CN105555996B

CN105555996B - Substrate processing device and film forming device

Info

Publication number: CN105555996B
Application number: CN201480047603.5A
Authority: CN
Inventors: 大野哲宏; 月川庆澄; 立川晋辅; 新井进; 武井応树; 矶部辰德; 清田淳也
Original assignee: Ulvac Inc
Current assignee: Ulvac Inc
Priority date: 2013-09-26
Filing date: 2014-09-17
Publication date: 2017-03-22
Anticipated expiration: 2034-09-17
Also published as: JP6009685B2; TWI575095B; KR20170017004A; WO2015045980A1; KR101763906B1; CN105555996A; TW201516170A; KR20160042168A; JPWO2015045980A1

Abstract

The present invention provides a substrate processing device and a film forming device. The substrate processing device is provided with a casing (21) and a hollow swing arm (23) located inside the casing. The swing arm includes a hollow swing center shaft part (23a) connected to the casing and a hollow linking shaft part (23b) representing the swinging end. The substrate processing device is further provided with a processing part (22) located inside the casing and adapted to move within a processing space, which faces the substrate, in a direction orthogonal to the axial direction (P) of the swing center shaft part and process the substrate. The processing part is linked to the linking shaft part so that the linking shaft part (23b) is able to move parallel to the processing part so as to track the movement of the processing part. Therefore, the movement of the processing part (22) causes the swing arm (23) to swing. The substrate processing device is further provided with a connection line located inside the swing arm (23), connected through the interior of the swinging center shaft part (23a) to a utility located outside the casing, and connected through the interior of the linking shaft part (23b) to the processing part.

Description

Substrate board treatment and film formation device

Technical field

The present invention relates to a kind of film forming that film is formed to the substrate board treatment of substrate enforcement process and on substrate Device.

Background technology

As the sputter equipment that film is formed on substrate, such as described in patent document 1, it is known to make comprising target The sputter equipment that negative electrode is moved from the one side on an opposite side of thereon pair toward another side.In the sputter equipment, negative electrode Move while releasing sputtering particle to substrate.

Prior art literature

Patent document

Patent document 1：No. 2010/044257 specification of International Publication No.

The content of the invention

Invent problem to be solved

But, sputter equipment has connection line, and the connection line includes the power line to target supply electric power and right Pipe arrangement of surface supply sputter gas of target etc..In above-mentioned sputter equipment, whenever movable cathode, connection line is from matching somebody with somebody The outside for being equipped with the chamber of negative electrode is drawn into inner side or is drawn out from the Inside To Outside of chamber corresponding with the movement of negative electrode Amount.Also, whenever movable cathode, as connection line is pullled or connection line and the part generation for guiding connection line Friction, so connection line is repeatedly subjected to mechanicalness load.

In addition, be not limited to the film formation devices such as sputter equipment, as long as the processing unit processed by substrate with real estate To space movement substrate board treatment, above-mentioned situation can occur.

The technology of the present invention, its purpose are to provide a kind of can reduction because being connected with the processing unit processed to substrate The substrate board treatment of mechanicalness that connection line is passed in and out between the inside of framework and framework outside and born load and into Film device.

Means for solving the problems

One mode of the substrate board treatment in the technology of the present invention, possess framework and inside the framework in Empty swing arm.The swing arm includes the hollow oscillation center axle portion being connected with the framework and as the hollow of swinging end Link axle portion.Also, substrate board treatment possesses processing unit, which is located inside the framework, and at the place relative with substrate Reason space, is processed to the substrate enforcement along the direction movement orthogonal with the axial direction of the oscillation center axle portion.The processing unit With the company in the way of enabling the link axle portion translate with the processing unit so that the moving for processing unit can be followed Knot axle portion links, and is swung the swing arm by the moving for processing unit.Also, substrate board treatment possesses Connection line, the connection line are located inside the swing arm, by inside the oscillation center axle portion with positioned at the frame External body shared device connection, and by it is described link axle portion inside and be connected with the processing unit.

According to this composition, when processing unit is translated together with link axle portion, swing arm is put centered on oscillation center axle portion It is dynamic.Now, on the one hand the connection line in swing arm follows the connection for swinging on the one hand holding and processing unit of swing arm. Therefore, connection line is passed in and out hardly between the inside and outside of swing arm by oscillation center axle portion.That is, even Link is followed the swing of swing arm and is swung centered on oscillation center axle portion.Thus, it is possible to make the inside of framework with it is outer Displacement of the variable quantity of the length of the connection line changed between portion less than processing unit.As a result, connecting line can be reduced Road is because passing in and out the mechanicalness born and framework outside between inside framework load.

One mode of the film formation device in the technology of the present invention, possesses framework and hollow inside the framework Swing arm.The swing arm includes the hollow oscillation center axle portion being connected with the framework and the hollow company as swinging end Knot axle portion.Also, film formation device possesses film forming portion, the film forming portion is located inside the framework, and in the process relative with substrate Space, moves along the direction orthogonal with the axial direction of the oscillation center axle portion, by towards substrate releasing filmogen Film is formed on the substrate.The film forming portion enable with following the moving for film forming portion it is described link axle portion with it is described into The mode of film portion translation is linked with the link axle portion, and is put the swing arm by the moving for film forming portion It is dynamic.Also, film formation device possesses connection line, the connection line is located inside the swing arm, by the oscillation center axle Be connected with the shared device outside the framework inside portion, and by described link inside axle portion with the film forming portion Connection.

According to this composition, when film forming portion is translated together with link axle portion, swing arm is put centered on oscillation center axle portion It is dynamic.Now, on the one hand the connection line in swing arm follows the connection for swinging on the one hand holding and film forming portion of swing arm. Therefore, connection line is passed in and out hardly between the inside and outside of swing arm by oscillation center axle portion.That is, connection Circuit is followed the swing of swing arm and is swung centered on oscillation center axle portion.Then, in the inside of framework and the anaplasia of outside Displacement of the variable quantity of the length of the connection line of change less than film forming portion.As a result, connection line can be reduced because of turnover The mechanicalness load born and framework outside between inside framework.

Preferably, in aforesaid substrate processing meanss, the processing unit possesses e axle supporting portion, and the e axle supporting portion is can make The link axle portion supports link axle portion relative to the mode that the processing unit rotates.And, it is preferable that the swing arm possesses Telescoping mechanism, the telescoping mechanism make the link axle portion relative to oscillation center axle portion displacement, and make in the swing Heart axle portion is flexible with the distance between the link axle portion.In this composition, telescoping mechanism makes the oscillation center axle portion and institute State link the distance between axle portion to be changed according to the distance between the oscillation center axle portion and described e axle supporting portion.

According to this composition, when processing unit is translated together with link axle portion, the telescoping mechanism of swing arm makes oscillation center axle Portion changes according to the distance between oscillation center axle portion and e axle supporting portion with the distance between axle portion is linked.Thereby, it is possible to make The link axle portion of swing arm follows the movement of processing unit.

Preferably, in aforesaid substrate processing meanss, the connection line is made up of multiple railway superstructures elements.Also, Preferably, the plurality of railway superstructures element includes：Rigid body distribution in the middle of 2, which is configured in inside the swing arm, and respectively It is fixed on the swing arm, so as to coordinate the flexible of the swing arm carried out by the telescoping mechanism, and makes each other Distance stretch.And, it is preferable that the plurality of railway superstructures element includes middle flexible circuit, and which is configured in the swing Inside arm, and it is connected to described in the middle of 2 between rigid body distributions, the flexible circuit in the centre has pliability, so as to correspond to In the middle of described 2, the distance between rigid body distribution increases and makes deflection diminish.

According to this composition, when swing arm is flexible, the anaplasia of the deflection of the middle flexible circuit rigid body distributions in the middle of 2 Change.Therefore, by the change of the difference of the length of the length and swing arm of the connection line inside swing arm by middle flexible circuit Deflection change absorb.Then, the length of the connection line passed in and out and outside between inside swing arm is made to shorten.

