CN105600741A - Method for preparing ordered polymer template - Google Patents
Method for preparing ordered polymer template Download PDFInfo
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- CN105600741A CN105600741A CN201511002707.7A CN201511002707A CN105600741A CN 105600741 A CN105600741 A CN 105600741A CN 201511002707 A CN201511002707 A CN 201511002707A CN 105600741 A CN105600741 A CN 105600741A
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- 229920000642 polymer Polymers 0.000 title claims abstract description 45
- 238000000034 method Methods 0.000 title claims abstract description 43
- 239000002904 solvent Substances 0.000 claims abstract description 48
- 239000011248 coating agent Substances 0.000 claims abstract description 19
- 238000000576 coating method Methods 0.000 claims abstract description 19
- 239000000758 substrate Substances 0.000 claims description 23
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 claims description 20
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 claims description 15
- -1 polypropylene Polymers 0.000 claims description 12
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 10
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 9
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 9
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 9
- 239000010949 copper Substances 0.000 claims description 9
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 claims description 8
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 claims description 8
- 229910052802 copper Inorganic materials 0.000 claims description 8
- 239000011521 glass Substances 0.000 claims description 8
- 239000011347 resin Substances 0.000 claims description 8
- 229920005989 resin Polymers 0.000 claims description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 7
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims description 6
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical group CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- VVJKKWFAADXIJK-UHFFFAOYSA-N Allylamine Chemical compound NCC=C VVJKKWFAADXIJK-UHFFFAOYSA-N 0.000 claims description 6
- 239000004793 Polystyrene Substances 0.000 claims description 6
- QARVLSVVCXYDNA-UHFFFAOYSA-N bromobenzene Chemical compound BrC1=CC=CC=C1 QARVLSVVCXYDNA-UHFFFAOYSA-N 0.000 claims description 6
- 238000004528 spin coating Methods 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 238000003618 dip coating Methods 0.000 claims description 5
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 5
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 5
- 239000004800 polyvinyl chloride Substances 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 claims description 4
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 4
- YNQLUTRBYVCPMQ-UHFFFAOYSA-N Ethylbenzene Chemical compound CCC1=CC=CC=C1 YNQLUTRBYVCPMQ-UHFFFAOYSA-N 0.000 claims description 4
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical group CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 claims description 4
- AMQJEAYHLZJPGS-UHFFFAOYSA-N N-Pentanol Chemical compound CCCCCO AMQJEAYHLZJPGS-UHFFFAOYSA-N 0.000 claims description 4
- MVPPADPHJFYWMZ-UHFFFAOYSA-N chlorobenzene Chemical compound ClC1=CC=CC=C1 MVPPADPHJFYWMZ-UHFFFAOYSA-N 0.000 claims description 4
- 229920002313 fluoropolymer Polymers 0.000 claims description 4
- 239000004811 fluoropolymer Substances 0.000 claims description 4
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 claims description 4
- 229920000915 polyvinyl chloride Polymers 0.000 claims description 4
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 claims description 4
- 150000004040 pyrrolidinones Chemical class 0.000 claims description 4
- ZAFNJMIOTHYJRJ-UHFFFAOYSA-N Diisopropyl ether Chemical compound CC(C)OC(C)C ZAFNJMIOTHYJRJ-UHFFFAOYSA-N 0.000 claims description 3
- 125000001340 2-chloroethyl group Chemical class [H]C([H])(Cl)C([H])([H])* 0.000 claims description 2
- AXPZIVKEZRHGAS-UHFFFAOYSA-N 3-benzyl-5-[(2-nitrophenoxy)methyl]oxolan-2-one Chemical compound [O-][N+](=O)C1=CC=CC=C1OCC1OC(=O)C(CC=2C=CC=CC=2)C1 AXPZIVKEZRHGAS-UHFFFAOYSA-N 0.000 claims description 2
- 239000004952 Polyamide Substances 0.000 claims description 2
- 239000004698 Polyethylene Substances 0.000 claims description 2
- 239000004743 Polypropylene Substances 0.000 claims description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 claims description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 2
- KXKVLQRXCPHEJC-UHFFFAOYSA-N acetic acid trimethyl ester Natural products COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 claims description 2
