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CN105606200A - Three-axial vibration sensor structure - Google Patents

Three-axial vibration sensor structure Download PDF

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Publication number
CN105606200A
CN105606200A CN201410594846.2A CN201410594846A CN105606200A CN 105606200 A CN105606200 A CN 105606200A CN 201410594846 A CN201410594846 A CN 201410594846A CN 105606200 A CN105606200 A CN 105606200A
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housing
plate
rigid plate
rigid
vibration sensor
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CN105606200B (en
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姜志国
陈玉玲
张艳华
李国珍
史岩峰
赵爽
窦海峰
马佳
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China Academy of Launch Vehicle Technology CALT
Beijing Institute of Structure and Environment Engineering
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China Academy of Launch Vehicle Technology CALT
Beijing Institute of Structure and Environment Engineering
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Abstract

本发明涉及振动传感器技术领域,具体涉及一种三轴向振动传感器结构,目的是解决现有的三轴向振动传感器易产生高频谐振、易受电磁干扰且体积较大的问题。其特征在于,它包括固定装置、信号传输装置和测量装置;测量装置固定连接在固定装置内部;信号传输装置从固定装置外部穿入到固定装置内部,与固定装置固定连接;信号传输装置还与测量装置连接;测量装置用于测量待测物体的加速度;固定装置用于对测量装置和信号传输装置提供支撑和保护;信号传输装置用于将测量装置测得的加速度信号传输给信号采集设备。本发明通过采用四块刚性印制板和三块挠性板的一体化设计,实现了接口的可靠性连接,节省了传感器的内部空间,频率响应得到较大提高,信号噪声明显减小。

The invention relates to the technical field of vibration sensors, in particular to a structure of a three-axis vibration sensor, and aims to solve the problems that the existing three-axis vibration sensor is prone to high-frequency resonance, susceptible to electromagnetic interference and relatively large in size. It is characterized in that it includes a fixing device, a signal transmission device and a measuring device; the measuring device is fixedly connected inside the fixing device; the signal transmission device penetrates from the outside of the fixing device into the inside of the fixing device, and is fixedly connected with the fixing device; the signal transmission device is also connected with the fixing device The measuring device is connected; the measuring device is used to measure the acceleration of the object to be measured; the fixing device is used to provide support and protection for the measuring device and the signal transmission device; the signal transmission device is used to transmit the acceleration signal measured by the measuring device to the signal acquisition device. The invention adopts the integrated design of four rigid printed boards and three flexible boards, realizes the reliable connection of the interface, saves the internal space of the sensor, greatly improves the frequency response, and obviously reduces the signal noise.

Description

一种三轴向振动传感器结构A three-axis vibration sensor structure

技术领域technical field

本发明涉及振动传感器技术领域,具体涉及一种三轴向振动传感器结构。The invention relates to the technical field of vibration sensors, in particular to a three-axis vibration sensor structure.

背景技术Background technique

三轴向振动传感器能够同时测量一个测点相互正交的X、Y、Z三个方向的振动信号,在航空航天领域有着广阔的应用前景。The three-axis vibration sensor can simultaneously measure vibration signals in three directions of X, Y, and Z that are orthogonal to each other at a measuring point, and has broad application prospects in the aerospace field.

频响特性是衡量振动传感器性能优劣的最重要指标之一,传统的三轴压阻式振动传感器虽具有良好的直流效应,但其温度效应严重,动态范围有限,频响特性仅能达到1KHz左右。三轴电容式振动传感器具有高灵敏度、低温度效应、低功耗等优点,但由于传感器输出的高阻抗,其易受电磁干扰影响,不适合在恶劣环境下工作。且其频率范围有限,最高为3KHz左右。三轴压电式振动传感器频率范围宽、线性度好,但由于电荷泄漏,易发生电荷阻塞效应,且三向压电式振动传感器一般采用传感器与变换器分体的结构设计,不易实现一体化。The frequency response characteristic is one of the most important indicators to measure the performance of the vibration sensor. Although the traditional three-axis piezoresistive vibration sensor has a good DC effect, its temperature effect is serious, the dynamic range is limited, and the frequency response characteristic can only reach 1KHz. about. The three-axis capacitive vibration sensor has the advantages of high sensitivity, low temperature effect, and low power consumption. However, due to the high impedance of the sensor output, it is easily affected by electromagnetic interference and is not suitable for working in harsh environments. And its frequency range is limited, the highest is about 3KHz. The three-axis piezoelectric vibration sensor has a wide frequency range and good linearity, but due to charge leakage, it is prone to charge blocking effect, and the three-axis piezoelectric vibration sensor generally adopts a separate structure design of the sensor and the converter, which is not easy to achieve integration .

上述振动传感器都存在一些不足,这严重限制了传感器的应用范围。There are some deficiencies in the above-mentioned vibration sensors, which seriously limit the application range of the sensors.