Preferably, in aforesaid substrate processing meanss, the oscillation center axle portion is set to cardinal extremity rotating part, and the cardinal extremity revolves Transfer part is rotated relative to the framework centered on the rotary shaft along the axial direction of the oscillation center axle portion.And, it is preferable that The connection line includes：Cardinal extremity rotates distribution, and which is rigid body, and the cardinal extremity rotation distribution is fixed on the cardinal extremity rotating part, and Follow the rotation of the cardinal extremity rotating part and rotate；Cardinal extremity permanent wiring, which is rigid body, and the cardinal extremity permanent wiring is fixed on described Framework；And the flexible circuit of cardinal extremity, which is can arrange in the way of deadweight bends, and is connected to the cardinal extremity permanent wiring Between cardinal extremity rotation distribution, and increase corresponding to the distance between the cardinal extremity rotation distribution and described cardinal extremity permanent wiring Plus and make deflection diminish.

According to this composition, connection line can be suppressed to distort because of the rotation of cardinal extremity rotating part.Therefore, it is possible to reduce connection The mechanicalness load born by circuit.

Preferably, in aforesaid substrate processing meanss, the link axle portion is set to top rotating part, the top rotating part Centered on the rotary shaft along the axial direction of the oscillation center axle portion, and rotate relative to the processing unit.And, it is preferable that The connection line possesses：Top rotates distribution, and which is rigid body, and the top rotation distribution is fixed on the top rotating part, and Follow the rotation of the top rotating part and rotate；Top translates distribution, and which is rigid body, and the top translation distribution is fixed on described Processing unit, and follow the movement of the processing unit and translate with the processing unit；And the flexible circuit in top, its with can because deadweight And the mode for bending is arranged, and be connected between top rotation distribution and top translation distribution, and corresponding to described Top rotates distribution and translates the increase of the distance between distribution with the top and make deflection diminish.

According to this composition, connection line can be suppressed to distort because of the rotation of top rotating part.Therefore, it is possible to reduce connection The mechanicalness load born by circuit.

Description of the drawings

Fig. 1 be by the process object of the Inner Constitution of the sputter equipment of the 1st embodiment of film formation device and sputter equipment, The pie graph that i.e. substrate is schematically shown together.

Fig. 2 is the figure being had an X-rayed to the internal structure of framework from the direction relative with the substrate in framework.

Fig. 3 is the figure being had an X-rayed to the internal structure of framework from the direction relative with the substrate in framework.

Fig. 4 is the figure being had an X-rayed to the internal structure of framework from the direction relative with the substrate in framework.

Fig. 5 is the short transverse of the swing arm for illustrating that the sputter equipment of the 2nd embodiment along film formation device has The sectional view of cross section structure.

Fig. 6 is the front view of the Facad structure before illustrating swing arm elongation.

Fig. 7 is the front view of the Facad structure after illustrating swing arm elongation.

Fig. 8 is the sectional view of the partial cross section's structure for illustrating the short transverse before swing arm elongation.

Fig. 9 is the sectional view of the partial cross section's structure for illustrating the short transverse after swing arm elongation.

Figure 10 is to illustrate from the opposition side relative to cathode assembly and substrate to see the 3rd embodiment of film formation device as Sputter equipment have swing arm when backside structure a part partial rear view.

Figure 11 is of backside structure when illustrating the swing arm from terms of the opposition side with substrate relative to cathode assembly The partial rear view divided.

Figure 12 is of Facad structure when illustrating the swing arm from terms of the opposition side with substrate relative to cathode assembly The partial front elevation view divided.

Figure 13 is the local of a part for Facad structure when illustrating the swing arm from terms of the substrate-side relative to cathode assembly Front view.

Description of reference numerals

10 ... sputter equipments, 11 ... transport be transported into chamber, 12 ... pre-treatment chambers, 13 ... sputtering chambers, 14 ... gate valves, 15 ... exhaust portions, 16 ... film forming routes, 17 ... reclaim routes, 18 ... cathode assemblies, 19 ... route changing units, 21 ... frameworks, 22 ... cathode electrode units, 22a ... translation stages, 22b ... tracks, 23 ... swing arms, 23a ... oscillation center axle portions, 23a1 ... swinging axles Support, 23a2 ... swing flange, 23b ... link axle portion, 23b1 ... connection shaft supports, 23b2 ... link flange, on 31 ... Portion's framework, 31a ... swing opening portion, 31b ... upper openings portion, 32 ... fixed plates, 32a ... permanent openings portion, 33 ... guiding cylinders Portion, 33a ... tops cylinder portion, 33b ... lower sleeves portion, 33c ... bellows, 34 ... bottom frameworks, 34a ... link opening portion, 34b ... lower openings portion, 40 ... telescoping mechanisms, 41 ... stocks, 41a ... upper ends, 42 ... stock guide portions, 50 ... connecting lines Road, 51 ... power lines, 51a ... rigid sections, 51a ... swing rigid section, 51a2 ... and link rigid section, 51b ... flexible portions, 51b1, 61a ... bends, the 1st power lines of 51A ..., the 2nd power lines of 51B ..., 52 ... gas pipes, 52a are 53a ... deflection divisions, 53 ... cold But water pipe arrangement, 61 ... swing fixed part, 62 ... swing flexible portions, 71 ... link translation parts, 72 ... link flexible portions, 72a ... foldings Return portion, A ... rotary shafts, P ... swinging axles, S ... substrates, T ... pallets.

Specific embodiment

[the 1st embodiment]

Substrate board treatment and film formation device are embodied as the 1st embodiment party of sputter equipment for reference picture 1- Fig. 4 explanations Formula.Hereinafter, illustrate cathode assembly that the sputter equipment of an example being monolithically fabricated as sputter equipment possesses in order with And the effect of cathode assembly.

[being monolithically fabricated for sputter equipment]

The example that sputter equipment is monolithically fabricated is illustrated with reference to Fig. 1.

As shown in figure 1, sputter equipment 10 possesses to transport is transported into chamber 11, pre-treatment chamber 12 and sputtering chamber 13,3 Chamber is along 1 direction, i.e. carriage direction arrangement.Sputter equipment 10 possesses 2 gate valves, 14,2 gate valves 14 and will transport respectively and is transported into Connect between chamber 11 and pre-treatment chamber 12 and between pre-treatment chamber 12 and sputtering chamber 13.3 chambers are carried respectively There is the exhaust portion 15 reduced pressure to each chamber.Film forming route 16 is separately installed with the respective bottom surface of 3 chambers and is returned Route 17 is received, film forming route 16 and recovery route 17 are 2 routes for extending along carriage direction and being parallel to each other.

Film forming route 16 and recovery route 17 are for example by the track extended along carriage direction, along the multiple of carriage direction configuration Roller and constitute multiple motor of multiple rollers difference rotations etc..Film forming route 16 will be transported into sputter equipment 10 Pallet T together with the substrate S before film forming be transported into chamber 11 and be sent to sputtering chamber 13 from transporting.Reclaim route 17 to be transported into splashing The pallet T penetrated inside chamber 13 together with the substrate S after film forming is sent to transport from sputtering chamber 13 and is transported into chamber 11.Towards paper Front extends and rectangular substrate S is fixed on pallet T with the state for erecting.The width of substrate S, such as along carriage direction For 2200mm, it is 2500mm towards in front of paper.

Transport the substrate S before being transported into the film forming that chamber 11 will be transported into from outside sputter equipment 10 and be sent to pre-treatment chamber 12, Substrate S after the film forming that the past processing chamber housing 12 is transported into is transported outside sputter equipment 10.Substrate S before film forming is from outside Be transported into transport be transported into chamber 11 when or the substrate S after film forming from transport be transported into chamber 11 and transport outside when, transport fortune The within the chamber for entering chamber 11 boosts to atmospheric pressure.Substrate S before film forming is transported into chamber 11 and is transported into front process chamber from transporting Substrate S the past processing chamber housings 12 when 12 or after film forming transport to transport be transported into chamber 11 when, transport and be transported into chamber 11 Inner pressure relief to 12 inside identical degree of pre-treatment chamber.