- 150000001408 amides Chemical class 0.000 claims description 2
- HPXRVTGHNJAIIH-UHFFFAOYSA-N cyclohexanol Chemical compound OC1CCCCC1 HPXRVTGHNJAIIH-UHFFFAOYSA-N 0.000 claims description 2
- 238000007606 doctor blade method Methods 0.000 claims description 2
- XXMIOPMDWAUFGU-UHFFFAOYSA-N hexane-1,6-diol Chemical compound OCCCCCCO XXMIOPMDWAUFGU-UHFFFAOYSA-N 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 238000010422 painting Methods 0.000 claims description 2
- 229920002647 polyamide Polymers 0.000 claims description 2
- 229920000573 polyethylene Polymers 0.000 claims description 2
- 229920005644 polyethylene terephthalate glycol copolymer Polymers 0.000 claims description 2
- 229920001155 polypropylene Polymers 0.000 claims description 2
- 229920002223 polystyrene Polymers 0.000 claims description 2
- 229920002635 polyurethane Polymers 0.000 claims description 2
- 239000004814 polyurethane Substances 0.000 claims description 2
- 229910052725 zinc Inorganic materials 0.000 claims description 2
- 239000011701 zinc Substances 0.000 claims description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
- 239000000243 solution Substances 0.000 abstract description 14
- 239000011259 mixed solution Substances 0.000 abstract description 4
- 238000001035 drying Methods 0.000 abstract description 3
- 238000007865 diluting Methods 0.000 abstract 1
- 239000002952 polymeric resin Substances 0.000 abstract 1
- 238000002791 soaking Methods 0.000 abstract 1
- 229920003002 synthetic resin Polymers 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 8
- 229920006254 polymer film Polymers 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 7
- 239000007788 liquid Substances 0.000 description 7
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 5
- 239000012620 biological material Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- ZHNUHDYFZUAESO-UHFFFAOYSA-N Formamide Chemical compound NC=O ZHNUHDYFZUAESO-UHFFFAOYSA-N 0.000 description 2
- 239000002033 PVDF binder Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000013256 coordination polymer Substances 0.000 description 2
- 238000011031 large-scale manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 238000002389 environmental scanning electron microscopy Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000000813 microcontact printing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229930015698 phenylpropene Natural products 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000000550 scanning electron microscopy energy dispersive X-ray spectroscopy Methods 0.000 description 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 1
- 239000013545 self-assembled monolayer Substances 0.000 description 1
- 238000001338 self-assembly Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000011877 solvent mixture Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00103—Structures having a predefined profile, e.g. sloped or rounded grooves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00214—Processes for the simultaneaous manufacturing of a network or an array of similar microstructural devices
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
The invention discloses a method for preparing an ordered polymer template. The method comprises following steps of dissolving polymer resin in 1-10 kinds of good solvents; preparing into a polymer solution with a mass percent concentration of 0.01-50%; coating the polymer solution on a base plate as a polymer coating; drying at a temperature of 0-100 degrees centigrade for 1-48 hours, thus obtaining a base plate with the polymer coating; diluting the 1-10 kinds of good solvents in 1-10 kinds of poor solvents, wherein the volume ratio of the good solvents and the poor solvents is 1:1-100, thus obtaining mixed solution; soaking the base plate with the polymer coating in the mixed solution for 0-30 min; drying at a temperature of 0-100 degrees centigrade for 1-48 hours, keeping the humidness at 25-95%, thus obtaining the ordered polymer template. According to the method provided by the invention, the ordered structure of the polymer template is controlled through selecting the suitable ratio of the good solvents and the poor solvents; and the method is has the advantages of good repeatability and low cost.
Description
Technical field
The invention belongs to field of semiconductor manufacture, relate to a kind of self assembly template, is that one is prepared orderly gathering specificallyThe method of compound template.
