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CN105552213B - A kind of method of regulation and control magneto-resistor ratio - Google Patents

A kind of method of regulation and control magneto-resistor ratio Download PDF

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CN105552213B
CN105552213B CN201510902153.XA CN201510902153A CN105552213B CN 105552213 B CN105552213 B CN 105552213B CN 201510902153 A CN201510902153 A CN 201510902153A CN 105552213 B CN105552213 B CN 105552213B
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magnetoresistance
ratio
current
magnetic field
external magnetic
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CN105552213A (en
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颜世申
田玉峰
梅良模
李欢欢
张昆
黄启坤
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Shandong University
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Abstract

一种调控磁电阻比值的方法,包括:1)在具有整流磁电阻器件的两端施加一个固定幅值的交流电流;2)同时,在所述交流电流的基础上耦合上一个直流电流I1,此时输出的交流电流信号存在I1的平移:i=I0sin(wt)+I1;3)检测所述器件随外磁场变化所产生的整流电压VH其中H代表外磁场的强度,T代表所述交流电流的周期;4)调节施加在所述器件上电流的直流分量I1的大小,从而调节整流电压VH的大小,最终调节磁电阻比值MR=(VH‑V0)/V0。本发明是利用所述于器件既具有整流磁电阻,又具有直流磁电阻,进而实现调节整流电压VH的大小,最终达到调节磁电阻比值的技术效果。

A method for controlling the magnetoresistance ratio, comprising: 1) applying an alternating current with a fixed amplitude at both ends of a rectifying magnetoresistance device; 2) simultaneously, coupling a direct current I on the basis of the alternating current , there is a translation of I 1 in the output AC current signal at this time: i=I 0 sin(wt)+I 1 ; 3) Detect the rectified voltage V H generated by the device as the external magnetic field changes: Wherein H represents the strength of the external magnetic field, and T represents the cycle of the alternating current; 4) adjust the size of the DC component I1 applied to the current on the device, thereby adjusting the size of the rectified voltage V H , and finally adjust the magnetoresistance ratio MR =(V H -V 0 )/V 0 . The present invention uses the device to have both rectification magnetoresistance and DC magnetoresistance, and further realizes the adjustment of rectification voltage V H , and finally achieves the technical effect of adjusting the ratio of magnetoresistance.

Description

一种调控磁电阻比值的方法A method of controlling the magnetoresistance ratio

技术领域technical field

本发明涉及一种调控磁电阻比值的方法,属于磁传感器以及磁电控制技术领域。The invention relates to a method for regulating the magnetoresistance ratio, and belongs to the technical field of magnetic sensors and magnetoelectric control.

背景技术Background technique

通常来说,磁电阻指的是电阻率随外磁场的变化而变化的现象。磁电阻的大小通常用MR=(RH-R0)/R0来衡量,其中RH为外磁场H下的电阻,R0为没有外磁场下的电阻。磁电阻效应在磁存储,磁传感器领域有巨大的应用前景。磁电阻越大,则制成的磁传感器越灵敏,信噪比也越高。由于受洛伦兹力的影响,所有的材料都有磁电阻效应,但是一般磁电阻很小,没有实际应用的价值。目前为止,各向异性磁电阻、巨磁电阻、隧穿磁电阻、庞磁电阻以及奇异磁电阻等具有较大磁电阻比值,并成功应用到磁传感器或磁读头领域。Generally speaking, magnetoresistance refers to the phenomenon that the resistivity changes with the change of the external magnetic field. The magnitude of the magnetoresistance is usually measured by MR=(R H -R 0 )/R 0 , where R H is the resistance under the external magnetic field H, and R 0 is the resistance without the external magnetic field. The magnetoresistance effect has great application prospects in the fields of magnetic storage and magnetic sensors. The larger the magnetoresistance, the more sensitive the magnetic sensor made and the higher the signal-to-noise ratio. Due to the influence of the Lorentz force, all materials have a magnetoresistance effect, but generally the magnetoresistance is very small and has no practical application value. So far, anisotropic magnetoresistance, giant magnetoresistance, tunneling magnetoresistance, colossal magnetoresistance, and singular magnetoresistance have large magnetoresistance ratios, and have been successfully applied to the field of magnetic sensors or magnetic read heads.