Pre-treatment chamber 12 pairs is transported into the substrate S that chamber 11 is transported into the film forming of pre-treatment chamber 12 and carries out example from transporting Such as heat, clean process etc., to process as necessary to film forming.Pre-treatment chamber 12 will be transported into chamber 11 and transport from transporting Go out to the substrate S of pre-treatment chamber 12 and be transported into sputtering chamber 13.Also, pre-treatment chamber 12 will from sputtering chamber 13 transport to The substrate S of pre-treatment chamber 12 is transported to transporting and is transported into chamber 11.

Sputtering chamber 13 possesses the cathode assembly 18 that filmogen is released to substrate S.Cathode assembly 18 is to cathode assembly 18 The process space faced with substrate S releases filmogen.Sputtering chamber 13 possesses route changing unit 19, and the route changing unit 19 sets Put in film forming route 16 and reclaim between route 17.

The base before the past processing chamber housing 12 is transported into the film forming of sputtering chamber 13 using cathode assembly 18 of sputtering chamber 13 Film is formed on plate S.Sputtering chamber 13 uses route changing unit 19, and makes pallet T together with the substrate S after film forming from film forming road Line 16 is moved to recovery route 17.

In addition, as long as sputter equipment 10 at least possesses the composition of sputtering chamber 13.In such composition, sputtering Chamber 13 can not also possess film forming route 16, reclaim route 17 and route changing unit 19, if possess by substrate S with the moon The configuration section of the state configuration that pole device 18 is faced.

[cathode assembly]

Cathode assembly 18 is illustrated with reference to Fig. 2.In addition, for convenience of description, omit in Fig. 2-Fig. 4 and constitute sputtering chamber 13 Framework have wall portion, the diagram of i.e. parallel with carriage direction wall portion.

As shown in Fig. 2 cathode assembly 18 is located at and is formed as box like and constitutes inside the framework 21 of sputtering chamber 13, and frame Body 21 is with 2 wall portions parallel with carriage direction.2 wall portions parallel with carriage direction are mutually opposing, and in 2 wall portions A wall portion towards another wall portion direction be opposed direction.Cathode assembly 18 possesses cathode electrode unit 22 and swing arm 23。

Cathode electrode unit 22 has the translation stage 22a of the rectangular cylindrical for being formed as hollow, constitutes in the wall portion of translation stage 22a The wall portion opposed with substrate S is with forming the target that material is constituted by film.Translation stage 22a is equipped with inside which and target Connect and leakage field is formed by the backboard from outside power supply to target and in the one side of the target opposed with substrate S Magnetic loop of field etc..Cathode electrode unit 22 is an example in processing unit and film forming portion.

There are the track 22b extended along carriage direction, translation stage 22a to be positioned on track 22b in 21 laid inside of framework.It is flat Moving stage 22a links along the drive division that track 22b is reciprocated with translation stage 22a is made.Translation stage 22a is driven by drive division, and edge Carriage direction is reciprocated.Translation stage 22a is by reciprocating along carriage direction, and empty in the process that faces with substrate S Between move.

The swing arm 23 being provided with a wall portion in above-mentioned 2 wall portions of framework 21 inside framework 21.Swing Arm 23 is formed hollow substantially rectangular column, is swung centered on the swinging axle P extended along opposed direction.

Swing arm 23 possess hollow oscillation center axle portion 23a that the top inside framework 21 is connected with framework 21 and Hollow link axle portion 23b as swinging end that lower section inside framework 21 is connected with translation stage 22a.For example, in swing Heart axle portion 23a is connected with the top of 21 wall portion of framework on the position consistent with the substantial middle of the track 22b on carriage direction. The axial direction of oscillation center axle portion 23a is consistent with swinging axle P.

Swinging axle support 23a1 is located at the outside of oscillation center axle portion 23a, and swinging axle support 23a1 is formed as edge The tubular that opposed direction extends, oscillation center axle portion 23a is supported with the state that can be rotated relative to framework 21.Swing E axle supporting portion 23a1 is fixed on framework 21.That is, framework 21 possesses swinging axle support 23a1.

Link the lateral surface that axle portion 23b is connected to opposed with target wall portion in translation stage 22a, link the connection of axle portion 23b Position on the lateral surface of translation stage 22a for example than its central authorities more on the lower.Link axle portion 23b with along opposed direction extend Consistent rotary shaft A of central shaft centered on and rotate relative to translation stage 22a.Link axle portion 23b to follow negative electrode list The state of 22 translation of unit is linked with translation stage 22a.

Connection shaft support 23b1 is located at the outside for linking axle portion 23b, and connection shaft support 23b1 is formed as along opposed The tubular that direction extends, and so that link axle portion 23b can be made to link axle portion 23b relative to the state support that translation stage 22a rotates. Connection shaft support 23b1 is fixed on translation stage 22a.That is, cathode electrode unit 22 possesses connection shaft support 23b1.

In cathode assembly 18, inside swing arm 23 and be big inside the translation stage 22a being connected inside swing arm 23 Air pressure atmosphere.On the other hand, vacuum sealing component is located at oscillation center axle portion 23a outer peripheral face and swinging axle support 23a1 inner circumferentials Between face, and it is located between link axle portion 23b outer peripheral face and connection shaft support 23b1 inner peripheral surfaces by vacuum sealing component, So as in exhaust portion 15 to framework 21 inside reduce pressure when, be maintained at vacuum atmosphere inside framework 21.

Connection line be located at swing arm 23 inside, the connection line be configured in sputtering chamber to drive cathode electrode unit 22 Outside room 13 shared device (Utilitu) connection, and be located inside sputtering chamber 13 to drive cathode electrode unit 22 Cathode electrode unit 22 connects.Shared device for example includes：Various power supplys；The gas bomb of process gas, the process gas include sputtering Gas and reacting gas；And cooling water tank.Connection line can also for example be the power line to target supply electric power, also may be used To be the pipe arrangement of the flow of cooling water cooled down to target by confession, or supply to be supplied to the technique inside sputtering chamber 13 The pipe arrangement of gas flowing.

[effect of cathode assembly]

Reference picture 2- Fig. 4 illustrates the effect of cathode assembly.

As shown in Fig. 2 when cathode assembly 18 initially forms film, translation stage 22a is internally located at track 22b in framework 21 Carriage direction on an end, the left part in such as Fig. 2.Now, oscillation center axle portion 23a of swing arm 23 is being transported It is connected with the top of 21 wall portion of framework on the position consistent with the substantial middle of track 22b on direction.On the other hand, swing arm The lower section being located on the position of the left part side of track 22b of 23 link axle portion 23b on carriage direction inside framework 21.Cause This, translation stage 22a forms predetermined angle relative to the direction that the vertically extending directions of track 22b are extended with swing arm 23.

When cathode assembly 18 initially forms film, translation stage 22a is along track 22b from the transport side orthogonal with swinging axle P Move towards another end an end upwards.For example, left part directions of the translation stage 22a along carriage direction from Fig. 2 Move right part.Thus, as link axle portion 23b of swing arm 23 is also translated with translation stage 22a along carriage direction, so in fortune Send the position of oscillation center axle portion 23a being closely located on carriage direction of link axle portion 23b on direction.As a result, flat The angle formed by the direction that the direction that moving stage 22a extends is extended with swing arm little by little diminishes.In translation stage 22a along transport side When translating together with link axle portion 23b, oscillation center axle portion 23a is rotated together with axle portion 23b is linked.Now, oscillation center Axle portion 23a is mutually the same relative to the direction that translation stage 22a rotates with link axle portion 23b relative to the direction that framework 21 rotates.

As shown in figure 3, translating with axle portion 23b is linked along carriage direction in translation stage 22a, and make the pendulum on carriage direction During the location overlap of the position of dynamic central axle portion 23a and link axle portion 23b on carriage direction, the side that translation stage 22a extends To Chong Die with the direction that swing arm 23 extends.As a result, above-mentioned angle becomes 0 °.

