CN105598582A - A laser energy adjustment device and laser micromachining equipment - Google Patents
A laser energy adjustment device and laser micromachining equipment Download PDFInfo
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Abstract
Description
技术领域technical field
本发明涉及激光微加工技术领域，更具体的说，涉及一种激光能量调节装置以及激光微加工设备。The invention relates to the technical field of laser micromachining, and more specifically, to a laser energy adjustment device and laser micromachining equipment.
背景技术Background technique
在激光微加工过程中，对激光能量稳定性有非常高的要求，需要激光功率保持持续稳定，尤其在用激光钻FPC等材料的盲孔时，对脉冲激光的单脉冲能量稳定性以及一致性提出更高的要求，在利用激光加工的过程中，激光器可能会受到外界的各种因素以及内部器件老化等原因导致激光能量不够稳定或衰减。In the process of laser micromachining, there are very high requirements for the stability of laser energy, and the laser power needs to be kept stable, especially when using laser to drill blind holes in FPC and other materials, the single pulse energy stability and consistency of pulse laser Higher requirements are put forward. In the process of using laser processing, the laser may be affected by various external factors and internal device aging, which may cause the laser energy to be unstable or attenuated.
目前，在现有技术中对激光能量进行补偿或者调节的装置，只能通过小功率探头106采样激光脉冲，具有以下缺点，第一，利用功率探头106进行激光脉冲采样需要较长时间，第二，利用功率探头106进行激光脉冲采样之后计算得到的激光功率平均值，激光功率平均值是在一定时间段内对采集到的多个脉冲信号进行计算，但是每个脉冲信号是否稳定并不清楚，最终得到的激光功率平均值并不能真实反应单脉冲能量稳定性以及一致性。At present, the devices for compensating or adjusting laser energy in the prior art can only sample laser pulses through a low-power probe 106, which has the following disadvantages. First, it takes a long time to sample laser pulses using the power probe 106. Second, , using the power sensor 106 to calculate the average value of the laser power after sampling the laser pulses. The average value of the laser power is to calculate the multiple pulse signals collected within a certain period of time, but it is not clear whether each pulse signal is stable. The final average value of laser power cannot truly reflect the stability and consistency of single pulse energy.
发明内容Contents of the invention
为解决上述技术问题，本发明提供一种激光能量调节装置，能够在激光器发射激光脉冲对材料进行微加工过程中能够及时对激光能量进行调节，提高了调节速度，提高了调节准确度。In order to solve the above technical problems, the present invention provides a laser energy adjustment device, which can adjust the laser energy in time when the laser emits laser pulses to micro-process materials, thereby increasing the adjustment speed and accuracy.
为实现上述目的，本发明提供如下技术方案：To achieve the above object, the present invention provides the following technical solutions:
一种激光能量调节装置，包括：A laser energy adjustment device, comprising:
激光器，用于发射激光脉冲；a laser for emitting laser pulses;
分光镜，用于将所述激光脉冲分出采样激光脉冲；a spectroscope for splitting the laser pulses into sampling laser pulses;
单脉冲能量探头，用于实时采集所述采样激光脉冲，依据所述采样激光脉冲计算单脉冲激光能量值；a single-pulse energy probe, configured to collect the sampled laser pulses in real time, and calculate a single-pulse laser energy value based on the sampled laser pulses;
第一控制芯片，用于将所述单脉冲激光能量值与激光能量标准值进行比较，生成能量调节信号；The first control chip is used to compare the energy value of the single pulse laser with the standard value of laser energy to generate an energy adjustment signal;
激光能量调节器，设置于所述激光器出光口一侧且位于所述激光器与所述分光镜之间，用于依据所述能量调节信号调节所述激光器发射的激光脉冲的激光能量。The laser energy adjuster is arranged on the side of the light outlet of the laser and between the laser and the beam splitter, and is used to adjust the laser energy of the laser pulse emitted by the laser according to the energy adjustment signal.
优选地，在上述激光能量调节装置中，还包括：Preferably, in the above-mentioned laser energy adjustment device, it also includes:
功率探头，用于在预设时间段内采集所述分光镜分出的非采样激光脉冲，依据所述非采样激光脉冲计算激光功率平均值；A power sensor, used to collect the non-sampling laser pulses separated by the spectroscope within a preset time period, and calculate the average value of laser power according to the non-sampling laser pulses;
第二控制芯片，用于将所述激光功率平均值与所述激光能量标准值进行比较，依据比较结果生成能量校准信号，将所述能量校准信号发送至所述激光能量调节器。The second control chip is used to compare the average value of the laser power with the standard value of the laser energy, generate an energy calibration signal according to the comparison result, and send the energy calibration signal to the laser energy regulator.