2015年山东大学自旋电子学课题组在Al/Ge肖特基结中成功发现了整流磁电阻效应,并申请了专利。不同于之前提到的各类磁电阻效应,整流磁电阻指的是输入一个纯的正弦交流电流,测量整流后的直流电压,该整流电压随着磁场显著变化的现象。该整流磁电阻被定义为:MR=(VH-V0)/V0,其中VH为外磁场H下的整流电压,V0为没有外磁场下的整流电压。Al/Ge肖特基结室温下的整流磁电阻效应高达200%,而其直流磁电阻仅有80%。整流磁电阻效应正是整流效应和磁电阻效应协同作用的结果。In 2015, the spintronics research group of Shandong University successfully discovered the rectifying magnetoresistance effect in the Al/Ge Schottky junction and applied for a patent. Different from the various magnetoresistance effects mentioned above, rectified magnetoresistance refers to the phenomenon that a pure sinusoidal AC current is input and the rectified DC voltage is measured. The rectified voltage changes significantly with the magnetic field. The rectified magnetoresistance is defined as: MR=(V H −V 0 )/V 0 , where V H is the rectified voltage under the external magnetic field H, and V 0 is the rectified voltage without the external magnetic field. The rectifying magnetoresistance effect of the Al/Ge Schottky junction at room temperature is as high as 200%, while its DC magnetoresistance is only 80%. The rectification magnetoresistance effect is the result of the synergy between the rectification effect and the magnetoresistance effect.

目前为止,不管采用何种磁电阻机制,磁电阻的大小是无法调控的。一旦样品被制备出来,磁电阻的比值就已经固定,这极大的限制了磁电阻的应用场景。鉴于以上情况,我们在整流磁电阻的基础上,通过调控直流电流和交流电流的成分比实现了调控磁电阻大小的目标。该调控方法可以应用到所有具有整流磁电阻效应的器件中,在磁传感器以及磁电调控领域有极大的应用前景。So far, no matter what kind of magnetoresistance mechanism is used, the magnitude of the magnetoresistance cannot be adjusted. Once the sample is prepared, the ratio of magnetoresistance is fixed, which greatly limits the application scenarios of magnetoresistance. In view of the above situation, on the basis of rectifying magnetoresistance, we achieved the goal of regulating the magnitude of magnetoresistance by adjusting the component ratio of DC current and AC current. The control method can be applied to all devices with rectifying magnetoresistance effect, and has great application prospects in the fields of magnetic sensors and magnetoelectric control.

发明内容Contents of the invention

针对现有技术的不足,本发明提供一种调控磁电阻比值的方法。本发明利用交流电流和直流电流共同作用来增大磁电阻比值,并提高磁传感器的信噪比和测量精度。Aiming at the deficiencies of the prior art, the present invention provides a method for regulating the magnetoresistance ratio. The invention utilizes the joint action of alternating current and direct current to increase the magnetoresistance ratio and improve the signal-to-noise ratio and measurement precision of the magnetic sensor.

本发明的技术方案如下:Technical scheme of the present invention is as follows:

一种调控磁电阻比值的方法,包括:A method for regulating the magnetoresistance ratio, comprising:

1)在具有整流磁电阻器件的两端施加一个固定幅值的交流电流,由于所述器件具有整流磁电阻,故所述器件产生一个随外磁场变化的整流电压;1) Apply an alternating current with a fixed amplitude to both ends of the rectifying magnetoresistance device, because the device has a rectifying magnetoresistance, so the device produces a rectifying voltage that varies with the external magnetic field;

2)同时,在所述交流电流的基础上耦合上一个直流电流I1,此时输出的交流电流信号存在I1的平移:i=I0Sin(wt)+I12) At the same time, a DC current I 1 is coupled on the basis of the AC current, and the output AC current signal at this time has a translation of I 1 : i=I 0 Sin(wt)+I 1 ;

3)检测所述器件随外磁场变化所产生的整流电压VH其中H代表外磁场的强度,T代表所述交流电流的周期;3) Detecting the rectified voltage V H generated by the device as the external magnetic field changes: Wherein H represents the intensity of the external magnetic field, and T represents the cycle of the alternating current;

4)调节施加在所述器件上电流的直流分量I1的大小,从而调节整流电压VH的大小,最终调节磁电阻比值MR=(VH-V0)/V0。本发明是利用所述器件既具有整流磁电阻,又具有直流磁电阻,进而实现调节整流电压VH的大小,最终达到调节磁电阻比值的技术效果。4) Adjusting the magnitude of the DC component I 1 of the current applied to the device, thereby adjusting the magnitude of the rectified voltage V H , and finally adjusting the magnetoresistance ratio MR=(V H −V 0 )/V 0 . The present invention uses the device to have both rectification magnetoresistance and DC magnetoresistance, and then realizes the adjustment of rectification voltage V H and finally achieves the technical effect of adjusting the ratio of magnetoresistance.