Background technology
Template is the key technology of conventional field of semiconductor manufacture in order. These correlate template technology are normally passed through photoetchingThe micro-patterning manufacturing of technique. But photoetching process cost of manufacture is high, and technique is loaded down with trivial details. Therefore, large quantities of non-photoetching skillsArt is arisen at the historic moment, for example: micro-contact-printing (μ CP), ink jet printing method and silk screen print method. But, ink-jet and serigraphyMethod be not to be suitable for the Micropicture that manufacturing dimension is less than 10 μ m. On the other hand, this method of μ CP can directly obtain chiThe very little Micropicture that is less than 10 μ m, does not need etching, and material consumption is also less. At present, this technology is widely usedSelf-assembled monolayer pattern (SAMs).
Summary of the invention
For above-mentioned technical problem of the prior art, the invention provides a kind of side of preparing orderly polymer templateMethod, the method for the described orderly polymer template of this preparation successively in prior art, prepare orderly template complex process,The technical problem that cost is high.
The invention provides a kind of method of preparing orderly polymer template, comprise the steps:
(1) fluoropolymer resin is dissolved in 1 ~ 10 kind of good solvent, is mixed with mass percent concentration and is 0.01 ~ 50% polymerizationThing solution; Described fluoropolymer resin is polyurethane, polystyrene, polypropylene, polyethylene, polymethyl methacrylate, poly-breastAcid, PETG, polyvinyl chloride, Merlon, Kynoar or polyamide;
(2) above-mentioned polymer solution is coated on substrate and does polymer coating, dry 1 ~ 48h at the temperature of 0 ~ 100 DEG C,To the substrate with polymer coating;
(3) 1 ~ 10 kind of good solvent is diluted in 1 ~ 10 kind of poor solvent, the volume ratio of good solvent and poor solvent be 1:1 ~100, obtain mixed liquor;
(4) substrate with polymer coating is soaked to 0 ~ 30min in above-mentioned mixed liquor, and dry under the condition of 0 ~ 100 DEG CDry 1 ~ 48h, keeps humidity 25 ~ 95%, obtains ordered polymer template;
Wherein, described good solvent is acetone, acetic acid, allyl amine, aniline, benzene, bromobenzene, chloroform, chlorobenzene, chloroethanes, hexamethyleneAlcohol, ethylbenzene, ether, n-hexane, methyl acetate, 1-METHYLPYRROLIDONE, pyrrolidones, P-Dioxane, pyridine, tetrahydrochysene furanMutter or toluene; Described poor solvent is n-butanol, two-n-butyl ether, 1,3-BDO, cyclohexanol, ethanol, ethylene glycol, firstAcid amides, Di Iso Propyl Ether, n-amyl alcohol, isopropyl alcohol, methyl alcohol or water.
Further, described substrate is aluminium flake, pottery, glass, copper, polymer sheet, electro-conductive glass, silicon wafer, silverSheet or zinc metal sheet.
Further, in step 2) in, the method for described coating be doctor blade method, coating finishing, dip coating orPerson's spin-coating method.
Further, the painting interval velocity of described doctor blade is 0.5 ~ 200mm/s.
Further, the speed of described dip-coating is that the time of 0.1 μ m/s ~ 200mm/s, dip-coating is 1s ~ 30min.
Further, the speed of described spin coating is 50 ~ 5000 to turn.
Conventionally the polymer pattern of expection is preparation-obtained by continuous coated and dry process, last polymerSurface topography is to be processed and determine with selective solvent by being separated of polymer sheet.
The thickness of coating and the coating number of plies can embody by table 1.