When translation stage 22a is close to another end more than the position of oscillation center axle portion 23a on carriage direction, even Knot axle portion 23b is located away from position of oscillation center axle portion 23a on carriage direction on carriage direction.As a result, translation The direction that platform 22a extends little by little becomes big with the angle formed by the direction that swing arm 23 extends.

If as shown in figure 4, translation stage 22a is moved to another end of track 22b on carriage direction, such as in Fig. 2 Right part, the consistent position of the substantial middle of oscillation center axle portion 23a of swing arm 23 track 22b then on carriage direction The upper top inside framework 21.On the other hand, track 22b of link axle portion 23b of swing arm 23 on carriage direction The lower section being located on the position of right part side inside framework 21.Therefore, the direction that translation stage 22a extends is extended with swing arm 23 The angle formed by direction become with translation stage 22a positioned at the left part of track 22b when the roughly the same angle of the angle that formed Degree.

Thus, cathode electrode unit 22 together with axle portion 23b is linked from the end direction of the track 22b on carriage direction Another end or from another end towards end translation.Thus, with link axle portion 23b as swinging end pendulum Swing arm 23 is swung centered on oscillation center axle portion 23a.

Therefore, when cathode electrode unit 22 is translated with link axle portion 23b along track 22b, by the connecting line inside framework 21 The swing of swing arm 23 is also followed on road, and is swung centered on oscillation center axle portion 23a.Now, inside swing arm 23 Connection line follows the swing of swing arm 23 while keeping the connection with cathode electrode unit 22.Therefore, connection line is by pendulum Dynamic central axle portion 23a and hardly inside swing arm 23 and outside between pass in and out.Thus, due to inside the framework 21 with outside Between the variable quantity of the length of connection line that changes less than the translation of cathode electrode unit 22 distance, it is possible to reducing connection line The mechanicalness load born.

It is as described above, following effect can be obtained according to the sputter equipment of the 1st embodiment.

(1) when cathode electrode unit 22 is with the translation of axle portion 23b is linked, swing arm 23 is swung.Now, positioned at swing arm 23 Internal connection line follows the swing of swing arm 23, is swung while keeping and the moon centered on oscillation center axle portion 23a The connection of pole unit 22.Therefore, connection line by oscillation center axle portion 23a hardly swing arm 23 it is inside and outside it Between pass in and out.Therefore, the variable quantity of the length of the connection line for changing and outside between inside framework 21 is less than cathode electrode unit 22 Mobile distance.As a result, can reduce that its institute is made because connection line is passed in and out and 21 outside of framework between inside framework 21 The mechanicalness load born.

In addition, the 1st embodiment can also suitably be changed in such a way and be implemented.

The position that oscillation center axle portion 23a is connected with 21 wall portion of framework may not be and the track on carriage direction The consistent position of the substantial middle of 22b.As long as swing arm 23 can be swung, oscillation center axle portion 23a and 21 wall portion of framework The position of connection can also be some the corresponding position in 2 ends with the track 22b on carriage direction or its His position.

Cathode electrode unit 22 is as described above, is not limited only to be formed as flat target with opposed with substrate S Constitute.Cathode electrode unit 22 can also be the composition with following target, the i.e. target with along carriage direction and translation stage 22a mono- Mobile rotary shaft is played, is formed as the cylindric and opposed with substrate S of centered on rotary shaft axle.

Film formation device can not be the sputter equipment 10 for possessing cathode electrode unit 22, it is also possible to be embodied as various film forming dresses Put, for example there is the evaporation coating device of vapor deposition source as film forming portion etc..Or, film formation device can also be embodied as possessing ion beam Irradiation portion as processing unit ion beam irradiation apparatus or possess laser of the various laser irradiating parts such as ultraviolet as processing unit The various substrate board treatments such as irradiation unit.

[the 2nd embodiment]

Substrate board treatment and film formation device are embodied as the 2nd embodiment party of sputter equipment for reference picture 5- Fig. 9 explanations Formula.The distance between oscillation center axle portion 23a and link axle portion 23b of swing arm 23 are according to oscillation center axle portion 23a and link The distance between e axle supporting portion 23b1 and change.Therefore, below, explain the composition for being related to such distance change.And And, below, being monolithically fabricated of swing arm 23, the telescoping mechanism of swing arm 23 and an example as connection line are illustrated successively The detailed composition of the power line of son.

[being monolithically fabricated for swing arm]

With reference to Fig. 5, being monolithically fabricated for swing arm 23 is illustrated together with Inner Constitution.

As shown in figure 5, swing arm 23 possesses top framework 31, fixed plate 32, guiding cylinder portion 33 and bottom framework 34, on Portion's framework 31, fixed plate 32, guiding cylinder portion 33 and bottom framework 34 are with this sequentially along 1 direction, i.e. short transverse arrangement.

Top framework 31 is formed as hollow rectangular cylindrical, and there is swing opening portion 31a, swing opening portion 31a to exist Link with oscillation center axle portion 23a on 1 side of top framework 31, and run through the side along opposed direction.Top framework 31 With the through hole extended along short transverse, i.e. upper opening portion 31b on the side faced with bottom framework 34.

Fixed plate 32 is formed as rectangular plate-like, and with the through hole extended along short transverse, i.e. permanent opening portion 32a. Fixed plate 32 is linked with top framework 31 in the state of permanent opening portion 32a is faced with upper opening portion 31b.In fixed plate 32 In, the width along the width in opposed direction and on the direction orthogonal with paper is respectively greater than top framework 31.

Guiding cylinder portion 33 is formed as the cylindrical shape extended along short transverse, guides 2 ends in the height direction of cylinder portion 33 The end and permanent opening portion 32a that fixed plate 32 is close in portion is fixed on fixed plate 32 in the state of facing.

Bottom framework 34 is formed as hollow rectangular cylindrical, and there is link opening portion 34a, link opening portion 34a to exist Link with link axle portion 23b on 1 side of bottom framework 34, and run through the side along opposed direction.Bottom framework 34 with With the through hole extended along short transverse, i.e. lower openings portion 34b on the side that top framework 31 is faced.Guiding cylinder portion 33 exists Be close in 2 ends in short transverse bottom framework 34 end face with lower openings portion 34b in the state of be fixed on The side faced with top framework 31 of bottom framework 34.In bottom framework 34, along the width and and paper in opposed direction The width in orthogonal direction is roughly equal with fixed plate 32 respectively.

Oscillation center axle portion 23a is connected with top framework 31, and the shape that the outer peripheral face of oscillation center axle portion 23a is coated Become the swinging axle support 23a1 of cylindrical shape so that the state pivot that oscillation center axle portion 23a is rotated relative to framework 21 can be made Supporting oscillation center axle portion 23a.Swinging axle support 23a1 is in the way extended along opposed direction with from outer peripheral face towards footpath The swing flange 23a2 for extending laterally, is swung flange 23a2 and framework 21 is fixed on by fixed component.Oscillation center axle Portion 23a is connected to swinging axle support in the outer peripheral face of oscillation center axle portion 23a by the bearing with vacuum sealing function In the state of the inner peripheral surface of 23a1, rotated relative to framework 21 centered on swinging axle P.

Link axle portion 23b to be connected with bottom framework 34, link axle portion 23b is formed as relative to guiding cylinder portion 33 along opposed Direction and towards oscillation center axle portion 23a opposition side extend cylindrical shape.Be formed as what the outer peripheral face for linking axle portion 23b was coated Cylindric connection shaft support 23b1 is can make the state pivot suspension that link axle portion 23b is rotated relative to translation stage 22a Link axle portion 23b.Connection shaft support 23b1 in the way extended along opposed direction with from outer peripheral face be radially oriented outside prolong The link flange 23b2 for stretching, is linked flange 23b2 and translation stage 22a is fixed on by fixed component.Link axle portion 23b even The outer peripheral face of knot axle portion 23b is connected to the inner peripheral surface of connection shaft support 23b1 by the bearing with vacuum sealing function Under state, rotated relative to translation stage 22a centered on rotary shaft A.