发明内容Contents of the invention

本发明的目的是解决现有的三轴向振动传感器易产生高频谐振、易受电磁干扰且体积较大的问题,提供了一种频响特性高、抗干扰能力强、连接可靠性高且体积紧凑的三轴向振动传感器结构。The purpose of the present invention is to solve the problems that the existing triaxial vibration sensor is prone to high-frequency resonance, susceptible to electromagnetic interference and large in size, and provides a sensor with high frequency response characteristics, strong anti-interference ability, high connection reliability and Compact triaxial vibration sensor structure.

本发明是这样实现的:The present invention is achieved like this:

一种三轴向振动传感器结构,包括固定装置、信号传输装置和测量装置;测量装置固定连接在固定装置内部;信号传输装置从固定装置外部穿入到固定装置内部,与固定装置固定连接;信号传输装置还与测量装置连接;测量装置用于测量待测物体的加速度;固定装置用于对测量装置和信号传输装置提供支撑和保护;信号传输装置用于将测量装置测得的加速度信号传输给信号采集设备。A three-axis vibration sensor structure, including a fixing device, a signal transmission device and a measuring device; the measuring device is fixedly connected inside the fixing device; the signal transmission device penetrates from the outside of the fixing device to the inside of the fixing device, and is fixedly connected with the fixing device; The transmission device is also connected with the measurement device; the measurement device is used to measure the acceleration of the object to be measured; the fixing device is used to provide support and protection for the measurement device and the signal transmission device; the signal transmission device is used to transmit the acceleration signal measured by the measurement device to Signal acquisition equipment.

如上所述的固定装置包括壳体、束线管、束线螺钉、螺母、垫圈和顶盖;壳体整体为上端开口的中空的长方体形;在壳体长方体形两个相对的角上沿壳体高度方向开有两个固定通孔;在壳体长方体形后端面上开有通孔;顶盖整体为正方形板状,盖合在壳体的上端面上;顶盖与壳体固定通孔对应位置开有两个通孔,两个通孔分别与壳体的固定通孔相配合,用于将振动传感器结构固定在待测物体上;束线管整体为“T”形,由上下两个中空的圆柱体组成,上端圆柱体的外径大于下端圆柱体的外径,上端圆柱体的内径大于下端圆柱体的内径,上端圆柱体的外径大于壳体长方体形后端面上通孔的直径,下端圆柱体的外径小于等于壳体长方体形后端面上通孔的直径;在上端圆柱体的前端开有通孔,该通孔内表面有内螺纹;下端圆柱体的外表面有外螺纹;上端圆柱体位于壳体内部,下端圆柱体从壳体长方体形后端面上通孔穿出;螺母与束线管下端圆柱体螺纹连接;螺母用于将束线管固定在壳体上;垫圈整体为圆环形,圆环上开有缺口,圆环外径小于等于束线管上端圆柱体的内径;垫圈安装在束线管上端圆柱体的内部,垫圈圆环缺口与束线管上端圆柱体前端的通孔错开;束线螺钉为上端面沿直径方向开有豁口的M3型螺钉;束线螺钉与束线管上端圆柱体的前端开有的通孔螺纹连接,束线螺钉的尖部与垫圈的外表面相接触。The above-mentioned fixing device includes a housing, a wire harness, a wire screw, a nut, a washer and a top cover; the housing as a whole is a hollow cuboid with an open upper end; There are two fixed through holes in the height direction of the body; a through hole is opened on the rear end surface of the rectangular parallelepiped of the shell; There are two through holes in the corresponding position, and the two through holes are matched with the fixed through holes of the shell respectively, and are used to fix the vibration sensor structure on the object to be measured; The outer diameter of the upper cylinder is larger than the outer diameter of the lower cylinder, the inner diameter of the upper cylinder is larger than the inner diameter of the lower cylinder, and the outer diameter of the upper cylinder is larger than that of the through hole on the rear surface of the rectangular parallelepiped shell. diameter, the outer diameter of the lower end cylinder is less than or equal to the diameter of the through hole on the cuboid rear end face of the shell; the front end of the upper end cylinder is provided with a through hole, and the inner surface of the through hole has an internal thread; the outer surface of the lower end cylinder has an outer thread. Thread; the upper cylinder is located inside the housing, and the lower cylinder passes through the through hole on the rectangular rear end surface of the housing; the nut is threaded with the lower cylinder of the harness tube; the nut is used to fix the harness tube on the housing; The gasket is a circular ring as a whole, and there is a gap on the ring, and the outer diameter of the ring is less than or equal to the inner diameter of the upper end cylinder of the harness tube; The through holes at the front end of the cylinder are staggered; the wire harness screw is an M3 type screw with a notch on the upper end surface along the diameter direction; contact with the outer surface of the gasket.