Table 1 coating layer thickness and be coated with the relation between excellent model
| NO.(is coated with excellent model) | μ m(thickness) | NO. (be coated with excellent model) | Μ m(thickness) |
| 3# | 6.86 | 12# | 27.4 |
| 4# | 9.14 | 14# | 32.0 |
| 5# | 11.4 | 16# | 36.6 |
| 6# | 13.7 | 18# | 41.1 |
| 7# | 16.0 | 20# | 45.7 |
| 8# | 18.3 | 22# | 50.3 |
| 9# | 20.6 | 24# | 54.8 |
| 10# | 22.9 | 26# | 59.4 |
Compared with the template of other types, polymer monomolecular film is easier to form, and more easily adapts to template. This processThe polymer providing is hexagon or circular pattern, can control by the ratio of selecting suitable good solvent and poor solventPolymer pattern, and this ratio is to choose on the basis of the solubility parameter of polymer. This kind of method has wellRepeatability and advantage cheaply.
The present invention utilizes good solvent/poor solvent system, can just can be had by large-scale production in a short period of timeOrder polymer template. Therefore, this method provides a kind of large-scale production line. Select suitable technological parameter utilizationThis kind of method can be prepared different polymer ordered templates.
The present invention compares with prior art, and its technological progress is significant. Method of the present invention is a kind of micro-figure of noveltyCase technology, can solve large-area micrographics manufacturing issue. And method of the present invention is that a kind of high-performance polymer is thinMembrane technology, can compete mutually with hard template technology aspect large area flexible electronic application. The invention solves current phase simultaneouslyThe limitation of pass process. The surface of micro-patterning not only can provide unique performance in addition, can also affect as intelligent surfaceApplication aspect biomaterial, Surface Engineering, photoelectron and sensing system. Method of the present invention is at semiconductor, aobviousThe manufacture on a large scale of showing device manufacture and aspect, biomaterial interface has most important meaning.
Brief description of the drawings
Fig. 1 is the stereoscan photograph of the thin polymer film that does in glass substrate.
Fig. 2 is the stereoscan photograph of the thin polymer film that does in silicon wafer substrate.
Fig. 3 is the stereoscan photograph of the thin polymer film that does in copper substrate.
Fig. 4 is the stereoscan photograph of the thin polymer film that does in ceramic substrate.
Fig. 5 is the SEM-EDS power spectrum of micro polymer pattern in copper substrate.
Concrete embodiment
Embodiment 1
Also prepare large area micro polymer pattern (template) thereon with simple glass as substrate, process comprises:
(1) pass through by polyvinyl chloride (PVC) resin dissolves in 4 kinds of good solvents the PS solution that preparation quality mark is 10%;
(2) PVC solution is spin-coated on simple glass, speed is 1000rpm, and then 50 DEG C of dry 24h, obtains A;
(3) by 4 kinds of good solvents are diluted in 2 kinds of poor solvents, be mixed with mixed liquid B;
(4) in above-mentioned mixed solution, process PVC coated glass with No. 9 rods, then dry 12h at 25 DEG C of temperature, in processKeeping humidity is 40%. The stereoscan photograph of thin polymer film as shown in Figure 1.
Wherein, with oxolane, allyl amine, benzene and toluene, as good solvent, ratio is 1:1:1:1, ethanol and formylAmine is as poor solvent, and ratio is 1:2. Good solvent in step (1) and (3) is same.
Embodiment 2
As substrate, and prepare large area polymer pattern (template) thereon with silicon wafer, process comprises:
(1) by by PLA (PLA) resin dissolves in 2 kinds of solvents, be 25% PLA solution thereby be mixed with mass fraction;
(2) with No. 22 rods, PLA solution is done to coating on silicon chip, and then dry 8h at 40 DEG C, A obtained;
(3), by 3 kinds of good solvents are diluted in 2 kinds of poor solvents, be mixed with volume fraction and be 50% solvent mixture;
(4) above-mentioned A substrate is soaked 5 minutes in above-mentioned mixed solution B, being coated with speed is 10mm/s, then under the condition of 35 DEG CDry 10h, in process, keeping humidity is 35%. The stereoscan photograph of thin polymer film as shown in Figure 2.
Wherein, solvent PLA being dissolved in is bromobenzene and chloroform (volume ratio is 2:3). Volume fraction is 50% solventThing is by oxolane, benzene and chloroform (volume ratio is 2:2:3) are mixed and made with hexamethylene alcohol and water (volume ratio is 3:5).