Swing arm 23 has telescoping mechanism 40 in the height direction between top framework 31 and bottom framework 34, and this stretches Mechanism 40 constitutes as follows, will guide encirclement around a portion 33, and including guiding cylinder portion 33.40 company of making of telescoping mechanism Axle portion 23b is tied relative to oscillation center axle portion 23a displacement, so that between oscillation center axle portion 23a and link axle portion 23b Distance is flexible.

Telescoping mechanism 40 possesses multiple stocks (shaft) 41 and the stock guide portion 42 with 41 equal number of stock.It is many Across being located at around guiding cylinder portion 33 at equal intervals, multiple stock guide portions 42 are respectively formed as along height individual stock guide portion 42 The cylindrical shape that direction extends.The cylinder end of top framework 31 is close in 2 cylinder ends of each stock guide portion 42 be formed on The state faced along the stock through hole (omitting diagram) that short transverse extends in fixed plate 32 is fixed on fixed plate 32.It is many Individual stock 41 is respectively formed as along the cylindric of short transverse extension.Top framework 31 is close in 2 ends of each stock 41 End by the stock through hole insertion of 1 stock guide portion 42 and fixed plate 32, and the end for being close to bottom framework 34 is consolidated The side faced with top framework 31 being scheduled in bottom framework 34.

Have from oscillation center axle portion 23a towards the multiple connecting lines for linking the extension of axle portion 23b in 23 inside break-through of swing arm Road 50.Multiple connection lines 50 can be 1 line, or by interconnected by binding post (terminal) respectively Multiple railway superstructures elements are constituted.Multiple connection lines 50 include：Electric power to the backboard supply high frequency electric power of cathode electrode unit 22 Line 51；To the gas pipe 52 for supplying process gas around cathode electrode unit 22；And the cooling water of cooling water is supplied to backboard Pipe arrangement 53.The quantity of power line 51, gas pipe 52 and cooling water pipe 53 included by connection line 50 can be 1 respectively Bar can also be a plurality of.

Power line 51 has：Rigid section 51a, which is fixed on inside swing arm 23 with the state of shape invariance；And can Portion 51b is scratched, which is accommodated in inside bottom framework 34 and shape is variable.Rigid section 51a has：Rigid section 51a1 is swung, which is from pendulum Dynamic central axle portion 23a is outer to be extended towards bottom framework 34, and is connected with an end of flexible portion 51b；And link rigid section 51a2, which is connected with another end of flexible portion 51b, and from bottom framework 34 towards extension outside link axle portion 23b.Swing firm Body portion 51a1 and the example that link rigid section 51a2 is middle rigid body distribution, flexible portion 51b is middle flexible circuit One example.

There is gas pipe 52 the deflection division 52a in curved shape, deflection division 52a to be located inside bottom framework 34.Cooling There is water pipe arrangement 53 the deflection division 53a in curved shape, deflection division 53a to be located inside bottom framework 34.

[telescoping mechanism of swing arm]

With reference to Fig. 6 and Fig. 7, the telescoping mechanism 40 of swing arm 23 is illustrated in further detail.

As shown in fig. 6, telescoping mechanism 40 possess guiding cylinder 33,4, portion stock 41 (2 stocks 41 are only shown in figure 6), And 4 stock guide portions 42.4 stocks 41 and 4 stock guide portions 42 are positioned at corresponding with the four of fixed plate 32 angles Position.

Guiding cylinder portion 33 has：Top cylinder portion 33a, which is formed as cylindric and is fixed on fixed plate 32；And bottom Cylinder portion 33b, which is formed as cylindric and is fixed on bottom framework 34.

Possess between guiding cylinder portion 33 top cylinder portion 33a in the height direction and lower sleeve portion 33b and be formed as cylindric Bellows 33c.Bellows 33c is connected with a cylinder end being connected with top cylinder portion 33a and with lower sleeve portion 33b Another end.Bellows 33c is exerted a force from lower sleeve portion 33b to the direction of top cylinder portion 33a in the height direction.

As shown in fig. 6, when on carriage direction, swing arm 23 is Chong Die with cathode electrode unit 22, in the swing on swing arm 23 Heart axle portion 23a becomes minimum with to linking the distance between connection shaft support 23b1 for being supported of axle portion 23b.Now, stretch Contracting mechanism 40 is according to the distance between oscillation center axle portion 23a and connection shaft support 23b1, and shortens the pendulum on swing arm 23 The distance between dynamic central axle portion 23a and link axle portion 23b.That is, telescoping mechanism 40 cause oscillation center axle portion 23a with Linking the distance between axle portion 23b, i.e. length L of swing arm becomes minimum.

Now, in telescoping mechanism 40, bellows 33c is exerted a force and is shortened, and is located adjacent to the side of top framework 31 The overhangs from fixed plate 32 that are moved in the height direction of upper end 41a of each stock 41 become maximum position. Thus, each stock 41 and the lower sleeve portion 33b of bellows 33c is fixed on together with bottom framework 34 in short transverse On be moved to position closest to fixed plate 32.

Also, in the inside of swing arm 23, the deflection of the deflection division 52a of gas pipe 52 becomes maximum, and cooling water is matched somebody with somebody The deflection of the deflection division 53a of pipe 53 becomes maximum.In the swing of positions of the translation stage 22a on carriage direction and swing arm 23 Position of heart axle portion 23a on carriage direction is closer to 2 deflection division 52a, the respective deflections of 53a are bigger.

As shown in fig. 7, translation stage 22a is translated with axle portion 23b is linked along track 22b, and track 22b is configured in transport side During an end upwards, oscillation center axle portion 23a on carriage direction and to linking the connection shaft supported by axle portion 23b The distance between support 23b1 becomes maximum.Now, telescoping mechanism 40 is according to oscillation center axle portion 23a and connection shaft support The distance between 23b1, and make oscillation center axle portion 23a of swing arm 23 and link the elongation of the distance between axle portion 23b.Also To say, telescoping mechanism 40 cause oscillation center axle portion 23a with length L for linking the distance between axle portion 23b, i.e. swing arm 23 into For maximum.

Now, in telescoping mechanism 40, bellows 33c opposings exert a force and extend, and the upper end 41a of each stock 41 is moved Moving to the overhang from fixed plate 32 in the height direction becomes minimum position.Thus, each stock 41 and fixed It is moved to together with bottom framework 34 in the height direction in the lower sleeve portion 33b of bellows 33c farthest from fixed plate 32 Position.

Also, in the inside of swing arm 23, the deflection of the deflection division 52a of gas pipe 52 becomes minimum, and cooling water is matched somebody with somebody The deflection of the deflection division 53a of pipe 53 becomes minimum.Positions of the translation stage 22a on carriage direction is in the swing of swing arm 23 Position of heart axle portion 23a on carriage direction is more remote, and 2 deflection division 52a, the respective deflections of 53a are less.

Thus, the telescoping mechanism 40 of swing arm 23 is according to the position of link axle portion 23b translated with translation stage 22a, put The distance between oscillation center axle portion 23a and connection shaft support 23b1 of swing arm 23, and change length L of swing arm 23. That is, when cathode electrode unit 22 is translated with translation stage 22a, the length of swing arm 23 is in oscillation center axle portion 23a and connection shaft Stretch between portion 23b.For in other words, the telescoping mechanism 40 of swing arm 23 make oscillation center axle portion 23a with link axle portion 23b it Between distance changed according to the distance between oscillation center axle portion 23a and connection shaft support 23b1.Thus, it is arranged on swing Link axle portion 23b of arm 23 can follow the movement of translation stage 22a.

[composition of power line]

The composition of power line 51 is illustrated in further detail with reference to Fig. 8 and Fig. 9.In addition, Fig. 8 illustrates the length of swing arm 23 The state of the power line 51 when degree L becomes minimum, on the other hand, electric power when Fig. 9 illustrates that length L of swing arm 23 becomes maximum The state of line 51.