如上所述的壳体、束线管、束线螺钉、螺母和顶盖均采用铝合金材料制成;垫圈采用软铝材料制成;壳体的厚度为1.5mm;壳体和顶盖的总尺寸为27×27×21mm。The above-mentioned housing, harness tube, harness screw, nut and top cover are all made of aluminum alloy material; the gasket is made of soft aluminum material; the thickness of the housing is 1.5mm; the total of the housing and the top cover The size is 27×27×21mm.

如上所述的信号传输装置包括导线、电缆和电连接器;导线的一端与测量装置连接,另一端与电缆的一端连接;电缆的另一端与电连接器的一端连接;电连接器的另一端与信号采集设备连接;导线从固定装置的束线管的内部穿过,同时穿过垫圈的内部。The above-mentioned signal transmission device includes a wire, a cable and an electrical connector; one end of the wire is connected to the measuring device, and the other end is connected to one end of the cable; the other end of the cable is connected to one end of the electrical connector; the other end of the electrical connector Connects to signal acquisition equipment; the wires pass through the inside of the harness tube of the fixture while passing through the inside of the gasket.

如上所述的测量装置包括刚挠结合电路板和敏感芯体;刚挠结合电路板包括第一刚性板、第二刚性板、第三刚性板、第四刚性板、第一挠性板、第二挠性板和第三挠性板;第一刚性板与第三刚性板通过第二挠性板连接;第二刚性板与第三刚性板通过第一挠性板连接;第三刚性板与第四刚性板通过第三挠性板连接;第一刚性板、第二刚性板、第三刚性板和第四刚性板均采用四层板结构,由上至下依次为一层信号层、两层内部信号层和底层;信号层用于焊接元器件,内部信号层用于布线,底层用于与固定装置的壳体连接并绝缘隔离;第一挠性板、第二挠性板和第三挠性板均采用双层板结构,两层板之间布线;敏感芯体共有三个,分别焊接在第一刚性板、第二刚性板和第三刚性板的信号层上;敏感芯体的电源端与刚性板上的电压调整器连接,敏感芯体的输出端与刚性板上变换电路的前端连接;第一刚性板固定在壳体的右侧内壁上,第二刚性板固定在壳体的前侧内壁上,第四刚性板固定在壳体的左侧内壁上,第三刚性板固定在壳体的下侧内壁上;信号传输装置的导线分别与第一刚性板、第二刚性板、第三刚性板和第四刚性板的信号层焊接。The measuring device as described above includes a rigid-flexible circuit board and a sensitive core; the rigid-flexible circuit board includes a first rigid board, a second rigid board, a third rigid board, a fourth rigid board, a first flexible board, a first Two flexible boards and the third flexible board; the first rigid board is connected with the third rigid board through the second flexible board; the second rigid board is connected with the third rigid board through the first flexible board; the third rigid board is connected with the third rigid board through the second flexible board; The fourth rigid board is connected through the third flexible board; the first rigid board, the second rigid board, the third rigid board and the fourth rigid board all adopt a four-layer board structure, which is a signal layer, two The inner signal layer and the bottom layer; the signal layer is used for soldering components, the inner signal layer is used for wiring, and the bottom layer is used for connection and insulation isolation with the housing of the fixture; the first flexible board, the second flexible board and the third The flexible board adopts a double-layer board structure, and the wiring between the two boards; there are three sensitive cores, which are respectively welded on the signal layers of the first rigid board, the second rigid board and the third rigid board; The power supply terminal is connected to the voltage regulator on the rigid board, and the output terminal of the sensitive core is connected to the front end of the conversion circuit on the rigid board; the first rigid board is fixed on the right inner wall of the housing, and the second rigid board is fixed on the housing The fourth rigid plate is fixed on the left inner wall of the housing, and the third rigid plate is fixed on the lower inner wall of the housing; the wires of the signal transmission device are respectively connected to the first rigid plate and the second rigid plate , The signal layers of the third rigid board and the fourth rigid board are soldered.

如上所述的第一刚性板、第二刚性板、第三刚性板和第四刚性板均采用环氧玻璃布压板制成;第一挠性板、第二挠性板和第三挠性板均采用聚酰亚胺材料制成。The first rigid board, the second rigid board, the third rigid board and the fourth rigid board are all made of epoxy glass cloth pressing board; the first flexible board, the second flexible board and the third flexible board All made of polyimide material.

如上所述的刚挠结合电路板的电路连接关系根据GJB362B-2009确定,敏感芯体采用SDI公司生产的1221型芯体实现。The circuit connection relationship of the rigid-flex circuit board mentioned above is determined according to GJB362B-2009, and the sensitive core is realized by the 1221 core produced by SDI company.