优选地，在上述激光能量调节装置中，还包括：上位机，用于获取并存储所述激光能量标准值。Preferably, the above-mentioned laser energy adjustment device further includes: a host computer, configured to acquire and store the laser energy standard value.
优选地，在上述激光能量调节装置中，还包括：Preferably, in the above-mentioned laser energy adjustment device, it also includes:
通信模块，用于将所述激光能量标准值发送至所述第一控制芯片以及所述第二控制芯片。A communication module, configured to send the laser energy standard value to the first control chip and the second control chip.
优选地，在上述激光能量调节装置中，所述激光能量调节器包括：Preferably, in the above-mentioned laser energy adjustment device, the laser energy adjuster includes:
AOM驱动器，用于依据所述能量调节信号和/或所述能量校准信号生成调制信号；an AOM driver, configured to generate a modulation signal according to the energy adjustment signal and/or the energy calibration signal;
声光介质晶体，用于接收所述激光器的激光脉冲，并依据所述调制信号调节所述激光能量。The acousto-optic medium crystal is used to receive the laser pulse of the laser, and adjust the laser energy according to the modulation signal.
优选地，在上述激光能量调节装置中，所述声光介质晶体为二氧化硅晶体。Preferably, in the above-mentioned laser energy adjustment device, the acousto-optic medium crystal is a silicon dioxide crystal.
优选地，在上述激光能量调节装置中，还包括设置于所述激光器与所述能量调节器之间的扩束镜。Preferably, the above-mentioned laser energy adjustment device further includes a beam expander arranged between the laser and the energy adjuster.
优选地，在上述激光能量调节装置中，还包括：Preferably, in the above-mentioned laser energy adjustment device, it also includes:
A/D转换器，用于将所述单脉冲激光能量值对应的电流信号转换为数字信号，并将所述数字信号发送至所述第一控制芯片。The A/D converter is used to convert the current signal corresponding to the energy value of the single pulse laser into a digital signal, and send the digital signal to the first control chip.
优选地，在上述激光能量调节装置中，还包括：Preferably, in the above-mentioned laser energy adjustment device, it also includes:
D/A转换器，用于将所述能量调节信号对应的数字信号转换为模拟信号，并将所述模拟信号发送至所述激光能量调节器。The D/A converter is used to convert the digital signal corresponding to the energy adjustment signal into an analog signal, and send the analog signal to the laser energy adjuster.
本发明还提供一种激光微加工设备，包括上述任一项所述的激光能量调节装置。The present invention also provides a laser micromachining device, including the laser energy adjustment device described in any one of the above.
从上述技术方案可以看出，本发明所提供的一种激光能量调节装置，包括：激光器，用于发射激光脉冲；分光镜，用于将所述激光脉冲分出采样激光脉冲；单脉冲能量探头，用于实时采集所述采样激光脉冲，依据所述采样激光脉冲计算单脉冲激光能量值；第一控制芯片，用于将所述单脉冲激光能量值与激光能量标准值进行比较，生成能量调节信号；激光能量调节器，设置于所述激光器出光口一侧且位于所述激光器与所述分光镜之间，用于依据所述能量调节信号调节所述激光器发射的激光脉冲的激光能量。It can be seen from the above technical solutions that a laser energy adjustment device provided by the present invention includes: a laser for emitting laser pulses; a beam splitter for separating the laser pulses into sampling laser pulses; a single pulse energy probe , used to collect the sampled laser pulses in real time, and calculate the single-pulse laser energy value according to the sampled laser pulses; the first control chip is used to compare the single-pulse laser energy value with the laser energy standard value to generate an energy adjustment signal; a laser energy regulator, disposed on the side of the laser outlet and between the laser and the beam splitter, for adjusting the laser energy of the laser pulses emitted by the laser according to the energy adjustment signal.
在利用本发明提供的激光能量调节装置时，通过单脉冲能量探头实时采集采样激光脉冲，计算单脉冲激光能量值，单脉冲激光能量值能够反映每个时间点的脉冲激光能量，而不是某一段时间内的平均值，提高了激光能量的准确率，同时单脉冲能量探头能够快速采集分光镜分出的采样激光脉冲，提高了激光能量调节的速度，第一控制芯片将单脉冲激光能量值与激光能量标准值进行比较生成能量调节信号，激光能量调节器依据所述能量调节信号准确调节激光能量。When using the laser energy adjustment device provided by the present invention, the single pulse energy probe is used to collect and sample laser pulses in real time, and calculate the single pulse laser energy value. The single pulse laser energy value can reflect the pulse laser energy at each time point, rather than a certain period of time. The average value within the time improves the accuracy of the laser energy. At the same time, the single pulse energy probe can quickly collect the sampled laser pulses separated by the spectroscope, which improves the speed of laser energy adjustment. The first control chip compares the single pulse laser energy value with the The laser energy standard value is compared to generate an energy adjustment signal, and the laser energy regulator accurately adjusts the laser energy according to the energy adjustment signal.