本发明的原理是:Principle of the present invention is:

在整流磁电阻的基础上,通过调节不同直流电流和交流电流的比例,由于直流磁电阻和交流磁电阻两者非线性耦合,通过直流磁电阻和交流磁电阻之间的竞争作用,从而调节整流电压随磁场的变化曲线,达到调控磁电阻比值的目的。On the basis of rectifying magnetoresistance, by adjusting the ratio of different DC currents and AC currents, due to the nonlinear coupling of DC magnetoresistance and AC magnetoresistance, the rectification is adjusted through the competition between DC magnetoresistance and AC magnetoresistance. The change curve of voltage with magnetic field can achieve the purpose of regulating the ratio of magnetoresistance.

基于此方法,在室温条件下,我们在硅基整流磁电阻器件中实现了高达2000%的磁电阻比值,与此同时其整流磁电阻仅为49.3%,直流磁电阻为66.1%。Based on this method, at room temperature, we have achieved a magnetoresistance ratio of up to 2000% in silicon-based rectifier magnetoresistive devices, while its rectifier magnetoresistance is only 49.3% and DC magnetoresistance is 66.1%.

理论上说,只要具有整流磁电阻,即可使用这种方法调控。整流磁电阻效应原则上可以在同时具有整流效应和磁电阻效应的PN结、肖特基结和非对称势垒的磁隧道结中实现。Theoretically, as long as it has rectifying magnetoresistance, it can be regulated by this method. The rectifying magnetoresistance effect can in principle be realized in a PN junction, a Schottky junction, and a magnetic tunnel junction with an asymmetric barrier, which have both a rectifying effect and a magnetoresistance effect.

本发明的优势在于:The advantages of the present invention are:

1、本发明所述调控磁电阻比值的方法能够提高磁电阻比值,提高传感器的测量精度和信噪比。在硅基肖特基器件中,本发明在室温实现了高达2000%的磁电阻比值。1. The method for regulating the magnetoresistance ratio of the present invention can increase the magnetoresistance ratio, and improve the measurement accuracy and signal-to-noise ratio of the sensor. In silicon-based Schottky devices, the present invention achieves a magnetoresistance ratio as high as 2000% at room temperature.

2、本发明所述调控磁电阻比值的方法具有通用性。能够应用到所有具有整流磁电阻效应的器件中。例如在基于硅和锗的肖特基结,PN结以及在非对称势垒的磁隧道结中。2. The method for regulating the magnetoresistance ratio of the present invention is universal. It can be applied to all devices with rectifying magnetoresistance effect. For example in Schottky junctions based on silicon and germanium, in PN junctions and in magnetic tunnel junctions with asymmetrical barriers.

3、本发明所述调控磁电阻比值的方法不需要高的工作电压(<1V),具有低功耗的优势。器件不会长时间处于高电压状态,使用寿命更长。3. The method for regulating the magnetoresistance ratio of the present invention does not require a high working voltage (<1V), and has the advantage of low power consumption. The device will not be in a high voltage state for a long time and has a longer service life.

4、本发明所述调控磁电阻比值的方法,交流和直流电混合在高频信号传输,金属电解以及微分电导测量等方面有重要的应用价值,因而直流和交流的混合是一种非常成熟的技术,只需要用电容和电阻等基础元件,电路连接简单。4. The method for regulating the magnetoresistance ratio of the present invention, the mixing of AC and DC has important application value in high-frequency signal transmission, metal electrolysis and differential conductance measurement, so the mixing of DC and AC is a very mature technology , only need to use basic components such as capacitors and resistors, and the circuit connection is simple.