本发明的有益效果是:The beneficial effects of the present invention are:

本发明包括固定装置、信号传输装置和测量装置。通过采用四块刚性印制板和三块挠性板的一体化设计,实现了接口的可靠性连接,节省了传感器的内部空间,使得信号传输过程中的信号噪声明显减小。应用本发明生产了5只样机,并在振动传感器校准系统上进行了性能指标的验证,在带内不平度小于1dB的条件下,传感器的频响特性均能达到5KHz。经一体化设计后,五只样机的滤波功能和电压调整电路功能均工作正常,三个方向的灵敏度及最终输出信号中的噪声干燥值均满足试验的要求。The invention includes a fixing device, a signal transmission device and a measuring device. Through the integrated design of four rigid printed boards and three flexible boards, the reliable connection of the interface is realized, the internal space of the sensor is saved, and the signal noise during signal transmission is significantly reduced. 5 prototypes were produced by applying the invention, and the performance index was verified on the vibration sensor calibration system. Under the condition that the in-band unevenness is less than 1dB, the frequency response characteristics of the sensors can all reach 5KHz. After the integrated design, the filter function and voltage adjustment circuit function of the five prototypes all work normally, and the sensitivity in three directions and the noise dry value in the final output signal all meet the requirements of the test.

附图说明Description of drawings

图1是本发明的一种三轴向振动传感器结构的主视剖视图;Fig. 1 is the front sectional view of a kind of triaxial vibration sensor structure of the present invention;

图2是本发明的一种三轴向振动传感器结构的A-A向剖视图;Fig. 2 is the A-A cut-away view of a kind of triaxial vibration sensor structure of the present invention;

图3是本发明的一种三轴向振动传感器结构中束线管的主视剖视图;Fig. 3 is a front sectional view of a harness tube in a triaxial vibration sensor structure of the present invention;

图4是本发明的一种三轴向振动传感器结构中束线管的A-A向剖视图;Fig. 4 is the A-A sectional view of the harness tube in a kind of triaxial vibration sensor structure of the present invention;

图5是本发明的一种三轴向振动传感器结构中垫圈的主视图;Fig. 5 is the front view of the washer in a kind of triaxial vibration sensor structure of the present invention;

图6是本发明的一种三轴向振动传感器结构中垫圈的俯视图;Fig. 6 is a top view of a gasket in a triaxial vibration sensor structure of the present invention;

图7是本发明的一种三轴向振动传感器结构中刚挠结合电路板的结构示意图。Fig. 7 is a structural schematic diagram of a rigid-flexible circuit board in a triaxial vibration sensor structure of the present invention.

其中:1.壳体,2.刚挠结合电路板,3.导线,4.敏感芯体,5.束线管,6.束线螺钉,7.螺母,8.电缆,9.电连接器,10.垫圈,11.顶盖,12.刚性板,12-1.第一刚性板,12-2.第二刚性板,12-3.第三刚性板,12-4.第四刚性板,13.挠性板,13-1.第一挠性板,13-2.第二挠性板,13-3.第三挠性板。Among them: 1. Shell, 2. Rigid-flexible circuit board, 3. Wire, 4. Sensitive core, 5. Harness tube, 6. Beam screw, 7. Nut, 8. Cable, 9. Electrical connector , 10. Gasket, 11. Top cover, 12. Rigid plate, 12-1. First rigid plate, 12-2. Second rigid plate, 12-3. Third rigid plate, 12-4. Fourth rigid plate , 13. Flexible board, 13-1. First flexible board, 13-2. Second flexible board, 13-3. Third flexible board.

具体实施方式detailed description

下面结合附图和实施例对本发明进行进一步描述。The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

一种三轴向振动传感器结构,包括固定装置、信号传输装置和测量装置。测量装置固定连接在固定装置内部。信号传输装置从固定装置外部穿入到固定装置内部,与固定装置固定连接。信号传输装置还与测量装置连接。测量装置用于测量待测物体的加速度。固定装置用于对测量装置和信号传输装置提供支撑和保护。信号传输装置用于将测量装置测得的加速度信号传输给信号采集设备。A three-axis vibration sensor structure includes a fixing device, a signal transmission device and a measuring device. The measuring device is fixedly connected inside the fixture. The signal transmission device penetrates from the outside of the fixing device to the inside of the fixing device, and is fixedly connected with the fixing device. The signal transmission device is also connected to the measuring device. The measuring device is used to measure the acceleration of the object to be measured. Fixtures are used to support and protect measuring devices and signal transmission devices. The signal transmission device is used to transmit the acceleration signal measured by the measuring device to the signal acquisition device.