As shown in figure 8, power line 51 is made up of multiple composed components, multiple composed components include swinging rigid section 51a1, Flexible portion 51b and link rigid section 51a2.Swing rigid section 51a1 to be formed as from oscillation center axle portion 23a towards bottom framework 34 bandings for extending, the material principal component for forming swing rigid section 51a1 is, for example, copper.Swing in 2 ends of rigid section 51a1 An end be connected with the power line being configured in outside swing arm 23, another end is inside swing arm 23 and flexible portion 51b connects.

Rigid section 51a1 is swung by another end that rigid section 51a1 is swung inside cylinder portion 33 being guided from bottom framework 34 lower openings portion 34b is projected towards the bottom of bottom framework 34.Though being unillustrated, rigid section 51a1 is swung from swing It is fixed in the way that central axle portion 23a extends towards bottom framework 34 inside the top framework 31 of swing arm 23 or top cylinder Inside portion 33a.

Link rigid section 51a2 to be formed as, from bottom framework 34 towards the banding that axle portion 23b extends is linked, forming link firm The principal component of the material of body portion 51a2 is, for example, copper.Link an end in 2 ends of rigid section 51a2 in swing arm 23 Inside is connected with flexible portion 51b, and another end is connected with the power line being configured in outside swing arm 23.It though is unillustrated, Link rigid section 51a2 to be fixed on inside swing arm 23 in from bottom framework 34 towards the way for linking the extension of axle portion 23b. When telescoping mechanism 40 coordinates the swing of swing arm 23 and makes swing arm 23 stretch, flexible portion 51b makes swing rigid section 51a1 and company The distance between knot rigid section 51a2 is flexible.

Flexible portion 51b is configured in inside bottom framework 34, and is formed as an end in 2 ends and is swung rigid section 51a1 connects, the banding that another end is connected with link rigid section 51a2.Flexible portion 51b for example weaves into band by by multiple copper cash The flat sennit copper cash of shape is constituted, and has pliability.Flexible portion 51b is with part, the i.e. bend 51b1 bent because of deadweight.

As shown in figure 8, when length L of swing arm 23 becomes minimum, the degree that bellows 33c shrinks is maximum, and under Portion's framework 34 is closest to top framework 31 (with reference to Fig. 6).Therefore, swing the coupling part of rigid section 51a1 and flexible portion 51b most It is close to the diapire of bottom framework 34.Also, swinging rigid section 51a1 becomes minimum with the distance between rigid section 51a2 is linked.By This, flexible portion 51b be deformed into from be connected to swing rigid section 51a1 flexible portion 51b an end to bend 51b1 away from From roughly equal to a distance from bend 51b1 with from another end for being connected to flexible portion 51b for linking rigid section 51a2. That is, the deflection of flexible portion 51b becomes maximum.

On the other hand, as shown in figure 9, when length L of swing arm 23 becomes maximum, bellows 33c extends, and bottom Framework 34 is from top framework 31 farthest (with reference to Fig. 7).Therefore, swing rigid section 51a1 most to connect with the coupling part of flexible portion 51b The upper wall of nearly bottom framework 34.Also, swinging rigid section 51a1 becomes maximum with the distance between rigid section 51a2 is linked.By This, flexible portion 51b be deformed into from be connected to swing rigid section 51a1 flexible portion 51b an end to bend 51b1 away from From becoming maximum, from be connected to another end of flexible portion 51b for linking rigid section 51a2 to bend 51b1 distance into For minimum.That is, the deflection of flexible portion 51b becomes minimum.

Thus, when swing arm 23 stretches, the deflection of flexible portion 51b is swinging rigid section 51a1 and is linking rigid section Change between 51a2.Therefore, by the change of the length of the power line 51 inside swing arm 23 and the difference of the length of swing arm 23 Absorbed by the change of the deflection of flexible portion 51b.Then, the length of the power line 51 for passing in and out and outside between inside swing arm 23 Degree shortens.

It is as described above, according to the sputter equipment of the 2nd embodiment, the effect being exemplified below can be obtained.

(2) when translation stage 22a is with the translation of axle portion 23b is linked, the telescoping mechanism 40 of swing arm 23 makes oscillation center axle portion 23a becomes according to the distance between oscillation center axle portion 23a and connection shaft support 23b1 with the distance between axle portion 23b is linked Change.Thus, link axle portion 23b for being arranged on swing arm 23 can follow the movement of translation stage 22a.

(3) when swing arm 23 stretches, it is attached at and swings rigid section 51a1 and link the flexible portion between rigid section 51a2 The deflection of 51b can change.Therefore, by the length of the power line 51 inside swing arm 23 and the difference of the length of swing arm 23 Change and absorbed by the change of the deflection of flexible portion 51b.Then, the power line 51 for passing in and out and outside between inside swing arm 23 Length shorten.

In addition, the 2nd embodiment can also suitably be changed in such a way and be implemented.

The deflection division 53a of the deflection division 52a and cooling water pipe 53 of gas pipe 52 is not as respectively in gas There is on pipe arrangement 52 and cooling water pipe 53 position of curved shape and be specific, it is also possible to make for example on connection line It is to be specific with spiral-shaped part.In addition, it is spiral-shaped can also be two dimension it is spiral-shaped, or three That what is tieed up is spiral-shaped.

The composition of power line 51 is readily adaptable for use in the All other routes included by connection line 50, such as gas pipe 52 And at least one party in cooling water pipe 53.

Sputter equipment can also be embodied as the structure described in the composition and the 2nd embodiment described in the 1st embodiment Into the composition of combination.According to such composition, it is also possible to which sputter equipment is embodied as the effect with the 1st embodiment and The composition of the both sides of the effect of 2 embodiments.

Swing arm 23 can not also possess telescoping mechanism 40.In this case, guiding cylinder portion 33 can also be used as 1 Cylindric cylinder portion and be specific.Also, for example in order to suppress to link axle portion 23b and link the connecting object, i.e. of axle portion 23b The distance between translation stage 22a becomes big, it is also possible to possess linking part (for example, bullet between oscillation center axle portion 23a and framework 21 The extensible members such as spring), the coupling member makes the distance between oscillation center axle portion 23a and framework 21 as cathode electrode unit 22 is translated And become big.Even if being formed by, as long as swing arm 23 is swung centered on oscillation center axle portion 23a, it becomes possible to obtains It is same as the effect of above-mentioned (1).

Swing arm 23 can not also possess telescoping mechanism 40, and (for example, spring etc. stretches can also for example to possess linking part Part), it is bigger with connecting object, i.e. the distance between the translation stage 22a for linking axle portion 23b to link axle portion 23b, and the linking part is got over Extend between axle portion 23b and translation stage 22a linking.In addition, in this case, guiding cylinder portion 33 can also be embodied as 1 Individual cylindric cylinder portion.Even such composition, as long as swing arm 23 is swung centered on oscillation center axle portion 23a, with regard to energy Access the effect for being equal to above-mentioned (1).

Swing arm 23 can not also possess telescoping mechanism 40, it would however also be possible to employ link axle portion 23b and translation stage 22a it Between and oscillation center axle portion 23a and framework 21 between possess above-mentioned linking part (for example, the extensible member such as spring) respectively Constitute.In addition, in this case, guiding cylinder portion 33 can also be embodied as 1 cylindric cylinder portion.Even such structure Into as long as swing arm 23 is swung centered on oscillation center axle portion 23a, it becomes possible to obtain being equal to the effect of above-mentioned (1).

For power line 51, as the composed component of power line 51, conductor is not only, it is also possible to include leading positioned at 2 Insulator, i.e. terminal board between body.For example, it is also possible to arrange between rigid section 51a1 and flexible portion 51b to put swing The terminal board supported to them by the state of dynamic rigid section 51a1 and the electrical connection of flexible portion 51b, it is also possible to linking rigid section Arranging between 51a2 and flexible portion 51b carries out propping up to them with the state for electrically connecting link rigid section 51a2 and flexible portion 51b The terminal board for holding.