5、本发明所述调控磁电阻比值的方法,是基于肖特基结、PN结等,与当今的半导体工艺相兼容,有助于大规模生产。5. The method for regulating the magnetoresistance ratio of the present invention is based on Schottky junctions, PN junctions, etc., compatible with today's semiconductor technology, and conducive to mass production.

附图说明Description of drawings

图1为硅基整流磁电阻器件的结构示意图,其中,所述电流方向垂直于该硅衬底,所述外部磁场方向同所述电流方向垂直;Fig. 1 is a schematic structural diagram of a silicon-based rectifying magnetoresistive device, wherein the direction of the current is perpendicular to the silicon substrate, and the direction of the external magnetic field is perpendicular to the direction of the current;

图2为300K的环境温度下,在硅基肖特基结中,固定交流电流的幅值为50μA,即I0=50μA;调节不同电流直流分量I1(-10μA~10μA),测得整流电压随磁场的变化曲线;Figure 2 shows that at an ambient temperature of 300K, in a silicon-based Schottky junction, the amplitude of the fixed AC current is 50μA, that is, I 0 =50μA; adjust the DC component I 1 (-10μA~10μA) of different currents, and measure the Variation curve of voltage with magnetic field;

图3为300K的环境温度下,磁电阻比值随着电流直流分量I1的变化图。最高实现了高达2000%的磁电阻比值。Fig. 3 is a diagram showing the variation of the magnetoresistance ratio with the current DC component I 1 at an ambient temperature of 300K. A magnetoresistance ratio of up to 2000% is achieved.

具体实施方式:detailed description:

下面结合实施例和说明书附图对本发明做详细的说明,但不仅限于此。The present invention will be described in detail below in conjunction with the embodiments and the accompanying drawings, but not limited thereto.

如图1-3所示。As shown in Figure 1-3.

实施例1、Embodiment 1,

一种调控磁电阻比值的方法,包括:A method for regulating the magnetoresistance ratio, comprising:

1)在具有整流磁电阻器件的两端施加一个固定幅值的交流电流i=I0sin(wt);由于所述器件具有整流磁电阻,故所述器件产生一个随外磁场变化的整流电压;1) Apply an alternating current i=I 0 sin (wt) of a fixed amplitude to both ends of the rectifying magnetoresistance device; since the device has rectifying magnetoresistance, the device produces a rectifying voltage that varies with the external magnetic field ;

2)同时,在所述交流电流的基础上耦合上一个直流电流I1,此时输出的交流电流信号存在I1的平移:i=I0sin(wt)+I12) At the same time, a DC current I 1 is coupled on the basis of the AC current, and the output AC current signal at this time has a translation of I 1 : i=I 0 sin(wt)+I 1 ;

3)检测所述器件随外磁场变化所产生的整流电压VH其中H代表外磁场的强度,T代表所述交流电流的周期;3) Detecting the rectified voltage V H generated by the device as the external magnetic field changes: Wherein H represents the intensity of the external magnetic field, and T represents the cycle of the alternating current;

4)调节施加在所述器件上电流的直流分量I1的大小,从而调节整流电压VH的大小,最终调节磁电阻比值MR=(VH-V0)/V0。本发明是利用所述于器件既具有整流磁电阻,又具有直流磁电阻,进而实现调节整流电压VH的大小,最终达到调节磁电阻比值的技术效果。4) Adjusting the magnitude of the DC component I 1 of the current applied to the device, thereby adjusting the magnitude of the rectified voltage V H , and finally adjusting the magnetoresistance ratio MR=(V H −V 0 )/V 0 . The present invention utilizes the device having both rectification magnetoresistance and DC magnetoresistance, and further realizes the adjustment of the magnitude of the rectification voltage V H , and finally achieves the technical effect of adjusting the magnetoresistance ratio.

对硅基整流磁电阻器件利用如实施例1所述调控磁电阻比值方法,使所述硅基肖整流磁电阻器件获得高达2000%的磁电阻比值。For the silicon-based rectifying magnetoresistance device, the method for controlling the magnetoresistance ratio as described in Embodiment 1 is used to obtain a magnetoresistance ratio of up to 2000% for the silicon-based rectifying magnetoresistance device.

