piezoelectric element, and is electrically connected to this first Wiring pattern;
This sealing step, utilizes the room of the body of this this pedestal of cover closure, to be closed in this room by this piezoelectric element;
This is bracer then step electrically, is through the lower surface being arranged at this pedestal and is electrically connected to multiple weld pads of this second Wiring pattern, with by multiple electrical bracers then in the lower surface of this pedestal;
This temperature sensing component carries step, it is this temperature sensing component is arranged at the lower surface of this pedestal and surrounded by described electrical bracer, and it is electrically connected to this first Wiring pattern and this second Wiring pattern, it is electrically connect to make this temperature sensing component pass through this first Wiring pattern with this piezoelectric element, thus constituting an agitator with temperature sensing component;
The predetermined altitude that described weld pad and described electrical bracer are formed is enough to make this agitator when being electrically connected to a external circuit board, makes to be formed between this pedestal and this external circuit board the space of this temperature sensing component accommodating.
7. there is the manufacture method of the agitator of temperature sensing component as claimed in claim 6, it is characterized in that: also comprise a packaging and testing step, this packaging and testing step is that this agitator carries out an electrical characteristics detection and a burn-in test, to confirm this agitator energy normal operation and to meet the demand of application end.
8. there is the manufacture method of the agitator of temperature sensing component as claimed in claim 6, it is characterized in that: in this material preparation process, first Wiring pattern of this pedestal has a first line and second circuit, the first line of this first Wiring pattern has a first end extended from a upper surface of this body, an extension extended in the inner transverse of this body from its first end towards its lower surface, and portion of extending from extends downward the second end of lower surface of this body; Second circuit of this first Wiring pattern have a first end extended towards its lower surface from the upper surface of this body, first extension extended in the inner transverse of this body from its first end, one extend downward the second end of lower surface of this body, second extension extended from its first extension and the 3rd end of a lower surface extending downward this body from its second extension in the inner transverse of this body from its first extension; This second Wiring pattern has a first line, the second circuit, a tertiary circuit, and the 4th circuit, the first line of this second Wiring pattern, the second circuit, tertiary circuit, and the 4th circuit be respectively provided with a first end extended towards upper surface from the lower surface of this body, one from its first end in the inside of this body the extension towards the periphery horizontal expansion of this body, and portion of extending from extends downward the second end of lower surface of this body; Carry in step at this piezoelectric element setting steps, electrically a bracer then step and temperature sensing component, this piezoelectric element is connected to the first line of this first Wiring pattern and each first end of the second circuit, this temperature sensing component is connected to the second end of the first line of this first Wiring pattern and the second end of the second circuit thereof and the 3rd end, and it is connected to the first line of this second Wiring pattern, the second circuit, tertiary circuit and each first end of the 4th circuit; Described electrical bracer connects the first line of this second Wiring pattern, the second circuit, tertiary circuit and each the second end of the 4th circuit respectively through described weld pad.
9. there is the manufacture method of the agitator of temperature sensing component as claimed in claim 6, it is characterised in that: in this electrically a bracer then step, described weld pad is rounded, and the diameter of this predetermined altitude and described weld pad is inversely proportional to.
10. there is the manufacture method of the agitator of temperature sensing component as claimed in claim 6, it is characterised in that: in this electrically a bracer then step, described electrical bracer is made up of the material with electric conductivity.
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CN101895270A (en) * 2009-03-09 2010-11-24 微晶公司 The oscillator arrangement that comprises the thermally-controlled piezoelectric resonator device
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Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008278227A (en) * 2007-04-27 2008-11-13 Kyocera Kinseki Corp Manufacturing method of piezoelectric oscillator
CN101895270A (en) * 2009-03-09 2010-11-24 微晶公司 The oscillator arrangement that comprises the thermally-controlled piezoelectric resonator device
US20120174360A1 (en) * 2009-09-14 2012-07-12 Murata Manufacturing Co., Ltd. Method for Manufacturing Piezoelectric Vibration Device
CN103427786A (en) * 2012-05-16 2013-12-04 精工爱普生株式会社 Electronic component, manufacturing method and inspection method for electronic component, sheet substrate, and electronic apparatus

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