如图1和图2所示,固定装置包括壳体1、束线管5、束线螺钉6、螺母7、垫圈10和顶盖11。壳体1整体为上端开口的中空的长方体形。在壳体1长方体形两个相对的角上沿壳体1高度方向开有两个固定通孔。在壳体1长方体形后端面上开有通孔。顶盖11整体为正方形板状,盖合在壳体1的上端面上。顶盖11与壳体1固定通孔对应位置开有两个通孔,两个通孔分别与壳体1的固定通孔相配合,用于将振动传感器结构固定在待测物体上。如图3和图4所示,束线管5整体为“T”形,由上下两个中空的圆柱体组成,上端圆柱体的外径大于下端圆柱体的外径,上端圆柱体的内径大于下端圆柱体的内径,上端圆柱体的外径大于壳体1长方体形后端面上通孔的直径,下端圆柱体的外径小于等于壳体1长方体形后端面上通孔的直径。在上端圆柱体的前端开有通孔,该通孔内表面有内螺纹。下端圆柱体的外表面有外螺纹。上端圆柱体位于壳体1内部,下端圆柱体从壳体1长方体形后端面上通孔穿出。螺母7与束线管5下端圆柱体螺纹连接。螺母7用于将束线管5固定在壳体1上。如图5和图6所示,垫圈10整体为圆环形,圆环上开有缺口,圆环外径小于等于束线管5上端圆柱体的内径。垫圈10安装在束线管5上端圆柱体的内部,垫圈10圆环缺口与束线管5上端圆柱体前端的通孔错开。束线螺钉6为上端面沿直径方向开有豁口的M3型螺钉。束线螺钉6与束线管5上端圆柱体的前端开有的通孔螺纹连接,束线螺钉6的尖部与垫圈10的外表面相接触。As shown in FIG. 1 and FIG. 2 , the fixing device includes a housing 1 , a harness tube 5 , a harness screw 6 , a nut 7 , a washer 10 and a top cover 11 . The casing 1 is in the shape of a hollow cuboid with an open upper end as a whole. Two fixing through holes are opened along the height direction of the housing 1 on two opposite corners of the rectangular parallelepiped of the housing 1 . A through hole is provided on the rectangular parallelepiped rear end surface of the housing 1 . The top cover 11 is in the shape of a square plate as a whole, and covers the upper surface of the housing 1 . The top cover 11 is provided with two through holes corresponding to the fixing through holes of the housing 1, and the two through holes are respectively matched with the fixing through holes of the housing 1 to fix the vibration sensor structure on the object to be measured. As shown in Fig. 3 and Fig. 4, the harness tube 5 is in the shape of a "T" as a whole, consisting of two hollow cylinders up and down, the outer diameter of the upper cylinder is greater than the outer diameter of the lower cylinder, and the inner diameter of the upper cylinder is greater than that of the lower cylinder. The inner diameter of the lower end cylinder and the outer diameter of the upper end cylinder are greater than the diameter of the through hole on the cuboid rear end surface of the housing 1, and the outer diameter of the lower end cylinder is less than or equal to the diameter of the through hole on the cuboid rear end surface of the housing 1. A through hole is opened on the front end of the upper cylinder, and the inner surface of the through hole is provided with internal threads. The outer surface of the cylinder at the lower end has external threads. The upper cylinder is located inside the housing 1, and the lower cylinder passes through a through hole on the cuboid rear end surface of the housing 1. The nut 7 is threadedly connected with the cylinder at the lower end of the harness tube 5 . The nut 7 is used to fix the harness tube 5 on the housing 1 . As shown in FIG. 5 and FIG. 6 , the gasket 10 is in the shape of a ring as a whole, and there is a gap on the ring, and the outer diameter of the ring is smaller than or equal to the inner diameter of the upper cylinder of the harness tube 5 . Gasket 10 is installed in the inside of the cylinder at the upper end of the wire harness 5 , and the ring gap of the gasket 10 is staggered with the through hole at the front end of the cylinder at the upper end of the wire harness 5 . The wire harness screw 6 is an M3 type screw with a notch on the upper end surface along the diameter direction. The wire harness screw 6 is threadedly connected with the through hole provided on the front end of the upper cylinder of the wire harness tube 5 , and the tip of the wire harness screw 6 is in contact with the outer surface of the washer 10 .

在本实施例中,壳体1、束线管5、束线螺钉6、螺母7、垫圈10和顶盖11均采用铝合金材料制成。壳体1的厚度为1.5mm。壳体1和顶盖11的总尺寸为27×27×21mm。In this embodiment, the casing 1 , the harness tube 5 , the harness screw 6 , the nut 7 , the washer 10 and the top cover 11 are all made of aluminum alloy. The thickness of the casing 1 is 1.5 mm. The total size of the housing 1 and the top cover 11 is 27×27×21 mm.

如图2所示,信号传输装置包括导线3、电缆8和电连接器9。导线3的一端与测量装置连接,另一端与电缆8的一端连接。电缆8的另一端与电连接器的一端连接。电连接器的另一端与信号采集设备连接。导线3从固定装置的束线管5的内部穿过,同时穿过垫圈10的内部。As shown in FIG. 2 , the signal transmission device includes wires 3 , cables 8 and electrical connectors 9 . One end of the wire 3 is connected to the measuring device, and the other end is connected to one end of the cable 8 . The other end of the cable 8 is connected to one end of the electrical connector. The other end of the electrical connector is connected with the signal acquisition device. The wire 3 passes through the inside of the harness tube 5 of the fixing device, and at the same time passes through the inside of the gasket 10 .