附图说明Description of drawings
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据提供的附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only It is an embodiment of the present invention, and those skilled in the art can also obtain other drawings according to the provided drawings without creative work.
图1为本发明实施例提供的一种激光能量调节装置示意图。Fig. 1 is a schematic diagram of a laser energy adjustment device provided by an embodiment of the present invention.
具体实施方式detailed description
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
请参阅图1，图1为本发明实施例提供的一种激光能量调节装置示意图。Please refer to FIG. 1 . FIG. 1 is a schematic diagram of a laser energy adjustment device provided by an embodiment of the present invention.
在一种具体的实施方式中，提供了一种激光能量调节装置，包括：激光器101，用于发射激光脉冲；分光镜104，用于将所述激光脉冲分出采样激光脉冲；单脉冲能量探头105，用于实时采集所述采样激光脉冲，依据所述采样激光脉冲计算单脉冲激光能量值；第一控制芯片，用于将所述单脉冲激光能量值与激光能量标准值进行比较，生成能量调节信号；激光能量调节器103，设置于所述激光器101出光口一侧且位于所述激光器101与所述分光镜104之间，用于依据所述能量调节信号调节所述激光器101发射的激光脉冲的激光能量。In a specific embodiment, a laser energy adjustment device is provided, including: a laser 101, used to emit laser pulses; a beam splitter 104, used to split the laser pulses into sampling laser pulses; a single pulse energy probe 105, for collecting the sampled laser pulses in real time, and calculating a single-pulse laser energy value according to the sampled laser pulses; the first control chip is used for comparing the single-pulse laser energy value with a laser energy standard value to generate energy Adjustment signal; laser energy adjuster 103, arranged on the side of the light outlet of the laser 101 and between the laser 101 and the beam splitter 104, for adjusting the laser emitted by the laser 101 according to the energy adjustment signal Pulsed laser energy.
具体的，激光器101包括但不限于脉冲激光器101，激光脉冲重复频率为0～250kHz，功率为0～25W，或者大于25W，单脉冲能量的稳定性要求±1％以内。在利用激光器101对平台上的材料进行微加工时，打开激光器101，激光脉冲通过分光镜104，被百分之一的分光镜104分出采样激光脉冲，采样激光脉冲是激光脉冲的百分之一，通过单脉冲能量探头105实时采集采样激光脉冲，依据所述采样激光脉冲计算单脉冲激光能量值，第一控制芯片将所述单脉冲激光能量值与激光能量标准值进行比较，生成能量调节信号，如果比较结果在阈值范围内，激光能量调节器103对激光脉冲不进行调节，如果比较结果超过了阈值范围，生成能量调节信号，激光能量调节器103依据能量调节信号调节所述激光器101发射的激光脉冲的激光能量。在利用本发明提供的激光能量调节装置时，通过单脉冲能量探头105实时采集采样激光脉冲，计算单脉冲激光能量值，单脉冲激光能量值能够反映每个时间点的脉冲激光能量，而不是某一段时间内的平均值，同时单脉冲能量探头105能够快速采集分光镜104分出的采样激光脉冲，第一控制芯片将单脉冲激光能量值与激光能量标准值进行比较生成能量调节信号，激光能量调节器103依据所述能量调节信号准确调节激光能量。本发明提供的激光能量调节装置实现了激光器101在对材料进行微加工的过程中，在不影响激光脉冲加工的情况下，利用单脉冲能量探头105采集一小部分激光脉冲作为采样激光脉冲，对每一个时间点采集的激光脉冲进行调节，提高了调节速度，同时提高了调节准确度。Specifically, the laser 101 includes but not limited to a pulsed laser 101, the laser pulse repetition frequency is 0-250kHz, the power is 0-25W, or greater than 25W, and the stability of the single pulse energy is required to be within ±1%. When using the laser 101 to micro-process the material on the platform, the laser 101 is turned on, the laser pulse passes through the beam splitter 104, and the sampling laser pulse is separated by the 1% beam splitting mirror 104, and the sampling laser pulse is 1% of the laser pulse 1. Collect sampled laser pulses in real time through the single-pulse energy probe 105, calculate the single-pulse laser energy value based on the sampled laser pulses, and the first control chip compares the single-pulse laser energy value with the laser energy standard value to generate an energy adjustment signal, if the comparison result is within the threshold range, the laser energy regulator 103 does not adjust the laser pulse, if the comparison result exceeds the threshold range, an energy adjustment signal is generated, and the laser energy regulator 103 adjusts the laser 101 to emit according to the energy adjustment signal The laser energy of the laser pulse. When using the laser energy adjustment device provided by the present invention, the single-pulse energy probe 105 collects and samples laser pulses in real time, and calculates the single-pulse laser energy value. The single-pulse laser energy value can reflect the pulse laser energy at each time point, rather than a certain The average value within a period of time, while the single pulse energy probe 105 can quickly collect the sampled laser pulses separated by the spectroscope 104, the first control chip compares the single pulse laser energy value with the laser energy standard value to generate an energy adjustment signal, the laser energy The adjuster 103 accurately adjusts the laser energy according to the energy adjustment signal. The laser energy adjustment device provided by the present invention enables the laser 101 to use the single pulse energy probe 105 to collect a small part of the laser pulses as sampling laser pulses without affecting the laser pulse processing during the micromachining process of the material. The laser pulses collected at each time point are adjusted, which improves the adjustment speed and improves the adjustment accuracy at the same time.