Embodiment 3
In copper substrate, prepare large area polymer pattern (template), process comprises:
(1) by PMMA resin dissolves in oxolane, prepare to obtain the mass fraction PMMA solution that is 5%;
(2) PMMA solution is coated on copper sheet, speed is 5mm/s, and then dry 1h at 70 DEG C, obtains A;
(3) 5 kinds of good solvents are diluted in 4 kinds of poor solvents, are mixed with volume fraction and are 10% mixed liquid B;
(4) above-mentioned A substrate is soaked to 3min in above-mentioned mixed liquid B, then use the speed spin coating of 200rpm, dry at 30 DEG C5h, in process, keeping humidity is 30%. The stereoscan photograph of thin polymer film as shown in Figure 3.
Wherein, 1-METHYLPYRROLIDONE, pyrrolidones, pyridine, benzene and toluene (volume ratio is 1:2:3:4) are as above-mentioned instituteNeed good solvent, ethanol, water, ethylene glycol, formamide (volume ratio is 5:1:3:1) are as required poor solvent.
Embodiment 4
In ceramic substrate, prepare large area polymer pattern (template), process comprises:
(1) by PVDF resin dissolves in 1-METHYLPYRROLIDONE, be prepared into mass fraction and be 30% solution;
(2) on ceramics base with the speed blade coating PVDF solution of 100mm/s, then, with 100 DEG C of dry 48h, obtain A;
(3), by 6 kinds of good solvents are diluted in 5 kinds of poor solvents, be mixed with volume fraction and be 70% solvent liquid B;
(4) above-mentioned A substrate is soaked to 30min in above-mentioned mixed liquid B, then use the speed spin coating of 100mm/s, at 100 DEG CDry 48h, in process, keeping humidity is 30%. The stereoscan photograph of thin polymer film as shown in Figure 4.
Wherein, (volume ratio is for 1-METHYLPYRROLIDONE, pyrrolidones, P-Dioxane, pyridine, oxolane and toluene1:2:3:4:5:6) as above-mentioned required good solvent, Di Iso Propyl Ether, methyl alcohol, isopropyl alcohol, second alcohol and water (volume ratio is 3:2:3:7:5) as poor solvent.
Embodiment 5
In copper substrate, prepare large area polymer pattern (template), process comprises:
(1) PS is dissolved in in benzene, to be mixed with mass fraction be 2% PS solution;
(2) with speed blade coating PS solution on PET of 10mm/s, and then 80 DEG C of dry 24h, A obtained;
(3) by by 4 kinds of solvent dilutions in 2 kinds of poor solvents, prepare to obtain the volume fraction solvent liquid B that is 40%;
(4) above-mentioned A substrate is soaked to 10min in above-mentioned mixed liquid B, then use the speed spin coating of 50mm/s, dry at 50 DEG CDry 48h, in process, keeping humidity is 50%.
Wherein, benzene, P-Dioxane, oxolane and toluene (volume ratio is 1:2:4:6) are as above-mentioned required good moltenAgent, first alcohol and water (volume ratio is 3:7) is as poor solvent.
The sample obtaining according to above-mentioned implementation step carries out SEM-EDX test, result as shown in Figure 5, the qualitative inspection of EDX power spectrumThe element of surveying selected areas is Cu and Pt, that is to say the Pt that composition sprays when only having substrate Cu and doing ESEM, there is no poly-Compound is residual. This class template is insertion type of the de-end, will be to sides such as biomaterial, Surface Engineering, photoelectron and sensing systemsThe exploitation of plane materiel material, has important Auxiliary Significance.