在本实施例中,导线3、电缆8和电连接器9均为通用器件,可从市场上购得。In this embodiment, the wire 3, the cable 8 and the electrical connector 9 are all general-purpose components and can be purchased from the market.

如图7所示,测量装置包括刚挠结合电路板2和敏感芯体4。刚挠结合电路板2包括第一刚性板12-1、第二刚性板12-2、第三刚性板12-3、第四刚性板12-4、第一挠性板13-1、第二挠性板13-2和第三挠性板13-3。第一刚性板12-1与第三刚性板12-3通过第二挠性板13-2连接。第二刚性板12-2与第三刚性板12-3通过第一挠性板13-1连接。第三刚性板12-3与第四刚性板12-4通过第三挠性板13-3连接。第一刚性板12-1、第二刚性板12-2、第三刚性板12-3和第四刚性板12-4均采用四层板结构,由上至下依次为一层信号层、两层内部信号层和底层。信号层用于焊接元器件,内部信号层用于布线,底层用于与固定装置的壳体1连接并绝缘隔离。第一刚性板12-1、第二刚性板12-2、第三刚性板12-3和第四刚性板12-4均采用环氧玻璃布压板制成。第一挠性板13-1、第二挠性板13-2和第三挠性板13-3均采用双层板结构,两层板之间布线。第一挠性板13-1、第二挠性板13-2和第三挠性板13-3均采用聚酰亚胺材料制成。敏感芯体4共有三个,分别焊接在第一刚性板12-1、第二刚性板12-2和第三刚性板12-3的信号层上。敏感芯体4的电源端与刚性板12上的电压调整器连接,敏感芯体4的输出端与刚性板12上变换电路的前端连接。第一刚性板12-1固定在壳体1的右侧内壁上,第二刚性板12-2固定在壳体1的前侧内壁上,第四刚性板12-4固定在壳体1的左侧内壁上,第三刚性板12-3固定在壳体1的下侧内壁上。信号传输装置的导线3分别与第一刚性板12-1、第二刚性板12-2、第三刚性板12-3和第四刚性板12-4的信号层焊接。As shown in FIG. 7 , the measuring device includes a rigid-flex circuit board 2 and a sensitive core 4 . The rigid-flex circuit board 2 includes a first rigid board 12-1, a second rigid board 12-2, a third rigid board 12-3, a fourth rigid board 12-4, a first flexible board 13-1, a second The flexible board 13-2 and the third flexible board 13-3. The first rigid board 12-1 is connected to the third rigid board 12-3 through the second flexible board 13-2. The second rigid board 12-2 is connected to the third rigid board 12-3 through the first flexible board 13-1. The third rigid board 12-3 is connected to the fourth rigid board 12-4 through the third flexible board 13-3. The first rigid board 12-1, the second rigid board 12-2, the third rigid board 12-3 and the fourth rigid board 12-4 all adopt a four-layer board structure, which is a signal layer, two layer internal signal layer and bottom layer. The signal layer is used for soldering components, the internal signal layer is used for wiring, and the bottom layer is used for connection and isolation with the housing 1 of the fixing device. The first rigid board 12-1, the second rigid board 12-2, the third rigid board 12-3 and the fourth rigid board 12-4 are all made of epoxy glass cloth press board. The first flexible board 13 - 1 , the second flexible board 13 - 2 and the third flexible board 13 - 3 all adopt a double-layer board structure, with wiring between the two-layer boards. The first flexible board 13-1, the second flexible board 13-2 and the third flexible board 13-3 are all made of polyimide material. There are three sensitive cores 4, which are respectively welded on the signal layers of the first rigid board 12-1, the second rigid board 12-2 and the third rigid board 12-3. The power supply end of the sensitive core 4 is connected to the voltage regulator on the rigid board 12 , and the output end of the sensitive core 4 is connected to the front end of the conversion circuit on the rigid board 12 . The first rigid plate 12-1 is fixed on the right inner wall of the housing 1, the second rigid plate 12-2 is fixed on the front inner wall of the housing 1, and the fourth rigid plate 12-4 is fixed on the left side of the housing 1. On the side inner wall, the third rigid board 12 - 3 is fixed on the lower side inner wall of the housing 1 . The wires 3 of the signal transmission device are respectively welded to the signal layers of the first rigid board 12 - 1 , the second rigid board 12 - 2 , the third rigid board 12 - 3 and the fourth rigid board 12 - 4 .