进一步的，在上述激光能量调节装置中，还包括：功率探头106，用于在预设时间段内采集所述分光镜104分出的非采样激光脉冲，依据所述非采样激光脉冲计算激光功率平均值；第二控制芯片，用于将所述激光功率平均值与所述激光能量标准值进行比较，依据比较结果生成能量校准信号，将所述能量校准信号发送至所述激光能量调节器103。Further, in the above-mentioned laser energy adjustment device, it also includes: a power sensor 106, which is used to collect the non-sampling laser pulses split by the spectroscope 104 within a preset time period, and calculate the laser power according to the non-sampling laser pulses Average value; the second control chip is used to compare the average value of the laser power with the standard value of the laser energy, generate an energy calibration signal according to the comparison result, and send the energy calibration signal to the laser energy regulator 103 .
具体的，激光器101发出的激光脉冲可能会因为激光器101本身老化等原因导致激光能量衰减，因此，单脉冲能量探头105获取的采样激光脉冲是激光能量衰减后的激光脉冲，为了提高单脉冲能量探头105对采样激光脉冲采集的准确率，避免因采样激光脉冲的衰减导致后续能量调节信号的误差，本实施方式通过功率探头106采集所述分光镜104分出的非采样激光脉冲，计算激光功率平均值，将所述激光功率平均值与所述激光能量标准值进行比较，进而通过激光能量调节器103对激光能量进行校准，将衰减后的激光脉冲校正为标准激光脉冲，即激光能量达到激光能量标准值。Specifically, the laser pulses sent by the laser 101 may cause laser energy attenuation due to the aging of the laser 101 itself. Therefore, the sampled laser pulses obtained by the single pulse energy probe 105 are laser pulses after laser energy attenuation. 105 Accuracy of sampled laser pulse acquisition, to avoid errors in subsequent energy adjustment signals caused by the attenuation of sampled laser pulses. In this embodiment, the power probe 106 is used to collect the non-sampled laser pulses separated by the spectroscope 104, and the average laser power is calculated. Value, the average value of the laser power is compared with the standard value of the laser energy, and then the laser energy is calibrated by the laser energy regulator 103, and the attenuated laser pulse is corrected to the standard laser pulse, that is, the laser energy reaches the laser energy standard value.
进一步的，还包括：上位机108，用于获取并存储激光能量标准值。Further, it also includes: a host computer 108, which is used to obtain and store the standard value of laser energy.
进一步的，为了快速传输数据，在上述激光能量调节装置中，还包括：通信模块，用于将所述激光能量标准值发送至所述第一控制芯片以及所述第二控制芯片。Further, in order to transmit data quickly, the above-mentioned laser energy adjustment device further includes: a communication module, configured to send the laser energy standard value to the first control chip and the second control chip.
进一步的，在上述激光能量调节装置中，所述激光能量调节器103包括：AOM驱动器，用于依据所述能量调节信号和/或所述能量校准信号生成调制信号；声光介质晶体，用于接收所述激光器101的激光脉冲，并依据所述调制信号调节所述激光能量。进一步的，所述声光介质晶体为二氧化硅晶体。Further, in the above-mentioned laser energy adjustment device, the laser energy adjuster 103 includes: an AOM driver for generating a modulation signal according to the energy adjustment signal and/or the energy calibration signal; an acousto-optic medium crystal for receiving laser pulses from the laser 101, and adjusting the laser energy according to the modulation signal. Further, the acousto-optic medium crystal is silicon dioxide crystal.