应用例1、Application example 1,

在所述实施例1中,所述器件为硅基肖特基结,其具体处理方法包括:In the embodiment 1, the device is a silicon-based Schottky junction, and its specific processing methods include:

(1)将电阻率>1000Ω·cm,厚度为0.5mm的本征Si衬底用去离子水、酒精、丙酮、酒精分别超声10分钟,然后放入烘箱烘烤,温度设定100℃,时间为两个小时;将本征硅裁剪成3mm×3mm的方块;(1) Ultrasonic the intrinsic Si substrate with a resistivity > 1000Ω·cm and a thickness of 0.5mm with deionized water, alcohol, acetone, and alcohol for 10 minutes, and then put it into an oven to bake at 100°C, time It takes two hours; cut the intrinsic silicon into a 3mm×3mm square;

(2)将切好的方块放入浓度为0.2%的氢氟酸中除去在本征硅上自然氧化形成的大约2nm的二氧化硅层;(2) put the cut square into the hydrofluoric acid with a concentration of 0.2% to remove the silicon dioxide layer of about 2nm formed by natural oxidation on the intrinsic silicon;

(3)在方块形的衬底的上下两面焊接铟电极,通过控制烙铁焊接的时间不同,在硅衬底上形成两个不对称的肖特基势垒结,如图1所示;(3) Weld indium electrodes on the upper and lower sides of the square substrate, and form two asymmetric Schottky barrier junctions on the silicon substrate by controlling the welding time of the soldering iron, as shown in Figure 1;

(4)用Keithley 6221作为交流源接入器件两端,同时用Keithley 2182检测两端整流电压变化,超导量子干涉仪提供外部磁场环境,磁场与电流方向垂直;(4) Use Keithley 6221 as the AC source to access both ends of the device, and use Keithley 2182 to detect the rectified voltage change at both ends. The superconducting quantum interferometer provides an external magnetic field environment, and the magnetic field is perpendicular to the direction of the current;

(5)固定Keithley 6221输出的交流振幅为50μA,即I0=50μA,调节电流源的零点漂移(offset),即在交流信号上叠加一个直流信号I1,范围从-10μA到10μA。测得不同直流分量I1下,整流电压随外部磁场的变化曲线,如图2所示;(5) Fix the AC amplitude of the Keithley 6221 output to 50μA, that is, I 0 =50μA, and adjust the zero point drift (offset) of the current source, that is, superimpose a DC signal I 1 on the AC signal, ranging from -10μA to 10μA. The curves of the rectified voltage changing with the external magnetic field are measured under different DC components I 1 , as shown in Figure 2;

图3为本实例在300K温度下,不同I1直流分量下的磁电阻大小。从图3中得到,当I1=1.53μA时磁电阻比值达到最大,为2000%;其纯的整流磁电阻,即I1=0时,磁电阻比值为49.3%;其直流磁电阻为66.1%。尽管直流磁电阻比整流磁电阻大,但是通过直流和交流混合的方式,将磁电阻增大40倍,这将在磁传感器以及磁电控制领域有广泛的应用前景。Figure 3 shows the magnetoresistance of this example under different I 1 DC components at a temperature of 300K. It can be obtained from Fig. 3 that when I 1 =1.53μA, the magnetoresistance ratio reaches the maximum, which is 2000%; its pure rectifying magnetoresistance, that is, when I 1 =0, the magnetoresistance ratio is 49.3%; its DC magnetoresistance is 66.1 %. Although the DC magnetoresistance is larger than the rectified magnetoresistance, the magnetoresistance can be increased by 40 times by mixing DC and AC, which will have a wide application prospect in the field of magnetic sensors and magnetoelectric control.

应用例2、Application example 2,

在所述实施例1中,所述器件为锗基肖特基结,其具体处理方法包括:In said embodiment 1, said device is a germanium-based Schottky junction, and its specific processing methods include:

(1)将电阻率55.6-59.4Ω·cm,厚度为0.5mm的本征Ge衬底用去离子水、酒精、丙酮、酒精分别超声10分钟,然后放入烘箱烘烤,温度设定100℃,时间为两个小时;(1) Ultrasonicate the intrinsic Ge substrate with a resistivity of 55.6-59.4Ω cm and a thickness of 0.5mm with deionized water, alcohol, acetone, and alcohol for 10 minutes, and then put it into an oven to bake at a temperature of 100°C , the time is two hours;