[the 3rd embodiment]

Substrate board treatment and film formation device are embodied as the 3rd enforcement of sputter equipment for reference picture 10- Figure 13 explanations Mode.The sputter equipment of the 3rd embodiment, it is characterized by installed in swing arm 23 oscillation center axle portion 23a power line with And the power line of link axle portion 23b installed in swing arm 23.Therefore, illustrate below for these compositions.In addition, in figure In 10- Figure 13, the sputter equipment with 2 power lines 51 is shown as an example.

[power line of oscillation center axle portion]

The power line 51 of oscillation center axle portion 23a is arranged on reference to Figure 10 and Figure 11 explanations.In addition, Figure 10 illustrates swing The state of the power line 51 when length L of arm 23 becomes minimum, on the other hand, Figure 11 illustrates that length L of swing arm 23 becomes most The state of the power line 51 when big.

As shown in Figure 10, power line 51 includes the 1st power line 51A and the 2nd power line 51B, the 1st power line 51A and the 2nd It is symmetrical that power line 51B forms face along the imaginary plane that short transverse extends with respect to swinging axle P.Constitute each power line 51 swing rigid section 51a1 is respectively formed as banding, in the inner peripheral surface from oscillation center axle portion 23a extended along opposed direction In the state of leaving, the cylinder end from inside top framework 31 towards oscillation center axle portion 23a extends.That is, due to each The part by oscillation center axle portion 23a swung in rigid section 51a1 extends along swinging axle P, it is possible to suppressing with swing The swing of arm 23 and be deformed.Each end for swinging rigid section 51a1 passes through exhausted on the cylinder end of oscillation center axle portion 23a Edge thing and be fixed on the end face of oscillation center axle portion 23a.An example of oscillation center axle portion 23a for cardinal extremity rotating part, pendulum Dynamic rigid section 51a1 is the example that cardinal extremity rotates distribution.

1st power line 51A and the 2nd power line 51B have swing fixed part 61 respectively, and the swing fixed part 61 is by exhausted Edge thing and be fixed on sputtering chamber 13 wall portion, for example be fixed on swing flange 23a2 on framework 21 wall portion, and and its He connects power line.Swing an example of the fixed part 61 for cardinal extremity permanent wiring.

1st power line 51A and the 2nd power line 51B have respectively and swing flexible portion 62, the swing flexible portion 62 with swing The end of rigid section 51a1 and swing fixed part 61 connect.Each swings flexible portion 62 and is formed as extending substantially along carriage direction Arc-shaped and for example by constituting with flexual flat sennit copper cash.Swing flexible portion 62 to have in the height direction because of deadweight To the bend 62a of the flexure of bottom framework 34.According to swing rigid section 51a1 end and swing fixed part 61 between away from From and the length of bend 62a that formed in the swing flexible portion 62 that deforms equivalent to bend 62a deflection.Swing can Scratch the example that portion 62 is the flexible circuit of cardinal extremity.

As shown in Figure 10, when length L in swing arm 23 becomes minimum, each swings flexible portion 62 and is deformed in transport side Upwards from the distance and the distance substantially phase from swing fixed part 61 to bend 62a for swinging rigid section 51a1 to bend 62a Deng.That is, when the end for swinging rigid section 51a1 and the distance swung between fixed part 61 become minimum, each bending The deflection of portion 62a becomes maximum.

As shown in figure 11, when length L of swing arm 23 becomes maximum, oscillation center axle portion 23a is put centered on swinging axle P It is dynamic.For example, in oscillation center axle portion 23a on paper when anticlockwise, the swing rigid section 51a1's on the 1st power line 51A Moved along the circumferencial direction of oscillation center axle portion 23a downward end.On the other hand, the swing rigid section on the 2nd power line 51B Moved along the circumferencial direction of oscillation center axle portion 23a upward the end of 51a1.Thus, end and the pendulum of rigid section 51a1 are swung The distance between dynamic fixed part 61 becomes big, and the deflection of each bend 62a diminishes.

Thus, due to suppressing power line 51 to distort because of the rotation of oscillation center axle portion 23a, it is possible to reducing power line The 51 mechanicalness loads born.

[linking the power line of axle portion]

With reference to Figure 12 and Figure 13 explanations installed in the power line 51 for linking axle portion 23b.In addition, Figure 12 illustrates swing arm 23 Power line 51 of length L when becoming minimum state, on the other hand, when Figure 13 illustrates that length L of swing arm 23 becomes maximum Power line 51 state.

As shown in figure 12, the link rigid section 51a2 for constituting power line 51 is respectively formed as banding, and from along opposed side In the state of leaving to the inner peripheral surface of link axle portion 23b for extending, from inside bottom framework 34 towards the cylinder end for linking axle portion 23b Extend.That is, being extended along rotary shaft A by linking the part of axle portion 23b in due to each link rigid section 51a2, institute To suppress to be deformed with the swing of swing arm 23.Each links rigid section 51a2 and leads on the cylinder end for linking axle portion 23b Cross insulant and be fixed on the end face for linking axle portion 23b.Link an example of axle portion 23b for top rotating part, link Rigid section 51a2 is the example that top rotates distribution.

1st power line 51A and the 2nd power line 51B have link translation part 71 respectively, and the link translation part 71 follows the moon Pole unit 22 and link axle portion 23b translation and translate.Link translation part 71 and translation stage 22a is fixed on by insulant One side, the medial surface of translation stage 22a sides wall being for example fixed on connection shaft support 23b1, and connect with other power lines Connect.Link the example that translation part 71 is that top translates distribution.

1st power line 51A and the 2nd power line 51B have respectively and link flexible portion 72, the link flexible portion 72 with link The end of rigid section 51a2 and link translation part 71 connect.It is high from the end edge for linking rigid section 51a2 that each links flexible portion 72 Degree direction extends downward, and on the way turns back, and extends to link translation part 71 upward along short transverse.Each link Flexible portion 72 has return portion 72a, and return portion 72a is bent to the lower section for linking translation part 71 along short transverse because of deadweight. According to formation on the end for linking rigid section 51a2 and the link flexible portion 72 for linking the distance between translation part 71 and deforming Return portion 72a length, i.e. in the height direction be located at link translation part 71 below return portion 72a length equivalent to folding Return the deflection of portion 72a.Each links flexible portion 72 for example by constituting with flexual flat sennit copper cash.Linking flexible portion 72 is One example of the flexible circuit in top.

As shown in figure 12, when length L in swing arm 23 becomes minimum, the flexure of return portion 72a of the 1st power line 51A Amount is equal with the deflection of return portion 72a of the 2nd power line 51B.

As shown in figure 13, when length L in swing arm 23 becomes maximum, link axle portion 23b phase centered on rotary shaft A For translation stage 22a rotates.For example, when link axle portion 23b is swung to the right on paper, the link in the 1st power line 51A is firm The end of body portion 51a2 is moved downward along the circumferencial direction for linking axle portion 23b, the link rigid section in the 2nd power line 51B Moved along the circumferencial direction for linking axle portion 23b upward the end of 51a2.Thus, in the 1st power line 51A, link rigid section The end of 51a2 diminishes with the distance between translation part 71 is linked, and on the other hand, in the 2nd power line 51B, links rigid section The end of 51a2 becomes big with the distance between translation part 71 is linked.Thus, in the 1st power line 51A, link scratching for flexible portion 72 Bent quantitative change is big, and on the other hand, in the 2nd power line 51B, the deflection for linking flexible portion 72 diminishes.

Thus, due to suppressing power line 51 to distort because linking the rotation of axle portion 23b, it is possible to reducing 51 institute of power line The mechanicalness load born.

It is as described above, according to the effect that the sputter equipment of the 3rd embodiment can obtain being exemplified below.