具体的，激光能量调节器103采用声光的技术对激光进行外调制的技术，主要包括两个部分，AOM驱动器和声光介质晶体，激光脉冲进入二氧化硅晶体，AOM驱动器发出射调制信号加载到晶体上，一部分激光偏转一定角度后发生布拉格衍射，出射的一级衍射光为调节后的激光脉冲。Specifically, the laser energy regulator 103 uses acousto-optic technology to externally modulate the laser. It mainly includes two parts, the AOM driver and the acousto-optic medium crystal. The laser pulse enters the silicon dioxide crystal, and the AOM driver sends out an emission modulation signal to load On the crystal, a part of the laser light is deflected by a certain angle and undergoes Bragg diffraction, and the emitted first-order diffracted light is the adjusted laser pulse.
进一步的，在上述激光能量调节装置中，还包括设置于所述激光器101与所述能量调节器之间的扩束镜102。Further, the above laser energy adjustment device further includes a beam expander 102 arranged between the laser 101 and the energy adjuster.
进一步的，在上述激光能量调节装置中，还包括：A/D转换器，用于将所述单脉冲激光能量值对应的电流信号转换为数字信号，并将所述数字信号发送至所述第一控制芯片。Further, in the above-mentioned laser energy adjustment device, it also includes: an A/D converter, which is used to convert the current signal corresponding to the single pulse laser energy value into a digital signal, and send the digital signal to the first a control chip.
进一步的，在上述激光能量调节装置中，还包括：D/A转换器，用于将所述能量调节信号对应的数字信号转换为模拟信号，并将所述模拟信号发送至所述激光能量调节器103。Further, in the above-mentioned laser energy adjustment device, it also includes: a D/A converter, which is used to convert the digital signal corresponding to the energy adjustment signal into an analog signal, and send the analog signal to the laser energy adjustment device 103.
具体的，采集板107上包括第一控制芯片、第二控制芯片、A/D转换器、D/A转换器、电源模块以及通信模块等，A/D转换器的作用是将单脉冲能量探头105输出的电流信号转换成数字信号，实现数据的模数转换，激光能量调节器103需要通过0-1.0V的模拟信号来进行调节，因此发送给激光能量调节器103的数字信号需要转换为模拟信号，选用D/A转换器来实现。Specifically, the acquisition board 107 includes a first control chip, a second control chip, an A/D converter, a D/A converter, a power supply module, and a communication module, etc., and the function of the A/D converter is to convert the single pulse energy probe The current signal output by 105 is converted into a digital signal to realize the analog-to-digital conversion of data. The laser energy regulator 103 needs to be adjusted by an analog signal of 0-1.0V, so the digital signal sent to the laser energy regulator 103 needs to be converted into an analog signal. Signal, choose D/A converter to realize.
本发明提供一种激光能量调节装置，能够在激光器101发射激光脉冲对材料进行微加工过程中能够及时对激光能量进行调节，提高了调节速度，提高了调节准确度。The present invention provides a laser energy adjustment device, which can adjust the laser energy in time when the laser 101 emits laser pulses to micro-process materials, thereby increasing the adjustment speed and accuracy.
本发明还提供一种激光微加工设备，包括上述激光能量调节装置，激光微加工设备能够通过激光能量调节装置实现打孔、切割以及焊接等功能，使得打孔、切割以及焊接等功能更加精确快速。The present invention also provides a laser micromachining device, which includes the above-mentioned laser energy adjustment device. The laser micromachining equipment can realize the functions of drilling, cutting and welding through the laser energy adjustment device, so that the functions of drilling, cutting and welding are more accurate and faster. .
本说明书中各个实施例采用递进的方式描述，每个实施例重点说明的都是与其他实施例的不同之处，各个实施例之间相同相似部分互相参见即可。Each embodiment in this specification is described in a progressive manner, each embodiment focuses on the difference from other embodiments, and the same and similar parts of each embodiment can be referred to each other.
对所公开的实施例的上述说明，使本领域专业技术人员能够实现或使用本发明。对这些实施例的多种修改对本领域的专业技术人员来说将是显而易见的，本文中所定义的一般原理可以在不脱离本发明的精神或范围的情况下，在其它实施例中实现。因此，本发明将不会被限制于本文所示的这些实施例，而是要符合与本文所公开的原理和新颖特点相一致的最宽的范围。The above description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the present invention will not be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
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