Claims (6)
1. prepare a method for orderly polymer template, it is characterized in that comprising the steps:
(1) fluoropolymer resin is dissolved in 1 ~ 10 kind of good solvent, is mixed with mass percent concentration and is 0.01 ~ 50% polymerizationThing solution; Described fluoropolymer resin is polyurethane, polystyrene, polypropylene, polyethylene, polymethyl methacrylate, poly-breastAcid, PETG, polyvinyl chloride, Merlon, Kynoar or polyamide;
(2) above-mentioned polymer solution is coated on substrate and does polymer coating, dry 1 ~ 48h at the temperature of 0 ~ 100 DEG C,To the substrate with polymer coating;
(3) 1 ~ 10 kind of good solvent is diluted in 1 ~ 10 kind of poor solvent, the volume ratio of good solvent and poor solvent be 1:1 ~100, obtain mixed liquor;
(4) substrate with polymer coating is soaked to 0 ~ 30min in above-mentioned mixed liquor, and dry under the condition of 0 ~ 100 DEG CDry 1 ~ 48h, keeps humidity 25 ~ 95%, obtains ordered polymer template;
Wherein, described good solvent is acetone, acetic acid, allyl amine, aniline, benzene, bromobenzene, chloroform, chlorobenzene, chloroethanes, hexamethyleneAlcohol, ethylbenzene, ether, n-hexane, methyl acetate, 1-METHYLPYRROLIDONE, pyrrolidones, P-Dioxane, pyridine, tetrahydrochysene furanMutter or toluene; Described poor solvent is n-butanol, two-n-butyl ether, 1,3-BDO, cyclohexanol, ethanol, ethylene glycol, firstAcid amides, Di Iso Propyl Ether, n-amyl alcohol, isopropyl alcohol, methyl alcohol or water.
2. a kind of method of preparing orderly polymer template according to claim 1, is characterized in that: described substrate isAluminium flake, pottery, glass, copper, polymer sheet, electro-conductive glass, silicon wafer, silver strip or zinc metal sheet.
3. a kind of method of preparing orderly polymer template according to claim 1, is characterized in that: in step 2) in,The method of described coating is doctor blade method, coating finishing, dip coating or spin-coating method.
4. a kind of method of preparing orderly polymer template according to claim 4, is characterized in that: described doctorThe painting interval velocity of sheet is 0.5 ~ 200mm/s.
5. a kind of method of preparing orderly polymer template according to claim 1, is characterized in that: described dip-coatingSpeed is that the time of 0.1 μ m/s ~ 200mm/s, dip-coating is 1s ~ 30min.
6. a kind of method of preparing orderly polymer template according to claim 1, is characterized in that: described spin coatingSpeed is 50 ~ 5000 to turn.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511002707.7A CN105600741B (en) | 2015-12-28 | 2015-12-28 | A kind of method for preparing ordered polymer template |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511002707.7A CN105600741B (en) | 2015-12-28 | 2015-12-28 | A kind of method for preparing ordered polymer template |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105600741A true CN105600741A (en) | 2016-05-25 |
| CN105600741B CN105600741B (en) | 2018-07-06 |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1882436A (en) * | 2003-11-19 | 2006-12-20 | 东燃化学株式会社 | Composite microporous membrane and its production method and use |
| CN101704957A (en) * | 2009-10-29 | 2010-05-12 | 南京工业大学 | A method for preparing polymer films with continuous nanopores |
| KR20150004371A (en) * | 2012-06-28 | 2015-01-12 | 가부시끼가이샤 구레하 | Method for producing resin film for non-aqueous electrolyte secondary battery and resin film for non-aqueous electrolyte secondary battery |
| CN104610565A (en) * | 2013-11-01 | 2015-05-13 | 天津工业大学 | Macromolecule porous film preparation method |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1882436A (en) * | 2003-11-19 | 2006-12-20 | 东燃化学株式会社 | Composite microporous membrane and its production method and use |
| CN101704957A (en) * | 2009-10-29 | 2010-05-12 | 南京工业大学 | A method for preparing polymer films with continuous nanopores |
| KR20150004371A (en) * | 2012-06-28 | 2015-01-12 | 가부시끼가이샤 구레하 | Method for producing resin film for non-aqueous electrolyte secondary battery and resin film for non-aqueous electrolyte secondary battery |
| CN104610565A (en) * | 2013-11-01 | 2015-05-13 | 天津工业大学 | Macromolecule porous film preparation method |
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