(2)将本征锗衬底放入磁控溅射仪腔室,溅射生长100nm的铝电极,形成Al/Ge肖特基接触界面;(2) Put the intrinsic germanium substrate into the magnetron sputtering chamber, and sputter and grow a 100nm aluminum electrode to form an Al/Ge Schottky contact interface;

(3)将生长完铝电极的锗衬底取出,用超声切片仪裁切成直径3mm的圆形;(3) Take out the germanium substrate that has grown the aluminum electrode, and cut it into a circle with a diameter of 3mm with an ultrasonic slicer;

(4)锗衬底的另一面焊接铟电极,形成欧姆接触;(4) The other side of the germanium substrate is welded with an indium electrode to form an ohmic contact;

(5)用Keithley 6221作为交流源接入器件两端,同时用Keithley 2182检测两端整流电压变化,超导量子干涉仪提供外部磁场环境,磁场与电流方向垂直;(5) Use Keithley 6221 as the AC source to access both ends of the device, and use Keithley 2182 to detect the rectified voltage change at both ends. The superconducting quantum interferometer provides an external magnetic field environment, and the magnetic field is perpendicular to the direction of the current;

(6)固定Keithley 6221输出的交流振幅为0.1mA,调节电流源的零点漂移(offset),即在交流信号上叠加一个直流信号I1,范围从-5μA到20μA;测得不同I1下,整流电压随外磁场的变化曲线;(6) Fix the AC amplitude output by Keithley 6221 to 0.1mA, adjust the zero point drift (offset) of the current source, that is, superimpose a DC signal I 1 on the AC signal, ranging from -5μA to 20μA ; Variation curve of rectified voltage with external magnetic field;

在300K温度下,当I1=5.228uA时磁电阻比值达到最大,为32500%,远远高于其整流磁电阻(120%)和直流磁电阻(45%)。At a temperature of 300K, when I 1 =5.228uA, the magnetoresistance ratio reaches the maximum, which is 32500%, which is much higher than its rectifying magnetoresistance (120%) and DC magnetoresistance (45%).

总之,在整流磁电阻的基础上,通过该交流和直流混合来调控磁电阻比值的方法,能够极大的增大磁电阻比值,可以应用到磁传感器领域,提高测量的精度和信噪比,为开发新一代磁传感器提供了依据。此外,该发明的创新不仅仅在于能够增大磁电阻比值,而是能动态调节磁电阻的大小,可以令器件的磁电阻比值处于任何的范围内,在磁电调控领域有重大的应用前景。最后,该发明还具有通用性,在所有具有整流磁电阻的器件中都可以应用,不受器件本身原理限制。例如在具有磁电阻的肖特基结、PN结以及非对称势垒的磁隧道结中都能用此发明调控磁电阻比值。In short, on the basis of rectified magnetoresistance, the method of adjusting the magnetoresistance ratio by mixing the AC and DC can greatly increase the magnetoresistance ratio, which can be applied to the field of magnetic sensors to improve the measurement accuracy and signal-to-noise ratio. It provides a basis for the development of a new generation of magnetic sensors. In addition, the innovation of this invention is not only to increase the magnetoresistance ratio, but to dynamically adjust the magnitude of the magnetoresistance, so that the magnetoresistance ratio of the device can be in any range, which has great application prospects in the field of magnetoelectric control. Finally, the invention is also versatile, and can be applied to all devices with rectifying magnetoresistance, and is not limited by the principle of the device itself. For example, the invention can be used to control the magnetoresistance ratio in Schottky junctions, PN junctions and asymmetric barriers with magnetoresistance.

Claims (1)

  1. A kind of 1. method of regulation and control magneto-resistor ratio, it is characterised in that this method includes:
    1) alternating current of a fixed amplitude is applied at the both ends with rectification magneto-resistance device;
    2) a DC current I simultaneously, is coupled on the basis of the alternating current1, the ac current signal now exported deposits In I1Translation:I=I0sin(wt)+I1
    3) detect the device with external magnetic field change caused by commutating voltage VHWherein H The intensity of external magnetic field is represented, T represents the cycle of the alternating current;
    4) regulation is applied to the DC component I of electric current on the device1Size, so as to adjust commutating voltage VHSize, finally Adjust magneto-resistor ratio MR=(VH-V0)/V0
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