(4) due to suppressing the 1st power line 51A and the 2nd power line 51B respectively because of the rotation of oscillation center axle portion 23a Distortion, it is possible to reducing the mechanicalness load that the 1st power line 51A and the 2nd power line 51B is respectively subjected to.

(5) due to suppressing the 1st power line 51A and the 2nd power line 51B to distort because linking the rotation of axle portion 23b respectively, It is possible to reducing the mechanicalness load that the 1st power line 51A and the 2nd power line 51B is respectively subjected to.

In addition, the 3rd embodiment can also suitably be changed in such a way and be implemented.

1st power line 51A and the 2nd power line 51B can also be respectively does not possess the composition for linking flexible portion 72, even Knot rigid section 51a2 can also be the composition being connected with link translation part 71 respectively.Even such composition, as long as the 1st electric power Line 51A and the 2nd power line 51B are possess the composition for swinging flexible portion 62 respectively, it becomes possible to obtain being equal to the effect of above-mentioned (4) Really.

1st power line 51A and the 2nd power line 51B can also be respectively does not possess the composition for swinging flexible portion 62, pendulum Dynamic rigid section 51a1 can also be the composition being connected with swing fixed part 61 respectively.Even such composition, as long as the 1st electric power Line 51A and the 2nd power line 51B is respectively possesses the composition for linking flexible portion 72, it becomes possible to obtain being equal to the effect of above-mentioned (5) Really.

Terminal (the hereinafter referred to as shared device for being formed as the ring-type centered on swinging axle P and being connected with shared device Connection terminal) can also be installed in by insulant on the end face of oscillation center axle portion 23a of swing arm 23.Also, In this composition, as long as the end of oscillation center axle portion 23a is close in adopting 2 ends on connection line 50 with can be along sharing The composition that the state of the circumferencial direction movement of equipment connection terminal is linked with shared device connection terminal.According to such structure Into the end of the connection line 50 being connected on shared device connection terminal can be suppressed to produce with the swing of swing arm 23 Deformation.

The end for being formed as the ring-type centered on rotary shaft A and being connected with the cathode electrode unit 22 being configured in inside framework 21 Sub (hereinafter referred to as cathode electrode unit connection terminal) can also be installed in the link axle portion of swing arm 23 by insulant On the end face of 23b.Also, in this composition, as long as linking axle portion 23b using being close in 2 ends on connection line 50 Composition of the end can link with cathode electrode unit connection terminal along the state that the circumferencial direction of cathode electrode unit connection terminal is moved .According to such composition, the end of the connection line 50 being connected on cathode electrode unit connection terminal can be suppressed with pendulum The swing of swing arm 23 and be deformed.

1st power line 51A's and the 2nd power line 51B is respective in addition to conductor, it is also possible to include leading positioned at 2 Insulator, i.e. terminal board between body is used as composed component.Or, the 1st power line 51A and the 2nd power line 51B can also be Include insulator, the i.e. terminal between 1 conductor included positioned at composed component and the power supply outside framework 21 respectively Platform.

The composition of the 1st power line 51A and the 2nd power line 51B can also not be suitable for power line 51, and apply to All other routes, i.e. gas pipe 52 or cooling water pipe 53 that connection line 50 is included.

Sputter equipment can also be embodied as the structure described in the composition and the 3rd embodiment described in the 1st embodiment Into the composition of combination, according to such composition, it is also possible to which sputter equipment is embodied as the effect with the 1st embodiment and the The composition of the effect of 3 embodiments.

Sputter equipment can also be embodied as in the composition described in the 1st embodiment, the structure described in the 2nd embodiment Into and the 3rd embodiment described in composition combination composition.According to such composition, sputter equipment can be embodied as The composition of the effect with the 1st embodiment, the 2nd embodiment and the 3rd embodiment.

Claims

1. a kind of substrate board treatment, which possesses：

Framework；

Swing arm, which is the hollow single swing arm inside the framework, and the swing arm includes being connected with the framework Hollow oscillation center axle portion and the hollow link axle portion as swinging end；

Processing unit, which is located inside the framework, and in the process space with real estate pair, edge and the oscillation center axle portion The orthogonal direction movement in axial direction and the substrate enforcement is processed, the processing unit is making with the moving for processing unit The axle portion that links can be linked with the link axle portion with the mode of processing unit translation, by the movement of the processing unit And swung the swing arm；And

Connection line, which is located inside the swing arm, by inside the oscillation center axle portion with outside the framework Portion shared device connection, and by it is described link axle portion inside and be connected with the processing unit,

The processing unit possesses e axle supporting portion, and the e axle supporting portion is rotated relative to the processing unit with making the link axle portion Mode support the processing unit,

The swing arm possesses telescoping mechanism, and the telescoping mechanism makes the link axle portion relative to the oscillation center axle position Move, and make the oscillation center axle portion flexible with the distance between the link axle portion,

The telescoping mechanism so that the oscillation center axle portion with described link the distance between axle portion according to the oscillation center The distance between axle portion and the e axle supporting portion and the mode that changes makes the length linear change of the swing arm.

2. substrate board treatment according to claim 1, wherein,

The connection line is made up of multiple railway superstructures elements,

The plurality of railway superstructures element includes：

Rigid body distribution in the middle of 2, which is configured in the inside of the swing arm, and is separately fixed on the swing arm, so as to root According to the flexible of the swing arm carried out by the telescoping mechanism, and distance each other is made to stretch；And

Middle flexible circuit, which is configured in inside the swing arm, and is connected in the middle of described 2 between rigid body distribution, described Middle flexible circuit has pliability, makes deflection so as to correspond to the distance between rigid body distribution increase in the middle of described 2 Diminish.

3. substrate board treatment according to claim 1 and 2, wherein,

The oscillation center axle portion is set to cardinal extremity rotating part, and the cardinal extremity rotating part is with along the axial direction of the oscillation center axle portion Rotate relative to the framework centered on rotary shaft,

The connection line includes：

Cardinal extremity rotates distribution, and which is rigid body, and the cardinal extremity rotation distribution is fixed on the cardinal extremity rotating part, and follows the cardinal extremity rotation The rotation of transfer part and rotate；

Cardinal extremity permanent wiring, which is rigid body, and the cardinal extremity permanent wiring is fixed on the framework；And

The flexible circuit of cardinal extremity, which is can arrange in the way of deadweight bends, and is connected to the cardinal extremity rotation distribution and institute State between cardinal extremity permanent wiring, and increase corresponding to the distance between cardinal extremity rotation distribution and described cardinal extremity permanent wiring and Deflection is made to diminish.

4. substrate board treatment according to claim 1 and 2, wherein,

The link axle portion is set to top rotating part, and the top rotating part is with the rotation along the axial direction of the oscillation center axle portion Centered on axle, and rotate relative to the processing unit,

The connection line includes：

Top rotates distribution, and which is rigid body, and the top rotation distribution is fixed on the top rotating part, and as the top is revolved The rotation of transfer part and rotate；

Top translates distribution, and which is rigid body, and the top translation distribution is fixed on the processing unit, and with the shifting of the processing unit Move and translate with the processing unit；And

The flexible circuit in top, which is can arrange in the way of deadweight bends, and is connected to the top rotation distribution and institute State between top translation distribution, and rotate distribution corresponding to the top and top translation the distance between distribution increase and Deflection is made to diminish.

5. a kind of film formation device, which possesses：

Framework；

Film forming portion, which is located inside the framework, and in the process space with real estate pair, edge and the oscillation center axle portion Axial direction it is orthogonal direction movement, by towards the substrate release filmogen and form film on the substrate, it is described into Film portion link axle portion and film forming portion translation is enable to follow the moving for film forming portion in the way of with the company Knot axle portion links, and is swung the swing arm by the moving for film forming portion；And

Connection line, which is located inside the swing arm, by inside the oscillation center axle portion with outside the framework Portion shared device connection, and by it is described link axle portion inside and be connected with the film forming portion,

The film forming portion possesses e axle supporting portion, and the e axle supporting portion is rotated relative to the processing unit with making the link axle portion Mode support the processing unit,