在本实施例中,刚挠结合电路板2的电路连接关系根据GJB362B-2009确定,敏感芯体4采用SDI公司生产的1221型芯体实现。In this embodiment, the circuit connection relationship of the rigid-flexible circuit board 2 is determined according to GJB362B-2009, and the sensitive core 4 is realized by the 1221 core produced by SDI Company.

试验前,先将刚挠结合电路板2粘结在壳体1的四个内表面,焊接有敏感芯体4的三个刚性板12呈正交分布。再将电缆8连接的导线3通过壳体1后端面上的通孔穿入壳体1内部,将束线管5和垫圈10穿在电缆8上,将束线螺钉6的尖部顶紧垫圈10。然后将电缆8连接的导线3与刚性板12焊接,用螺母7将束线管5固定在壳体1上。最后将顶盖11粘结在壳体1的上端面上,传感器结构装配完成。Before the test, the rigid-flex circuit boards 2 are bonded to the four inner surfaces of the casing 1, and the three rigid boards 12 welded with the sensitive core 4 are arranged in an orthogonal manner. Then the wire 3 connected to the cable 8 is penetrated into the interior of the housing 1 through the through hole on the rear end surface of the housing 1, the wire harness tube 5 and the washer 10 are passed on the cable 8, and the tip of the wire harness screw 6 is pressed against the washer 10. Then the wire 3 connected to the cable 8 is welded to the rigid plate 12 , and the wire harness 5 is fixed on the housing 1 with the nut 7 . Finally, the top cover 11 is bonded to the upper surface of the housing 1, and the sensor structure assembly is completed.

试验时,通过两个M3螺钉将传感器结构固定在待测物体的被测面上,以测量待测物体在三个方向上的加速度。测得的结果经导线3、电缆8和电连接器9输出给信号采集设备。During the test, the sensor structure is fixed on the measured surface of the object to be measured by two M3 screws to measure the acceleration of the object to be measured in three directions. The measured results are output to the signal acquisition device through the wire 3 , the cable 8 and the electrical connector 9 .

本发明包括固定装置、信号传输装置和测量装置。通过采用四块刚性印制板和三块挠性板的一体化设计,实现了接口的可靠性连接,节省了传感器的内部空间,使得信号传输过程中的信号噪声明显减小。应用本发明生产了5只样机,并在振动传感器校准系统上进行了性能指标的验证,在带内不平度小于1dB的条件下,传感器的频响特性均能达到5KHz。经一体化设计后,五只样机的滤波功能和电压调整电路功能均工作正常,三个方向的灵敏度及最终输出信号中的噪声干燥值均满足试验的要求。The invention includes a fixing device, a signal transmission device and a measuring device. Through the integrated design of four rigid printed boards and three flexible boards, the reliable connection of the interface is realized, the internal space of the sensor is saved, and the signal noise during signal transmission is significantly reduced. 5 prototypes were produced by applying the invention, and the performance index was verified on the vibration sensor calibration system. Under the condition that the in-band unevenness is less than 1dB, the frequency response characteristics of the sensors can all reach 5KHz. After the integrated design, the filter function and voltage adjustment circuit function of the five prototypes all work normally, and the sensitivity in three directions and the noise dry value in the final output signal all meet the requirements of the test.

Claims (7)

1. a three-axial vibration sensor construction, is characterized in that: it comprises fixture, signal transmission dressPut and measurement mechanism; Measurement mechanism is fixedly connected on fixture inside; Signal transmitting apparatus is from fixtureOutside penetrates into fixture inside, is fixedly connected with fixture; Signal transmitting apparatus also with measurement mechanismConnect; Measurement mechanism is for measuring the acceleration of object under test; Fixture is used for measurement mechanism and signalTransmitting device provides support and protects; Signal transmitting apparatus passes for the acceleration signal that measurement mechanism is recordedBe defeated by signal collecting device.
2. three-axial vibration sensor construction according to claim 1, is characterized in that: described is fixingDevice comprises housing (1), bunch pipe (5), bunch screw (6), nut (7), packing ring (10) and topLid (11); Housing (1) entirety is the cuboid of the hollow of upper end open; At housing (1) cuboidOn two relative angles, have two fixed vias along housing (1) short transverse; At housing (1) cuboidOn shape rear end face, have through hole; Top cover (11) entirety is that square is tabular, covers the upper end in housing (1)On face; Top cover (11) has two through holes with housing (1) fixed via correspondence position, and two through holes respectivelyMatch with the fixed via of housing (1), for vibrating sensor structure is fixed on to object under test; BundleSpool (5) entirety is "T"-shaped, is made up of the cylindrical external diameter in upper end the cylinder of upper and lower two hollowsBe greater than the cylindrical external diameter in lower end, the cylindrical internal diameter in upper end is greater than the cylindrical internal diameter in lower end, upper end cylinderThe external diameter of body is greater than the diameter of through hole on housing (1) cuboid rear end face, and the cylindrical external diameter in lower end is less thanEqual the diameter of through hole on housing (1) cuboid rear end face; In upper end, cylindrical front end has through hole,This through-hole inner surface has internal thread; The cylindrical outer surface in lower end has external screw thread; Upper end cylinder is positioned at housing(1) inside, cylinder through hole from housing (1) cuboid rear end face in lower end passes; Nut (7) withBunch pipe (5) lower end cylinder is threaded; Nut (7) is for being fixed on housing (1) by bunch pipe (5)On; Packing ring (10) entirety is annular, has breach on annulus, and annulus external diameter is less than or equal to bunch pipe (5)The cylindrical internal diameter in upper end; Packing ring (10) is arranged on cylindrical inside, bunch pipe (5) upper end, packing ring (10)The through hole of annulus breach and bunch pipe (5) upper end cylinder front end staggers; Bunch screw (6) is upper surfaceHave the M3 type screw of gap along diametric(al); Bunch screw (6) is cylindrical with bunch pipe (5) upper endThe through hole whorl that front end has connects, and the tip of bunch screw (6) contacts with the outer surface of packing ring (10).
3. three-axial vibration sensor construction according to claim 2, is characterized in that: described housing(1), bunch pipe (5), bunch screw (6), nut (7) and top cover (11) all adopt aluminum alloy materialsMake; Packing ring (10) adopts soft aluminum to make; The thickness of housing (1) is 1.5mm; Housing (1)And the overall size of top cover (11) is 27 × 27 × 21mm.
4. three-axial vibration sensor construction according to claim 1, is characterized in that: described signalTransmitting device comprises wire (3), cable (8) and electric connector (9); One end and the measurement of wire (3)Device connects, and the other end is connected with the one end of cable (8); The other end of cable (8) and electric connectorOne end connects; The other end of electric connector is connected with signal collecting device; Wire (3) is from the bundle of fixtureThe inside of spool (5) is passed, and passes the inside of packing ring (10) simultaneously.
5. three-axial vibration sensor construction according to claim 1, is characterized in that: described measurementDevice comprises rigid-flexible combined circuit plate (2) and sensitive core body (4); Rigid-flexible combined circuit plate (2) comprisesOne rigid plate (12-1), the second rigid plate (12-2), the 3rd rigid plate (12-3), the 4th rigid plate (12-4),The first flex plate (13-1), the second flex plate (13-2) and the 3rd flex plate (13-3); The first rigid plate (12-1)Be connected by the second flex plate (13-2) with the 3rd rigid plate (12-3); The second rigid plate (12-2) and theThree rigid plate (12-3) connect by the first flex plate (13-1); The 3rd rigid plate (12-3) is firm with the 4thProperty plate (12-4) by the 3rd flex plate (13-3) connect; The first rigid plate (12-1), the second rigid plate(12-2), the 3rd rigid plate (12-3) and the 4th rigid plate (12-4) all adopt four-sheet structure, by upperExtremely, be followed successively by one deck signals layer, two-layer internal signal layer and bottom; Signals layer is used for welding component, inPortion's signals layer is for wiring, and bottom is for being connected and the isolation of insulating with the housing (1) of fixture; First scratchesProperty plate (13-1), the second flex plate (13-2) and the 3rd flex plate (13-3) all adopt double panel structure,Between two-ply, connect up; Sensitive core body (4) has three, is welded on respectively the first rigid plate (12-1),On the signals layer of two rigid plate (12-2) and the 3rd rigid plate (12-3); The power end of sensitive core body (4)Be connected the output of sensitive core body (4) and rigid plate (12) with the voltage adjuster in rigid plate (12)The front end of up conversion circuit connects; The first rigid plate (12-1) is fixed on the right side inwall of housing (1),The second rigid plate (12-2) is fixed on the front side inwall of housing (1), and the 4th rigid plate (12-4) is fixingIn the inner left wall of housing (1), the 3rd rigid plate (12-3) is fixed on the downside inwall of housing (1);The wire (3) of signal transmitting apparatus respectively with the first rigid plate (12-1), the second rigid plate (12-2),The signals layer welding of three rigid plate (12-3) and the 4th rigid plate (12-4).
6. three-axial vibration sensor construction according to claim 5, is characterized in that: described firstRigid plate (12-1), the second rigid plate (12-2), the 3rd rigid plate (12-3) and the 4th rigid plate (12-4)All adopt epoxy glass fabric pressing plate to make; The first flex plate (13-1), the second flex plate (13-2) and the 3rdFlex plate (13-3) all adopts polyimide material to make.
7. three-axial vibration sensor construction according to claim 5, is characterized in that: described is rigid-flexibleThe circuit connecting relation of combined circuit plate (2) is determined according to GJB362B-2009, sensitive core body (4) employing1221 core bodies that SDI company produces are realized.
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